TW200914791A - Measuring device of 3-dimensional shape - Google Patents

Abstract

This invention provides a technique for performing a 3-dimensinal measuring and the measuring time is shortened. A light path forming section 5 receives wide-band light from a wide-band light source and divides the light to be incident onto a reference light path and a measure light path. The reflective light from a reference mirror and the reflective light from a measured object are combined and outputted to a photographing means 10. On the other hand, a light path variable means 8 changes the light path length of the measure light path. At a timing at which an aliasing is generated with respect to the change of the light path length, the photographing means photographs the output from the light path forming section, thereby obtaining the interference fringe data containing interference fringe. A light path detection means 20 removes, from the interference fringe data obtained by the photographing means, the frequency components generated by aliasing, and finds out a specified light path length that shows a characteristic value of the interference fringe.

Description

200914791 IX. Description of the Invention: [Technical Field] The present invention relates to an interference phenomenon using wide-band light (for example, white light) having a plurality of spectra (hereinafter, explained by wavelength) A three-dimensional shape measuring device that performs stereoscopic measurement of the shape of the object. In particular, it relates to shortening the production in a three-dimensional shape measuring device.

A technique for generating the time of the optical path length of the interference fringe, the three-dimensional shape measuring device is such that a portion of the broadband light is incident on the reference light path having the reference mirror at the distal end, and the other portion of the broadband light is incident on the distal end. The measuring light path of the object to be measured is a dry light path obtained by changing the optical path length of any one of the reference lights by using an interference portion (interferometer) towel from the reference mirror (mirror) and the object to be measured. Length 'to measure the shape of the object to be measured. When the following phenomena are used in the shape measuring device of the raft phenomenon, the interference will be double: the degree of Guangqing's light path or phase. New is to say that the "lower" hypothesis changes the length of the peach path of the reference light path (the length of the j path changes, so that 2 疋, and the position of the measuring light path: i grain shows the maximum brightness), this time The amount of interference 4 generated is hereinafter referred to as "specific optical path length production, and = length (the displacement of the object to be measured in the direction 4 of the optical path length and t) is the change in the optical path length." Patent Document 1 is based on In the change of the light path, the number of the light path is changed to 200914791, and the G component (the green band component (the blue band is a component) detects the relative:) and the rule component (red band). The change of the bit, and the phase of the three of the interference stripes of the length change shows that the optical path length of the largest "bit" is determined as the specific optical path length of the interference to determine the optical path length of the shape 2. According to the recognition ==曰4 Patent's special wish 2. °6·Volume 2 to measure a large number of objects to be measured 3 可变The time of the optical path length (or speed) camera shooting time and number of shots, etc., but the camera's shooting components solid The restriction of the minimum exposure time., Riley 2: From the point of view of the test, the existing technology is examined. In the case of special, It is based on the data of the interference light to specify the well = turn out = the length of the optical path, and at this time Interference: The class of 匕 匕 转换 转换 转换 转换 转换 转换 转换 转换 转换 转换 FFT FFT ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( The components are separated into bands, and the stripe of each solution component is obtained again in the _ region, and the phase coincidence point is obtained. At this time, in order to reproduce the interference fringe from the acquired digital poor material, it is usually necessary to acquire at least 3 points per μ period of the interference fringe to be reproduced according to the sampling theorem or the like (the repeated acquisition timing of the data) In the form of digital data, generally, the interference fringe 200914791 measured by the interferometry method in the shape measuring device is schematically represented by the digital data of the length of the road as shown in Fig. 7; ^ relative to the changed light (8) The spectrum distribution of the coordinates 1 shown in the frequency versus amplitude is shown in Fig. 7: (4) The envelope width of the interference fringes;::: It is known that the brightness value of the f peak is 1/2 at the time of the handle 1/2 (:, for example, half value Width: The frequency bandwidth of the rate Μ (for example, the half-value width: the width of the horizontal axis of the waveform of Figure 7 W) has a correlation. Therefore, when the amplitude of the peak becomes Μ, the bandwidth of the frequency bandwidth as shown in Fig. 7 (8) can be obtained. The Δb band has *nr of A Fc and the following condition from the "card', so that the 条件 condition is obtained in the lower part. That is, it can be obtained that P does not become close to 0. The stream component is from the sampling theorem. As long as the sampling frequency Fs^Y is included in the pattern Relating the original interference fringes with the =4=:(:)* rate Fs decreases, which will produce a mixture, but the sampling frequency is as shown in Fig. 7(C) 2 (_g). Phenomenon wire, the surface rate component (solid line part) and the mixed foldback frequency component (dashed line part) are the same as the frequency of reproduction S 匕 frequency, and are connected to each other as shown in Fig. 7 (D) 7 (E) does not become a state of high and low changes. 7 ^This 'The present inventors focused on the following situation. That is, as shown in Fig. 7 (8), because of the band characteristics of the interference fringes themselves, there is his time ^ Therefore, by selecting the sampling frequency Fs, as shown in Fig. 7(E), the required frequency component and the folded-back frequency component are separated in frequency. Therefore, 'as shown in Fig. 7(F), 遽The waver is used to remove the foldback 200914791, and the sampling frequency is further reduced in frequency, and the low is correspondingly elongated, so that the reproduction of the rich axis and the U can be performed. Even if the ratio is satisfied, the frequency of the interference fringe can be obtained, and the sampling frequency (4) The reduction of the phase and the reduction of the knife ° also said that 'eyes are measured now _ shortened the ground The number of data acquisitions, and thus the content of the invention. The present invention provides a technical object for shortening the measurement time and performing three-dimensional measurement. It is necessary to examine the relationship of the envelope width of the interference fringe two === wide, = about i The envelope of the center wavelength of the source of the human interference fringe envelope It! The original source of interference.

