200919528 九、發明說明 【發明所屬之技術領域】 本發明，是關於使用於半導體、液晶等之曝光裝置用 光源之高壓放電燈及高壓放電燈裝置，特別是，關於在發 光管外側配置有外管之高壓放電燈，以及將該高壓放電燈 配置在冷卻套管內之高壓放電燈裝置。 【先前技術】 現在，例如在接著劑等之樹脂的硬化處理或是印刷電 路基板等之曝光處理中，是利用紫外線照射裝置，作爲紫 外線光源，例如是使用高壓放電燈。 第6圖，是顯示於以往之高壓放電燈裝置之構成槪略 的說明圖。 如專利文獻1所記載之發明，該高壓放電燈裝置，是 在高壓放電燈1之發光管2的外側，配置由內管2 5與外 管26所構成的冷卻套管21，來進行發光管2的冷卻。高 壓放電燈1之發光管2與冷卻套管21之內管的間隙，平 均大約爲1mm。高壓放電燈1，於直管狀之石英玻璃製的 發光管2兩端封止一對的電極，並於內部封入水銀。冷卻 套管21是由圓筒狀的石英玻璃等透明材料所形成，藉由 內管25與外管26而成爲雙重管構造。而且，經由設在兩 端外周的連接管2 7 a、2 7 b使冷卻水從外部循環於套管內 ，將夾介空氣層而近接之發光管2予以冷卻並且吸收從高 壓放電燈1所放射的熱。 -4- 200919528 於第6圖所記載之高壓放電燈裝置，由於僅藉由存在 於高壓放電燈1的發光管2與冷卻套管21的內管2 5之間 隙中之空氣的單純熱傳導是無法將在發光管2所產生的熱 傳達至冷卻套管2 1，故使冷卻風流動於高壓放電燈1的發 光管2與冷卻套管21的內管3之間隙中來提高冷卻效率 。但是，進入放電燈的發光管2與冷卻套管21的內管25 之間隙的冷卻風，其溫度在入射側與出射側並不均一，隨 此原因，造成發光管2的溫度也變得不均一。 〔專利文獻1〕 日本特開平6-267512號公報 【發明內容】 〔發明所要解決之問題〕 因之，爲了不使冷卻風流動於發光管2與冷卻套管21 之間隙來進行發光管2之冷卻，乃提案出縮小發光管2與 冷卻套管2 1之間隔之對策。對於藉由將發光管2與冷卻 套管21之間隙設爲平均約5〇μιη，發光管2的內徑爲 3.4mm (發光管2的外徑爲7.4mm)之高壓放電燈1，即 使輸入爲250W/cm也能夠將發光管2的內表面溫度冷卻 至80(TC左右。 高壓放電燈裝置，在被使用來作爲半導體等之曝光裝 置用光源時，在處理中以外之更換工件等之待機中，爲了 省電’如第7圖所示地，降低載入於燈之輸入電力來亮燈 。因爲待機電力越低則省電效果越大，所以業界期望待機 -5- 200919528 電力的低電力化。 然而，當待機模式時的待機電力過於下降時，則會造 成發光管2的內表面溫度降低，產生被封入在發光管2內 的水銀未蒸發。當產生水銀未蒸發時’要從待機模式移轉 到處理模式時的啓動時間會有變慢、或者是無法維持放電 而造成中斷的問題。 本發明之目的，係在於提供一種能夠一面降低待機模 式的待機電力，同時於處理模式時，可以在短時間起動， 且不會中斷地進行高輸出亮燈之高壓放電燈及高壓放電燈 裝置。 〔發明解決問題之技術手段〕 本案的第1發明，是對於具備：相向配置有一對的電 極，並封入有水銀的發光管，以及形成在上述發光管外側 之直管狀的外管，以上述發光管的兩端來固定上述外管的 高壓放電燈，其特徵爲：於上述發光管的外表面，或是於 上述發光管的內表面，形成有凸部。 又，本案的第2發明，是對於本案的第1發明，其中 上述凸部，是藉由在外管的內表面設置螺旋狀的突起線條 所形成，來作爲其特徵。 又，本案的第3發明，是對於本案的第1發明，其中 上述凸部，是藉由將發光管的外表面設爲於管軸方向垂直 地切斷之斷面爲斷面多角形狀所形成，來作爲其特徵。 又，本案的第4發明，是對於本案之第1〜3發明， -6 - 200919528 其中上述外管之內徑與上述發光管之外徑的差爲20〇μιη以 下，上述凸部的高度爲200μιη以下，來作爲其特徵。 又，本案的第5發明，是將本案之第1〜4發明之任 一項所記載之高壓放電燈，配置於冷卻套管的內部，並使 冷卻媒體沿著上述外管的壁面流過，來作爲其特徵。 〔發明效果〕 依據本發明之高壓放電燈及高壓放電燈裝置，由於藉 由在外管的內表面、或是在發光管的外表面形成凸部，可 以提高對在放電空間內之最冷點的溫度，所以即使降低待 機電力也可以維持較高之發光管的內表面溫度，並可以抑 制發光管內之封入水銀之未蒸發狀態的產生。因此，可以 實現能夠一面降低待機模式的待機電力，同時於處理模式 時，可以在短時間起動，且不會中斷地進行高輸出亮燈之 高壓放電燈。 【實施方式】 〔實施本發明之最佳形態〕 說明本發明之第1實施形態。第1圖，是顯示本發明 之高壓放電燈裝置之構成的說明用斷面圖。 高壓放電燈裝置，是於冷卻套管21的內部，插通著 :於發光管2的外側配置有外管3之高壓放電燈1所構成 。冷卻套管2 1，是藉由可穿透過從高壓放電燈1所放射（ 輻射）之紫外線的材料所構成者，例如由石英玻璃所構成 200919528 。於冷卻套管2 1的兩端，形成有：供給冷卻媒體之供給 流路22，以及排出冷卻媒體之排出流路23。供給流路22 與排出流路23其整體爲大致L字型的管狀’用以保持固 定冷卻套管21及高壓放電燈1。藉由軸向內方側的鎖口部 24 a，夾介0型環來保持固定冷卻套管21的外周面。藉由 軸向外方側的鎖口部24b，夾介Ο型環來保持固定高壓放 電燈1的外周面。 高壓放電燈1在亮燈時，冷卻媒體由沒有圖示出的泵 浦所供給。高壓放電燈1的冷卻，是讓冷卻媒體例如以 5 L (公升）/min之流量進行循環而達成。又’對於冷卻媒 體，以水、純水、或是透過逆滲透膜的水等爲適宜。 第2圖，是顯示本發明之高壓放電燈之構成的說明用 斷面圖。 高壓放電燈1，其兩端爲被封止，於例如由石英玻璃 所構成之直管狀之發光管2的內部，分別相向配置著例如 由鎢所構成之一對的棒狀電極4。各電極4連接於金屬箔 5的一端，於金屬箔5的另一端連接有外部導線6。金屬 箔5是由鉬所構成，並氣密地被埋設在：於發光管2之兩 端所形成之桿狀的封止部7。外部導線6，是在封止部7 的外側藉由支撐件9所披覆，而成爲大徑。封止部7，例 如，是使位於作爲發光管2構成材料之管體的兩端部處於 熔融狀態，藉由將內部減壓之收縮密封法所形成者，製成 比發光管2的中央部（相當於發光區域的部分）還要小徑 -8- 200919528 高壓放電燈1，例如是由被稱之爲「毛細燈（ capillary lamp)」的高壓水銀燈所構成，於發光管2的內 部，例如封入1 m g / c c以上的水銀、或是與水銀同時添加 鐵、鈷、鎳、鉛、鎵、鎂、錫、鉈、錳等之金屬鹵化物之 中至少一種類以上，並且適當地封入氬氣等之稀有氣體。 然後，放射出例如含有波長爲200〜45 Onm之紫外線的光 〇 於高壓放電燈1之發光管2的外側，形成：由圓筒狀 之石英玻璃等的透明材料所構成，內徑尺寸相對於管軸方 向爲均一之直管狀的外管3。沿著外管3的外表面讓冷卻 媒體流過，來冷卻高壓放電燈1。從發光管2之兩端附近 並及於披覆外部導線6之支撐件9的一部分’且於與外管 3之間插入有基端部8，夾介基端部8並藉由接著劑使發 光管2及外管3氣密地被固定。於發光管2與外管3之間 的間隙，形成有由空氣層或是適當的氣體所構成的氣體層 〇 高壓放電燈1的發光管2，由於封止部7是比相當於 發光區域之中央部還更小徑地構成，所以在中央部是近接 於外管3，而在封止部7是與外管3間隔開。因此，在高 壓放電燈1之發光管2的中央部，藉由冷卻媒體充分地冷 卻而能夠防止過熱所造成之發光管2的破損。再者，於高 壓放電燈1之發光管2的封止部7，因冷卻作用較弱，故 可以確實地防止過冷卻，並防止起因於水銀未蒸發之照度 降低。 -9- 200919528 以下顯示作爲上述高壓放電燈1之一構成例，位於發 先巨2之中央部的內徑爲φ3_4ηηη，發光管2之中央部的 外徑爲φ 7.4mm，封止部7的外徑爲φ 6mm，發光管2的 全長爲150mm’電極4之間距爲100mm，位於放電空間 10內之電極4部分的長度爲3mm，水銀的封入量爲 44mg/mm3。外管3的外徑爲φ 95tnm，外管3的內徑爲 Φ 7.4mm。 在放電燈亮燈時之高壓放電燈1的額定電壓爲2000V ’額定電流爲1.25A，輸入電力爲2500W。 胃3圖，是顯示本發明之高壓放電燈之中央部的放大 斷面圖。第3圖（a)是將高壓放電燈1在垂直於管軸地 切斷時的放大斷面圖；第3圖（b )是高壓放電燈1在平 行於管軸地切斷時之接觸部分1 7的放大斷面圖。 高壓放電燈1，因爲發光管2與外管3之間的間隙1 4 非常窄小，平均爲50 μηι左右，即使使發光管2與外管3 之軸中心對齊一致，但由於石英玻璃所具有之尺寸誤差等 ’也會產生發光管2與外管3接觸之區域。如第3圖（a )所示，發光管2偏離地被配置在比外管3之中心更爲下 側，下側的發光管2與外管3之間隙d ’由於比上側的發 光管2與外管3之間隙D還要小。由於下側之發光管2的 外表面1 2，離受到冷卻媒體所冷卻之外管3的距離較短， 故冷卻效果要比上側之發光管2的外表面1 2還要高。因 此，位於發光管2之外表面12與外管3之內表面13相接 觸之接觸部分17處之發光管2的內表面11 ’其冷卻效果 -10- 200919528 最高，成爲放電空間1 〇內的最冷點。相反地，位於發光 管2之外表面1 2與外管3之內表面1 3之間的間隙D成爲 最大部分處之發光管2的內表面11，其冷卻效果最低，成 爲放電空間1 〇內之最溫熱點。 如第3圖（b )所示，在沿著高壓放電燈1之管軸方 向切斷的斷面，於外管3的內表面1 3，以於軸向周期性地 產生之方式來形成凸部15。具體而言，是在圓筒狀之外管 3的內表面13，凸部15爲螺旋狀之突起線條所形成。凸 部15的高度h爲10〜200μιη’與鄰接之凸部15之間隔P 爲0.1〜2mm。由於在外管3的內表面13形成有凸部15, 所以若把接觸部分1 7放大來看時，於凸部1 5，雖然發光 管2的外表面12與外管3的內表面13爲接觸，不過在凸 部1 5以外的部分中，於發光管2的外表面1 2與外管3的 內表面1 3之間產生間隙，而存在有空氣層1 6。即使在發 光管2的外表面1 2與外管3的內表面1 3之間的間隙d成 爲最小的接觸部分1 7中，發光管2的外表面1 2與外管3 的內表面1 3也並非緊密貼接地成爲面接觸，發光管2的 外表面12與外管3的內表面13在凸部1 5是成爲相接觸 的線接觸或是點接觸，而存在有接觸處與空氣層16部分 〇 如第3圖（a )所示，上側之發光管2之外表面12與 外管3之內表面1 3之間的間隙D，由於是對向於發光管2 之外表面1 2與外管3之內表面1 3的接觸部分1 7，故爲最 大。不過，接觸部分17之發光管2的外表面12與外管3 -11 - 200919528 的內表面13之間的間隔具有凸部15之高度h左右，所以 間隙14爲最大部分之發光管2的外表面1 2與外管3的內 表面1 3之間的間隙D，也要從外管3的內徑R與發光管2 的外徑r之差’減去凸部1 5之高度h後之値而成爲（（ R-r ) -h) 0 如此地，在發光管2之外表面12與外管3之內表面 1 3之間的間隙d成爲最小的接觸部分1 7，由於間隙d具 有凸部15之高度h左右，故在發光管2之外表面12與外 管2之內表面1 3之間的間隙D爲最大的部分，相較於在 外管3之內表面1 3沒有形成凸部1 5之情形，間隙D可以 減小一凸部1 5之高度h的量。 於成爲位在放電空間1 〇內之最冷點之間隙1 4爲最小 的接觸部分17，由於發光管2的外表面12與外管3的內 表面13在凸部15之接觸成爲線接觸或是點接觸，故與外 管3之間存在空氣層1 6，增大由冷卻媒體所冷卻之與外管 3的距離，所以使得最冷點的溫度提升。又，由於凸部15 在圓筒狀之外管3的內表面1 3以成爲螺旋狀之突起線條 之方式形成，因此即使在外管3之內表面13的任一處形 成接觸部分1 7，也必然存在空氣層1 6，使發光管2的外 表面12與外管3的內表面13不會緊密接觸。另一方面， 成爲位在放電空間1 0內之最溫熱點之間隙1 4爲最大的部 分D，與外管3的間距雖稍微有縮小，但由於與外管3之 間存在有由間隙1 4所形成的空氣的層，故最溫熱點的溫 度無關於凸部15之有無，幾乎沒有變動。因此’藉由在 -12- 200919528 外管3的內表面1 3形成凸部1 5，可以縮小最冷點與最溫 熱點的溫度差。 由於藉由於外管3的內表面1 3形成凸部1 5 ’可以提 升位於放電空間1 0內之最冷點的溫度，因此即使降低待 機電力也能夠維持較高之發光管2之內表面11的溫度， 所以可以抑制發光管2內所封入之水銀之未蒸發狀態的產 生。因此，可以實現能夠一面降低待機模式的待機電力， 同時於處理模式時，可以在短時間起動，且不會中斷地進 行高輸出亮燈之高壓放電燈1。 第4圖，是用以說明製作本發明之高壓放電燈之方法 的說明圖。 該高壓放電燈1，可以以如次之方式來作製。 首先，於金屬箔5的兩端，將桿狀的電極4與外部導 線6做電氣性連接，作成2個電極4構造體。於圚筒狀之 石英玻璃管的內部，封入適當量的水銀等，並且將電極構 造體從石英玻璃管的兩側插入，利用收縮密封法將石英玻 璃管的兩端部予以封止。如此地實施，作成於內部具備有 封入物及電極4的發光管2。 如第4圖（a)所示地，於發光管2的外表面12將直 徑80μιη的碳線30以2mm間隔捲繞成螺旋狀。考量圖示 方便，在圖面上是將於碳線30放大來繪圖。另一方面， 準備具有比發光管2的外徑尺寸還要大之內徑尺寸的圓筒 狀石英玻璃管3 1，僅將單方封止。