200926340 九、發明說明 【發明所屬之技術領域】 本發明，是有關一種載台裝置，具有在搭載了基板的 基台上可朝一軸方向移動的高架部。 【先前技術】 以往’使用於液晶面板或半導體等的各種基板的製造 © 等的載台裝置’已知例如專利文獻1。此載台裝置，是具 備：將罐材連結構築成框狀製罐構造的基台、及設置於基 台的兩側的一對的導引軌道、及沿著這些導引軌道被導引 的一對導引滑件、及横架於一對的導引滑件之間的樑。 樑，是沿著導引軌道移動，藉由搭載於此樑的照相機或維 修裝置等’檢出基板的缺陷並且進行修復。基台，是隔著 除振組件被支撐於架台上》且基台，是藉由平行架設於框 內的補強罐被補強。基台，是隔著除振組件被支撐於架台 © 上 在此載台裝置中，設有纜線載體。在樑中，連接：供 給供控制沿著樑本身或樑移動的滑件用電力的電力纜線、 或在與附設於滑件的處理裝置之間送收訊各種訊號用的訊 號纜線等。這些纜線，是通過纜線載體配線。這時，爲了 縮小寬度方向的尺寸，纜線載體是配置於基台的下方。而 且，在纜線載體及樑之間設置連結構件，將來自纜線載體 的纜線導引至樑。 [專利文獻1]日本特開2006-269509號公報 200926340 【發明內容】 [發明的揭示] (本發明所欲解決的課題） 但是，在上述習知的載台裝置中，因爲在基台 配置纜線載體，所以在該部分無法配置除振組件或 此設計的自由度低。 本發明，是鑑於上述狀況，其目的爲提供一種 〇 置，對於基台下的構造可提高設計的自由度並抑 化。 (解決上述課題的手段） 本發明的載台裝置，是具備基台、及在前述基 一軸方向可移動地設置的高架部，其特徵爲，具備 朝前述基台的側方伸出且沿著前述一軸方向延伸且 導引前述高架部的移動的導引軌道之高架部支撐台 置於前述基台的側方的前述高架部支撐台的下方並 〇 述高架部的移動而變形之纜線載體。 如此，因爲在基台的側方設置纜線載體，對於 的構造可以提高設計的自由度。且，藉由朝基台的 出的方式設置高架部支撐台，除了可縮小基台的寬 爲可以在基台的側方的高架部支撐台的下方設置 體，所以可以抑制大型化。 前述纜線載體，是支撐朝前述高架部的纜線用 述高架部及前述纜線載體之間設有導引前述纜線用 構件，前述連絡構件及前述纜線載體的連結點，是 的下方 柱，因 載台裝 制大型 台上朝 =設成 設有供 、及設 追從前 基台下 側方伸 度，因 纜線載 ，在前 的連絡 位於構 -5- 200926340 成與前述高架部相面對的前述基台的框體的側方也可以。 如習知技術，在基台的下方配置纜線載體的話，設置於纜 線載體及高架部之間的連絡構件因爲變長，所以振動產生 容易，並有使外亂變大的可能。對於此，藉由如上述的結 構，可縮短連絡構件的長度並抑制振動的發生，可以抑制 因外亂所產生的影響。 在前述高架部支撐台的下面及前述基台的側面之間設 © 有補強肋也可以。如此的話，可以提高高架部支撐台的剛 性。 前述基台，是具有將該基台在水平方向分割成複數塊 體用的分割部也可以。如此的話，即使隨著基板的大型化 使基台大型化，不需使用特殊的大型車輛就可分割供運送 基台。 在前述高架部支撐台的下面及前述基台的側面之間設 有補強肋，前述基台，是具有將該基台在水平方向分割成 ® 複數塊體用的分割部，前述分割部的前述塊體彼此的連 結，是藉由前述補強肋進行也可以。如此藉由補強肋連 結，塊體彼此可以強力且容易連結。且，習知的平台構造 的情況，若欲分割的話有需要將連結用的凸緣朝平台的側 面伸出，有橫方向的尺寸變大的問題，但是在本實施例 中，因爲可以抑制補強肋是比突出片更朝側方伸出，所以 可以抑制大型化。 [發明的效果] -6- 200926340 依據本發明，可提供一種載台裝置，對於基台下的構 造可提高設計的自由度並抑制大型化。 【實施方式】 以下’參照添付圖面說明本發明的實施例。又，對於 圖面的說明的同一要素是附加同一的符號，省略重複說 明。 ❹ [第1實施例] 第1圖是本發明的第1實施例的載台裝置1的立體 圖，第2圖是將具備第1圖的載台裝置1從基台上方所見 的立體圖’第3圖將基台從下方所見的立體圖，第4圖是 連結了連結材的基台的下部框架被除振組件支撐狀態的立 體圖。 如第1圖所不’載台裝置1，是具備：搭載有基板的 〇 基台10、及移動於基台10上的高架部30、及設置於基台 10供導引高架部30的移動用的導引軌道40及永久磁鐵 42、及設置於高架部30的下部被導引軌道40導引的導引 滑件44及與永久磁鐵42相面對的電磁鐵48，此高架部 30是沿著導引軌道40移動。又，在第1圖中，基台1〇 的長度方向爲Y軸方向，與其相互垂直的水平方向爲χ 軸方向，與這些相互垂直的方向爲Ζ軸方向。 基台10’是具有：上部框架12、及與上部框架丨2上 下分離設置的下部框架22、及連結上部框架12及下部框 200926340 架22的連結材18。 上部框架12，是在藉由連結各朝X軸方向延伸的罐 材12a、12b、及朝Y軸方向延伸的罐材12c、12d而形成 矩形狀的框體的內側，藉由複數補強材14a、14b、14c、 14d補強的結構。在此，罐材12a、12b、12c、12d是中 空的棒材，在本實施例是利用剖面口狀的口型（方型）鋼。 且，補強材 14a、14b、14c、14d，不論是中空或中實皆 〇 是横架框體內側的棒材，在本實施例中利用剖面Η狀的Η 型鋼及剖面口狀的口型鋼。 在此，雖詳細如後述，但是基台10是在長度方向的 水平方向可分割成複數塊體（在此爲2塊體），朝上部框架 12的Υ軸方向延伸的罐材12c、12d是在途中被切斷，且 設有分割部1 6。而且，對於從前方側及後側挾持分割部 16的各塊體，在切斷部分的罐材12c、12d之間，朝X軸 方向延伸的方式横架由口型鋼組成的補強材14a。 © 而且，在由罐材12a及罐材12c、12d及補強材14a 所形成的前方的框內，由Η型鋼構成的補強材14b，是與 罐材12c、12d平行架設，並且與罐材12a及補強材14a 平行架設。且，由Η型鋼構成的補強材14c，是對於罐材 12a、12c、12d及補強材14a呈傾斜對角狀横架。因此， 補強材14b’ 14c是成爲在中央的一點交叉，並從此放射 狀延伸的狀態。 且，在由罐材12c、12d及罐材12b及補強材14a所 形成的後面的框內’由H型鋼構成的補強材14d，是對於 -8- 200926340 罐材1 2 b、1 2 c、1 2 d及補強材1 4 a傾斜横架。 下部框架22，是在藉由分別連結朝X軸方向延伸的 罐材22a、22b、及朝Y軸方向延伸的罐材22c、22d而形 成矩形狀的框體的內側，藉由補強材24b所補強的結構。 罐材22a、22b、22c、22d的徑，是比上部框架12的罐材 12a、12b、12c、12d小。由口型鋼構成的補強材24b，是 在罐材22c、22d的長度方向的中央部，横架於X軸方 © 向。 在此，如前述，基台1〇是在長度方向的水平方向可 分割成複數塊體（在此爲2塊體），下部框架22的朝γ軸 方向延伸的罐材22c、22d是在途中被切斷，並設有分割 部26。 連結材18，是在Z軸方向分離的狀態下，連結上部 框架12及下部框架22。在本實施例中，連結材18是由 口型鋼的罐材所構成，在四角連結上部框架12及下部框 © 架22。進一步，爲了提高剛性，而在上下的罐材12c、 2 2 c之間，在分割部1 6、2 6的前方側，朝Z軸方向延伸 的如在口型鋼組成連結材18是架設。且，在上下的罐材 22d、22d間中，在分割部16、26的前方側，朝Z軸方向 延伸地架設由口型鋼構成連結材1 8。 除振組件50，是設在載台裝置1的設置面及基台10 之間。更詳細的話，除振組件50，是在下部框架22的四 角、及罐材22c、22d的途中的下部，可除振地支撐基台 10。除振組件50，是供去除從設置面傳遞至基台10的振 -9 - 200926340 動，可以使用例如由空氣彈簧或橡膠等的彈性材所構成 者。 導引軌道40，是分別設在罐材12c、12d的上面，朝 Y軸方向延伸。更詳細的話，在罐材12c、12d的上面， 朝向外側方設有突出片（導引軌道支撐台）52’此突出片52 是朝Y軸方向連續延伸。而且’在此突出片52的上面’ 設有導引軌道40。且，永久磁鐵42’是對於突出片52的 © 上面被設在比導引軌道40更鄰接於外側的位置’並朝Y 軸方向延伸。此永久磁鐵42’是在Y軸方向返覆S極及 N極的預定模式。 在導引軌道40及永久磁鐵42的上方’配置有與朝X 軸方向延伸的高架部30的兩側的下部連結的連結板40’ 在此連結板46的下面分別鄰接設有導引滑件44及電磁鐵 48。電磁鐵48，是配合永久磁鐵42的S極及N極的模式 變化磁極，藉由在永久磁鐵42之間發生反抗力可以一邊 〇 由導引軌道40導引高架部30 —邊朝Y軸方向移動。 又，在突出片52的下面，架設於與罐材12c、12d的 外側面之間的複數補強肋54是設成在Y軸方向隔有預定 間隔，使剛性提高。 高架部30，是具備：朝X軸方向延伸的支撐部30a、 線形馬達部3 Ob及移動部3 0c。移動部3 0c可藉由線形馬 達部30b沿著該線形馬達部30b朝X軸方向移動。而 且，藉由在此移動部3 0c附設預定的處理裝置’使處理裝 置是朝X軸方向移動，對於被搭載於基台10的基板實行 -10- 200926340 預定的處理。此處理裝置，可以是：檢查基板上的缺陷的 照相機、修復濾色板的色脫落等的基板的表面處理狀態的 維修裝置、對於基板進行模式處理的塗抹裝置。 如第5圖所示，在載台裝置1的基台1〇上，設有供 載置液晶面板等的基板用的工件壓板11。又，由運送車 運送載台裝置1時，在設有此工件壓板11的狀態積載於 運送車。 〇 在本實施例中，是如第5圖所示，基台10、導引軌 道40、永久磁鐵42、突出片52及工件壓板11，是由與 Y軸方向垂直的分割面所分割。而且，分割基台10，是 在分割部1 6、2 6藉由螺絲等連結。即，在分割部2 6 (1 6) 中，如第6圖所示，設有將切斷罐材22c(12c)的切斷面圍 起來並向外的凸緣26a(16a)，通過此向外的凸緣26a(16a) 連結被分割的基台10的塊體彼此。又，在上部框架12的 分割部16中，補強肋54是兼具向外的凸緣16a。由此， ® 透過補強肋54，藉由螺絲旋緊等使塊體彼此可強力且容 易地連結。 如此，基台10、導引軌道40、永久磁鐵42、突出片 52及工件壓板11因爲是在Y軸方向可分割的結構，所以 載台裝置1可分割成2個塊體。又，分割部16、26,是 對於上下的Z軸方向設在對應的位置，對於γ軸方向各 塊體是形成於可積載於運送車的大小的位置。 且，在基台10的兩側方的突出片52的下方，是如第 1圖及第7圖所示，設有纜線載體60。在高架部30中， -11 - 200926340 連接：供給供控制高架部30本身或移動部30c的移動用 的電力的無圖示電力纜線、或在與附設於移動部30c的處 理裝置之間送收訊各種訊號用的無圖示訊號纜線等。這些 纜線，是通過纜線載體60地被配線。 纜線載體60，是連設扁平的複數筒材的，各筒材是 在相互限制的角度內可轉動自如地連結。匯集的纜線，是 通過此纜線載體60的內部。纜線載體60的一端60a，是 ❹ 固定在被設置於基台10的側方的支撐台62上。且，纜線 載體60的另一端60b，是固定於連絡構件64。連絡構件 64，是筒狀的構件並與高架部30及纜線載體60連結，將 來自纜線載體60的纜線導引至高架部30。 因此，如第8圖所示，纜線載體60是如履帶（日本註 冊商標）地可變形自如’高架部30隨著朝Y軸方向移動’ 於基台10的長度方向的任意的位置可彎曲成U字狀。而 且，通過纜線載體60內部的纜線，會順著纜線載體60的 〇 變形而變形。 如此，本實施例的載台裝置1中’藉由將纜線載體 60設在基台1〇的兩側方的突出片52的下方’就可與設 在基台10的內部的情況不同，罐材12c、22c之間或罐材 1 2 d、2 2 d之間的空間的利用的自由度提高，在此’可配 置連結材1 8及除振組件5 0 ’可以提高剛性及制振性。 且，藉由設置突出片52並且配置導引軌道40及永久磁鐵 42，就可縮小基台1 〇的寬度，並且可在基台1 〇的側方的 突出片5 2的下方設置纜線載體6 G ’所以可抑制大型化。 -12- 200926340 如習知技術’在基台的下方配置纜線載體的話，因爲 設在纜線載體及高架部之間的連絡構件會變長，所以容易 發生振動，有可能使外亂變大’但是本發明因爲是將連絡 構件64及纜線載體60的連結點設在與高架部3〇相面對 的上部框架1 2的側方（即上部框架1 2的側方的高度位 置）’所以可以縮短連絡構件64的Z軸方向的長度，可以 降低由外亂的影響所造成的基台10的振動。 © 且’基台10 ’是因爲具有將基台10在水平方向分割 成複數塊體用的分割部16、26，所以即使隨著基板的大 型化使基台10大型化’也不需使用特殊的大型車輛就可 將基台10分割運送。且，將構成基台1〇的罐材12c、 1 2d、2 2c、22d機械加工時，因爲可各分割部分分別進 行’所以機械加工容易進行。 且’分割基台1 0的情況，基台1 0是由罐材構成的 話，接合面的剛性低，高架部3 0的驅動時有產生變形的 ¥ 可能性’但是本實施例的基台10因爲是盒構造，配合上 部框架12及下部框架22中的上下的接合面的話，接合面 會增加，可以降低產生變形的可能性，成爲有利於基台 1 〇的分割的構造。 且，分割部16、26，因爲是將構成上部框架12及下 部框架22的罐材在上下對應位置切斷的結構，所以設置 於上部框架12及下部框架22的分割部16、26是藉由上 下方向分離，可對於讓分割面脫落的力矩進行強化，在剛 性上有利。 -13- 200926340 且，在罐材的切斷面中因爲設置向外的凸緣 26a，所以被分割的塊體彼此透過向外的凸緣16a、 由螺絲等可以容易相互連結。 又，在突出片52的下面設有架設於罐材12c、 外側面之間的複數補強肋54，分割的基台1 0，也 此補強肋54連結。在此，習知的平台構造的情況 分割的話，連結用的凸緣有需要設成伸出平台的側 〇 有橫方向的尺寸變大的問題，但是在本實施例中， 以抑制補強肋54或分割部1 6、26比突出片52更 伸出，所以可以抑制大型化。 且，因爲在上部框架12的框內以傾斜方向架 材14c、14d，所以與在框內平行架設的補強材的 比可以充分地提高基台1 0的剛性。即，可以提高 架部13及其搭載裝置同時移動時可能發生的基台 轉剛性。 V 且’因爲基台10具有上部框架12及下部框g 並將其由連結材18連結成盒構造，所以雖由罐材 達成輕量化’但仍可提高剛性。因此，即使因爲 30的移動而承受負荷使除振組件5〇下沈而導致g 傾斜，也可抑制基台10本身的變形，高架部3 0 1〇的相對位置的誤差非常小，可正確地處理基板 因爲不需要等待基台10的變形回復至原形爲止就 基板的處理，處理量不會下降。 又’在此’雖只有在上部框架12的框內朝傾 16a、 26a藉 12d的 是透過 ，若欲 面，而 因爲可 朝側方 設補強 情況相 對於高 10的扭 ^ 22 > 構成並 高架部 i台 ίο 及基台 。且， 可進行 斜方向 -14 - 200926340 設置補強材，但是在下部框架22的框內朝傾斜方向設置 補強材也可以。 且’連結材18雖由口型鋼構成，將上部框架12及下 部框架22的四角等連結的結構，但是連結材18不限定於 口型鋼，例如藉由板材將上部框架12及下部框架22包圍 而連結的結構也可以。 且，如第9圖所示，上部框架12的分割部16的向外 Ο 的凸緣16a、及下部框架22的分割部26的向外凸緣26a 爲一體構造也可以。如此的話，可以更提高基台1 0的剛 性。 [第2實施例] 接著，說明本發明的第2實施例。又，與上述第1實 施例同一的要素使用同一符號，省略重複說明。 第10圖，是本發明的第2實施例的載台裝置ιοί的 側面圖，第11圖是將具備第1〇圖的載台裝置101的基台 110從上方所見的立體圖，第12圖是將基台110從下方 所見的立體圖，第1 3圖，是將分割的基台11 0的後側的 塊體從上方所見的立體圖，第14圖是連結有連結材118 的基台110的下部框架122的立體圖，第15圖是架台 170及除振組件150的立體圖。 此第2實施例與第1實施例的相異點，是藉由架台 170支撐基台110的點、及因此變更基台110的結構的 點。 -15- 200926340 如第10圖所示，載台裝置101，是具備：搭載有基 板的基台1 1 0、及移動於基台1 1 0上的高架部1 3 0、及設 置於基台1 10供導引高架部130移動的導引軌道140及永 久磁鐵142、及設置於高架部130的下部被導引至導引軌 道140的導引滑件144及與永久磁鐵142相面對的電磁鐵 146，此高架部130是沿著導引軌道140移動。又，在第 10圖中，基台110的長度方向爲Y軸方向，與其垂直的 〇 水平方向爲X軸方向，與這些垂直的方向爲Z軸方向。 基台110，是具有：上部框架112、及與上部框架 112上下分離設置的下部框架122、及連結上部框架112 及下部框架122的連結材118。 上部框架112，是在藉由分別連結朝X軸方向延伸的 罐材112 a、U2b、及朝Y軸方向延伸的罐材112c、112d 而形成矩形狀的框體的內側，由複數補強材 U4a、 114b、114c、114d補強而構成。在此，罐材 112a、 O 112b、112c、U2d是中空的棒材，在本實施例中是使用 剖面口狀的口型鋼。且，補強材114a、114b、114c、 114d，是無論中空或中實皆横架於框體的內側的棒材，在 本實施例中使用剖面Η狀的Η型鋼及剖面口狀的□型 鋼。 在此，雖詳細如後述，基台110在長度方向的水平方 向可分割成複數塊體（在此爲2塊體），上部框架112的朝 Υ軸方向延伸的罐材112c、112d是在途中被切斷，並設 有分割部1 1 6。而且，對於各別挾持分割部1 1 6的前方側 -16- 200926340 及後側的塊體，在切斷部分的罐材1 12c、1 12d之間，朝 X軸方向延伸地横架由口型鋼構成之補強材114a。 