TW200846196A - Planar sheet and fabricating method for color filter using the planar sheet - Google Patents

Planar sheet and fabricating method for color filter using the planar sheet Download PDF

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Publication number
TW200846196A
TW200846196A TW097107318A TW97107318A TW200846196A TW 200846196 A TW200846196 A TW 200846196A TW 097107318 A TW097107318 A TW 097107318A TW 97107318 A TW97107318 A TW 97107318A TW 200846196 A TW200846196 A TW 200846196A
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Taiwan
Prior art keywords
layer
transparent resin
transparent
resin layer
thickness
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Application number
TW097107318A
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Chinese (zh)
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TWI396631B (en
Inventor
Jun Ochi
Makoto Sugiya
Yasuhiko Kondo
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Sumitomo Rubber Ind
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Publication of TW200846196A publication Critical patent/TW200846196A/en
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Publication of TWI396631B publication Critical patent/TWI396631B/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133516Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C53/00Shaping by bending, folding, twisting, straightening or flattening; Apparatus therefor
    • B29C53/16Straightening or flattening
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00634Production of filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays

Abstract

A planar sheet having sequentially laminated layer including a mold releasing layer, a substrate layer and a elastic layer, wherein the surface tension of contacting region of the mold releasing layer (23 DEG C) is smaller than or equal to 30 mN/m and the arithmetic mean roughness of the mold releasing layer in roughness curves Ra is smaller than or equal to 20 nm. The arithmetic mean roughness of the substrate layer adjacent to the mold releasing layer Ra is smaller than or equal to 50 nm. The elastic ratio of the elastic layer (23 DEG C) is between 0. 5 MPa to 20 MPa and the thickness of the elastic layer is between 0. 1mm to 0. 5 mm. The planar sheet is used to planarize a transparent resin layer and prevent transparent ink forming the transparent resin layer from transferring back during printing such that it is difficult for the transparent resin layer to have defect du to the mixing of particles. A fabricating method for color filter using the planar sheet is also provided.

Description

200846196 , Z /^c /pii 九、發明說明: 【發明所屬之技術領域】 本發明是關於一種平坦化片以及使用該平坦化片的彩 色濾光器的製造方法,上述平坦化片藉由與構成彩色濾光 裔的其中至少一部分已被著色的透明樹脂層的表面相抵 接’來使上述透明樹脂層的表面平坦化。 【先前技術】 用於液晶顯示器(Liquid Crystal Display,LCD )等平 板顯示器中的彩色濾光器藉由如下方式而製造:將與構成 上述液晶顯示器等的紅色(R)、綠色(G)以及藍色(B) 各像素相對應的、且由已被著色成上述各色的透明油墨所 形成的條狀圖案(stripe pattern),以像素為單位有規則地 排列印刷於透明基板上,形成透明樹脂層。 、然而,在將著色成上述各色的透明油墨以各種印刷方 去印刷所形成的各色條狀圖案巾會產生如下問題:在各個 剌油墨喊錄力作訂,其絲職兩_低而中央 ^的犬出形狀,因此,作為各色條狀圖案之集合體的透 明樹脂層表面會形成為與上述條狀圖㈣突出形狀相對應 的凹凸形狀,該凹凸形狀使得光產生漫反射,從而導致顯 =的對比度下降’例如對於LCD而言,會產生液晶應答的 因此’為了使形成於基板上的透明樹脂 層的表面平坦化而進行各種技術性研究。 例如,在日本專利公開公報搬_28_4衝 JP03-156419A ( 1991)中,裎-从,朴 J甲揭不一技術,其使用電子束硬 6 200846196 ^ /2δ /pn 化型、紫外線硬化型等的透明油墨作為上述條狀圖案形成 材料的透明油墨,並且在使用上述透明油墨來印刷各色條 •狀圖案而形成的透明樹脂層上,利用薄膜或玻璃基板等平 .板狀按壓構件疊合於其上並進行按壓,以使上述透明樹脂 層的表面平坦化,在此狀態下照射電子束或紫外線,使透 明油墨硬化後’將上述按壓構件剝離。 又’於日本專利JP03_154003A( 1991 )中揭示一技術, • 其利用熱硬化性的透明油墨來形成條狀圖案並使其熱硬化 後,在上述各色條狀圖案所構成的透明樹脂層上,疊合一 作為按壓構件的薄膜,並在此狀態下利用空氣壓力(也 pressure)對上述薄膜均勻地施壓,藉此使上述透明樹脂層 的表面平坦化。 然而,上述文獻所揭示的利用平板狀按壓構件來實現 平坦化的方法中,存在如下問題:在將上述按壓構件疊合 於透明樹脂層的表面上時,二者間易殘留氣泡,若不去除 殘留氣泡即進行平坦化處理,則會在平坦化後的透明樹脂 - 層的表面上殘留氣泡痕跡的缺陷。 * 因此,為了防止氣泡殘留,例如於日本專利 JP03-156419A (1991)中詳細規定了將作為按壓構件的玻 璃基板璺合於透明樹脂層的表面的順序,但為了實施上述 順序,必須使用上述文獻的圖式中所揭示的專用裝置來謹 慎地作業,使得彩色濾光器的生產性降低、且成本升高。 