200924978 九、發明說明： 【發明所屬之技術領域3 發明領域 5 ❹ 10 15 〇 本發明係關於一種組裝於例如稱為電子紙之液晶顯示 器（LCD)面板之層積體之製造方法。 發明背景 例如LCD面板廣為人知。LCD面板係具備相互平行地 延伸之一對玻璃基材。於玻璃基材彼此之間配置有構成柱 狀間隔物之複數柱體。柱體例如成矩陣狀地排列。於柱體 之間填充液晶。柱體由配置於玻璃基材彼此之間之間隔壁 所包圍。於間隔壁内相鄰接之柱體間填充液晶。又，於玻 璃基材彼此之間的間隔壁的外側配置密封材。柱體及間隔 壁、密封材例如由紫外線硬化樹脂構成。如此，柱體及間 隔壁、密封材係作為貼合玻璃基材彼此之接著劑而起作用。 例如專利文獻1所揭示地，於製造LCD面板時，於基座 上配置玻璃基材。於玻璃基材彼此之間夾入例如半硬化之 柱體及間隔壁、密封材。於基座表面被覆樹脂片。從基座 與樹脂片之間所劃出之空間吸引氣體時，藉由大氣壓力的 作用’樹脂片密著於基座表面。樹脂片將玻璃基材彼此以 特定加壓力加壓。此時，向基座照射紫外線。結果，柱體 及間隔壁、密封材硬化。玻璃基材彼此相貼合。然後’於 間隔壁内填充液晶。如此而製造LCD面板。 〔專利文獻1〕日本特開昭63-311227號公報 20 200924978 〔專利文獻2〕曰本特開2〇〇3_131211號公報 〔專利文獻3〕曰本特開平9_51113號公報 C 明内容】 發明概要 5 ❹ 10 則述製造方法，於吸弓丨氣體時在玻璃基材與樹脂片之 間會形成微小的氣泡。基於此氣泡，樹脂片無法均勻地密 著於玻璃基材之表面。樹脂片無法對玻璃基材整個面均句 地作用加壓力。例如於加壓力較弱之處，於柱體及間隔壁、 密封材與玻璃基材之間會產生接著不良。此接著不良則使 良率下降。特別是例如於電子紙巾，利用具有錄性之樹 脂製薄膜基材取代朗基材。絲薄膜騎軟性，於 薄膜基材與樹脂片之間會更顯著地形成氣泡。 本發明係繁於上述實際情況而完成者，其目的在於提 供一種可以均勻的加壓力加壓基材彼此之層積體之製造方法。 15 ❹ 為了達成上述目的，本發明提供一種層積體之製造方 法，包含有以下步驟： 於基座表面疊合第1基材及疊合於第〗基材上之柔軟性 第2基材； 於基座表面被覆氣密性之柔軟性片，將第1及第2基材 夾於柔軟性片與基座之間； 於夾入第1及第2基材之際，於柔軟性片與第2基材之間 配置具有透氣性之透氣片；及 於第1及第2基材之周圍，使柔軟性片密著於基座表 面，於基座及柔軟性片之間確立收容第丨及第2基材之空 20 200924978 間，並自該空間吸引氣體。 5 G 10 15 ❹ 依此製造方法’於第2基材及柔軟性片之間夹入透氣 片。柔軟性片於第1基材及第2基材之周圍密著於基座表 面。於基座及柔軟性片之間確立收容第丨基材及第2基材之 空間。由該空間吸引氣體時，柔軟性片更進—步地密著於 基座表面。透氣片因為具有透氣性’故於第2基材與柔軟性 片之間’從透氣片吸引氣體。透氣片被壓扁。其結果，柔 軟性片於第2基材整個面向以基材作用均勻的加壓力。第2 基材向第1基材以均勻的加壓力加壓。 於此製造方法中’透氣片只要至少於沿前述第2基材表 面之方向具有透氣性即可。藉此於第2基材及柔軟性片之 間，氣體可向沿前述第2基材表面之方向流通。此外，透氣 片且具有均-厚度且由均—材質成形。如此，透氣片可於 第2基材及柔軟性片之間均勻地被壓扁^因此可從柔軟性 片向基座作用均勻之加壓力。 於以上所述之層積體之製造方法中，可於前述第丨及前 述第2基材之間夾入接著劑。此時，亦可前述柔軟性片、前 述透氣片及前述第2基材對紫外線具有透過性，且前述接著 劑使用紫外線硬化樹脂，並向前述基座照射穿透前述柔軟 性片、前述透氣片及前述第2基材之紫外線。 如前所述，一邊維持向第1基材作用之均勻的加壓力， 一邊對紫外線硬化樹脂照射紫外線。紫外線硬化樹脂於第^ 基材及第2基材之間，確實地與第丨基材及第2基材接觸。如 此，第1基材及第2基材相互接著，可避免於第丨基材及第2 20 200924978 基材之間產生接著不良。提高良率。減低層積體之製造成本。 相同地，亦可前述基座及前述第丨基材對紫外線具有透 過性，且前述接著劑使用紫外線硬化樹脂，並向透氣片照 射穿透前述基座及前述第1基材之紫外線。 5 Ο 10 15 ❹ 20 與前述相同’紫外線硬化樹脂於第丨基材及第2基材之 間，確實地與第丨基材及第2基材接觸。如此，第丨基材及第 2基材相互接著。可避免於第丨基材及第2基材之間產生接著 不良。提高良率。減低層積體之製造成本。並且，向透氣 片照射穿透基座及第1基材之紫外線。對透氣片不要求對紫 外線之透過性。透氣片可使用各種材質及各種厚度之片體。 圖式簡單說明 第1圖係概略地顯示與一具體例相關之層積體之製造 裝置之外觀之立體圖。 第2圖係概略地顯示與一具體例相關之層積體之製造 裝置之構造之分解立體圖。 第3圖係沿第1圖之3_3線之部份放大截面圖。 第4圖係概略地顯示與一具體例相關之層積體之構造 之垂直截面圖。 第5圖係沿第4圖之5-5線之截面圖。 第6圖係概略地顯示於基座表面配置基材之狀態之立 體圖。 第7圖係概略地顯示於基座表面被覆柔軟性片之狀態 之截面圖。 第8圖係概略地顯示從基座及柔軟性片之間所劃出之 8 200924978 空間吸引氣體之狀態之截面圖。 • 第9圖係概略地顯示向基座照射穿透柔軟性片、透氣片 及第2基材之紫外線之狀態之截面圖。 ' 第10圖係概略地顯示與其他具體例相關之層積體之製 5 造裝置之外觀之立體圖。 第11圖係概略地顯示被收容於貫通孔之蓋構件之構造 之部份放大截面圖。 ^ ◎ 第12圖係概略地顯示蓋構件之構造之平面圖。 第13圖係概略地顯示於蓋構件上被覆柔軟性片之狀熊 1〇 之截面圖。 〜 第14圖係概略地顯示與又一其他具體例相關之層積體 之製造裝置之構造之立體圖。 第15圖係概略地顯示從基座及柔軟性片之間所劃出之 空間吸引氣體之狀態之截面圖。 15 【實施方式】 Q 較佳實施例之詳細說明 以下，一面參照所附圖式，說明本發明之一實施形態。 第1圖係概略地顯示組裝於例如稱為電子紙之液晶顯 示器(LCD)面板之層積體的製造裝置11之外觀。製造裝置u 20具備基座12。基座12具備平板狀之基台13。於基台13之表 . 面設定有平坦面Μ。於基台13之表面配置有矩形之框體 15。框體15沿基台13之外緣無中斷地延伸。基台13之平坦 面14露出於框體15之内側。如後所述，平坦面14與紫外線 照射機(未圖示)相對。 200924978 於基台13之框體15内側，形成有例如4個貫通孔17。貫 通孔17由基台13表面貫通至背面。貫通孔17例如鄰接並分 配於框體15之四角。各貫通孔17開口於基台13之表面。貫 通孔17之開口構成排氣口。於基台13之背面，各貫通孔17 5 連接排氣管18之一端。各排氣管18之另一端連接於一根連 結管19。於連結管19連接真空泵21。藉由排氣管18及連結 管19之作用，真空泵21可從各貫通孔17吸引氣體。 如第2圖所示，框體15具備安裝於基台13之平坦面14上 之下側框體22及疊合於下側框體22上之上侧框體23。下側 10 框體22及上側框體23皆沿著基台13之外緣無中斷地延伸。 下側框體22及上側框體23例如由金屬材料形成。下侧框體 22及上側框體23以螺絲24相互連結。螺絲24可配置於下侧 框體22及上側框體23之四角。 15 框體15具備配置於下側框體22及上側框體23之間之柔 軟性片25。柔軟性片25以外緣夾入於下側框體22及上側框 體23。柔軟性片25係使用具有氣密性之例如透明塑膠片。 於此’柔軟性片25可使用Achilles公司製之skypoly(音譯， 註冊商標）片。如第3圖所示，上側框體23具有於下側框體 22之内緣向基台13突出之突部23a。突部23a沿下側框體22 20之内緣無中斷地延伸。藉由突部23a之作用，柔軟性片25密 著於基台13之平坦面14。 於下侧框體22之向下面安裝有墊片26。墊片26安襄於 基台13之平坦面14上。墊片26沿下側框體22之外緣無中斷 地延伸。於墊片26可使用例如橡膠製之〇型環。墊片26藉由 200924978 下侧框體22及上側框體23之重量，以相當的加壓力被加壓 於基台13之平坦面14。墊片26被壓扁。結果，墊片26可全 面性地密著於基台13之平坦面14。 5 Ο 10 15 ❹ 於貫通孔17劃分成於基台13之背面與排氣管18連接之 第1徑之小徑部27、及連接於基台13之平坦面14之比第1徑 大之第2徑之大徑部28。小徑部27及大徑部28以階差面29連 接。階差面29例如與平坦面14平行延伸。小徑部27及大徑 部28皆例如可劃出圓柱空間。於此，大徑部28之轴心與小 徑部27之軸心一致》大徑部28之深度可設定為較小。 第4圖係概略地顯示組裝於例如電子紙之層積體31之 截面構造。此層積體31具備具有柔軟性之第1基材32及第2 基材33。第1基材32及第2基材33相互平行延伸。第1基材32 及第2基材33例如由聚碳酸酯之透明樹脂製之薄膜材而構 成。第1基材32及第2基材33例如對紫外線具有透過性。 第1基材32之表面即内面，形成有透明的第1電極34。 同樣地，第2基材33之背面即内面，形成有透明的第2電極 35。第1電極34及第2電極35可使用例如ΙΤΟ(氧化銦錫）。第 1電極34及第2電極35對紫外線具有透過性。第1電極34及第 2電極35由第1基材32及第2基材33之輪廓向外側引出。 一併參照第5圖，於第1電極34及第2電極35之間夾有間 隔壁36。間隔壁36例如使用紫外線硬化樹脂。於間隔壁36 形成有開口 37。於間隔壁36之外侧，於第1電極34及第2電 極35之間夾有密封材38。於密封材38形成有開口 39。密封 材38例如使用紫外線硬化樹脂。 20 200924978 5 © 10 15 ❹ 20 於間隔壁36之内侧，複數的柱體41例如成矩陣狀配 置。柱體41夾於第1電極34及第2電極35之間。柱體41彼此 之間隔有特定間隙。於平行於第1基材32表面之假想平面内 所設定之各柱體41之截面例如為十字形。柱體41例如使用 紫外線硬化樹脂。於相鄰接之四個柱體41之間所劃出之 域構成1點。 如後所述，於由第1電極34、第2電極35及間隔壁36所 劃出之空間注入液晶、即膽固醇型液晶（未圖示）。膽固醇型 液晶填充於柱體41彼此之間。如此，確立LCD面板。電子 紙例如由二片LCD面板之層積體構成。各lcd面板之膽固 醇型液晶例如發出紅、綠、藍之三原色光。結果，於電子 紙顯示影像。 接著，簡單說明如上述之層積體31之製造方法。首先， 如第6圖所示，將框體15從基台13抬起。於基台13之平坦面 14上，於貫通孔17之内侧配置第丨基材32。於第丨基材32上 預先疊合有第2基材33。於第1基材32及第2基材33可預先貼 合第1電極34及第2電極35。同樣地，於第1電極34及第2電 極35之間，預先塗佈有具有間隔壁36、密封材38及柱體41 之形狀之接著劑，即紫外線硬化樹脂。如此，藉由紫外線 硬化樹脂之作用’第2基材33暫時固定於第1基材32上。 於第2基材33之表面即外面，配置有透氣片45。透氣片 45之外緣配置於比第〖基材32及第2基材33之外緣更外側。 透氣片45具有均一厚度且由均一材質成形。此透氣片45例 如可使用多孔質之樹脂薄膜。此透氣片45於沿基台13之平 12 200924978 坦面14之方向具有透氣性。同時，透氣片45於垂直於基台 . 13之平坦面14之方向具有透氣性。 透氣片45對紫外線之透過率’例如宜設定為60%以 上。