CN116162899A - Titanium alloy cutting coating cutter and preparation method thereof - Google Patents

Titanium alloy cutting coating cutter and preparation method thereof Download PDF

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Publication number
CN116162899A
CN116162899A CN202310113194.5A CN202310113194A CN116162899A CN 116162899 A CN116162899 A CN 116162899A CN 202310113194 A CN202310113194 A CN 202310113194A CN 116162899 A CN116162899 A CN 116162899A
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layer
coating
cutter
composite layer
titanium alloy
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浦荣
于忠光
于浩南
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Guohong Tools System Wuxi Co ltd
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Guohong Tools System Wuxi Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation

Abstract

The invention discloses a titanium alloy cutting coating cutter and a preparation method thereof, wherein the titanium alloy cutting coating cutter comprises a cutter substrate and a multilayer coating deposited on the substrate, the multilayer coating sequentially comprises a transition layer, a periodic composite layer and a functional layer from the substrate side towards the surface side of the multilayer coating, and the periodic composite layer has an alternating lamination structure of alternately repeating a first composite layer and a second composite layer for more than two times. The transition layer and the first composite layer have the same chemical composition and are made of Ti 1‑x Al x A compound represented by N; the second composite layer and the functional layer have the same chemical composition and are made of Ti 1‑y‑z Si y B z And N represents a compound. The invention provides a titanium alloyJin Qiexiao coated cutting tool has high wear resistance, chipping resistance, high temperature resistance and oxidation resistance, and the bonding strength between the coating and the matrix is high, the production process is simple, and the production cost is low.

Description

Titanium alloy cutting coating cutter and preparation method thereof
Technical Field
The invention relates to the technical field of a coated cutter and a preparation method thereof, in particular to a titanium alloy cutting coated cutter and a preparation method thereof.
Background
Since the 60 s of the last century, tool coatings began to develop rapidly. On the basis of the traditional TiN and AlN coating, a large number of high-performance coatings, such as AlTiN, alCrN, tiSiN, tiCN and the like, are developed by adding Cr, si, C, O and other elements. In the coating structure, coatings with complex structures such as double-layer coatings, multi-layer coatings, laminated composite coatings, nano composite coatings and the like are gradually developed on the basis of single-layer coatings. In combination with the advanced coating process in recent years, the coating technology is continuously innovated, the coating system is continuously rich, and the coating performance is gradually strong.
There is a great deal of Si in the present 3 N 4 Relevant reports of BN reinforcing and toughening mechanisms, but in the field of physical vapor deposition, these reinforcing phases are difficult to exist in the form of fibers or particles in the coating. Since the solubility of Si and B in TiN phase is limited, si or B can form Si at grain boundary positions, respectively, in an excessive nitrogen atmosphere 3 N 4 Or BN phase. By regulating the thickness of the phase formed at the grain boundary, the amorphous film with a single layer thickness can be obtained to wrap the crystal grains and generate obvious fine crystal strengthening effect. In addition, the amorphous film can also prevent dislocation movement and grain rotation, and improve the mechanical property of the coating. Due to B in Si 3 N 4 Is less soluble in Si 3 N 4 On the basis of the phase, a proper amount of B element is doped, so that complex nitride containing Si-B-N bonds can be formed, and the tensile strength and high-temperature stability of an amorphous phase are further improved.
The invention patent CN104805408A reports a TiSiBN nano composite coating with high hardness, and the patent adopts a magnetron sputtering method to add B element on the basis of the traditional TiSiN nano composite coating, thereby further improving the hardness and the wear resistance of the coating. The TiSiB coating mainly comprises equiaxed TiN nano fine crystals wrapped by SiBN phase, and the hardness of the coating exceeds 40GP. But the coating has simple structure, tiSiBN nano composite coating and a substrate adopt TiB 2 The phase is used as a bonding layer, the interface strength is low, and larger hardness difference is easy to generate larger stress, so that the whole coating is peeled off and fails. At the same time, the patent does not make for the B content in TiSiBN coatingFurther, the form and content of each phase in the coating is not clearly defined. Patent CN110373639a reports a film having alternating a and B layers (Al x Ti 1-x-y W y )N/(Ti 1-z-u Si z W u ) N nano laminated coating structure, the coating has nano fine crystal structure, can effectively inhibit crack propagation, and improves the performances of fatigue wear resistance, crater wear resistance, fracture toughness, oxidation resistance and the like of the coating. However, the coating has no surface functional layer and no bonding layer, lacks lubricating elements, and is not suitable for difficult-to-process materials such as titanium alloy, high-temperature alloy and the like. The invention patent CN105112858A reports a multilayer nano-composite cutter coating comprising a CrN bonding layer, an AlTiN transition layer, an AlTiN/TiSiN supporting layer and a TiSiN functional layer, wherein the coating has higher hardness and good wear resistance. Compared with the traditional TiSiN single-layer and TiSiN/AlTiN double-layer coatings, the coating with the structure of the bonding layer, the transition layer, the supporting layer and the functional layer has obvious advantages in crack extension resistance, and the bonding force between the coating and the substrate is effectively improved due to the arrangement of the CrN bonding layer. However, the functional layer of the coating is still a traditional TiSiN layer, the use condition is still limited, and the performance is poor when cutting under the conditions of high temperature and high speed.
The titanium alloy has the characteristics of high strength, small modulus, small deformation coefficient, low heat conductivity and the like, so that the problems of workpiece rebound, high cutting temperature, obvious chilling phenomenon of the processed surface and the like can be generated during the processing of the titanium alloy. Long exposure to high temperatures not only causes oxidation of the coating, but also accelerates degradation, decomposition and failure of the coating. In addition, the rebound of the workpiece can enlarge the contact area between the cutter and the workpiece, and the bonding abrasion of the coating is increased while the cutting force is increased. Therefore, developing a coating suitable for use in cutting titanium alloys has become a challenge for those skilled in the art.
Disclosure of Invention
The invention aims to solve the technical problems of overcoming the defects of the prior art and providing a titanium alloy cutting coating cutter and a preparation method thereof, so that the titanium alloy cutting coating with higher wear resistance, chipping resistance, high temperature resistance and oxidation resistance is prepared by a simple process, conventional equipment and low production cost. In order to solve the problems, the invention provides the following technical scheme:
a titanium alloy cutting coating cutter and a preparation method thereof are provided, the titanium alloy cutting coating cutter comprises a cutter substrate and a multi-layer coating deposited on the cutter substrate, the multi-layer coating is composed of a transition layer, a periodic composite layer and a functional layer which are sequentially deposited on the cutter substrate, and the periodic composite layer has an alternating lamination structure of alternately repeating a first composite layer and a second composite layer for more than two times.