將捲繞有碳線3 0之發 光管2置入於石英玻璃管31之中，將石英玻璃管31的內 -13- 200919528 部予以減壓並旋轉。以氫氧噴燈掃掠於軸方向’從石英玻 璃管31的外側進行加熱，將石英玻璃管3 1燒縮而形成外 管3。此時，外管3，燒縮到使其與發光管2之間隙14比 碳線3 0還窄小爲止。 如第4圖（b )所示地，將外管3充分地燒縮之後’ 切斷外管3的兩端，製成兩端開口的圓筒管形狀。然後’ 將高壓放電燈1置於大氣壓環境下之1〇〇〇 °C的電氣爐中加 熱3小時。藉由此加熱來燒掉碳線3 0。存在於外管3與發 光管2之間隙14的碳線3 0消失，形成由設在外管3之內 表面1 3的螺旋狀之突起線條所構成的凸部1 5。如圖示般 地在沿著高壓放電燈1之管軸所切斷的斷面上，在外管3 的內表面13於管軸方向周期性地形成有複數個凸部15。 由螺旋狀之突起線條所形成的凸部1 5，是可以藉由如此地 捲繞上碳線3 0後進行加工而容易地形成。又，如上述般 地將石英玻璃管3 1燒縮形成外管3時，由於碳線30亦充 當間隔物之作用，所以可以將外管3與發光管2之間隔以 大致一定之形態來進行控制。因此，不會產生發光管2與 外管3緊密接著的區域，可以消除冷卻的偏頗不均，也可 以抑制高壓放電燈1的變異不均一。 接著，說明本發明之第2實施形態。第5圖，是顯示 在本發明之高壓放電燈1的中央部，將高壓放電燈1垂直 於管軸地予以切斷時之發光管2的外表面12與外管3的 外表面1 2之接觸部分1 7的部分放大斷面圖。 第2實施形態之高壓放電燈1，除了外管3的內表面 •14- 200919528 13爲平滑的面，發光管2的外表面12爲斷面多角形狀之 外’是具有與第1實施形態之高壓放電燈1同樣之構成者 。以下對於第2實施形態，省略與第1實施形態之高壓放 電燈1相同之構成構件之說明。 如第5圖所示，發光管2的外表面12，在垂直於高壓 放電燈1之管軸方向所切斷的斷面中，發光管2的外周是 形成爲斷面多角形狀，以使其頂部形成爲凸部1 8。具體而 言，是使圓筒狀之發光管2的外表面12，以成爲於軸向較 長之斷面多角形狀之方式而形成。具有10〜60個角之多 角形’凸部18之高度h爲10〜200μιη，相鄰接之凸部18 的間隔Ρ爲0.5〜2mm。成爲凸部18的部分，其發光管2 的厚度爲最大，發光管2的外表面12與外管3的內表面 13是接觸著。在凸部16以外的部分，發光管2的厚度爲 較薄，並於發光管2的外表面12與外管3的內表面13之 間形成有空氣層1 6。 發光管2的外表面12與外管3的內表面13相接觸的 凸部1 8，離由冷卻媒體所冷卻之外管3的距離較短，發光 管2是由外管3所直接冷卻。位於凸部1 8之發光管2的 內表面11，冷卻效果最高。另一方面，凸部18的鄰接部 分20，於發光管2的外表面12與外管3的內表面13之間 形成有空氣層1 6，離由冷卻媒體所冷卻之外管3之距離較 遠。由於發光管2是由空氣層16所間接冷卻’發光管2 之內表面1 1的冷卻效果較弱。因此，位於鄰接部分2 0之 發光管2的內表面1 1的溫度，是不會下降到如凸部1 8的 -15- 200919528 內表面13 —'般。 又，由於凸部18是藉由將發光管2的外周作成斷面 多角形狀所形成，故即使外管3之內表面1 3的任一處存 在有接觸部分17，也必然存在空氣層16，使發光管2的 外表面12與外管3的內表面13不會緊密接觸。 即使於接觸部分17，發光管2的外表面12與外管3 的內表面13爲緊密接觸但並非是面接觸，發光管2的外 表面12與外管3的內表面13在凸部18是成爲相接觸的 線接觸或是點接觸，而存在有接觸處與空氣層16部分。 位於具有空氣層16之鄰接部分20的發光管2之內表面11 的溫度，由於比位於凸部18之發光管2之內表面11的溫 度還要高，因此可以溫熱位於凸部18之發光管2的內表 面11，提高接觸部分17之爲整體之發光管2的內表面11 的溫度。因此，相較於在發光管2的外表面12沒有形成 凸部1 8之情形，可以提升位於放電空間1 〇內之成爲最冷 點之位於接觸部分17之發光管2的內表面11的溫度。 由於藉由在發光管2的外表面1 2形成凸部1 8 ’可以 提升位於放電空間1 〇內之最冷點的溫度’因此即使降低 待機電力也能夠維持較高之發光管2之內表面11的溫度 ，所以可以抑制發光管2內所封入之水銀之未蒸發狀態的 產生。因此，可以實現能夠一面降低待機模式的待機電力 ’同時於處理模式時，可以在短時間起動’且不會中斷地 進行高輸出亮燈之高壓放電燈1 ° 接著，說明關於實施例。 -16- 200919528 <實施例1 > 製作使用於第1實施形態所示之高壓放電燈的高壓放 電燈裝置’來作爲實驗對象。作爲實驗對象所使用的高壓 放電燈之規格如以下所示。 發光管：石英玻璃製，中央部的內徑爲 φ8ιηπι，中央部的 外徑爲 Φ ，封止部的外徑·· φ 6mm，發光長度晏 1 0 0 m m 〇 外管：石英玻璃製，內徑爲φ 12.1mm，外徑爲φ 14.1mm ο 凸部：闻度爲50μπι，管軸方向之間隔爲2mm。 電極：鎢製，電極間距離爲1 00mm，位於放電空間1 〇內 之電極部分的長度爲3mm。 封入物：水銀7.5mg/cc，氬氣lOOTorr。 又，凸部是於發光管的外表面，將直徑80μιη之碳線 以2mm間隔捲繞成線圏狀，並藉由上述的方法所形成。 在處理模式下亮燈30秒鐘，接著在待機模式下亮燈 3 0秒鐘，以使處理模式與待機模式爲交互之方式進行了亮 燈。於處理模式時，高壓放電燈之輸入電力爲3000W( 3 00 W/cm )之方式進行亮燈。於待機模式時，高壓放電燈 之輸入電力爲2000W( 200W/cm〉之方式進行亮燈。 於冷卻套管，作爲冷卻媒體，是使水以5L/min之流 量進行循環。 又，作爲比較對象，除了於外管的內表面形成有凸部 -17- 200919528 之外’製作了與實驗對象相同樣之規格的高壓放電燈1。 於外管的內表面形成有凸部之實驗對象的高壓放電燈 ’位於發光管之內表面的溫度，在處理模式時，在接觸部 分爲7 0 0 °c ’在間隙最大部分爲i 〇 〇 (TC。又，在待機模式 時’在接觸部分爲5 40 °C，在間隙最大部分爲8〇〇。(：。 於外管的內表面沒有形成凸部之比較對象的高壓放電 燈’位於發光管之內表面的溫度，在處理模式時，在接觸 部分爲5 5 0 °C，在間隙最大部分爲丨〇 〇 〇它。又，在待機模 式時，在接觸部分爲43 0 °C，在間隙最大部分爲800。(：。 於外管的內表面形成有凸部之實驗對象的高壓放電燈 ’成爲最冷點之接觸部分的溫度，相較於比較對象的高壓 放電燈’在處理模式時要高出1 5 0 t，於待機模式時要高 出 1 1 〇 t：。 當放電空間內的溫度爲4 〇 〇 r以下時，會發生所封入 的水銀未蒸發，並產生從待機模式移轉至處理模式時之啓 動時間的遲延、或是無法維持放電而放電中斷。依本實驗 結果’得知於外管的內表面形成有凸部之實驗對象的高壓 放電燈’高壓放電燈於亮燈中，在放電容器內之溫度爲最 低的待機模式時之接觸部分的溫度爲540 °c，比最冷點溫 度400°C還要高140°C。由此，可以預測到於外管的內表 面形成有凸部之實驗對象的高壓放電燈，即使將待機模式 的輸入電力減少到小於2 0 0 W/cm，在更降低待機模式時之 接觸部分的溫度的條件下進行亮燈，也不會產生水銀的未 蒸發部分。 -18- 200919528 <實驗例2 > 由實驗例1之實驗結果所預測，將於外管的內表面形 成有凸部之實驗對象的高壓放電燈，減少待機模式的輸入 電力來進行亮燈。作爲實驗對象所使用的高壓放電燈之規 格’係與實驗例1相同。又，高壓放電燈裝置的冷卻條件 亦與實驗例1相同。還有，高壓放電燈的亮燈條件，設定 如下。 在處理模式下亮燈3 0秒鐘，接著在待機模式下亮燈 3 〇秒鐘’以使處理模式與待機模式爲交互之方式進行了亮 燈。於處理模式時，高壓放電燈之輸入電力爲3000W ( 3 00 W/cm )之方式進行亮燈。於待機模式時，高壓放電燈 之輸入電力爲1500W ( 150W/cm)之方式進行亮燈。 亦即’除了降低待機模式的輸入電力之外，高壓放電 燈的亮燈條件’是設成與實驗例1相同。 於外管的內表面形成有凸部之實驗對象的高壓放電燈 ’即使將待機模式的輸入電力設爲1 5 0 W/cm，也沒有產生 水銀的未蒸發部分。由於沒有產生水銀的未蒸發部分，所 以從待機模式移轉到處理模式，也依然能夠維持較短的起 動時間。又，於處理模式時，無關於待機模式的輸入電力 値’可以以高輸入電力進行高輸出亮燈。 因此，由於即使降低待機模式的待機電力，也沒有產 生水銀的未蒸發部分，所以確定了可以實現在短時間從待 機模式到處理模式之起動，於處理模式時可以進行不中斷 的高輸出亮燈的高壓放電燈。 -19- 200919528 依據實驗例1的結果’對於在外管的內表面沒有形成 凸部的高壓放電燈，當將輸入電力設爲200W/cm時，成 爲放電空間內之最冷點的接觸部分之發光管的內表面溫度 爲4 3 0 °C。若輸入電力値更小於此値時，就會降低放電空 間內的最冷點溫度而產生水銀的未蒸發。亦即，對於在外 管的內表面沒有形成凸部的高壓放電燈，於待機模式時之 輸入電力的最低値爲200W/cm。 另一方面，由實驗例2之結果’於外管的內表面形成 有凸部之實驗對象的高壓放電燈’係確定了可將待機模式 的輸入電力設爲1 5 0 W/cm。由此可得知，相較於沒有形成 凸部之先行技術下的高壓放電燈’可以將待機模式的輸入 電力減低至7 5 %。 【圖式簡單說明】 第1圖是顯示本發明之高壓放電燈裝置之構成的說明 用斷面圖。 第2圖是顯示本發明之高壓放電燈之構成的說明用斷 面圖。 第3圖是顯示本發明之高壓放電燈之中央部的放大斷 面圖。 第4圖是用以說明本發明之高壓放電燈製作之方法的 說明圖。 第5圖是顯示本發明之高壓放電燈之中央部的放大斷 面圖 -20- 200919528 第6圖是顯示於以往之高壓放電燈裝置之構成槪略的 說明圖。 第7圖是顯示使用高壓放電燈時之輸入電力的說明圖 【主要元件符號說明】 1 :高壓放電燈 2 :發光管 3 :外管 4 :電極 11 :發光管的內表面 1 2 :發光管的外表面 1 3 :外管的內表面 1 4 :間隙 1 5 :凸部 1 6 :空氣層 1 7 :接觸部分 2 1 :冷卻套管 D :最大間隙 d :最小間隙 h :凸部的高度 P :凸部的間隔 -21 -[Technical Field] The present invention relates to a high pressure discharge lamp and a high pressure discharge lamp device used for a light source for an exposure device such as a semiconductor or a liquid crystal, and more particularly, an outer tube is disposed outside the arc tube. The high pressure discharge lamp and the high pressure discharge lamp device in which the high pressure discharge lamp is disposed in the cooling jacket. [Prior Art] For example, in the curing treatment of a resin such as an adhesive or the exposure processing of a printed circuit board or the like, an ultraviolet irradiation device is used, and as the ultraviolet light source, for example, a high pressure discharge lamp is used. Fig. 6 is an explanatory view showing a configuration of a conventional high-pressure discharge lamp device. According to the invention described in Patent Document 1, the high pressure discharge lamp device is provided with a cooling jacket 21 composed of an inner tube 25 and an outer tube 26 outside the arc tube 2 of the high pressure discharge lamp 1 to perform an arc tube. 2 cooling. The gap between the arc tube 2 of the high pressure discharge lamp 1 and the inner tube of the cooling jacket 21 is about 1 mm on average. In the high pressure discharge lamp 1, a pair of electrodes are sealed at