200900750 P61960008TW 24013twf,doc/n 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種彩色濾光片以及其製造方法，且 特別疋有關於一種由贺墨印刷（inkjet printing，IJP )方式 形成的彩色淚光片以及其製造方法。 【先前技術】 Ο Ο 一般液晶顯示器之彩色濾光片製程，乃採用三原色之 彩色光阻(photo resist)經過三道黃光微影(ph〇t〇lith〇graphy) 製程，將三個彩色光阻薄膜依序形成於基板上的晝素内， 而形成彩色濾光片。由於彩色光阻薄膜的形成乃是將彩色 光阻液滴在基板上，接著以旋轉的方式均勻的塗佈於基板 上’因此大部分彩色光阻會在旋轉的過程中被浪費掉，而 且衫色光阻的價格昂貴，這樣的製作方式成本較高。此外， 所採用的黃光鄕製程，f要制A量的有齡劑，有造 成裱境汙染的疑慮。 -多^ :—種利时墨印刷，UP)形成 ^色遽光片的方法已被發展出來。喷墨印刷法可同時喷墨 二内’相較於傳統_ ,,./、光微和裏％，可以減少大量的製程與材料成 印刷技術具有大面積與捲軸製造⑽Μ— -此:喷ί印刷技術來製造彩色遽光片仍然存在 二問通例如’當喷印的精準度不佳的時候，容易會有 5 200900750 P61960008TW 24013twf.doc/n 混色的現象發生，通常混色現象是由於兩個或三個顏色重 疊或擴散所造成的，混色現象會使晝素内的色彩偏差且色 飽和度不佳’進而導致顯不面板發生顯示品質不良的問 題。然而，由於喷墨印刷的精準度往往受到墨滴量、喷嘴 以及系統機械精度限制，故噴墨印刷過程中所發生的誤差 是無法避免。因此，在製程中如何避免混色現象的發生， 儼然成為高品質彩色濾光片的重要議題之—。200900750 P61960008TW 24013twf, doc/n IX. Description of the Invention: [Technical Field] The present invention relates to a color filter and a method of fabricating the same, and in particular to an inkjet printing (IJP) A colored tear film formed by the method and a method of manufacturing the same. [Prior Art] Ο Ο The color filter process of a general liquid crystal display is a three-color lithography process using a three-color photo resist through three yellow lithography processes. Formed in the halogen on the substrate in sequence to form a color filter. Since the color photoresist film is formed by dropping a color photoresist on a substrate and then uniformly coating it on the substrate in a rotating manner, most of the color photoresist is wasted during the rotation, and the shirt is Color photoresists are expensive, and such production methods are costly. In addition, the yellow enamel process used, f to produce A amount of ageing agent, has doubts about the pollution caused by the environment. - Multi ^ : - The method of forming a color light film has been developed. The inkjet printing method can simultaneously inject two inks in comparison with the traditional _, .., light micro and 5%, can reduce a large number of processes and materials into printing technology with a large area and reel manufacturing (10) Μ - this: ί Printing technology to produce color enamel film still has two questions. For example, when the accuracy of printing is not good, it is easy to have 5 200900750 P61960008TW 24013twf.doc/n mixed color phenomenon, usually the color mixing phenomenon is due to two or The color mixing phenomenon caused by the overlap or diffusion of the three colors causes the color deviation and the color saturation in the halogen to be poor, which leads to the problem that the display quality of the panel is poor. However, since the accuracy of inkjet printing is often limited by the amount of ink droplets, nozzles, and mechanical accuracy of the system, errors that occur during inkjet printing are unavoidable. Therefore, how to avoid the phenomenon of color mixing in the process has become an important issue for high-quality color filters.