而且，在由罐材112a及罐材112c、112d及補強材 114a所形成的前方的框內，由 Η型鋼構成的補強材 114b，是與罐材112c、112d平行地架設，並且與罐材 1 12.a及補強材1 14a平行地架設。且，由Η型鋼構成的 補強材114c，是對於罐材112a、112c、112d及補強材 〇 1 14a呈傾斜對角狀地横架。因此，補強材1 Mb，1 14c是 成爲由中央的一點交叉並從此放射狀延伸的狀態。 且，在由罐材 112c、112d及罐材 112b及補強材 114a所形成的後方的框內，由 Η型鋼構成的補強材 114d，是對於罐材112b、112c、U2d及補強材114a傾斜 地横架。 下部框架1 22，是在藉由分別連結朝X軸方向延伸的 罐材122a、122b、及朝Y軸方向延伸的罐材122c、122d 〇 而形成矩形狀的框體的內側，藉由複數補強材124a、 124b、124c 所補強的結構。罐材 122a、122b、122c、 122d的徑，是比上部框架12的罐材112a、112b、112c、 1 1 2 d 小。 在此，如前述，基台110是在長度方向的水平方向可 分割成複數塊體（在此爲2塊體），下部框架122的朝Y軸 方向延伸的罐材122c、122d是在途中被切斷，並設有分 割部126 »而且，對於分割部1 26前方側的塊體，在切斷 部分的罐材122c、122d之間，朝X軸方向延伸地横架由 -17- 200926340 口型鋼構成的補強材124a。 且，在由罐材 122a及罐材 122c、112d及 124a所形成的前方的框內，由 Η型鋼構成的 124b，是與罐材 122c、122d平行地架設，並且 122a及補強材124a平行地架設。且，由Η型鋼構 強材124c，是對於罐材122a、122c、122d及補強 呈傾斜對角狀地横架。因此，補強材124b，124c 〇 由中央的一點交叉，並從此放射狀延伸的狀態。 且，下部框架122，是沿著上部框架112的外 角凹陷的略矩形狀。後述架台170的支柱178，是 凹陷119從下方支撐上部框架112的四角。 連結材118，是在Ζ軸方向分離的狀態下，連 框架112及下部框架122。在本實施例中，連結材 由口型鋼的罐材所構成，將上部框架112及下部框 在四角附近連結。 ® 架台170，是如第15圖所示，在藉由分別連 軸方向延伸的罐材172a、172b、及朝 Υ軸方向延 材172c、172d而形成的矩形狀的框體的內側，藉 補強材174a、盤74b所補強的結構。在此，罐材 172b、172c、172d是中空的棒材，在本實施例中 面口狀的口型鋼。且，補強材174a、174b，無論 或中實皆是横架框體內側的棒材，在本實施例中使 口狀的口型鋼。 在此，如前述基台110是在長度方向的水平方 補強材 補強材 與罐材 成的補 材 124a 是成爲 形但四 通過此 結上部 118是 :架 122 結朝X 伸的罐 由複數 172a、 使用剖 是中空 用剖面 向在的 -18- 200926340 複數塊體可分割成複數塊體（在此爲2塊體），並且架台 170也可分割成複數塊體。架台170的朝γ軸方向延伸的 罐材172c、172d是在途中被切斷，並設有分割部176。 而且，對於各別挾持分割部1 76前方側及後側的塊體，在 切斷部分的罐材1 72c、1 72d之間，朝X軸方向延伸地横 架由口型鋼構成的補強材174a。且，在前方側的框內， 進一步朝X軸方向延伸地横架由口型鋼構成的補強材 O 174a。且，在架台170的框內，朝Y軸方向延伸地横架由 口型鋼構成的補強材174b。此補強材174b是在途中被切 斷，並設有分割部176。 在架台170的四角中，朝Z軸方向延伸地設有支柱 178。除振組件150，是設置於架台170的支柱178的上 端及各罐材 172a、172b、172c、172d上。更詳細的話， 除振組件150，是在上部框架112的四角及架台170的支 柱 178的上端之間、及在各罐材 172a、172b、172c、 ® 172d的途中的上部及下部框架122的罐材122a、122b、 122c、122d之間，可除振地支撐基台1 10。除振組件 150,是供去除從設置面傳遞至基台110的振動，可以使 用例如由空氣彈簧或橡膠等的彈性材所構成者。 導引軌道1 40，是朝Y軸方向延伸。更詳細的話，在 罐材 1 1 2 c、1 1 2 d的上面設有朝向於外側方的突出片 152，此突出片152是朝Y軸方向連續延伸。而且，在此 突出片152的上面設有導引軌道140。且，永久磁鐵 142,是在突出片152的上面設在比導引軌道140更鄰接 -19- 200926340 於外側的位置，並朝Y軸方向延伸。此永久磁鐵142，是 在Υ軸方向返覆S極及Ν極的預定模式。 在導引軌道140及永久磁鐵142的上方，配置有與朝 X軸方向延伸的高架部130的兩側的下部連結的連結板 146，在此連結板146的下面，分別鄰接設置導引滑件 144及電磁鐵148。電磁鐵148，是配合永久磁鐵142的S 極及Ν極的模式變化磁極，可以藉由在永久磁鐵142之 〇 間發生的反抗力一邊將高架部130由導引軌道140導引一 邊朝Υ軸方向移動。 又，在突出片152的下面，架設於罐材 U2c、112d 的外側面之間的複數補強肋1 5 4是在Y軸方向隔有預定 間隔地設置，使剛性提高。 高架部 130，是具備：朝X軸方向延伸的支撐部 130a、線形馬達部13 0b及移動部130c。移動部130c，可 藉由線形馬達部13 0b沿著該線形馬達部13 0b朝X軸方 © 向移動。而且，藉由在此移動部130c附設預定的處理裝 置，使處理裝置朝X軸方向移動，並對於被搭載於基台 110的基板實行預定的處理。此處理裝置，可以是檢查基 板上的缺陷的照相機、修復濾色板的色脫落等基板的表面 處理狀態的維修裝置、對於基板進行模式處理的塗抹裝 置。 又，在載台裝置101的基台110上，與第1實施例同 樣，設有供載置液晶面板等的基板用的無圖示工件壓板。 又，由運送車運送載台裝置101時，在設置有此工件壓板 -20- 200926340 的狀態下 在本 道 140、 作台，是 割的基台 又，在上 向外的凸 〇 等使塊體 在此 用的凸緣 變大的問 154或分 以可以抑 如此 出片1 52 〇 的結構， 部 1 1 6、 置，所以 的大小的 且， 第10圖 130 中，； 的移動用 1 30c的读 積載於運送車。 實施例，是如第1〇圖所示，基台110、導 永久磁鐵142、突出片152、架台170及機 由與Y軸方向垂直的分割面所分割。而且 1 1 0，是在分割部1 1 6、1 26藉由螺絲等連 部框架1 1 2的分割部1 1 6中，補強肋1 5 4是 緣1 1 6 a。由此，透過補強肋1 5 4，藉由螺絲 彼此強力且容易地連結。 ，習知的平台構造的情況，若欲分割的話， 有需要設成伸出平台的側面，而有橫方向的 題，但是在本實施例中，因爲可以抑制補 割部1 16、126比突出片152更朝側方伸出 制大型化。 ，基台110、導引軌道140、永久磁鐵142 、架台170及工件壓板因爲是在Y軸方向可 所以載台裝置101可分割成2個塊體。又， 126、176，是在上下的Z軸方向設在對應 對於Y軸方向各塊體是形成於可積載於運 位置。 在基台110的兩側方的突出片152的下方， 及第16圖所示，設有纜線載體160。在高 建接：供給供控制高架部1 3 0本身或移動部 的電力的無圖示電力纜線、或在附設於移 I理裝置之間送收訊各種訊號用的無圖示訊 引軌 床工 ，分 結。 兼具 旋緊 連結 尺寸 強肋 ，所 、突 分割 分割 的位 送車 是如 架部 130c 動部 號纜 -21 - 200926340 線等。這些纜線’是通過纜線載體1 60地配線。 纜線載體160 ’是連設扁平的複數筒材，各筒材是在 相互限制的角度內可轉動自如地連結。匯集的纜線，是通 過此纜線載體160的內部。纜線載體160的一端160a， 是固定在被設置於基台110的側方的支撐台162上。且， 纜線載體160的另一端16 0b，是固定於連絡構件164。連 絡構件164，是筒狀的構件並與高架部130及纜線載體 〇 160連結，將來自纜線載體160的纜線導引至高架部 130° 因此，如第1 7圖所示，纜線載體1 60是如履帶（曰本 註冊商標）地可變形自如，隨著高架部130朝Y軸方向移 動，於基台11〇的長度方向的任意的位置可彎曲成U字 狀。而且，通過於纜線載體160的內部的纜線，會順著纜 線載體160的變形而變形。 如此，本實施例的載台裝置101中，藉由將纜線載體 © 160設在基台110的兩側方的突出片152的下方’與設置 於基台110的內部的情況不同，罐材112c、122c之間或 罐材1 12d、122d之間的空間的利用的自由度提高’在此 配置連結材118或除振組件150 ’可以提高剛性的提高或 制振性。且，因爲除了可縮小的基台110的寬度，並且在 基台110的側方的突出片152的下方可以設置纜線載體 1 6 0，所以可以抑制大型化。 且，如習知技術，在基台的下方配置纜線載體的話’ 設置於纜線載體及高架部之間的連絡構件因爲變長’振動 -22-[Technical Field] The present invention relates to a stage device having an elevated portion that is movable in a single axis direction on a base on which a substrate is mounted. [Prior Art] For example, Patent Document 1 is known as a stage device for manufacturing a substrate such as a liquid crystal panel or a semiconductor. The stage device includes a base for constructing a can structure of a can material, a pair of guide rails provided on both sides of the base, and guided along the guide rails. A pair of guide slides and a beam transversely disposed between the pair of guide slides. The beam is moved along the guide rail, and the defect of the substrate is detected and repaired by a camera or a repair device or the like mounted on the beam. The abutment is supported on the gantry via the vibration-isolating component, and the abutment is reinforced by a reinforcing tank that is erected in the frame in parallel. The abutment is supported on the gantry via the vibration isolation assembly. © In this stage device, a cable carrier is provided. In the beam, a connection is made to supply a power cable for controlling the power of the slider moving along the beam itself or the beam, or a signal cable for transmitting various signals between the processing device attached to the slider. These cables are wired through the cable carrier. At this time, in order to reduce the size in the width direction, the cable carrier is disposed below the base. Further, a connecting member is provided between the cable carrier and the beam to guide the cable from the cable carrier to the beam. [Patent Document 1] JP-A-2006-269509, JP-A-200926340 [Disclosure of the Invention] (Problems to be Solved by the Invention) However, in the above-described conventional stage device, since the cable is disposed on the base Line carrier, so the vibration isolation component cannot be configured in this part or the freedom of this design is low. SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a device which can improve the degree of freedom of design and suppress the structure under the base. (Means for Solving the Problem) The stage device according to the present invention includes a base and an elevated portion that is movably provided in the base-axis direction, and is provided to protrude toward the side of the base and along a support portion of the guide portion of the guide rail extending in the one-axis direction and guiding the movement of the elevated portion is placed below the above-mentioned elevated portion support table on the side of the base, and the cable carrier deformed by the movement of the elevated portion is described . Thus, since the cable carrier is disposed on the side of the base, the degree of freedom in design can be improved for the configuration. Further, by providing the overhead support table so as to be able to reduce the width of the base, it is possible to reduce the size of the base, and it is possible to prevent the increase in size by providing a body below the elevated support base on the side of the base. In the cable carrier, a cable member for guiding the cable to the elevated portion and the cable carrier is provided, and a connection point between the connection member and the cable carrier is provided below The column is installed on the large stage of the stage, and is provided with the supply and the extension of the lower side of the front abutment. Due to the cable loading, the former contact is located at the structure of the above-mentioned elevated section. The side of the frame of the aforementioned abutment facing each other may be used. According to the prior art, when the cable carrier is disposed under the base, the connecting member provided between the cable carrier and the elevated portion is lengthened, so that vibration is easily generated and the external disturbance is increased. With this configuration, the length of the contact member can be shortened and the occurrence of vibration can be suppressed, and the influence due to the disturbance can be suppressed. It is also possible to provide a reinforcing rib between the lower surface of the elevated portion support table and the side surface of the base. In this case, the rigidity of the support portion of the elevated portion can be improved. The base may have a divided portion for dividing the base into a plurality of blocks in the horizontal direction. In this case, even if the base plate is increased in size as the size of the substrate is increased, the base plate can be divided without using a special large vehicle. a reinforcing rib is provided between the lower surface of the elevated portion support table and the side surface of the base, and the base has a dividing portion for dividing the base into a plurality of blocks in the horizontal direction, and the dividing portion is the aforementioned The connection between the blocks may be performed by the reinforcing ribs described above. Thus, by the reinforcing ribs, the blocks can be strongly and easily connected to each other. Further, in the case of the conventional platform structure, if it is desired to divide, the flange for connection needs to protrude toward the side surface of the platform, and the size in the lateral direction becomes large. However, in the present embodiment, since the reinforcement can be suppressed Since the rib protrudes more laterally than the protruding piece, it is possible to suppress an increase in size. [Effects of the Invention] -6- 200926340 According to the present invention, it is possible to provide a stage device which can improve the degree of freedom of design and suppress the increase in size for the structure under the base. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The same elements in the description of the drawings are denoted by the same reference numerals, and the description thereof will not be repeated. [First Embodiment] Fig. 1 is a perspective view of a stage device 1 according to a first embodiment of the present invention, and Fig. 2 is a perspective view of a stage device 1 including a first figure viewed from above a base. The perspective view of the base is seen from below, and FIG. 4 is a perspective view showing the state in which the lower frame of the base to which the connecting material is connected is supported by the vibration isolating assembly. As shown in FIG. 1, the stage device 1 includes a crucible base 10 on which a substrate is mounted, an overhead portion 30 that is moved on the base 10, and a movement provided on the base 10 to guide the elevated portion 30. The guide rail 40 and the permanent magnet 42 and the guide slider 44 disposed at the lower portion of the elevated portion 30 are guided by the guide rail 40 and the electromagnet 48 facing the permanent magnet 42. The elevated portion 30 is Move along the guide track 40. Further, in Fig. 1, the longitudinal direction of the base 1〇 is the Y-axis direction, and the horizontal direction perpendicular to each other is the 轴-axis direction, and the direction perpendicular to each other is the Ζ-axis direction. The base 10' has an upper frame 12, a lower frame 22 that is separated from the upper frame 丨2, and a connecting member 18 that connects the upper frame 12 and the lower frame 200926340. The upper frame 12 is formed inside the rectangular frame by connecting the can bodies 12a and 12b extending in the X-axis direction and the can bodies 12c and 12d extending in the Y-axis direction, and the plurality of reinforcing members 14a are provided. , 14b, 14c, 14d reinforced structure. Here, the cans 12a, 12b, 12c, and 12d are hollow bars, and in the present embodiment, a port-shaped (square) steel having a cross-sectional shape is used. Further, the reinforcing members 14a, 14b, 14c, and 14d are hollow or medium-sized, and are rods on the inner side of the cross frame. In the present embodiment, a cross-sectional shape of a Η-shaped steel and a cross-sectional shape of a mouth-shaped steel are used. Here, as will be described in detail later, the base 10 is divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 12c and 12d extending in the z-axis direction of the upper frame 12 are It is cut off on the way, and the division part 16 is provided. In addition, each of the blocks that hold the divided portion 16 from the front side and the rear side crosses the reinforcing material 14a composed of the mouth-shaped steel so as to extend between the cans 12c and 12d in the cut portion in the X-axis direction. © In the front frame formed by the can 12a, the cans 12c and 12d, and the reinforcing material 14a, the reinforcing material 14b made of Η-shaped steel is placed in parallel with the cans 12c and 12d, and the can 12a And the reinforcing material 14a is erected in parallel. Further, the reinforcing member 14c made of a Η-shaped steel has a slanted diagonal cross frame for the can bodies 12a, 12c, and 12d and the reinforcing member 14a. Therefore, the reinforcing members 14b' to 14c are in a state of being radially extended at a point in the center. Further, in the rear frame formed by the can bodies 12c and 12d, the can material 12b, and the reinforcing material 14a, the reinforcing material 14d made of H-shaped steel is for the -8-200926340 cans 1 2 b, 1 2 c, 1 2 d and reinforcing material 1 4 a inclined cross frame. The lower frame 22 is formed inside the rectangular frame by connecting the can bodies 22a and 22b extending in the X-axis direction and the cans 22c and 22d extending in the Y-axis direction, respectively, and is provided by the reinforcing member 24b. Reinforced structure. The diameters of the cans 22a, 22b, 22c, and 22d are smaller than the cans 12a, 12b, 12c, and 12d of the upper frame 12. The reinforcing material 24b made of a profiled steel is a central portion in the longitudinal direction of the can bodies 22c and 22d, and is transversely arranged on the X-axis side. Here, as described above, the base 1〇 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 22c and 22d extending in the γ-axis direction of the lower frame 22 are on the way. It is cut and provided with a dividing portion 26. The connecting material 18 is coupled to the upper frame 12 and the lower frame 22 in a state of being separated in the Z-axis direction. In the present embodiment, the connecting member 18 is made of a can material of a profiled steel, and the upper frame 12 and the lower frame © frame 22 are joined at the four corners. Further, in order to increase the rigidity, between the upper and lower cans 12c and 2 2 c, the connecting member 18 of the profiled steel member is stretched in the Z-axis direction on the front side of the divided portions 16 and 26. Further, between the upper and lower tank members 22d and 22d, the connecting member 18 is formed by a profiled steel extending in the Z-axis direction on the front side of the divided portions 16 and 26. The vibration eliminating unit 50 is provided between the installation surface of the stage device 1 and the base 10. More specifically, the vibration isolating unit 50 supports the base 10 in a vibration-removing manner at a corner of the lower frame 22 and a lower portion of the middle of the cans 22c and 22d. The vibration isolating unit 50 is for removing the vibration -9 - 200926340 which is transmitted from the installation surface to the base 10, and may be formed of an elastic material such as an air spring or rubber. The guide rails 40 are respectively provided on the upper surfaces of the can bodies 12c and 12d and extend in the Y-axis direction. More specifically, on the upper surfaces of the can bodies 12c and 12d, projecting pieces (guide rail support tables) 52' are provided toward the outer side, and the projecting pieces 52 are continuously extended in the Y-axis direction. Further, a guide rail 40 is provided on the upper surface of the protruding piece 52. Further, the permanent magnet 42' is such that the upper surface of the protruding piece 52 is provided at a position adjacent to the outer side of the guide rail 40 and extends in the Y-axis direction. This permanent magnet 42' is a predetermined pattern in which the S pole and the N pole are returned in the Y-axis direction. A connecting plate 40' that is connected to a lower portion of both sides of the elevated portion 30 that extends in the X-axis direction is disposed above the guide rail 40 and the permanent magnet 42. A guide slider is adjacently disposed on the lower surface of the connecting plate 46. 