200920536 九、發明說明 【發明所屬之技術領域】 本發明係有關金屬製構件之焊接部的表面處理方法， 更詳細者係有關於真空氛圍下，所形成之金屬製構件之焊 接部的表面處理方法。 【先前技術】 使用於真空裝置之各種形狀之金屬製構件藉由焊接進 行接合後，於焊接敲擊部產生焊接焦部。此焊接焦部於真 空氛圍下放置後，產生不必要的氣體、灰塵。爲了不產生 該不必要的氣體等’只要去除焊接焦部即可。 對於此，先行技術係藉由電解硏磨、化學硏磨等之濕 式去除法、銼刀、噴塗等之機械性去除法、或氟酸之噴塗或 含氟酸之塗漿之去除法。 惟’濕式去除法中，焊接焦部之外亦被磨削，其表面 粗糙產生不必要氣體’銼刀中複雜形狀無法去除，噴塗中 務必具備去除粉塵之設備，因此不夠方便之問題存在。又 ，上述方法均極耗費時間。 另外’作爲不鏽鋼之表面處理技術者，有相關不鏽鋼 帶之表面鋼垢、表面損傷的去除者，如：專利文獻1中， 有倂用該濕式硏磨與機械硏磨之硏磨方法，惟，使用氟酸 、硫酸，進行洗淨’故於真空氛圍下，由焊接部之表面產 生HF、SO、S02之不必要氣體，用於真空裝置時，無法 取得所期待之真空處理性能之問題產生。甚至，使用後氟 -5- 200920536 酸之去除、廢液處理有其困難點之問題存在。 專利文獻1 :特開平7-227763號公報 【發明內容】 因此’本發明之目的係爲提供一種於真空氛圍下，可使 造成不必要氣體產生原因之焊接焦部，有效安全的進行之金 屬製構件之焊接部的表面處理方法。 爲解決上述課題，本發明者進行精密硏討後結果，發現 將含有磨削粒之溶液於高壓下進行噴塗，不僅快速去除所期 待厚度之焊接焦部，更藉由電解硏磨、電解酸洗、磷酸進行 酸洗滌、或化學硏磨後，去除表面的微細粉塵、造成產生不 必要氣體原因之酸性溶液之去除，之後，藉由冰洗滌，即可 快速、安全處理表面，進而發現下述之解決方法。 亦即，本發明金屬製構件之焊接部之表面處理方法如 申請項1所載，其特徵係於金屬製構件之焊接部中，以 IMPa〜15MPa之壓力，進行噴塗含有磨削粒之溶液，藉由電 解硏磨、電解酸洗、磷酸進行酸洗滌、或化學硏磨。 又，申請項2所載之本發明係於申請項1所載之金屬 製構件之焊接部的表面處理方法中，該溶液以含有防鏽劑 爲其特徵。 另外，申請項3所載之本發明係於申請項1或2所載之 金屬製構件之焊接部的表面處理方法中，該金屬製構件的 不鏽鋼所構成者爲其特徵。 本發明可於短時間內進行焊接焦部之機械性的去除。又 200920536 ，使用磨削粒去除焊接焦部，因此，相較於使用氟酸時，其 較可安全作業。 且，無需於乾式噴塗處理中設置必要的粉塵去除設備， 而可現場作業。更於焊接焦部去除後，藉由電解硏磨、電解 酸洗、磷酸進行酸洗滌、或化學硏磨、去除磨削粒，經由清 淨化後，於真空氛圍下，可防止不必要氣體的產生。 【實施方式】 [發明實施之最佳形態] 本發明之處理對象之金屬製構件只要爲具有經由電弧 焊接等之焊接部即可。具體例如：真空氛圍下所使用之金屬 製容器等例。作爲該材料者，如：不鏽鋼、鋁合金、鈦合 金、鐵等之活性金屬之例。另外’本說明書中真空氛圍係 指低於大氣壓之壓力範圍之意。 該金屬製構件之焊接部中’首先，使含有磨削粒之溶 液以1〜15MPa壓力進行噴塗’磨削焊接焦部份之表面。有 關磨削量，只要去除焊接焦部即可，並未特別限定，一般 之電弧焊接爲磨削5 0 μιη以上之厚度爲宜。 作爲該處理中所使用之磨削粒者，只要可去除焊接部 之表面即可，其材質、形狀等並未特別限定，可使用如： 由砂砂、氧化鋁、SiC等材質所構成之粒徑爲數1〇〇μηι左 右者。又’作爲磨削粒所添加之溶液者，可使用如，純水 、自來水等。該溶液爲含有苯並三唑等之防鏽劑者宜。 上述處理後，藉由電解硏磨、磷酸進行金屬製構件表 200920536 面之酸洗滌或化學硏磨處理。經由此處理，可進行磨削粒 等之去除，於真空氛圍下，可防止粉塵等之產生。 該處理中’藉由磷酸之酸洗滌，可依下述進行之。經 由磷酸之電解硏磨係於室溫〜50 °C中，於不鏽鋼等之被處 理物上施加正電壓之狀態下，經由濃度1 〜80%之磷酸， 進行洗淨。又，藉由磷酸之酸洗滌係於室溫~ 5 0 °C中，使 鋁合金、鐵等之被處理物經由濃度1 0%〜80%之磷酸，進行 洗淨，另外，針對磷酸之濃度，由其未達1 〇 %時，溶解率 將遲緩，超出80%則成本變高之理由視之，爲1〇〜80%者 宜。又，有關處理溫度，同樣的，未達室溫則溶解率遲緩 ，超出5 0 °C則加溫而提高成本，因此爲室溫〜5 0 °C者宜。 作爲該電解硏磨、化學硏磨所使用之電解液者，只要 至少任意含有無機酸、有機酸、無機酸鹽、及有機酸鹽者 宜，具體例如，磷酸、氟酸、硫酸、檸檬酸銨、氯化銨、 磷酸2氫銨、硫酸銨、硝酸鈉、檸檬酸等例。又，電解硏 磨中電解電流密度依其構成金屬製構件之材料而異，一般 ，如：不鏽鋼者爲〇.l~〇.5A/cm2。 又，本發明中酸洗滌係藉由磷酸進行之。若經由該磨 削粒殘留氟硝酸、硫酸於焊接部表面之凹凸部內後，於真 空氛圍下，釋出HF、SO、S〇2等氣體將不理想。 又，進一步藉由純水等洗淨金屬製構件，洗淨經由該 處理所附著之電解液等，則即使於真空氛圍下，仍不會產 生不必要氣體之理想狀態。 200920536 [實施例] 以下’針對本申請發明之實施例與圖面同時進行說明 ，而針對各例所使用之試料1與試料2，預先進行說明。 試料1係如圖I所示，於100rnmxlO0mmx3mm之尺寸 之板1的略中心線上，形成焊接波紋2。 又’試料2係如圖2所不’於內徑250mm、高380mm 之圓筒狀容器3之兩側設置0 7 0合倂法蘭盤4，於其上面 設置306合倂法蘭盤之構造的真空容器。該容器之內周面 的底部係底面與全周相互被電弧焊接所成。 另外，有關試料1及試料2之材質係記載於以下之各 例中。 (實施例1 ) 試料1及2之材質爲不鏽鋼。 於上水混入磨削粒6號矽砂，將此以3MPa噴塗於各 試料，使其表面進行平均3 0 μπι磨削，藉由7 0 %磷酸與 3 0%硫酸之混酸進行試料表面之電解硏磨處理，使試料表 面進行約15μιη溶解。之後，依RO水噴射洗滌、R〇水浸 漬、純水浸漬、50 °C之溫純水浸漬、35%硝酸浸漬、純水 浸漬之順序將試料洗淨，噴塗氮乾燥之。 (實施例2) 試料1及2之材質爲鋁。 於上水混入磨削粒之# 1 5 0氧化鋁與防鏽劑之苯並二哇 200920536 ’將此以3MPa噴塗於各試料，其表面進行平均5〇μηι之 磨削’藉由加熱至80 t之80%磷酸與20%硫酸之混酸進行 試料表面之化學硏磨處理，使試料表面進行約1〇μπι溶解。 之後’依RO水噴射洗滌、r〇水浸漬、純水浸漬、5 0°c之 溫純水浸漬、3 5 %硝酸浸漬、純水浸漬之順序洗淨試料，噴 塗氮乾燥之。 (實施例3) 試料1及2之材質爲鐵。 於上水混入磨削粒之#150 SiC與防鏽劑之磷酸鈉，將此 以3MPa噴塗於各試料，使其表面進行50μιη磨削，藉由常 溫之20%磷酸，進行試料表面之酸洗滌，使試料表面進行約 4μηι溶解。之後，依R〇水噴射洗滌、R〇水浸漬、純水浸 漬、50°C之溫純水浸漬、35%硝酸浸漬、純水浸漬之順序洗 淨試料，噴塗氮乾燥之。 (實施例4) 試料1及2之材質爲不鏽鋼。 於上水混入磨削粒之6號矽砂，將此以3 MPa噴塗各試 料，使其表面進行平均30μηι磨削，藉由70%磷酸與30%硫 酸之混酸，進行試料表面之電解硏磨處理，將試料表面進行 約4μηι溶解。