TW200914783A - Heat processing furnace and vertical-type heat processing appartus - Google Patents

Abstract

There is provided a heat processing furnace capable of quickly increasing and decreasing a temperature, while achieving improvement in durability. A heat processing furnace 2 comprises: a processing vessel 3 for accommodating an object to be processed w and performing thereto a heat process; and a cylindrical heater 5 disposed to surround an outer circumference of the processing vessel 3, for heating the object to be processed w. The heater 5 includes a cylindrical heat insulating member 16, and heating resistors 18 arranged along an inner circumferential surface of the heat insulating member 16. Each of the heating resistors 18 is formed of a strip-shaped member that is bent into a waveform having peak portions and trough portions. Pin members 20 are arranged in the heat insulating member 16 at suitable intervals therebetween, the pin members 20 holding the heating resistor 18 such that the heating resistor 18 is movable in a radial direction of the heater.

Description

200914783 IX. Description of the Invention: [Technical Field] The present invention relates to a heat treatment furnace and a vertical heat treatment apparatus including the same. This application is based on and claims the Japanese Patent Application No. 2〇〇7_72477 filed on March 2, 2007, and the Japanese patent application filed on February 5, 2005. 8_25 η 〗 〖Priority, #益' The entire contents of these applications are hereby incorporated by reference. [Prior Art] C: In the manufacture of a semiconductor device, various heat treatment devices are used to subject a semiconductor wafer (the system to be processed) to a number of processes, such as oxidation, diffusion, and CVD (chemical vapor phase). The deposition process comprises: a heat treatment furnace, which is composed of the following devices, and has a treatment capacity: (reaction tube) capable of accommodating a semi-conducting heat treatment ... plus a "semiconductor wafer processing container" Covering the place. ΓΓΓ is used to heat the wafer in the processing container. 〇 A heating member is disposed in the crucible insulating structure H by a supporting member, which is on the inner circumferential surface of the s-edge member. A spiral heating element along the cylindrical thermal insulation structure (also referred to as a surface arrangement) in the heat treatment apparatus capable of performing a batch process as a teaching reed and 51 Zn VL 4 η ^ The heating element can be used to twist the inside of the furnace...~Thermal resistor"). The chest I can use the member formed by returning the thermal insulating material back to the column shape as the heat insulating member ρ is: Light and heat Thermal form damage..., insulating members can be used to enhance heating efficiency. I2909l.doc 200914783 For example, a ceramic component can be used as a supporting member. The ceramic supporting member can support the heating element at a predetermined interval while allowing heating. Thermal expansion and heat shrinkage of components. In the above-mentioned hot furnace, in order to make the force σ number; # μ & , , , , 70 pieces can be thermally expanded and heat-shrinked, and the force of the screw is turned on/off. Supporting to define a gap between the heating element and the thermally insulating member. However, since the heating element is used at high temperatures, the heating element suffers from creep strain and its length slowly increases with time. In addition, the heating element is During the heating operation, it will thermally expand. On the other hand, there is a device for rapidly cooling the heating element by lowering the air and heating the workpiece to lower the temperature. The heating element may occur due to the temperature rising and falling repeatedly. Deformation. The deformation can cause a short circuit between the adjacent parts of the deformed heating element and this can cause disconnection. Especially in the - vertical heat treatment furnace, heating The piece moves in the branch member due to the thermal expansion and heat shrinkage caused by the increase and decrease in temperature, and the heating element moves slightly downward due to the gravity of the earth. Then, the amount of movement is accumulated at the lowest circle of the heating element. That is, due to the accumulation of the movement of the heating element, the winding diameter of the lower ring is increased. When the twisting element of the increased winding diameter reaches the inner surface of the heat insulating member and is unlikely to expand outward, the heating 兀 is upward and Deformation in the downward direction. Therefore, there is a possibility that a short circuit occurs between the heating element...and another part of the part, resulting in a certain disconnection. To solve these problems, the following structure has been proposed. This accumulation due to creep and thermal expansion or the like occurs on the side of the elongated heating piece, and the rod-shaped fixing member is attached to the outside of one of the elements by the welding I2909I.doc 200914783 by welding Partially, and the end of the fixing member is fixed in a heat insulating member by being buried] so that the fixing member is in the radial direction of the furnace

V — 1—» | Outer extension of the mouth J (see Patent Document 1).