Preferably, the transition layer has the same chemical composition as the first composite layer and is composed of the compound Ti 1-x Al x N, wherein x represents an atomic ratio of Al element to all elements except N element in the compound (hereinafter simply referred to as "Al element content") and satisfies 0.50.ltoreq.x.ltoreq.0.75, more preferably 0.60.ltoreq.x.ltoreq.0.70. Because, if the content of Al element in the compound is x & gt 0.75, the wear resistance and the high temperature resistance of the coating are affected; when the content of Al element in the compound is x < 0.50, the wear resistance and oxidation resistance of the coating are affected. According to the experiments of the inventor, when the compound Ti 1-x Al x When the content of Al element in N is more than or equal to 0.50 and less than or equal to 0.75, the hardness of the N can be kept more than 30GPa, and c- (Ti, al) N with better high-temperature stability can be formed. In addition, the higher Al content also gives the coating a certain oxidation resistance. The coating performs well when cutting difficult materials, especially when cutting titanium alloys.
Preferably, the second composite layer and the functional layer have the same chemical composition and are composed of a compound Ti 1-y-z Si y B z And N, wherein y represents an atomic ratio of Si element to all elements except N element (hereinafter referred to simply as "Si element content") in the compound, and satisfies 0.10.ltoreq.y.ltoreq.0.25. Because, if the Si element content y in the compound is more than 0.25, the abrasion resistance of the coating is affected; when the content y of Si element in the compound is less than 0.10, the oxidation resistance and the wear resistance of the coating can be affectedAnd (5) sounding. According to the experiments of the inventor, when the compound Ti 1-y-z Si y B z When the content of Si element in N is more than or equal to 0.10 and less than or equal to 0.25, the concentration of Si atoms in the coating exceeds the solubility limit in TiN, so that Si can be formed 3 N 4 The amorphous phase encapsulates the TiN grains and produces a fine grain strengthening effect. Furthermore, the Si element in the coating can form SiO in actual cutting 2 The membrane prevents further permeation of oxygen, i.e. can improve the oxidation resistance of the coating. However, the inventors have also found that excessive amounts of Si element accelerate the cohesive wear of the coating. Wherein z represents an atomic ratio of B element in the compound to all elements except N element (hereinafter referred to simply as "B element content") and satisfies 0.05.ltoreq.z.ltoreq.0.12. Because, if the content of B element in the compound is z < 0.05, the abrasion resistance of the coating is affected; when the content of B element in the compound is z more than 0.12, the high temperature resistance of the coating can be influenced. According to the experiments of the inventor, the B element in the compound not only can play the solid solution strengthening effect, but also can be combined with Si 3 N 4 The amorphous phase forms a special network structure to inhibit Si 3 N 4 And the mechanical property and the structural stability of the Si-B-N amorphous film are improved at the same time of crystallization. In actual cutting, B with a low melting point is an oxidation product of BN 2 O 3 Therefore, the addition of B can also provide a certain self-lubricating effect. However, the inventors have also found that an excessive amount of B element reduces the grain boundary strength.
Preferably, in X-ray photoelectron spectroscopy (XPS) analysis of the multilayer coating, the peak separation treatment gives a spectrum pattern of N1s of 0.06.ltoreq.I Si3N4 +I BN )/(I Si3N4 +I BN +I TiN )≤0.30,0.4≤I Si3N4 /I BN Not more than 6, wherein I Si3N4 、I BN And I TiN Compound Ti in the periodic composite layer and the functional layer respectively 1-y-z Si y B z Si contained in N 3 N 4 Peak areas corresponding to (Si-N), BN (B-N) and TiN (Ti-N) in the N1s spectrum diagram. Because the Si and B atoms in the coating form Si in addition to 3 N 4 Can be dissolved in TiN lattice in addition to BNIn the method, the Si in the coating can be more accurately obtained by XPS analysis 3 N 4 (Si-N), BN (B-N) and TiN (Ti-N). If in the compound (I) Si3N4 +I BN )/(I Si3N4 +I BN +I TiN ) < 0.06 or (I) Si3N4 +I BN )/(I Si3N4 +I BN +I TiN ) At > 0.30, the abrasion resistance of the coating may be affected. If I in the compound Si3N4 /I BN When less than 0.40, the high temperature resistance and the chipping resistance of the coating are affected; and I Si3N4 /I BN At > 6, the abrasion resistance of the coating may be affected. For the above reasons, it is further preferable that 0.12.ltoreq.I Si3N4 +I BN )/(I Si3N4 +I BN +I TiN )≤0.20,0.6≤I Si3N4 /I BN Less than or equal to 1.5. According to the inventor experiment, firstly, when the Si-B-N amorphous film in the compound is a single-layer film thickness, the fine crystal strengthening effect is most obvious, and the coating has the best mechanical property; next, when Si 3 N 4 When the content of BN is in a specific proportion, the Si-B-N can form a special net structure, and the amorphous film has higher hardness and elastic modulus, so that the wear resistance, high temperature resistance and chipping resistance of the coating are improved.
Preferably, the thickness of the periodic composite layer accounts for 50% -80%, more preferably 60% -75% of the total thickness of the coating, and the thickness of the functional layer accounts for 10% -30%, more preferably 15% -25% of the total thickness of the coating. Because if the periodic composite layer is too thin, the chipping resistance of the coating layer may be affected; whereas if the functional layer is too thin, the wear resistance of the coating may be affected. According to the inventor experiment, the thickness ratio of each layer in the periodic composite coating can be adjusted to regulate the residual stress in the coating, and the wear resistance and chipping resistance of the coating can be balanced, so that the coating has the best comprehensive performance.