另一方面,於日本專利Η〇2·297502Α (1990)中揭示 一技術,為了利用平版套版印刷(offset printing)法於基200846196 , Z /^c /pii IX. Description of the Invention: Technical Field The present invention relates to a flattening sheet and a method of manufacturing a color filter using the same, wherein the flattening sheet is At least a part of the transparent resin layer constituting the color filter is abutted on the surface of the colored transparent resin layer to planarize the surface of the above transparent resin layer. [Prior Art] A color filter used in a flat panel display such as a liquid crystal display (LCD) is manufactured by red (R), green (G), and blue which constitute the above liquid crystal display or the like. Color (B) A stripe pattern corresponding to each pixel and formed by a transparent ink which has been colored into the above-described respective colors, is regularly arranged and printed on a transparent substrate in units of pixels to form a transparent resin layer. . However, in the strips of colored strips formed by printing the transparent inks colored in the above-mentioned respective colors in various printing directions, there is a problem in that the ink is squeaked in each of the inks, and the two dogs are low in the center. Since the shape is formed, the surface of the transparent resin layer which is an aggregate of the stripe patterns of the respective colors is formed into a concavo-convex shape corresponding to the above-mentioned strip shape (4) protruding shape, which causes the light to be diffusely reflected, thereby causing a contrast of The drop 'for example, for the LCD, a liquid crystal response is generated. Therefore, various technical studies have been conducted in order to planarize the surface of the transparent resin layer formed on the substrate. For example, in Japanese Patent Laid-Open No. 28_4, JP03-156419A (1991), 裎-从, 朴J甲 uncovers a technique using electron beam hard 6 200846196 ^ /2δ / pn type, ultraviolet curing type, etc. The transparent ink is used as the transparent ink of the strip-shaped pattern forming material, and is laminated on the transparent resin layer formed by printing the respective strip patterns using the transparent ink, and is laminated on the flat plate-shaped pressing member such as a film or a glass substrate. The surface of the transparent resin layer is flattened, and an electron beam or an ultraviolet ray is irradiated in this state to cure the transparent ink, and the pressing member is peeled off. Further, a technique disclosed in Japanese Patent No. JP03_154003A (1991), which is formed by forming a strip-like pattern by a thermosetting transparent ink and thermally hardening it, is laminated on a transparent resin layer composed of the above-mentioned respective strip patterns In the state where the film is a pressing member, the film is uniformly pressed by air pressure (also pressure), thereby flattening the surface of the transparent resin layer. However, in the method of achieving flattening by the flat pressing member disclosed in the above document, there is a problem that when the pressing member is superposed on the surface of the transparent resin layer, bubbles are likely to remain between the two, if not removed. When the residual bubbles are flattened, the defects of the bubble marks remain on the surface of the flat transparent resin layer. * In order to prevent the bubble from remaining, for example, the order in which the glass substrate as the pressing member is kneaded on the surface of the transparent resin layer is specified in Japanese Patent No. 03-156419A (1991), but in order to carry out the above sequence, the above documents must be used. The dedicated device disclosed in the drawings works cautiously, resulting in reduced productivity and increased cost of the color filter. On the other hand, a technique is disclosed in Japanese Patent No. 2,297,502 (1990), in order to utilize a lithographic offset printing method.