於此，透氣片45可使用例如日東電工公司製之多孔質 • 5之樹脂薄膜。此透氣片45例如形成半透明。因此’對紫外 線之透過率例如可以透氣片45之厚度調整。透氣片45之厚 度例如設定為0.1mm。此時，透氣片45具有70%左右之透過率。 然後，如第7圖所示，於基台13之平坦面14配置框體 〇 15。第1基材32及第2基材33由柔軟性片25及基台13夾持。 10柔軟性片乃於第1基材32及第2基材33之周圍密著於基台13 之平坦面14。藉此，於柔軟性片25及基台13之間確立收容 第1基材32及第2基材33之空間47。藉由塾片26之作用，沿 著框體15之外緣，空間47被密閉。 此時，藉由真空泵21之作動，自貫通孔17吸引氣體。 15其結果如第8圖所示，空間47之氣體向貫通子⑴流通。基於 © ⑽之吸引，空間47之壓力減少。結果，於柔軟性片25作 用大氣壓力。藉由大氣壓力之作用，柔軟性片25向基台13 加壓。結果’隨著自空間47吸引氣體，柔軟性片Μ密著於 透氣片45。 2〇如前所述’貫通孔17具有大徑部28。大徑部28以較大 . 餘擴展。因此，與貫通孔η之孔徑較小之情形相比較， 向貫通孔17流通之氣體流動會減速。結果，於貫通孔π周 圍，柔軟性片25對平坦面14之加壓力即密著力減弱。如此， 於平坦面14上，可確實地確保氣體流路。可防止因柔軟性 13 200924978 - 片25封閉貫通孔I7之開口。真空泵21可自貫通孔17即空間 - 47確實地吸引氣體。 透氣片45因為於沿基台13之平坦面14之方向具有透氣 性，故可確保柔軟性片25及第2基材33之間之氣體流路。因 . 5此，氣體由透氣片45内向貫通孔17流通。可確實地避免第2 基材33及透氣片45之間、以及透氣片45及柔軟性片25之間 殘存氣泡。透氣片45其整個面被均等地壓扁。柔軟性片25 ❹ 可確實地密著於透氣片45。結果，柔軟性片25向第2基材33 作用均勻的加壓力。 10 如第9圖所示’一面維持柔軟性片25之加壓力，使基台 13之平坦面14與紫外線照射機48相對。紫外線照射機48向 基台13之平坦面14照射紫外線。柔軟性片25及透氣片45、 第2基材33、第2電極35因為對紫外線具有透過性，紫外線 於第1基材32及第2基材33之間使紫外線硬化樹脂硬化。結 15 果，基於紫外線硬化樹脂，第1基材32及第2基材33之間形 Q 成間隔壁36及密封材38、柱體41。間隔壁36及密封材38、 柱體41將第1基材32及第2基材33相互貼合。如此製造層積 體3卜 然後’將層積體31自製造裝置11取下。於層積體31中， • 20自密封材38之開口 39注入例如膽固醇型液晶。膽固酵型液 • 晶自間隔壁36之開口 37流入。於間隔壁36内側之柱體41彼 此之間充填有膽固醇型液晶。於充填液晶後，將密封材38 之開口 39密封。如此製造LCD面板。 依上述之層積體31之製造方法，於第2基材33及柔軟性 200924978 片25之間夾入透氣片45。透氣片45於第2基材33及柔軟性片 25之間均勻地壓扁。結果，柔軟性片25可於第2基材33整個 面向第1基材32以均勻的加壓力將第2基材33加壓。此時， 第1基材32及第2基材33相互接著。藉此可避免第丨基材32及 5 第2基材33之間產生接著不良。良率提升。製造成本減低。 第10圖係概略地顯示與其他具體例相關之製造裝置 11a之外觀。於此製造裝置11&中，基台13設置於紫外線照 ❹ 10 射機48上。基台13係由例如破璃等對紫外線具有透過性之 材料形成。紫外線照射機48由基台13之背面向基扣上之 第1基材32及透氣# 45照射料線。前述排氣管18及連結管 19可組裝於紫外賴射機蝴，，於料線麟機48内， 排氣管18及連結管19可配置於紫外線照射區域之外側。除 此之外，對於與前述製造裝411相同之構成及構造，賦予 相同之參照符號。 15 Ο 此製造裝置Ua可實現與前述相同之作用效果4外， 紫外線照射機働基台13之背㈣錢以5歸紫外線。 因此’對於柔軟性似及透氣以5,μ求對紫外線之透 過性。例如於透氣片45使用前述多孔f之樹脂薄膜時，亦 20 可不調整樹脂薄膜之厚度。藉此，柔軟性片25及透氣片衫 可使用各種材質及各種厚度之片體。 如第u圖所示，於前述製造裝置u、ua中，亦可於各 貫通孔17之大徑部魏置蓋構件51。蓋_51例如具_ 筒狀之蓋本㈣及由蓋本㈣上突出之突起Μ。蓋本料 之厚度與大徑部狀較蚊為㈣。突紗例如形成半 15 200924978 球狀。大起53自平垣面14突起特定高度。 ' 12ffi所* ’於蓋本體湖例如以分隔板54區劃成 . #窩狀。以分隔板54設置網目。於分隔板54彼此之間確立 氣體之机路。如第13圖所示’依此蓋構件5丨，於氣體吸引 5時於突起53之周圍形成間隙 。可確實地避免貫通孔17之開 口被封閉。可確實地確保向貫通孔17之氣體流路。 此外’如第14圖所示’於前述製造裝置11、11a，亦可 φ 於基台13之平垣面W之較四個貫通孔17為内侧之處形成突 起55 °突起55例如形成為半球狀。突起55可配置於例如以 10四個貫通孔17所畫出之假想長方形之對角線上。如第15圖 所不，於基台13之平坦面14配置第〖基材32及第2基材33 時，突起55配置於第丨基材32及第2基材33之輪廓之外侧。 其結果，於氣體吸引時於突起55之周圍形成間隙。此間隙 確保向貫通孔17之氣體流路。結果，可確實地自空間47吸 15引氣體。 ❹ 於上述之製造裝置11、11a中，透氣片45亦可例如使用 和紙（日本紙)。前述多孔質之樹脂薄膜可確實地避免產生塵 埃。因此，於要求製造電子紙用之液晶片之潔淨度時，可 使用樹脂薄膜。另一方面，於不要求高潔淨度時，可使用 • 20和紙。和紙與前述樹脂薄骐同樣具有透氣性。 - 此外，於間隔壁36及密封材38、柱體41亦可使用熱硬 化樹脂。此時，町取代前述紫外線照射機48，例如於基台 13組裝入所謂加熱器之加熱裝置。又，於第丨基材32及第2 基材33使用玻璃基材時，亦可適用本發明之製造方法。進 16 200924978 5 Ο 而又，於基台13之貫通孔17之位置及個數並不限定於前述 實施形態。 1：圖式簡單說明3 第1圖係概略地顯示與一具體例相關之層積體之製造 裝置之外觀之立體圖。 第2圖係概略地顯示與一具體例相關之層積體之製造 裝置之構造之分解立體圖。 第3圖係沿第1圖之3-3線之部份放大截面圖。 第4圖係概略地顯示與一具體例相關之層積體之構造 10 之垂直截面圖。 第5圖係沿第4圖之5-5線之截面圖。 第6圖係概略地顯示於基座表面配置基材之狀態之立 體圖。 第7圖係概略地顯示於基座表面被覆柔軟性片之狀態 15 之截面圖。 ❹ 第8圖係概略地顯示從基座及柔軟性片之間所劃出之 空間吸引氣體之狀態之截面圖。 第9圖係概略地顯示向基座照射穿透柔軟性片、透氣片 及第2基材之紫外線之狀態之截面圖。 20 第10圖係概略地顯示與其他具體例相關之層積體之製 造裝置之外觀之立體圖。 第11圖係概略地顯示被收容於貫通孔之蓋構件之構造 之部份放大截面圖。 第12圖係概略地顯示蓋構件之構造之平面圖。 25 第13圖係概略地顯示於蓋構件上被覆柔軟性片之狀態 17 200924978 之截面圖。 第14圖係概略地顯示與又一其他具體例相關之層積體 之製造裝置之構造之立體圖。 第15圖係概略地顯示從基座及柔軟性片之間所劃出之 空間吸引氣體之狀態之截面圖。 【主要元件符號說明】 11…製造裝置 11a…製造裝置 12…基座 13.. .基台 14·.·平坦面 15…框體 17."貫通孔 18.. .排氣管 19_"連結管 21.. .真空泵 22.. .下侧框體 23…上侧框體 23a…突部 24.. .螺絲 25.. .柔軟性片 26.. .墊片 27·.·小徑部 28·.·大徑部 29.. .階差面200924978 IX. Description of the Invention: [Technical Field 3 of the Invention] Field of the Invention 5 ❹ 10 15 〇 The present invention relates to a method of manufacturing a laminate which is assembled, for example, on a liquid crystal display (LCD) panel called electronic paper. BACKGROUND OF THE INVENTION LCD panels, for example, are well known. The LCD panel has a pair of glass substrates extending in parallel with each other. A plurality of columns constituting the columnar spacers are disposed between the glass substrates. The pillars are arranged, for example, in a matrix. Fill the liquid crystal between the cylinders. The cylinders are surrounded by partition walls disposed between the glass substrates. The liquid crystal is filled between adjacent pillars in the partition wall. Further, a sealing material is disposed outside the partition walls between the glass substrates. The column, the partition wall, and the sealing material are made of, for example, an ultraviolet curable resin. As described above, the column, the partition walls, and the sealing material function as an adhesive for bonding the glass substrates to each other. For example, as disclosed in Patent Document 1, a glass substrate is disposed on a susceptor when an LCD panel is manufactured. For example, a semi-hardened column, a partition wall, and a sealing material are sandwiched between the glass substrates. A resin sheet is coated on the surface of the base. When the gas is drawn from the space drawn between the susceptor and the resin sheet, the resin sheet adheres to the surface of the susceptor by the action of atmospheric pressure. The resin sheet presses the glass substrates with each other at a specific pressing force. At this time, the base is irradiated with ultraviolet rays. As a result, the column and the partition walls and the sealing material are hardened. The glass substrates are bonded to each other. Then, the liquid crystal is filled in the partition walls. The LCD panel is manufactured in this way. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. ❹ 10 The manufacturing method is such that minute bubbles are formed between the glass substrate and the resin sheet when the gas is sucked. Based on this bubble, the resin sheet could not be uniformly adhered to the surface of the glass substrate. The resin sheet cannot apply pressure to the entire surface of the glass substrate. For example, where the pressure is weak, a poor adhesion may occur between the column and the partition wall, the sealing material, and the glass substrate. This subsequent failure results in a decrease in yield. In particular, for example, in electronic paper towels, a film substrate made of a resin having a recording property is used in place of a rough substrate. The silk film rides softly, and bubbles are more prominently formed between the film substrate and the resin sheet. The present invention has been accomplished in view of the above-described actual circumstances, and an object thereof is to provide a method for producing a laminate in which a substrate can be uniformly pressed under pressure. 15 ❹ In order to achieve the above object, the present invention provides a method for producing a laminate comprising the steps of: laminating a first substrate on a surface of a susceptor and a flexible second substrate laminated on the substrate; The air-tight flexible sheet is coated on the surface of the pedestal, and the first and second substrates are sandwiched between the flexible sheet and the susceptor; and when the first and second substrates are sandwiched, the flexible sheet and the flexible sheet are A gas permeable sheet having a gas permeable property is disposed between the second base materials; and a flexible sheet is adhered to the surface of the susceptor around the first and second base materials, and a accommodating accommodating between the susceptor and the flexible sheet is established. And the space of the second substrate is 20 200924978, and the gas is attracted from the space. 5 G 10 15 ❹ According to this production method, a gas permeable sheet is sandwiched between the second substrate and the flexible sheet. The flexible sheet is adhered to the surface of the susceptor around the first base material and the second base material. A space for accommodating the second substrate and the second substrate is established between the susceptor and the flexible sheet. When the gas is attracted by the space, the flexible sheet is further adhered to the surface of the base. The gas permeable sheet attracts gas from the gas permeable sheet because of the gas permeability "between the second substrate and the flexible sheet." The gas permeable sheet is squashed. As a result, the flexible sheet is applied to the entire surface of the second substrate to apply a uniform pressing force to the substrate. The second substrate is pressurized to the first substrate with a uniform pressing force. In the production method, the gas permeable sheet may have gas permeability in at least the direction along the surface of the second substrate. Thereby, the gas can flow in the direction along the surface of the second substrate between the second substrate and the flexible sheet. Further, the gas permeable sheet has a uniform thickness and is formed of a uniform material. Thus, the gas permeable sheet can be uniformly flattened between the second base material and the flexible sheet, so that a uniform pressure can be applied from the flexible sheet to the susceptor. In the method for producing a laminate according to the above aspect, an adhesive may be interposed between the second substrate and the second substrate. In this case, the flexible sheet, the gas permeable sheet, and the second base material may be permeable to ultraviolet rays, and the adhesive may be used to illuminate the susceptor to penetrate the flexible sheet and the gas permeable sheet. And ultraviolet rays of the second substrate. As described above, the ultraviolet curable resin is irradiated with ultraviolet rays while maintaining a uniform pressing force acting on the first substrate. The ultraviolet curable resin is surely brought into contact with the second substrate and the second substrate between the second substrate and the second substrate. Therefore, the first base material and the second base material are mutually connected, and it is possible to avoid occurrence of a defective defect between the second base material and the second 20 200924978 base material. Increase yield. Reduce the manufacturing cost of the laminate. Similarly, the susceptor and the second substrate may be permeable to ultraviolet rays, and the adhesive may be an ultraviolet ray-curable resin, and the ultraviolet ray may be transmitted through the permeable substrate and the first substrate. 