44 and electromagnet 48. The electromagnet 48 is a mode-changing magnetic pole that matches the S pole and the N pole of the permanent magnet 42. By causing a repulsive force between the permanent magnets 42, the elevated portion 30 can be guided by the guide rail 40 while facing the Y-axis direction. mobile. Further, on the lower surface of the protruding piece 52, the plurality of reinforcing ribs 54 which are laid between the outer surfaces of the can bodies 12c and 12d are arranged at predetermined intervals in the Y-axis direction to improve the rigidity. The elevated portion 30 includes a support portion 30a extending in the X-axis direction, a linear motor portion 3 Ob, and a moving portion 30c. The moving portion 30c is movable in the X-axis direction along the linear motor portion 30b by the linear portion 30b. In addition, the processing device is moved in the X-axis direction by attaching a predetermined processing device to the moving portion 30c, and a predetermined processing of -10 200926340 is performed on the substrate mounted on the base 10. The processing apparatus may be a camera that inspects a defect on the substrate, a maintenance device that repairs the surface treatment state of the substrate such as a color drop of the color filter, and an application device that performs pattern processing on the substrate. As shown in Fig. 5, a workpiece presser 11 for mounting a substrate such as a liquid crystal panel is provided on the base 1 of the stage device 1. Further, when the stage device 1 is transported by the transport vehicle, the workpiece press plate 11 is placed on the transport vehicle. In the present embodiment, as shown in Fig. 5, the base 10, the guide rail 40, the permanent magnet 42, the projecting piece 52, and the workpiece pressing plate 11 are divided by a dividing surface perpendicular to the Y-axis direction. Further, the split base 10 is connected to the divided portions 16 and 26 by screws or the like. In other words, in the dividing portion 26 (16), as shown in Fig. 6, a flange 26a (16a) that encloses the cut surface of the cut pot material 22c (12c) and is outward is provided. The outward flange 26a (16a) joins the blocks of the divided base 10 to each other. Further, in the divided portion 16 of the upper frame 12, the reinforcing rib 54 has an outward flange 16a. Thereby, the through-core reinforcing ribs 54 can be strongly and easily connected to each other by screwing or the like. As described above, since the base 10, the guide rail 40, the permanent magnet 42, the projecting piece 52, and the workpiece holding plate 11 are separable in the Y-axis direction, the stage device 1 can be divided into two blocks. Further, the divided portions 16 and 26 are provided at corresponding positions in the Z-axis direction of the upper and lower sides, and each block in the γ-axis direction is formed at a position that can be carried on the transport vehicle. Further, below the protruding pieces 52 on both sides of the base 10, as shown in Figs. 1 and 7, a cable carrier 60 is provided. In the elevated portion 30, -11 - 200926340 is connected: a non-illustrated power cable for supplying power for controlling the movement of the overhead portion 30 itself or the moving portion 30c, or between the processing device and the processing device attached to the moving portion 30c. Receive unillustrated signal cables for various signals. These cables are wired through the cable carrier 60. The cable carrier 60 is connected to a flat plurality of cylindrical members, and each of the cylindrical members is rotatably coupled to each other within a mutually restricted angle. The assembled cable is passed through the interior of the cable carrier 60. One end 60a of the cable carrier 60 is fixed to a support base 62 provided on the side of the base 10. Further, the other end 60b of the cable carrier 60 is fixed to the contact member 64. The contact member 64 is a tubular member and is coupled to the overhead portion 30 and the cable carrier 60 to guide the cable from the cable carrier 60 to the elevated portion 30. Therefore, as shown in Fig. 8, the cable carrier 60 is deformable like a crawler belt (Japanese registered trademark). The elevated portion 30 is movable in the Y-axis direction at any position in the longitudinal direction of the base 10. In a U shape. Moreover, the cable inside the cable carrier 60 is deformed along the deformation of the cable carrier 60. As described above, in the stage device 1 of the present embodiment, "the cable carrier 60 is provided below the protruding piece 52 on both sides of the base 1", unlike the case where it is provided inside the base 10. The degree of freedom in the use of the space between the cans 12c and 22c or between the cans 1 2 d and 2 2 d is improved, and the 'configurable connecting material 18 and the vibration-removing component 50 ' can improve rigidity and vibration resistance. Sex. Moreover, by providing the protruding piece 52 and arranging the guiding track 40 and the permanent magnet 42, the width of the base 1 〇 can be reduced, and the cable carrier can be disposed below the protruding piece 52 of the side of the base 1 〇 6 G 'so it can suppress large-scale. -12- 200926340 If the cable carrier is placed under the abutment as in the prior art, since the connecting member provided between the cable carrier and the overhead portion becomes long, vibration is likely to occur, and the external disturbance may become large. 