200848683 九、發明說明： 【發明所屬之技術領域j200848683 IX. Description of invention: [Technical field to which the invention belongs
本發明係關A 蒸汽溝槽以增μ、:Γθ種冷卻裝置，_是-種包人八 主鈿你田你认丄“、w飞夏的散熱器，其申由兮匕令凝液和 毛細侧倾料喊職啦生的==料所產生的 【先前技術】 當電子元件和設備増加操作速度且縮小 的熱變成一個電子設備和系統改善性能的主产τ，產生 形成電子元件的半導體尺寸不斷地縮小，二礙。不管 加性能。當半導體尺寸縮小，結果熱通量（每單=要求增 傳遞q)増加。熱通量增加所造成將產品冷卻 ^的^ 僅是全部熱的增加，因為熱通量的増加造成 過僅 1, 不同長度尺寸會過熱’因此可能導致電子故障。5呀間和 ^器，此外’蒸汽室被用來增加散 2法有—點用’但問題仍然存 ‘用、^= 作為熱的傳導，結果，它需要足 热限長的熱傳導現象。因此，—個較厚的散= 5部的短暫的過熱現象。蒸汽室改善的效果 盍，但是當暮、卞玄社人命工’、、、超過金屬 疋田^又至、，、口 D屯子且受到高溫回流步驟（例如，以 200848683 身 > 蒸汽室蓋子的形式操作的蒸汽室）所產生的高蒸汽壓時，無 法維持在尺寸公差。此外，蒸汽芯的選擇是有問題的-適當 的怒的選擇須要能夠保持冷凝液的流速和保持足夠的毛細 壓力以克服重力的影響，當蒸汽室的厚度減少以取代金屬 蓋的功能時，此變成另一個問題。因此，有必要提供一個 散熱裝置可以克服蒸汽室和金屬蓋的這些問題。 【發明内容】 { 本發明是關於一種增加蒸汽量的散熱器，包含蒸汽與 冷凝液通道選擇性地在一對流體傳遞元件中形成，使該裝 置在平面的散熱能力能夠選擇性地增加。每一組通道是有 間隔的以形成頂點，安裝以提供足夠地接合點面積以使得 通過平面的熱流阻右最小化，如同確保一個適當地壓力等 級。在本發明的一個實施例中，該散熱裝置包含一個較低 的面板和一個較高的面板。每一個面板通常是平面的，包 含一個上表面和一個下表面。該較低的面板有冷凝液通道 在其上表面形成，當該較高的面板有蒸汽通道在其下表面 I 形成時（即通道通常在對面的内表面形成）。形成於該較高 與較低面板中的通道是有距離的間隔，如此產生複數個頂 點。以這樣的結構，當該較高面板的下表面與該較低面板 的上表面產生機械性地接觸時，該頂點的功能如同柱子， 支撐該薄板對抗保持在此裝置中的高壓力。隨意地，該頂 點可選擇性地接合（例如藉由焊接）以形成頂點接合點。在 操作牛，該裝置可被排空和充滿一個可蒸發的液體，然後 將内部密封以形成一個導熱管環境。 200848683 該冷凝液通道的尺寸與形狀可不同於該蒸汽通道的 尺寸與形狀，如此使得該冷凝液通道可產生比該蒸汽通道 較高的毛細作用力。例如，該冷凝液通道可具備比該蒸汽 通道較小的尺寸（例如，該冷凝液通可比該蒸汽通道具備較 尖的角）。該較低的面板，此外，可包含一個多芯結構，在 此毛細作用力隨著一個可蒸發區距離的減少而增加。該多 芯結構也可定義一個增加沸騰的多芯結構，以促進蒸發並 使沸騰過熱現象最小化。 【實施方式】 第一圖係根據本發明實施例之一種增加蒸汽量的散 熱器之3D視圖。增加蒸汽量的散熱器100可包含一個第 一（較高的）流體傳遞元件或薄板或面板110，一個第二（較 低的）流體傳遞元件或薄板或面板120，和一個非必要的填 充管130配置於兩薄板之間，每一個薄板110、120 —般可 為平面，包含一個上表面和一下表面。具體地如第二A圖 所示，此較高的薄板110包含一個外表面200A和一個内表 面205A ;相同地，此較低的薄板120也包含一個外表面 200B和一個内表面205B (此面對著該第一薄板的内表面）。 回到第一圖，在助焊劑或熱界面物質的存在下，為了 使空氣適當地流出，該較高的薄板110可更包含一個或多 個空氣溝槽。例如，該較高的薄板110的該外表面200A可 包含一個空氣溝槽140A在其中；相同地，該較低的薄板 120的該外表面200B可包含一個空氣溝槽140B在其中。 200848683 該些空氣溝槽140A、140B可經由壓印、選擇性的蝕刻、 材料移除、切割、削去、沖模、劃線或其他習知技藝所知 的步驟來形成。该些薄板110、丨2〇的厚度可包括約12微 米到2公分，但不限制在此範圍。該填充管13()，其為此 散熱為1 〇〇的内部腔體流體交流的管道，可以連接到一個 真空唧筒和/或液體供應器。操作時，在裝置中的氣體排空 之後和/或該裝置填滿了可蒸發的液體之後，該管13〇是密 封的。 『第二A圖與第二B圖說明了第一圖中該裝置沿著a 剖面線的剖面視圖，顯示根據本發明實施例之一種增加蒸 汽量的散熱器100之内部結構。如所示，該較高的薄板110 包含一個或多個蒸汽通道或溝槽210A、210B、210C，在 其内表面205A中$成（即此表面面對著該下薄板丨2〇的内 表面205B)。該些蒸汽溝槽210A-210C的尺寸和/或形狀可 以是任何適合的樣式，可達其描述的目的即可。該蒸汽溝 槽210A-210C被安裝以准許冷凝液和蒸汽通過一旦該冷凝 液（即可蒸發的液體）蒸發。該些蒸汽溝槽210A-210C的形 ( 狀可以包括圓形210A、矩形210B、多邊形21 〇C，但不限 制於此。此外該矩形210B和該多邊形2i〇c蒸汽溝槽，可 有圓形的角220(其可以在溝槽形成的步驟產生）。該些蒸 汽溝槽21OA-210C可經由壓印、選擇性的蝕刻、材料移 切割、削去、沖模、劃線或習知技藝所知的類似方法來形 成。 夕 更好地，全部的蒸汽溝槽結構使用溝槽形狀（例如圓形 和多邊形）的組合來形成。該些蒸汽溝槽21〇A_21〇c可^ 200848683 距離的間隔’如此以致於頂點225沿著該較高的薄板n〇 的内表面205A選擇性的放置’以下會更詳細的描述。此 溝槽結構，此外，可以由表面上先以決定的圖案來形成， 包括格子圖案和/或葉脈圖案（第六圖），但非限制於此。 該較低的薄板120包含一個或多個冷凝液通道或溝槽 230A、230B、230C、230D、230E(也稱為可蒸發的液體溝 槽）在其内表面205B中形成（即此表面面對著該上薄板 110的内表面205A)。該冷凝液溝槽230A-230E是芯結構， 以運輸可蒸發的液體’例如接近該較低薄板的蒸發區。該 些冷凝液溝槽230A-230E可經由壓印、選擇性的蚀刻、材 料移除、切割、削去、沖模、劃線或習知技藝所知的類似 製程來形成。該些冷凝液溝槽230A_230E的形狀包括三角 形230A、矩形230B和圓形230C，但不限制於此，此形狀 不但可由使用如削去的技術形成的溝槽230D(像弦月的形 狀），而且也可劃線形成230E(例如有一般平垣的平行邊和 一般V狀的底部）。 I 該些冷凝液溝槽230A-230E中具有三角形230A和矩 形230B可以進一步有圓形的角220(其可以在溝槽 230A-230E形成的步驟產生）。更好地，全部的冷凝液溝槽 結構使用溝槽形狀（例如圓形和多邊形）的組合來形成。該 些冷凝液溝槽230A-230E可有距離的間隔，如此以致於頂 點235沿著該較低的薄板120的内表面205B形成。該些冷 凝液溝槽230A-230E，·此外，可以由表面上先以決定的圖 案來形成，包括格子圖案和/或葉脈圖案（第五圖）。 200848683 為了有效進行毛細作用，該冷凝液溝槽結構可進一步 定義一個多芯結構一具有毛細作用能力的一個結構隨著蒸 發區（即最接近熱源的區域）距離的減少而增加。二選一或 除此之外’該冷凝液溝槽結構可進一步包含沸騰強化的多 芯結構240’以提升蒸發效率和使沸騰過熱現象最小化。 舉例來說’全部的冷凝液溝槽結構可藉由選擇性的結合提 局沸騰、多芯結構來形成，如同冷凝液溝槽23〇A-230E具 有不同的形狀。附加多芯結構的資料（有或沒有沸騰強化） 揭露於美國專利號11/272，145(美國公開號2006-0060330) ( 和美國專利號11/164,429(美國公開號2006-0196640)，這 些内容在此全部結合做為參考。 為了保持適當的毛細作用狀態，該些蒸汽溝槽 210A-210C保持開放且大部份可蒸發液體留在冷凝液溝槽 230A-230E中，該些冷凝液溝槽應該具有能夠增加毛細作 用力超過該些蒸汽溝槽的特性。換言之，由每一個蒸汽溝 槽210A-210C所產生的毛細作用力可能小於由每一個冷凝 液溝槽230A-230E所產生的毛細作力。這可藉由提供冷凝 ( 液溝槽230A_230E的尺寸（大小和/或幾何形狀）不同於蒸 汽溝槽210A-210C的尺寸（大小和/或幾何形狀）。經由特 殊的例子，該些冷凝液溝槽230A-230E(1)可比蒸汽溝槽 210A-210C具有較小的尺寸’和/或（2)可比蒸汽溝槽 210A-210C具有較尖角的一個幾何/形狀。 該較高的薄板110可藉由以下製程結合較低的薄板 120，如超音波接合、熱音波接合、鎢惰性氣體(tig)銲接、 電漿焊接、雷射焊接、焊錫、硬銲或其他習知技藝所知的 200848683 方法來形成。