200848836 九、發明說明： 【發明所屬之技術領域】 々本發明係關於樣品之分光測定、膜厚測定、反射率測定 "等所利用之顯微測定裝置。本發明之顯微測定裝置，例如 • 了適5利用於檢查液晶顯示裝置之彩色漉光片的光學特 性。 【先前技術】 ζ X 液日日”"員不叙置之彩色濾·光片，係以R、G、Β三色之淚光 片所構成。其中一 R濾光片之存在範圍被稱為一像素，一 G濾光片之存在範圍被稱為一像素，且一 Β濾光片之存在 範圍被稱為一像素。 當要實施評估此一彩色濾光片之光學特性時，係使顯微 測定裝置之檢測範圍（監視區域）對準R像素的中心部而 測疋該中心部之透過光譜、色度（chr_at卜丨ty)、白平衡 度專。其次’ G像素也實施同樣之測定，而β像素也實施 I 同樣之測定。 圖4表示樣品之檢測範圍υ的圖。 以往，如圖4所示，檢測範圍υ其大小係比一像素更小。 此一測定大小比一像素更小之檢測範圍U的理由，係因 被認為彩色濾光片的像素内之色度、透過率大致係均勻 者。 但是，最近隨著彩色濾光片之像素的大型化及生產方法 的變更，一像素内的彩色濾光片之膜厚並不均勻，因此， 被指出彩色濾光片之色度、透過率亦非均勻地分佈。因 97105533 6 200848836 此，必須評估一像素全體之色度、透過率。 因此，檢測範圍u被希望並非以往之小的固定尺寸，而 係可變尺寸者。 此一使檢測範圍u成為可變，係和使顯微測定之倍率成 為可變同樣的意思。 圖3係以往所使用之實施測定彩色濾光片等的光學特 性之一般的顯微測定裝置之概略構成圖。 此一顯微測定裝置中，透過或反射樣品S的光，係通過 $鏡Lo»而藉物鏡l〇被變換為平行光線。平行光線通過固 疋在鏡ιί之中間透鏡Li再藉設在上述中間透鏡[丨而和上 述物鏡Lo的相反侧之半鏡mirr〇r), 一部份原 狀地通過，另一部份則被反射。 由2原狀地通過上述半鏡的光，在觀察用攝影機18 之觀祭位置聚集成焦點，因此，樣品可藉觀察用攝影機 18而被映出在監視顯示器上。 另方面，藉上述半鏡HM所被反射的光，在檢測器i 6 ^欢測位置《集成焦點，而在此處實施分光測定、膜厚測 定、反射率測定等。 例如’通常中間透鏡Li的焦點距離為200ram，而10倍 物鏡之焦點距離為2〇_。因此， 率（中間透鏡Li之焦點距離）/(物鏡L〇之焦點距 離）=2〇〇/20=1() 在中間影像位置則可得到10倍的影像。 在.、、員彳政測定裝置中如要藉由檢測器1 6實施檢測及 97105533 7 200848836 ’如要變更檢測範圍 須更換不同倍率的物 藉由觀察用攝影機18而實施觀察時 的大小或變更觀察影像的大小，則必 鏡Lo來使用。 參照圖3即可得知，這是因為 Μ 4^ ^ l· l n , T间透鏡Ll被固定在顯 U鏡同上，而檢測器16、觀察用 中 m . l , ^ 辑〜枝18之位置也被固 疋，因此，如要以不同倍率來實 、也I、、、負被测定時，則必馆里 更換物鏡Lo。 只】义肩要 但是當在更換物鏡L〇時，物镑τ • τ奶鏡Lo之ΝΑ (開口數·· numerical aperture，數值孔徑）則奋料 —伯* ΜΛ > J則會、交更，而必須作測 疋值之Μ校正。 用攝4: 測倍率變更時，與其聯動而觀察 用攝418之觀察範圍也會變更。χ，相反地如觀察用 攝影機18的觀察範圍變更時，則檢測器16之檢測倍率也 會變更。 斤特別是以光纖構成檢測H 16時，如果要使樣品之檢測 耗圍擴大，則必須要將光纖的ΝΑ也擴大，因此，光纖之 直徑則變粗，而會減低㈣之可撓性而會使其變成容易折 ，且造成處理之不方便。因此，有觀察用攝影機18之觀 察範圍受到光纖之粗細限制之問題。 又如使物鏡Lo的倍率變小而使檢測範圍擴大時，則 以觀察用攝影貞18所觀察到之影像其擴大率也有變小之 問題。 【發明内容】 本么明之目的為提供一種在安裝有物鏡之顯微測定裝 97105533 200848836 置中，不必更換物鏡即可使顯微測定裝置的倍率及/或檢 測範圍變更之顯微測定裝置。200848836 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a microscopic measuring device used for spectrophotometry, film thickness measurement, and reflectance measurement of a sample. The microscopic measuring apparatus of the present invention, for example, is suitable for inspecting the optical characteristics of a color light-emitting sheet of a liquid crystal display device. [Prior Art] ζ X Liquid Day " The color filter and light film that are not described by the staff are composed of tears of R, G and Β. The existence range of one R filter is called For a pixel, the existence range of a G filter is called a pixel, and the range of existence of a filter is called a pixel. When the optical characteristics of the color filter are to be evaluated, The detection range (monitoring area) of the microscopic measuring device is aligned with the center portion of the R pixel, and the transmission spectrum, chromaticity (chr_at 丨 ty), and white balance degree of the central portion are measured. The second 'G pixel is also implemented. The measurement is performed, and the β pixel is also subjected to the same measurement as in Fig. 4. Fig. 4 is a view showing the detection range 样品 of the sample. Conventionally, as shown in Fig. 4, the detection range υ is smaller than one pixel. This measurement size is smaller than one pixel. The reason for the smaller detection range U is that the chromaticity and transmittance in the pixel of the color filter are approximately uniform. However, recently, the size of the color filter is increased and the production method is changed. , the film thickness of the color filter in one pixel is not Therefore, it is pointed out that the chromaticity and transmittance of the color filter are also unevenly distributed. Since 97105533 6 200848836, it is necessary to evaluate the chromaticity and transmittance of the entire pixel. Therefore, the detection range u is hoped not to be the same. The size is small and the size is