200924849 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種晶片，特別是指一種微流體系統 晶片。 【先前技術】 一般微流體系統（Microfluidic system)晶 〇 〇 層結構疊接構成，並於此三層結構中加工設計出所需之反 應槽、微流道、氣室及微幫浦等元件。微幫浦是微流體系 統晶片的重要元件’主要是用以驅使檢體或試劑經由微流 道而於該等反應槽間流動，以達到在各反應槽與微流道間 輸送微量檢體或試劑之目的。現有微流體系統晶片所採用 之微幫浦技術主要是蠕動式微幫浦，該蠕動式微幫浦是由 多數個沿微流道依序間隔排列之擠壓部所構成，必須藉由 將該等擠壓部依序彈性擠推突伸入微流道中，才能產生蠕 動式幫浦作用，而以類似打水的方式，將檢體或試劑自微 流道—端的反應槽輸送到另一端的反應槽。 但此種蠕動式微幫浦受限於大氣壓力的關係，無法完 全傳輸檢體，且蝶動式微幫浦之各擠壓部間的空隙也會殘 留檢體，對;^檢體量很稀少的試驗而言是種浪費。另外， 此種罐動式微幫浦作動時，由於需驅動多數個擠壓部，所 力較大於該j軋至中而用以擠推該等擠壓部所需之氣體壓 達1Qpsi的壓力才能使蹲動式微幫浦作用而 t=，所以也會造成能源上之浪費，且整個螺動式微 需之翻_較長，輪送效率較差。再者，隨著試 200924849 驗的不同，當晶片上所設置之反應槽數 =反：之片試劑或檢體流動的罐動式“浦結構會Π =二之™為麻須，一必要。 因此’本發明之目的，即在 效率較高之《吸取式晶片 ^ —種結構簡單且輸送 ❹ Ο 接之於明微型吸取式晶片，包含由下往上依序疊 接之一基板層、—流道層與—氣室層。該流道層具有至少 -分別貫穿其頂底面且分別與基板層配合界定出—儲液槽 ^下穿孔、-凹設於其底面之吸引槽道，及二間隔凹設於 其底面且分別連通於該等·槽與該吸引槽道間之微流道 ’且該吸引槽道之容積大於該等微流道容積，該流道層還 具有二分別界U該等微流道頂緣之薄膜狀閥門部，及一 界定出吸引槽道頂緣之薄膜狀吸引部。該氣室層底面凹設 有二分別涵蓋該等閥門部之閥門氣室，及—涵蓋該吸引部 之幫浦氣室。且當該等閥門氣室與幫浦氣室分別被灌注高 壓氣體時，該等閥門部與吸引部會分別往下彈性突伸，而 刀別塞封並擠出該等微流道與吸引槽道内之液體，且當灌 注於該幫浦氣室内之高壓氣體被釋放時，該吸引部會彈性 復位，並於吸引槽道内產生將儲液槽内之液體經由相連通 之微流道吸引至吸引槽道的負壓吸力。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一個較佳實施例的詳細說明中，將可 200924849 清楚的呈現。 如圖1〜3所不，本發明模微型吸取式晶片的較佳實施 例適用於進行微置檢體之輸送。該微型吸取式晶片包含 由下往上依序疊接之_基板層2…流道層3與―氣室層4 。在本實施例中，該基板層2是由玻璃製成，而該流道層3 與氣至層4疋由PDMS製成，但實施時，該等層狀結構之 材質不以此為限。在本實施例中，由於微型吸取式晶片上 〇 &結構都相當微小，為方便了解，以下各圖式中之各構件 - 冑為原結構之放大示意圖，所以實施時，該等構件大小比 例不以圖式所示比例為限。 該流道層3具有三分別貫穿其頂底面之下穿孔31、一 凹設於其底面之吸引槽道32,及三分別凹設於其底面且分 別連通於該等下穿孔31與該吸引槽道32間之微流道33。 該吸引槽道32是呈圓形，且其容積大於該等微流道33之 容積。為方便區別，以下將該等微流道33由圖2下方之微 〇 流道33開始沿逆時針方向依序區分為第一微流道33、第二 微流道33與第三微流道33。 另外，該流道層3還具有三分別界定出該等微流道33 頂緣且寬度分別等於該等微流道33長度之薄膜狀閥門部34 ，及一界定出該吸引槽道32頂緣之薄膜狀圓形吸引部35， 且該等閥門部34與吸引部35可分別被往下彈性擠壓，而 分別彈性突伸塞封下方之微流道33與吸引槽道32。為方便 區別，將該等閥門部34區分為位於第一微流道33上方之 第閥門°卩34、位於第二微流道33上方之第二閥門部34 200924849 ’及位於第三微流道33上方之第三閥門部Μ。 之，4具有三分別貫穿其頂底面且分別與流道層' 之該：下穿孔對應連通的上穿孔41、三分別凹設於其底 面且分別涵蓋該等閥門部34之閥門氣室42、—凹設底 面且涵蓋該吸引部35之幫浦氣室43,及四 於其頂 面且分別和該㈣_42料= Ο ❹ :;:該等相連通之上、下穿_、4二^^ ;排列之：一：定:^ 储液槽401、一第二儲液槽402，及一楚-儲液槽403。 弟二 如圖1、3、4所示，本發明微型吸取式晶片使用時， ㈣該等注氣孔44分別連通至一空壓機（圖未示）。該微 片作動時，需先使用空壓機經由注氣“對該 等閥門以42與幫浦氣室43灌注高壓氣體 門部34分別往下彈性突伸入其下方之微流道33中： 塞關閉相對應微流道33，及迫使該吸引部％往下彈性突伸 並塞封整個吸引槽冑32。然後，便可將試劑或檢體分別注 入該等儲液槽401〜403中。 當要將第-儲液槽401内之檢體或試劑輸送至第二儲 液槽402進行反應時，可先後釋放第—閥門氣室42之:壓 氣體，使該第-閥門部34往上彈性復位，而開啟第一:流 道33。然後再釋放幫浦氣室43内之高壓氣體，使該吸引部 35往上彈性復位，而開啟該吸引槽道32,同時利用第一閥 門部34與該吸引部35往上彈性復位時所造成之負壓吸力 200924849 . ，將第一儲液槽4〇1内之液體吸入填滿該第—微流道33與 該吸引槽道32。 然後’再對第一閥門氣室42充氣，而迫使第一閥門部 34再次塞封第一微流道33，於此同時，釋放第二閥門氣室 42之氣體，使第二閥門部34彈性復位而開啟第二微流道 33，並藉由其彈性復位時所造成之負壓吸力，及第一閥鬥 部34往下突伸時所產生之擠壓作用，使原本填滿第一微流 ❹ 道33與吸引槽道32之液體，流動至該吸引槽道a〗與第二 - 微流道33。緊接著，再依序對該幫浦氣室42與第二閥門氣 室43灌注高壓氣體，迫使該吸引部35與第二閥門部34依 序往下塞封該吸引槽道32與第二微流道33，進而將吸引槽 道32與第二微流道33内之液體完全擠壓入第二儲移槽4〇2 中。 藉由控制該吸引部35之變形與復位，及配合用以封閉 該等微流道33之閥門部34的開啟與關閉，便可於連通該 〇 等微流道33之吸引槽道32内，產生將第一儲液槽4〇1内 之液體吸引輸送至第二儲液槽4〇2的吸取式幫浦作用，並 可藉由重複上述吸取式幫浦作用，來分次將第一儲液槽4〇1 •内之液體輸送至第二儲液槽4〇2。同樣的，可利用上述吸取 式幫浦作用，來將第三儲液槽403内之液體輸送至第二儲 液槽4。2或第—儲液槽401，由於該吸引部35與該等閥門 部34之作動方式，完全相同於上述第一與第二儲液槽4〇1 4〇2間之液體輸送方式，因此不再贅述。 在本實施例中，由於該吸引部35之作用，主要是往下 200924849 變形阻塞吸引槽道32而阻擋流體流動，並於往上復位時， 於該吸引槽道32内產生真空負壓作用，因此’用以灌注在 該幫浦氣室43内，而驅使該吸引部35作動產生吸取式幫 浦作用之高壓氣體壓力較小，在本實施例中，僅需5psi便 可產生上述吸取式幫浦作用_ ’而可節省能源成本。且因僅 需透過驅動該吸引部35 ’並配合相鄰兩微流道33的啟閉， 便可產生吸取式幫浦作用’所以該吸取式幫浦作用之反應 時間較快，再加上吸引槽道32之容積大於微流道33容積 ，所以該吸取式幫浦作用而具有較高之輸送效率。 另外，由於該等閥門部34之寬度僅略小於該等微流道 33長度，且該吸引部35涵蓋整個吸引槽道32，所以當該 等閥門部34與吸引部35往下塞封該等微流道33與吸引槽 道32時’殘留於微流道33與吸引槽道32内之液體量會較 習知蠕動式幫浦結構少’進而可避免檢體與試劑之浪費， 在本實施例中，微流道33與吸引槽道32内之液體殘留量 可控制在微流道與吸引槽道之整體容積的1%以下。 另外，實施時’該等微流道與儲液槽之數量可依需要 而增減，不以上述型態為限。 歸納上述，透過僅在該等微流道33間設置一相連通且 容積較大之吸引槽道32，及該幫浦氣室43與該吸引部35 之簡單結構設計，使得該微型吸取式晶片僅需驅動該吸引 部35變形而塞封吸引槽道32及復位而開啟該吸引槽道32 ，並配合該等微流道33之開啟與關閉，便可於該等微流道 33與吸引槽道32間產生吸取式幫浦作用，而可於該等儲液 10 200924849 槽40卜403間輪送液體，且除了可降低驅動該吸引部％之 氣體壓力，而節省能源外，還可減少該等微流道33與吸引 槽道32内之液體殘留量，避免檢體或試劑的浪費’且可提 升所產生之幫满作用的輸送效率，並可使晶片之製造更為 簡單。因此，確實可達到本發明之目的。 ❹ ▲准以上所述者，僅為本發明之—較佳實施例而已，當 此限疋本發明實施之範圍，即大凡依本發明申請專 利範圍及發明說_容所作之簡單㈣效變化與修飾，皆 仍屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是本發明微型吸败― 、su 艇 及取式日日片之一較佳實施例立體分 圖 顯示； 2是該較佳實施例的 組合仰視圖，其中一基板層未 圖3疋該較佳實施例的局部側 ❹ 第-儲液槽經由吸引槽道被铪、… 兄月流體自 • 價暹破輸送至第二儲液槽的作動方式 圖4是類似圖3之視圖； 圖5是類似圖4之視圖； 圖6是類似圖5之視圖；及 圖7是類似圖6之視圖。 11 200924849 【主要元件符號說明】 2...... .....基板層 401.... …·第一儲液槽 3...... .....流道層 402.... ....第二儲液槽 31 .... .....下穿孔 403···. ....第二儲液槽 32 .... .....吸引槽道 41 "… ....上穿孔 33 .... .....微流道 42 … ....閥門氣室 34 .... .....閥門部 43 ....幫浦氣室 35 .... .....吸引部 44 ..… ....注氣孔 4...... .....氣室層 ❹ 12200924849 IX. INSTRUCTIONS: FIELD OF THE INVENTION The present invention relates to a wafer, and more particularly to a microfluidic system wafer. [Prior Art] Generally, a microfluidic system (microfluidic system) has a layer structure, and the required reaction tank, microchannel, gas chamber, and micro pump are processed in the three-layer structure. Micro-pumps are important components of microfluidic system wafers' are mainly used to drive specimens or reagents to flow between the reaction vessels via microchannels to transport micro-samples between reaction vessels and microchannels. The purpose of the reagent. The micro-pull technology used in the existing microfluidic system wafers is mainly a peristaltic micro-pump, which is composed of a plurality of pressing portions arranged along the micro flow passages in sequence, and must be squeezed by the same. The pressure part is squeezed into the micro flow channel in order to generate a peristaltic pump, and the sample or reagent is transported from the microchannel-end reaction tank to the other end of the reaction tank in a similar manner to watering. . However, such a peristaltic micro-pull is limited by the relationship of atmospheric pressure, and the sample cannot be completely transmitted, and the gap between the pressing portions of the butterfly-shaped micro-pump will also leave the sample, and the amount of the sample is very rare. It is a waste in terms of testing. In addition, when such a canister-type micro-push is operated, since a plurality of pressing portions are required to be driven, the force is greater than the pressure of the gas pressure required to push the pressing portions to 1Qpsi. The swaying micro-pull acts and t=, so it will also cause waste of energy, and the whole screw-type micro-demand turn _ longer, the transmission efficiency is poor. Furthermore, with the test of 200924849, the number of reaction tanks set on the wafer = reverse: the tablet reagent or the canister of the sample flow "Pu structure will be 二 = two of the TM