The frequency bandwidth ΔΡ of the light source. , 帛: At, as mentioned above, depends on the broadband, biliary. Usually, because AF is satisfied

C Available: Three or two ί:: ί: The invention described in the first item is that the branch is incident on the mirror: :=) 'The broadband light is made first, and the ash is removed = the optical path And the reflected light of the measured object is configured to reflect the measured object and the reflected light from the irradiated body; the reflecting surfaces of the long path of the optical path are combined with the wave and then the J 1 mechanism (8) And causing the optical path length change variable mechanism of the reference optical path or the 200914791 measuring optical path to cause a shifting, 序 > ' ^ to obtain interference fringes from the optical path forming portion The interference fringe is determined by the structure (14), and the interference fringe = 2 optical path length is obtained according to the output from the camera 3 =: two-striped bellows'. The length of the optical path is used to measure the shape of the object to be measured, and the spectroscopic stripe included in the rounding of the component of the photographing mechanism is separated, and the interference fringe contained in the rounding of the component is separated into a desired knife and The timing of the frequency components due to the aliasing phenomenon, = sheep into (14 = description = length check The mechanism includes the interference fringe data selection unit data, and the new interference fringe data generated by the interference fringe ff is divided, and the display = c) is obtained, and the specific optical path length is described based on the description. The invention of the patent of the characteristic value of the pattern ====: is configured such that the application unit selects the number of sample data from the photographing mechanism to select the timing of the pattern data to be based on the surface of the sampling area. For the change of 200914791, the component of the new interference fring material in the frequency region is selected. Chen's new interference fringe data of the new interference fringe region of the frequency region is subjected to the inverse two-zone data, and is obtained according to the == of the characteristic value at that time, and the coffee maker patent === The composition of == Ming is the seed produced in the application, and the so-called (four) scale is generated relative to the variable surface of the length of the road by the variable length machine. When the wavelength of the large fiscal center of Gu Shukuan is set to λ, the photochemicalization caused by the optical path length variable mechanism exceeds the interval of λ/6. The invention described in claim 4, wherein the photographing mechanism performs photographing with an inherent minimum exposure time, and the optical path length is used in the invention described in claim 1 or 2 When the variable mechanism sets the speed at which the optical path length changes to ν, the time interval in which the change in the optical path length exceeds λ/(6 ν) is taken as the timing. The invention according to claim 5, wherein the optical path length detecting means includes a wavelength selecting unit (14d) for selecting from the interference fringe data. Extracting at least two wavelengths into the new interference fringe data selected by the Ministry