variable. This makes the detection range u variable, and the magnification of the microscopic measurement is the same. Fig. 3 shows the color filter used in the past. A schematic diagram of a general microscopy apparatus for optical characteristics, etc. In this microscopic apparatus, the light transmitted or reflected by the sample S is converted into parallel rays by the objective lens through the mirror Lo». The light passes through the intermediate lens Li which is fixed in the mirror ιί and is then applied to the intermediate lens [丨 and the half mirror mirr〇r on the opposite side of the objective lens Lo), one part passes through and the other part is reflected The light passing through the half mirror in the original state is gathered into the focus at the viewing position of the observation camera 18, so that the sample can be reflected on the monitor display by the observation camera 18. The light reflected by the mirror HM is at the detector i 6 ^ where the focus is integrated, and here, spectrometry, film thickness measurement, reflectance measurement, etc. are performed. For example, the focal length of the intermediate lens Li is usually 200 ram. The focal length of the 10x objective lens is 2〇_. Therefore, the rate (the focal length of the intermediate lens Li) / (the focal length of the objective lens L〇) = 2〇〇/20=1() is obtained at the intermediate image position. The image is doubled. In the case of the 彳 测定 测定 测定 测定 如 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 97 The size of the image or the size of the observed image will be used by Lo. Referring to Fig. 3, it can be known that this is because Μ 4^ ^ l· ln , the inter-L lens L1 is fixed on the same U-mirror, and the position of the detector 16 and the observation m. l , ^ It is also fixed. Therefore, if it is to be measured at different magnifications, and I, , and negative are measured, the objective lens Lo is replaced in the museum. Only the shoulders are needed, but when the objective lens is replaced, the weight of the pound τ • τ milk mirror Lo (the number of openings · numerical aperture, numerical aperture) is eager to learn - Bo * ΜΛ > J will, pay more , and must be corrected for the measured value. When using the 4: Magnification change, the observation range will be changed with the 418. In contrast, when the observation range of the observation camera 18 is changed, the detection magnification of the detector 16 is also changed. In particular, when the H 16 is detected by the optical fiber, if the detection cost of the sample is to be enlarged, the enthalpy of the optical fiber must be enlarged. Therefore, the diameter of the optical fiber becomes thicker, and the flexibility of (4) is reduced. Make it easy to fold, and it is inconvenient to handle. Therefore, there is a problem that the observation range of the observation camera 18 is limited by the thickness of the optical fiber. Further, when the magnification of the objective lens Lo is made smaller and the detection range is increased, the magnification of the image observed by the observation lens 18 is also small. SUMMARY OF THE INVENTION The object of the present invention is to provide a microscopic measuring device capable of changing the magnification and/or the detection range of the microscopic measuring device without changing the objective lens in the microscopic measuring device 97105533 200848836 in which the objective lens is mounted.