Preferably, the average thickness of the single layers of the first composite layers and the second composite layers alternately stacked in the periodic composite layers is 2nm to 30nm, and more preferably 5nm. Because, if the average thickness of the single layers of the first composite layer and the second composite layer in the periodic composite layer is more than 30nm, the wear resistance of the coating is affected; when the average thickness of the single layers of the first composite layer and the second composite layer is less than 2nm, the abrasion resistance and the chipping resistance of the coating are also affected. According to the inventor experiment, when the average thickness of single layers of the first composite layers and the second composite layers which are alternately laminated in the periodic composite layers is 2 nm-30 nm, the layer interfaces of adjacent layers in the periodic composite layers are complete and clear, superlattice reinforcement can be generated, and the interlayer expansion of cracks is restrained while the hardness of the coating is improved.
Preferably, the multilayer coating has an overall average thickness of 1 μm to 8 μm, more preferably 3 μm. Because, if the overall thickness of the multilayer coating is too small, the protection performance of the coating on the cutter is not obvious, and the wear resistance of the coating is affected; while too large can cause stress cracking of the coating, which can affect the chipping resistance of the coating.
Preferably, the structures of the transition layer, the periodic composite layer and the functional layer of the multilayer coating are all face-centered cubic structures. Because, when the transition layer, the periodic composite layer and the functional layer are of face-centered cubic structure, the compound Ti in the transition layer and the periodic composite layer 1-x Al x N is mainly the crystal lattice of c-TiN, al atoms are embedded into the crystal lattice of c-TiN to form c-AlN, and the crystal lattice distortion and the hardness are increased. Compared with w-AlN, c-AlN has better high temperature resistance and wear resistance. In addition, when the compound Ti in the periodic composite layer 1-x Al x N and Ti 1-y-z Si y B z When N is in a face-centered cubic structure, the first composite layers and the second composite layers which are deposited alternately are easier to generate a superlattice strengthening phenomenon through a template effect of coherent epitaxial growth.
Preferably, a bonding layer is further present between the tool substrate and the multilayer coating, the bonding layer is composed of a compound composed of at least one element selected from the group consisting of Al, cr, ti, V, zr, nb, ta, mo, W, B, C, si, N, O elements, and the bonding layer has an average thickness of 10nm to 50nm, and more preferably 20nm to 30nm. According to the inventor experiment, the bonding layer with lower hardness and better plasticity is arranged between the cutter substrate and the multi-layer coating, so that the stress mismatch between the coating and the substrate can be reduced, and the bonding strength between the coating and the substrate can be improved.
Preferably, in nano indentation analysis of the multilayer coating, 36Gpa is less than or equal to H is less than or equal to 42Gpa,280Gpa is less than or equal to E is less than or equal to 340Gpa, and 0.50 is less than or equal to H is satisfied 3 /E 2 And less than or equal to 0.70, wherein H is the hardness of the multiple layers, and E is the elastic modulus of the multiple layers of the coating. Because if H 3 /E 2 When the wear resistance of the coating is less than or equal to 0.50, the wear resistance of the coating can be influenced; and H is 3 /E 2 The chipping resistance of the coating layer is affected at 0.70 or more. According to the experiments of the inventor and related literature, the related formula H of the hardness and the elastic modulus is calculated 3 /E 2 A coefficient may be obtained, which is also referred to as "plastic deformation resistance factor (Plastic Deformation Resistance Factor)". The anti-plastic deformation factor can be used for approximately measuring the wear resistance of the coating, and the larger the numerical value is, the more tends to be elastically deformed when the coating is loaded, and the coating is not easy to crack; the smaller the value, the less elastic deformation of the coating is suppressed and chipping is likely to occur, but the hardness is often high at this time, so that the wear resistance of the coating is good. For the above reasons, more preferably, 0.60.ltoreq.H 3 /E 2 ≤0.68。
In the above technical solutions, the thicknesses of the layers of the multilayer coating and the adhesive layer may be directly measured from the section of the coated tool by using a detection device such as an Optical Microscope (OM), a Scanning Electron Microscope (SEM), a Transmission Electron Microscope (TEM), or indirectly measured and calculated by using a ball milling pit method; the chemical components of each layer of the multilayer coating can be analyzed and detected from the section of the coating cutter by using detection equipment such as an X-ray Energy Dispersive Spectrometer (EDS) or an X-ray Wavelength Dispersive Spectrometer (WDS); the crystal structure of each layer of the multilayer coating can be determined from the coated tool surface using X-ray diffraction (XRD) or Transmission Electron Microscopy (TEM); the chemical state of each element of the multilayer coating can be determined from the coated tool surface using X-ray photoelectron spectroscopy (XPS); the hardness, the elastic modulus and the plastic deformation resistance factor of the multilayer coating can be obtained by measuring and calculating the hardness, the elastic modulus and the plastic deformation resistance factor of the multilayer coating from the surface of the coating by using a nano indentation instrument. The detection method and the standard of the coating performance specifically refer to international standard ISO 21874:2019.
The invention also provides a preparation method of the titanium alloy cutting coating cutter, which comprises the following preparation steps of:
(1) Pretreating a cutter matrix;
(2) Selectively depositing a bonding layer on the surface of the tool substrate;
(3) And adopting a physical vapor deposition process multi-target alternate deposition mode to deposit a transition layer through a TiAl target, depositing a periodic composite layer with an alternate lamination structure through the TiAl target and a TiSiB target, and depositing a functional layer through the TiSiB target to obtain the titanium alloy cutting coating cutter.
The deposition process in the above-mentioned preparation step is not particularly limited, and various physical vapor deposition processes known to those skilled in the art may be used, and examples thereof include an ion plating process, a sputter plating process, a plasma plating process, and the like. Preferably, the multi-layer coating is prepared by an ion plating process, because the ion plating process has the advantages of high deposition efficiency, good film base combination, low deposition temperature and the like. Further preferably, the multi-layer coating is prepared using a multi-arc ion plating process.
In the above technical solutions, the tool substrate may be various cutting tools known to those skilled in the art, and is suitable for use in cemented carbide tools, cermet tools or high speed steel tools, especially cemented carbide tools.