例如，該些頂點225、235，其選擇性地在該 較南薄板110的内表面205A與較低薄板120的内表面205B 之間，義接觸面積，可選擇性地焊接以形成頂點接合點 250。e亥些頂點接合點250在此室中有效地形成一系列的柱 提供力量給該增加蒸汽量的散熱器1〇()，且使此裝置 月=夠抵抗在回流過程（例如約攝氏2〇〇度的環境所產生的 壓力）必須支撐該散熱裝置1〇〇的高蒸汽壓。如第二A圖所 示，頂點接合點250可形成，無論該些頂點225、235位在 這由機械互相接觸的兩薄板11〇、12〇中的任何位置。這結 ί構不同於平常的蒸汽室，在於其内部有固體插入，目前只 有-，結合界面（雖然每一個薄板為了提升結合的目的可 包含複數平板和/或塗層物質）的頂點接合點25〇。以焊接 所形，頂賴合點25G的接觸輯的數量是沒有特別限制 的。最好的’至少是該平面薄板面積的10%應該被利用來 25G以提供該散錄置1GG足夠的機械強 度來抵擋此衣置在操作期間所產生的力量。 除此之外，該增加蒸汽量的散熱器100可以包括一個 1 封Γ60沿著該散熱裝置100的接缝配置（即此 而鼙板110 的邊緣互相接觸）。該邊緣接頭260將此 兩溥板110、120密封為一私，太狀里 密的流體密封。 （在衣置100之内維持一個緊 可以例，該增加蒸气量的散熱器_ - 或面板m和較低的薄板或面m; 期順著—邊連接的結構。如同上述所 11 200848683 邊緣接頭260可被用將該裝置100剩下的一邊密封在一 起0 在形成該散熱裝置100時，該邊緣接頭260和頂點接 合點250可能使用相同的步驟一起形成或使用不同的步驟 分開形成。例如，該邊緣接頭260和頂點接合點250可能 使用熱音波接合同時形成。操作中，該較高的薄板n〇和 較低的薄板120可結合在一起，該管13〇差入，接著如上 所述的（例如邊緣接頭260)密封。然後該散熱裝置1〇〇可 ， 被排空並裝滿可蒸發之液體（藉由該管130)。一旦裝滿， $亥管130可被密封以保持該裝置1 〇〇的内部狀態。第四圖 闡明第一圖中此增加蒸汽量的散熱器沿著B-B剖面線的剖 面視圖。如所示，在該填充管130所在的區域連接著該較 南的薄板110和轉低的薄板120，管邊緣接頭400可進一 步被利用來形成一個緊密的液體密封墊。 第五圖闡明第一圖中孤立的較低薄板120之平面視 圖’顯示該較低的薄板120(即第五圖闡明第一圖裝置的上 v 視圖，為了清楚將較高的薄板110移開）之内部表面205B 和根據本發明實施例的一個冷凝液溝槽結構。該冷凝液溝 槽結構可以利用一個或多個先以決定的溝槽圖案來形成， 在說明的實施例中，該冷凝液溝槽結構包含以下圖案的組 合’如一個格子圖案500、一個葉脈圖案510和/或多芯結 構圖案520(如上述）。除此之外，該冷凝液溝槽結可包括 提高沸騰的多芯結構520在此蒸發區内。.如上所解釋，該 頂點的機械接觸點225、235可被利用產生頂點接合點 250，藉由選擇性地將需要的頂點結合在一起。 12 200848683 第六圖闡明第一圖中孤立的較高薄板U〇之平 第六圖闡明第一圖和/或第三圖裝置的底部視圖' 2工二疋2較低的薄板120移開）顯示本發明實施 古在该較高的薄板110之内表面205A的蒸汽 ’ =凝液㈣結構，該蒸汽_結構可明用— 預先決定的溝槽圖案來形成，包含，如—個格子圖宰次 一個葉脈圖案⑽，但不限制在此I比較第 冷凝 r ::賴槽結構的溝槽寬度(外觀比例)是較大且； 所使面配物冷魏溝朴蒸汽溝槽 回流溫度的===支撐在f接 熱器100,該溝槽結構對以下幾#二用散 ;=:^(由此減少蒸汽二 強度。那就是’不像其他的蒸汽室在兩薄板之 i-個内部的體積(即-個開放的空間) 量的散熱器100的内部的體積σ t 、θ ϋ条/t ⑽中的溝槽結構所㈣ϊ110、 這些溝槽結構的空間分佈，可。的某+脈）°猎由改變 積一和因此所產生的力—以平 2〜瘵汽壓作用的表面 板n〇和較低薄板12。之間所形;的 度。在這種方式之下，每—個、、.她&貝.，，，占接口點250的強 影響它的流動品質（例如毛細竹籌田^；结構的深度和幾何形狀 、、、田作用力）。這種能力與内部 13 200848683 板的接合無關，其由溝槽結構的稀疏來決定。如同上述， 最好至少有10%的内部薄板表面積應該功能性的結合=一 起（例如經由頂點接合點250)以提供所需要的強度。因此， 該上面的溝槽結構能夠選擇性地增加此裝置在平面上的、、j 度散熱能力，當提供足夠的接合點則可保證穿過面板熱= 的阻力可最小化，也同樣地保證適當的壓力等級。”'、机 以上所述僅為本發明之較佳實施例而已，並非用以限 定本發明之申請專利範圍；凡其它未脫離發明所揭示之^ 神下所完成之等效改變或修飾，均應包含在下述之申於^ 利範圍内。例如，該散熱裝置100(蒸汽室）可具有任二 形狀或任何適合的尺寸。藉由特定的例子，該裝置1〇〇可 以包括一對矩形的平板使其在互相接觸的狀態。再者，該 裝置100可具有一般像箱子形狀有一個上壁、一個底壁^ 兩個邊壁。如上所註記，該底壁（或底平面）可包括一個蒗 發區定義在其中。 該較高的薄板110和較低的薄板120可以由以下物質 ί所形成，但不限制於此，金屬、金屬化合物、聚合物（有或 沒有金屬内層其可藉由電鍍、沉積或技藝所知的任何其他 方法），和它們的組合。該較高的薄板110和較低的薄板 120可以是該裝置100分開的元件的形式，或可具有一個 單一的結構，其中這些薄板是一個較大薄板的部份，在結 合時會摺疊以去除一個邊緣接頭的需求。 該些在薄板110、120上的蒸汽溝槽21〇八_21〇(：：和冷凝 液溝槽230Α_230Ε可以是像格子圖案的形式或是像〆片禁 200848683 子上的葉脈不規則的圖案。該結構的形狀可為圓形（像半圓 或是半橢圓）、矩形、多邊形、三角形或是它們的組合。提 供該冷凝液溝槽具有較高的毛細作用力的方法可藉=尺寸 的不同或形狀的不同，或兩者。舉例，該冷凝液和兮蒸、气 溝槽可具有相同的尺寸，但有不同的幾何圖案（形 此即彼，該冷凝液和該蒸汽溝槽可具有相同的幾何圖案， 但有不同的尺寸。例如，一個較小的矩形溝槽會產生二個 較高的表面張力相較於較大的矩形溝槽，再者，眾所鬥知 的外觀比例不同的矩形溝槽會產生不同的表面張力γ此 外，可增加針腳栅格結構以作為一個增加沸騰功能的多炉 結構。-個薄板110、120的表面(即該溝槽結構“以 ^-種溝槽圖案的形式或可包含這些圖案(如在圖 弟六圖所闡明）的組合。 ’、 的或管130可由此兩薄板110、120 #分開部份 =出來形成，二選-，該管13〇可以是屬於該裝置刚 3體官以與標準的真空哪筒界面保持—致。該固體管130 2由焊接、焊錫或任何此技藝所知的類似方法。該可基 是水、酒精、氨、有機液體或任何此技^ 有杯Γΐΐΐ槽14GA、14GB可具有任何適合的形狀或具 ^任何適合的尺寸以符合其描述的目的。此外，此溝 才印的數量並無限制—為了允許空氣在 田毒 夕卜ίίΐ! 該线溝槽可在較低的薄板12〇的 盖上和/或較高的薄板110的外表面上形 成该空氣溝槽賭、剛可經由壓印、選擇性的 15 200848683 材料移除、切割、削去、沖模、劃線，或習知技藝所知的 類似方法來形成。 因此，可預期的是凡其它未脫離發明所揭示之精神下 所完成之等效改變或修飾，均應包含在下述之申請專利範 圍内。例如，可以了解的項目像是 “左”、“右”、“頂”、“底”、“前”、“後”、 “邊”、“高”、“長度”、“寬度”、“較高的”、 “較低的”、“内部的”、“外部的” “内部”、“外部” / 和類似這些在此會被使用的，純粹描述參考點且非限制本 % 發明於任何特別的方向或結構。 【圖式簡單說明】 I ； : 第一圖係根據本發明實施例之一種增加蒸汽量的散熱器之 3D視圖； 第二A圖為第一圖中此增加蒸汽量的散熱器沿著A-A剖面 線的爆炸視圖； 第二B圖為第一圖中此增加蒸汽量的散熱器沿著A-A剖面 線的剖面視圖，顯示一個包含邊緣接頭連接的實施 例； 第三圖為第一圖中此增加蒸汽量的散熱器沿著A-A剖面線 的剖面視圖，顯示一個包含摺疊接頭連接的實施例； 第四圖為第一圖中此增加蒸汽量的散熱器沿著B-B剖面線 的剖面視圖，更進一步顯示環繞填充管的接頭； 第五圖闡明第一圖中下薄板之内部表面之平面視圖，顯示 16 200848683 根據本發明貪施例的較低的薄板的一個溝槽結構； 第六圖闡明第一圖中上薄板之内部表面之平面視圖，顯示 根據本發明實施例的較高的薄板的一個溝槽結構。 在此揭露中，從頭到尾參考數字被用來識別元件。The invention relates to a steam groove to increase μ,: Γ θ kind of cooling device, _ is - kind of occupant eight main 钿 田 你 丄 丄 丄 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 [Previous technology] When the electronic components and equipment increase the operating speed and the reduced heat becomes the main production τ of an electronic device and system to improve the performance, the semiconductor forming the electronic component is generated. The size is constantly shrinking, and the second factor is not affected. When the semiconductor size is reduced, the heat flux (per single = required to increase the transmission q) increases. The increase in heat flux causes the product to cool ^ ^ only the total heat increase Because the heat flux is increased by only 1, the length of the different lengths will overheat 'may cause electronic failure. 5 呀 and ^, in addition, 'the steam room is used to increase the scattered 2 method - point to use' but the problem remains The use of ', ^ = as heat conduction, as a result, it requires the heat conduction phenomenon of the foot heat limit. Therefore, a thicker dispersion = 5 short-term overheating phenomenon. The effect of steam chamber improvement is 盍, but when 暮, 卞玄社人命工', The dimensional tolerances cannot be maintained when the high vapor pressure generated by the metal 疋田^又到,,,口口 D, and subjected to the high temperature reflow step (for example, a steam chamber operated in the form of a 200848683 body> steam chamber cover). The choice of steam core is problematic - the choice of proper anger needs to be able to maintain the flow rate of the condensate and maintain sufficient capillary pressure to overcome the effects of gravity. When the thickness of the steam chamber is reduced to replace the function of the metal cover, this becomes Another problem. Therefore, it is necessary to provide a heat sink to overcome these problems of the steam chamber and the metal cover. SUMMARY OF THE INVENTION [The present invention relates to a radiator for increasing the amount of steam, including steam and condensate passages selectively Formed in a pair of fluid transfer elements to selectively increase the heat dissipation capability of the device in a plane. Each set of channels is spaced to form a vertex that is mounted to provide sufficient joint area to allow heat flow through the plane to resist right Minimized as if a proper pressure level is ensured. In one embodiment of the invention, the dispersion The thermal device comprises a lower panel and a higher panel. Each panel is generally planar and includes an upper surface and a lower surface. The lower panel has a condensate passage formed on the upper surface thereof. The high panel has a vapor channel formed when its lower surface I is formed (i.e., the channel is typically formed on the opposite inner surface). The channels formed in the upper and lower panels are spaced apart such that a plurality of vertices are generated. Such a structure, when the lower surface of the upper panel is in mechanical contact with the upper surface of the lower panel, the apex functions as a post that supports the sheet against high pressures maintained in the device. Optionally, The apex can be selectively joined (e.g., by welding) to form a vertex joint. In operation of the cow, the apparatus can be evacuated and filled with an evaporable liquid and then sealed internally to form a heat pipe environment. 