本發明之顯微測定裝置，其具有：可使自樣品的光變成 平行光線之物鏡；可使自上述物鏡來的平行光線聚集之第 1中間透鏡；被設在相對於上述第丨中間透鏡而和上述物 鏡的相反側，可使通過上述物鏡及上述第丨中間透鏡的光 之一部份通過一部份反射的半鏡；使上述物鏡、上述第^ 中間透鏡及上述半鏡nj定之_;在因上料鏡所反射的 光之通過位置，被設成沿著因上述钱而被反射的光路上 可私動之第2中間透鏡；被設在相對於上述第2中間透鏡 而和上述半鏡的相反侧，被設成沿著因上述半鏡所被反射 :光路上可移動之檢測器；可使上述第2中間透鏡移動之 弟1移動機構，·可使上述檢測器移動之第2移動機構；及， ^调即上述第i移動機構及/或第2移動機構的移動量而 Y上述檢測器之成像位置和自上述樣品來的光因第 間透鏡而被聚集之聚光點一致的控制部。 鐵=此-構成之顯微測定裝置，其不必更換物鏡且不須 mu 吏4巾間透鏡的位置及/或檢測器的 置受更，即可一面變更檢_彳立$ 羊另一面測定樣品。且 不必使物鏡的να變更。 又’其更可具備有： 置，被設有沿該光路而 影機；可使上述第3中 可使上述觀察用攝影機 在上述半鏡直線前進的光之通過位 可私動之第3中間透鏡及觀察用攝 間透鏡移動之第3移動機構；及， 移動之第4移動機構；而上述控制 97105533 9 200848836 邛，如在自上述樣品來的光因第3中間透鏡而被聚集之聚 $點，只要調節第3移動機構及/或第4移動機構之移動 量，而使其和上述觀察用攝影機的成像位置相一致之構 -成，則觀察用攝影機的觀察倍率可和檢測器之檢測俨率右 .別而另外設定。因此，其不必使檢測器之檢測㈣=有 即可使觀祭用攝影機之觀察倍率變化。 上述铋測為如具有當作光入射窗之作用的光纖探針亦 可。A microscopic measuring device according to the present invention, comprising: an objective lens that can convert light from a sample into parallel rays; a first intermediate lens that can collect parallel rays from the objective lens; and is disposed on the intermediate lens with respect to the second intermediate lens Opposite to the objective lens, a part of the light passing through the objective lens and the second intermediate lens is passed through a partially reflected half mirror; the objective lens, the second intermediate lens and the half mirror nj are determined; a second intermediate lens that is movably movable along an optical path reflected by the money by a position of light reflected by the loading mirror; and is provided to the second intermediate lens and the half The opposite side of the mirror is provided along the detector that is reflected by the half mirror: movable on the optical path; the second moving mechanism that can move the second intermediate lens, and the second that can move the detector And a movement amount of the i-th moving mechanism and/or the second moving mechanism, and the imaging position of the detector is the same as the concentration of the light from the sample due to the first lens. Control department. Iron = this - constitutes a microscopic measuring device that does not require replacement of the objective lens and does not require the position of the lens between the wipes and/or the placement of the detector, so that the test can be changed while the other side of the sheep is measured. . It is not necessary to change the να of the objective lens. Further, it is further provided with: a camera disposed along the optical path; and a third intermediate portion in which the passage of the light for advancing the observation camera in the third half can be made privately in the third a third moving mechanism for moving the lens and the observation lens; and a fourth moving mechanism for moving; and the above control 97105533 9 200848836 邛, as the light from the sample is gathered by the third intermediate lens When the movement amount of the third moving mechanism and/or the fourth moving mechanism is adjusted to match the imaging position of the observation camera, the observation magnification of the observation camera and the detection of the detector can be detected. The rate is right. Don't set it separately. Therefore, it is not necessary to cause the detection of the detector (4) = to change the viewing magnification of the camera. The above detection may be as long as it has a fiberoptic probe functioning as a light entrance window.
C 如上根據本發明，其不必使物鏡的NA變化而可以一定 之狀態僅變更倍率，而實施樣品之分光測定、反射率測定 及膜厚測定等。 又由於其可在觀察用攝影機侧和檢測器侧設定不同的 倍率，因此，可在不變更檢測器之檢測範圍的大小下，即 可使樣品之觀察範圍變化。 本發明上述或其他優點、特徵及效果，以下參照附圖藉 如次所述之實施形態說明即可明瞭。 【實施方式】 圖1表不顯微測定裝置之概略剖面圖。顯微測定裝置係 具有·鏡筒11 ;被固定在鏡筒n上可使自樣品s來的光 變成平行光線之物鏡LO;被固定在鏡筒u上可使自上述 物鏡Lo來的平行光線聚集之第}中間透鏡u ;及，被固 .定在鏡筒11上而相對於上述第！中間透鏡u被設在和上 述物鏡Lo的相反侧，且可使通過上述物鏡。及上述第i 中間透鏡L1的光之-部份通過而一部份直角反射之半鏡 97105533 10 200848836 (half mirror，半透半反鏡）HM。且連結各透鏡之中心點 彼此間的線被稱為「光路C」。 樣品S被設置在樣品台12上，其透過光源i 3 (圖i ) 而自下方或藉反射光源14 (圖2)自斜上方被照射。 鏡靖11係以金屬或樹脂所製成之筒狀物。如圖1所示， 物鏡Lo被安裝在鏡筒u之前端。亦可在鏡筒n的前端 安裝迴轉器（revolver)並設置複數個物鏡Lo,其可藉使 f 迴轉器迴轉而選擇所希望之物鏡Lo，如此亦可。 物鏡Lo具有可使自樣品S來的光變成平行光線之功 能。物鏡Lo的焦點距離為f 〇。 第1中間透鏡L1被安裝在物鏡Lo之上部、鏡筒π的 中間位置。第1中間透鏡L1之焦點距離為n。 半鏡HM被安裝在第1中間透鏡U之上部。以半鏡龍 所直角反射的光，通過設在鏡筒U側面之開口部15而被 射出。為了使灰塵不會進入鏡筒11，開口部15被以薄的 ( 透明玻璃所閉合。在自此開口部15水平延伸之位置（亦 即光路C上）被設有第2中間透鏡[2。此第2中間透鏡 L2的焦點距離為f2。第2中間透鏡L2藉後述之移動機構 被設成可沿著光路C移動。 又在弟2中間透鏡L2的前端藉半鏡HM所反射之光路 C上η又置有檢測器16。此檢測器16也可藉後述之移動機 構而被設成沿著上述光路C可移動。在檢測器16之光入 射窗部份被配置有光入射用的細縫（slit) 161。如取代細 缝161 ’或和細縫161 —起，而配置光入射用的透鏡（未 97105533 11 200848836 圖示），如此亦可。 二U11之上端面為開口’為了使灰塵不會進入鏡 同11’此處亦安裝有薄的透明玻璃17。在此鏡筒 部被設置有第3中間透鏡L3。第3中間透鏡 離為f3。 、居、點距 光：’二第二中間透鏡L3的上部’在半鏡HM直線前進之 二Ά置觀察用攝影機18。此一觀察 亦猎後述之移動機播品、^ 、执18 動。#動機構而被設成沿著上述光路C上下可移 18 T 路C可使各透鏡、檢測器16、觀寧 ;攝：機18平行移動之機構，其構造並不受限定。： 其可舉出直線狀之蟫浐夺+ 3 个又隈疋。例如， 等。上述蟫f 丄 貝通上述螺桿之螺帽之組合 達，而螺桿本身為可、絲仃5又置，而在螺桿前端安裝馬 測器16或觀察用攝二 帽被固定各透鏡、檢 但螺帽本身係不能迴轉V。:， 迴轉時，各透铲、认、_ 猎上述馬達使上述螺桿 口 、見仏測器1 6或觀臾用摄旦V她7 0 C呈平行移動。 飞规$用攝衫機18可和光路 又，其設有對各馬達聯動 及逆轉迴轉量之控制控制各馬達之正轉迴轉量 藉傳送驅動電流至各 卫制部2 0之具體構成可例如 結之電牆而者相 、、、、之驅動電路及和該驅動電路i卓 而貫現。在電腦上’動包路連 馬達迴轉量的程式。 收谷有可控制各移動機構之 如此’在第2 t間透鏡L2、 97105533 中間透鏡L3、檢測器 12 200848836 16、觀察用攝影機18上各別安裝移動機構的結果，該等 :學兀件互相間之距離即可藉由控制部2〇 轉控制而任意地設定。 此處，第1中間透鏡L1與第2中pm > τ 0 _ 一 不/甲間透鏡L2之距離以 D2表示，f 1中間透鏡L1與第3中間透鏡L3之距離以 D3表示’第2中間透鏡L2與檢測器16之距離以M表示， 且第3中間透鏡L3與觀察用攝影機18之距離以D5表示。C. According to the present invention, it is possible to perform spectrometry, reflectance measurement, film thickness measurement, and the like of the sample by changing the magnification in a constant state without changing the NA of the objective lens. Further, since it is possible to set different magnifications on the observation camera side and the detector side, the observation range of the sample can be changed without changing the detection range of the detector. The above and other advantages, features, and advantages of the present invention will become apparent from the following description of the appended claims. [Embodiment] Fig. 1 is a schematic cross-sectional view showing a microscopic measuring device. The microscopic measuring device has a lens barrel 11; an objective lens LO that is fixed to the lens barrel n to convert light from the sample s into parallel rays; and is fixed to the lens barrel u to allow parallel light rays from the objective lens Lo The fifth intermediate lens u is gathered; and is fixed on the lens barrel 11 with respect to the above-mentioned first! The intermediate lens u is provided on the opposite side of the objective lens Lo and passes through the above objective lens. And a half-mirror 97105533 10 200848836 (half mirror, half mirror) HM of the light passage of the i-th intermediate lens L1 and a part of the right angle reflection. The line connecting the center points of the lenses to each other is called "optical path C". The sample S is placed on the sample stage 12, which is illuminated from below or from the oblique source by the light source i3 (Fig. 2). Jingjing 11 is a tube made of metal or resin. As shown in Fig. 1, the objective lens Lo is mounted at the front end of the lens barrel u. It is also possible to install a revolver at the front end of the lens barrel n and to provide a plurality of objective lenses Lo, which can be selected by the rotation of the f-rotator to select the desired objective lens Lo. The objective lens Lo has a function of making the light from the sample S into parallel rays. The focal length of the objective lens Lo is f 〇. The first intermediate lens L1 is attached to the upper portion of the objective lens Lo and at the intermediate position of the lens barrel π. The focal length of the first intermediate lens L1 is n. The half mirror HM is mounted on the upper portion of the first intermediate lens U. The