200904764 九、發明說明 【發明所屬之技術領域】 本發明係關於用來成形出精密形狀的光學元件之玻璃 成形用模具及其製造方法。 【先前技術】 如眾所周知，在塑膠成形的領域，已發展出使用成形 模具的精密加工技術，且具有繞射光柵等的微細形狀之光 學元件的量產業已實現。這種情形的模具，是在基材表面 實施化學鍍（electroless plating) Ni-P，並將該鍍層用鑽 石車刀予以精密加工而製作出。將該模具應用於玻璃成形 時，由於Ni-P層無法維持玻璃的脫模性，故必須形成脫 模膜。例如，在日本特開2 0 0 2 - 2 9 7 7 2號公報（專利文獻 1)，是採用 w、Pt、Pd、Ir所構成之金屬或合金來作爲 脫模膜。已知在專利文獻1的情形，若成形溫度變高，脫 模膜的表面粗度會惡化。 【發明內容】 本發明的目的是爲了提供一種玻璃成形用模具，藉由 結晶化的切削加工層的存在來避免成形中脫模層的表面粗 度惡化，以進行精密的加工。 又本發明的目的是爲了提供一種玻璃成形用模具的製 造方法，是在基材上形成切削加工層後進行加熱使其結晶 化，然後形成前述脫模層或中間層及脫模層，藉此來避免 -5- 200904764 成形中脫模層的表面粗度惡化而實現精密的加工。 1) 爲了達成上述目的，本發明的玻璃成形用模具， 其特徵在於：係具備鋼鐵製的基材、在該基材上依序形成 之結晶化的切削加工層及脫模層之玻璃成形用模具；前述 切削加工層是含有磷之鎳合金層，前述脫模層是含有銥及 鍊之合金層。 2) 本發明的玻璃成形用模具之製造方法，其特徵在 於：係具備鋼鐵製的基材、在該基材上依序形成的切削加 工層及脫模層之玻璃成形用模具的製造方法；在基材上形 成切削加工層後進行加熱使其結晶化，然後形成前述脫模 層。 3 )又本發明的玻璃成形用模具，其特徵在於：係具 備鋼鐵製的基材、在該基材上依序形成之結晶化的切削加 工層、中間層及脫模層之玻璃成形用模具；前述切削加工 層是含有磷之鎳合金層；前述中間層是含有鉻、鎳、銅、 鈷中任一者構成的層，或是含有該等元素中至少1種以上 的合金層；前述脫模層是含有銥及鍊之合金層。 4 )又本發明的玻璃成形用模具之製造方法，其特徵 在於··係具備鋼鐵製的基材、在該基材上依序形成的切削 加工層、中間層及脫模層之玻璃成形用模具的製造方法； 在基材上形成切削加工層後進行加熱使其結晶化，然後依 序形成前述中間層及脫模層。 依據本發明的玻璃成形用模具，藉由結晶化切削加工 層的存在可避免成形中脫模層的表面粗度惡化，而能實現 -6- 200904764 精密的加工。又依據本發明的玻璃成形用模具之製造方 法，是在基材上形成切削加工層後進行加熱使其結晶化’ 然後形成前述脫模層或中間層及脫模層’藉此可避免成形 中脫模層的表面粗度惡化而能實現精密的加工。 【實施方式】 以下詳細說明本發明。 本發明中，前述切削加工層必須用鑽石車刀進行精密 加工，因此切削加工層的磷（p)濃度宜爲1重量％以上 1 5重量％以下。當P濃度未達1重量％時，切削加工性變 差。又當P濃度超過1 5重量％時，會發生切削加工層變脆 的問題。切削加工層中除了鎳（Ni ) 、P以外’也能含有 硼（B )、鎢（W )、鉬（Mo )、銶（Re )等等。 本發明中，前述脫模層的作用是用來維持與玻璃間的 脫模性。Ir-Pt合金雖脫模性佳，但加熱至約5 00 °C以上 時，受到切削加工層之Ni、P的影響會使表面粗度惡化， 且脫模性會變差而發生熔合。又Ir-Re合金所構成之脫模 層，表面粗度雖不致惡化，但脫模性尙嫌不足，可能發生 玻璃熔合的情形。經本發明人等深入硏究的結果發現，Ir-Re-C合金所構成的脫模層，不僅不致發生表面粗度的惡 化，且脫模性優異，因此完全不會發生玻璃的熔合。 亦即，在本發明’脫模層宜含有C，藉此可顯著提昇 脫模性。在此’ C含量宜爲lat%以上50at%以下。C含量 未達1 at%時，脫模性提昇的效果小。又當C含量超過 -7- 200904764 50at%時，脫模層的耐氧化性變差。 本發明中，前述中間層的作用是用來提昇切削加工層 和脫模層的密合強度。適用於中間層的材料爲鉻（C r )、 鎳（Ni)、銅（Cu)、鈷（Co)。 在本發明的製造方法，切削加工層在形成時爲非晶質 狀態，經加熱成結晶質後，再形成脫模層、或是中間層及 脫模層。在上述4 )的發明中，若在形成中間層及脫模層 後使切削加工層的結晶構造發生變化，在中間層和脫模層 的界面會發生大應力，而可能導致脫模層或中間層剝離。 接著說明本發明的具體實施例。 (實施例1 ) 第1圖係顯示本實施例1之玻璃成形用模具的局部截 面圖。圖中的符號1代表鋼鐵材料的基材。在該基材1 上，依序形成結晶化的切削加工層2、中間層3及脫模層 4。在此，切削加工層2是含有P (磷）12重量％的鎳合金 層，中間層3是鉻（Cr )構成的層，脫模層4是含有銥 (Ir)和錬（Re)之合金層。 第1圖的玻璃成形用模具5是如下述般製造出。首 先，在鋼鐵材料的基材1上形成Ni-P化學鍍層1〇〇 /z m， 以53 0°C實施2小時加熱處理，使其結晶化而形成切削加 工層2。接著，用鑽石車刀將切削加工層2加工後，藉由 濺鍍來形成50nm的Cr構成之中間層3、3 00nm之11·-5 Owt% Re構成的脫模層4，如此製造出玻璃成形用模具 200904764 實施例1之玻璃成形用模具5，如第1圖所示，是在 基材1上依序形成含有P (磷）12重量％的鎳合金層（切 削加工層）2、Cr構成之中間層3、含有Ir及Re之脫模 層4。而且，在模具5中，在形成切削加工層2後進行加 熱而使切削加工層2結晶化，然後依序形成中間層3及脫 模層4，因此可避免成形中脫模層4的表面粗度惡化而實 現精密的加工。 使用上述實施例1的模具及比較例1〜4的模具，實 際測定於5 7 〇 °C加熱後的表面粗度，獲得第2圖所示的結 果。圖中的符號a代表脫模層/中間層/切削加工層的鋼組 成爲Re-Ir/Cr/Ni-P的情形（實施例）。符號b代表該鋼 組成爲Pt-Ir/Cr/Ni-P的情形（比較例1 )。符號c代表該 鋼組成爲Ir/Ni/Ni-P的情形（比較例2 )。符號d代表該 鋼組成爲Pt/Ni/Ni-P的情形（比較例3 )。符號e代表該 鋼組成爲Pt-Ir/Ni/Ni-P的情形（比較例4 )。 由第2圖可看出，比較例1〜4不論任一個的情形， 在8小時（Η )內都會發生表面粗度惡化，相對於此，本 實施例1的情形，即使是經過32小時其表面粗度Ra仍維 持5nm。如此可知本發明確實優於比較例。 (實施例2 ) 第3圖係顯示本實施例2的玻璃成形用模具之局部截 面圖。對於和第1圖中相同的構件是賦予相同的符號而省 -9- 200904764 略其說明。玻璃成形用模具6 ’係在鋼鐵材料的基材1 上，依序形成結晶化的切削加工層2、脫模層4而構成。 第3圖的玻璃成形用模具6是如下述般製造出。首 先，在鋼鐵材料的基材1上形成Ni-P化學鍍層i〇〇//m， 以53 0°C實施2小時加熱處理，使其結晶化而形成切削加 工層2。接著，用鑽石車刀將切削加工層2加工後，藉由 濺鍍來形成3 0 0 n m之I r - 2 5 w t % R e構成的脫模層4，如此 製造出玻璃成形用模具6。 實施例2的表面粗度Ra，和實施例1同樣的在3 2小 時後仍維持良好。但是在邊緣的部分可看到脫模層之些微 剝離。 (實施例3 ) 第4圖係顯示本實施例3之玻璃成形用模具的局部截 面圖。圖中的符號1 1代表鋼鐵材料的基材。在該基材i i 上’依序形成結晶化的切削加工層1 2、中間層1 3及脫模 層14 °在此’切削加工層1 2是含有p (磷）1 〇重量％的 鎳（Ni-10wt%P )合金層，中間層3是鎳（Ni )構成的 層’脫模層4是含有銥（Ir )和銶（Re )和3at%碳（c ) 之合金層。 第4圖的玻璃成形用模具是如下述般製造出。首 先’在鋼鐵材料的基材u上形成Ni-P化學鍍層100#m， 以5 30°C實施2小時加熱處理，使其結晶化而形成切削加 工層1 2 °接著’用鑽石車刀將切削加工層1 2加工後，藉 -10- 200904764 由濺鍍來形成50nm的Ni構成之中間層13、300nm之 I r、R e、C構成的脫模層1 4，如此製造出玻璃成形用模具 10 ° 實施例3之玻璃成形用模具1 0 ’如第4圖所示’是在 基材11上依序形成含有P (磷）10重量％的鎳合金層（切 削加工層）12、Ni構成之中間層13、含有Ir及Re及C 之脫模層1 4。而且，在模具1 〇中，在形成切削加工層12 後進行加熱而使切削加工層1 2結晶化，然後依序形成中 間層1 3及脫模層1 4，因此可避免成形中脫模層1 4的表面 粗度惡化，且能防止玻璃發生熔合。 使用上述實施例3的模具及比較例5、6的模具，實 際測定於470 °C加熱後之玻璃熔合的狀態及表面粗度，獲 得以下表1所示的結果。實施例3代表脫模層/中間層/切 削加工層/基材的鋼組成爲Ir-Re-C/Ni/Ni-P/鋼的情形。比 較例5代表該鋼組成爲Ir-pt/Ni/Ni-P/鋼的情形。比較例6 代表該鋼組成爲Ir-Re /Ni/Ni-P/鋼的情形。如此可明顯看 出本發明確實優於比較例。 [表1 ] 模具組成 玻璃熔合 模具的 脫模層/中間層/切削 表面粗度 加工層/基材 實施例3 Ir-Re-C/Ni/Ni-P/鋼 500次成形不會發生熔合 Ra 2nm 比較例5 Ir-Pt/Ni/Ni-P/鋼 1次成形就發生熔合 Ra 8nm _比較例6 Ir-Re /Ni/Ni-P/鋼 1次成形就發生熔合 Ra2nm -11 - 200904764 由表1可知’比較例5、6的情形只要進行丨次成形 (shot )就發生熔合’相對於此，實施例3就算進行500 次成形也不會發生熔合。又關於模具表面粗度，比較例5 的Ra高達8nm，實施例3的Ra只有2nm。如此從表1可 看出，在玻璃溶合及模具的表面粗度方面，本發明都比比 較例來得優異。 (實施例4) 第5圖係顯示本實施例4的玻璃成形用模具之局部截 面圖。對於和第4圖中相同的構件是賦予相同的符號而省 略其說明。玻璃成形用模具1 5，係在鋼鐵材料的基材1 1 上，依序形成結晶化的切削加工層12、脫模層14而構 成。 第5圖的玻璃成形用模具15是如下述般製造出。首 先，在鋼鐵材料的基材11上形成Ni-P化學鍍層100 μιη， 以5 3 0°C實施2小時加熱處理，使其結晶化而形成切削加 工層12。接著，用鑽石車刀將切削加工層12加工後，藉 由濺鍍來形成3 00nm之Ir、Re、C構成的脫模層1 4，如 此製造出玻璃成形用模具1 5。 實施例4，雖然切削加工層1 2和脫模層1 4的密合強 度比實施例3稍差，但在玻璃熔合及模具表面粗度方面則 可獲得和實施例3同樣的效果。 又本發明並不限於上述實施例，於實施階段在不脫離 其主旨的範圍內可將構成要素變形而予以具體化。也能將 -12- 200904764 前述實施例所掲示之複數個構成要素適當的組合而形成各 種發明。例如，可從實施例所揭示之全部構成要素中刪除 幾個構成要素。再者，也能將不同實施例的構成要素予以 適當的組合。具體而言，上述實施例所記載之構件的材 料、配合比例、厚度等等不過只是一例，本發明當然不限 於此。 【圖式簡單說明】 第1圖係本發明的實施例1之玻璃成形用模具的局部 截面圖。 第2圖係本發明的實施例1及比較例的模具之加熱後 表面粗度和加熱時間的關係之特性圖。 第3圖係本發明的實施例2之玻璃成形用模具的局部 截面圖。 第4圖係本發明的實施例3之玻璃成形用模具的局部 截面圖。 第5圖係本發明的實施例4之玻璃成形用模具的局部 截面圖。 【主要元件符號說明】 1、 11 :基材 2、 1 2 :切削加工層 3、 1 3 :中間層 4、 14 :脫模層 5、 6、1 〇、1 5 :玻璃成形用模具 -13-BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass molding die for molding an optical element having a precise shape and a method of manufacturing the same. [Prior Art] As is well known, in the field of plastic molding, precision machining techniques using a molding die have been developed, and an amount of optical components having a fine shape such as a diffraction grating has been realized. In this case, the mold is subjected to electroless plating of Ni-P on the surface of the substrate, and the coating is precisely processed by a diamond turning tool. When the mold is applied to glass forming, since the Ni-P layer cannot maintain the mold release property of the glass, it is necessary to form a release film. For example, Japanese Laid-Open Patent Publication No. 2000-277 (Patent Document 1) uses a metal or an alloy composed of w, Pt, Pd, and Ir as a release film. It is known that in the case of Patent Document 1, when the molding temperature is increased, the surface roughness of the release film is deteriorated. SUMMARY OF THE INVENTION An object of the present invention is to provide a mold for glass molding which can prevent the surface roughness of a release layer during molding from being