[Patent Document 1] JP10-233277A

L Patent Document 2] JP2005-197074A However, in the above structure in which the fixing member is connected only to the outer side portion of the heating member by welding, the joined portion is exposed to a high temperature. In addition, it is considered that when the heating resistor is thermally expanded or thermally shrunk, 'stress tends to concentrate on the connected portion, which causes deterioration of durability of the heating element (life reduction is further, since the fixing member has a rod-like (four), the fixing member The self-heating insulating member can be easily detached, whereby the fixing member is difficult to maintain the holding force. ° & In addition, when it is required to rapidly increase or decrease the temperature of the wafer, it is necessary to feed a heating element during the rapid temperature increasing operation. Applying high power' However, it is impossible for a conventional heating element to withstand open. The heart load can be easily broken and it is impossible to apply this - high power, and thus the operation is limited. Although the cost of using the financial disconnection This is difficult. Therefore, the heating element is expensive and at the same time, the surface area of the heating element is increased by reducing the durability of the heating element by reducing the load applied to the twisting element. The component ^ area) is relative to the supplied power (when the surface area of the component is increased, it is added). This is because when heating the small heating element The load is reduced by 'the surface temperature' to thereby reduce the so-called spiral heating element, which can be efficiently placed in a required space, so this design can be used to reduce the load. However, as shown in the figure As shown in Fig. 14, for example, a heating or heat treatment furnace using a spiral heating element is conventionally employed in which a heating element 18 is buried in a heat insulating member 16 to fix the heating element 18 therein. Therefore, an article to be heated in a reactor core is heated via the heat insulating member 16, so that the temperature of the article is difficult to increase rapidly. The temperature of the article is also difficult to be rapidly lowered due to the heat insulating member 16 In addition to the resulting thermal capacity increase effect, the heating element 18 is also cooled via the thermal insulation member 16.

Furthermore, since there is no gap that allows the heating element 18 to expand, the heating element 18 itself is subjected to stress when it expands. Therefore, the durability of the heating element may be insufficient. It is known that a heating element is manufactured by forming a strip-shaped heating resistor member into a waveform (Patent Document 2). Similar to the spiral heating element, although this type of heating S piece can have an increased surface area, it has the disadvantage of (4) in terms of its mounting in the cylindrical insulating member. SUMMARY OF THE INVENTION The present invention has been made under the above circumstances. SUMMARY OF THE INVENTION The object of the present invention is to provide a heat treatment furnace capable of increasing and decreasing the temperature and a vertical heat treatment, and achieving both durability improvement and cost reduction. The invention relates to a heat treatment furnace, which comprises: a processing container, a valley, an inner-to-be-processed object and an object to be processed; a cylindrical heater' which surrounds the processing: a wide-part, and along the Two structures: Γ — 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 圆柱形 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129 129曲成一 has a suitable interval between the peaks 欲3 wants to &; 斗 斗 斗 斗 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上 上To the side of the heat treatment furnace, each of the lock members is formed as a pair having a pair for supporting the twisted electric power to become a dedicated leg portion from the inner side through the heat insulating member; The heat insulating member is externally mounted to the outer side to be bent on the outer side to lock the ruler on the outer circumferential surface of the heat insulating member. The present invention is the heat treatment furnace in which a plurality of circumferential continuous groove segments are formed perpendicularly between the appropriate intervals 15 and the inner circumferential surface of the insulating member, and the entire area of the heating resistors In the present invention, the heat treatment furnace is characterized in that a plurality of forced cooling air blowing holes are circumferentially formed in the heat insulating member at appropriate intervals therebetween to be adjacent to the vertical fields. The heat insulating member is passed from the inside to the outside at a position between the heating resistors. The present invention is the heat treatment furnace which divides the heat insulating member into a right half portion and a left half portion, in the portions There is a longitudinally extending dividing surface between each of the heating resistors is also divided into a right half corresponding to one of the thermal insulating members and a left half of the heating resistor and the other adjacent to it - The heating resistors are connected to each other at the ends by the connecting plates and the connecting plates are disposed on the divided surface portion of the heat insulating member 129091.doc 200914783. The present invention is the heat treating furnace. . ^ ^ . ^ - The fixing member formed by the pin, each of the connecting plates is fixed on the surface portion of the sea by means of a cow. The present invention is the heat treatment furnace in which the connecting plates are intended to be locked The chess piece has a locking portion on the outer circumferential surface of the ... money component. The invention relates to the heat treatment furnace, wherein each of the connecting plates is pressed into the heat insulating member to fix the solid member therein The present invention is the heat treatment furnace, wherein the connecting plates hold the anti-drop pins of the peak portion of the heating resistor. Yes - the present invention is the heat-treated surface, wherein the twisting resistance member has a - branching The plate is in the lower part of the peak of the peak to prevent it from falling. The invention is always a vertical heat treatment, beans. It contains ····································································· And a pair of objects to be processed and a pair of ends to define a furnace opening; a column = a processing container - a lower portion - an outer circumference 1 2 which surrounds the processing for the door person to heat the object to be processed ; cover member, 1 holding member = furnace opening; a holder placed on the cover member, the solid: = lifting and lowering the cover member to open and close the cover member, = two = Γ =; Τ and unloading the holding member from the processing container: a cylindrical thermal insulation member and a heating resistor disposed along each of the thermal insulation: an inner solid peripheral surface, the heating resistors are all bent by a - having a peak portion and a trough portion I29091.doc • 12- 200914783 The strip shape of the waveform is shaped, placed in the thermal insulation member, M is spaced apart from each other, the heating resistor is crying, and the 1 member holds the heating resistor so that “the heater is - Move in the radial direction. This is the vertical heat treatment package of a gentleman 4, a foot of the 4 pin members of each part of the foot part of the _ ... to heat the resistors of the trough part ^, 3 乂 ° Xuan and other individual feet The portion passes through the heat insulating member from the inner side to the outer side, and the upper portion (four) is bent on the outer side to be locked on the outer circumferential surface of one of the heat insulating members. = the vertical heat treatment apparatus, wherein a plurality of circumferential continuous groove regions are further spaced apart from the inner circumferential surface of the appropriate space, and Mm / is formed in the heat insulating member, the noodle and the 4 heating resistor All or part of it is housed in the groove sections. The invention relates to the vertical heat treatment device in which a plurality of forced cooling nozzles are formed in a circumferential manner at appropriate intervals therebetween, and the heating resistors in the vertical members are adjacent to each other. The heat insulating member passes through the inside to the outside at one of the positions. The present invention is the upright heat treatment device, wherein the heat insulating member is divided into a right half portion and a left half portion having a longitudinally extending split surface between the portions, wherein each of the heating resistors is also Divided into a right half portion and a left half portion corresponding to the heat insulating member. A heating resistor and another heating resistor vertically adjacent thereto are connected to each other at the end turns by the connecting plate, and the connections are A plate system is disposed on the divided surface portion of the heat insulating member. The present invention relates to the vertical heat treatment apparatus, wherein each of the connecting plates is fixed to the divided surface portion by a fixed member formed by a pin::: the vertical heat treatment The device, wherein each side of the connecting plates & is locked on the outer circumferential surface of the thermal insulating member. The present invention relates to a vertical heat treatment apparatus of the present invention, wherein each of the connecting plates has a fixing member that is inserted into the heat insulating member and fixed therein. The present invention relates to a two vertical heat treatment apparatus, wherein each of the connection plates has a drop prevention pin that holds a peak portion of the heating resistor. One invention is the vertical heat treatment apparatus 'where the heat insulating member has a lower portion of the peak portion of the heating resistor to prevent the falling plate. : According to Ben Maoyue's δ Hai heating resistor (which is manufactured by making a strip of heating resistors formed into a waveform), along an exposure manner