U 200914791 f The optical path length calculating unit obtains the optical path length in which the phase difference of the extracted at least * wavelength components is substantially zero as the specific optical path length. [Effect of the Invention] According to the present invention, the interference fringe data is acquired (sampled) at the timing at which the aliasing phenomenon occurs, and the unnecessary frequency components generated by the aliasing phenomenon are removed and displaced, thereby generating The way of aliasing prolongs the period of data acquisition timing, that is, 'reduces the number of data acquisitions, and can reduce the corresponding optical processing time, thus shortening the measurement time. That is, = is the main measurement time, and if the [optical path length variable time + data acquisition times 曝光 (exposure time + acquisition between materials)] is used, the measurement time can be shortened in accordance with the decrease in the number of acquisitions. m. The above and other objects, features, and merits are more obvious. If the preferred embodiment is used, the details are as follows. [Embodiment] Embodiments of the present invention will be described using the drawings. Fig. 丨 is a diagram showing the functional configuration of the first embodiment. 2 is a diagram for explaining the second known method after the interference: the pattern is changed by the optical path length detecting means of Fig. 1. 4(A), 4(B), 4(;c:), and FIG. 4 are used to explain the interference fringe data selection unit of FIG. 3. FIG. 6 is a view for explaining that the optical path length of FIG. 3 is variable. Figure 5 shows the interference fringes of the respective frequency components, and Figure 6 shows the phase characteristics. Figure 7 (A), Figure 7 (B), Figure 7 (c), Figure 12 200914791 7 (D), Figure 7 (E), Figure 7, the method of removing the aliasing phenomenon K 卩 is illustrated in the implementation of Figure 1 Figure. Further, Fig. 7 (4) and _ and Fig. 7 (7) are diagrams for explaining the background of "back", Fig. 7 (9), and clarification. '7. The overall configuration of the first embodiment of the present invention in the first stop of the technology. As described above, the timing of the late processing of the Jth embodiment is that the timing of the second generation is equal to the _ score of the sampling _. In the same manner, the interference fringe obtained by the timing of the mixing is removed, and the light generated by the peak of the intensity of the sampling interference fringe is removed, and the extraction γ is changed until the interference fringe is generated until the “optical path I” is generated as the specific optical path. Length (displacement) and change in the length of the leading path

U In the following description, when the optical path is measured, the optical path length at which the interference fringes are generated (the change C of the optical path length at the time of == 2) is referred to as 'long and /, and indicates the displacement of the shape of the object to be measured. In the case of the eve η, the light source 1 uses a white light source having light having a wide wavelength band and a wavelength of coherence ((7) hereney). The collimator lens 2 will be white from the light source ^, (Broadband f light) condensed and sent to the beam splitter (beam print 1) 3. The beam splitter 3 converts the direction of the white light and sends it to the objective lens 4. The objective lens 4 makes the white light into parallel light and then sends it to the beam splitter 5 (Light path forming portion). Beam splitter 5 13 200914791 The white light received from the objective lens 4 is branched in two directions, wherein = the amount of the wire is sent to the object to be measured 7 (the light path from the beam splitter 5 to the object to be measured is used as the measuring beam path) ), the other is ''from the first mirror 5 to the reference mirror 6 first: for the reference between the beam splitter 5 and the reference mirror 6 is fixed, that is, the optical path length of the optical path is set to Certain fixed long-term production. Even the sun can use a semi-transparent mirror (half Instead of the spectroscope 5, the light _ wire is measured, the _ self-color ray is measured, and the desired irradiation range on the surface is desired to be measured 1. The object to be measured 7 is mounted as a variable length mechanism. 8. The piezoelectric portion 8 is composed of a piezoelectric element, and the f-construction from the aperture 16 16 : : : : : : 使 使 使 使 使 使 使 使 使 使 使 使 使 使 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( In the direction of the x-axis (the upper and lower sides of the paper surface of Fig. 1 = the optical path == two, the measurement light - square = outer: (four)" is used as the optical path length of the present invention.