Advantageous effects
Compared with the prior art, the invention has the beneficial effects that:
1. the Ti compound is obtained by adding Si and B elements with specific contents on the basis of TiN 1-y-z Si y B z The periodic composite layer and the functional layer of N, si element and B element can form continuous Si-B-N amorphous film around TiN crystal grain to block the growth of TiN crystal grain and to refine crystal grain. A certain amount of B element can be used for amorphousNet Si 3 N 4 The phase is further strengthened, the strength and hardness of the amorphous film are improved, part of B atoms can be positioned in gaps of TiN grains to realize solid solution strengthening effects, and the strengthening effects can effectively improve the compound Ti contained in the periodic composite layer and the functional layer 1-y-z Si y B z Mechanical properties of N, such as hardness, fracture toughness, tensile strength, and the like. The added B atoms and Si atoms can improve the oxidation resistance and self-lubricating capability of the coating. The periodic composite layer with an alternate laminated structure is arranged between the functional layer and the transition layer, so that the propagation of cracks can be restrained, the stress level of the coating is optimized, and the possibility of stress cracking of the coating is reduced. The periodic composite layer contains a compound Ti 1-x Al x N first composite layer and containing compound Ti 1-y-z Si y B z The second composite layer of N has similar crystal structure and a fixed mould difference, and can generate superlattice reinforcement through coherent epitaxial growth, so that the interlayer bonding strength of the periodic composite layer and the overall mechanical property of the coating are improved. The high bonding strength of the coating is ensured by arranging the bonding layer with high toughness and low hardness between the cutter substrate and the multilayer coating. The invention also provides a preparation method for the titanium alloy cutting coating cutter, which has simple process, conventional equipment and low production cost. The coated cutting tool prepared by the method has wide application range, high processing efficiency and long service life, can meet the cutting processing of titanium alloy under various conditions, and is particularly suitable for the cutting processing of titanium alloy under various conditions.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view showing the structure of a multilayer coating in example 1 of the present invention;
FIG. 2 is a schematic illustration of an embodiment of the present inventionThe multilayer coating of example 1 contains the compound Ti 1-y-z Si y B z N1s spectrum pattern was analyzed by X-ray photoelectron spectroscopy (XPS) of N.
In the drawings, the list of components represented by the various numbers is as follows:
1. a cutter base; 2. a bonding layer; 3. a multi-layer coating; 4. a transition layer; 5. a periodic composite layer; 5a, a first composite layer; 5b, a second composite layer; 6. functional layer.
Detailed Description
The invention is further described below with reference to the drawings and specific examples.
The present embodiment is only for explanation of the present invention and is not to be construed as limiting the present invention, and modifications to the present embodiment, which may not creatively contribute to the present invention as required by those skilled in the art after reading the present specification, are all protected by patent laws within the scope of claims of the present invention. The medicines used in the following examples are available from regular sources unless otherwise specified.
Embodiment one:
a titanium-containing alloy cutting coating tool and a method for producing the same according to the present invention, as shown in FIG. 1, comprises a tool base body 1 and a multilayer coating 3 deposited on the tool base body 1. The multilayer coating 3 comprises a transition layer 4 deposited on the tool substrate 1, a periodic composite layer 5 deposited on the transition layer 4, and a functional layer 6 deposited on the periodic composite layer 5. Furthermore, a tie layer 2 is selectively deposited between the tool base body 1 and the multilayer coating 3. By adjusting the target material components and deposition parameters, the bonding layer 2 is specifically a TiSiB metal compound layer; the transition layer 4 is specifically Ti 0.37 Al 0.63 N, average thickness of 0.5 μm; the periodic composite layer 5 is specifically Ti 0.79 Si 0.13 B 0.08 N/Ti 0.37 Al 0.63 N, the layer is made of Ti 0.79 Si 0.13 B 0.08 N layer and Ti 0.37 Al 0.63 The periodic composite layer obtained by alternately depositing N layers is specifically 200 periods, the average thickness is 2.0 mu m, and Ti 0.37 Al 0.63 N first composite layer 5a has an average thickness of 4nm, wherein Ti 0.79 Si 0.13 B 0.08 The average thickness of the N second composite layer 5b single layer is 6nm; the functional layer 6 is specifically Ti 0.79 Si 0.13 B 0.08 N, average thickness was 0.5. Mu.m. In this example, the multilayer coating 3 had an overall average thickness of 3.0 μm, a hardness of 39.4GPa, an elastic modulus of 315.6GPa, H 3 /E 2 0.61.
The preparation method of the titanium alloy cutting coating cutter comprises the following preparation steps:
(1) Cleaning a substrate: ultrasonic cleaning is carried out on the cutter to remove oil stains and impurities on the surface, and drying is carried out for standby;
(2) Ion etching: putting the cutter into a vacuum coating furnace, and slowly vacuumizing to 1X 10 -5 After mba, the vacuum furnace chamber is filled with proper argon gas to maintain the pressure in the chamber at 2X 10 -3 mba, when the vacuum coating furnace is heated to the temperature of 500 ℃ of the furnace chamber, the cutter is loaded with negative bias of-200V, and Ar is accelerated + Ion bombardment is carried out on the surface of the cutter for 30 minutes to improve the bonding strength between the coating and the matrix, so as to form a coated cutter matrix 1;
(3) Depositing a bonding layer: introducing proper argon gas into the vacuum furnace chamber to maintain the pressure in the furnace chamber at 0.8X10 - 2 B, introducing 180A current to the TiSiB target, loading-80V bias voltage to the cutter, and depositing a TiSiB bonding layer 2 on the surface of the cutter substrate 1 for 2 minutes;
(4) Depositing a transition layer: introducing 200sccm nitrogen into the vacuum furnace chamber to maintain the pressure in the furnace chamber at 3.2X10 - 2 mba, 180A current is introduced into the TiAl target, and a cutter is loaded with-80V bias voltage, ti is deposited on the surface of the TiSiB bonding layer 2 0.37 Al 0.63 An N transition layer 4, wherein the deposition time is 10 minutes;
(5) Depositing a periodic composite layer: introducing 600sccm nitrogen gas into the vacuum furnace chamber to maintain the air pressure in the furnace chamber at 3.2X10 -2 mba, 180A current is led into the TiAl target, 150A current is led into the TiSiB target, and a-80V bias voltage is loaded on the cutter, and the alloy is prepared by the following steps of 0.37 Al 0.63 Deposition of Ti with alternate layered structure on the surface of the N transition layer 4 0.79 Si 0.13 B 0.08 N/Ti 0.37 Al 0.63 N period composite layer 5, the rotation speed of the big disc is set to 3.5rpm, so that Ti 0.37 Al 0.63 N first composite layer 5a and Ti 0.79 Si 0.13 B 0.08 The N second composite layers 5b are sequentially and alternately deposited for 30 minutes;
to form Ti 0.37 Al 0.63 N first composite layer 5a and Ti 0.79 Si 0.13 B 0.08 The N second composite layers 5b are alternately laminated for more than two times, the cutter is simultaneously rotated and revolved in the furnace chamber by adopting a transmission mode with three-order axial rotation, and more than two targets are symmetrically placed in the furnace chamber, thereby Ti 0.37 Al 0.63 The surface of the N transition layer 4 is deposited to form Ti with an alternate lamination structure 0.79 Si 0.13 B 0.08 N/Ti 0.37 Al 0.63 N-cycle composite layer 5. By adjusting the rotation rate of the rotating structure, ti which is alternately laminated can be adjusted 0.37 Al 0.63 N first composite layer 5a and Ti 0.79 Si 0.13 B 0.08 The single-layer average thickness of the N second composite layer 5b is adjusted. More specifically, if the rotational speed of the rotating structure is faster, the average thickness of the single layer decreases, and vice versa increases.