light reflected at the right angle of the half mirror is emitted through the opening 15 provided on the side surface of the lens barrel U. In order to prevent dust from entering the lens barrel 11, the opening portion 15 is closed by a thin (clear glass). The second intermediate lens [2] is provided at a position horizontally extending from the opening portion 15 (i.e., on the optical path C). The focal length of the second intermediate lens L2 is f2. The second intermediate lens L2 is provided to be movable along the optical path C by a moving mechanism to be described later. The optical path C reflected by the half mirror HM at the front end of the intermediate lens L2 of the second intermediate lens L2 Further, a detector 16 is disposed on the upper portion η. The detector 16 is also movable along the optical path C by a moving mechanism to be described later. The light incident window portion of the detector 16 is provided with fine light for incidence. Slit 161. If the lens for light incidence is not replaced by the slit 161' or the slit 161 (not shown in 97105533 11 200848836), the upper end surface of the U11 is an opening 'in order to make Dust does not enter the mirror 11'. Here also a thin transparent glass 17 is attached. The lens barrel portion is provided with a third intermediate lens L3. The third intermediate lens is separated by f3. The upper part of the second intermediate lens L3 is taken in two directions of the half mirror HM straight line. Machine 18. This observation also hunts the mobile phone broadcast, ^, and 18 movements described later. The # moving mechanism is set to move up and down along the optical path C by 18 T C to make each lens, detector 16, and view Ning; Photograph: The mechanism in which the machine 18 moves in parallel, its structure is not limited. It can be cited as a linear capture + 3 隈疋. For example, etc. The above 蟫f 丄Betong through the above screw snail The combination of the caps is reached, and the screw itself is configurable, and the wire cymbal 5 is placed again. The horse detector 16 is installed at the front end of the screw or the lens is fixed by the observation cap. The nut itself cannot be rotated V.:, slewing At the time, each of the shovel, the shovel, the _ hunting the above-mentioned motor makes the above-mentioned screw port, see the detector 16 or the camera 臾 V V V 7 70 C in parallel movement. The fly gauge $ with the camera 18 can and the light path again The control unit is configured to control the rotation of the motor and the amount of the reverse rotation to control the forward rotation amount of each motor. The specific configuration of the transmission unit current to each of the protection units 20 can be, for example, an electric wall, and the like. The drive circuit and the drive circuit i are fully realized. On the computer, the program of the motor package is connected to the motor. The valley has the result of controlling the moving mechanism such that the second lens L2, the 97105533 intermediate lens L3, the detector 12 200848836 16 and the observation camera 18 are respectively mounted with a moving mechanism, and the like: The distance can be arbitrarily set by the control unit 2 〇 rotation control. Here, the distance between the first intermediate lens L1 and the second middle pm > τ 0 _ a / the inter-lens lens L2 is represented by D2, f 1 The distance between the intermediate lens L1 and the third intermediate lens L3 is represented by D3. The distance between the second intermediate lens L2 and the detector 16 is represented by M, and the distance between the third intermediate lens L3 and the observation camera 18 is represented by D5.
透過樣品s或對其反射的光，如圖i所示，沿光路c傳 运，藉物鏡Lo而變成平行光線。平行光線通過第工中間 透鏡U，因半鏡HM-部份被反射而被人射至第2中間透 鏡L2。在第2中間透鏡[2被聚集的光，通過細縫i6i入 射至檢測器16。 女此處，在本發明之實施形態中，係藉控制部20調節距 離D2 ，以使第2中間透鏡L2所聚集的光點位置和檢 測器16之成像位置一致。「檢測器16之成像位置」係指 檢測器16可以最佳之解像度檢測出影像沿在光路上的位 置’例如，當檢測器16為分光器時，則為在凹面繞射光 柵（diffraction grating)之焦點位置。當檢測器16為攝 影機時，則為在攝影機透鏡的焦點位置。 另一方面’在半鏡HM直線前進的光，被入射至第3中 間透鏡L3，而在第3中間透鏡L3被聚集的光，被入射至 觀察用攝影機18。在此情況下，第2中間透鏡L2所聚集 之光點位置亦藉控制部20被調節距離D3、D5而使其和觀 察用攝影機18之成像位置一致。 97105533 13 200848836 如說明具體的調節方法時，則上述第1中間透鏡L1和 第2中間透鏡L2之合成透鏡的焦點距離fm，以下式決定。 + -D2/( flxf2) ( 1 ) .檢測器16之檢測倍率A，使用上述合成透鏡之焦點距離 fm和上述物鏡Lo的焦點距離f〇，以下式決定。 fm/ f 〇 ( 2 ) 而操作者可將檢測倍率A設定為任意值。 ( 如此控制部2〇可帶入此被設定之倍率a至上述式（2)， 而決定合成透鏡之焦點距離fm。為了獲得此一焦點距離 fm可根據上述式（1)而設定距離D2。此一距離⑽之設 疋可藉馬達Ml之迴轉來實施。 又為了使檢測裔16之成像位置和此合成透鏡l 1、[2 的焦點一致，可以調節距離D4。此距離D4之設定可藉馬 達M2之迴轉來實施。 曰… 又，當然馬達Ml、M2不必使其分別隨時間而迴轉，只 〇要其心著程式之控制而同時聯動使其迴轉即可。 如此，則不必更換或移動物鏡L〇，而只要調節第2中 間透鏡L2和檢測器16的位置，即可得到所預定之倍率。 另一方面，當以觀察用攝影機】8觀察樣品s時，和上 ，同樣，先決定觀察倍率，再配合其觀察倍率而各別調節 弟3中間透鏡l 3和觀察用攝影機18之位置。 ° "人亦即，上述第1中間透鏡L1和上述第3中間透鏡。之 合成透鏡的焦點距離fm，，係如下式所決定。 (3) l/fl) + ( l/f3)-D3/( flxf3) 97105533 14 200848836 觀察用攝影機18之觀察倍率A、係使用上述合成透鏡之 焦點距離fnT和物鏡L〇之焦點距離f〇，以下式決定。 A"= fm Vf〇 ( 4) 控制部20可帶入此被設定之倍率至上述式（4)，而 決定合成透鏡的焦點距離fnr。依照此焦點距離&、使 以㈣D3 〇此—距離D3之設定可藉馬達 M3之迴轉來實施。 又’為了使檢測器16之成像位置和此—合成透鏡之隹 點-致，距離D5被調節。此一距離恥之設 ； M4的迴轉來實施。 < 而不必使其 又，當然馬達M3、M4可以同時連動迴轉 依時間各別迴轉。The light transmitted through the sample s or reflected thereon, as shown in Fig. i, is transported along the optical path c, and becomes a parallel light by the objective lens Lo. The parallel rays pass through the intermediate lens U, and are partially reflected by the half mirror HM- to be incident on the second intermediate lens L2. The light that has been collected in the second intermediate lens [2] is incident on the detector 16 through the slit i6i. Here, in the embodiment of the present invention, the distance D2 is adjusted by the control unit 20 so that the position of the spot where the second intermediate lens L2 is collected coincides with the imaging position of the detector 16. The "imaging position of the detector 16" means that the detector 16 can detect the position of the image along the optical path with the best resolution'. For example, when the detector 16 is a beam splitter, it is a concave diffraction grating. The focus position. When the detector 16 is a camera, it is at the focus position of the camera lens. On the other hand, the light which is linearly advanced in the half mirror HM is incident on the third intermediate lens L3, and the light concentrated on the third intermediate lens L3 is incident on the observation camera 18. In this case, the position of the spot where the second intermediate lens L2 is collected is also adjusted by the control unit 20 by the distances D3 and D5 so as to coincide with the imaging position of the observation camera 18. 97105533 13 200848836 When a specific adjustment method is described, the focal length fm of the composite lens of the first intermediate lens L1 and the second intermediate lens L2 is determined by the following equation. + - D2 / ( flxf2) ( 1 ) The detection magnification A of the detector 16 is determined by the following equation using the focal length fm of the above-described synthetic lens and the focal length f 上述 of the above objective lens Lo. Fm/ f 〇 ( 2 ) The operator can set the detection magnification A to an arbitrary value. (The control unit 2 can bring the set magnification a to the above formula (2), and determine the focal length fm of the synthetic lens. To obtain the focal length fm, the distance D2 can be set according to the above formula (1). The setting of the distance (10) can be implemented by the rotation of the motor M1. In order to make the imaging position of the detecting person 16 coincide with the focus of the synthetic lens l1, [2, the distance D4 can be adjusted. The setting of the distance D4 can be borrowed. The rotation of the motor M2 is carried out. 曰... Also, of course, the motors M1 and M2 do not have to be rotated separately with time, and only the control of the heart program is required to simultaneously rotate them to rotate. Thus, there is no need to replace or move. The objective lens L〇, and the predetermined magnification can be obtained by adjusting the position of the second intermediate lens L2 and the detector 16. On the other hand, when the sample s is observed by the observation camera 8 , the same as above, the first determination is made. Observing the magnification, and adjusting the position of the intermediate lens l 3 and the observation camera 18 separately with the observation magnification. ° " human, that is, the first intermediate lens L1 and the third intermediate lens. Focus distance Fm, is determined by the following equation: (3) l/fl) + ( l/f3) - D3 / ( flxf3) 97105533 14 200848836 The observation magnification of the observation camera 18 is the focal length fnT of the above-mentioned synthetic lens. The focal length of the objective lens L〇 is f〇, which is determined by the following equation. A"= fm Vf〇 (4) The control unit 20 can bring the set magnification to the above formula (4), and determine the focal length fnr of the synthetic lens. According to this focus distance &, (4) D3 〇 - the setting of the distance D3 can be implemented by the rotation of the motor M3. Further, in order to make the imaging position of the detector 16 and the point of the synthetic lens, the distance D5 is adjusted. This distance is shameful; the rotation of M4 is implemented. < Without having to make it again, of course, the motors M3 and M4 can be rotated at the same time and rotated separately according to time.
如此，則不必更換或移動物 間透鏡L3和觀察用攝影機i 8 觀察倍率。 鏡Lo，而只要調節第3 的位置，即可得到所預定 中 之 其次，參照圖2說明本發明 顯微測定裝置。 之實施形態的其他構成例之 以下僅說明本顯微測定裝置和圖1之顯微測定裝置的 不同點，圖2之裝置中，柃制哭】 的 162 私測16係使用設有光纖探針 ^ ^ 16。亦即’此光纖探針162係當作檢測哭 16之光入射窗的功能。 奴成1為 τ 0 馬達Μ2被控制以使第2中間诱於 L2所聚集的光點位置 門透鏡 罝」和此光纖楝針162之焦點位置— 致。光纖探針1 62係亦孅而目古7技 置 你尤纖而具有可撓性，因此，並 響影像之傳播，且且有兹 "“衫 "、有了猎馬達M2變更其位置之優點。 97105533 15 200848836 ;、二月可私測出樣品S的範圍之檢測範圍（監視區 測，圍擴大4 ’則必須使倍率減低。如使倍率增大時則檢 測範圍會變狹小。 ' 仁疋’本發明之顯微測定裝χ，其檢測器、Η之檢測倍 率和觀察用攝影機18之觀察倍率可各別獨立使用各個中 間透鏡而设定。以往，& 了變更檢測範圍而使物鏡之 t率文化日守，雖然觀察用攝影機丨8所觀察之影像的觀窣 倍率也會聯動變化，但本發明之顯微測定裝置則用觀察用 攝影機18所觀察之影像可以原來的觀察倍率，而僅變更 檢測态16之檢測倍率。又，相反地如不變更檢測器μ 檢測倍率，而僅變更觀察倍率亦可。因此，根據本°發明其 可順利地實施觀察用攝影機18之觀察及檢測器16之檢 測0 以上雖然已說明本發明之實施形態，但本發明並不限於 上述實施形態。例如，使各透鏡、檢測器、觀察用攝影機 平行移動之移動機構，除了螺桿和螺帽之組合外，也可舉 出以帶輪（pulley)和線繩（thread)之組合或使用超音波 馬達之滑動器等。 【圖式簡單說明】 圖1表示本發明之顯微測定裝置的概略剖面圖。 圖2表示本發明之其他構成的顯微測定裝置之概略剖 面圖。 圖3係以往所使用之為了測定彩色濾光片等的光學特 97105533 16 200848836 性之一般的顯微測定裝置的概略構成圖。 圖4表示對樣品s之照射點u的圖。 【主要元件符號說明】 11 鏡筒 12 樣品台 13 透過光源 14 反射光源 15 開口部 16 - 16" 偽泪丨1哭Thus, it is not necessary to replace or move the inter-object lens L3 and the observation camera i 8 to observe the magnification. The mirror Lo can be obtained by adjusting the third position. Next, the microscopic measuring apparatus of the present invention will be described with reference to Fig. 2 . Other configurations of the embodiment will be described below. Only the difference between the microscopic measuring device and the microscopic measuring device of Fig. 1 will be described. In the device of Fig. 2, the 162 private measuring 16 system is equipped with a fiber optic probe. ^ ^ 16. That is, the fiber optic probe 162 functions as a light incident window for detecting the cry 16 . The slave 1 is τ 0. The motor Μ 2 is controlled