St = continuous variable ' and the variable speed is fixed, so that the data acquisition timing of the camera or the like described later can be changed in a small step shape. Under the control of the optical path control mechanism 16, the measurement variable mechanism is made. In addition, in this case, the optical path length of the measurement optical path is changed by the reference optical path, and the interference fringe is generated in 200914791, and the optical path length of the piezoelectric element may be changed. The reference beam path is reflected from the reference mirror 6 and the object to be measured 7, respectively, and is sometimes referred to as "return light," by eight #铲5, 隹> people/巴九1 The action of 9 is the lower parallel field private imaging lens. At this time, the time interval when the system length of the optical path is changed (four) under the instruction from the optical path length control mechanism 16 is taken, and the camera 10 takes a picture of the return light. Γ Interference fringes (actually, the shooting is only for returning light: the dry U contains the returning t interference fringes that appear when the photographic material is subsequently displayed, so it is expressed as "shooting interference fringes,"). The interference fringes of = J are stored in the memory 13. The configuration of the if road and the white light simultaneously illuminate the object to be measured 7 so that the image is taken from the range of the illumination range, that is, from the phase I, the target Μ 里 in the 丨丨 里, and the Μ Μ 丄Set the interference fringes corresponding to the return light (hereinafter referred to as "measurement position, '). Set the second: f The deformation of the optical system of Figure 1 can also constitute the following two; The reference light path is respectively arranged in the light of the picture: = the position on the !', so the present invention is not limited to the phase. However, the following description will be made with reference to Fig. 1. The shooting timing of the camera 10 and the data feeding order of the memory Yin, In the meantime, the optical path length control mechanism gives a variable indication of the optical path length to the piezoelectric portion 8 at a predetermined speed, and generates a timing signal of a predetermined time interval and transmits it to the camera 1 . And the memory u, the data is acquired at this timing. That is, 'the camera 1 〇 and the memory 13 are at the timing of the timing signal, and the photographed data of the light is returned (becomes the brightness indicating the return light)

L = the repetition period of the center m of the interferometric limb of the broadband light. Obtaining the waveform of the λ/2 period and preventing the generation of the aliasing phenomenon, usually in the period of gold;:; 枓 'so must be in the invention earlier than the heart 3), because it is generating The mixed_most late_interval control signal transmission structure 16 will be compared to 13, and the data is acquired at the timing of the control money. ^ f ω and memory In the case where the ink-electric portion 8 is subjected to a money drive (four) length (four) mechanism 16 _ early time interval timing signal, a variable indication of the ratio length is generated. (4) - Part 8 emits an optical path, and memory 13 dreams of the timing