之後，依RO水噴射洗滌、RO水浸漬、純水 浸漬、5〇°C之溫純水浸漬、35%硝酸浸漬、純水浸漬之順序 ，洗淨試料，噴塗氮乾燥之。 -10- 200920536 (實施例5 ) 試料1及2之材質爲不鏽鋼。 於上水混入磨削粒之6號矽砂，將此以3MPa噴塗於各 試料，使其表面進行平均30μπι磨削，藉由20%磷酸進行試 料表面之部份電解硏磨處理，使試料表面進行約5μιη溶解 。之後，依RO水噴射洗滌、RO水浸漬、純水浸漬、5〇t 之溫純水浸漬、螫合劑去污、純水浸漬之順序，洗淨試料、 噴塗氮、乾燥之。 (比較例1 ) 試料1及2之材質爲不鏽鋼。 藉由含氟酸之塗漿，去除各試料之焊接焦部，經由上水 冼淨塗漿。之後，依純水浸漬、50°C之溫純水浸漬順序，進 行洗淨，噴塗氮，乾燥之。 (比較例2) 試料1及2之材質爲不鏽鋼。 於上水混入磨削粒之6號矽砂，將此以3 MPa噴塗於各 試料，使該表面進行平均3 Ομπι磨削。之後，依RO水噴射 洗淨、RO水浸漬、純水浸漬、50°C之溫純水浸漬、35%硝 酸浸漬、純水浸漬之順序，進行洗淨試料，噴塗氮，乾燥之 (比較例3) -11 - 200920536 試料1及2之材質爲不鏽鋼。 利用銼刀，磨削各試料表面之約50μιη，藉由上水洗淨 磨削渣。之後，依常溫之純水浸漬、50 °C之溫純水浸漬之順 序，進行洗淨，噴塗氮，乾燥之。 上述結果示於表1。另外，表1中之焊接焦部去除之評 定係藉由目測進行，〇：可充分去除者，△:幾乎可去除者 ，X :無法有效去除。200920536 IX. OBJECT OF THE INVENTION [Technical Field] The present invention relates to a surface treatment method for a welded portion of a metal member, and more particularly to a surface treatment method for a welded portion of a formed metal member under a vacuum atmosphere . [Prior Art] After the metal members of various shapes used in the vacuum apparatus are joined by welding, a welded coke portion is produced at the welding tap portion. This welded coke is placed in a vacuum atmosphere to generate unnecessary gas and dust. In order to prevent the unnecessary gas or the like from being generated, it is only necessary to remove the welded coke portion. For this reason, the prior art is a wet removal method such as electrolytic honing, chemical honing, mechanical removal such as troweling or spraying, or a method of removing fluoric acid or a slurry of a fluorine-containing acid. However, in the wet removal method, the welded coke portion is also ground, and the surface is rough to generate unnecessary gas. The complex shape of the trowel cannot be removed, and the device for removing dust must be provided during spraying, so that it is not convenient. Moreover, the above methods are extremely time consuming. In addition, as a surface treatment technology for stainless steel, there are those who remove the surface scale and surface damage of the relevant stainless steel belt. For example, in Patent Document 1, there is a honing method using the wet honing and mechanical honing. , using fluoric acid and sulfuric acid to wash it, so under the vacuum atmosphere, unnecessary gas of HF, SO, and S02 is generated from the surface of the welded portion. When used in a vacuum device, the desired vacuum processing performance cannot be obtained. . Even after the use of fluorine -5 - 200920536 acid removal, waste liquid treatment has its own problems. [Patent Document 1] JP-A-H07-227763 SUMMARY OF THE INVENTION Therefore, the object of the present invention is to provide a metal cup which can be effectively and safely produced in a vacuum atmosphere in which a welded coke portion which causes unnecessary gas generation can be provided. The surface treatment method of the welded portion of the member. In order to solve the above problems, the inventors of the present invention conducted a preliminary investigation and found that the solution containing the grinding particles was sprayed under high pressure, not only to quickly