(6) Depositing a coating functional layer: introducing 400sccm nitrogen into the vacuum furnace chamber to maintain the pressure in the furnace chamber at 3.2X10 -2 mb, 150A current is introduced into the TiSiB target, the cutter is loaded with-80V bias voltage, ti is deposited on the surface of the periodic composite layer 5 0.79 Si 0.13 B 0.08 N functional layer 6, deposition time 10 minutes.
In the embodiment, a multi-arc ion plating process multi-target alternate deposition mode is adopted, a bonding layer is deposited through a TiSiB target, a TiAl target deposition transition layer is deposited through a TiAl target and a TiSiB target, a periodic composite layer with an alternate lamination structure is deposited through the TiAl target and the TiSiB target, and a functional layer is deposited through the TiSiB target, so that the titanium alloy cutting coating cutter is obtained. The other examples below all had the same preparation steps as the present example, unless otherwise specified.
In this embodiment, the tool substrate 1 is a four-edge round nose cemented carbide milling cutter, and the milling cutter structure and material parameters are as follows:
angle of peripheral edge rake angle: 8 °;
angle of peripheral edge relief: 10 °;
helix angle: 40 °;
diameter of blade: 6mm;
the diameter of the handle: 8mm;
cutter material: cobalt content 9%, hardness 93.7HRA, and granularity 0.2-0.4.
The tool substrate of the control was the same as in example 1, and a commercially available AlTiN coating was deposited using a multi-arc ion plating process, the coating being of a single layer structure with a thickness of 3.0 μm.
The tool base structure and material parameters in the other examples below, as well as the control coated tools used, were the same as in the example without any particular description.
The coated tool prepared in this example 1 and the control was used for a milling experiment of titanium alloy (TC 4), and when the maximum wear width of the rear face of the tool was not less than 0.3mm, the tool was considered to have failed, and the cumulative processing time was recorded as the tool life, and the results of the comparative experiment are shown in Table 1 below:
table 1: comparative experiment results of inventive example 1 with control
Figure BDA0004077642070000101
As can be seen from table 1, the service life of the multilayer coated tool of the present invention is increased by 109% when milling titanium alloy compared with AlTiN coated tools of the prior art under the conditions of identical tool structure and identical cutting conditions. The coating technology of the embodiment is obviously improved in performance compared with the prior art.
Embodiment two:
a titanium-containing alloy cutting coating tool and a method for producing the same according to the present invention, as shown in FIG. 1, comprises a tool base body 1 and a multilayer coating 3 deposited on the tool base body 1. The multilayer coating 3 comprises a transition layer 4 deposited on the tool substrate 1, a periodic composite layer 5 deposited on the transition layer 4, and a functional layer 6 deposited on the periodic composite layer 5. In addition, inAn adhesive layer 2 is selectively deposited between the substrate 1 and the multilayer coating 3. By adjusting the target material components and deposition parameters, the bonding layer 2 is specifically a TiSiB metal compound layer; the transition layer 4 is specifically Ti 0.37 Al 0.63 N, average thickness of 0.6 μm; the periodic composite layer 5 is specifically Ti 0.79 Si 0.13 B 0.08 N/Ti 0.37 Al 0.63 N, the layer is made of Ti 0.79 Si 0.13 B 0.08 N layer and Ti 0.37 Al 0.63 The periodic composite layer obtained by alternately depositing N layers is 150 periods, the average thickness is 1.5 mu m, ti 0.37 Al 0.63 The average thickness of the N first composite layer 5a monolayer is 4nm, wherein Ti 0.79 Si 0.13 B 0.08 The average thickness of the N second composite layer 5b is 6nm; the functional layer 6 is specifically Ti 0.79 Si 0.13 B 0.08 N, average thickness was 0.9. Mu.m. In this example, the multilayer coating 3 had an overall average thickness of 3.0 μm, a hardness of 40.5GPa, an elastic modulus of 343.8GPa, H 3 /E 2 0.56.
The coated tool prepared in this example 2 and the control was used for a milling experiment of titanium alloy (TC 4), and when the maximum wear width of the rear face of the tool was not less than 0.3mm, the tool was considered to have failed, and the cumulative processing time was recorded as the tool life, and the results of the comparative experiment are shown in Table 2 below:
table 2: comparative experiment results of inventive example 2 with control
Figure BDA0004077642070000111
As can be seen from table 2, the service life of the multilayer coated tool of the present invention is 100% longer than that of the AlTiN coated tool of the prior art when milling titanium alloy under the conditions of identical tool structure and identical cutting conditions. Compared with the embodiment 1, the thickness ratio of the functional layer to the periodic composite layer is improved from 1:4 to 3:5, but the technical effect is close to the performance compared with the embodiment 1.