The inner circumferential surface of the C ^ edge member is disposed. Therefore, the degree of dispatch can be quickly increased and decreased, and durability improvement and cost reduction can be achieved. [Embodiment] The best mode for carrying out the invention will be explained in detail with reference to the accompanying drawings. Figure i is a longitudinal cross-sectional view schematically showing an embodiment of the upright heat treatment apparatus of the present invention. Figure 2 is an enlarged cross-sectional view of the portion A of Figure 1. Figure 3 is an enlarged longitudinal view of a portion A. Figure 4 is a plan view of a heating element. Figure 5 is a side view of a heating element. 1 shows a vertical heat treatment apparatus 丨, which is a type of semiconductor manufacturing apparatus, and the processing apparatus 1 includes an upright vertical heat treatment furnace 2, which can simultaneously accommodate 129091.doc •14·200914783 right dry objects to be processed (for example, The semiconductor wafer w) can perform a #process for the waiting for processing object, for example, an oxidation process, a diffusion process, and a reduced pressure CVD process. The heat treatment furnace 2 comprises: a processing vessel 3 (also referred to as a "reaction tube") for accommodating the wafer w and performing a heat process on the wafer w; and - a cylindrical heater 5 (heating device), The outer circumference is disposed around one of the handles 3 for heating the wafer w. The heat treatment apparatus 1 also includes a substrate 6 on which a heater 5 is mounted. The substrate 6 has an opening 7 through which the processing container 3 is inserted from the bottom up

In. The opening 7 is provided with a heat insulating member (not shown) which blocks a gap between the substrate 6 and the processing container 3. The processing container 3 is made of quartz and has an elongated cylindrical shape. The upper end of the processing container 3 is closed, and the lower end of the processing container 3 is opened to define a furnace opening. The open end of the processing container 3 forms an outward flange. The substrate 6 is hung-flange clamping member ( Not shown) to support the flange. In the lower part + of one of the illustrated processing vessels 3 is equipped with: - bow to earth vehicle (inlet) 8, and is used to introduce - process gas and / or inert gas into the treatment In the container 3; and a discharge port (the outlet 5 is not shown, the product is used to discharge the gas in the treatment container 3) - the gas supply source is connected to the introduction port 8. Connected to the discharge A system of sputum - an evacuation system with a vacuum pump capable of controlling the pressure in the process vessel 3 to be reduced to, for example, 1{) T (m ^i().8T 〇rr. 3, there is provided a cover member 1 for closing the lower end opening (furnace opening) 3a of the processing container 3. The cover member 1A can be vertically moved by a lifting mechanism. The cover member (4) is provided on the upper portion for Heat retaining assembly for furnace opening (eg '-heat holding tube u). Heat holding (4) on one of the 129091.doc 15 20091 The 4783 is provided with a stone ship 12 as a holding member, which is capable of holding a right stem (for example, about 100 to 150) straight seeds, for example, 300 mm, at a predetermined vertical interval between the wafers. Wafer w. The workpiece member 10 is remotely connected to a slave mechanism 13. The rotating mechanism 13 causes the vessel 12 to be centered on the i-axis, and the vessel 12 is rotated by the member. Moving and self-contained, the slaves are unloaded to the lower loading area 15. After the wafer w is replaced, the boat u is loaded into the processing container 3 by the upward movement of the 4 Μ 1 / / cover member 10. halberd

