CN102243385A - Device for measuring photoelectric characteristic curve of liquid crystal on silicon imaging chip - Google Patents
Device for measuring photoelectric characteristic curve of liquid crystal on silicon imaging chip Download PDFInfo
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- CN102243385A CN102243385A CN201110198110XA CN201110198110A CN102243385A CN 102243385 A CN102243385 A CN 102243385A CN 201110198110X A CN201110198110X A CN 201110198110XA CN 201110198110 A CN201110198110 A CN 201110198110A CN 102243385 A CN102243385 A CN 102243385A
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- liquid crystal
- imager chip
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- silicon imager
- positioning fixture
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Abstract
The invention relates to a device for measuring a photoelectric characteristic curve of a liquid crystal on silicon imaging chip. The device comprises a light source, a light processing system, a polarizer, a light valve, a polarizing beam splitter (PBS), a slide, a positioning clamp, a micro-adjusting platform, a light detector, a data acquisition card, a driving plate and a computer, wherein the liquid crystal on silicon imaging chip is vertical to a light path and fixed on the positioning clamp; a reflecting surface of the liquid crystal on silicon imaging chip faces the slide; the liquid crystal on silicon imaging chip is connected with the driving plate; the driving plate is connected with the computer; a light detection end of the light detector is aligned with an S polarized light which is reflected by the PBS; the light detector is connected with the data acquisition card through an electric signal line; and the data acquisition card is connected with the computer. The device is simple in structure, low in cost, convenient to operate and high in measurement accuracy, provides high-accuracy measurement means for guaranteeing the stability of a production process of the liquid crystal on silicon imaging chip and product yield, and is worthy of popularization.
Description
Technical field
The present invention relates to measure the measurement mechanism of liquid crystal on silicon imager chip (LCOS, Liquid Crystal On Silicon) photoelectric parameter.
Background technology
Liquid crystal on silicon is the display technique that LCD and CMOS integrated circuit organically combine, and its structure is to utilize the semiconductor technology etching to drive panel on silicon chip, grinds and aluminizes as catoptron, forms the CMOS substrate, fits with ito glass and injects liquid crystal.Liquid crystal on silicon is used more and more widely in high-definition image demonstration field, and it has the unique technique advantage.Yet this shows that industry development is slow relatively, and its main cause is that the production technology of liquid crystal on silicon imager chip is difficult to control, and the product yield is lower, causes production cost too high.
The technological process of production of conventional liquid crystal on silicon imager chip is roughly divided three phases:
Phase one: starting material clean, and------the glue frame is set, and---fit and handle---solidifies the glue frame to starting material surface plated film;
Subordinate phase: cutting---is irritated brilliant---sealing---cleaning by degreasing;
Phase III: location---bonding wire---sealing---packing.
This measuring technique was applied between second production phase and the 3rd production stage, was used to measure the photoelectric characteristic curve of the liquid crystal cell unit (following content general designation liquid crystal cell) after the cleaning by degreasing.
Based on above reason, need in the production run of liquid crystal on silicon imager chip, to carry out quality monitoring, its main means are to obtain the photoelectric characteristic curve by specific proving installation and method of testing, by its key technical indexes of photoelectric characteristic tracing analysis.Measuring the photoelectric characteristic curve of silicon base liquid crystal display chip, is the core technology that industry is generally acknowledged, does not almost have disclosed report and academic exchange.In order to guarantee the stability of liquid crystal on silicon imager chip production technology, improve the product population rate, must possess high-precision measurement means.
Summary of the invention
Technical matters to be solved by this invention provides a kind of device of measuring liquid crystal on silicon imager chip photoelectric characteristic curve, for guaranteeing the stability and the product population rate of liquid crystal on silicon imager chip production technology, provides high-precision measurement means.