deteriorated by the presence of a crystallized cut layer to perform precise processing. Still another object of the present invention is to provide a method for producing a mold for forming a glass by forming a cut layer on a substrate, heating it to be crystallized, and then forming the release layer, the intermediate layer, and the release layer. To avoid -5 - 200904764 The surface roughness of the release layer during forming is deteriorated to achieve precise machining. 1) The glass molding die of the present invention is characterized in that it comprises a base material made of steel, a crystallized cutting layer formed on the base material, and a glass forming layer of the release layer. a mold; the cutting layer is a nickel alloy layer containing phosphorus, and the mold release layer is an alloy layer containing tantalum and a chain. 2) The method for producing a mold for forming a glass according to the present invention is characterized by comprising a base material made of steel, a cutting layer formed on the base material, and a method for producing a glass mold for releasing the mold; A cutting layer is formed on the substrate, and then heated to be crystallized, and then the release layer is formed. (3) The glass molding die according to the present invention is characterized in that it comprises a base material made of steel, a crystallized cutting layer formed on the base material, an intermediate layer, and a mold for glass forming of the release layer. The cutting layer is a nickel-containing alloy layer containing phosphorus; the intermediate layer is a layer containing any one of chromium, nickel, copper, and cobalt, or an alloy layer containing at least one of the elements; The mold layer is an alloy layer containing tantalum and chains. (4) The method for producing a mold for molding a glass according to the present invention, characterized in that it comprises a base material made of steel, a cutting layer formed on the base material, an intermediate layer, and a release layer. A method for producing a mold; forming a cutting layer on a substrate, heating and crystallization, and sequentially forming the intermediate layer and the release layer. According to the mold for glass forming of the present invention, the surface roughness of the release layer during molding can be prevented from being deteriorated by the presence of the crystallized cutting layer, and the precise processing of -6-200904764 can be realized. Further, according to the method for producing a mold for glass forming of the present invention, a cutting layer is formed on a substrate, and then heated to be crystallized 'and then the release layer or the intermediate layer and the release layer are formed', thereby avoiding formation. The surface roughness of the release layer is deteriorated to enable precise processing. [Embodiment] Hereinafter, the present invention will be described in detail. In the present invention, since the cutting layer must be precisely processed by a diamond turning tool, the phosphorus (p) concentration of the cutting layer is