As shown in Figures 2 to 5, the heater 5 comprises a cylindrical heat insulating member 16 and a plurality of groove-like scaffolding sections 17 which are axially arranged in a lamination manner (in the drawings Vertically formed on one inner circumferential surface of the heat insulating member 16 and a heating member (heating wire, heating electric heater) 18, which is disposed along the individual scaffolding section 17. The heat insulating member is made of an inorganic fiber containing, for example, cerium oxide, oxidized or lyophilic acid. Installation of the heating element and assembly of the heater 'Better case is to divide the thermal insulation member into - right half = and - left half" with longitudinal extension between the parts. Table 16a ° Heating element 18 A strip member 18A having a wave shape is formed (bent). The corrugated (waveform) heating element 18 is made of an alloy containing, for example, iron (Fe), chromium (Cr), and aluminum (A1) (so-called Coanda material). The thickness of the heating element 18 is approximately! _ to 2 _ ' has a width of approximately 14 _ to a _. The amplitude of the waveform is about 11 claws to ^ mm, and the pitch p is about "to mm. The apex angle θ of the waveform of the heating element 18 is about 9 degrees. The apex portion (also called " The portion "or" peak portion") 8a is subjected to a one-foot bending process. This allows the heating element 18 to move over a certain circle 129091.doc -16 - 200914783 on the scaffolding section 17 of the thermally insulating member 16 and enhance the strength of the curved portion. The pin members are disposed at appropriate intervals from the thermal insulation member to retain the heating element 18 to allow the heating element 18 to move radially while preventing the heating element 18 from falling or disengaging from the scaffolding section 17. Having a plurality of groove segments m in the inner circumferential surface of the cylindrical insulating member 6 • The groove portions are formed with the axial spacing therebetween to be in contact with the heat insulating member. The groove section 21 forms a circumferential continuous annular shelving section n between the groove section & 21 adjacent to the upper groove section. A weir is formed above and below the heating element (4) in the groove 21 section 21, and another gap is formed between the rear wall 21a of the groove section 21 and the heating element 18. These voids are sufficient to allow for thermal expansion, heat shrinkage, and radial movement of the heating element 18. In addition, due to such voids, the cooling air supplied during the forced air cooling operation can reach and pass through the rear side of the heating element (4), whereby the heating element 18 can be effectively cooled. The pin member 20 comprises: a proximal end portion 2a for holding the trough portion (10) on the side of the inner circumferential surface of the heating element 18; and - for the leg portion) a knife, 2〇b ' The heat insulating material 16 is passed from the inside to the outside. The pin member 20 has a substantially U-shape in a side view. The end trowel 20c of the pair of leg portions 20b is bent in the opposite direction so as to be locked to one of the outer circumferential surfaces of the heat insulating member μ. The lock member 20 is preferably made of the same material as the heating element 18. As shown in Fig. 3, the Φ printing--Shijia is not preferred. The heating element 丨8 is accommodated in each groove section 21 so that the radially outer half of the heating element 18 is received in the groove section 2ΐφ 1 and its radially inner half is exposed on the outer side of the groove section 21. 129091.doc 200914783 As shown in Figures 2 and 3, unlike conventional heating elements that are snailed in a continuous manner and vertically extended, are placed on the heating of the scaffolding section 17 as the mother of the -A Element 18 is terminated at each of the steps virtual m | white. Therefore, the heating element 18 can be prevented from moving downward due to its own weight. Further, as shown in FIG. 5, the heating element 18 is coupled (connected) between the upper step and the lower step of the field, and Each of the steps is equal to every other step (7 in the figure is connected in series. In addition, for each group including the plurality of steps, the termination plate 22 to be connected to the electrode is connected to the lowest step - the starting end (10) and

The highest step - the dead end 18r. Therefore, the heater 5 is vertically divided into a plurality of regions in the heat treatment furnace 2, whereby the temperature of each region can be independently controlled. Although the heating element 18 can be annularly positioned along the scaffolding section 17 or the groove section 21 of the thermal insulation member 16, as shown in Figure 4, for ease of assembly of the heating element 18, the heating element 18 is preferably formed An aliquot shape (semicircular shape) corresponds to the thermal insulation member 16 divided into two halves along the division surface 16a. For example, Figures 4 and 5 show possible connections (wire connections) of the heating element 18. In this connection pattern, the opposite ends 18e, 18f, 18g, ... and I8r of the heating element 18 at the individual steps are bent to project radially outward, and the termination plates 22 and 22 are respectively joined to the first step ( The lowest end (starting end) (right end) 18e and the highest step dead end (left end) 18r. Further, the heating resistors 18 which are vertically adjacent to each other are connected in series, and the ends adjacent to the heating resistors 18 are sequentially connected to each other by the connecting plate 23. That is, the dead end 18f of the first step and the start end 18g of the second step are connected to each other by the connecting plate 23' and the dead end 18h of the second step and the beginning end 1 of the third step are connected by another connecting plate 129091.doc -18- 200914783 The split surfaces 2 3 of the edge members 16 are connected to each other.彳查立1 The slab 23 is positioned on the heat block 16a. The ends of the ',,, -, members 18 and the connecting plates 23 are connected to each other by soldering. The termination plate 22 passes through the insulating member 16 in the radial direction via the clamp system. In order to prevent the connecting plate 23 from being welded to a portion of the end of the member 18, it is preferable to bury the connecting plate 23 in the heat insulating member (4). In addition to the above-described connection pattern, other connection patterns of the member 18 can also be used. Preferably, the termination plate 22 and the connection plate 22 and the connection plate 23 are made of the same material as the heating element 18, and the termination plate is formed. And the connecting plate 23 is formed to have a plate-like shape with a predetermined sectional area. In order to maintain the shape of the heat insulating member 16 and to reinforce the heat-exclusive member 16, as shown in Fig. 1, the outer circumferential surface of the heat insulating member 16 is preferably covered with a casing 28 made of metal (9) such as stainless steel. Further, the outer circumferential surface of one of the outer casings is covered with a water cooling jacket a battalion 0 to prevent heat from leaking from the heater 5 to the outer portion of the outer two heat insulating members 16 covered with the upper thermal insulating member Μ, and