200848683 The condensate passage can be sized and shaped differently than the size and shape of the steam passage such that the condensate passage produces a higher capillary force than the steam passage. For example, the condensate passage can be of a smaller size than the steam passage (e.g., the condensate passage can have a sharper angle than the steam passage). The lower panel, in addition, may comprise a multi-core structure where the capillary force increases as the distance of an evaporable zone decreases. The multi-core structure also defines a multi-core structure that increases boiling to promote evaporation and minimize boiling overheating. [Embodiment] The first figure is a 3D view of a heat radiator for increasing the amount of steam according to an embodiment of the present invention. The heat sink 100 that increases the amount of steam may comprise a first (higher) fluid transfer element or sheet or panel 110, a second (lower) fluid transfer element or sheet or panel 120, and a non-essential fill tube. 130 is disposed between two sheets, each of which may be planar, including an upper surface and a lower surface. Specifically, as shown in FIG. 2A, the upper sheet 110 includes an outer surface 200A and an inner surface 205A; similarly, the lower sheet 120 also includes an outer surface 200B and an inner surface 205B (this side) Opposite the inner surface of the first sheet). Returning to the first figure, in the presence of a flux or thermal interface material, the higher sheet 110 may further comprise one or more air channels for proper air flow out. For example, the outer surface 200A of the taller sheet 110 can include an air channel 140A therein; similarly, the outer surface 200B of the lower sheet 120 can include an air channel 140B therein. 200848683 The air channels 140A, 140B can be formed via embossing, selective etching, material removal, cutting, chipping, die, scribing, or other steps known in the art. The thickness of the sheets 110, 丨2〇 may include about 12 micrometers to 2 centimeters, but is not limited thereto. The fill tube 13(), which is a 1 〇〇 internal cavity fluid exchange conduit for this purpose, can be connected to a vacuum cartridge and/or liquid supply. In operation, the tube 13 is sealed after the gas in the device is vented and/or after the device is filled with vaporizable liquid. The second and second panels illustrate a cross-sectional view of the device along the a-line in the first figure, showing the internal structure of the heat sink 100 for increasing the amount of steam according to an embodiment of the present invention. As shown, the higher sheet 110 includes one or more vapor passages or grooves 210A, 210B, 210C in the inner surface 205A thereof (ie, the surface faces the inner surface of the lower sheet 丨2〇) 205B). The size and/or shape of the vapor channels 210A-210C can be any suitable pattern for the purposes described. The steam channels 210A-210C are mounted to permit condensate and steam to pass through once the condensate (i.e., the vaporized liquid) evaporates. The shape of the steam grooves 210A-210C may include a circle 210A, a rectangle 210B, and a polygon 21 〇C, but is not limited thereto. Further, the rectangle 210B and the polygon 2i〇c steam groove may have a circular shape. An angle 220 (which may be produced in the step of groove formation). The vapor channels 21OA-210C may be known by imprinting, selective etching, material cutting, chipping, die, scribing or conventional techniques. A similar method is used to form. Even better, all of the vapor trench structures are formed using a combination of trench shapes (eg, circles and polygons). The vapor trenches 21A_21〇c can be separated by the distance of 200848683' This is so that the apex 225 is selectively placed along the inner surface 205A of the higher sheet n', as will be described in more detail below. This trench structure, in addition, may be formed by a predetermined pattern on the surface, including a grid pattern and/or a vein pattern (sixth diagram), but is not limited thereto. The lower sheet 120 comprises one or more condensate channels or channels 230A, 230B, 230C, 230D, 230E (also known as Evaporated liquid groove) in its Formed in surface 205B (i.e., the surface faces inner surface 205A of the upper sheet 110). The condensate channels 230A-230E are core structures for transporting vaporizable liquid 'e.g., near the evaporation zone of the lower sheet. The condensate channels 230A-230E may be formed by embossing, selective etching, material removal, cutting, chipping, die, scribing, or the like known in the art. The shape of the 230A_230E includes a triangle 230A, a rectangle 230B, and a circle 230C, but is not limited thereto, and the shape may be formed not only by the groove 230D (such as the shape of the chord) formed by a technique such as cutting, but also by a scribe line 230E. (For example, there are generally parallel parallel sides and a generally V-shaped bottom.) I. The condensate grooves 230A-230E have a triangle 230A and a rectangle 230B which may further have a circular corner 220 (which may be in the groove 230A-230E) The step of forming is produced.) Preferably, all of the condensate channel structure is formed using a combination of trench shapes (eg, circular and polygonal). The condensate channels 230A-230E may be spaced apart such that Top 235 is formed along the inner surface 205B of the lower sheet 120. The condensate grooves 230A-230E, in addition, may be formed by a predetermined pattern on the surface, including a lattice pattern and/or a vein pattern (first Figure 5, 200848683 In order to effectively perform capillary action, the condensate channel structure can further define a multi-core structure - a structure with capillary action capacity increases with decreasing distance of the evaporation zone (ie, the region closest to the heat source). Alternatively or additionally, the condensate trench structure may further comprise a boiling strengthened multi-core structure 240' to enhance evaporation efficiency and minimize boiling overheating. For example, the entire condensate channel structure can be formed by a selective combination of a boiling, multi-core structure, as the condensate channels 23A-230E have different shapes. Additional multi-core structure data (with or without boiling enhancement) is disclosed in U.S. Patent No. 11/272,145 (U.S. Publication No. 2006-0060330) ( and U.S. Patent No. 11/164,429 (U.S. Publication No. 2006-0196640). All of the combinations are incorporated herein by reference. To maintain proper capillary action, the vapor channels 210A-210C remain open and most of the vaporizable liquid remains in the condensate channels 230A-230E, which condensate channels There should be a characteristic that increases the capillary force beyond the vapor channels. In other words, the capillary force generated by each of the steam channels 210A-210C may be less than the capillary produced by each of the condensate channels 230A-230E. This can be achieved by providing condensation (the size (size and/or geometry) of the liquid channels 230A-230E differs from the size (size and/or geometry) of the steam channels 210A-210C. By way of special example, the condensation The liquid channels 230A-230E(1) may have a smaller dimension ' and/or (2) a geometry/shape that may have a sharper angle than the steam channels 210A-210C. The higher sheet 110 can The following process is combined with a lower sheet 120, such as ultrasonic bonding, thermal sonic bonding, tungsten inert gas (tig) welding, plasma welding, laser welding, soldering, brazing, or other known methods of 200848683. Forming, for example, the apexes 225, 235 selectively between the inner surface 205A of the souther sheet 110 and the inner surface 205B of the lower sheet 120, the sense contact area, selectively weldable to form a vertex joint Point 250. Some of the apex joints 250 in the chamber effectively form a series of columns to provide power to the