For solving the problems of the technologies described above, the invention provides a kind of device of measuring liquid crystal on silicon imager chip photoelectric characteristic curve, it is characterized in that, comprise light source, optical processing system, the polarizer, light valve, Amici prism PBS, slide, positioning fixture, fine adjustment stage, photo-detector, data collecting card, drive plate, computer;
Described optical processing system, the polarizer, light valve, Amici prism PBS, slide is arranged on the light path of described light source sequentially, described positioning fixture is installed after the described slide, described positioning fixture is installed on the described fine adjustment stage, described liquid crystal on silicon imager chip is fixed on the described positioning fixture perpendicular to described light path, the reflecting surface of described liquid crystal on silicon imager chip is towards described slide, described liquid crystal on silicon imager chip connects described drive plate, described drive plate connects described computer, the photodetection end of described photo-detector is aimed at the S polarized light that described Amici prism PBS reflects, described photo-detector connects described data collecting card by electrical signal line, the described computer of described data acquisition card connection.
Described positioning fixture is provided with vacuum cup, and described liquid crystal on silicon imager chip is adsorbed on the described positioning fixture by described vacuum cup.
Described fine adjustment stage is provided with the position and adjusts knob, adjust knob by described position and can adjust described fine adjustment stage perpendicular to the position up and down in the plane of described light path, just adjust the position up and down of the described liquid crystal on silicon imager chip on described positioning fixture and the positioning fixture, to realize multimetering to described liquid crystal on silicon imager chip.
The present invention also comprises flexible PCB, and described flexible PCB connects described positioning fixture, and described drive plate connects described liquid crystal on silicon imager chip by flexible PCB.
Described positioning fixture is provided with some reference columns, and described reference column is located described liquid crystal on silicon imager chip from last, left and right three directions.
The diameter of the P polarized light that described light valve passes through is 1.5-2mm.
Measuring principle of apparatus of the present invention and process are: described light source sends natural light, enters into optical processing system, and optical processing system is made up of conventional optical device, and light is implemented to handle, and natural light is processed into directional light; Enter the polarizer through the directional light after the optical processing system processing, the polarizer is handled again to light, phototransformation is become the P polarized light, the P polarized light enters light valve, light valve is used to change the diameter of P polarized light light beam, diameter is that the P polarized light of 1.5-2mm enters PBS, through PBS, enter on the tested liquid crystal on silicon imager chip as incident light, described liquid crystal on silicon imager chip provides under the effect of drive signal at described drive plate, reflect the S polarized light, the S polarized light enters PBS once more, and the S polarized light is reflected by PBS, enter into photo-detector, the signal of photo-detector collection is obtained by data collecting card, and the information that data collecting card obtains is transferred to computer by data line, generates the photoelectric characteristic curve of the liquid crystal on silicon imager chip of this irradiation area on the computer by software.By adjusting the position up and down of fine adjustment stage respectively, obtain the photoelectric characteristic curve of several test points on the described liquid crystal on silicon imager chip respectively.
Apparatus of the present invention are simple in structure, and are with low cost, easy to operate, and the measuring accuracy height for guaranteeing the stability and the product population rate of liquid crystal on silicon imager chip production technology, provides high-precision measurement means, is worthy of popularization.
Description of drawings
Below in conjunction with the drawings and specific embodiments technical scheme of the present invention is further described in detail.
Fig. 1 is the structural drawing of the concrete real-time mode of the present invention.
Fig. 2 is the front view of the positioning fixture of this concrete real-time mode.
Fig. 3 is the connection front view of positioning fixture, flexible PCB and liquid crystal cell in this concrete real-time mode.
Embodiment
As shown in Figure 1, this device comprises:
Light source 101: be used to provide measurement light source, adopt the LED light emitting source.
Optical processing system 102: this system belongs to equipment customized, and group will be made up of conventional optical device, is used to improve the natural light that light source 101 sends, and makes the natural light by optical processing system become opposing parallel light.
Light valve 103: be used to change the diameter of parallel beam,, can obtain desirable incident light by regulating light valve.The diameter of the P polarized light of process light valve is arranged on 1.5-2mm.
Tested liquid crystal cell 104 is fixed on the positioning fixture 107, sees Fig. 3.
Amici prism PBS105: utilize himself optical characteristics (seeing through P light, reflection S light), be used for the incident light of liquid crystal cell is become 90 degree with emergent light.
Slide 106: be used to adjust incident angle of light.
Positioning fixture 107: be used for fixing liquid crystal cell.
Fine adjustment stage 108: positioning fixture 107 is fixed on the fine adjustment stage 108, can adjust the position up and down of liquid crystal cell 104 by the knob of fine adjustment stage 108, to realize multimetering.
Photo-detector 109: be used to gather the emergent light signal.
Data collecting card 110: be used to gather photodetector output signal, link to each other with computer.
Computer 111: be used to handle signal that capture card collects and the drive signal that liquid crystal cell is provided.
Drive plate 112: be used to drive liquid crystal cell, cross the DVI line with the computer expert and be connected.
The polarizer 114: be used for converting natural light to polarized light.
Shown in Fig. 2,3, positioning fixture 107 is by the fixing liquid crystal cell of vacuum cup 116 and reference column 117, vacuum cup 116 is provided with 5 vacuum ports 119, vacuumize by evacuation passageway 118, drive plate 112 is connected by flexible PCB 125 with positioning fixture 107, and flexible PCB 125 is as the interface channel of drive signal.
Further describe measuring condition, condition and the process of this device below:
1, measuring condition: according to the specific (special) requirements of liquid crystal on silicon imager chip to environment, this proving installation should be placed in 1000 grades of dust proof workshops, and ambient brightness is lower than 1lux, environment temperature: 20 to 25 degrees centigrade, and ambient humidity＜40-50RH.
2, measuring condition: this measuring technique adopts 9 methods of testing, and tested liquid crystal on silicon imager chip 104 is gathered measurement data, by fine adjustment stage 108 each test point 123 of location.
3, measure preliminary work: this measuring technique is mainly used in the quality monitoring in liquid crystal on silicon imager chip (LCOS) production run, to semi-manufacture, it is liquid crystal cell 104, inspect measurement by random samples, therefore, elder generation, inspects quantitative proportion by random samples and is not less than 5% by a batch sampling observation semi-manufacture before carrying out surveying work: inspected by random samples to such an extent that liquid crystal cell 104 at first will carry out cleaning by degreasing, remove and irritate the liquid crystal that brilliant operation remains in the liquid crystal cell surface.
4, test process:
Wear antistatic gloves, mouth mask, electrostatic prevention bracelet, tested liquid crystal cell 104 is installed on the vacuum cup 116, open vaccum-pumping equipment, utilize six reference columns, 117 location.
The position of conditioning signal probe 124, voltage probe 120 makes signal probe 124, voltage probe 120 contact fully with signal input port 121, ITO voltage input end mouth 122 on the liquid crystal cell.
Open led light source 101, computer 111 successively, led light source guarantees that preheating testing in 10 minutes.
Natural light sends from led light source 101, enters into optical processing system 102, and optical processing system is made up of conventional optical device, and light is implemented to handle, and natural light is processed into directional light; Enter the polarizer through the directional light after the optical processing system processing, the polarizer is handled again to light, phototransformation is become the P polarized light, the P polarized light enters light valve, and light valve is used to change the diameter of P polarized light light beam, and diameter is that the P polarized light of 1.5-2mm enters PBS 105, through PBS105, enter into tested liquid crystal cell as incident light, regulate slide 106 angles, make the P polarized light enter liquid crystal cell 104 in only angle.The light that reflects by liquid crystal cell 104 becomes the S polarized light, the S polarized light enters PBS 105 once more, the S polarized light is reflected by PBS 105, enter into photo-detector 109, the signal that photo-detector 109 is gathered is obtained by data collecting card 110, the information that data collecting card 110 obtains is transferred to computer 111 by data line, and the process software on the computer 111 generates the photoelectric characteristic curve of this light area of liquid crystal cell.