The non-scale steel top plate η of the top (upper end portion) of the C peripheral member 28 is disposed on the upper portion of the upper heat insulating member 31. In order to accelerate the process or improve the flux of the wafer, the temperature of the w & 丨 ^ 1 will be quickly reduced after a thermal process. The heater 5 is equipped with: _ 勒 ^ ', ·, discharge system 3 5 , which is used to discharge air to the space between the heater 5 and the processing container 3; and - the forced air cooling unit 36, 1 is a time, ^, by - normal temperature (2 〇 t to The air is introduced into the space 33 to forcibly cool the processing container 3. The heat discharging system 35 is mainly composed of the following: an outlet 37 formed in an upper portion of the ... 5; and a heat discharging pipe (not shown) J -, for connecting the outlet 37 and a 129091.doc -19- 200914783 factory air discharge system (not shown). The heat discharge pipe has an air discharge blower and a heat exchanger (not shown). The air-cooled potassium single TC36 has a plurality of annular paths "formed between the heat insulating member 16 and the outer casing 28 in the -n direction; and a plurality of forced cooling air blowing holes 4" formed in the heat insulating member. Medium, the gas flows through the holes at a center relative to the heat insulating member 16 The vortex is generated from the individual annular path 38 in the blowing space 33 to create a vortex in the space 33. The annular path 38 can each be attached to the thermal insulating member by a strip shape: the ring guard 41... , , , ' 'Circumferential surface, 'by forming the outer circumferential surface of the yoke 16 into a ring shape. The air blowing hole 40 is preferably formed in the heat as shown in the figure (8), from the inside to The outer side passes radially through the scaffolding section 17 disposed in the center of the vertical adjacent twisting element. Since the air blowing holes 4 are formed in the scaffolding section to interfere, air can be blown into the space 33 without heating Element_a single shared supply conduit (not shown, 1 is assigned to the individual annular path 38) along the height-to-square 2 fluid-extended circumferential surface of the outer casing 28. The outer casing 28 has the supply conduit 1 individually connected to its 38-connection ϋ 、, gold, s π , "individual 裱-shaped path, the communicating hole. - Cooling fluid supply source (such as shown) connected to the supply pipe, several machines by a switching valve, not - cooling fluid suction - clean room And Lu Litian '" supply source for the air for 4 months and pressure to feed The cooling fluid is sent. The heat treatment furnace heat treatment apparatus 1 configured as described above comprises: Shi Guyi 3, which is used for accommodating a wafer... and a cylindrical heater 5 for the wafer w, which surrounds the treatment 、 ', , 1 step; and the solid setting of the valley 2 for heating 129091.doc -20- 200914783 wafer W. The heater 5 has: a cylindrical thermal insulation member 16; a groove-like scaffolding section 17, which A laminated manner is formed axially on the inner circumferential surface of the heat insulating member 16 and the heating element 丨8, which is disposed along the individual scaffolding section 。 7. The heating element is fabricated by forming a strip-shaped heating element into a corrugated shape. Hey.