both ends of the arc tube made of a straight tubular quartz glass, and mercury is sealed inside. The cooling jacket 21 is formed of a transparent material such as cylindrical quartz glass, and has a double pipe structure by the inner tube 25 and the outer tube 26. Further, the cooling water is circulated from the outside through the connecting pipes 2 7 a, 2 7 b provided at the outer ends of the both ends, and the adjacent light-emitting tube 2 is cooled and absorbed from the high-pressure discharge lamp 1 The heat of radiation. -4- 200919528 The high-pressure discharge lamp device described in Fig. 6 cannot be simply heated by the heat of the air existing in the gap between the arc tube 2 of the high-pressure discharge lamp 1 and the inner tube 25 of the cooling jacket 21. The heat generated in the arc tube 2 is transmitted to the cooling jacket 2, so that the cooling air flows in the gap between the arc tube 2 of the high pressure discharge lamp 1 and the inner tube 3 of the cooling jacket 21 to improve the cooling efficiency. However, the cooling air entering the gap between the arc tube 2 of the discharge lamp and the inner tube 25 of the cooling jacket 21 is not uniform in temperature on the incident side and the exit side, and accordingly, the temperature of the arc tube 2 does not become uniform. Uniform. [Problem to be Solved by the Invention] Therefore, the light-emitting tube 2 is performed so that the cooling air does not flow in the gap between the arc tube 2 and the cooling jacket 21. Cooling is proposed to reduce the distance between the arc tube 2 and the cooling jacket 21. The high-pressure discharge lamp 1 having an inner diameter of the light-emitting tube 2 of 3.4 mm (the outer diameter of the arc tube 2 is 7.4 mm) by the gap between the arc tube 2 and the cooling sleeve 21 is set to an average of about 5 μm, even if input At 250 W/cm, the temperature of the inner surface of the arc tube 2 can be cooled to about 80 (TC). When the high-pressure discharge lamp device is used as a light source for an exposure device such as a semiconductor, the workpiece is replaced by a workpiece other than the processing. In order to save power, as shown in Fig. 7, the input power stored in the lamp is lowered to light up. Since the lower the standby power, the power saving effect is greater, so the industry expects low power of standby-5-200919528 power. However, when the standby power in the standby mode is excessively lowered, the temperature of the inner surface of the arc tube 2 is lowered, and the mercury enclosed in the arc tube 2 is not evaporated. When the mercury is not evaporated, it is to be standby. The startup time when the mode is shifted to the processing mode may be slowed down or the discharge may not be maintained to cause interruption. The object of the present invention is to provide a standby power capable of reducing the standby mode. In the processing mode, the high-pressure discharge lamp and the high-pressure discharge lamp device that can be started up in a short time and are turned on without interruption can be used. [Technical means for solving the problem] The first invention of the present invention is directed to: a high-pressure discharge lamp in which a pair of electrodes are arranged and sealed with mercury, and a straight tubular outer tube formed outside the arc tube, and the outer tube is fixed at both ends of the arc tube, wherein: The outer surface of the light-emitting tube or the inner surface of the light-emitting tube is formed with a convex portion. The second invention of the present invention is the first invention of the present invention, wherein the convex portion is inside the outer tube According to a third aspect of the present invention, in the first aspect of the invention, the convex portion is formed by the outer surface of the arc tube as a tube axis. The fourth aspect of the present invention is the first to third inventions of the present invention, -6 - 200919528, in which the cross section perpendicularly cut is formed by a polygonal cross section. The difference between the inner diameter of the outer tube and the outer diameter of the arc tube is 20 μm or less, and the height of the convex portion is 200 μm or less. The fifth invention of the present invention is the first to the present invention. (4) The high-pressure discharge lamp according to any one of the inventions is characterized in that the high-pressure discharge lamp according to the present invention is disposed inside the cooling jacket and flows along the wall surface of the outer tube. In the lamp and the high-pressure discharge lamp device, since the convex portion is formed on the inner surface of the outer tube or on the outer surface of the arc tube, the temperature at the coldest point in the discharge space can be increased, so that the standby power can be maintained even if the standby power is lowered. The higher the inner surface temperature of the arc tube can suppress the occurrence of the unvaporized state of the mercury enclosed in the arc tube. Therefore, the standby power capable of reducing the standby mode can be realized, and in the processing mode, it can be started in a short time. High-pressure discharge lamps with high output lighting without interruption. [Embodiment] [Best Mode for Carrying Out the Invention] A first embodiment of the present invention will be described. Fig. 1 is a cross-sectional view showing the structure of a high pressure discharge lamp device of the present invention. The high pressure discharge lamp device is constructed by inserting a high pressure discharge lamp 1 having an outer tube 3 disposed outside the arc