ϋ 圖1Α至1C為利用習知的喷墨印刷方式所製作的彩色 濾光片之剖面示意圖。請參照圖1Α，彩色濾光片1〇〇包括 一基板110以及配置於基板Π0上之—擋牆12〇，其中擋 牆120具多個開口 Ρ (圖丨中僅繪示出—個開口）了請^ 照圖1B，為了防止色阻溢出或是相互混染的問題，通常會 在擔踏120的表面上進行疏水處理伽办〇沖〇此 ⑽tment) ’以於擔牆120的表面上形成含氟之疏水 12卜 接著請參照圖1C，將色阻13G P舰ng)的方式喷人開π P中。由圖lc可知，對擔牆12〇 表面進行疏水處理將有祕解決;的色阻13〇彼此 相互混色_題:詳言之，當喷墨印刷精準度不佳時，部 性薄膜121表面上的色阻130不易附著於疏 水性賴121上，而自動被限制在開口 p之内，較不易與 周圍之其他顏色的色阻13〇互相混色。 H當液晶顯示器的解析度越高時’聽12〇的寬 度1吊$作進—步的縮減’以獲得所需要的開口率 6 200900750 P61960008TW 24013twf.doc/n (aperture ratio)，當擋牆l2〇的寬度縮減時，其疏水能力便 會因疏水表面積縮小而降低，進而使得色阻13〇的自我定 位忐力降低，以致於增加混色現象的發生機率。因此，如 何有效避免不同顏色之色阻產生彼此重疊混色的現象，乃 是高品質彩色濾、光片之重要議題之一。 【發明内容】 〇 本發明提供一種具有良好色彩飽和度的彩色濾光片。 本發明提供一種製作良率高之彩色濾光片的製造方 法。 本發明提出一種彩色濾光片，此彩色濾光片包括一基 板、多個彩色濾光薄膜，以及多個疏水性薄膜。彩色濾光 薄膜配置於基板上，疏水性薄膜覆蓋於至少部分之彩色濾 光薄膜的表面上。 在本發明之一實施例中，上述之基板包括硬質基板 (rigid sub_te)或是可撓性基板(flexible substrate)。 " 在本發明之一實施例中，上述之彩色濾光薄膜包括多 個第一彩色濾光薄膜以及多個第二彩色濾光薄膜。其中第 一彩色濾光薄膜與第二彩色濾光薄膜分別具有不同顏色’ 且疏水性薄膜至少覆蓋於第一彩色濾光薄膜的表面上。 在本發明之一實施例中，上述之彩色濾光片包括多個 第一彩色濾光薄膜、多個第二彩色濾光薄膜以及多個第三 彩色濾光薄膜。其中第一彩色濾光薄膜、第二彩色濾光薄 膜以及第三彩色濾光薄膜分別具有不同顏色，且疏水性薄 200900750 P61960008TW 24013twf.doc/n 膜至少覆蓋於第一彩色濾光薄膜的表面上。此外，疏水性 薄膜亦可進一步覆蓋於第二彩色濾光薄膜的表面上。 在本發明之一實施例中，上述之彩色濾光片更包括一 配置於基板上之擋牆，其中擋牆具有多個暴露出基板之開 口，而彩色濾光薄膜配置於開口所暴露出之基板上。 在本發明之一實施例中，上述之彩色濾光薄膜的材料 包括不同顏色的色阻，而疏水性薄膜包括含氟之色阻。 〇 本發明提出一種彩色濾光片的製造方法，其包括下列 步驟。首先，提供一基板，並於基板上形成多個第一彩色 遽光薄膜。接著，對第-彩色濾光薄膜進行疏水性處理， 並於基板上形成多個第二彩色濾光薄膜，其中第一彩色濾 光薄膜與第二彩色濾光薄膜分別具有不同顏色。 心 ，本發明之—實施射，對第—彩色濾、㈣膜進行疏 7 '处理的方法包括使用含氣之電漿對第—彩色濾光薄膜1A to 1C are schematic cross-sectional views of a color filter fabricated by a conventional ink jet printing method. Referring to FIG. 1A, the color filter 1A includes a substrate 110 and a retaining wall 12〇 disposed on the substrate 〇0, wherein the retaining wall 120 has a plurality of openings Ρ (only one opening is shown in the figure) Please, according to Fig. 1B, in order to prevent the color resistance from overflowing or the problem of mutual contamination, the hydrophobic treatment is usually performed on the surface of the tread 120 to form a (10) tment) 'to form on the surface of the wall 120. The fluorine-containing hydrophobic 12b is then sprayed into the πP by referring to FIG. 1C and the color resisting 13G P ship ng). It can be seen from Fig. 1c that the hydrophobic treatment of the surface of the wall 12 will be solved by secret treatment; the color resistance 13〇 is mixed with each other _ Title: In detail, when the accuracy of inkjet printing is not good, the surface of the partial film 121 The color resist 130 is less likely to adhere to the hydrophobic layer 121, and is automatically confined within the opening p, and is less likely to be mixed with the color resists 13 of other colors in the surroundings. HWhen the resolution of the liquid crystal display is higher, 'listen to the width of 12 1 1 hang $ for the step - reduce the step' to obtain the required aperture ratio 6 200900750 P61960008TW 24013twf.doc/n (aperture ratio), when the retaining wall l2 When the width of the crucible is reduced, the hydrophobic ability is reduced by the reduction of the hydrophobic surface area, which in turn causes the self-positioning force of the color resistance 13〇 to decrease, so as to increase the probability of occurrence of color mixing. Therefore, how to effectively avoid the color mixture of different colors to produce overlapping colors is one of the important topics of high-quality color filter and light film. SUMMARY OF THE INVENTION The present invention provides a color filter having good color saturation. The present invention provides a method of manufacturing a color filter having a high yield. The present invention provides a color filter comprising a substrate, a plurality of color filter films, and a plurality of hydrophobic films. The color filter film is disposed on the substrate, and the hydrophobic film covers the surface of at least a portion of the color filter film. In an embodiment of the invention, the substrate comprises a rigid substrate or a flexible substrate. < In