preferably 1% by weight or more and 15% by weight or less. When the P concentration is less than 1% by weight, the machinability deteriorates. Further, when the P concentration exceeds 15% by weight, the problem that the cut layer becomes brittle occurs. In addition to nickel (Ni) and P, the cutting layer may contain boron (B), tungsten (W), molybdenum (Mo), ruthenium (Re), and the like. In the present invention, the release layer functions to maintain the release property from the glass. Ir-Pt alloy has good mold release property, but when heated to about 50,000 °C or higher, the surface roughness is deteriorated by the influence of Ni and P in the machined layer, and the mold release property is deteriorated to cause fusion. Further, the release layer composed of the Ir-Re alloy does not deteriorate the surface roughness, but the mold release property is insufficient, and the glass may be fused. As a result of intensive investigations by the inventors of the present invention, it has been found that the release layer composed of the Ir-Re-C alloy not only does not cause deterioration of the surface roughness, but also has excellent mold release property, so that fusion of the glass does not occur at all. That is, in the present invention, the release layer preferably contains C, whereby the release property can be remarkably improved. Here, the 'C content is preferably lat% or more and 50 at% or less. When the C content is less than 1 at%, the effect of improving the mold release property is small. Further, when the C content exceeds -7 - 200904764 50at%, the oxidation resistance of the release layer is deteriorated. In the present invention, the intermediate layer functions to increase the adhesion strength between the machined layer and the release layer. Suitable materials for the intermediate layer are chromium (C r ), nickel (Ni), copper (Cu), and cobalt (Co). In the production method of the present invention, the cut layer is in an amorphous state at the time of formation, and after heating to a crystalline form, a release layer or an intermediate layer and a release layer are formed. In the invention of the above 4), if the crystal structure of the machining layer is changed after the intermediate layer and the release layer are formed, large stress may occur at the interface between the intermediate layer and the release layer, which may result in the release layer or the middle. Layer peeling. Next, a specific embodiment of the present invention will be described. (Example 1) Fig. 1 is a partial cross-sectional view showing a mold for glass molding of the first embodiment. Symbol 1 in the figure represents a substrate of a steel material. On the substrate 1, a crystallized cutting layer 2, an intermediate layer 3, and a release layer 4 are sequentially formed. Here, the machining layer 2 is a nickel alloy layer containing 12% by weight of P (phosphorus), the intermediate layer 3 is a layer composed of chromium (Cr), and the release layer 4 is an alloy containing iridium (Ir) and yttrium (Re). Floor. The glass molding die 5 of Fig. 1 is