200846196 Z/Z6/pn 板表面上印刷條狀圖案,而使科周面上捲繞著橡皮包覆 層(offset blanket)的輕,在使上述橡皮包覆層的表面與 印刷後的透明翻層的表_接觸的狀態下,使上述棍在 =透明樹脂層上滾動’藉此實現透明樹腊層的表面的平 又、,在日本專利H08-075914A(19%)中揭示-技術: 在上述透明;層上印刷不含有著色劑的透明油墨後,使 用對外周面實施賴處理後的金舰,讀上述同樣的方 式進行平坦化處理。此外,在日本專利h〇8_234〇13a(i996) 中揭不-技術,其對外周面實施脫模處理後,於輕之上述 外周面上錢供給作為條狀圖案形成材料的透明油墨,並 在此^況下使上述n在基板上滾動,藉此將所供給的透明 油墨印刷至基板的表面而形成條狀圖案,同時進行平坦 處理。 ~ 上述文獻所揭示的利用輥來進行平坦化處理的方法 中、、可在使上述輥於透明樹脂層上連續滾動的情況下, 上述透明触層喊面騎平坦化處理,雜以產生 殘留的缺陷問題。 〃泡 :、、〈、而g使用捲繞著橡皮包覆層的輥是與在日本專 =〇2·297502Α ( 1990)中所揭示的以平版套版印刷法 圖案時所使用的輥相同時,考慮到上述橡皮包覆層 月:夠自版上較好地接受透明油墨,並可將該透明油二 至基板表面,由此而設定上述橡皮包覆層的表面相 對於透明油墨㈣濕性、上述橡皮㈣層的整個表面的柔 8 200846196 272^7pil 軟性等特性,因此在進行平坦化處理時,形成透明樹脂層 的透明油墨會反轉印至橡皮包覆層的表面,故透明樹脂層 上容易產生凹部等缺陷,或者透明樹脂層容易遭到破壞, 從而存在難以使整個透明樹脂層均勻地平坦化的問題。200846196 Z/Z6/pn The surface of the board is printed with a strip pattern, and the circumference of the board is wrapped with an offset blanket. The surface of the rubber coating is transparently layered after printing. In the state of contact, the above-mentioned stick is rolled on the = transparent resin layer, thereby realizing the flatness of the surface of the transparent wax layer, disclosed in Japanese Patent No. H08-075914A (19%) - Technology: Transparent; after printing a transparent ink containing no coloring agent on the layer, the gold ship which has been subjected to the treatment on the outer peripheral surface is used, and the flattening process is performed in the same manner as described above. Further, in Japanese Patent Publication No. 8_234〇13a (i996), after the release treatment is performed on the outer peripheral surface, the transparent ink which is a strip pattern forming material is supplied on the outer peripheral surface of the light, and In this case, the n is rolled on the substrate, whereby the supplied transparent ink is printed on the surface of the substrate to form a stripe pattern, and flat processing is performed. ~ In the method of performing flattening treatment by a roll disclosed in the above document, when the roll is continuously rolled on the transparent resin layer, the transparent contact layer may be flattened to cause residual Defect problem. The blister:,, and the use of the roll wrapped with the rubber coating is the same as the one used in the lithographic pattern printing method disclosed in Japanese Patent No. 2,297,502 (1990). Considering the above-mentioned rubber coating layer month: it is sufficient to receive the transparent ink from the plate, and the transparent oil can be applied to the surface of the substrate, thereby setting the surface of the rubber coating layer relative to the transparent ink (4) wetness The soft surface of the entire surface of the rubber (four) layer is soft, such as 200846196 272^7pil. Therefore, when the flattening treatment is performed, the transparent ink forming the transparent resin layer is reversely transferred to the surface of the rubber coating layer, so the transparent resin layer A defect such as a concave portion is likely to occur, or the transparent resin layer is easily broken, and there is a problem that it is difficult to uniformly planarize the entire transparent resin layer.