5 Ο 10 15 ❹ 20 The same as the above, the ultraviolet curable resin is surely brought into contact with the second substrate and the second substrate between the second substrate and the second substrate. Thus, the second substrate and the second substrate are bonded to each other. It is possible to avoid a defect in adhesion between the second substrate and the second substrate. Increase yield. Reduce the manufacturing cost of the laminate. Further, the gas permeable sheet is irradiated with ultraviolet rays that penetrate the susceptor and the first substrate. The permeability of the ultraviolet ray is not required for the gas permeable sheet. The gas permeable sheet can be used in various materials and sheets of various thicknesses. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view schematically showing the appearance of a manufacturing apparatus of a laminate relating to a specific example. Fig. 2 is an exploded perspective view showing the structure of a manufacturing apparatus of a laminate relating to a specific example. Fig. 3 is an enlarged cross-sectional view taken along line 3_3 of Fig. 1. Fig. 4 is a vertical sectional view schematically showing the structure of a laminate relating to a specific example. Fig. 5 is a cross-sectional view taken along line 5-5 of Fig. 4. Fig. 6 is a perspective view schematically showing a state in which a substrate is placed on the surface of the susceptor. Fig. 7 is a cross-sectional view schematically showing a state in which the surface of the susceptor is covered with a flexible sheet. Fig. 8 is a cross-sectional view schematically showing a state in which a gas is drawn from the space between the base and the flexible sheet. Fig. 9 is a cross-sectional view schematically showing a state in which the base is irradiated with ultraviolet rays penetrating the flexible sheet, the gas permeable sheet, and the second substrate. Fig. 10 is a perspective view schematically showing the appearance of a laminated body relating to other specific examples. Fig. 11 is a partially enlarged cross-sectional view showing the structure of the cover member housed in the through hole. ^ ◎ Fig. 12 is a plan view schematically showing the structure of the cover member. Fig. 13 is a cross-sectional view schematically showing a shape of a soft sheet coated with a flexible sheet on a lid member. Fig. 14 is a perspective view schematically showing the structure of a manufacturing apparatus of a laminate relating to still another specific example. Fig. 15 is a cross-sectional view schematically showing a state in which a gas is attracted from a space drawn between a susceptor and a flexible sheet. [Embodiment] Q. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a view schematically showing the appearance of a manufacturing apparatus 11 assembled in a laminate of, for example, a liquid crystal display (LCD) panel called electronic paper. The manufacturing device u 20 includes a susceptor 12 . The susceptor 12 is provided with a flat base 13 . On the table of the base table 13. The surface is set with a flat surface. A rectangular frame 15 is disposed on the surface of the base 13 . The frame 15 extends uninterrupted along the outer edge of the base 13. The flat surface 14 of the base 13 is exposed inside the frame 15. As will be described later, the flat surface 14 is opposed to an ultraviolet ray irradiator (not shown). In 200924978, for example, four through holes 17 are formed inside the frame 15 of the base 13 . The through hole 17 is penetrated from the surface of the base 13 to the back surface. The through holes 17 are adjacent to each other and are disposed at the four corners of the frame body 15, for example. Each of the through holes 17 is open to the surface of the base 13 . The opening of the through hole 17 constitutes an exhaust port. On the back side of the base 13, each through hole 17 5 is connected to one end of the exhaust pipe 18. The other end of each exhaust pipe 18 is connected to a connecting pipe 19. The vacuum pump 21 is connected to the connecting pipe 19. The vacuum pump 21 can suck the gas from each of the through holes 17 by the action of the exhaust pipe 18 and the connecting pipe 19. As shown in Fig. 2, the frame body 15 includes a lower side frame body 22 attached to the flat surface 14 of the base 13, and a lower side frame body 23 superposed on the lower side frame body 22. The lower side 