increased amount of heat sink 1(), and this device is monthly enough to resist the reflow process (eg, about The pressure generated by the environment of 2 degrees Celsius must support the high vapor pressure of the heat sink 1 。. As shown in Figure 2A, the apex joint 250 can be formed, regardless of the apex 225, 235 position Any position in the two thin plates 11〇, 12〇 that are in contact with each other by mechanical. This structure is different from the ordinary steam chamber, in that there is solid insertion inside, and only the -, the bonding interface (although each thin plate is used for lifting bonding) The purpose may include a plurality of slab joints 25 〇 of the slabs and/or the coating material. The number of contact sets of the top lands 25G is not particularly limited in terms of welding. The best 'at least the flat sheet area 10% should be utilized to 25G to provide sufficient mechanical strength of the scatter to resist the force generated by the garment during operation. In addition, the increased amount of heat sink 100 can include a 1 seal. The crucible 60 is disposed along the seam of the heat sink 100 (i.e., the edges of the jaws 110 are in contact with each other). The edge joint 260 seals the two jaws 110, 120 into a private, too dense fluid seal. (Maintaining a tight one within the garment 100, the radiator with increased vapor amount _ or the panel m and the lower sheet or face m; the structure that is connected along the edge. As in the above 11200848683 edge joint 260 can be used to seal the remaining side of the device 100 together. 0 When forming the heat sink 100, the edge joint 260 and the apex joint 250 can be formed together using the same steps or separately using different steps. For example, The edge joint 260 and the apex joint 250 may be formed simultaneously using thermal sonic bonding. In operation, the higher sheet n 〇 and the lower sheet 120 may be joined together, the tube 13 〇 being inferior, then as described above (e.g., edge joint 260) is sealed. The heat sink 1 can then be evacuated and filled with vaporizable liquid (by the tube 130). Once filled, the tube 130 can be sealed to hold the device. 1 The internal state of the crucible. The fourth figure illustrates a cross-sectional view of the radiator with the increased amount of steam in the first figure along the BB section line. As shown, the southerly sheet is joined in the region where the filling tube 130 is located. 110 and The lowered sheet 120, the tube edge joint 400 can be further utilized to form a tight liquid seal. The fifth figure illustrates a plan view of the isolated lower sheet 120 in the first view 'showing the lower sheet 120 (ie, The fifth figure illustrates the upper v-view of the first figure device, the inner surface 205B of which the higher sheet 110 is removed for clarity, and a condensate channel structure in accordance with an embodiment of the present invention. The condensate channel structure can be utilized One or more are formed first in a determined groove pattern. In the illustrated embodiment, the condensate channel structure comprises a combination of the following patterns, such as a lattice pattern 500, a vein pattern 510, and/or a multi-core structure pattern. 520 (as described above). In addition, the condensate channel junction can include a raised core multi-core structure 520 within the evaporation zone. As explained above, the apex mechanical contact points 225, 235 can be utilized Vertex joint 250, by selectively combining the required vertices. 