又,當使用曰本專利Η08-075914Α ( 1996)、曰本專利 Η08-234013Α ( 1996)所揭示的對外周面實施脫模處理後 的金屬輕等時,相反地,因上述金屬輥等過硬而盔法靈活 地應對透明樹脂層的厚度不均等情況,故仍難以使整個透 明樹脂層均勻地平坦化。又,#上述金屬輥等⑽周面的 脫模處理劣化而導致形成透明樹脂層的透明油墨容易反轉 印至上述外周面時,必須面臨全體更換的問題。 因此,本發明者進行了如下的研究:將一平坦化片以 可更換的方式捲繞於上魏的外肢上,以用於平坦化處 理’上述平坦化片抵接於透明樹脂層表面的抵接面具有優 異的防止形成透明細旨層的透明油墨反轉印的特性,且整 個抵接面具有適宜使上述翻樹脂層平坦化的適當柔軟 性0 ' 然而 6、疋,當使用與先前的橡皮包覆層具有 ^同的構成、且韻抵接面_對於翻料㈣渴性及 整個抵接_減卿雜騎微難 來 ^化片時’尤其是在將平坦化片捲繞固定 周面场,料者㈣有異_,則 =片_上突起而顯現,從而在平坦二= 对月曰層上谷易產生與上述突起相對應的凹部等缺陷。 9 200846196 ^/Z6/pu 【發明内容】 本發明的目㈣在於提供—種平坦 使整個透明樹脂層均勻地平坦化,並且 μ千坦化片可 透明樹脂層的透明油墨反轉印,使得透:月b樹月:2成上述 因異物的混入而產生的缺陷,又,本發日發生 -種使訂述平㈣^的耗濾絲 在於提供 接=片自抵接於上述心^ =2 構成上述抵接面的脫模層、基二 及賴層,上錢模層馳接面絲面 : 於等於30爾m,且上述抵接面線管= 粗糙度Ra小於等於20nm。上述美 4 術千均 面的粗糙度曲線的算術平均粗糙^ 側之表 且,上述彈性層的彈性率(23。〇為〇 5 ,亚 且其厚度為0.1 mm〜5mm。 ^ MPa ’ 根據本發明,將依次積層的各層中脫模層之抵接面的 表面張力(23C)設為小於等於3〇mN/m,從而可防止形 成透明樹脂層的透明油墨反轉印至上述抵接面上。又( 基材層鄰近脫模層側之表面的粗糙度曲線的算術平均粗糙 度Ra設為小於等於50 nm,並且將形成於上述面上之脫模 層的抵接_粗糙度曲線的算術平均粗糙度⑸設為小於 等於20 rnn ’從而可提高上述脫模層表面的平滑性,使得 平坦化的透明樹脂層表面的平滑性提高。 而且,根據本發明,將彈性層的彈性率(23。〇設為 0.5 MPa〜20 MPa,將彈性層的厚度設為〇1麵〜5臟, 10 200846196 牟矛料正'平坦化片具有適宜使透明樹脂層平坦化的適 二二。ί ’在將上述平坦化片捲繞蚊於輕的外周面 里^右兩者間夾有異物等,則上述彈性層可吸收因上述 的形變,以抑制在抵接面上顯現與上述形 本發明的平坦化片較佳為,在將上述平坦化片的抵接 Γ=::=於輕的外周面上的狀態下,使透明樹脂 而用/尽接面’以使報在上述透明樹脂層上滚 動攸而用以貫現上述透明樹脂層的表面平坦化。藉此, 可在使輥於透明樹脂層上連續滾動的情況下, 而^月樹脂層的表面平坦化’從而可使因氣泡殘留 而引起的缺陷問題難以產生。 脫=較佳為,其厚度小於等於3〇 _。當脫模層的 = 於^叫時’可進—步提高使整個平坦化片具 ^且使透明樹脂層平坦化的適#的柔紐的效果。又, ^層較佳為,其拉伸彈性率(23<t )大於等於刚跑, 厚度為50 μιη〜500 μχη。 當基材層的拉伸彈性率(坑)大於等於i 〇〇购時, 可提=平坦化片的面方向的拉伸強度,在將上述平坦化片 以^疋,張力捲繞固定於報的外周面上等情況下,可防止 脫核層無法配合面方向的延伸而剝離或者產生龜裂。又, 層的厚度為50 μηι〜· μηι時,可使平坦化片具有 11、%於報的外周面上的適當的配合性、以及不易彎曲的 11 200846196 適當韌性。 本發明的彩色濾光器製造方法的包括如下步驟:在基 板的表面上形成至少一部分已被著色的透明樹脂層;以及 將本發月的平坦化片的抵接面作為外侧而捲繞於輥的外周 面亡,亚使得上述抵接面抵接於上述透明樹脂層的表面的 下’使上述輥在透明樹脂層上滚動,從而使透明樹脂 層的表面平坦化。 ^本發明’為了使透明樹脂層平坦化而使用捲繞著 柢本發明的平坦化4馳,故可 透明樹脂層均句地平象3在,進而使得整個 陷耸的矣因此’可製造出具備無上述缺 =的表面平滑的透明樹脂層的彩 【實施方式】 且槿成卜、^的平土一化片具備脫模層、基材層以及彈性層, 且構成上述抵接面的脫模層、 ===面:抵接“】= 層,上述抵接樹=上广抵接面的膜 mN/m。若抵接面的表 ( 广小於等於30 透明樹脂層分^ mN/m ’職模層自. 時,形成透明樹脂層的在進行平坦化處理 而出現在透明樹腊層上產〜、曰反^17至抵接面上,從 脂層遭到破壞的問題。〜凹部等缺陷、或者使得透明樹 12 200846196 Jl 再者,考慮到要進一步確保透明樹脂層在抵接面上防 止反轉印的產生,從而較佳為,上述抵接面的表面張力 (23c)為 5 mN/m〜25 mN/m,特佳為 10 mN/m〜20 rnN^n。^ ’賴層較佳為,以下述塗佈法等方法而形成, 此日寸若藉由抵接面的表面張力(23。〇)在上述範圍内的 f料來形成脫模|,則可確保上述脫模層在基材層上的密 著h以抑制脫模層因剝離而過早地消失,從而亦可使平 坦化片的壽命延化。 、,脫模層的表面張力M (23t)是藉由以Fowkes理論 ,擴展=〇Wms and 法而求出的值來表示的。亦 =在酿度23 C的測量環境下,於作為測量對象的脫模層 、、面上’滴下表面張力丫l、上述表面張力的分散成分γι/、 Χ及極11成·分YlP均為已知的溶劑的液滴,使用KyowaFurther, when the metal after the release treatment is applied to the outer peripheral surface disclosed in Japanese Patent Laid-Open Publication No. 08-075914 (1996) and Japanese Patent Application No. 08-234013 (1996), the metal roller or the like is excessively hard. Since the helmet method flexibly copes with the thickness unevenness of the transparent resin layer, it is still difficult to uniformly planarize the entire transparent resin layer. In addition, the release treatment of the circumferential surface of the metal roll or the like (10) is deteriorated, and the transparent ink forming the transparent resin layer is easily reversed. When printing on the outer peripheral surface, it is necessary to face the problem of replacement. Therefore, the inventors conducted the following research: a flattening sheet is wound on the outer limb of the upper Wei in a replaceable