'But the present invention is because the connection point of the contact member 64 and the cable carrier 60 is provided on the side of the upper frame 12 facing the elevated portion 3 (i.e., the height position of the side of the upper frame 12). Therefore, the length of the contact member 64 in the Z-axis direction can be shortened, and the vibration of the base 10 caused by the influence of the external disturbance can be reduced. Since the 'base 10' has the divisions 16 and 26 for dividing the base 10 into a plurality of blocks in the horizontal direction, even if the base 10 is enlarged as the size of the substrate increases, no special use is required. The large vehicle can transport the base 10 in sections. Further, when the cans 12c, 1 2d, 2 2c, and 22d constituting the base 1 are machined, since the divided portions can be separately performed, the machining can be easily performed. In the case of the division of the base 10, when the base 10 is composed of a can material, the rigidity of the joint surface is low, and there is a possibility of deformation when the overhead portion 30 is driven. However, the base 10 of the present embodiment is used. Because of the box structure, the upper and lower joint faces of the upper frame 12 and the lower frame 22 are combined, and the joint surface is increased, and the possibility of deformation is reduced, which is advantageous for the division of the base 1 . Further, since the divided portions 16 and 26 are configured to cut the cans constituting the upper frame 12 and the lower frame 22 at the upper and lower corresponding positions, the divided portions 16 and 26 provided in the upper frame 12 and the lower frame 22 are Separating in the up-and-down direction enhances the moment at which the split surface is detached, and is advantageous in rigidity. Further, since the outward flange 26a is provided in the cut surface of the can material, the divided blocks are transmitted to the outward flange 16a, and can be easily connected to each other by screws or the like. Further, a plurality of reinforcing ribs 54 spanned between the can 12a and the outer side surface are provided on the lower surface of the protruding piece 52, and the divided bases 10 are also connected to the reinforcing ribs 54. Here, in the case where the conventional platform structure is divided, the flange for connection needs to be provided such that the side of the extension platform has a large size in the lateral direction. However, in the present embodiment, the reinforcing rib 54 is suppressed. Further, since the divided portions 16 and 26 are extended more than the protruding piece 52, it is possible to suppress an increase in size. Further, since the frames 14c and 14d are inclined in the frame of the upper frame 12, the rigidity of the base 10 can be sufficiently increased by the ratio of the reinforcing members placed in parallel in the frame. That is, it is possible to improve the base rotation rigidity which may occur when the frame portion 13 and its mounting device are simultaneously moved. Since the base 10 has the upper frame 12 and the lower frame g and is connected to the box structure by the connecting material 18, the weight of the can is reduced, but the rigidity can be improved. Therefore, even if the load is applied by the movement of 30, the vibration-damping unit 5 is sunk and the g is tilted, the deformation of the base 10 itself can be suppressed, and the error of the relative position of the overhead portion 3 0 1〇 is very small, and can be correctly Since the substrate is processed without waiting for the deformation of the base 10 to return to the original shape, the amount of processing does not decrease. In addition, in the frame of the upper frame 12, only 12d is passed through the tilts 16a and 26a in the frame of the upper frame 12, and if it is intended to be surfaced, it is possible to provide a reinforcement to the side with respect to the height of the twisted 22> The elevated section i ίο and the abutment. Further, it is possible to provide the reinforcing material in the oblique direction -14 - 200926340, but it is also possible to provide the reinforcing material in the oblique direction in the frame of the lower frame 22. In addition, the connecting member 18 is formed of a profiled steel, and the four frames of the upper frame 12 and the lower frame 22 are connected to each other. However, the connecting member 18 is not limited to the profiled steel, and the upper frame 12 and the lower frame 22 are surrounded by a plate material, for example. The structure of the link is also possible. Further, as shown in Fig. 9, the outward flange 15a of the divided portion 16 of the upper frame 12 and the outward flange 26a of the divided portion 26 of the lower frame 22 may have an integral structure. In this case, the rigidity of the base 10 can be further improved. [Second embodiment] Next, a second embodiment of the present invention will be described. The same elements as those in the above-described first embodiment are denoted by the same reference numerals, and the description thereof will not be repeated. Fig. 10 is a side view of the stage device ιοί of the second embodiment of the present invention, and Fig. 11 is a perspective view of the base 110 of the stage device 101 including the first plan view seen from above, and Fig. 12 is a view A perspective view of the base 110 as seen from below, FIG. 3 is a perspective view of the block on the rear side of the divided base 110, and FIG. 14 is a lower view of the base 110 to which the connecting material 118 is connected. A perspective view of the frame 122, and a fifteenth view of the gantry 170 and the vibration isolation assembly 150. The difference between the second embodiment and the first embodiment is that the pedestal 170 supports the point of the base 110 and thus the structure of the base 110 is changed. -15- 200926340 As shown in Fig. 10, the stage device 101 includes a base 1 1 0 on which a substrate is mounted, an overhead portion 1 30 that is moved on the base 1 1 0, and a base set. The guide rail 140 and the permanent magnet 142 for guiding the movement of the elevated portion 130, and the guide slider 144 which is guided to the lower portion of the elevated portion 130 and guided to the guide rail 140 and the permanent magnet 142 The electromagnet 146 moves along the guide rail 140. Further, in Fig. 10, the longitudinal direction of the base 110 is the Y-axis direction, and the horizontal direction perpendicular thereto is the X-axis direction, and the vertical direction is the Z-axis direction. The base 110 has an upper frame 112, a lower frame 122 that is vertically separated from the upper frame 112, and a connecting material 118 that connects the upper frame 112 and the lower frame 122. The upper frame 112 is formed by connecting the tank members 112a and U2b extending in the X-axis direction and the tank members 112c and 112d extending in the Y-axis direction to form a rectangular frame body, and the plurality of reinforcing members U4a are formed. 114b, 114c, and 114d are reinforced. Here, the cans 112a, O 112b, 112c, and U2d are hollow bars, and in the present embodiment, a cross-sectional shape of a mouth-shaped steel is used. Further, the reinforcing members 114a, 114b, 114c, and 114d are rods which are transversely arranged on the inner side of the casing, whether hollow or medium. In the present embodiment, a cross-sectional shape of a Η-shaped steel and a cross-sectional shape of a □-shaped steel are used. Here, as will be described later in detail, the base 110 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 112c and 112d extending in the z-axis direction of the upper frame 112 are on the way. It is cut and provided with a dividing portion 1 16 . Further, the blocks on the front side -16 to 200926340 and the rear side of the respective divided portions 1 16 are extended in the X-axis direction between the cans 1 12c and 1 12d in the cut portion. Reinforcing material 114a made of steel. Further, in the frame formed in front of the can body 112a, the cans 112c and 112d, and the reinforcing member 114a, the reinforcing member 114b made of Η-shaped steel is placed in parallel with the cans 112c and 112d, and the can 1 is 12.a and the reinforcing material 1 14a are erected in parallel. Further, the reinforcing member 114c made of Η-shaped steel is transversely inclined with respect to the can bodies 112a, 112c, and 112d and the reinforcing material 〇 1 14a. Therefore, the reinforcing members 1 Mb, 1 14c are in a state of being radially extended from the center point and extending therefrom. Further, in the frame formed by