Uddress) and stored the shooting data. These u ^, as the address address direction) indicate the optical path length direction (z ^ square, the traveling direction (ie, the axial direction). At this time, the r ύ 200914791 ^ (Xn;,; P iX;; IP) ° should (4) Square U: An example of the interference fringe obtained by the processing of (4) stored in the device, by the processing of the machine = 13. The machine mechanism 20 computer has a path length detecting mechanism called the displacement operation. In Fig. 1, the optical path length detecting means 14 is composed of a dry chrome removing portion W and an optical path length calculating portion 14c. The material of the = (fine, outer) material is selected, and the amount is changed to the data of the frequency region. As shown in Fig. 7 (Ε^,), the frequency component due to the aliasing phenomenon (Fig. 7 (E() exists = interference fringe _ rate cost: separation, the aliasing phenomenon is generated and the f interference fringe is taken The component (Fig. 7 (8), the solid line part = and the separation frequency data selection unit w makes the data of the interference fringe at the time of the frequency ============================================================ ... (Fig. 2 is 17 200914791 In addition, in the waveform of the interference fringe of Fig. 2, the approximate value of the interference of the characteristic values The length of the optical path of the peak position of the central wave and the length of the optical path of the measuring optical path become the same. The wavelength of the interference fringe is determined by the width of the interference fringe: the wavelength of each wavelength σ is 'this wavelength is the approximate frequency of these bands. 1/2 of ^. Moreover, the extension of the interference fringes of white light of Fig. 2 to the optical path length = direction, that is, the envelope width of the interference fringes ^ ^ the degree of coherence of the color light (coherent (c〇h ce) length The width of the frequency component of the white region AF. The lower the coherence (the longer the phase tfA), that is, the larger the ^, the narrower the width ^ (see Fig. 7 (Β)). If the frequency component of the interference fringe is The highest frequency is set to Fh, and the width AF of the frequency component satisfies (λ/2)] < Fh, and if the width AF is made small (to make the coherence good (to make the coherence length shorter)), the interference fringe Since the vibration is fixed and the peak disappears, the width is determined so that the width Δ of the interference fringe can be grasped to the extent that the peak of the interference fringe can be grasped. For example, the following description will be schematically made, so that the width AF is lower than the maximum frequency Fh/ The square wire of 2 determines the frequency bandwidth of the light source 1, and the figure 7 (E) shows that the right half of the band region after the impurity is divided into the real frequency component of the interference fringe and the left half is divided into the frequency component (folding, frequency component) generated by the aliasing phenomenon, and can be Fh/2 is set to the high pass fnter of the cut frequency, and only the real frequency component of the interference fringe is extracted. That is, 'the frequency component which excludes the unnecessary component, that is, the folded component, is obtained. 18 200914791 Component 3 And 14 checks that the frequency generated by the aliasing phenomenon has been replaced by the real frequency component of the second and second nights, and the degree of rotation = Γ: determines the position of the light = color (or * peak Position "), refers to "two =: bright f set (vibration:) (four) maximum (hereinafter, called the dry y 07 phase of the god position, in Figure 2, broadcast 铋 3, +. .B, true stop f ( 2#" : ^ 1 W The length of the light path can be __ The time axis direction when the time is taken; ^The camera 1G is used to store the data stored in the η. Bell sequence (sampling timing) and stored. (Figure 2 is a graph of continuous performance), so the optical path has =: material interference: capital: = receiving and interference bar: sometimes amplitude The maximum point and the wave of the envelope; the == = sex', so the peak position of the envelope can also be found from the amplitude of the front and back amplitudes. For example, as a method of obtaining a peak of an interference fringe as a photographing material, there is a case where the length of the I path is changed stepwise, and the scattered photographing data corresponding to each of the lengths is used to perform the dipping stone, New = Li 2 uses the digital high-pass volute to remove the DC component from the secondary material obtained from the photographed data. The beijing plant that will become the AC component will be rectified. The repeating component after the rectification of tb is reduced by the digital low-pass filter through which the weight component of 200914791 is passed, and the envelope data of the interference fringe is calculated. That is, normal envelope detection is performed. At this time, according to the request for the fineness of the peak position, interpolation is performed between the rectified repetitions, for example, by the square characteristic, and the interpolated repetitive components are integrated to obtain the envelope data. In addition to the position 4 of the peak of the envelope data, the signal processing means 2G described in the Japanese Patent Laid-Open Publication No. Hei 9-318329 can also determine the wave position by the discrete processing regardless of the timing of the captured data (time). Interval) and the period of the interference fringes such as Ke. The bit, the arithmetic unit I5 determines the wavelength ti according to the measurement position (Xm, γρ) of FIG. 2 and the reference measurement position (xs, the difference ts-U between the 疋 wavelengths tS) obtained in the same manner. The measurement range of the shape of the object to be measured, which is the value of the measured value of the reference measurement position, is the degree of the light path length of the material position of each of the remaining points, that is, the light path length of the material position of each of the remaining lengths [second embodiment]

3, FIG. 4 (A), garden 4, (D), 4 (E) and nf (), FIG. 4 (C), FIG. 4 I) and FIG. 5 (1) 4 ra, Fig. 4 (8), Fig. 4 (C), Fig. 4 (9), 4'p Fig. 4 (4) Fig. 4). Figure Θ (E) Ϊ Ϊ Γ Γ Γ Γ Γ = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = The camera 10 becomes a color camera. Therefore, the light source 1 in Fig. 1 is a light source containing a component of a wavelength band of at least two waves in a plurality of wavelength components in a wide frequency band. Here, for example, a light source having a wavelength band of red and green colors is used. It is also possible to combine and use light of wavelengths of red and green. Other configurations, operations, timings, and the like other than the signal processing unit 20a are the same as those in Fig. i. Hereinafter, the signal processing unit 20a will be described.