manner for flattening treatment. The flattening sheet abuts on the surface of the transparent resin layer. The abutting surface has excellent characteristics of preventing reverse transfer of the transparent ink forming the transparent layer, and the entire abutting surface has appropriate softness suitable for flattening the above-mentioned layer of the resin layer. However, when used and previously The rubber coating has the same composition, and the rhyme abutment surface _ for the turning (four) thirsty and the whole abutment _ 卿 杂 杂 杂 杂 骑 骑 微 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' In the circumferential field, if the material (4) differs from _, then the film _ is raised upwards, so that defects such as concave portions corresponding to the above-mentioned protrusions are easily generated on the flat slabs. 9 200846196 ^/Z6/pu [Invention] The object (4) of the present invention is to provide a flat ink to uniformly planarize the entire transparent resin layer, and to transparently transfer the transparent ink layer of the micro-tanned sheet to make it transparent. : month b tree month: 20% of the above-mentioned defects caused by the incorporation of foreign matter, and, on the day of the birth, the consumption of the filter wire is to provide a connection to the above-mentioned heart ^ 2 The release layer, the base 2 and the layup layer constituting the abutting surface, the upper surface layer of the upper mold layer is equal to 30 mils, and the abutting surface line tube has a roughness Ra of 20 nm or less. The arithmetic mean roughness of the roughness curve of the above-mentioned beauty is the surface of the elastic layer (23. 〇 is 〇5, and the thickness is 0.1 mm to 5 mm. ^ MPa ' according to the present According to the invention, the surface tension (23C) of the abutting surface of the release layer in each layer which is sequentially laminated is set to 3 μm/m or less, thereby preventing the transparent ink forming the transparent resin layer from being reversely transferred onto the abutting surface. Further, (the arithmetic mean roughness Ra of the roughness curve of the surface of the substrate layer adjacent to the release layer side is set to be 50 nm or less, and the arithmetic of the abutment-roughness curve of the release layer formed on the above surface is performed. The average roughness (5) is set to be equal to or less than 20 rnn' so that the smoothness of the surface of the above-mentioned release layer can be improved, and the smoothness of the surface of the planarized transparent resin layer can be improved. Moreover, according to the present invention, the elastic modulus of the elastic layer (23) 〇 set to 0.5 MPa~20 MPa, the thickness of the elastic layer is set to 〇1 face to 5 dirty, 10 200846196 牟 料 正 ' '' flattening sheet has a suitable suitable for flattening the transparent resin layer. The above flattened sheet is wound into a mosquito In the outer peripheral surface, if a foreign matter or the like is interposed between the right and the right side, the elastic layer can absorb the deformation due to the above, and it is preferable to suppress the flattening sheet of the present invention from being