an embodiment of the invention, the color filter film comprises a plurality of first color filter films and a plurality of second color filter films. The first color filter film and the second color filter film respectively have different colors' and the hydrophobic film covers at least the surface of the first color filter film. In an embodiment of the invention, the color filter comprises a plurality of first color filter films, a plurality of second color filter films, and a plurality of third color filter films. The first color filter film, the second color filter film, and the third color filter film respectively have different colors, and the hydrophobic thin film 200900750 P61960008TW 24013twf.doc/n film covers at least the surface of the first color filter film. . Further, the hydrophobic film may further cover the surface of the second color filter film. In an embodiment of the invention, the color filter further includes a retaining wall disposed on the substrate, wherein the retaining wall has a plurality of openings exposing the substrate, and the color filter film is disposed at the opening. On the substrate. In one embodiment of the invention, the material of the color filter film described above comprises color resists of different colors, and the hydrophobic film comprises a color resist of fluorine. The present invention proposes a method of manufacturing a color filter comprising the following steps. First, a substrate is provided, and a plurality of first color light-emitting films are formed on the substrate. Next, the first color filter film is subjected to a hydrophobic treatment, and a plurality of second color filter films are formed on the substrate, wherein the first color filter film and the second color filter film respectively have different colors. Heart, the method of the present invention, which performs the treatment of the first color filter and the (four) film, comprises the use of a plasma containing gas to the first color filter film.
=面進行表面處理，以於第—彩色濾光薄朗表面 成多個疏水性薄膜。 ^本發明之—實施财，上述之彩色濾光4的製造方 包括於基板上形成—擔牆，其中擋牆具有多個 ^出基板之開Π，而第-彩色濾、光薄膜以及第二彩色滅 先溥犋配置於開口所暴露出之基板上。 第-實施例中’上述之第-彩色濾光薄膜與 乐一知色濾先薄膜的形成方法包括噴墨印刷。 在本發明之一實施例中，上述之 法可進-步包括㈣一 ％，土— ②絲片的k方 匕括對弟—Α色遠切騎行疏水性處理。接 200900750 P61960008TW 24013twf.doc/n 著，再於基板上形成多個第三彩色濾、光薄膜， 色處光薄膜、第二彩色濾㈣膜以及第 ^ 別具有不同顏色。 在本發明之一實施例申，對第二彩色 的=括使用含氟之電漿對第 ==理’以於第二彩色渡光薄膜的表面上形 〇 、在本發明之—實施例中，上述之彩色渡光片的製造方 法I進一步包括於基板上形成一擋牆，其中擒牆具有多個 暴露出基板之開口’而第-彩色濾光薄膜、第二彩色滅光 薄膜以及第三彩色濾光薄膜配置於開口所暴露出之=板 上。 〃在本發明之-實施例中，上述之第一彩色爐光薄膜、 第二彩色縣薄膜以及第三彩色濾光薄膜的形成方法包括 喷墨印刷。 基於上述，本發明在彩色濾光薄膜上形成疏水性薄 膜，可防止因噴墨印刷設備對位精準度不佳所導致之色阻 互相混色、色彩飽和度不佳的問題。 為讓本發明之上述和其他目的、特徵和優點能更明顯 易懂，下文特舉較佳實施例，並配合所附圖式，作詳細說 明如下。 【實施方式】 【第一實施例】 200900750 P61960008TW 24013twf.d〇c/n 圖到圖2F為本發明第一實施例之彩色濾光片之製 作流程示意圖。首先請參照圖2Λ，提供一基板210 ,此基 板210的材質例如是玻璃等硬質基板，或是塑膠等可撓性 基板。接著，以黃光微影製程在基板上形成擋牆220，此 擋牆220具有多個暴露出基板210之開口 Ρ。在本實施例 中，播牆220可採用透光率低、反射係數小的材質，如不 透光金屬薄膜、含有黑色染料的樹脂，或是同時使用不透 〇 光金屬薄膜與含有黑色染料的樹脂。 “請參照圖2Β，於基板210上形成多個第一彩色滤光 薄膜22卜詳言之，本實施例可藉由喷墨頭23〇將第一色 阻221a噴印於部分開口 ρ所暴露出的基板21〇上，以於部 分開口 P中形成第一彩色濾光薄膜221。 請參照圖2C ’接著對第—彩色濾光_ 221的表面 進行疏水性處理。詳言之，本實施例可使用含氟之電聚 S210對第-彩色濾光薄膜221的表面進行疏水性處理，以 於第一彩色滤'光薄膜奶的表面上形成第一疏水性薄膜 J 24〇a。換言之，第一疏水性薄膜240a之材料可以是含氟之 色阻。此處，含氟之電漿S210所使用的氣體源例如是四 氟化碳(CFO、六氟化硫(SF0)或是其他含氟之氣體。 請參照圖2D，於基板21G上形成多個 薄膜奶。詳言之，本實施例可藉由喷墨頭 阻223a喷印於其他開口 ρ所暴露出的基板2ι〇上，以於盆 他開口 P中形成第二彩色濾光薄膜223。值得注意的是了 由於第一彩色濾光膜221 |面已經具有第一疏水性薄膜 200900750 P61960008TW 24013twf.doc/n 240a’故在將第二色阻22如喷印於開口 ρ 滤光膜片223時’第二色阻223嗜無法附著^第= ^膜，上，而自我定位流入預定的擔騰22() /， 如此-來’第二色阻现便不會殘留於第—彩色 ，: 221上主’而與第一彩色濾光薄膜221產生混色的問 清參照圖2 Ε，接著對第二彩色渡喊 〇 ο 性=;:!