Regulate fine adjustment stage 108, tested liquid crystal cell 104 is moved to next test point 123, repeat above-mentioned steps, obtain the photoelectric characteristic curve of nine test points 123 respectively.These nine photoelectric characteristic curves are enough to judge the performance of tested liquid crystal cell 104.To reach the related process parameter of improving production run, to improve the product population rate.
It should be noted last that, above embodiment is only unrestricted in order to technical scheme of the present invention to be described, although the present invention is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that, can make amendment or be equal to replacement technical scheme of the present invention, and not breaking away from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.
Claims (7)
1. device of measuring liquid crystal on silicon imager chip photoelectric characteristic curve, it is characterized in that, comprise light source, optical processing system, the polarizer, light valve, Amici prism PBS, slide, positioning fixture, fine adjustment stage, photo-detector, data collecting card, drive plate, computer;
Described optical processing system, the polarizer, light valve, Amici prism PBS, slide is arranged on the light path of described light source sequentially, described positioning fixture is installed after the described slide, described positioning fixture is installed on the described fine adjustment stage, described liquid crystal on silicon imager chip is fixed on the described positioning fixture perpendicular to described light path, the reflecting surface of described liquid crystal on silicon imager chip is towards described slide, described liquid crystal on silicon imager chip connects described drive plate, described drive plate connects described computer, the photodetection end of described photo-detector is aimed at the S polarized light that described Amici prism PBS reflects, described photo-detector connects described data collecting card by electrical signal line, the described computer of described data acquisition card connection.
2. the device of measurement liquid crystal on silicon imager chip photoelectric characteristic curve according to claim 1 is characterized in that described positioning fixture is provided with vacuum cup, and described liquid crystal on silicon imager chip is adsorbed on the described positioning fixture by described vacuum cup.
3. the device of measurement liquid crystal on silicon imager chip photoelectric characteristic curve according to claim 1 and 2, it is characterized in that, described fine adjustment stage is provided with the position and adjusts knob, adjusts knob by described position and can adjust described fine adjustment stage perpendicular to the position up and down in the plane of described light path.
4. the device of measurement liquid crystal on silicon imager chip photoelectric characteristic curve according to claim 3, it is characterized in that, also comprise flexible PCB, described flexible PCB connects described positioning fixture, and described drive plate connects described liquid crystal on silicon imager chip by flexible PCB.
5. the device of measurement liquid crystal on silicon imager chip photoelectric characteristic curve according to claim 3 is characterized in that described positioning fixture is provided with some reference columns, and described reference column is located described liquid crystal on silicon imager chip from last, left and right three directions.
6. the device of measurement liquid crystal on silicon imager chip photoelectric characteristic curve according to claim 4 is characterized in that described positioning fixture is provided with some reference columns, and described reference column is located described liquid crystal on silicon imager chip from last, left and right three directions.
7. the device of measurement liquid crystal on silicon imager chip photoelectric characteristic curve according to claim 1 is characterized in that the diameter of the P polarized light that described light valve passes through is 1.5-2mm.
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Cited By (3)
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| CN107688248A (en) * | 2016-08-05 | 2018-02-13 | 豪威科技股份有限公司 | liquid crystal on silicon test platform |
| CN108181744A (en) * | 2018-02-05 | 2018-06-19 | 北京灵犀微光科技有限公司 | The test device of reflective liquid-crystal display contrast |
| CN109029920A (en) * | 2018-07-18 | 2018-12-18 | 台龙电子（昆山）有限公司 | A kind of detection device with the flexible luminescent screen light source of adjusting |
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| CN109029920A (en) * | 2018-07-18 | 2018-12-18 | 台龙电子（昆山）有限公司 | A kind of detection device with the flexible luminescent screen light source of adjusting |
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Application publication date: 20111116 |