formed on the contact surface. The abutment of the sheet : =:: = in the state of the light outer peripheral surface, the transparent resin is used / the mating surface is used to cause the transparent resin layer to roll over the transparent resin layer for the transparent resin layer The surface of the surface is flattened, whereby the surface of the resin layer can be flattened while the roll is continuously rolled on the transparent resin layer, so that the problem of defects caused by the remaining bubbles is hard to occur. Preferably, the thickness is less than or equal to 3 〇 _. When the release layer = ^ ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' 提高 提高 提高 提高 提高 提高 提高 提高 提高 整个 整个 整个 整个 整个 。 整个 整个 整个 整个 。 Further, the layer is preferably such that the tensile modulus (23 < t ) is greater than or equal to just running, and the thickness is 50 μm to 500 μχη. When the tensile modulus (pit) of the substrate layer is greater than or equal to i. , can be raised = the tensile strength of the flattened sheet in the plane direction, in the above flattening sheet to ^ When the tension winding is fixed to the outer peripheral surface of the newspaper, it is possible to prevent the denucleation layer from being peeled off or cracked due to the extension of the surface direction. Further, when the thickness of the layer is 50 μηι to · μηι, the flattening can be achieved. The sheet has an appropriate fit of 11% on the outer peripheral surface of the newspaper, and an appropriate toughness of the non-bending 11 200846196. The color filter manufacturing method of the present invention includes the following steps: forming at least a portion of the surface of the substrate has been a colored transparent resin layer; and an abutting surface of the flattening sheet of the present month is wound around the outer peripheral surface of the roller as an outer side, and the abutting surface is brought into contact with the lower surface of the surface of the transparent resin layer. The above roller rolls on the transparent resin layer to planarize the surface of the transparent resin layer. In the present invention, in order to planarize the transparent resin layer, the flattening of the present invention is wound, so that the transparent resin layer can be uniformly flattened, so that the entire crucible can be manufactured. Coloring of the surface of the transparent resin layer without the above-mentioned defect = [Embodiment] The flat-grained sheet of the 槿 、 、 ^ 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备 具备Layer, === face: abutting "] = layer, the abutting tree = film mN/m of the upper abutting surface. If the surface of the abutting surface (widely less than or equal to 30 transparent resin layer ^ mN/m ' When the job layer is self-contained, the formation of the transparent resin layer occurs in the transparent tree layer, and the problem occurs when the resin layer is damaged. Defect, or to make the transparent tree 12 200846196 Jl Further, in order to further ensure that the transparent resin layer prevents the occurrence of reverse transfer on the abutting surface, it is preferable that the surface tension (23c) of the abutting surface is 5 mN. /m~25 mN/m, particularly preferably 10 mN/m~20 rnN^n. ^ 'The layer is preferably coated with the following By forming by the method, if the mold release is formed by the surface tension (23. 