remove the welded coke portion of the desired thickness, but also by electrolytic honing and electrolytic pickling. After acid washing with acid or chemical honing, the fine dust on the surface is removed, and the acidic solution causing unnecessary gas is removed, and then the surface is quickly and safely treated by ice washing, and the following is found. Solution. That is, the surface treatment method of the welded portion of the metal member of the present invention is as set forth in the application item 1, and is characterized in that the solution containing the ground particles is sprayed at a pressure of 1 MPa to 15 MPa in a welded portion of the metal member. By acid honing, electrolytic pickling, phosphoric acid acid washing, or chemical honing. Further, the present invention as set forth in the application item 2 is the surface treatment method of the welded portion of the metal member according to the application 1, wherein the solution is characterized by containing a rust preventive agent. Further, the present invention as set forth in the application item 3 is characterized in that the stainless steel of the metal member is characterized by the surface treatment method of the welded portion of the metal member contained in the application 1 or 2. The present invention can perform mechanical removal of the welded coke portion in a short time. Also in 200920536, the use of grinding particles to remove the welded coke is therefore safer than when using hydrofluoric acid. Moreover, it is not necessary to provide necessary dust removing equipment in the dry spraying process, and it is possible to work on site. After the removal of the welded coke portion, the electrolytic honing, electrolytic pickling, phosphoric acid acid washing, or chemical honing, removal of the grinding granules, after purification, in a vacuum atmosphere, can prevent the generation of unnecessary gas . [Embodiment] [Best Mode for Carrying Out the Invention] The metal member to be processed according to the present invention may be a welded portion that is subjected to arc welding or the like. Specifically, for example, a metal container used in a vacuum atmosphere or the like. As the material, for example, examples of active metals such as stainless steel, aluminum alloy, titanium alloy, and iron. Further, the vacuum atmosphere in this specification means the pressure range below atmospheric pressure. In the welded portion of the metal member, first, the solution containing the grinding particles is sprayed at a pressure of 1 to 15 MPa to grind the surface of the welded portion. The amount of grinding is not particularly limited as long as the welded coke portion is removed, and general arc welding is preferably a thickness of 50 μm or more. As the grinding grain used in the treatment, the surface of the welded portion may be removed, and the material, shape, and the like are not particularly limited, and may be used, for example, a material composed of sand, alumina, SiC, or the like. The diameter is about 1〇〇μηι. Further, as the solution to be added to the grinding granules, for