is a whisker, a necessity. Therefore, the object of the present invention is that the "pick-up wafer" having a high efficiency is simple in structure and is transported to the bright micro-absorbent wafer, and includes a substrate layer sequentially stacked from bottom to top, a flow channel layer and a gas chamber layer. The flow channel layer has at least a through-theft bottom surface and respectively defined with the substrate layer, a liquid storage tank, a lower perforation, a concave channel recessed on the bottom surface thereof, and two The partition is concavely disposed on the bottom surface thereof and communicates with the microchannels between the slots and the suction channel, respectively, and the volume of the suction channel is larger than the volume of the microchannels, and the channel layer further has two boundaries U a film-like valve portion of the top edge of the micro-channel, and a film-shaped suction portion defining a top edge of the suction channel. The bottom surface of the gas chamber layer is recessed with two valve chambers respectively covering the valve portions, and Covering the pump chamber of the attraction, and when the valve chamber and the pump gas When the high-pressure gas is respectively poured, the valve portions and the suction portion are respectively elastically protruded downward, and the cutters seal and squeeze the liquids in the micro-flow passages and the suction channels, and when poured into the pump gas When the high-pressure gas in the room is released, the suction portion is elastically reset, and a vacuum suction force that attracts the liquid in the liquid storage tank to the suction channel through the micro-channel communicating with the suction channel is generated in the suction channel. The foregoing and other technical contents, features and effects of the present invention will be apparently shown in the following detailed description of a preferred embodiment of the reference drawings. The preferred embodiment of the wafer is suitable for transporting micro-samples. The micro-absorbent wafer comprises a substrate layer 2, a channel layer 3, and a "gas chamber layer 4" which are sequentially stacked from bottom to top. In the embodiment, the substrate layer 2 is made of glass, and the channel layer 3 and the gas-to-layer layer 4 are made of PDMS. However, the material of the layered structures is not limited thereto. In the embodiment, due to the micro suction wafer The structure of 〇& is quite small. For the sake of easy understanding, each component in the following figures - 胄 is an enlarged schematic view of the original structure, so when implemented, the size ratio of these components is not limited to the ratio shown in the figure. The channel layer 3 has three through holes 31 extending through the bottom surface of the bottom surface thereof, and a suction channel 32 recessed in the bottom surface thereof, and three recessed portions respectively on the bottom surface thereof and respectively communicating with the lower through holes 31 and the suction channels 32. The microchannels 33. The suction channels 32 are circular