The pin members 20 are disposed in the thermally insulating member "with a suitable spacing therebetween", the pin member 20 holding the heating element 18 to move the heating element 18 in the radial direction of the heater $ while preventing the heating element 18 from the scaffolding section 17 is removed = thus 'corrugated heating elements 18 can be placed in an exposed manner on each of the shed ten zones 17 which are formed on the inner circumferential surface of the thermally insulating member μ. The temperature in the processing vessel 3 can be rapidly increased and decreased, and durability improvement and cost reduction can be achieved. In the case of using the corrugated heating element 18, the ratio of the surface area of the component can be effectively increased. Therefore, the heating element can be reduced. Above - the load (which is caused by a decrease in the temperature of the heater surface) 'to thereby suppress damage of the heating element. Therefore 'a high power can be applied to the heating 8 to rapidly increase the temperature. Further, since the disconnection can be suppressed' Therefore, durability improvement can be obtained, that is, a longer service life can be obtained. Further, inexpensive heating wires can be used to form the heating element 18, and thus cost reduction can be achieved. The heat insulating member 16 forms a forced cooling air money (10) to pass through the scaffolding section η disposed between the vertical adjacent heating elements 18 from the inside to the outside. Thus, air can be easily blown from it. There is no interference with the heating element 18. The thermal insulation member 16 extends the longitudinally-divided surface - into two turns 'and the heating element is also cut corresponding to the thermal insulation member. Thus, it can be easily The heating element and the heat insulating member are assembled at a temperature of 129091.doc • 21 · 200914783, that is, the assembly thereof can be improved. Fig. 7 is a view showing a structure for fixing the connecting plate to the heat insulating member on the end of the heating resistor. Fig. 7(a) is an enlarged perspective view of a main portion of the structure, and Fig. 7(b) is a cross-sectional view of the fixed state. To suppress or prevent the connecting plate 23 (the heating element 18 is bent here (1)) The deformation of the connecting plate 23 is fixed to the end (segmented surface) 丨 of the heat insulating member 16 by means of a fixing member 45 (illustrated as a u-shaped pin) such as a pin. In addition, the connecting plate 23 is provided with a lock. Part 46 to lock On the outer circumferential surface of the heat insulating member 16. Fig. 8(a) and Fig. 8(b) are cross-sectional views showing another example of a structure for fixing the connecting plate to the heat insulating member on the end of the heating resistor. The plate B is fixed to the end of the heat insulating member 16 by means of a fixing member 45. Further, an auxiliary heat insulating member 47 is provided to cover the connecting plate 23. The auxiliary heat insulating member 47D is again placed at the end of the heat insulating member 丨6. In a space between (divided surfaces), or filled into the space. In addition to the pins, the fixing member 45 may be a tube, a round rod or a square rod, etc. Figures 9(a) and 9(b A cross-sectional view showing still another example of a structure for fixing a connecting plate to a heat insulating member on the end of a heating resistor. The connecting plate U has a fixing member 48' which is pushed into the heat insulating member 16 or assists The heat insulating member 47 is fixed in it. For example, the fixing member is formed by bending the end of the material web 23 at a right angle to form an auxiliary heat insulating member disposed on the end of the heat insulating member 16 to cover the connecting plate 23. The fixing member Μ can be inserted into the auxiliary heat insulating member 47 (see Fig. 9(a)). However, it is preferable to push the fixing member 至 into the heat insulating member 丨6 (see Fig. 9(b)). 129091.doc -22- 200914783 Figure Η) is a sensible __田# + 2nd part of the extension. The drop pin holds the heating resistor and the figure is shown. The figure is a partial perspective view of the structure, and is provided with a schematic perspective view of the anti-drop pin. Heat _ Luo down pin 49, which has a heating element 18 with a portion _ held in the inner surface of the thermal insulating member 16 ^ the mouth is extended - inside the circumferential surface to prevent 1 Luo: anti-drop pin 49 is bent - a wire rod (for example, a steel rod) shaped into two (4) points, and the (four) curved wire rod I is twisted into - (iv) to provide a U-shaped portion. The end bend/knife is enlarged to form a circular or a substantially triangular enlarged portion. The protruding portion of the heating element 18! 8a is received in the inner side of the crotch portion of the anti-drop pin 49 and the lower amplifying portion 49a is positioned adjacent to the thermal insulating member 16, for example, 'positioned in the groove section 21 or the scaffolding Above section 17. The upper opposite end portion 49c of the drop prevention pin 49 and the penetrating heat insulating member (10) project from the outer circumferential surface thereof. The drop preventing pin 49 can be locked on the outer circumferential surface of the heat insulating member 16 by bending the opposite end portions and 49c in the left-right direction to form the locking portion'. By the above attachment means, the fall prevention pins 49 are disposed in the circumferential direction of the heating element 18 of the heat insulating member 16 at appropriate intervals therebetween, and are disposed on the half portions thereof in the axial direction of the heat insulating member 16 A plurality of (for example, two) columns. Since