In FIG. 3, the interference fringe data selecting unit 14e is basically the same as the interference fringe lean selecting unit 14a of the drawing. However, since the interference fringe data selecting unit 14e is also one of the main components of the present invention, FIG. 4 is used. (A), Fig. 4 (B), Fig. 4 (C), Fig. 4 (D), and Fig. 4 (E) will be described. The interference fringe data selection unit 14e is a sampling timing (the period_time longer than λ/6) of the camera 1 or the memory 13 as described above = the time of the aliasing, so the time from the counter 13 is obtained. Regional data

The FFT is converted into a frequency region #料, the job is removed due to the aliasing phenomenon, the blade acquires the frequency component of the dry/step stripe, and is sent to the wavelength selection funnel by the second fringe material selection section...filtering' Wave 11, to select and retain the ^^(4) in the first - middle color, to remove the unnecessary components of (9)^. Then, Fig. 4 m (the right half of the knife shown in the gray area of Fig. 4 (E)) is sent to the wavelength selecting portion 14d. 200914791 ^ Use circle 4 for a full explanation of the principle. The interference fringes of the long component are obtained from the sequence T0 (times earlier than the λ/6ν) into the ::. Figure 4 (8) is converted into Figure 4 (4) = f material. Moreover, at this time, the left half = is used by the chopper to be utilized. As shown in the present invention, for example, such as Bellow and T. At the half of the heart and in the case of the aliasing phenomenon, the left and right distributions appear in Fig. 4(4) instead of Fig. 4(4). The left and right sides of Fig. 4(d) appear: the interference fringes of the original two The composition appears in Figure 4 4 (8) _ rate axis compared to the bit ^ and 'the frequency axis of Figure 4 (D) and the figure, the sampling frequency is - half. Since the υ 卞 waveform is the same, as long as the scale is changed by using the == :, you can come to the phase: (8) The solution to the age of the left half (four). . Figure 4 below shows the timing relationship. The sampling timing based on the sampling theorem is the same as the timing of the sampling timing το2 = 2 times in the target machine. (Fig. 4(c) When the interference fringe data is converted by the FTT processing, if the time zone is sampled into the region data based on the sampling theorem, and the number of sample data of π jin is set to η 22 200914791, then m =n/x, and the scale on the frequency number axis is correspondingly reduced. That is, it is expressed in the form of frequency division as described above. Therefore, the interference fringe data selecting portion 14e changes the scale of the frequency axis of Fig. 4 (9), and as shown in the figure 4 (8) When the frequency axis (same as ® 4 (B)) is used for the processing based on the sampling theorem, the number of sample data processed during FFT processing is set to m ', except for (η) ) /χ

Supplementation (padding) processing is performed using data having a value of G. = The frequency region of the blank n-m is reduced by the number of sample data and is filled with 〇. In addition, theoretically, since the frequency axis ratio is small, the number of sample data can be changed without changing the scale of the sample, and the scale on the axis can be read as a parent multiple. Further, from the embodiment of the attached data number and the fresh axis, even in the embodiment of Fig. 3, the long selection portion 14d receives the data from the interference fringe data selection portion == the god region' and uses the chopper And the frequency of eight: 1 phase, 成分, composition, green (6) component, red (8) into + narration, each of which is divided into Wei to the light path long calculation unit (4). iiLt f Θ, in the interference fringe data of the time zone obtained by the inverse quadrature conversion of each component, the B phase meter] ° fl, the G phase calculating unit 14f2, and the R phase calculating unit mail m eight bundles = the component to be matched Phase change (for example, by orthogonal solution ^ to find each phase change (vertical axis). Moreover, as shown in Figure U, axis), the mechanism 14f4 Jiang Jiao, +, - you 〇, \ τ 'light path length determines Institutions _ will be the two ingredients of her - the length of the road is determined to be 23 200914791

At this time, since the data is discrete, in the case of the two-way length, as in the above configuration, the signal processing means 20, 20a control means 16 can be constituted by the central processing H (Centrai pro CPU) and the memory. , 20a and optical path length il processing unit 5 As described above, since the data can be acquired at the timing of the aliasing phenomenon, the number of times of data acquisition can be reduced. Therefore, as the main