and have a larger volume than the microchannels 33. For convenience of distinction, the microchannels 33 are below the micro-turbulence in the lower part of FIG. The track 33 starts to be sequentially divided into the first micro flow path 33, the second micro flow path 33 and the third micro flow path 33 in the counterclockwise direction. In addition, the flow path layer 3 further has three microchannels respectively defined a film-like valve portion 34 having a top edge and a width equal to the length of the micro flow passages 33, and a film-shaped circular suction portion 35 defining a top edge of the suction channel 32, and the valve portions 34 and the suction portion 35 can be respectively elastically squeezed downward, and respectively elastically protruded to seal the micro flow passage 33 below Channels 32 lead. For convenience of distinction, the valve portions 34 are divided into a first valve portion 34 located above the first microchannel 33, a second valve portion 34 200924849' located above the second microchannel 33, and a third microchannel. The third valve section above 33. 4, the upper perforations 41 and 3 respectively extending through the top surface of the flow channel layer and corresponding to the lower perforation of the flow channel layer, respectively, are respectively recessed on the bottom surface thereof and respectively covering the valve chambers 42 of the valve portions 34, a recessed bottom surface and covering the pump plenum 43 of the attracting portion 35, and four on the top surface thereof and respectively connected to the (4) _42 material = Ο ❹ :;: above the phase, under the _, 4 2 ^ ^ Arranged: one: fixed: ^ reservoir 401, a second reservoir 402, and a Chu-storage tank 403. As shown in Figures 1, 3 and 4, when the micro suction type wafer of the present invention is used, (4) the gas injection holes 44 are respectively connected to an air compressor (not shown). When the microchip is actuated, it is necessary to first use an air compressor to inject the high pressure gas door portion 34 into the micro flow passage 33 below the valve chamber 34 by injecting the high pressure gas door portion 34 with the pump chamber 43: The plug closes the corresponding micro flow passage 33, and forces the suction portion to elastically project downward and plugs the entire suction groove 32. Then, the reagent or the sample can be separately injected into the liquid storage tanks 401 to 403. When the sample or reagent in the first reservoir 401 is to be sent to the second reservoir 402 for reaction, the first valve chamber 42 may be released: the gas is pressed to make the first valve portion 34 upward. Elastically resetting, the first: flow passage 33 is opened. Then, the high pressure gas in the pump chamber 43 is released, and the suction portion 35 is elastically reset upward, and the suction channel 32 is opened while using the first valve portion 34. The negative pressure suction force caused by the elastic return of the suction portion 35 is increased, and the liquid in the first liquid storage tank 4〇1 is sucked to fill the first micro flow passage 33 and the suction