之’本實施例可使用含氣之電二: -办色4先;桃223的表面進行疏水性處理，以於… 色濾光薄膜223的表面上形成多個第_ ^弟一杉 換言之，第：疏水性薄膜纖 (CF4)、六齓化硫(卯6)或是其他含氣之氣體。 膜^^ΓΓί板210上形成多個第三彩色濾光薄 225_Pmtn藉由喷墨頭230將第三色阻 所暴露出之基板210上，以於其 遽光膜221表面已經呈有第15。由於第一彩色 色濾光膜223表面也已2二她;膜施，且第二彩 ㈣^具有弟二疏水性薄膜2働，故在 L日Γί，喷印於開口p以形成第三彩色濾、光膜片 ilt 5a便無法附著於第一彩色濾、光薄膜221 223上’而自我定位流人預定的播 口 P。如此-來’第三色阻225“更不會殘留於 匕二色滤光薄膜221以及第二彩色遽、光薄膜223上，而 二：⑽膜221或第二彩色_膜223產生混 11 200900750 P61960008TW 24013twf.doc/n 【弟一實施例】 圖3A到圖3F為本發明第二實施例之彩色濾光片之製 作方法的剖面流程示意圖。本實施例與第—實施例相似， 惟兩者不同處在於，本實施例不需先形成擋牆。The surface is surface-treated to form a plurality of hydrophobic films on the surface of the first color filter. In the invention, the manufacturing method of the color filter 4 includes forming a wall on the substrate, wherein the retaining wall has a plurality of openings of the substrate, and the first color filter, the light film, and the second The color squeezing is disposed on the substrate exposed by the opening. In the first embodiment, the above-described method of forming the first color filter film and the color filter film includes ink jet printing. In an embodiment of the present invention, the above method may further comprise (four) one percent, and the k-square of the soil-two filament sheet comprises a hydrophobic treatment of the pair-black-colored far-cut riding. Connected to 200900750 P61960008TW 24013twf.doc/n, and then formed a plurality of third color filter, light film on the substrate, the color light film, the second color filter (four) film and the second have different colors. In an embodiment of the present invention, the second color includes the use of a fluorine-containing plasma pair for the surface of the second color light-transmitting film, in the embodiment of the present invention. The manufacturing method I of the color light-passing sheet further includes forming a retaining wall on the substrate, wherein the sidewall has a plurality of openings exposing the substrate, and the first-color filter film, the second color-extinction film, and the third The color filter film is disposed on the plate exposed by the opening. In the embodiment of the present invention, the method for forming the first color furnace film, the second color film, and the third color filter film described above includes inkjet printing. Based on the above, the present invention forms a hydrophobic film on a color filter film, which prevents the problem of color mixing and color saturation caused by poor alignment accuracy of the ink jet printing apparatus. The above and other objects, features and advantages of the present invention will become more <RTIgt; [Embodiment] [First Embodiment] 200900750 P61960008TW 24013twf.d〇c/n FIG. 2F is a schematic flow chart showing the manufacturing process of the color filter of the first embodiment of the present invention. First, referring to Fig. 2A, a substrate 210 is provided. The material of the substrate 210 is, for example, a rigid substrate such as glass or a flexible substrate such as plastic. Next, a retaining wall 220 is formed on the substrate by a yellow lithography process, and the retaining wall 220 has a plurality of openings 暴露 exposing the substrate 210. In this embodiment, the broadcast wall 220 may be made of a material having a low light transmittance and a small reflection coefficient, such as an opaque metal film, a resin containing a black dye, or a