〇) of the abutting surface in the above range, the adhesion of the release layer on the substrate layer can be ensured. h suppresses the release of the release layer prematurely due to peeling, and can also extend the life of the flattening sheet. The surface tension M (23t) of the release layer is expanded by the Fowkes theory, 〇Wms and In the measurement environment of the degree of 23 C, the surface tension 丫l, the dispersion component of the surface tension γι/, on the release layer, the surface to be measured, Χ and 11%·minutes YlP are droplets of known solvents, using Kyowa

Science Co”Ltd·製造的 Fully aut〇mated contact gle meter (全自動接觸角測量儀)DM勘來測量上述溶 劑的接觸角Θ (〇)、卜;十、本\ d I )上述表面張力九、分散成分γ/、以及 W成分YlP,並根據該些值,利用下式Ο)而求出上述 脫模層表面的表面張力Ys的分散成分V與極性成分^:The Fully aut〇mated contact gle meter manufactured by Science Co” Ltd. is used to measure the contact angle of the above solvent Θ (〇), 卜; 10, this \ d I) the above surface tension The dispersion component γ/ and the W component Y1P are dispersed, and based on these values, the dispersion component V and the polar component of the surface tension Ys of the surface of the release layer are obtained by the following formula:

Yl ( 1 + Cose )=2( Ys V ) 1/2 + 2 ( YspYlp ) 1/2 ⑴, 進-步’根據上述分散成分V與極性成分☆利用 式(2)而求出脫模層的表面張力γδ (23。(:):Yl ( 1 + Cose )=2( Ys V ) 1/2 + 2 ( YspYlp ) 1/2 (1), further - based on the above-mentioned dispersion component V and polar component ☆, the release layer is obtained by the formula (2) Surface tension γδ (23. (:):

Ts = Ysd + ysp (2)〇 ^層可利用能夠形成表面張力在上述範圍内之膜層 的各種材料來形成,從提高上述_層_久性、延長平 13 200846196 x 坦化片的壽命的角度而言,特佳為,利用矽氧樹脂或氟樹 脂等表面能量小的樹脂來形成脫模層。脫模層可藉由所謂 塗佈法而形成,即,將含有上述樹脂或者其前驅物 (precursor)的塗佈液塗佈於基材層的一表面上之後,使 其乾燥,或者在含有前驅物的情況下,使上述前驅物反應 而生成樹脂。Ts = Ysd + ysp (2) The layer can be formed by using various materials capable of forming a film layer having a surface tension within the above range, from increasing the lifetime of the above-mentioned layer to the lifetime of the flat film of 200846196 x In view of the above, it is particularly preferable to form a release layer by using a resin having a small surface energy such as a silicone resin or a fluororesin. The release layer can be formed by a so-called coating method in which a coating liquid containing the above resin or a precursor thereof is applied onto one surface of a substrate layer, dried, or contained in a precursor. In the case of the substance, the precursor is reacted to form a resin.

又’對於脫板層的上述抵接面而言,由日本工業規格 JIS B0601 : 2001「製品的幾何特性規格(Gps) _表面 性狀:輪廓曲線方式一術語、定義以及表面性狀參數」 (與ISO 4287 : 1997 -致)所規^糙度曲線的算術平 均粗糙度Ra必須小於等於2〇 nm。若算術平均粗糙度如 超出20 nm,則脫模層的表面的平滑性會降低,因此,將 =層絲㈣狀轉印至對上絲祕壓而平坦化的透明 樹脂層的表©上,從而會導致透明樹脂層的厚度產生不 均二所以,在將具有上述透明樹脂層的彩色濾光器組褒入 =如LCD等中時’纟於透明樹脂層的厚度不均,在續 雷相應地產生濃度不均,從而產生晝質下降的問題。、、 、隹一考慮顺可能減少透日㈣脂層的厚度不均,以 平均粗糙度Ra較佳為,小;=脫1的表面的算術 。又,考慮到nm’特佳為小於等於 糙度Ra越小越二”/ ’則算術平均粗 含。腿術平均姆度如的下限甚至可包 然而,考慮到以下情況, •以主佈法形成的脫模層的 14 200846196 平均粗糙度Ra會受到底層 '即基材層上形成 的表面修飾加工成崎曲線的算術= 3::均粗一佳為大於等於、== 好爲所4,由於脫模層的表面狀態會受職層、即基 才g上用以形成脫模層之表面狀態的影響,故 =形成的脫模層絲_算術平均粗糙度&調整在: ^^内’重要的是,儘可能將上述基材層的面修飾加工 面°又’在利用塗佈法形成脫模層時,以下處理亦 為重要.