Embodiment III:
the invention relates to a titanium-containing alloy cutting coatingA layered tool and a method for its production, as shown in fig. 1, comprises a tool base body 1 and a multilayer coating 3 deposited on the tool base body 1. The multilayer coating 3 comprises a transition layer 4 deposited on the tool substrate 1, a periodic composite layer 5 deposited on the transition layer 4, and a functional layer 6 deposited on the periodic composite layer 5. Furthermore, an adhesive layer 2 is selectively deposited between the substrate 1 and the multilayer coating 3. By adjusting the target material components and deposition parameters, the bonding layer 2 is specifically a TiSiB metal compound layer; the transition layer 4 is specifically Ti 0.37 Al 0.63 N, average thickness is 0.2 μm; the periodic composite layer 5 is specifically Ti 0.79 Si 0.13 B 0.08 N/Ti 0.37 Al 0.63 N, the layer is made of Ti 0.79 Si 0.13 B 0.08 N layer and Ti 0.37 Al 0.63 The periodic composite layer obtained by alternately depositing N layers is 100 periods, the average thickness is 1.0 mu m, ti 0.37 Al 0.63 N first composite layer 5a has an average thickness of 4nm, wherein Ti 0.79 Si 0.13 B 0.08 The average thickness of the N second composite layer 5b is 6nm; the functional layer 6 is specifically Ti 0.79 Si 0.13 B 0.08 The N functional layer has an average thickness of 0.3 μm. In this example, the multilayer coating 3 had an overall average thickness of 1.5. Mu.m, a hardness of 38.7GPa, an elastic modulus of 318.5GPa, H 3 /E 2 0.57.
The coated tool prepared in this example 3 and the control was used for a milling experiment of titanium alloy (TC 4), and when the maximum wear width of the rear face of the tool was not less than 0.3mm, the tool was considered to have failed, and the cumulative processing time was recorded as the tool life, and the results of the comparative experiment are shown in Table 3 below:
table 3: comparative experiment results of inventive example 3 with control
Figure BDA0004077642070000121
As can be seen from table 3, the service life of the multilayer coated tool of the present invention was increased by 50% when milling titanium alloy, compared to AlTiN coated tools of the prior art, under the same tool structure and the same cutting conditions. The present example reduced the overall thickness of the multilayer coating by 50% as compared to example 1, but the technical effect was significantly reduced as compared to example 1.
Embodiment four:
a titanium-containing alloy cutting coating tool and a method for producing the same according to the present invention, as shown in FIG. 1, comprises a tool base body 1 and a multilayer coating 3 deposited on the tool base body 1. The multilayer coating 3 comprises a transition layer 4 deposited on the tool substrate 1, a periodic composite layer 5 deposited on the transition layer 4, and a functional layer 6 deposited on the periodic composite layer 5. Furthermore, an adhesive layer 2 is selectively deposited between the substrate 1 and the multilayer coating 3. By adjusting the target material components and deposition parameters, the bonding layer 2 is specifically a TiSiB metal compound layer; the transition layer 4 is specifically Ti 0.37 Al 0.63 N, average thickness of 1.0 μm; the periodic composite layer 5 is specifically Ti 0.79 Si 0.13 B 0.08 N/Ti 0.37 Al 0.63 N, the layer is made of Ti 0.79 Si 0.13 B 0.08 N layer and Ti 0.37 Al 0.63 The periodic composite layer obtained by alternately depositing N layers is 500 periods, the average thickness is 5.0 mu m, ti 0.37 Al 0.63 N first composite layer 5a has an average thickness of 4nm, wherein Ti 0.79 Si 0.13 B 0.08 The average thickness of the N second composite layer 5b is 6nm; the functional layer 6 is specifically Ti 0.79 Si 0.13 B 0.08 N, average thickness was 1.5. Mu.m. In this example, the multilayer coating 3 had an overall average thickness of 7.5 μm, a hardness of 40.3GPa, an elastic modulus of 316.4GPa, H 3 /E 2 0.65.
The coated tools prepared in this example 4 and the control were used for a milling experiment of titanium alloy (TC 4), and when the maximum wear width of the rear face of the tool was not less than 0.3mm, the tool was considered to have failed, and the cumulative processing time was recorded as the tool life, and the results of the comparative experiment are shown in Table 4 below:
table 4: comparative experiment results of inventive example 4 with control
Figure BDA0004077642070000131
As can be seen from table 4, the service life of the multilayer coated tool of the present invention was 73% longer than that of the AlTiN coated tool of the prior art when milling titanium alloy under the same tool structure and the same cutting conditions. The present example increased the overall thickness of the multilayer coating by 150% compared to example 1, but the technical effect was slightly lower than that of example 1.
Fifth embodiment:
a titanium-containing alloy cutting coating tool and a method for producing the same according to the present invention, as shown in FIG. 1, comprises a tool base body 1 and a multilayer coating 3 deposited on the tool base body 1. The multilayer coating 3 comprises a transition layer 4 deposited on the tool substrate 1, a periodic composite layer 5 deposited on the transition layer 4, and a functional layer 6 deposited on the periodic composite layer 5. Furthermore, an adhesive layer 2 is selectively deposited between the substrate 1 and the multilayer coating 3. By adjusting the target material components and deposition parameters, the bonding layer 2 is specifically a TiSiB metal compound layer; the transition layer 4 is specifically Ti 0.37 Al 0.63 N, average thickness of 0.5 μm; the periodic composite layer 5 is specifically Ti 0.79 Si 0.13 B 0.08 N/Ti 0.37 Al 0.63 N, the layer is made of Ti 0.79 Si 0.13 B 0.08 N layer and Ti 0.37 Al 0.63 The periodic composite layer obtained by alternately depositing N layers is 300 periods, the average thickness is 2.0 mu m, ti 0.37 Al 0.63 The N first composite layer 5a has an average thickness of 2.5nm, wherein Ti 0.79 Si 0.13 B 0.08 The average thickness of the N second composite layer 5b is 4nm; the functional layer 6 is specifically Ti 0.79 Si 0.13 B 0.08 N, average thickness was 0.5. Mu.m. In this example, the multilayer coating 3 had an overall average thickness of 3.0 μm, a hardness of 40.1GPa, an elastic modulus of 324.1GPa, H 3 /E 2 0.61.
The coated tools prepared in this example 5 and the control were used for a milling experiment of titanium alloy (TC 4), and when the maximum wear width of the rear face of the tool was not less than 0.3mm, the tool was considered to have failed, and the cumulative processing time was recorded as the tool life, and the results of the comparative experiment are shown in Table 5 below:
table 5: comparative experiment results of inventive example 5 with control
Figure BDA0004077642070000141
As can be seen from table 5, the service life of the multilayer coated tool of the present invention was 132% longer than the AlTiN coated tool of the prior art when milling titanium alloys under the same tool configuration and the same cutting conditions. Compared with the embodiment 1, the single-layer average thickness of the first composite layer and the second composite layer which are alternately deposited in the periodic composite layer is reduced by 33%, and the technical effect is obviously improved compared with the embodiment 1.