the tank members 112c and 112d, the tank member 112b, and the reinforcing member 114a, the reinforcing member 114d made of Η-shaped steel is inclined to the tank members 112b, 112c, U2d and the reinforcing member 114a. . The lower frame 1 22 is formed by connecting the tanks 122a and 122b extending in the X-axis direction and the tanks 122c and 122d extending in the Y-axis direction to form a rectangular frame body, and is reinforced by a plurality of frames. The structure of the materials 124a, 124b, and 124c is enhanced. The diameters of the cans 122a, 122b, 122c, and 122d are smaller than the cans 112a, 112b, 112c, and 1 2 2d of the upper frame 12. Here, as described above, the base 110 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 122c and 122d extending in the Y-axis direction of the lower frame 122 are on the way. The cutting portion 126 is provided, and the block on the front side of the dividing portion 1 26 is stretched in the X-axis direction between the cans 122c and 122d in the cut portion by the -17-200926340 port. Reinforcing material 124a made of steel. Further, in the front frame formed by the can 122a and the cans 122c, 112d, and 124a, 124b made of Η-shaped steel is placed in parallel with the cans 122c and 122d, and 122a and the reinforcing member 124a are erected in parallel. . Further, the girders of the Η-shaped steel structure 124c are transversely inclined with respect to the cans 122a, 122c, and 122d and the reinforcing members. Therefore, the reinforcing members 124b, 124c are intersected by a point at the center and radially extended therefrom. Further, the lower frame 122 is slightly rectangular in shape which is recessed along the outer corner of the upper frame 112. The pillars 178 of the gantry 170, which will be described later, are the four corners of the upper frame 112 supported by the recesses 119 from below. The connecting material 118 is connected to the frame 112 and the lower frame 122 in a state of being separated in the z-axis direction. In the present embodiment, the connecting material is composed of a can material of a profiled steel, and the upper frame 112 and the lower frame are joined in the vicinity of the four corners. As shown in Fig. 15, the gantry 170 is made of a rectangular frame formed by the cans 172a and 172b extending in the axial direction and the louver-direction extending members 172c and 172d. The structure of the material 174a and the disk 74b is enhanced. Here, the cans 172b, 172c, and 172d are hollow bars, and in the present embodiment, the mouth-shaped bell-shaped steel. Further, the reinforcing members 174a and 174b are the bars on the inner side of the cross frame, either in the middle or in the middle, and in the present embodiment, the mouth-shaped steel is formed. Here, as the abutment 110 is a horizontal direction reinforcing material reinforcing material and a material of the filler material 124a in the longitudinal direction is formed into a shape, but the upper portion 118 through which the upper portion 118 is: the frame 122 is formed to extend toward the X by a plurality of 172a The use of the section is a hollow section. The -18-200926340 complex block can be divided into a plurality of blocks (here, two blocks), and the gantry 170 can also be divided into a plurality of blocks. The cans 172c and 172d extending in the γ-axis direction of the gantry 170 are cut off in the middle, and a dividing portion 176 is provided. Further, the respective blocks of the front side and the rear side of the divided portion 1 76 are stretched and supported by the profiled steel 174a extending in the X-axis direction between the cans 1 72c and 1 72d of the cut portion. . Further, in the frame on the front side, a reinforcing material O 174a made of a profiled steel is further extended in the X-axis direction. Further, in the frame of the gantry 170, a reinforcing member 174b made of a profiled steel is transversely extended in the Y-axis direction. This reinforcing material 174b is cut in the middle and is provided with a dividing portion 176. In the four corners of the gantry 170, pillars 178 are provided extending in the Z-axis direction. The vibration isolating assembly 150 is disposed on the upper end of the support 178 of the gantry 170 and on the respective cans 172a, 172b, 172c, and 172d. More specifically, the vibration-damping unit 150 is a tank of the upper and lower frames 122 between the four corners of the upper frame 112 and the upper ends of the pillars 178 of the gantry 170, and the middle of the cans 172a, 172b, 172c, and 172d. Between the materials 122a, 122b, 122c, and 122d, the base 1 10 can be supported in a vibration-removing manner. The vibration isolating unit 150 is for removing vibration transmitted from the installation surface to the base 110, and may be formed of, for example, an elastic material such as an air spring or rubber. The guide rail 140 extends in the Y-axis direction. More specifically, the upper surface of the cans 1 1 2 c and 1 1 2 d is provided with a protruding piece 152 which faces outward, and the protruding piece 152 continuously extends in the Y-axis direction. Further, a guide rail 140 is provided on the upper surface of the protruding piece 152. Further, the permanent magnet 142 is provided on the upper surface of the protruding piece 152 at a position adjacent to the guide rail 140 -19-200926340, and extends in the Y-axis direction. This permanent magnet 142 is a predetermined mode in which the S pole and the drain are returned in the x-axis direction. Above the guide rail 140 and the permanent magnet 142, a coupling plate 146 that is coupled to a lower portion of both sides of the elevated portion 130 that extends in the X-axis direction is disposed, and a guide slider is disposed adjacent to the lower surface of the connecting plate 146. 144 and electromagnet 148. The electromagnet 148 is a mode-changing magnetic pole that cooperates with the S pole and the drain of the permanent magnet 142, and can guide the elevated portion 130 from the guide rail 140 toward the boring axis by the repulsive force generated between the permanent magnets 142. Move in direction. Further, on the lower surface of the protruding piece 152, a plurality of reinforcing ribs 154 which are placed between the outer surfaces of the cans U2c and 112d are provided at predetermined intervals in the Y-axis direction to improve the rigidity. The elevated portion 130 includes a support portion 130a extending in the X-axis direction, a linear motor portion 130b, and a moving portion 130c. The moving portion 130c is movable toward the X-axis © by the linear motor portion 130b along the linear motor portion 130b. Further, by the predetermined processing means attached to the moving portion 130c, the processing device is moved in the X-axis direction, and predetermined processing is performed on the substrate mounted on the base 110. The processing apparatus may be a camera that inspects a defect on the substrate, a maintenance device that repairs the surface of the substrate such as a color drop of the color filter, or a coating device that performs pattern processing on the substrate. Further, in the base 110 of the stage device 101, as in the first embodiment, a workpiece pressing plate (not shown) for mounting a substrate such as a liquid crystal panel is provided. In addition, when the stage device 101 is transported by the transport vehicle, in the state in which the workpiece presser -20-200926340 is installed, the base 140 is used as a base, and the base is cut, and the upper and outer bulges are used to make the block. The