TW200931553A - Image-capturing device of the optical detection equipment for cleaving wafer - Google Patents
Image-capturing device of the optical detection equipment for cleaving wafer Download PDFInfo
- Publication number
- TW200931553A TW200931553A TW97101097A TW97101097A TW200931553A TW 200931553 A TW200931553 A TW 200931553A TW 97101097 A TW97101097 A TW 97101097A TW 97101097 A TW97101097 A TW 97101097A TW 200931553 A TW200931553 A TW 200931553A
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- image
- image capturing
- component
- capturing device
- Prior art date
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW97101097A TW200931553A (en) | 2008-01-11 | 2008-01-11 | Image-capturing device of the optical detection equipment for cleaving wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW97101097A TW200931553A (en) | 2008-01-11 | 2008-01-11 | Image-capturing device of the optical detection equipment for cleaving wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200931553A true TW200931553A (en) | 2009-07-16 |
TWI353032B TWI353032B (es) | 2011-11-21 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW97101097A TW200931553A (en) | 2008-01-11 | 2008-01-11 | Image-capturing device of the optical detection equipment for cleaving wafer |
Country Status (1)
Country | Link |
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TW (1) | TW200931553A (es) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI447829B (es) * | 2011-10-12 | 2014-08-01 | ||
TWI498990B (zh) * | 2012-12-19 | 2015-09-01 | Genesis Photonics Inc | 劈裂裝置 |
-
2008
- 2008-01-11 TW TW97101097A patent/TW200931553A/zh not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI447829B (es) * | 2011-10-12 | 2014-08-01 | ||
TWI498990B (zh) * | 2012-12-19 | 2015-09-01 | Genesis Photonics Inc | 劈裂裝置 |
Also Published As
Publication number | Publication date |
---|---|
TWI353032B (es) | 2011-11-21 |
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MM4A | Annulment or lapse of patent due to non-payment of fees |