10 frame 22 and the upper side frame 23 all extend without interruption along the outer edge of the base 13 . The lower frame 22 and the upper frame 23 are formed of, for example, a metal material. The lower frame 22 and the upper frame 23 are coupled to each other by screws 24. The screw 24 can be disposed at the four corners of the lower frame 22 and the upper frame 23. The housing 15 includes a flexible sheet 25 disposed between the lower housing 22 and the upper housing 23. The outer edge of the flexible sheet 25 is sandwiched between the lower frame 22 and the upper frame 23. The flexible sheet 25 is made of, for example, a transparent plastic sheet having airtightness. As the 'soft sheet 25', a skypoly (registered trademark) sheet made by Achilles Co., Ltd. can be used. As shown in Fig. 3, the upper frame body 23 has a projection 23a projecting from the inner edge of the lower frame 22 toward the base 13. The projection 23a extends uninterrupted along the inner edge of the lower frame 2220. The flexible sheet 25 is adhered to the flat surface 14 of the base 13 by the action of the projection 23a. A spacer 26 is attached to the lower side of the lower frame 22. The spacer 26 is mounted on the flat surface 14 of the base 13. The spacer 26 extends uninterrupted along the outer edge of the lower side frame 22. For the gasket 26, for example, a rubber-made 〇-shaped ring can be used. The spacer 26 is pressed against the flat surface 14 of the base 13 by a relatively constant pressing force by the weight of the lower casing 22 and the upper casing 23 of 200924978. The spacer 26 is flattened. As a result, the spacer 26 can be fully adhered to the flat surface 14 of the base 13. 5 Ο 10 15 ❹ The small diameter portion 27 of the first diameter connected to the exhaust pipe 18 on the back surface of the base 13 and the flat surface 14 connected to the base 13 are smaller than the first diameter. The large diameter portion 28 of the second diameter. The small diameter portion 27 and the large diameter portion 28 are connected by a step surface 29. The step surface 29 extends, for example, in parallel with the flat surface 14. Both the small diameter portion 27 and the large diameter portion 28 can define a cylindrical space, for example. Here, the axis of the large diameter portion 28 coincides with the axis of the small diameter portion 27. The depth of the large diameter portion 28 can be set to be small. Fig. 4 is a view schematically showing a cross-sectional structure of a laminate 31 assembled in, for example, electronic paper. This laminated body 31 is provided with the first base material 32 and the second base material 33 which are flexible. The first base material 32 and the second base material 33 extend in parallel to each other. The first base material 32 and the second base material 33 are made of, for example, a film material made of a transparent resin of polycarbonate. The first base material 32 and the second base material 33 are, for example, transparent to ultraviolet rays. The inner surface of the first base material 32, that is, the inner surface, is formed with a transparent first electrode 34. Similarly, a transparent second electrode 35 is formed on the inner surface of the back surface of the second base material 33. For the first electrode 34 and the second electrode 35, for example, antimony (indium tin oxide) can be used. The first electrode 34 and the second electrode 35 are transparent to ultraviolet light. The first electrode 34 and the second electrode 35 are drawn outward from the outline of the first base material 32 and the second base material 33. Referring to Fig. 5, a partition wall 36 is interposed between the first electrode 34 and the second electrode 35. The partition wall 36 is, for example, an ultraviolet curable resin. An opening 37 is formed in the partition wall 36. On the outer side of the partition wall 36, a seal member 38 is interposed between the first electrode 34 and the second electrode 35. An opening 39 is formed in the sealing material 38. For the sealing material 38, for example, an ultraviolet curing resin is used. 20 200924978 5 © 10 15 ❹ 20 On the inner side of the partition wall 36, a plurality of columns 41 are arranged, for example, in a matrix. The pillar 41 is sandwiched between the first electrode 34 and the second electrode 35. The columns 41 are spaced apart from each other by a specific gap. The cross section of each of the columns 41 set in the imaginary plane parallel to the surface of the first base material 32 is, for example, a cross. For the column 41, for example, an ultraviolet curable resin is used. The area drawn between the adjacent four cylinders 41 constitutes one point. As will be described later, liquid crystal, that is, cholesteric liquid crystal (not shown) is injected into the space