flange 154 used here becomes larger, and the structure of the sheet 1 52 可以 can be suppressed. The size of the portion 1 1 6 is set, and the size of the film is 10 30, and the movement is 1 30c. The readings are carried on the delivery vehicle. In the embodiment, as shown in Fig. 1, the base 110, the permanent magnet 142, the protruding piece 152, the gantry 170, and the machine are divided by a dividing plane perpendicular to the Y-axis direction. Further, in the case where the dividing portions 1 16 and 1 26 are divided by the connecting frame 1 1 2 such as screws, the reinforcing ribs 1 5 4 are the edges 1 1 6 a. Thereby, the reinforcing ribs 154 are strongly and easily coupled to each other by the screws. In the case of the conventional platform structure, if it is desired to divide, it is necessary to set the side of the platform to extend, and there is a problem of the lateral direction, but in the present embodiment, since the complementary portion 1 16 and 126 can be suppressed from protruding. The sheet 152 is extended to the side to enlarge. Since the base 110, the guide rail 140, the permanent magnet 142, the gantry 170, and the workpiece platen are in the Y-axis direction, the stage device 101 can be divided into two blocks. Further, 126 and 176 are provided in the Z-axis direction of the upper and lower sides. The respective blocks in the Y-axis direction are formed in the stackable position. Below the protruding piece 152 on both sides of the base 110, and as shown in Fig. 16, a cable carrier 160 is provided. In the high-rise connection: a non-illustrated power cable for controlling the power of the overhead unit 1130 or the mobile unit, or a non-illustrated power rail for transmitting various signals between the mobile devices Bed worker, split. The position of the ribs is the same as that of the sturdy joints. The spurs are divided into sections, such as the frame part 130c, and the line is -21 - 200926340. These cables ' are wired through the cable carrier 160. The cable carrier 160' is a flat plurality of cylindrical members, and the respective cylindrical members are rotatably coupled at mutually restricted angles. The assembled cable is passed through the interior of the cable carrier 160. One end 160a of the cable carrier 160 is fixed to a support table 162 provided on the side of the base 110. Moreover, the other end 16 0b of the cable carrier 160 is fixed to the contact member 164. The contact member 164 is a tubular member and is coupled to the elevated portion 130 and the cable carrier 160 to guide the cable from the cable carrier 160 to the elevated portion 130. Therefore, as shown in FIG. The carrier 1 60 is deformable like a crawler belt (registered trademark), and can be bent in a U shape at an arbitrary position in the longitudinal direction of the base 11〇 as the elevated portion 130 moves in the Y-axis direction. Moreover, the cable passing through the inside of the cable carrier 160 is deformed along the deformation of the cable carrier 160. As described above, in the stage device 101 of the present embodiment, the cable carrier 160 is provided below the protruding piece 152 on both sides of the base 110, and is different from the case where it is provided inside the base 110. The degree of freedom in the use of the space between 112c, 122c or between the cans 1 12d, 122d is increased. Here, the arrangement of the connecting material 118 or the vibration isolating assembly 150' can improve the rigidity or the vibration damping property. Further, since the cable carrier 160 can be disposed below the protruding piece 152 on the side of the base 110 in addition to the width of the base 110 which can be reduced, the enlargement can be suppressed. Further, as in the prior art, when the cable carrier is disposed under the abutment, the connecting member disposed between the cable carrier and the elevated portion is lengthened by vibration -22-
200926340 容易產生’外亂有可能變大，但本發明，因爲將連糸 164及纜線載體160的連結點，設在與高架部130才 的上部框架112的側方（g卩，位於上部框架112的β 高度位置），可以縮短連絡構件164的Ζ軸方向的| 可以降低因外亂的影響所產生的基台11〇的振動。 且，基台110，因爲具有將基台110在水平方|ΐ 成複數塊體用的分割部116、126，即使隨著基板β 化而使基台110大型化’也不需使用特殊的大型車葡 將基台10分割運送。且，將構成基台110的罐材1 112d、122c、122d機械加工時，因爲可各分割部女 進行，所以機械加工容易進行。 且，分割基台110的情況，基台110是由罐材釋 話’接合面的剛性低，高架部130的驅動時有產生變 可能性，但是本實施例的基台110因爲是盒構造，面 部框架112及下部框架122中的上下的接合面的話， 面會增加，可以降低產生變形的可能性，成爲有利於 11 〇的分割的構造。 且，分割部116、126，因爲是將構成上部框穿 及下部框架122的罐材在上下對應位置切斷的結構， 設置於上部框架112及下部框架122的分割部116 是藉由上下方向分離，可對於讓分割面脫落的力矩達 化，在剛性上有利。 且，在罐材的切斷面中因爲設置向外的凸緣1 126a，所以被分割的塊體彼此透過向外的凸緣1 ^構件 3面對 J方的 ί度， I分割 I大型 丨就可 12c、 分別 〖成的 丨形的 丨合上 接合 '基台 ! 112 所以 、126 i行強 16a > 16a' -23- 200926340 126a藉由螺絲等可以容易相互連結。且，在架台170的 罐材的切斷面因爲也同樣設置向外的凸緣，所以分割的塊 體彼此可以藉由螺絲等容易連結。 且，因爲在上部框架112的框內以傾斜方向架設補強 材114c、114d，在下部框架122的框內以傾斜方向架設 補強材124c，所以與在框內平行架設補強材的情況相 比，可以充分地提高基台1 1 0的剛性。 Ο 且，因爲基台110是具有上部框架112及下部框架 122，並將這些連結材118連結的盒構造，所以即使由罐 材構成而達成輕量化，剛性也可提高。因此，即使因爲高 架部130的移動而承受負荷使除振組件150下沈而導致基 台1 1〇傾斜，也可抑制基台1 10本身的變形，高架部130 及基台110的相對位置的誤差非常小，可正確地處理基 板。且，因爲不需要等待基台110的變形回復至原形爲止 就可進行基板的處理，處理量不會下降。 ® 且，載台裝置101，因爲具備隔著除振組件150支撐 基台1 1 0的架台1 70，所以可以在架台1 70上由除振狀態 支撐基台1 10。 且，因爲通過下部框架122的四角的凹陷119從下方 隔著除振組件150藉由支柱178支撐上部框架112的四 角’所以可以隔著除振組件1 5 0將基台1 1 〇支撐於接近重 心的更高的位置，可以抑制因爲高架部130的移動所產生 的基台110的擺動。且，因爲下部框架122作爲錘的功 能’所以可以更抑制基台1 1 0的擺動。 -24- 200926340 又，雖連結材118爲口型鋼的結構且爲將上部框架 112及下部框架122由四角等連結的結構’但是連結材 118不限定於口型鋼，例如藉由板材包圍上部框架112及 下部框架1 22地連結的結構也可以。 又，本發明不限定於上述實施例，可進行各種的變 形。例如，在上述實施例中，雖説明適用高架部30、130 朝Y軸方向移動且移動部30c、130c朝X軸方向移動的2 〇 軸型的載台裝置1、101，但是只有高架部30、130移動 的1軸型也可適用。 且’高架部30、130或移動部30c、130c的移動，是 接觸型、非接觸型的任一種也可以。 【圖式簡單說明】 [第1圖]本發明的第丨實施例的載台裝置的立體圖。 [第2圖]將具備第1圖的載台裝置的基台從上方所見 〇 的立體圖。 [第3圖]將基台從下方所見的立體圖。 [第4圖]連結有連結材的基台的下部框架是被支撐在 除振組件的狀態的立體圖。 [第5圖]將工件壓板組裝於第1圖的載台裝置的立體 圖。 [第ό圖]顯示分割部的前視圖。 [第7圖]顯示纜線載體的配置的部分擴大圖。 [第8圖]如第丨圖所示的載台裝置的側面圖。 -25- 200926340 [第9圖]顯示分割部的變形例的圖。 [第10圖]本發明的第2實施例的載台裝置的立體 圖。 [第11圖]將具備第10圖的載台裝置的基台從上方所 見的立體圖。 [第12圖]將基台從下方所見的立體圖。 [第1 3圖]將基台分割後的後側的塊體從上方所見的 〇 立體圖。 [第14圖]連結有連結材的基台的下部框架的立體 圖。 [第15圖]顯不架台及除振組件的立體圖。 [第16圖]顯示纜線載體的配置的部分擴大圖。 [第17圖]如第1〇圖所示的載台裝置的側面圖。 【主要元件符號說明】 〇 v 1 :載台裝置 10 :基台 11 :工件壓板 1 2 :上部框架 1 2a :罐材 12b :罐材 1 2c :罐材 12d :罐材 1 4 a :補強材 -26- 200926340 Ο :補強材 :補強材 :補強材 分割部 :向外凸緣 連結材 下部框架 :罐材 :罐材 :罐材 :罐材 :補強材 分割部 :向外凸緣 高架部 :支撐部 :線形馬達部 :移動部 導引軌道 永久磁鐵 導引滑件 連結板 電磁鐵 除振組件 -27 200926340 ❹ 突出片 補強肋 纜線載體 一端 另一端 支撐台 連絡構件 盤 載台裝置 基台 上部框架 :罐材 :罐材 :罐材 :罐材 :補強材 :補強材 :補強材 :補強材 分割部 :向外凸緣 連結材 凹陷 下部框架 -28 200926340 1 22a :罐材 122b :罐材 122c :罐材 122d :罐材 1 24a :補強材 1 2 4 b :補強材 1 2 4 c :補強材 〇 126 :分割部 1 30 :高架部 130a :支撐部 130b :線形馬達部 1 3 0 c :移動部 140 :導引軌道 1 4 2 :永久磁鐵 144 :導引滑件 〇 146 :連結板 1 4 6 :電磁鐵 148 :電磁鐵 1 5 0 :除振組件 152 :突出片 154 :補強肋 160 :纜線載體 160a: —端 1 6 0 b :另一端 -29- 200926340 1 6 2 .