tube 2 inside the cooling jacket 21. The cooling jacket 21 is composed of a material which can penetrate the ultraviolet rays radiated (radiated) from the high pressure discharge lamp 1, for example, composed of quartz glass 200919528. At both ends of the cooling jacket 21, a supply flow path 22 for supplying a cooling medium and a discharge flow path 23 for discharging a cooling medium are formed. The supply flow path 22 and the discharge flow path 23 are formed in a substantially L-shaped tubular shape for holding the fixed cooling jacket 21 and the high pressure discharge lamp 1. The outer peripheral surface of the cooling jacket 21 is held by the 0-ring of the inner side by the lock portion 24a on the inner side in the axial direction. The outer peripheral surface of the high-voltage discharge lamp 1 is held by the yoke-type ring by the lock portion 24b on the outer side in the axial direction. When the high pressure discharge lamp 1 is turned on, the cooling medium is supplied by a pump not shown. The cooling of the high pressure discharge lamp 1 is achieved by circulating a cooling medium at a flow rate of 5 L (liter) / min, for example. Further, it is preferable that the cooling medium is water, pure water, or water that has passed through the reverse osmosis membrane. Fig. 2 is a cross-sectional view showing the structure of the high pressure discharge lamp of the present invention. The high pressure discharge lamp 1 is sealed at its both ends, and a rod electrode 4 of, for example, a pair of tungsten is disposed facing each other inside a straight tubular light-emitting tube 2 made of, for example, quartz glass. Each of the electrodes 4 is connected to one end of the metal foil 5, and an external lead 6 is connected to the other end of the metal foil 5. The metal foil 5 is made of molybdenum and is hermetically embedded in a rod-shaped sealing portion 7 formed at both ends of the arc tube 2. The outer lead wire 6 is covered by the support member 9 on the outer side of the sealing portion 7, and has a large diameter. The sealing portion 7 is formed, for example, in a molten state in which both end portions of the tubular body which is a material constituting the arc tube 2 are in a molten state, and is formed by a shrinkage sealing method in which the internal pressure is reduced. (corresponding to the portion of the light-emitting region) and the small diameter -8-200919528 The high-pressure discharge lamp 1, for example, is composed of a high-pressure mercury lamp called a "capillary lamp", and is inside the arc tube 2, for example Sealing at least 1 mg / cc of mercury or adding at least one of metal halides such as iron, cobalt, nickel, lead, gallium, magnesium, tin, antimony, manganese, etc. with mercury, and appropriately enclosing argon Wait for rare gases. Then, for example, a light having an ultraviolet ray having a wavelength of 200 to 45 Onm is emitted outside the arc tube 2 of the high pressure discharge lamp 1, and is formed of a transparent material such as a cylindrical quartz glass, and the inner diameter is relatively large. The tube axis is a uniform straight tubular outer tube 3. The high pressure discharge lamp 1 is cooled by flowing a cooling medium along the outer surface of the outer tube 3. A base portion 8 is inserted from the vicinity of both ends of the arc tube 2 and a portion of the support member 9 covering the outer lead 6 and between the outer tube 3, and the interposer end portion 8 is made by an adhesive. The arc tube 2 and the outer tube 3 are hermetically fixed. In the gap between the arc tube 2 and the outer tube 3, a gas layer composed of an air layer or a suitable gas is formed, and the arc tube 2 of the high pressure discharge lamp 1 is formed, and the sealing portion 7 is a ratio corresponding to the light-emitting area. Since the central portion is also formed with a smaller diameter, the central portion is adjacent to the outer tube 3, and the sealing portion 7 is spaced apart from the outer tube 3. Therefore, in the central portion of the arc tube 2 of the high pressure discharge lamp 1, the cooling medium can be sufficiently cooled to prevent breakage of the arc tube 2 caused by overheating. Further, since the sealing portion 7 of the arc tube 2 of the high-pressure discharge lamp 1 is weak in cooling, it is possible to surely prevent supercooling and prevent the illuminance caused by the mercury from evaporating from being lowered. -9- 200919528 The following shows an example of the configuration of the high-pressure discharge lamp 1, wherein the inner diameter of the central portion of the genius 2 is φ3_4 ηηη, and the outer diameter of the central portion of the arc tube 2 is φ 7.4 mm, and the sealing portion 7 The outer diameter is φ 6 mm, the total length of the arc tube 2 is 150 mm. The distance between the electrodes 4 is 100 mm, the length of the electrode 4 portion located in the discharge space 10 is 3 mm, and the sealing amount of mercury is 44 mg/mm 3 . The outer diameter of the outer tube 3 is φ 95 tnm, and the inner diameter of the outer tube 3 is Φ 7.4 mm. When the discharge lamp is turned on, the high-voltage discharge lamp 1 has a rated voltage of 2000 V ' rated current of 1.25 A and an input power of 2500 W. The stomach 3 is an enlarged cross-sectional view showing the central portion of the high pressure discharge lamp of the present invention. Fig. 3(a) is an enlarged cross-sectional view showing the high pressure discharge lamp 1 when it is cut perpendicular to the tube axis; Fig. 3(b) is a contact portion of the high pressure discharge lamp 1 when it is cut parallel to the tube axis. An enlarged sectional view of 1 7 . The high pressure discharge lamp 1 is because the gap 14 between the arc tube 2 and the outer tube 3 is very narrow, and the average is about 50 μm, even if the axis of the arc tube 2 and the outer tube 3 are aligned, the quartz glass has The dimensional error or the like 'also produces an area where the arc tube 2 is in contact with the outer tube 3. As shown in Fig. 3(a), the arc tube 2 is disposed at a lower side than the center of the outer tube 3, and the gap d' between the lower side of the arc tube 2 and the outer tube 3 is higher than that of the upper side of the arc tube 2. The gap D with the outer tube 3 is smaller. Since the outer surface 12 of the lower side of the arc tube 2 is shorter than the tube 3 cooled by the cooling medium, the cooling effect is higher than the outer surface 12 of the upper side of the arc tube 2. Therefore, the inner surface 11' of the arc tube 2 at the contact portion 17 where the outer surface 12 of the arc tube 2 is in contact with the inner surface 13 of the outer tube 3 has the highest cooling effect -10-200919528, and becomes the discharge space 1 〇. The coldest point. Conversely, the gap D between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 becomes the inner surface 11 of the arc tube 2 at the largest portion, and the cooling effect is the lowest, which becomes the discharge space 1 〇 The hottest hot spot. As shown in Fig. 3(b), the cross section cut along the tube axis direction of the high pressure discharge lamp 1 is formed on the inner surface 13 of the outer tube 3 so as to be periodically generated in the axial direction. Part 15. Specifically, it is formed on the inner surface 13 of the tube 3 outside the cylindrical shape, and the convex portion 15 is formed by a spiral projection line. The height h of the convex portion 15 is 10 to 200 μm' and the distance P between the adjacent convex portions 15 is 0.1 to 2 mm. Since the convex portion 15 is formed on the inner surface 13 of the outer tube 3, when the contact portion 17 is enlarged, the outer surface 12 of the arc tube 2 is in contact with the inner surface 13 of the outer tube 3 at the convex portion 15 However, in a portion other than the convex portion 15, a gap is formed between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3, and the air layer 16 is present. Even in the contact portion 17 where the gap d between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 becomes the smallest, the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 Also, the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 are in line contact or point contact at the convex portion 15 in contact with each other, and the contact portion and the air layer 16 are present. For example, as shown in Fig. 3(a), the gap D between the outer surface 12 of the upper side of the arc tube 2 and the inner surface 13 of the outer tube 3 is opposite to the outer surface 12 of the arc tube 2 The contact portion 17 of the inner surface 13 of the outer tube 3 is the largest. However, the interval between the outer surface 12 of the arc tube 2 of the contact portion 17 and the inner surface 13 of the outer tube 3 -11 - 200919528 has a height h of the convex portion 15, so that the gap 14 is the largest portion of the outer tube 2 The gap D between the surface 12 and the inner surface 13 of the outer tube 3 is also subtracted from the difference between the inner diameter R of the outer tube 3 and the outer diameter r of the arc tube 2 by the height h of the convex portion 15 Thus, ((Rr) - h) 0 as such, the gap d between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 becomes the smallest contact portion 127, since the gap d has a convex portion The height h of 15 is about 90, so that the gap D between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 2 is the largest, and no convex portion 1 is formed on the inner surface 13 of the outer tube 3. In the case of 5, the gap D can reduce the amount of the height h of a convex portion 15. The gap 14 which becomes the coldest point in the discharge space 1 为 is the smallest contact portion 17, since the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 are in line contact at the convex portion 15 or It is a point contact, so there is an air layer 16 between the outer tube 3, and the distance from the outer tube 3 cooled by the cooling medium is increased, so that the temperature of the coldest point is raised. Further, since the convex portion 15 is formed in a cylindrical shape, the inner surface 13 of the tube 3 is formed as a spiral projection line, so that the contact portion 17 is formed at any position on the inner surface 13 of the outer tube 3 The air layer 16 is necessarily present so that the outer surface 12 of the arc tube 2 does not come into close contact with the inner surface 13 of the outer tube 3. On the other hand, the gap D1 which is the highest temperature hot spot in the discharge space 10 is the largest portion D, and the distance from the outer tube 3 is slightly reduced, but there is a gap 1 between the outer tube 3 and the outer tube 3. Since the layer of air formed is 4, the temperature of the hottest hot spot has no change with respect to the presence or absence of the convex portion 15. Therefore, by forming the convex portion 15 on the inner surface 13 of the outer tube 3 at -12-200919528, the temperature difference between the coldest spot and the hottest hot spot can be reduced. Since the temperature of the coldest point in the discharge space 10 can be raised by forming the convex portion 15' by the inner surface 13 of the outer tube 3, the inner surface 11 of the light-emitting tube 2 can be maintained high even if