defined by the first electrode 34, the second electrode 35, and the partition wall 36. The cholesteric liquid crystal is filled between the columns 41. In this way, the LCD panel is established. The electronic paper is composed of, for example, a laminate of two LCD panels. The cholesteric liquid crystal of each lcd panel emits, for example, three primary colors of red, green, and blue. As a result, the image is displayed on the electronic paper. Next, a method of manufacturing the laminate 31 as described above will be briefly described. First, as shown in Fig. 6, the frame 15 is lifted from the base 13. On the flat surface 14 of the base 13, a second base material 32 is disposed inside the through hole 17. The second base material 33 is superposed on the second base material 32 in advance. The first electrode 34 and the second electrode 35 can be bonded to each other in the first base material 32 and the second base material 33 in advance. In the same manner, an ultraviolet ray curable resin, which is a binder having a shape of the partition wall 36, the sealing material 38, and the column 41, is applied in advance between the first electrode 34 and the second electrode 35. Thus, the second base material 33 is temporarily fixed to the first base material 32 by the action of the ultraviolet curable resin. A gas permeable sheet 45 is disposed on the outer surface of the surface of the second base material 33. The outer edge of the gas permeable sheet 45 is disposed outside the outer edge of the base material 32 and the second base material 33. The gas permeable sheet 45 has a uniform thickness and is formed of a uniform material. For the gas permeable sheet 45, for example, a porous resin film can be used. The gas permeable sheet 45 is gas permeable in the direction of the flat surface 14 of the base 13 of the flat 12 200924978. At the same time, the gas permeable sheet 45 has gas permeability in a direction perpendicular to the flat surface 14 of the base. The transmittance of the gas permeable sheet 45 to ultraviolet rays is preferably set to, for example, 60% or more. Here, as the gas permeable sheet 45, for example, a porous resin film made of Nitto Denko Corporation can be used. This gas permeable sheet 45 is, for example, formed to be translucent. Therefore, the transmittance to the ultraviolet ray can be adjusted, for example, by the thickness of the gas permeable sheet 45. The thickness of the gas permeable sheet 45 is set, for example, to 0.1 mm. At this time, the gas permeable sheet 45 has a transmittance of about 70%. Then, as shown in Fig. 7, the frame 〇 15 is placed on the flat surface 14 of the base 13. The first base material 32 and the second base material 33 are sandwiched by the flexible sheet 25 and the base 13 . The 10 flexible sheet is adhered to the flat surface 14 of the base 13 around the first base material 32 and the second base material 33. Thereby, a space 47 for accommodating the first base material 32 and the second base material 33 is established between the flexible sheet 25 and the base 13 . The space 47 is sealed along the outer edge of the frame 15 by the action of the cymbal 26. At this time, the gas is sucked from the through hole 17 by the operation of the vacuum pump 21. As a result, as shown in Fig. 8, the gas in the space 47 flows to the through-hole (1). Based on the attraction of © (10), the pressure in space 47 is reduced. As a result, atmospheric pressure is applied to the flexible sheet 25. The flexible sheet 25 is pressurized to the base 13 by the action of atmospheric pressure. As a result, as the gas is attracted from the space 47, the flexible sheet is adhered to the gas permeable sheet 45. 2〇 As described above, the through hole 17 has a large diameter portion 28. The large diameter portion 28 is expanded by a large amount. Therefore, the flow of the gas flowing through the through hole 17 is decelerated as compared with the case where the diameter of the through hole η is small. As a result, the pressure applied to the flat surface 14 by the flexible sheet 25 is weakened by the through hole π. In this way, the gas flow path can be surely ensured on the flat surface 14. It can prevent the softness 13 200924978 - The sheet 25 closes the opening of the through hole I7. The vacuum pump 21 can surely attract the gas from the through hole 17, that is, the space - 47. Since the gas permeable sheet 45 has gas permeability in the direction along the flat surface 14 of the base 13, the gas flow path between the flexible sheet 25 and the second base material 33 can be ensured. Therefore, the gas flows from the inside of the gas permeable sheet 45 to the through hole 17. It is possible to surely prevent air bubbles from remaining between the second base material 33 and the gas permeable sheet 45 and between the gas permeable sheet 