支撐台 164 :連絡構件 1 70 :架台 172a :罐材 1 72b :罐材 1 7 2 c :罐材 172d :罐材 0 1 7 4 a :補強材 1 7 4b :補強材 1 7 6 :分割部 1 7 8 :支柱 ❹ -30200926340 It is easy to generate 'outside chaos, which may become large, but the present invention, because the connection point of the flail 164 and the cable carrier 160 is provided on the side of the upper frame 112 with the elevated portion 130 (g卩, located in the upper frame The β height position of 112 can shorten the axis direction of the contact member 164 | The vibration of the base 11 产生 due to the influence of the disturbance can be reduced. Further, since the base 110 has the dividing portions 116 and 126 for forming the base 110 in the horizontal direction into a plurality of blocks, even if the base plate 110 is enlarged as the substrate is β, it is not necessary to use a special large-sized one. The car will transport the base 10 in sections. Further, when the cans 1 112d, 122c, and 122d constituting the base 110 are machined, since the divided portions can be made, the machining can be easily performed. Further, in the case where the base 110 is divided, the base 110 is released from the can material, and the rigidity of the joint surface is low, and the elevation of the overhead portion 130 may be changed. However, since the base 110 of the present embodiment is a box structure, When the upper and lower joint faces of the face frame 112 and the lower frame 122 are increased, the surface is increased, and the possibility of deformation is reduced, and the structure is advantageous for the division of 11 〇. Further, the divided portions 116 and 126 are configured such that the cans constituting the upper frame and the lower frame 122 are cut at the upper and lower corresponding positions, and the divided portions 116 provided in the upper frame 112 and the lower frame 122 are separated by the vertical direction. It is advantageous for the rigidity of the split surface to be reduced. Further, since the outward flange 1 126a is provided in the cut surface of the can material, the divided blocks are transmitted to each other through the outward flange 1 ^ member 3 facing the J side, and the I split I large 丨Thus, 12c, respectively, the 丨-shaped 接合 接合 ' 基 基 112 112 112 112 112 112 112 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 126 Further, since the outwardly facing flange is also provided on the cut surface of the can material of the gantry 170, the divided blocks can be easily coupled to each other by screws or the like. Further, since the reinforcing members 114c and 114d are placed in the inclined direction in the frame of the upper frame 112, the reinforcing member 124c is placed in the inclined frame in the frame of the lower frame 122. Therefore, compared with the case where the reinforcing member is placed in parallel in the frame, The rigidity of the base 110 is sufficiently increased. Further, since the base 110 is a box structure having the upper frame 112 and the lower frame 122 and connecting the connecting members 118, the rigidity can be improved even if the weight is reduced by the can material. Therefore, even if the load is dissipated by the movement of the elevated portion 130 and the base unit 1 1 is tilted, the deformation of the base 1 10 itself can be suppressed, and the relative positions of the elevated portion 130 and the base 110 can be suppressed. The error is very small and the substrate can be processed correctly. Further, since it is not necessary to wait for the deformation of the base 110 to return to the original shape, the processing of the substrate can be performed, and the amount of processing does not decrease. Further, since the stage device 101 has the gantry 1 70 that supports the base 110 through the vibration isolation unit 150, the base 110 can be supported on the gantry 1 70 by the vibration-removing state. Moreover, since the four corners of the upper frame 112 are supported by the pillars 178 from the lower side through the recesses 119 of the lower frame 122 from the lower side of the lower frame 122, the base 1 1 can be supported close to each other via the vibration removing assembly 150. The higher position of the center of gravity can suppress the swing of the base 110 due to the movement of the elevated portion 130. Further, since the lower frame 122 functions as a hammer', the swing of the base 110 can be more suppressed. Further, the connecting member 118 is a structure of a profiled steel and has a structure in which the upper frame 112 and the lower frame 122 are connected by four corners or the like. However, the connecting member 118 is not limited to the profiled steel, and the upper frame 112 is surrounded by, for example, a plate member. A structure in which the lower frame 1 22 is coupled to the ground may be used. Further, the present invention is not limited to the above embodiment, and various modifications can be made. For example, in the above-described embodiment, the two-axis type stage devices 1 and 101 in which the elevated portions 30 and 130 are moved in the Y-axis direction and the moving portions 30c and 130c are moved in the X-axis direction are applied, but only the overhead portion 30 is provided. The 1-axis type of 130 movement is also applicable. Further, the movement of the elevated portions 30 and 130 or the moving portions 30c and 130c may be either a contact type or a non-contact type. BRIEF DESCRIPTION OF THE DRAWINGS [FIG. 1] A perspective view of a stage device according to a third embodiment of the present invention. [Fig. 2] A perspective view of a base provided with the stage device of Fig. 1 as seen from above. [Fig. 3] A perspective view of the base seen from below. [Fig. 4] A perspective view of a lower frame to which a base of a connecting material is connected is supported by a vibration isolating module. Fig. 5 is a perspective view showing the assembly of the workpiece presser in the stage device of Fig. 1. [Digital diagram] shows the front view of the division. [Fig. 7] A partially enlarged view showing the arrangement of the cable carrier. [Fig. 8] A side view of the stage device as shown in Fig. 。. -25- 200926340 [Fig. 9] A view showing a modification of the divided portion. Fig. 10 is a perspective view of a stage device according to a second embodiment of the present invention. [Fig. 11] A perspective view of a base including the stage device of Fig. 10 as seen from above. [Fig. 12] A perspective view of the base seen from below. [Fig. 1 3] A perspective view of the block on the rear side after the base is divided from above. [Fig. 14] A perspective view of a lower frame to which a base of a connecting material is connected. [Fig. 15] A perspective view showing the gantry and the vibration-eliminating assembly. [Fig. 16] A partially enlarged view showing the arrangement of the cable carrier. Fig. 17 is a side view of the stage device shown in Fig. 1 . [Description of main component symbols] 〇v 1 : Stage device 10 : Base 11 : Work platen 1 2 : Upper frame 1 2a : Can 12b : Can 1 2c : Can 12d : Can 1 4 a : Reinforcing material -26- 200926340 Ο : Reinforcing material: reinforcing material: reinforcing material dividing part: outer flange connecting material lower frame: can material: can material: can material: can material: reinforcing material dividing part: outward flange elevated part: Supporting part: linear motor part: moving part guiding track permanent magnet guiding sliding piece connecting plate electromagnet vibration-removing component-27 200926340 ❹ protruding piece reinforcing rib cable carrier one end other end supporting table connecting member disk loading table device base upper part Frame: Can material: Can material: Can material: Can material: Reinforcing material: Reinforcing material: Reinforcing material: Reinforcement material division: Outer flange joint material recessed lower frame-28 200926340 1 22a : Canned material 122b: Canned material 122c : Canned material 122d : Canned material 1 24a : Reinforcing material 1 2 4 b : Reinforcing material 1 2 4 c : Reinforcing material 〇 126 : Division part 1 30 : Overhead portion 130a : Support portion 130b : Linear motor portion 1 3 0 c : Moving portion 140: guiding track 1 4 2 : permanent magnet 144 : guiding slider 146 : connecting plate 1 4 6 : Electromagnet 148 : Electromagnet 1 5 0 : Vibration removing assembly 152 : Projecting piece 154 : Reinforcing rib 160 : Cable carrier 160a : - End 1 6 0 b : Other end -29 - 200926340 1 6 2 . Support table 164 : Contact member 1 70 : Stand 172a : Can material 1 72b : Can material 1 7 2 c : Can material 172d : Can material 0 1 7 4 a : Reinforcing material 1 7 4b : Reinforcing material 1 7 6 : Division 1 7 8: Pillar ❹ -30