Example six:
a titanium-containing alloy cutting coating tool and a method for producing the same according to the present invention, as shown in FIG. 1, comprises a tool base body 1 and a multilayer coating 3 deposited on the tool base body 1. The multilayer coating 3 comprises a transition layer 4 deposited on the tool substrate 1, a periodic composite layer 5 deposited on the transition layer 4, and a functional layer 6 deposited on the periodic composite layer 5. Furthermore, an adhesive layer 2 is selectively deposited between the substrate 1 and the multilayer coating 3. By adjusting the target material components and deposition parameters, the bonding layer 2 is specifically a TiSiB metal compound layer; the transition layer 4 is specifically Ti 0.37 Al 0.63 N, average thickness of 0.5 μm; the periodic composite layer 5 is specifically T i0.79 Si 0.13 B 0.08 N/Ti 0.37 Al 0.63 N, the layer is T i0.79 Si 0.13 B 0.08 N layer and Ti 0.37 Al 0.63 The periodic composite layer obtained by alternately depositing N layers is particularly 135 periods, the average thickness is 2.0 mu m, ti 0.37 Al 0.63 N first composite layer 5a has an average thickness of 6nm in a monolayer, wherein T i0.79 Si 0.13 B 0.08 The average thickness of the N second composite layer 5b is 9nm; the functional layer 6 is specifically T i0.79 Si 0.13 B 0.08 N, average thickness was 0.5. Mu.m. In this example, the multilayer coating 3 had an overall average thickness of 3.0 μm, a hardness of 39.0GPa, an elastic modulus of 317.9GPa, H 3 /E 2 0.59.
The coated tools prepared in this example 6 and the control were used for milling experiments on titanium alloy (TC 4), and when the maximum wear width of the rear face of the tool was not less than 0.3mm, the tool was considered to have failed, and the cumulative processing time was recorded as the tool life, and the results of the comparative experiments are shown in Table 6 below:
table 6: comparative experiment results of inventive example 6 with control
Figure BDA0004077642070000151
As can be seen from table 6, the service life of the multilayer coated tool of the present invention was increased by 82% when milling titanium alloy compared to AlTiN coated tools of the prior art, under the same tool configuration and the same cutting conditions. Compared with the embodiment 1, the average thickness of the single layer of the first composite layer and the single layer of the second composite layer which are alternately deposited in the periodic composite layer are increased by 50%, and the technical effect is slightly reduced compared with the embodiment 1.
Embodiment seven:
a titanium-containing alloy cutting coating tool and a method for producing the same according to the present invention, as shown in FIG. 1, comprises a tool base body 1 and a multilayer coating 3 deposited on the tool base body 1. The multilayer coating 3 comprises a transition layer 4 deposited on the tool substrate 1, a periodic composite layer 5 deposited on the transition layer 4, and a functional layer 6 deposited on the periodic composite layer 5. Furthermore, an adhesive layer 2 is selectively deposited between the substrate 1 and the multilayer coating 3. By adjusting the target material components and deposition parameters, the bonding layer 2 is specifically a TiSiB metal compound layer; the transition layer 4 is specifically Ti 0.37 Al 0.63 N, average thickness of 0.5 μm; the periodic composite layer 5 is specifically Ti 0.73 Si 0.19 B 0.08 N/Ti 0.37 Al 0.63 N, the layer is made of Ti 0.73 Si 0.19 B 0.08 N layer and Ti 0.37 Al 0.63 The periodic composite layer obtained by alternately depositing N layers is specifically 200 periods, the average thickness is 2.0 mu m, and Ti 0.37 Al 0.63 N first composite layer 5a has an average thickness of 4nm in a monolayer, whichMedium Ti 0.73 Si 0.19 B 0.08 The average thickness of the N second composite layer 5b is 6nm; the functional layer 6 is specifically Ti 0.73 Si 0.19 B 0.08 N, average thickness was 0.5. Mu.m. In this example, the multilayer coating 3 had an overall average thickness of 3.0 μm, a hardness of 38.4GPa, an elastic modulus of 330.8GPa, H 3 /E 2 0.52.
The coated tools prepared in this example 7 and the control were used for a milling experiment of titanium alloy (TC 4), and when the maximum wear width of the rear face of the tool was not less than 0.3mm, the tool was considered to have failed, and the cumulative processing time was recorded as the tool life, and the results of the comparative experiment are shown in Table 7 below:
table 7: comparative experiment results of inventive example 7 with control
Figure BDA0004077642070000161
As can be seen from table 7, the service life of the multilayer coated tool of the present invention was 41% longer than that of the AlTiN coated tool of the prior art when milling titanium alloy under the same tool structure and the same cutting conditions. In this example, the functional layer and the compound Ti in the periodic composite layer are compared with example 1 1-y-z Si y B z The atomic ratio of Si element in N to all elements except N element in the compound is increased by 46%, and the technical effect is obviously reduced compared with that of the embodiment 1.
Example eight:
a titanium-containing alloy cutting coating tool and a method for producing the same according to the present invention, as shown in FIG. 1, comprises a tool base body 1 and a multilayer coating 3 deposited on the tool base body 1. The multilayer coating 3 comprises a transition layer 4 deposited on the tool substrate 1, a periodic composite layer 5 deposited on the transition layer 4, and a functional layer 6 deposited on the periodic composite layer 5. Furthermore, an adhesive layer 2 is selectively deposited between the substrate 1 and the multilayer coating 3. By adjusting the target material components and deposition parameters, the bonding layer 2 is specifically a TiSiB metal compound layer; the transition layer 4 is specifically Ti 0.37 Al 0.63 N, average thickness of 0.5 μm; cycle timeThe composite layer 5 is specifically Ti 0.81 Si 0.14 B 0.05 N/Ti 0.37 Al 0.63 N, the layer is made of Ti 0.81 Si 0.14 B 0.05 N layer and Ti 0.37 Al 0.63 The periodic composite layer obtained by alternately depositing N layers is specifically 200 periods, the average thickness is 2.0 mu m, and Ti 0.37 Al 0.63 N first composite layer 5a has an average thickness of 4nm, wherein Ti 0.81 Si 0.14 B 0.05 The average thickness of the N second composite layer 5b is 6nm; the functional layer 6 is specifically Ti 0.81 Si 0.14 B 0.05 N/Ti 0.37 A 0.63 N, average thickness was 0.5. Mu.m. In this example, the multilayer coating 3 had an overall average thickness of 3.0 μm, a hardness of 39.2GPa, an elastic modulus of 319.7GPa, H 3 /E 2 0.59.