combination of a light-impermeable metal film and a black dye. Resin. Referring to FIG. 2A, a plurality of first color filter films 22 are formed on the substrate 210. In this embodiment, the first color resist 221a can be printed on the partial opening ρ by the inkjet head 23〇. The first color filter film 221 is formed in the partial opening P. The surface of the first color filter 221 is hydrophobically treated. Referring to FIG. 2C, the surface of the first color filter 221 is subjected to hydrophobic treatment. The surface of the first color filter film 221 may be subjected to a hydrophobic treatment using a fluorine-containing electropolymer S210 to form a first hydrophobic film J 24〇a on the surface of the first color filter 'light film milk. In other words, the first The material of the hydrophobic film 240a may be a color resistance of fluorine. Here, the gas source used for the fluorine-containing plasma S210 is, for example, carbon tetrafluoride (CFO, sulfur hexafluoride (SF0) or other fluorine-containing). Referring to FIG. 2D, a plurality of film milks are formed on the substrate 21G. In detail, the embodiment can be printed on the substrate 2 ι exposed by the other openings ρ by the ink jet head resistor 223a. A second color filter film 223 is formed in the opening P of the pot. It is worth noting that A color filter film 221 has a first hydrophobic film 200900750 P61960008TW 24013twf.doc/n 240a', so when the second color resist 22 is printed on the opening ρ filter film 223, the second color resistance 223 I can't attach ^^^^, on, and self-positioning into the intended burden 22() /, so - the second color is not left in the first color,: 221 on the main 'and A color filter film 221 produces a color mixture. Referring to FIG. 2, and then to the second color, 性ο sex=;:! 'This embodiment can use gas-containing electricity two: - color 4 first; peach The surface of 223 is subjected to a hydrophobic treatment to form a plurality of the first surface of the color filter film 223, in other words, a hydrophobic film fiber (CF4), a hexafluoride (卯6) or a gas containing gas. A plurality of third color filter thin films 225_Pmtn are formed on the substrate 210 by the inkjet head 230 to expose the surface of the calender film 221 to the third color resist. It has been shown to be 15. Since the surface of the first color filter film 223 has also been 2; her film, and the second color (4) has a hydrophobic film 2 Therefore, in the L-day, the ink is printed on the opening p to form a third color filter, and the light film lint 5a cannot be attached to the first color filter and the light film 221 223, and self-positions the predetermined broadcast port P. - The 'third color resistance 225' will not remain on the second color filter film 221 and the second color film 223, and the second: (10) film 221 or the second color film 223 will be mixed 11 200900750 P61960008TW 24013 twf.doc/n [Embodiment] FIG. 3A to FIG. 3F are schematic cross-sectional views showing a method of fabricating a color filter according to a second embodiment of the present invention. This embodiment is similar to the first embodiment except that the difference between the two is that the present embodiment does not need to form a retaining wall first.