example, pure water, tap water or the like can be used. The solution is preferably a rust inhibitor containing benzotriazole or the like. After the above treatment, the metal member table 200920536 is subjected to acid washing or chemical honing treatment by electrolytic honing or phosphoric acid. By this treatment, the removal of the grinding particles and the like can be performed, and the generation of dust or the like can be prevented under a vacuum atmosphere. In this treatment, washing with phosphoric acid can be carried out as follows. The electrolytic honing by phosphoric acid is carried out at room temperature to 50 ° C, and a positive voltage is applied to the treated material such as stainless steel, and then washed with a phosphoric acid having a concentration of 1 to 80%. Further, the acid washing with phosphoric acid is carried out at room temperature to 50 ° C, and the treated material such as aluminum alloy or iron is washed with phosphoric acid having a concentration of 10% to 80%, and the concentration of phosphoric acid is also applied. When it is less than 1%, the dissolution rate will be slow, and if it exceeds 80%, the cost will increase. It is suitable for 1〇~80%. Further, regarding the treatment temperature, the dissolution rate is slow when the temperature is not reached at room temperature, and the temperature is increased to exceed the temperature of 50 ° C. Therefore, it is preferably room temperature to 50 ° C. The electrolyte used for the electrolytic honing or chemical honing is preferably at least arbitrarily containing a mineral acid, an organic acid, a mineral acid salt, or an organic acid salt, and specifically, for example, phosphoric acid, hydrofluoric acid, sulfuric acid, ammonium citrate. Examples of ammonium chloride, ammonium dihydrogen phosphate, ammonium sulfate, sodium nitrate, citric acid, and the like. Further, the electrolytic current density in the electrolytic honing varies depending on the material constituting the metal member, and generally, for example, stainless steel is 〇.l~〇.5A/cm2. Further, in the present invention, the acid washing is carried out by phosphoric acid. When fluorine and nitric acid and sulfuric acid remain in the uneven portion on the surface of the welded portion through the abrasive grains, it is not preferable to release a gas such as HF, SO or S〇2 in a vacuum atmosphere. Further, by washing the metal member with pure water or the like and washing the electrolytic solution or the like adhered to the treatment, an ideal state of unnecessary gas is not generated even in a vacuum atmosphere. [Embodiment] Hereinafter, the embodiment of the present invention will be described simultaneously with the drawings, and the sample 1 and the sample 2 used in each example will be described in advance. Sample 1 is a weld corrugation 2 formed on a slightly center line of a plate 1 having a size of 100 rnm x 10 mm x 3 mm as shown in Fig. 1. Further, the sample 2 is provided with a 0 70 closed flange 4 on both sides of a cylindrical container 3 having an inner diameter of 250 mm and a height of 380 mm, and a