12 200848683 Figure 6 illustrates the sixth figure of the isolated higher sheet U 〇 in the first figure illustrating the first and/or third The bottom view of the apparatus '2 疋 2 较低 2 lower sheet 120 is removed) shows the steam '= condensate (4) structure of the inner surface 205A of the higher sheet 110 of the present invention, which can be clearly used – a predetermined groove pattern is formed, including, for example, a lattice pattern to kill a vein pattern (10), but is not limited to the comparison of the groove width (appearance ratio) of the first condensation condensed r:: groove structure is larger And; the surface matching cold Weigou Pu steam groove reflow temperature === supported in the f heat exchanger 100, the groove structure for the following #二用散; =: ^ (thereby reducing the steam two strength That is, unlike other steam chambers in the inner volume of the two thin plates (ie, an open space), the volume inside the heat sink 100, σ t , θ ϋ bar / t (10) Structure (4) ϊ 110, the spatial distribution of these trench structures, can be. A certain + pulse) ° hunting by the change of the product and the resulting force - the surface of the plate 2 ~ 瘵 steam pressure n 〇 and lower sheet 12 . Between the degrees; In this way, each one, and her & Bay,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Force). This capability is independent of the bonding of the internal 13 200848683 board, which is determined by the sparseness of the trench structure. As noted above, it is preferred that at least 10% of the internal sheet surface area should be functionally combined (e.g., via apex joint 250) to provide the desired strength. Therefore, the upper groove structure can selectively increase the heat dissipation capability of the device on the plane, and when sufficient joints are provided, the resistance through the panel heat can be minimized, and the same is ensured. Appropriate pressure rating. The above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the invention as defined by the invention; It should be included in the following claims. For example, the heat sink 100 (steam chamber) may have any two shapes or any suitable size. By way of a specific example, the device 1 may include a pair of rectangles. The slabs are in a state of being in contact with each other. Further, the apparatus 100 may have an upper wall, a bottom wall, and two side walls, generally in the shape of a box. As noted above, the bottom wall (or bottom plane) may include a The burst zone 110 is defined therein. The higher sheet 110 and the lower sheet 120 may be formed of, but not limited to, a metal, a metal compound, a polymer (with or without a metal inner layer thereof) Electroplating, deposition, or any other method known in the art, and combinations thereof. The higher sheet 110 and lower sheet 120 may be in the form of separate components of the device 100, or may have a single Structure wherein the sheets are part of a larger sheet that folds when joined to remove the need for an edge joint. The steam grooves 21 on the sheets 110, 120 are _21 〇 (:: and condensed) The liquid groove 230Α_230Ε may be in the form of a lattice pattern or an irregular pattern of the veins on the slabs of 200848683. The shape of the structure may be a circle (like a semicircle or a semi-ellipse), a rectangle, a polygon, a triangle or It is a combination of them. The method of providing the condensate groove with higher capillary force can be different in size or shape, or both. For example, the condensate and the steaming and gas grooves can have the same Dimensions, but with different geometric patterns (in this case, the condensate and the vapor groove can have the same geometric pattern but different sizes. For example, a smaller rectangular groove will produce two The high surface tension is compared to the larger rectangular groove. Furthermore, the rectangular grooves with different appearance ratios will have different surface tensions. In addition, the