passage 32. Then ' Recharging the first valve plenum 42 and forcing the first valve portion 34 to reseal the first microchannel 33 again, At the same time, the gas of the second valve chamber 42 is released, the second valve portion 34 is elastically reset to open the second microchannel 33, and the vacuum suction force caused by the elastic reset thereof, and the first valve portion The squeezing action caused by the downward projection 34 causes the liquid which originally filled the first microfluid channel 33 and the suction channel 32 to flow to the suction channel a and the second-micro channel 33. Then, the pump gas chamber 42 and the second valve chamber 43 are sequentially filled with high-pressure gas, and the suction portion 35 and the second valve portion 34 are forced to sequentially seal the suction channel 32 and the second micro-flow. The channel 33, in turn, completely squeezes the liquid in the suction channel 32 and the second microchannel 33 into the second storage tank 4〇2. By controlling the deformation and resetting of the suction portion 35, and matching for closing The opening and closing of the valve portion 34 of the microchannel 33 allows the liquid in the first reservoir 4〇1 to be sucked and transported into the suction channel 32 that communicates with the microchannel 33 such as the crucible. The suction pump function of the second storage tank 4〇2, and the first liquid storage tank 4〇1 can be divided and divided by repeating the above-mentioned suction type pumping action. • The liquid in the liquid is delivered to the second reservoir 4〇2. Similarly, the suction pump can be used to transport the liquid in the third reservoir 403 to the second reservoir 4. 2 or The liquid storage tank 401 is completely identical to the liquid transportation method between the first and second liquid storage tanks 4〇1 to 4〇2 because the suction portion 35 and the valve portions 34 are operated in a manner similar to each other, and therefore will not be described again. In the present embodiment, due to the action of the suction portion 35, mainly the downward blocking of the suction channel 32 to block the flow of the fluid downwards in 200924849, and the vacuum negative pressure is generated in the suction channel 32 when the upward movement is blocked. Therefore, the pressure of the high pressure gas for injecting into the pump chamber 43 to drive the suction portion 35 to act to generate the suction pump is small. In this embodiment, the suction type can be generated only by 5 psi. Pu role _ 'can save energy costs. Moreover, since it is only necessary to drive the attraction portion 35' and cooperate with the opening and closing of the adjacent two microchannels 33, the suction-type pumping action can be generated. Therefore, the reaction time of the suction-type pump is faster, and the attraction is increased. The volume of the channel 32 is larger than the volume of the microchannel 33, so that the suction pump acts to have a higher conveying efficiency. In addition, since the width of the valve portions 34 is only slightly smaller than the length of the micro flow passages 33, and