produced as follows. First, a Ni-P electroless plating layer 1 〇〇 /z m was formed on the substrate 1 of the steel material, and heat treatment was performed at 530 ° C for 2 hours to crystallize it to form the cutting processing layer 2 . Next, after the machined layer 2 is processed by a diamond turning tool, a release layer 4 composed of 50 nm of Cr intermediate layer 3 and 300 nm of 11·-5 Owt% Re is formed by sputtering, thereby producing glass. Molding mold 200904764 The glass molding die 5 of Example 1 is formed by sequentially forming a nickel alloy layer (cutting layer) 2 containing Cr (phosphorus) 12% by weight on the substrate 1 as shown in Fig. 1 . The intermediate layer 3 and the release layer 4 containing Ir and Re. Further, in the mold 5, after the cutting layer 2 is formed, heating is performed to crystallize the machined layer 2, and then the intermediate layer 3 and the release layer 4 are sequentially formed, so that the surface of the release layer 4 during formation can be prevented from being rough. Deterioration and precision machining. Using the mold of the above-mentioned Example 1 and the molds of Comparative Examples 1 to 4, the surface roughness after heating at 5 7 ° C was actually measured, and the results shown in Fig. 2 were obtained. The symbol a in the figure represents a case where the steel group of the release layer/intermediate layer/cut layer becomes Re-Ir/Cr/Ni-P (Example). The symbol b represents the case where the steel composition is Pt-Ir/Cr/Ni-P (Comparative Example 1). The symbol c represents the case where the steel composition is Ir/Ni/Ni-P (Comparative Example 2). The symbol d represents the case where the steel composition is Pt/Ni/Ni-P (Comparative Example 3). The symbol e represents the case where the steel composition is Pt-Ir/Ni/Ni-P (Comparative Example 4). As can be seen from Fig. 2, in any of Comparative Examples 1 to 4, the surface roughness was deteriorated in 8 hours (Η), whereas the case of the first embodiment was even after 32 hours. The surface roughness Ra was maintained at 5 nm. Thus, it is understood that the present invention is indeed superior to the comparative examples. (Example 2) Fig. 3 is a partial cross-sectional view showing the mold for glass molding of the second embodiment. The same components as those in Fig. 1 are given the same symbols and the description is omitted -9-200904764. The glass molding die 6' is formed on the base material 1 of the steel material, and the crystallized cutting layer 2 and the release layer 4 are sequentially formed. The glass molding die 6 of Fig. 3 is produced as follows. First, a Ni-P electroless plating layer i〇〇//m was formed on the substrate 1 of the steel material, and heat treatment was performed at 530 ° C for 2 hours to crystallize it to form the cutting processing layer 2 . Next, after the machined layer 2 was processed by a diamond turning tool, the release layer 4 composed of I r - 2 5 w t % R e of 300 nm was formed by sputtering, and the glass molding die 6 was produced in this manner. The surface roughness Ra of Example 2 remained