the standby power is lowered. The temperature is such that the generation of the unvaporized state of the mercury enclosed in the arc tube 2 can be suppressed. Therefore, it is possible to realize the standby power which can lower the standby mode while being in the processing mode, and can start the high-pressure discharge lamp 1 which is turned on in a short time without interruption. Fig. 4 is an explanatory view for explaining a method of producing the high pressure discharge lamp of the present invention. The high pressure discharge lamp 1 can be manufactured in the following manner. First, the rod-shaped electrode 4 and the external lead 6 are electrically connected to both ends of the metal foil 5 to form two electrode 4 structures. Inside the cylindrical glass tube of the cylindrical shape, an appropriate amount of mercury or the like is sealed, and the electrode structure is inserted from both sides of the quartz glass tube, and both ends of the quartz glass tube are sealed by a shrink seal method. In this way, the light-emitting tube 2 having the enclosed object and the electrode 4 therein is formed. As shown in Fig. 4(a), carbon wires 30 having a diameter of 80 μm were wound into a spiral shape at intervals of 2 mm on the outer surface 12 of the arc tube 2. It is convenient to consider the illustration. On the drawing, the carbon line 30 will be enlarged to draw. On the other hand, a cylindrical quartz glass tube 3 1 having an inner diameter larger than the outer diameter of the arc tube 2 is prepared, and only one side is sealed. The light-emitting tube 2 around which the carbon wire 30 is wound is placed in the quartz glass tube 31, and the inner portion -13 - 200919528 of the quartz glass tube 31 is decompressed and rotated. The oxy-hydrogen torch is swept in the axial direction to heat from the outside of the quartz glass tube 31, and the quartz glass tube 31 is shrunk to form the outer tube 3. At this time, the outer tube 3 is shrunk until the gap 14 between the outer tube 3 and the arc tube 2 is narrower than the carbon line 30. As shown in Fig. 4(b), after the outer tube 3 is sufficiently collapsed, both ends of the outer tube 3 are cut to form a cylindrical tube shape having both ends open. Then, the high pressure discharge lamp 1 was placed in an electric furnace at 1 ° C under atmospheric pressure for 3 hours. The carbon wire 30 is burned by heating thereby. The carbon wire 30 existing in the gap 14 between the outer tube 3 and the light-emitting tube 2 disappears, and a convex portion 15 composed of a spiral projection line provided on the inner surface 13 of the outer tube 3 is formed. As shown in the figure, a plurality of convex portions 15 are periodically formed on the inner surface 13 of the outer tube 3 in the tube axis direction on the section cut along the tube axis of the high pressure discharge lamp 1. The convex portion 15 formed by the spiral projection line can be easily formed by processing the carbon wire 30 in this manner. Further, when the quartz glass tube 31 is collapsed to form the outer tube 3 as described above, since the carbon wire 30 also functions as a spacer, the interval between the outer tube 3 and the arc tube 2 can be made substantially constant. control. Therefore, the region where the arc tube 2 and the outer tube 3 are closely adjacent is not generated, the unevenness of the cooling can be eliminated, and the variation of the variation of the high pressure discharge lamp 1 can be suppressed. Next, a second embodiment of the present invention will be described. Fig. 5 is a view showing the outer surface 12 of the arc tube 2 and the outer surface of the outer tube 3 when the high pressure discharge lamp 1 is cut perpendicularly to the tube axis in the central portion of the high pressure discharge lamp 1 of the present invention. A partially enlarged cross-sectional view of the contact portion 17. In the high pressure discharge lamp 1 of the second embodiment, the inner surface of the outer tube 3 is 14-200919528, which is a smooth surface, and the outer surface 12 of the arc tube 2 has a polygonal cross section. The high pressure discharge lamp 1 is also composed of the same. In the second embodiment, the description of the same components as those of the high-voltage discharge lamp 1 of the first embodiment will be omitted. As shown in Fig. 5, in the cross section of the outer surface 12 of the arc tube 2 which is cut perpendicular to the tube axis direction of the high pressure discharge lamp 1, the outer circumference of the arc tube 2 is formed into a polygonal cross section so that The top portion is formed as a convex portion 18. Specifically, the outer surface 12 of the cylindrical arc tube 2 is formed so as to have a polygonal shape having a long axial length. The height h of the convex portion 18 having 10 to 60 corners is 10 to 200 μm, and the interval 相邻 between the adjacent convex portions 18 is 0.5 to 2 mm. The portion which becomes the convex portion 18 has the maximum thickness of the arc tube 2, and the outer surface 12 of the arc tube 2 is in contact with the inner surface 13 of the outer tube 3. In the portion other than the convex portion 16, the thickness of the arc tube 2 is thin, and an air layer 16 is formed between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3. The convex portion 18 of the outer surface 12 of the arc tube 2 in contact with the inner surface 13 of the outer tube 3 is shorter than the tube 3 cooled by the cooling medium, and the arc tube 2 is directly cooled by the outer tube 3. The inner surface 11 of the arc tube 2 located at the convex portion 18 has the highest cooling effect. On the other