首先，請參照圖3A。提供一基板31〇，此基板31〇的 材質例如是玻璃等硬質基板，或是塑膠等可撓性基板。接 於基板310上形成多個第—彩色濾光薄膜3=。。詳 言之，本實施例可藉由喷墨頭33〇將第一色阻Kb喷印於 基板310上’以於基板310上形成第一彩色濾光薄膜321。 請參照® 3B ’接著對第-彩色濾光薄膜奶進行疏 ^性處理。詳言之’本實施例可使用含氣之電裝剛對 弟一彩色濾光薄膜321的表面進行疏水性處理，以於第一 ^色濾光薄膜32!的表面上形成第一疏水性_遍。換 二之丄第-疏水性薄膜340a之材料可以是含氟之色阻。此 f，/氟之電聚削所使用的氣體源例如是四氣化碳(cF4) 或疋，、鼠化硫(SF6)或是其他含氟之氣體。First, please refer to FIG. 3A. A substrate 31 is provided, and the material of the substrate 31 is, for example, a rigid substrate such as glass or a flexible substrate such as plastic. A plurality of first color filter films 3= are formed on the substrate 310. . In detail, in this embodiment, the first color resist Kb is printed on the substrate 310 by the ink jet head 33' to form the first color filter film 321 on the substrate 310. Please refer to ® 3B ’ followed by the treatment of the first color filter film milk. In detail, the present embodiment can perform hydrophobic treatment on the surface of the color filter film 321 using a gas-containing electric package to form a first hydrophobicity on the surface of the first color filter film 32! all over. The material of the second-hydrophobic film 340a may be a color resistance of fluorine. The gas source used for the electric fusion of the f, / fluorine is, for example, four gasified carbon (cF4) or helium, sulphurized sulfur (SF6) or other fluorine-containing gas.
繼續料板_上形成多個第二彩色 詳言之，本實施例可藉由喷墨頭330將色 购於第一彩色渡光薄膜321旁邊的基板31〇上， 糸祕濾光賴323。值得注意的是，由於第一 將第:^321 S面已經具有第—疏水性薄膜340a，故在 片?喷印於基板310上以形成第二彩色濾光膜 321上，阻3fa便無法附著於第一彩色渡光薄膜 我疋位於第一彩色濾光薄膜321旁的基板MO 12 200900750 P61960008TW 24013twf.doc/n 上。如此' 弟二色阻323a便不會殘留於第一彩色濾光 薄膜321上’而與第—彩色濾光薄膜321產生、、θ / & 水性1〜濾光薄膜323進行疏 此處理^之’本貫施例可使用含氟 弟二彩色濾、光薄膜323的表面進行疏水 ^ 對Further, a plurality of second colors are formed on the material sheet. In detail, in this embodiment, the substrate 31 is printed on the substrate 31 next to the first color light-receiving film 321 by the ink-jet head 330, and the filter 323 is secreted. It should be noted that since the first surface: ^321 S surface already has the first hydrophobic film 340a, the film is printed on the substrate 310 to form the second color filter film 321, and the resistor 3fa cannot be attached. The first color light-emitting film is located on the substrate MO 12 200900750 P61960008TW 24013twf.doc/n next to the first color filter film 321 . Thus, the second color resist 323a does not remain on the first color filter film 321 and is generated by the first color filter film 321, and the θ / & aqueous 1 to filter film 323 is treated. 'The present embodiment can use the surface of the fluorine-containing color filter and the light film 323 for hydrophobic pairing
Ο 的表面上形成多個第二疏二 色阻。二，性薄膜鳩之材料可以是含氟之 氟化石ncA L鼠？電漿S31〇所使用的氣體源例如是四 虱化^(CF4)、六氟化硫(SF6)或是其他含氟之氣體。 於基板310上形成多個第三彩色慮光薄 、 砰5之，本實施例可藉由噴墨頭330將第三色阻 喷印於其餘暴露出樣板則上，以於基板則上形 成弟二彩色濾、光薄膜325。由於第一彩色渡光膜321表面 已故具有第-疏水性薄膜340a，且第二彩色濾光膜323表 面也已經具有第一疏水表薄膜34〇b，故在將第二色阻325a 喷印於基板31〇上以形成第三彩色遽光膜片第三 色阻32已a便無法附著於第一彩色濾光薄膜切以及第二彩 色濾光薄膜323上’而自我定位於其餘暴露出之基板31〇 如此一來，第三色阻325a便不會殘留於第一彩色濾光 薄，321以及第二彩色濾光薄膜323上，而與第一彩色濾 光薄膜321或第二彩色濾光薄膜323產生混色的問題。 练上所述，本發明在部分的色阻喷印完成之後，隨即 進行色阻表面的疏水性處理，有助於改善不同顏色之色阻 彼此混色的問題，進而提昇彩色濾光片的製造良率。此外， 13 200900750 P61960008TW 24013twf.doc/n 本發明可改善因混色所導致之色彩飽和度不佳的問題。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作些許之更動與潤飾，因此本發明之=護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1A至1C為習知的一種利用喷墨印刷方式所製作的 彩色滤光片之剖面流程示意圖。 圖2A到圖2F為本發明第一實施例之彩色淚光片之 作流程示意圖。 " 圖3 A到圖3 e為本發明第二實施例之彩色濾光片之製 作流程不意圖。 