'(4) Quantity time' If it is expressed by [Light path length variable time + data acquisition time X (exposure time + acquisition processing time)], the measurement time can be shortened in accordance with the decrease in the number of times the data is acquired. While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS U FIG. 1 is a view showing a functional configuration of a first embodiment. FIG. 2 is a view for explaining interference fringes. Fig. 3 is a view showing a second embodiment after the optical path length detecting mechanism of Fig. 1 is changed. 4(A), 4(B), 4(C), 4(D), and 4(E) are views for explaining the operation of the interference fringe data selecting unit of Fig. 3. Fig. 5 is a view for explaining the operation of the optical path length determining means of Fig. 3, showing interference fringes of respective frequency components. 24 200914791 The circle 6 is for explaining the operation of the optical path length determining means of Fig. 3, and the phase characteristic of each frequency component is shown. 7(A), 7(β), 7(C), 7(D), 7(E), and 7(7) are for explaining the influence of the image in the first embodiment. "Stripe action" (4), Fig. 7W, Fig. 7 (〇, Fig. 7(D) Fig. 7 = is used to describe the background of the invention in the background art, [the main component symbol description] 1 light source. 2 Straight lens 3 Beam splitter 4 Objective lens 5 Beam splitter 6 Reference mirror 7 Object to be measured 8 Piezoelectric part 9 Imaging lens 1 〇 Camera 13 Memory 14 Lin length detecting mechanism 14a, 14e Interference fringe ___ 14c Optical path length calculation 14d Wavelength selection section 25 200914791 14, 14f 14fl 14f2 14flm 14f4 15 16 18 20, 20a Optical path length calculation unit B Phase calculation unit G Phase calculation unit R Phase calculation unit Optical path length determination mechanism Displacement calculation mechanism Optical path length control mechanism User interface signal processing mechanism 26

Claims (1)

200914791 X. Patent application scope: 1. A two-dimensional shape measuring device, comprising: a broadband light source (1), and a multi-spectral flash band light; a system forming portion (5), causing the light, the A person shoots a reference optical path having a reference mirror and a measuring optical path configured with the object and combines the reflected light from the reference mirror with the riding target _ from the illuminated object to be combined The length of the long-range structure (1), the reference to the light or the measurement of the optical path of any of the (four) paths changes; photographing, (10) 'the change of the Qiu stain caused by the variable length of the optical path length 'Extracting the output from the optical path formation ί at a predetermined sampling timing' from the transfer including the dry rotation _ interference fringe and the optical path length detecting means (14) 'based on the information from the photographing mechanism' The length of the interference fringe of the .1, the optical path, the three-dimensional shape measuring device measures the shape of the object to be measured according to the length of the path to be measured, and the three-dimensional shape measuring device is characterized in that L is light (four) silk secret ,is true The interference fringes contained in it are aliased. (4) The frequency region can be separated into the desired real frequency forming knives and the timing of the frequency components due to the overlapping phenomenon. Further, the (14) reporting mechanism has: interference The data of the stripe data selection rate area, == the uselessness of the generated 4, (4) the new 27 200914791 interference fringe data generated by the actual age, and the interference fringes of the optical path length, and the county outlets ^ 'Specific optical path length according to the description. The sigma of the characteristic value of the dry streak is as follows: (4) The apparatus of the first rhyme of the first rhyme, wherein the interference fringe data selection unit advances from the sample of the photographed leaf: The leaf is converted, so that the data in the frequency region of the lamp is converted, and the non-dimensional component generated by the Qiandui County is obtained in the region, so as to obtain new interference fringe data of the frequency region, and the optical path length portion Converting the sampled data of the new interference fringe in the frequency region to the sample data number based on the sampling theorem, and then performing inverse Fourier transform on the new interference fringe data of the frequency domain to convert into a time region The envelope data of the new interference fringes, and the specific optical path length showing the characteristic value of the interference fringe is obtained from the new interference fringe data of the time region. 3. The three-dimensional shape measuring apparatus according to claim 1, wherein the timing of the aliasing phenomenon with respect to a change in the optical path length caused by the optical path length variable mechanism means When the substantially centroid wavelength of the wide light is set to a person, the change in the optical path length caused by the optical path length variable mechanism exceeds the interval of λ/6. 4. The three-dimensional shape measuring apparatus according to claim 1 or 2, wherein the photographing mechanism of 28 200914791 uses the optical path length variable mechanism to make the optical path length: (2) In the case of V, the change in the optical path length exceeds the λ/interval as the timing. The time interval of ~, the three-dimensional shape measuring device according to claim 1 or 2, the optical path length detecting mechanism having a wavelength selecting portion (14d), Extracting at least two wavelength components from the new interference fringe data selected by the interference fringe data selection unit, wherein the optical path length gauge is different according to the time zone of at least two wavelength components of the tidying The interference fringe data is obtained by using the optical path length in which the phase difference is substantially zero as the specific optical path length.