structure of a 306 joint flange is provided on the same. Vacuum container. The bottom surface of the inner peripheral surface of the container is formed by arc welding of the entire bottom surface and the entire circumference. Further, the materials of the sample 1 and the sample 2 are described in the following examples. (Example 1) The materials of the samples 1 and 2 were stainless steel. In the upper water, the grinding grain No. 6 sand was mixed, and the sample was sprayed at 3 MPa on each sample, and the surface was subjected to an average of 30 μπι grinding, and the surface of the sample was electrolyzed by a mixed acid of 70% phosphoric acid and 30% sulfuric acid. The honing treatment allowed the surface of the sample to dissolve at about 15 μm. Thereafter, the sample was washed in the order of RO water jet washing, R water immersion, pure water immersion, 50 ° C warm water immersion, 35% nitric acid immersion, and pure water immersion, and sprayed with nitrogen to dry. (Example 2) The materials of the samples 1 and 2 were aluminum. In the water, mixed with the grinding particles #1 5 0 Alumina and rust inhibitor benzodiode 200920536 'This is sprayed on each sample at 3 MPa, and the surface is subjected to an average of 5 〇 μηι grinding' by heating to 80 The chemical honing treatment on the surface of the sample was carried out by mixing 80% phosphoric acid with 20% sulfuric acid, and the surface of the sample was dissolved at about 1 μm. Thereafter, the sample was washed in the order of RO water jet washing, r water immersion, pure water immersion, 50 °c warm water immersion, 35% nitric acid immersion, and pure water immersion, and sprayed with nitrogen to dry. (Example 3) The materials of the samples 1 and 2 were iron. In the upper water, the #150 SiC and the rust inhibitor sodium phosphate were mixed, and the sample was sprayed at 3 MPa on each sample to grind the surface to 50 μm, and the surface of the sample was washed with 20% phosphoric acid at normal temperature. The surface of the sample was allowed to dissolve at about 4 μm. Thereafter, the sample was washed in the order of R 〇 water jet washing, R 〇 water immersion, pure water immersion, 50 ° C warm water immersion, 35% nitric acid immersion, and pure water immersion, and sprayed with nitrogen to dry. (Example 4) The materials of the samples 1 and 2 were stainless steel. In the upper water, the No. 6 sand of the grinding grain was mixed, and each sample was sprayed at 3 MPa, and the surface was subjected to an average of 30 μηι grinding, and the surface of the sample was electrolytically honed by a mixed acid of 70% phosphoric acid and 30% sulfuric acid. After the treatment, the surface of the sample was dissolved at about 4 μm. Thereafter, the sample was washed in accordance with RO water jet washing, RO water immersion, pure water immersion, 5 〇 ° C warm water immersion, 35% nitric acid immersion, and pure water immersion, and sprayed with nitrogen to dry. -10- 200920536 (Example 5) The materials of the samples 1 and 2 were stainless steel. In the upper water, the No. 6 sand of the grinding grain was mixed, and the sample was sprayed at 3 MPa on each sample, and the surface was subjected to an average of 30 μπι grinding, and the surface of the sample was subjected to partial electrolytic honing treatment with 20% phosphoric acid to prepare the surface of the sample. Approximately 5 μηη was dissolved. Thereafter, the sample is washed, nitrogen-coated, and dried by RO water jet washing, RO water immersion, pure water immersion, 5 〇t warm water immersion, chelating agent decontamination, and pure water immersion. (Comparative Example 1) The materials of the samples 1 and 2 were stainless steel. The welded coke portion of each sample was removed by slurry coating with a fluorine-containing acid, and the slurry was cleaned by running water. Thereafter, it was washed with pure water impregnation and a pure water impregnation step at 50 ° C, sprayed with nitrogen, and dried. (Comparative Example 2) The materials of the samples 1 and 2 were stainless steel. In the upper water, the No. 6 sand of the grinding grain was mixed, and the sample was sprayed at 3 MPa to each sample, and the surface was subjected to an average of 3 Ομπι grinding. Thereafter, the sample was washed, sprayed with nitrogen, and dried by RO water jet washing, RO water immersion, pure water immersion, 50 ° C warm water immersion, 35% nitric acid immersion, and pure water immersion. (Comparative Example 3) -11 - 200920536 Samples 1 and 2 are made of stainless steel. A boring tool was used to grind about 50 μm of the surface of each sample, and the slag was washed by running water. Thereafter, it is washed with pure water impregnated at room temperature and impregnated with pure water at a temperature of 50 ° C, sprayed with nitrogen, and dried. The above results are shown in Table 1. In addition, the evaluation of the removal of the welded coke portion in Table 1 was carried out by visual inspection, 〇: those which were sufficiently removed, Δ: almost removable, X: could not be effectively removed.
No. 試料 材質 去除 手段 去除後處理 試料1 試弊 [2 處理 時間 焊接焦 部去除 處理時間 焊接焦 部去除 實施例1 不鏽鋼 石夕砂+水 電解硏磨15μιη+洗淨 5sec 〇 30sec 〇 實施例2 鋁 氧化鋁+水 化學硏磨10μπι+洗淨 5sec 〇 30sec 〇 實施例3 鐵 SiC+水 酸洗+洗淨 5sec 〇 25sec 〇 實施例4 不鏽鋼 5夕砂+水 電解硏磨4μηι+洗淨 5 sec 〇 30sec 〇 實施例5 不鏽鋼 石夕砂+水 部份電解硏磨1〇μπι+洗淨 5 sec 〇 30 sec 〇 比較例1 不鏽鋼 HF 洗淨 30min Δ lh X 比較例2 不鏽鋼 石夕砂+水 洗淨 5 sec 〇 5sec 〇 比較例3 不鏽鋼 銼刀 洗淨 lOmin 〇 l_5h Δ 由表1顯示，使添加磨削粒之溶液，以高壓噴塗之實 施例1〜5、比較例2及3，可於短時間內確實去除焊接焦 部。相對於此，比較例1去除焊接焦部耗費了 1 〇倍以上 之時間。且，因使用氟酸，故務必收集藥劑之洗滌流動時 之廢水，其廢水處理之費用與時間均大。 接著，圖3顯示實施例1之試料1之表面SEM像，圖 -12 - 200920536 4顯示比較例2之試料1之表面SEM像。 由圖3證明，實施例1可充分去除表面之磨削粒。相對 於此，由圖4顯示試料表面整體存在黑點之磨削粒，無法有 效去除。 接著，使用各實施例及各比較例所處理之試料2，進 行由大氣壓之排氣，排氣1小時後（l〇_3~l(T5Pa)之每單 位面積之氣體釋放速度示於下述表2。 [表2] N 0 氣體 釋放速度 (Pa· m 3 · s·1 · πΓ2) 實 施 例 1 3.60E-07 實 施 例 2 1.00E-06 施 例 3 1.20E-06 實 施 例 4 3. 50Ε-07 實 施 例 5 4. 20Ε-07 比 較 例 1 5. 60Ε-07 比 較 例 2 8.20E-06 比 較 例 3 9. 10Ε-06 由表2證明’經由本實施例處理之試料2相較於經由 比較例2，3處理之試料，其由其表面之氣體釋放速度較 少。又’比較例1之氣體釋放速度相較於不同材質之實施 例2 ’ 3其氣體釋放速度較小，而殘留氣體中卻含hf爲水 之1 /3。HF係腐蝕性氣體，故漂浮於真空容器內而不理想 ，不適於真空容器之表面處理。 -13- 200920536 【圖式簡單說明】 [圖1 ]試料1之 面圖。 [圖2]試料2之槪 [圖3 ]實施例1之 [圖4 ]比較例2之 槪略圖、（a )爲側面圖、（b )爲平 略圖。 表面S E Μ像。 表面S Ε Μ像。 【主要元件符號說明】 1 :板 2 :焊接波紋 3 :圓筒狀容器 4 : 070合倂法蘭盤 5 : 3 06合倂法蘭盤 -14-No. Sample material removal means post-treatment sample 1 Trial [2 Treatment time Welding coke removal treatment time Welding coke removal Example 1 Stainless steel stone sand + water electrolysis honing 15μιη + washing 5sec 〇 30sec 〇 Example 2 Aluminum alumina + water chemical honing 10μπι + washing 5sec 〇 30sec 〇 Example 3 Iron SiC + water pickling + washing 5sec 〇 25sec 〇 Example 4 Stainless steel 5 sand + water electrolytic honing 4μηι + wash 5 sec 〇 30sec 〇Example 5 Stainless steel Shisha sand + water part electrolytic honing 1〇μπι+washing 5 sec 〇30 sec 〇Comparative example 1 Stainless steel HF Washing 30min Δ lh X Comparative example 2 Stainless steel stone sand + water washing 5 sec 〇5sec 〇Comparative example 3 Stainless steel trowel washing lOmin 〇l_5h Δ As shown in Table 1, the solution of adding the grinding granules, high pressure spraying of Examples 1 to 5, Comparative Examples 2 and 3, can be used in a short time. The welded coke is indeed removed. On the other hand, in Comparative Example 1, it took a time to remove the welded coke portion by a factor of 1 or more. Moreover, since the hydrofluoric acid is used, it is necessary to collect the wastewater at the time of washing and flowing of the chemical, and the cost and time of the wastewater treatment are large. Next, Fig. 3 shows a surface SEM image of the sample 1 of Example 1, and Figs. -12 - 200920536 4 shows a surface SEM image of the sample 1 of Comparative Example 2. It is proved from Fig. 3 that Example 1 can sufficiently remove the ground grain of the surface. On the other hand, Fig. 4 shows that the grinding particles having black spots on the entire surface of the sample were not effectively removed. Next, the sample 2 treated in each of the examples and the comparative examples was used to carry out the exhaust gas at atmospheric pressure, and after 1 hour of exhaust gas (the gas release rate per unit area of l〇_3 to 1 (T5Pa) is shown below. Table 2. [Table 2] N 0 gas release rate (Pa· m 3 · s·1 · πΓ2) Example 1 3.60E-07 Example 2 1.00E-06 Example 3 1.20E-06 Example 4 3. 50Ε-07 Example 5 4. 20Ε-07 Comparative Example 1 5. 60Ε-07 Comparative Example 2 8.20E-06 Comparative Example 3 9. 10Ε-06 It is proved by Table 2 that the sample 2 treated by this embodiment is compared with The sample treated by Comparative Example 2, 3 had a lower gas release rate from the surface thereof. Further, the gas release rate of Comparative Example 1 was smaller than that of Example 2' 3 of different materials, and the residual rate was small. The gas contains hf of 1/3 of water. HF is a corrosive gas, so it is not ideal for floating in a vacuum container, and is not suitable for the surface treatment of a vacuum container. -13- 200920536 [Simplified illustration] [Fig. 1] [Fig. 2] Sample 2 [Fig. 3] [Fig. 4] Example 1 Comparative Example 2, (a) Side view, (b) is a flat view. Surface SE 。 image. Surface S Ε Μ. [Main component symbol description] 1 : Plate 2: Welding corrugation 3 : Cylindrical container 4 : 070 倂 flange 5 : 3 06 Combined Flange-14-