pin grid structure can be increased as a multi-furnace structure that increases the boiling function. The surface of the thin plates 110, 120 (ie, the groove structure "in the form of a groove pattern or may include these patterns (as illustrated in Figure 6) ', or the tube 130 can be formed by the two thin plates 110, 120 # separating part =, the second selection - the tube 13 〇 can belong to the device just 3 body to maintain the standard vacuum interface The solid tube 130 2 is formed by soldering, soldering, or any similar method known in the art. The base is water, alcohol, ammonia, organic liquid or any of the techniques. The cups 14GA, 14GB can have any suitable shape. Or have any suitable size to meet the purpose of its description. In addition, there is no limit to the number of grooves that can be printed - in order to allow air in the field of poisoning! The line groove can be covered in the lower sheet 12 The air channel gambling is formed on the outer surface of the upper and/or upper sheet 110, just by embossing, selective 15 200848683 material removal, cutting, cutting, dicing, scribing, or conventional techniques. A similar method is known to form. Therefore, it is contemplated that other equivalent changes or modifications may be made without departing from the spirit of the invention. For example, items that can be understood are like "left", "right", "top", "bottom", "front", "back", "edge", "high", "length", "width", "more" "High", "lower", "internal", "external", "internal", "external" / and the like, which are used herein, are purely described as reference points and are not limited to this invention. Direction or structure. BRIEF DESCRIPTION OF THE DRAWINGS: The first figure is a 3D view of a heat sink for increasing the amount of steam according to an embodiment of the present invention; the second figure is a heat sink of the increased amount of steam along the AA section in the first figure. Explosion view of the line; Figure 2B is a cross-sectional view of the heat sink with the increased amount of steam along the AA section line in the first figure, showing an embodiment including an edge joint connection; the third figure is the increase in the first figure. A cross-sectional view of the heat sink of the steam amount along the AA section line shows an embodiment including a folded joint connection; the fourth figure is a cross-sectional view of the heat sink with the increased amount of steam along the BB section line in the first figure, further A joint showing the inner circumference of the lower sheet is shown; the fifth diagram illustrates a plan view of the inner surface of the lower sheet in the first figure, showing a groove structure of the lower sheet of the method according to the present invention; A plan view of the inner surface of the upper sheet in the drawing shows a trench structure of a taller sheet in accordance with an embodiment of the present invention. In this disclosure, reference numerals are used from beginning to end to identify components.
【主要元件符號說明】 100 增加蒸汽量的散熱器 110 較高的（第一）薄板 120 較低的（第二）薄板 130 填充管 140A 〜140B 空氣溝槽 200A 〜200B 外表面 205A 〜205B 内表面 210A〜210C 蒸汽溝槽 220 圓形的角 225 、 235 頂點 230A 〜230E 冷凝液溝槽 240 、 520 多芯結構 250 頂點接合點 260 、 400 邊緣接頭 300 摺疊-接頭 500 、 600 格子圖案 510 、 610 茱脈圖案 A-A 〜 剖面線 17[Main component symbol description] 100 Heat sink 110 with increased steam amount Higher (first) thin plate 120 Lower (second) thin plate 130 Filled tubes 140A to 140B Air grooves 200A to 200B External surface 205A to 205B Inner surface 210A~210C steam groove 220 rounded angle 225, 235 apex 230A ~ 230E condensate groove 240, 520 multi-core structure 250 apex joint 260, 400 edge joint 300 fold-joint 500, 600 grid pattern 510, 610 茱Pulse pattern AA ~ section line 17