the suction portion 35 covers the entire suction channel 32, the valve portions 34 and the suction portion 35 are plugged down. In the microchannel 33 and the suction channel 32, the amount of liquid remaining in the microchannel 33 and the suction channel 32 is less than that of the conventional peristaltic pump structure, thereby avoiding waste of the sample and the reagent. In the example, the amount of liquid remaining in the microchannel 33 and the suction channel 32 can be controlled to be less than 1% of the entire volume of the microchannel and the suction channel. In addition, the number of such microchannels and reservoirs may be increased or decreased as needed, and is not limited to the above type. In summary, the micro suction film is designed by providing only one of the microchannels 33 with a large volume of suction channels 32 and a simple structure of the pump chamber 43 and the attraction portion 35. It is only necessary to drive the suction portion 35 to deform and plug the suction channel 32 and reset to open the suction channel 32, and to cooperate with the opening and closing of the micro flow channels 33, the micro flow channels 33 and the suction grooves can be used. The suction 32 is generated between the channels 32, and the liquid can be pumped in the liquid storage tanks 10, 2009, 849, 40, and 403, and the gas pressure can be reduced to drive the suction portion, thereby saving energy. The amount of liquid remaining in the microchannel 33 and the suction channel 32 avoids the waste of the sample or the reagent', and the transportation efficiency of the generated full effect can be improved, and the manufacture of the wafer can be made simpler. Therefore, the object of the present invention can be achieved. ▲ ▲ The above is only the preferred embodiment of the present invention, and is limited to the scope of the present invention, that is, the simple (four) effect change of the patent scope and the invention according to the present invention. Modifications are still within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective sectional view showing a preferred embodiment of a miniature smash-and-sail boat and a take-up daypiece of the present invention; 2 is a combined bottom view of the preferred embodiment, wherein a substrate The layer is not shown in Fig. 3. The partial side ❹ first reservoir of the preferred embodiment is transported by the suction channel, and the operation mode of the brother-moon fluid is transferred from the price to the second liquid storage tank. Figure 3 is a view similar to Figure 4; Figure 6 is a view similar to Figure 5; and Figure 7 is a view similar to Figure 6. 11 200924849 [Explanation of main component symbols] 2.............. Substrate layer 401....·First reservoir tank 3...... ..... runner layer 402 .... ....Second storage tank 31 ....... Lower perforation 403···.....Second storage tank 32 .......Attraction Channels 41 ".... Upper perforations 33 ......... Micro-flow passages 42 .... Valve chambers 34 ........ Valves 43 ... . Pump chamber 35 .... ..... suction part 44 ..... .... gas injection hole 4 ... ..... gas chamber layer ❹ 12