hand, the abutting portion 20 of the convex portion 18 forms an air layer 16 between the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3, and is separated from the tube 3 by the cooling medium. far. Since the arc tube 2 is indirectly cooled by the air layer 16, the cooling effect of the inner surface 11 of the arc tube 2 is weak. Therefore, the temperature of the inner surface 11 of the arc tube 2 located in the abutting portion 20 does not fall to the inner surface 13 of the -15-200919528 as the convex portion 18. Further, since the convex portion 18 is formed by forming the outer circumference of the arc tube 2 into a polygonal cross section, even if the contact portion 17 exists at any one of the inner surfaces 13 of the outer tube 3, the air layer 16 is inevitably present. The outer surface 12 of the arc tube 2 is not in intimate contact with the inner surface 13 of the outer tube 3. Even in the contact portion 17, the outer surface 12 of the arc tube 2 is in close contact with the inner surface 13 of the outer tube 3 but is not in surface contact, and the outer surface 12 of the arc tube 2 and the inner surface 13 of the outer tube 3 are at the convex portion 18 There is a line contact or a point contact that is in contact with the contact and the air layer 16 portion. The temperature of the inner surface 11 of the arc tube 2 located at the abutting portion 20 of the air layer 16 is higher than the temperature of the inner surface 11 of the arc tube 2 located at the convex portion 18, so that the light at the convex portion 18 can be warmed. The inner surface 11 of the tube 2 raises the temperature of the inner surface 11 of the light-emitting tube 2 which is the entirety of the contact portion 17. Therefore, the temperature of the inner surface 11 of the arc tube 2 located at the contact portion 17 which is the coldest point in the discharge space 1 可以 can be raised as compared with the case where the convex portion 18 is not formed on the outer surface 12 of the arc tube 2. . Since the temperature of the coldest point in the discharge space 1 可以 can be raised by forming the convex portion 18 ' on the outer surface 12 of the arc tube 2', the inner surface of the light-emitting tube 2 can be maintained even if the standby power is lowered. Since the temperature of 11 is suppressed, the generation of the unvaporized state of the mercury enclosed in the arc tube 2 can be suppressed. Therefore, it is possible to realize a standby electric power that can reduce the standby mode at the same time as in the processing mode, and can start the high-pressure discharge lamp 1° in a short time without interrupting the high-output lighting. Next, an embodiment will be described. -16-200919528 <Example 1> A high-pressure discharge lamp device ' used in the high-pressure discharge lamp shown in the first embodiment was produced as an experimental object. The specifications of the high pressure discharge lamp used as an experimental object are as follows. Light-emitting tube: made of quartz glass, the inner diameter of the center is φ8ιηπι, the outer diameter of the central part is Φ, the outer diameter of the sealing part is φ 6mm, and the length of the illumination is 晏1 0 0 mm. The outer tube is made of quartz glass. The diameter is φ 12.1 mm, and the outer diameter is φ 14.1 mm. ο The convex portion: the sound is 50 μm, and the interval between the tube axes is 2 mm. Electrode: Tungsten, the distance between the electrodes is 100 mm, and the length of the electrode portion located in the discharge space of 1 〇 is 3 mm. Enclosure: mercury 7.5 mg / cc, argon gas 100 Torr. Further, the convex portion was formed on the outer surface of the arc tube, and a carbon wire having a diameter of 80 μm was wound into a coil shape at intervals of 2 mm, and was formed by the above method. It lights up in the processing mode for 30 seconds and then lights up in standby mode for 30 seconds to illuminate the processing mode in interaction with the standby mode. In the processing mode, the input power of the high-pressure discharge lamp is illuminating in the manner of 3000 W (300 W/cm). In the standby mode, the input power of the high-pressure discharge lamp is illuminated in the manner of 2000 W (200 W/cm). In the cooling jacket, as a cooling medium, water is circulated at a flow rate of 5 L/min. In addition to the convex portion -17-200919528 formed on the inner surface of the outer tube, 'the high-pressure discharge lamp 1 having the same specifications as the experimental object was produced. The high-pressure discharge of the experimental object on which the convex portion was formed on the inner surface of the outer tube The temperature of the lamp 'located on the inner surface of the arc tube is 7 0 0 °c in the contact part during the processing mode. The maximum part of the gap is i 〇〇 (TC. Again, in standby mode, the contact portion is 5 40 °C, the maximum part of the gap is 8〇〇. (: The temperature of the inner surface of the light-emitting tube where the high-pressure discharge lamp of the comparison object does not form a convex portion on the inner surface of the outer tube, in the processing mode, in the contact portion It is 5 50 ° C, the largest part of the gap is 。 