good after 32 hours as in Example 1. However, some micro-peeling of the release layer can be seen in the edge portion. (Embodiment 3) Fig. 4 is a partial cross-sectional view showing a mold for glass molding of the third embodiment. Symbol 1 1 in the figure represents a substrate of a steel material. On the substrate ii, 'the crystallized cutting layer 1 2, the intermediate layer 13 and the release layer 14 are sequentially formed. Here, the 'cutting layer 12 is nickel containing p (phosphorus) 1% by weight ( Ni-10wt% P) alloy layer, intermediate layer 3 is a layer composed of nickel (Ni) The release layer 4 is an alloy layer containing ruthenium (Ir) and ruthenium (Re) and 3 at% of carbon (c). The glass molding die of Fig. 4 was produced as follows. First, a Ni-P electroless plating layer 100#m is formed on the substrate u of the steel material, and heat treatment is performed at 5 30 ° C for 2 hours to crystallize it to form a cutting layer of 1 2 ° and then 'with a diamond turning tool After the processing of the machined layer 12, the intermediate layer 13 made of 50 nm of Ni, and the release layer 14 of 300 nm of Ir, R e, and C are formed by sputtering to form a glass forming method. Mold 10 ° The glass forming mold of Example 3 10 ' As shown in Fig. 4' is a nickel alloy layer (cutting layer) 12 and Ni containing P (phosphorus) 10% by weight on the substrate 11 in this order. The intermediate layer 13 is composed of a release layer 14 containing Ir and Re and C. Further, in the mold 1 ,, after the cutting layer 12 is formed, heating is performed to crystallize the cut layer 12, and then the intermediate layer 13 and the release layer 14 are sequentially formed, so that the mold release layer during formation can be avoided. The surface roughness of 14 is deteriorated, and the glass can be prevented from being fused. Using the mold of the above-mentioned Example 3 and the molds of Comparative Examples 5 and 6, the state of the glass fusion and the surface roughness after heating at 470 °C were measured, and the results shown in Table 1 below were obtained. Example 3 represents the case where the steel composition of the release layer/intermediate layer/cutting layer/substrate is Ir-Re-C/Ni/Ni-P/steel. Comparative Example 5 represents the case where the steel composition is Ir-pt/Ni/Ni-P/steel. Comparative Example 6 represents the case where the steel composition is Ir-Re / Ni / Ni-P / steel. Thus, it is apparent that the present invention is indeed superior to the comparative example. [Table 1] Mold composition Glass-fusion mold release layer/intermediate layer/cutting surface roughness processing layer/substrate Example 3 Ir-Re-C/Ni/Ni-P/steel 500-time forming does not occur fusion Ra 2nm Comparative Example 5 Ir-Pt/Ni/Ni-P/Steel is fused at a first time of formation. Ra 8nm _Comparative Example 6 Ir-Re /Ni/Ni-P/Steel is fused once in a single formation. Ra2nm -11 - 200904764 As is clear from Table 1, in the case of Comparative Examples 5 and 6, fusion was performed as long as the shot was taken. In contrast, in Example 3, fusion was not