The coated tool prepared in this example 8 and the control was used for a milling experiment of titanium alloy (TC 4), and when the maximum wear width of the rear face of the tool was not less than 0.3mm, the tool was considered to have failed, and the cumulative processing time was recorded as the tool life, and the results of the comparative experiment are shown in Table 8 below:
table 8: comparative experiment results of inventive example 8 with control
Figure BDA0004077642070000171
As can be seen from table 8, the service life of the multilayer coated tool of the present invention was increased by 95% when milling titanium alloy, compared to AlTiN coated tools of the prior art, under the same tool configuration and the same cutting conditions. In this example, the functional layer and the compound Ti in the periodic composite layer are compared with example 1 1-y-z Si y B z The atomic ratio of the element B in N relative to all elements except the element N in the compound is reduced by 37.5%, and the technical effect is slightly lower than that of the embodiment 1.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.

Claims (10)

1. A titanium alloy cutting coating cutter and a preparation method thereof, comprising a cutter substrate and a multilayer coating deposited on the cutter substrate, and is characterized in that: the multilayer coating comprises a transition layer, a periodic composite layer and a functional layer in sequence from the side of the cutter substrate towards the surface of the multilayer coating, wherein the periodic composite layer has an alternating lamination structure of alternately repeating a first composite layer and a second composite layer for more than two times, the transition layer and the first composite layer have the same chemical composition and are composed of a compound shown in the following formula (1),
Ti 1-x Al x N(1)
in the formula (1), x represents an atomic ratio of Al element relative to all elements except N element in the compound, and satisfies 0.50.ltoreq.x.ltoreq.0.75,
the second composite layer and the functional layer have the same chemical composition and are composed of a compound shown in the following formula (2),
Ti 1-y-z Si y B z N(2)
in the formula (2), y represents the atomic ratio of Si element relative to all elements except N element in the compound, and satisfies 0.10-0.25; in the formula (2), z represents an atomic ratio of B element to all elements except N element in the compound, and satisfies 0.05.ltoreq.z.ltoreq.0.12.
2. The titanium alloy cutting coating cutter and the preparation method thereof according to claim 1, wherein the cutting coating cutter is characterized in that: in X-ray photoelectron spectroscopy (XPS) analysis of the multilayer coating, the spectrum diagram of N1s obtained after peak separation treatment is not more than 0.06 + (I Si3N4 +I BN )/(I Si3N4 +I BN +I TiN )≤0.30,0.4≤I Si3N4 /I BN Not more than 6, wherein I Si3N4 、I BN And I TiN Compound Ti in the periodic composite layer and the functional layer respectively 1-y-z Si y B z Si contained in N 3 N 4 Peak areas corresponding to (Si-N), BN (B-N) and TiN (Ti-N) in the N1s spectrum diagram.
3. The titanium alloy cutting coating cutter and the preparation method thereof according to claim 1, wherein the cutting coating cutter is characterized in that: the thickness of the periodic composite layer accounts for 50-80% of the total thickness of the multilayer coating, and the thickness of the functional layer accounts for 10-30% of the total thickness of the multilayer coating.
4. A titanium alloy cutting coating tool and method of making same as defined in claim 3, wherein: the average thickness of the single layers of the first composite layers and the second composite layers which are alternately laminated in the periodic composite layers is 2 nm-30 nm.
5. A titanium alloy cutting coating tool and method of making same as defined in claim 3, wherein: the overall average thickness of the multilayer coating is 1-8 mu m.
6. The titanium alloy cutting coating cutter and the preparation method thereof according to claim 5, wherein the cutting coating cutter is characterized in that: the transition layer, the periodic composite layer and the functional layer in the multilayer coating all have face-centered cubic structures.
7. A titanium alloy cutting coating tool and a method of making the same according to any one of claims 1-6, characterized in that: and a bonding layer is also arranged between the cutter matrix and the multilayer coating, the bonding layer is formed by a compound formed by at least one element selected from a group of elements consisting of Al, cr, ti, V, zr, nb, ta, mo, W, B, C, si, N, O, and the average thickness of the bonding layer is 10-50 nm.
8. A titanium alloy cutting coating tool and a method of making the same according to any one of claims 1-7, wherein: in the nano indentation analysis of the multilayer coating, H is more than or equal to 36Gpa and less than or equal to 42Gpa,280Gpa is less than or equal to E and less than or equal to 340Gpa, and satisfies 0.50 is less than or equal to H 3 /E 2 And less than or equal to 0.70, wherein H is the hardness of the multiple layers, and E is the elastic modulus of the multiple layers of the coating.
9. The titanium alloy cutting coating tool and the preparation method thereof according to any one of claims 1 to 8, wherein: the cutter matrix material is any one of hard alloy, metal ceramic or high-speed steel cutters.
10. A titanium alloy cutting coating tool and a method of manufacturing the same according to any one of claims 1 to 9, comprising the steps of:
(1) Pretreating a cutter matrix;
(2) Selectively depositing a bonding layer on the surface of the tool substrate;
(3) And adopting a physical vapor deposition process multi-target alternate deposition mode to deposit a transition layer through a TiAl target, depositing a periodic composite layer with an alternate lamination structure through the TiAl target and a TiSiB target, and depositing a functional layer through the TiSiB target to obtain the titanium alloy cutting coating cutter.
CN202310113194.5A 2023-02-14 2023-02-14 Titanium alloy cutting coating cutter and preparation method thereof Pending CN116162899A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117265478A (en) * 2023-11-21 2023-12-22 赣州澳克泰工具技术有限公司 Composite coating cutter and preparation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117265478A (en) * 2023-11-21 2023-12-22 赣州澳克泰工具技术有限公司 Composite coating cutter and preparation method thereof
CN117265478B (en) * 2023-11-21 2024-01-30 赣州澳克泰工具技术有限公司 Composite coating cutter and preparation method thereof

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