it. Also, in the standby mode, the contact part is 43 0 ° C, and the maximum part of the gap is 800. (:. on the inner surface of the outer tube Experimental object formed with a convex portion The temperature of the high-pressure discharge lamp 'becoming the contact point of the coldest point is higher than the high-pressure discharge lamp of the comparison object' in the processing mode by 150 volts, and higher than 1 1 〇t: in the standby mode. When the temperature in the discharge space is 4 〇〇 or less, the sealed mercury does not evaporate, and a delay in the start-up time when shifting from the standby mode to the processing mode occurs, or the discharge cannot be maintained and the discharge is interrupted. The results of the experiment 'know the high-pressure discharge lamp of the experimental object in which the convex portion is formed on the inner surface of the outer tube. The high-pressure discharge lamp is in the light, and the temperature of the contact portion when the temperature in the discharge vessel is the lowest standby mode is 540 ° C, 140 ° C higher than the coldest point temperature of 400 ° C. Thus, it can be predicted that the high pressure discharge lamp of the experimental object in which the convex portion is formed on the inner surface of the outer tube, even if the input power of the standby mode is When it is reduced to less than 200 W/cm, it is turned on under the condition of lowering the temperature of the contact portion in the standby mode, and no unvaporized portion of mercury is generated. -18- 200919528 <Experimental Example 2 > Experimental example 1 As a result of the experiment, it is predicted that a high-pressure discharge lamp of an experimental object having a convex portion is formed on the inner surface of the outer tube, and the input power of the standby mode is reduced to light up. The specification and experiment of the high-pressure discharge lamp used as an experimental object In the same manner as in Example 1. Further, the cooling conditions of the high pressure discharge lamp device were the same as in Experimental Example 1. Also, the lighting conditions of the high pressure discharge lamp were set as follows. In the processing mode, the lighting was turned on for 30 seconds, and then in the standby mode. Lights up for 3 〇 seconds to illuminate the processing mode in interaction with the standby mode. In the processing mode, the input power of the high-pressure discharge lamp is 3000W (300 W/cm). In the standby mode, the input power of the high-pressure discharge lamp is 1500W (150W/cm). That is, the lighting condition of the high-pressure discharge lamp was set to be the same as that of Experimental Example 1 except that the input power of the standby mode was lowered. The high-pressure discharge lamp ′ of the subject to which the convex portion was formed on the inner surface of the outer tube did not generate the unvaporized portion of the mercury even if the input power in the standby mode was set to 150 W/cm. Since no unvaporized portion of mercury is generated, moving from the standby mode to the processing mode still maintains a short starting time. Further, in the processing mode, the input power 値' irrelevant to the standby mode can be turned on with high input power. Therefore, since the unvaporized portion of the mercury is not generated even if the standby power of the standby mode is lowered, it is determined that the startup from the standby mode to the processing mode can be realized in a short time, and the high output lighting can be performed without interruption in the processing mode. High pressure discharge lamp. -19- 200919528 According to the result of the experimental example 1 'For a high-pressure discharge lamp having no convex portion formed on the inner surface of the outer tube, when the input electric power is 200 W/cm, the light is a contact portion of the coldest point in the discharge space. The inner surface temperature of the tube was 4 30 °C. If the input power 値 is less than this ,, the coldest spot temperature in the discharge space is lowered and mercury is not evaporated. That is, for the high pressure discharge lamp in which the convex portion is not formed on the inner surface of the outer tube, the minimum value of the input electric power in the standby mode is 200 W/cm. On the other hand, the high pressure discharge lamp of the experimental object in which the convex portion was formed on the inner surface of the outer tube as a result of Experimental Example 2 was determined to be capable of setting the input power of the standby mode to 150 W/cm. From this, it can be seen that the input power of the standby mode can be reduced to 75 % compared to the high-pressure discharge lamp of the prior art in which the convex portion is not formed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the configuration of a high pressure discharge lamp device of the present invention. Fig. 2 is a cross-sectional explanatory view showing the configuration of the high pressure discharge lamp of the present invention. Fig. 3 is an enlarged cross-sectional view showing the central portion of the high pressure discharge lamp of the present invention. Fig. 4 is an explanatory view for explaining a method of producing a high pressure discharge lamp of the present invention. Fig. 5 is an enlarged cross-sectional view showing a central portion of a high pressure discharge lamp of the present invention. -20- 200919528 Fig. 6 is an explanatory view showing a configuration of a conventional high pressure discharge lamp device. Fig. 7 is an explanatory diagram showing input power when a high pressure discharge lamp is used [Description of main components] 1 : High pressure discharge lamp 2: Light-emitting tube 3: Outer tube 4: Electrode 11: Inner surface of the light-emitting tube 1 2 : Light-emitting tube Outer surface 1 3 : inner surface of outer tube 1 4 : gap 1 5 : convex portion 1 6 : air layer 1 7 : contact portion 2 1 : cooling jacket D : maximum gap d : minimum gap h : height of the convex portion P: the spacing of the convex parts - 21