45 and the flexible sheet 25. The entire surface of the gas permeable sheet 45 is equally flattened. The flexible sheet 25 ❹ can be surely adhered to the gas permeable sheet 45. As a result, the flexible sheet 25 applies a uniform pressing force to the second base material 33. As shown in Fig. 9, the pressing force of the flexible sheet 25 is maintained while the flat surface 14 of the base 13 is opposed to the ultraviolet ray irradiator 48. The ultraviolet ray irradiator 48 irradiates the flat surface 14 of the base 13 with ultraviolet rays. The flexible sheet 25 and the gas permeable sheet 45, the second base material 33, and the second electrode 35 are transparent to ultraviolet rays, and the ultraviolet ray hardens the ultraviolet curable resin between the first base material 32 and the second base material 33. As a result, the partition wall 36, the seal member 38, and the column body 41 are formed between the first base material 32 and the second base material 33 based on the ultraviolet curable resin. The partition wall 36, the sealing material 38, and the column 41 bond the first base material 32 and the second base material 33 to each other. The layered body 3 is thus fabricated and then the laminate 31 is removed from the manufacturing apparatus 11. In the laminate 31, 20, for example, a cholesteric liquid crystal is injected from the opening 39 of the self-sealing material 38. The gallbladder fermentation solution • The crystal flows in from the opening 37 of the partition wall 36. The pillars 41 on the inner side of the partition wall 36 are filled with a cholesteric liquid crystal between them. After filling the liquid crystal, the opening 39 of the sealing material 38 is sealed. The LCD panel is manufactured in this way. According to the manufacturing method of the laminated body 31 described above, the gas permeable sheet 45 is interposed between the second base material 33 and the flexible 200924978 sheet 25. The gas permeable sheet 45 is uniformly flattened between the second base material 33 and the flexible sheet 25. As a result, the flexible sheet 25 can pressurize the second base material 33 with the uniform pressing force on the entire surface of the second base material 33 facing the first base material 33. At this time, the first base material 32 and the second base material 33 are mutually connected. Thereby, it is possible to avoid a defect in the connection between the second base material 32 and the second base material 33. Yield improvement. Manufacturing costs are reduced. Fig. 10 is a view schematically showing the appearance of the manufacturing apparatus 11a associated with other specific examples. In this manufacturing apparatus 11 & the base 13 is provided on the ultraviolet ray 10 projector 48. The base 13 is formed of a material that is transparent to ultraviolet rays, such as glass. The ultraviolet ray irradiator 48 irradiates the first base material 32 and the air permeable #45 from the back surface of the base 13 to the base material. The exhaust pipe 18 and the connecting pipe 19 can be assembled to the ultraviolet projector, and in the line machine 48, the exhaust pipe 18 and the connecting pipe 19 can be disposed outside the ultraviolet irradiation region. The same configurations and structures as those of the above-described manufacturing apparatus 411 are denoted by the same reference numerals. 15 Ο The manufacturing device Ua can achieve the same effect 4 as described above, and the back of the ultraviolet irradiation machine 働 base 13 (4) is 5 ultraviolet rays. Therefore, for the softness and the venting, the transparency to ultraviolet rays is obtained at 5, μ. For example, when the above-mentioned porous f resin film is used for the gas permeable sheet 45, the thickness of the resin film may not be adjusted. Thereby, the flexible sheet 25 and the breathable sheet can be made of sheets of various materials and thicknesses. As shown in Fig. u, in the manufacturing apparatus u, ua, the cover member 51 may be placed on the large diameter portion of each of the through holes 17. The cover _51 has, for example, a cylindrical cover (four) and a protrusion 突出 protruding from the cover (four). The thickness of the cover material and the large diameter portion are more than the mosquitoes (4). The brilliance forms, for example, a half 15 200924978 spherical. The large lift 53 protrudes from the flat surface 14 by a certain height. '12ffi*' is formed in the cover body lake, for example, by a partition plate 54. #窝状. The mesh is set by the partition plate 54. A gas path is established between the partition plates 54 with each other. As shown in Fig. 13, the cover member 5 is formed such that a gap is formed around the projection 53 when the gas is attracted 5 . It is possible to surely prevent the opening of the through hole 17 