the drop pin 49 is prevented, the falling and/or sagging of the heating element 18 can be prevented, whereby the depth of the groove section of the heat insulating member 16 or the extension of the scaffolding section (concealer) can be reduced. The amount. In addition, the groove section 21 and the scaffolding section 17 can be eliminated. Figure 11 is a perspective view of another example of a drop-proof pin. Fall prevention pin 49 129091.doc •23- 200914783 Hunting can be formed by: μ bending a wire rod into (4) (see Figure 11(a)) or bending a wire rod into two parts and then bending the wire rod Bending into a U shape (see Figure 11 (b) h opposite end portions 4% and 49c are bent to form a locking portion. Fig. 1 2 is a display for the extension of the heating resistor by an anti-drop plate Figure 12(a) is a partial perspective view of the structure, and Figure 12(b) is a schematic perspective view of the fall prevention plate. The thermal insulation member 16 is provided with a fall prevention plate 50 that will heat the element 18. The lower portion of the suitable protruding portion 18a having the corrugation is supported inside the inner circumferential surface of the heat insulating member 16 to prevent it from falling. Preferably, the falling prevention plate 5 is made of a ceramic rectangular plate, and a hole portion 50a (which can be pushed into the heat insulating member to be fixed therein) is formed on one longitudinal end of the falling prevention plate 50. Since the falling prevention plate horizontally supports the lower portion of the protruding portion 18a of the heating member 18, heating can be prevented The flipping and/or sagging of the component 18 is therefore similar to In the embodiment, the groove section 21 and the scaffolding section 17 can be eliminated. Fig. 1 is a perspective view showing another example of the heat insulating member. The heater 5 is present due to internal stress caused by thermal expansion and heat shrinkage. The inner circumferential surface of the thermal insulating member 16 is subject to some possibility of cracking. As shown in Fig. 13, in order to avoid such cracking, it is preferable to form the slit 42 in the inner circumferential surface. Further, for smoothness The heater is assembled, preferably vertically dividing the thermal insulation member 16 at the lower surface of the individual scaffolding section 17. That is, the thermal insulation member 16 is preferably formed by a plurality of vertically divided blocks 16a. This structure facilitates the heating element 18. Arranged on the individual scaffolding section 17. That is to say, a heating element 18 is first placed on the scaffolding section 17 12909l.d〇) of the first dividing block 16a • 24· 200914783 'and then laid on it The second dividing block 16a has a heating element i8 disposed on the scaffolding section 17 of the second dividing block 16a, and so on. Therefore, the hairdressing improvement can be obtained. In this case, it is preferable to form a recess 43a and a projecting portion 43b circumferentially in the opposing surfaces of the divided blocks 16a which are perpendicular to each other (the two can be engaged with each other for positioning). Embodiments of the present invention have been described in detail with reference to the drawings. However, the present invention is not limited to the above-described respective embodiments, and various modifications and changes can be made without departing from the scope of the invention. For example, a lower end of the processing vessel may be a cylindrical manifold made of a heat resistant metal (e.g., stainless steel) having an inlet tube portion and an outlet tube portion. In addition, the treatment can be a double tube structure. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a longitudinal cross-sectional view schematically showing an embodiment of an upright heat treatment apparatus of the present invention; FIG. 2 is an enlarged cross-sectional view of a portion A of FIG. 1; 1 is an enlarged longitudinal cross-sectional view; FIG. 4 is a plan view of a heating element; a side view of a 囷5 series heating element; FIG. 6(4) is a plan view showing an example of a thermal insulating member, and 6(b) is a sectional view 6(a) is a cross-sectional view taken at line B_B; Fig. 7(4) is a main part enlarged perspective view showing a _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The knot on the member, 'and Figure 7 (b) is a cross-sectional view of the fixed state; Figure 8 (a), (b) is a cross-sectional view, 苴,,,, 'Bei is not used at the end of the heating resistor '2909l .doc -25· 200914783 Another example of the structure of the upper connecting plate to the heat insulating member; Fig. 9(a) and 9(b) are sectional views, and the self-issued is not used to fix the connecting plate in the heating resistor 2. A further example of the structure of the thermal insulation member, ^ ^ 八显不 - is used to indicate by one of the anti-drop pins Fig. 1(8) is an anti-drop pin. Figures 11(a) and 11(b) are perspective views, examples thereof; and another 12 (4) part of each of the unobstructed pins is a partial perspective view. , which shows the junction of the extended portion of the holding heating resistor = a schematic perspective view of the anti-drop panel; and the figure is called an anti-drop panel; 13 series: a partial perspective view showing another example of the thermal insulating member. And the circle 14(a) is a view showing the inner circumferential surface of the heater. 1 1(b) is the inner circumferential surface of the heater - view 1 vertical heat treatment device 2 vertical heat treatment furnace 3 processing container 3a furnace opening 3b outward flange 5 Cylindrical heater 6 Substrate 7 Substrate opening 8 is introduced into a cross-sectional view of the f(9) system f example, and Fig. 129091.doc -26- 200914783 ίο

