TW200923234A - Quick vacuum valve and its vacuum system - Google Patents
Quick vacuum valve and its vacuum system Download PDFInfo
- Publication number
- TW200923234A TW200923234A TW96145799A TW96145799A TW200923234A TW 200923234 A TW200923234 A TW 200923234A TW 96145799 A TW96145799 A TW 96145799A TW 96145799 A TW96145799 A TW 96145799A TW 200923234 A TW200923234 A TW 200923234A
- Authority
- TW
- Taiwan
- Prior art keywords
- quick
- vacuum
- cavity
- vacuum valve
- sealing structure
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims abstract description 14
- 230000002159 abnormal effect Effects 0.000 claims abstract description 13
- 239000003344 environmental pollutant Substances 0.000 claims abstract description 12
- 231100000719 pollutant Toxicity 0.000 claims abstract description 12
- 230000000903 blocking effect Effects 0.000 claims abstract description 10
- 230000005693 optoelectronics Effects 0.000 claims abstract description 8
- 238000007789 sealing Methods 0.000 claims description 104
- 239000007789 gas Substances 0.000 claims description 68
- 238000005086 pumping Methods 0.000 claims description 68
- 210000000078 claw Anatomy 0.000 claims description 29
- 238000004146 energy storage Methods 0.000 claims description 18
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 14
- 239000000356 contaminant Substances 0.000 claims description 12
- 230000005856 abnormality Effects 0.000 claims description 8
- 229910052742 iron Inorganic materials 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 3
- 239000008267 milk Substances 0.000 claims description 3
- 210000004080 milk Anatomy 0.000 claims description 3
- 235000013336 milk Nutrition 0.000 claims description 3
- 238000003860 storage Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims 2
- 229910052734 helium Inorganic materials 0.000 claims 2
- 208000027534 Emotional disease Diseases 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 238000003776 cleavage reaction Methods 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 230000007017 scission Effects 0.000 claims 1
- 239000002023 wood Substances 0.000 claims 1
- 238000000605 extraction Methods 0.000 abstract description 8
- 238000006243 chemical reaction Methods 0.000 abstract description 4
- 239000004973 liquid crystal related substance Substances 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 238000009826 distribution Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 241000282376 Panthera tigris Species 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000011120 plywood Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241000365689 Pudu Species 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002757 inflammatory effect Effects 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)
- Magnetically Actuated Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96145799A TW200923234A (en) | 2007-11-30 | 2007-11-30 | Quick vacuum valve and its vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96145799A TW200923234A (en) | 2007-11-30 | 2007-11-30 | Quick vacuum valve and its vacuum system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200923234A true TW200923234A (en) | 2009-06-01 |
| TWI335394B TWI335394B (https=) | 2011-01-01 |
Family
ID=44728487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96145799A TW200923234A (en) | 2007-11-30 | 2007-11-30 | Quick vacuum valve and its vacuum system |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200923234A (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111202228A (zh) * | 2020-02-18 | 2020-05-29 | 杭州美特醇香食品有限公司 | 一种全密闭果酱成色取样和定量调配装置 |
| CN111594659A (zh) * | 2020-06-22 | 2020-08-28 | 川北真空科技(北京)有限公司 | 一种真空隔离阀及具有其的真空系统 |
| CN121164277A (zh) * | 2025-09-16 | 2025-12-19 | 东方晨景(南京)科技有限公司 | 一种低振动低温光电测试系统 |
-
2007
- 2007-11-30 TW TW96145799A patent/TW200923234A/zh not_active IP Right Cessation
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111202228A (zh) * | 2020-02-18 | 2020-05-29 | 杭州美特醇香食品有限公司 | 一种全密闭果酱成色取样和定量调配装置 |
| CN111594659A (zh) * | 2020-06-22 | 2020-08-28 | 川北真空科技(北京)有限公司 | 一种真空隔离阀及具有其的真空系统 |
| CN121164277A (zh) * | 2025-09-16 | 2025-12-19 | 东方晨景(南京)科技有限公司 | 一种低振动低温光电测试系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI335394B (https=) | 2011-01-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |