CN106868508B - A kind of vacuum equipment processing chamber siding regeneration treating method - Google Patents
A kind of vacuum equipment processing chamber siding regeneration treating method Download PDFInfo
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- CN106868508B CN106868508B CN201710088501.3A CN201710088501A CN106868508B CN 106868508 B CN106868508 B CN 106868508B CN 201710088501 A CN201710088501 A CN 201710088501A CN 106868508 B CN106868508 B CN 106868508B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
- C23C22/48—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 not containing phosphates, hexavalent chromium compounds, fluorides or complex fluorides, molybdates, tungstates, vanadates or oxalates
- C23C22/56—Treatment of aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/02—Light metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/12—Light metals
- C23G1/125—Light metals aluminium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/22—Light metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
- C25D11/08—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/06—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
- C25D11/10—Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing organic acids
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/16—Pretreatment, e.g. desmutting
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/24—Chemical after-treatment
- C25D11/246—Chemical after-treatment for sealing layers
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Electrochemistry (AREA)
- Inorganic Chemistry (AREA)
- Cleaning By Liquid Or Steam (AREA)
- ing And Chemical Polishing (AREA)
Abstract
The invention discloses a kind of vacuum equipment processing chamber siding regeneration treating methods, comprising the following steps: (1) product is entered;(2) polished and cleaned pre-treatment;(3) polyurethane film;(4) degreasing;(5) it washes;(6) alkali cleaning;(7) it washes;(8) pickling;(9) it washes;(10) chemical polishing;(11) it washes;(12) it is passivated;(13) 1 is washed;(14) 2 are washed;(15) anodic oxidation;(16) 1 is washed;(17) 2 are washed;(18) sealing of hole;(19) it washes;(20) rubbing down cleans;(21) ultrasonic cleans;(22) it dries up;(23) it toasts;(24) it packs.Compared with the prior art, the present invention has the following beneficial effects: the siding weatherability of remanufacturing service of the present invention is strong, there is not skin effect phenomenon in use in client, has obtained being widely recognized as market.
Description
Technical field
The present invention relates to a kind of regeneration treating method more particularly to a kind of vacuum equipment processing chamber siding regeneration treatment sides
Method.
Background technique
Current country's TFT industry flourishes, and solar energy class product is also risen in this world, but provides to these industries corresponding
The enterprise that matched electronic component overhauls service is seldom, and especially domestic native country industry is even more fewer and fewer, TFT industry and
Solar energy class industry faces always the competition of foreign vendor, the especially competition of price, so each manufacturer is badly in need of finding service energy
Power it is strong and can be competitive in price supplier, rare several supplies commercial city is Japanese, Han Zi, Taiwan-owned enterprise at present,
And the company in native country does not have substantially, in this context, my company determines the electronics such as research and development vacuum equipment process cavity siding, motor plate
Work is overhauled in the surface treatments such as the surface clean of component and anodic oxidation.
Summary of the invention
The object of the present invention is to provide a kind of vacuum equipment processing chamber siding regeneration treating methods, to vacuum equipment technique
Chamber siding carries out overhauling regeneration.
To achieve the above object, the present invention adopts the following technical solutions:
A kind of vacuum equipment processing chamber siding regeneration treating method, comprising the following steps:
1. product is entered, side frame is removed;
2. polished and cleaned pre-treatment, artificial to use the spot for holding polishing machine removal component surface, sprayed in polishing process
Pure water, no dust generate;
3. polyurethane film is attached on workpiece with polyurethane film, the place for not needing oxidation is covered;
4. degreasing, the weak solution heating of 5% sodium hydroxide, workpiece impregnate, impregnate 2min~3min, remove surface grease;
5. washing, room temperature pure water embathe, 1min, the degreasing residual liquid of clean the surface are washed;
6. alkali cleaning, 10% sodium hydroxide solution are heated to 50 DEG C, workpiece impregnates, and impregnates 1min~2min, removes surface
Oxide layer;
7. washing, room temperature pure water embathe, washing time 1min, the sodium hydroxide residual liquid of clean the surface;
8. pickling, 10% nitric acid weak solution is heated to 50 DEG C, and workpiece impregnates, and impregnates 2min~3min, removes in alkaline bath
The product of generation;
9. washing, room temperature pure water embathe, washing time 1min, the nitric acid residual liquid of clean the surface;
10. chemical polishing is changed and throws the chemical polishing solution that 8% is added in slot, is heated to 50 DEG C, workpiece impregnates, and impregnates 1min
~2min, to reduce surface roughness;
11. washing, room temperature pure water embathe, washing time 1min, the chemical polishing solution residual liquid of clean the surface;
12. passivation, 50% concentrated nitric acid liquid are heated to 50 DEG C, workpiece impregnates, and impregnates 2min~3min, makes workpiece surface
Generate passivation layer, it is easier to form a film;
13. washing 1, room temperature pure water embathes, washing time 1min, the remaining nitric acid solution of clean the surface;
14. washing 2, room temperature ultrapure water embathes, washing time 1min, and further cleaning workpiece nitric acid remained on surface is molten
Liquid;
15. anodic oxidation, workpiece is powered, and surface grows one layer of pellumina;
16. washing 1, room temperature ultrapure water embathes, washing time 1min, the remaining sulfuric acid solution of clean the surface;
17. 2,50 DEG C of ultrapure waters of washing embathe, washing time 1min, while preheating to workpiece;
18. sealing of hole carries out sealing of hole using 100 DEG C of ultrapure water boiling water;
19. washing, 50 DEG C of ultrapure waters embathe, washing time 1min cools down to workpiece;
20. rubbing down cleans, artificial hand-held polishing machine polishes to workpiece surface, reduces roughness, the spray of rubbing down process
Pure water is drenched, no dust generates;
21. ultrasonic clean, pure water room temperature, to rubbing down less than place carry out ultrasonic vibrating cleaning;
22. drying, drying compressed air dry up the water stain of workpiece surface;
23. baking, workpiece are placed in oven, 80 DEG C, toast 1 hour;
24. packaging, workpiece is in dust free room, double-layer vacuum pumping PE material packaging.
Preferably, in the anode oxidation process, 2~2.5 ampere/square decimeter of current density is handled 10 minutes.
Preferably, in the anode oxidation process, electrolyte contains 100~200 grams per liter of sulfuric acid, 1~3 grams per liter of oxalic acid,
1~5 grams per liter of hydroxyacetic acid, 10~20 grams per liter of glycerol, 15~20 DEG C of electrolyte temperature.
Preferably, the chemical polishing solution ingredient is sodium hydroxide, sodium nitrate, sodium nitrite and water.
Compared with the prior art, the present invention has the following beneficial effects:
The siding weatherability of remanufacturing service of the present invention is strong, and skin effect phenomenon does not occur in use in client, obtains
Market is widely recognized as.
Specific embodiment
Further supplement, but do not limit the invention in any way are done to the present invention combined with specific embodiments below.
A kind of vacuum equipment processing chamber siding regeneration treating method, comprising the following steps:
1. product is entered, side frame is removed;
2. polished and cleaned pre-treatment, artificial to use the spot for holding polishing machine removal component surface, sprayed in polishing process
Pure water, no dust generate;
3. polyurethane film is attached on workpiece with polyurethane film, the place for not needing oxidation is covered;
4. degreasing, the weak solution heating of 5% sodium hydroxide, workpiece impregnate, impregnate 2min~3min, remove surface grease;
5. washing, room temperature pure water embathe, 1min, the degreasing residual liquid of clean the surface are washed;
6. alkali cleaning, 10% sodium hydroxide solution are heated to 50 DEG C, workpiece impregnates, and impregnates 1min~2min, removes surface
Oxide layer;
7. washing, room temperature pure water embathe, washing time 1min, the sodium hydroxide residual liquid of clean the surface;
8. pickling, 10% nitric acid weak solution is heated to 50 DEG C, and workpiece impregnates, and impregnates 2min~3min, removes in alkaline bath
The product of generation;
9. washing, room temperature pure water embathe, washing time 1min, the nitric acid residual liquid of clean the surface;
10. chemical polishing is changed and throws the chemical polishing solution that 8% is added in slot, is heated to 50 DEG C, workpiece impregnates, and impregnates 1min
~2min, to reduce surface roughness;
11. washing, room temperature pure water embathe, washing time 1min, the chemical polishing solution residual liquid of clean the surface;
12 passivation, 50% concentrated nitric acid liquid are heated to 50 DEG C, and workpiece impregnates, and impregnates 2min~3min, produces workpiece surface
Raw passivation layer, it is easier to form a film;
13. washing 1, room temperature pure water embathes, washing time 1min, the remaining nitric acid solution of clean the surface;
14. washing 2, room temperature ultrapure water embathes, washing time 1min, and further cleaning workpiece nitric acid remained on surface is molten
Liquid;
15. anodic oxidation, workpiece is powered, and surface grows one layer of pellumina;
16. washing 1, room temperature ultrapure water embathes, washing time 1min, the remaining sulfuric acid solution of clean the surface;
17. 1,50 DEG C of ultrapure waters of washing embathe, washing time 1min, while preheating to workpiece;
18. sealing of hole carries out sealing of hole using the ultrapure water boiling water of 100 DEG C of bands;
19. washing, 50 DEG C of ultrapure waters embathe, washing time 1min cools down to workpiece;
20. rubbing down cleans, artificial hand-held polishing machine polishes to workpiece surface, reduces roughness, the spray of rubbing down process
Pure water is drenched, no dust generates;
21. ultrasonic clean, pure water room temperature, to rubbing down less than place carry out ultrasonic vibrating cleaning;
22. drying, drying compressed air dry up the water stain of workpiece surface;
23. baking, workpiece are placed in oven, 80 DEG C, toast 1 hour;
24. packaging, workpiece is in dust free room, double-layer vacuum pumping PE material packaging.
In the anode oxidation process, 2~2.5 ampere/square decimeter of current density is handled 10 minutes.
In the anode oxidation process, electrolyte contains 100~200 grams per liter of sulfuric acid, 1~3 grams per liter of oxalic acid, hydroxyacetic acid
1~5 grams per liter, 10~20 grams per liter of glycerol, 15~20 DEG C of electrolyte temperature.
The chemical polishing solution ingredient is sodium hydroxide, sodium nitrate, sodium nitrite and water.
Compared with the prior art, the present invention has the following beneficial effects:
The regenerated siding weatherability of the present invention is strong, and skin effect phenomenon does not occur in use in client, has obtained market
Be widely recognized as.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (4)
1. a kind of vacuum equipment processing chamber siding regeneration treating method, it is characterised in that: the following steps are included:
(1) product is entered, and side frame is removed;
(2) polished and cleaned pre-treatment, it is artificial to use the spot for holding polishing machine removal component surface, it is sprayed in polishing process pure
Water, no dust generate;
(3) polyurethane film is attached on workpiece with polyurethane film, and the place for not needing oxidation is covered;
(4) degreasing, the weak solution heating of 5% sodium hydroxide, workpiece impregnate, impregnate 2min~3min, remove surface grease;
(5) it washes, room temperature pure water embathes, and washes 1min, the degreasing residual liquid of clean the surface;
(6) alkali cleaning, 10% sodium hydroxide solution are heated to 50 DEG C, and workpiece impregnates, and impregnates 1min~2min, removes the oxygen on surface
Change layer;
(7) it washes, room temperature pure water embathes, washing time 1min, the sodium hydroxide residual liquid of clean the surface;
(8) pickling, 10% nitric acid weak solution are heated to 50 DEG C, and workpiece impregnates, and impregnates 2min~3min, remove and generate in alkaline bath
Product;
(9) it washes, room temperature pure water embathes, washing time 1min, the nitric acid residual liquid of clean the surface;
(10) chemical polishing solution of addition 8% in slot is thrown in chemical polishing, change, is heated to 50 DEG C, and workpiece impregnates, and immersion 1min~
2min, to reduce surface roughness;
(11) it washes, room temperature pure water embathes, washing time 1min, the chemical polishing solution residual liquid of clean the surface;
(12) it is passivated, 50% concentrated nitric acid liquid, is heated to 50 DEG C, workpiece impregnates, and impregnates 2min~3min, generates workpiece surface
Passivation layer, it is easier to form a film;
(13) 1 is washed, room temperature pure water embathes, washing time 1min, the remaining nitric acid solution of clean the surface;
(14) 2 are washed, room temperature ultrapure water embathes, washing time 1min, further cleaning workpiece nitric acid solution remained on surface;
(15) anodic oxidation, workpiece are powered, and surface grows one layer of pellumina;
(16) 1 is washed, room temperature ultrapure water embathes, washing time 1min, the remaining sulfuric acid solution of clean the surface;
(17) 2,50 DEG C of ultrapure waters are washed to embathe, washing time 1min, while workpiece is preheated;
(18) sealing of hole carries out sealing of hole using 100 DEG C of ultrapure water boiling water;
(19) it washes, 50 DEG C of ultrapure waters embathe, and washing time 1min cools down to workpiece;
(20) rubbing down cleans, and artificial hand-held polishing machine polishes to workpiece surface, reduces roughness, rubbing down process spray
Pure water, no dust generate;
(21) ultrasonic clean, pure water room temperature, to rubbing down less than place carry out ultrasonic vibrating cleaning;
(22) it dries up, drying compressed air dries up the water stain of workpiece surface;
(23) it toasts, workpiece is placed in oven, 80 DEG C, is toasted 1 hour;
(24) it packs, workpiece is in dust free room, double-layer vacuum pumping PE material packaging.
2. vacuum equipment processing chamber siding regeneration treating method according to claim 1, which is characterized in that the anode
In oxidation process, 2~2.5 ampere/square decimeter of current density is handled 10 minutes.
3. vacuum equipment processing chamber siding regeneration treating method according to claim 1, which is characterized in that the anode
In oxidation process, electrolyte contains 100~200 grams per liter of sulfuric acid, 1~3 grams per liter of oxalic acid, 1~5 grams per liter of hydroxyacetic acid, glycerol 10
~20 grams per liters, 15~20 DEG C of electrolyte temperature.
4. vacuum equipment processing chamber siding regeneration treating method according to claim 1, which is characterized in that the chemistry
Polishing fluid ingredient is sodium hydroxide, sodium nitrate, sodium nitrite and water.
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CN108441917B (en) * | 2018-04-20 | 2020-01-21 | 赣州超越摩擦材料有限公司 | Method for preparing wet friction plate by electric discharge machining |
CN108716001B (en) * | 2018-06-16 | 2019-05-17 | 宁波明望汽车饰件有限公司 | A kind of automobile parts process of surface treatment |
CN110841970A (en) * | 2018-08-20 | 2020-02-28 | 深圳仕上电子科技有限公司 | Cleaning method suitable for surface attachments of adsorbed parts |
CN109811388A (en) * | 2019-03-27 | 2019-05-28 | 珠海市玛斯特恒新铝合金加工有限公司 | It is a kind of do not damage size Process on Aluminum Alloy Oxidation Film move back membrane process |
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