【主要元件符號說明】 P :開口 Ο 11〇 :基板 120 :擋牆 130 :色阻 121 :疏水性薄膜 223 :彩色濾光薄膜 230 :噴墨頭 sl10 :含氟之電漿 200 :彩色濾光片 14 200900750 P61960008TW 24013twf.doc/n 210 :基板 220 :擋牆 221a :第一色阻 221 :第一彩色濾光薄膜 223a :第二色阻 223 :第二彩色濾光薄膜 225a :第三色阻 225 :第三彩色濾光薄膜 230 :喷墨頭 240a :第一疏水性薄膜 240b :第二疏水性薄膜 S210 :含氟之電漿 300 :彩色濾光片 310 :基板 321a :第一色阻 321 :第一彩色濾光薄膜 323a :第二色阻 323 :第二彩色濾光薄膜 325a :第三色阻 325 :第三彩色濾光薄膜 330 :喷墨頭 340a :第一疏水性薄膜 340b :第二疏水性薄膜 S310 :含氟之電漿 15A plurality of second bismuth resistances are formed on the surface of Ο. Second, the material of the film can be fluorine-containing fluorite ncA L mouse? The gas source used in the plasma S31 is, for example, tetrasulfide (CF4), sulfur hexafluoride (SF6) or other fluorine-containing gas. A plurality of third color light-reducing thin films 砰5 are formed on the substrate 310. In this embodiment, the third color resist is printed on the remaining exposed template by the inkjet head 330, so as to form a brother on the substrate. Two color filters, light film 325. Since the surface of the first color light-transmitting film 321 has a first hydrophobic film 340a, and the surface of the second color filter film 323 already has the first hydrophobic film 34〇b, the second color resist 325a is printed. Forming the third color light-receiving film on the substrate 31 to form a third color light-receiving film, the third color resist 32 is not attached to the first color filter film and the second color filter film 323, and self-aligning to the remaining exposed In this manner, the third color resist 325a does not remain on the first color filter thin film 321 and the second color filter film 323, but is combined with the first color filter film 321 or the second color filter. The film 323 causes a problem of color mixing. As described above, after the partial color resist printing is completed, the hydrophobic treatment of the color resistive surface is performed, which helps to improve the color mixing of the different colors, thereby improving the color filter manufacturing. rate. Further, 13 200900750 P61960008TW 24013twf.doc/n The present invention can improve the problem of poor color saturation due to color mixing. While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection = the scope defined in the attached patent application shall prevail. BRIEF DESCRIPTION OF THE DRAWINGS Figs. 1A to 1C are schematic cross-sectional views showing a conventional color filter produced by an ink jet printing method. 2A to 2F are schematic views showing the flow of a color tear film according to a first embodiment of the present invention. " Fig. 3A to Fig. 3e are diagrams showing the flow of the color filter of the second embodiment of the present invention. [Description of main component symbols] P: Opening Ο 11〇: Substrate 120: Retaining wall 130: Color resistance 121: Hydrophobic film 223: Color filter film 230: Inkjet head sl10: Fluoride-containing plasma 200: Color filter Sheet 14 200900750 P61960008TW 24013twf.doc/n 210 : Substrate 220 : Retaining wall 221a : First color resist 221 : First color filter film 223a : Second color resist 223 : Second color filter film 225a : Third color resist 225: third color filter film 230: inkjet head 240a: first hydrophobic film 240b: second hydrophobic film S210: fluorine-containing plasma 300: color filter 310: substrate 321a: first color resistance 321 a first color filter film 323a: a second color filter 323: a second color filter film 325a: a third color filter 325: a third color filter film 330: an inkjet head 340a: a first hydrophobic film 340b: Two hydrophobic film S310: fluorine-containing plasma 15