from being closed. The gas flow path to the through hole 17 can be surely ensured. Further, as shown in Fig. 14, in the above-described manufacturing apparatus 11, 11a, a projection 55 may be formed at a position where the four through holes 17 of the flat surface W of the base 13 are inside, for example, a hemispherical shape is formed. . The projections 55 can be disposed, for example, on the diagonal line of the imaginary rectangle drawn by the ten through holes 17. As shown in Fig. 15, when the base material 32 and the second base material 33 are disposed on the flat surface 14 of the base 13, the projections 55 are disposed on the outer side of the outline of the second base material 32 and the second base material 33. As a result, a gap is formed around the protrusion 55 at the time of gas attraction. This gap ensures the gas flow path to the through hole 17. As a result, the gas can be surely sucked from the space 47. In the above-described manufacturing apparatus 11, 11a, the gas permeable sheet 45 can also be used, for example, with paper (Japanese paper). The above porous resin film can surely avoid the generation of dust. Therefore, when it is required to produce the cleanliness of the liquid crystal sheet for electronic paper, a resin film can be used. On the other hand, • 20 and paper can be used when high cleanliness is not required. The paper and the paper have the same gas permeability as the aforementioned resin sheet. Further, a thermosetting resin may be used for the partition wall 36, the sealing member 38, and the column 41. At this time, the town replaces the ultraviolet ray irradiation machine 48, and for example, a heating device called a heater is incorporated in the base 13 group. Further, when a glass substrate is used for the second base material 32 and the second base material 33, the production method of the present invention can also be applied. Further, the number and the number of the through holes 17 in the base 13 are not limited to the above embodiments. 1: BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view schematically showing the appearance of a manufacturing apparatus of a laminate relating to a specific example. Fig. 2 is an exploded perspective view showing the structure of a manufacturing apparatus of a laminate relating to a specific example. Fig. 3 is an enlarged cross-sectional view taken along line 3-3 of Fig. 1. Fig. 4 is a vertical sectional view schematically showing the structure 10 of a laminate relating to a specific example. Fig. 5 is a cross-sectional view taken along line 5-5 of Fig. 4. Fig. 6 is a perspective view schematically showing a state in which a substrate is placed on the surface of the susceptor. Fig. 7 is a cross-sectional view schematically showing a state in which the surface of the susceptor is covered with a flexible sheet. ❹ Fig. 8 is a cross-sectional view schematically showing a state in which a gas is drawn from a space drawn between a susceptor and a flexible sheet. Fig. 9 is a cross-sectional view schematically showing a state in which ultraviolet rays are transmitted through the flexible sheet, the gas permeable sheet, and the second substrate to the susceptor. 20 Fig. 10 is a perspective view schematically showing the appearance of a manufacturing apparatus of a laminate relating to other specific examples. Fig. 11 is a partially enlarged cross-sectional view showing the structure of the cover member housed in the through hole. Fig. 12 is a plan view schematically showing the configuration of a cover member. 25 Fig. 13 is a cross-sectional view schematically showing the state in which the flexible sheet is covered on the cover member 17 200924978. Fig. 14 is a perspective view schematically showing the configuration of a manufacturing apparatus of a laminate relating to still another specific example. Fig. 15 is a cross-sectional view schematically showing a state in which a gas is attracted from a space drawn between a susceptor and a flexible sheet. [Description of main component symbols] 11: Manufacturing apparatus 11a: Manufacturing apparatus 12: Base 13: Base 14: Flat surface 15: Frame 17. " Through hole 18.. Exhaust pipe 19_" Tube 21. Vacuum pump 22.. Lower side frame 23... Upper side frame 23a... Projection 24: Screw 25.. Soft sheet 26.. Pad 27·. Small diameter portion 28 ···The large diameter section 29.. .
31.. .層積體 32…第1基# 33· ••第2基材 34.. .第1電極 35.. .第2電極 36.. .間隔壁 37."開口 38.. .密封材 39.. .開口 41…柱體 45.. .透氣片 47.. .空間 48…紫外線照射機 51…蓋餅 52.··蓋本體 53.. .突起 54…分隔板 55…突起 1831.. .Laminated body 32...1st base #33·•• 2nd base material 34... 1st electrode 35... 2nd electrode 36.. partition wall 37." opening 38.. Sealing material 39.. Opening 41...Cylinder 45.. Breathable sheet 47.. Space 48...Ultraviolet irradiator 51...Cover 52.·Cap body 53..Protrusion 54...Separator 55...protrusion 18