10A 11 12 13 15 16 16a 17 f 18 18A 18a 18b 18e, f, g...r 20 20a / 20b 1, 20c 21 21a 22 23 28 30 Cover member lifting mechanism Heat retaining tube Quartz ship rotating mechanism Lower loading zone cylinder Shaped thermal insulation member split surface groove-like scaffolding section heating element strip member apex part trough part end pin member proximal end part foot part end groove section rear wall end plate connecting plate shell water cooling sleeve 129091. Doc -27- 200914783 31 Upper thermal insulation member 32 Stainless steel top plate 33 Space 35 Heat discharge system 36 Forced air cooling unit 37 Outlet 38 Annular path 40 Forced cooling air blow hole 41 r Strip or ring thermal insulation member \ 42 Slit 43a Recessed portion 43b Projection portion 45 Fixing member 46 Locking portion 47 Auxiliary thermal insulating member 48 Fixing member C, 49 Falling prevention pin 49a Magnifying portion 49b U-shaped portion 49c Opposing end portion 50 Falling prevention plate 50a Tip portion 129091.doc -28-

Claims (1)

200914783 X. _Patent scope: L A heat treatment furnace comprising: · Objects: accommodating - to be processed and a cylindrical heater to be treated, one of the outer circumferences of the circumference treatment container is set for heating The object to be processed; wherein the heater comprises a circular cylindrical hot edge member, and a heating resistor disposed along the inner circumferential surface of the heat, each of the heating resistors 4 is bent into a peak portion And a corrugated strip member formed in the trough portion, and the lock members are disposed in the heat insulating member at appropriate intervals therebetween, the pin members holding the heating resistor to enable the heating resistor to be heated One of the devices moves in the radial direction. 2. The heat treatment furnace of claim 1, wherein each of the pin members forms a U-shape having a pair of leg portions for supporting the trough portion of the heating resistor, the individual legs The heat insulating member is partially passed from the inside to the outside, and the individual leg portions are bent on the outer side to be locked to the outer circumferential surface of one of the heat insulating members. 3. The heat treatment furnace according to claim 1, wherein a plurality of circumferential continuous groove segments are vertically formed in the inner circumferential surface of the heat insulating member at an appropriate interval therebetween, and the heating resistors are wholly or partially It is contained in the groove area 129091.doc 200914783. 4. The heat treatment furnace of claim 1, wherein a plurality of forced cooling air blowing holes are circumferentially formed in the heat insulating member at appropriate intervals therebetween to be at a position of the heating resistor tin adjacent to the vertical field The heat insulating member passes through the inside to the outside. 5. The heat treatment furnace according to claim 1, wherein the heat insulating member is divided into a right half portion and a left half portion, and a longitudinally extending dividing surface is provided between the portions, and each of the heating resistors is- Also divided into the right half of one of the thermal insulation members and a left half, /: a heating resistor and the other vertical heating resistors adjacent to the vertical field are connected to each other at the ends by the connecting plates Connecting, and the connecting plates are disposed on the divided surface portions of the heat insulating member. 6. The heat treatment furnace of claim 5, wherein each of the '" special connecting plates is fixed to the divided surface portion by a fixing member formed by a pin. 7. The heat treatment furnace according to claim 5, wherein each of the connecting plates has a locking portion lockable to an outer circumferential surface of the heat insulating member. 8. The heat treatment furnace according to claim 5, wherein each of the connecting plates such as "Hai" has a fixing member fixed in the heat insulating member and fixed therein. A heat treatment furnace according to claim 1, wherein each of the connection plates has a drop prevention pin that holds the peak portion of the heating resistor. The heat-treated surface of claim 1, wherein the heat-insulating member has a lower portion of the peak portion of the heating resistor to prevent it from falling. An upright heat treatment apparatus comprising: a::: a treatment furnace comprising: - an elongated processing vessel for accommodating: 里::物: and performing a heat process on the object to be processed, wherein the α 5 is opened to define a furnace opening 丨 and a round dove, ', state, which surrounds the outer circular machine of the processing container; the outer circumference is placed for heating the cover member, which is used for Closing the furnace opening; dl' is disposed on the cover member, the holding member holds a plurality of objects to be processed in a laminated manner; and a cover structure: lifting and lowering the cover member to open and close the device Unloading the _ piece; carrying the yoke to the processing container and from the processing rim member ^ comprises a cylindrical thermal insulating member, and a heating resistor arranged along the inner circumferential surface of the heat:: a peak portion: a skin resistor Each of which is formed by a strip member that is bent into a wave center =?: and wherein the pin members are disposed at a proper interval and are disposed on the heat insulating member to hold the heating resistor to Heating resistor can be 129091.doc 200914783 in the far heater It moved in a radial direction. 12. The vertical heat treatment apparatus according to claim 11, wherein the § 荨 荨 构件 — I I I 丄 丄 丄 丄 丄 丄 丄 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对 对= The individual leg portions pass through the thermal insulation from the inside to the outside. The other part is attached to the outer circumferential surface of the outer insulating member. 13. The vertical heat treatment apparatus according to claim 11, wherein the plurality of circumferences of the vehicle are separated by a suitable interval and are perpendicular to each other; μ..., the inner circumferential surface of the insulating member is medium and strong The whole or a part of the thermal resistor is housed in the recessed area 14. According to the vertical heat treatment apparatus of claim 11, "the cooling air blowing holes of the system are heated at a proper interval therebetween to form a heat resistance". In the insulating member, the heat is passed from the inside to the outside at the position between the adjacent members of the vertical base. The vertical heat treatment device of claim U, wherein the member is divided into - the right half and the left half, where the person 3 has a longitudinally extending split surface, ::: Each of the resistors is also divided into a right-handed portion and a left half of the heat-insulating member, - The heating resistors are adjacent to the other vertical heating resistors 129091.doc 200914783 by the connecting plate at the end; |: day r& Points. Such divided surface portions. As claimed in claim 15 of the vertical heat treatment, wherein And fixed on the divided surface portion. The formed fixing member is the vertical heat treatment device of claim 15, wherein the heat insulating member is lockable to each of the connecting plates to have a locking portion that can lock an outer circumferential surface. 18. The vertical heat treatment apparatus of claim 15, wherein each of the connecting plates has a fixing member that is inserted into the heat insulating member and fixed therein. 19. The vertical heat treatment apparatus of claim 11, wherein each of the connection plates has a drop prevention pin that holds the peak portion of the heating resistor. 20. The vertical heat treatment apparatus of claim 11, wherein the heat insulating member has a fall prevention plate that supports a lower portion of the peak portion of the heating resistor to prevent it from falling. 129091.doc