performed even after 500 moldings. Further, regarding the surface roughness of the mold, Ra of Comparative Example 5 was as high as 8 nm, and Ra of Example 3 was only 2 nm. As can be seen from Table 1, the present invention is superior to the comparative examples in terms of glass fusion and surface roughness of the mold. (Embodiment 4) Fig. 5 is a partial cross-sectional view showing a mold for glass molding of the fourth embodiment. The same members as those in Fig. 4 are given the same reference numerals and the description thereof will be omitted. The glass molding die 15 is formed by sequentially forming a crystallized cutting layer 12 and a release layer 14 on a base material 1 1 of a steel material. The glass molding die 15 of Fig. 5 is produced as follows. First, a Ni-P electroless plating layer of 100 μm was formed on the substrate 11 of the steel material, and heat treatment was performed at 530 °C for 2 hours to crystallize it to form the cutting processing layer 12. Then, the machined layer 12 was processed by a diamond turning tool, and a release layer 14 composed of Ir, Re, and C of 300 nm was formed by sputtering to form a glass forming mold 15 as follows. In Example 4, although the adhesion strength between the machined layer 12 and the release layer 14 was slightly inferior to that of Example 3, the same effects as in Example 3 were obtained in terms of glass fusion and mold surface roughness. Further, the present invention is not limited to the above-described embodiments, and constituent elements may be modified and embodied in the scope of the invention without departing from the spirit and scope of the invention. It is also possible to form various inventions by appropriately combining a plurality of constituent elements shown in the above embodiments of -12-200904764. For example, several constituent elements may be deleted from all of the constituent elements disclosed in the embodiments. Furthermore, the constituent elements of the different embodiments can be combined as appropriate. Specifically, the materials, blending ratios, thicknesses, and the like of the members described in the above embodiments are merely examples, and the present invention is of course not limited thereto. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial cross-sectional view showing a mold for glass molding of Example 1 of the present invention. Fig. 2 is a characteristic diagram showing the relationship between the surface roughness after heating and the heating time of the molds of Example 1 and Comparative Example of the present invention. Fig. 3 is a partial cross-sectional view showing a mold for glass molding of Example 2 of the present invention. Fig. 4 is a partial cross-sectional view showing a mold for glass forming of Example 3 of the present invention. Fig. 5 is a partial cross-sectional view showing a mold for glass forming of Example 4 of the present invention. [Description of main component symbols] 1, 11 : Substrate 2, 1 2 : Machining layer 3, 1 3 : Intermediate layer 4, 14 : Release layer 5, 6, 1 〇, 15: Glass forming mold-13 -