so that the second intermediate attracts the spot position of the spot lens L2 and the focus position of the fiber 162 pin 162. The fiber optic probe 1 62 series is also awkward and the ancient 7 technology sets your flexibility and flexibility, so it sounds like the spread of the image, and there is a "shirt", with the hunting motor M2 to change its position Advantages: 97105533 15 200848836 ; In February, the range of detection of the range of sample S can be measured privately (monitoring area measurement, the expansion of 4' must reduce the magnification. If the magnification is increased, the detection range will become narrower. In the microscopic measurement device of the present invention, the detection magnification of the detector and the cymbal and the observation magnification of the observation camera 18 can be set independently using the respective intermediate lenses. Conventionally, the detection range is changed. The objective lens has a rate of culture, and although the viewing magnification of the image observed by the camera 丨8 is also changed in conjunction, the microscopic measuring device of the present invention can observe the original observation magnification of the image observed by the observation camera 18. However, only the detection magnification of the detection state 16 is changed. Conversely, if the detector μ detection magnification is not changed, only the observation magnification may be changed. Therefore, the observation camera 18 can be smoothly implemented according to the present invention. Observation and Detection of Detector 16 Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. For example, a moving mechanism for moving each lens, detector, and observation camera in parallel is not limited to a screw and a moving mechanism. In addition to the combination of the nut, a combination of a pulley and a thread or a slider using an ultrasonic motor or the like can be cited. [Schematic Description of the Drawing] Fig. 1 shows a microscopic measuring apparatus of the present invention. Fig. 2 is a schematic cross-sectional view showing a microscopic measuring apparatus having another configuration of the present invention. Fig. 3 is a general microscopic measurement of optical characteristics of 97105533 16 200848836 used for measuring color filters and the like. Fig. 4 shows a diagram of the irradiation point u of the sample s. [Description of main components] 11 lens barrel 12 sample stage 13 light source 14 reflected light source 15 opening 16 - 16 " false tears 1 cry
17 18 20 161 162 A、A， D2 D3 D4 D5 fO fl f2 玻璃 觀察用攝影機 控制部 細縫 光纖探針 檢測倍率 光路 第1中間透鏡與第2中間透鏡之距離 第1中間透鏡與第3中間透鏡之距離 第2中間透鏡與檢測器之距離 第3中間透鏡與觀察用攝影機之距離 物鏡之焦點距離 第1中間透鏡之焦點距離 第2中間透鏡之焦點距離 合成透鏡之焦點距離 97105533 17 200848836 HM 半鏡 LI 第1中間透鏡 L2 第2中間透鏡 L3 第3中間透鏡 Li 中間透鏡 Lo 物鏡 Ml > M2、M3、M4 馬達 S 樣品 U 照射點 97105533 1817 18 20 161 162 A, A, D2 D3 D4 D5 fO fl f2 Glass observation camera control section slit optical fiber probe detection magnification optical path distance between the first intermediate lens and the second intermediate lens 1st intermediate lens and 3rd intermediate lens The distance between the second intermediate lens and the detector is the distance between the third intermediate lens and the observation camera. The focal length of the objective lens is the focal length of the first intermediate lens. The focal length of the second intermediate lens is the focal length of the synthetic lens. 97105533 17 200848836 HM Half mirror LI first intermediate lens L2 second intermediate lens L3 third intermediate lens Li intermediate lens Lo objective lens M1 > M2, M3, M4 motor S sample U irradiation point 97105533 18