例如採用棒塗法或法等㈣儘可能地形成表 面::二幽的塗佈方法,以及根據需要而對形成後的脫 核層的表面進彳了研磨修飾加王,其巾,上述棒塗法使用的 ,其外周面經研磨修飾加卫後的塗佈棒。脫模層的表面的 鼻術平均粗糙度Ra藉由以下方法而測量,即,使用c〇l〇rIn addition, for the above-mentioned abutting surface of the delamination layer, the Japanese Industrial Standard JIS B0601: 2001 "Geometry Specifications (Gps) _ Surface Properties: Contour Curve Method, Terms, Definitions, and Surface Property Parameters" (with ISO) 4287 : 1997 - The average arithmetic roughness Ra of the roughness curve must be less than or equal to 2 〇 nm. If the arithmetic mean roughness exceeds 20 nm, the smoothness of the surface of the release layer is lowered. Therefore, the = layer (four) shape is transferred to the surface of the transparent resin layer which is flattened by the upper thread, Therefore, the thickness of the transparent resin layer may be uneven. Therefore, when the color filter group having the above transparent resin layer is incorporated into, for example, an LCD or the like, the thickness of the transparent resin layer is uneven, and the corresponding The ground produces uneven concentration, which causes a problem of reduced enamel. , , , and 考虑 考虑 顺 顺 顺 ( ( ( ( ( ( ( ( ( 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四In addition, considering that nm' is preferably less than or equal to the roughness Ra, the smaller the two"/', the arithmetic mean is coarse. The lower limit of the average degree of leg surgery can be included, considering the following cases: The formed laminate layer 14 200846196 The average roughness Ra is affected by the bottom layer 'that is, the surface modification formed on the substrate layer is processed into a curve of the roughness curve = 3:: the average thickness is preferably greater than or equal to, == is good for 4, Since the surface state of the release layer affects the surface state of the release layer, that is, the surface of the release layer is formed, the resulting release layer yarn _ arithmetic mean roughness & adjustment is: ^^ 'It is important to make the surface of the above-mentioned base material layer as much as possible. When the release layer is formed by a coating method, the following treatment is also important. For example, by bar coating method or method, etc. (4) Surface:: a coating method of the second secluded, and, if necessary, a surface of the surface of the nucleation layer after the formation is subjected to a polishing modification, and the towel is used by the above-mentioned bar coating method, and the outer peripheral surface thereof is polished and modified. Coating bar. The nasal average roughness Ra of the surface of the release layer is Measured by the method, ie, using c〇l〇r

3D Laser Scanning Microscope ( ^ ^ 3D ^yenee C’mion製造的VK_97⑼]進行非接觸三維測 罝(Noncontact 3D measurement),並根據該測量所得的結 果,由依據上述JIS規格而計算出的值來表示。 脫模層的厚度較佳為小於等於3〇 _,特佳為小於等 於15 μιη。當厚度超出上述範圍時,整個平坦化片會變得 柔軟,從而在平坦化處理時,無法對透明樹脂層施加均勻 的壓力,因此無法使上述透明樹脂層均勻地平坦化。又, 15 200846196 於平坦化處理時,因脫模層 導致該脫模層的表面的平滑性上的移動而可能會 生不均,月11下降,透明樹脂層的厚度產 不勺綠根據H可能會導 的透明油墨反轉印至脫模層的表面上。成上核月树月曰層 再者’脫模層的厚度較 大於等於Ιμιη。#因^ 2寺 陣,特佳為 能益、去奋八薙/曰二、;,右厚度不足上述範圍,則可 月1法充刀獲賴由設置脫模 透明油墨反轉印的效果。脫模層是 離部分與未剝離部分之間產生階差的 ^ 心 r 使用上述 C0L0R 沁 Laser Scanning 職繼刪t)。接觸二維測置(— 基材層是支持其上下側的脫模層以及彈性層的膜声, 高㈣平坦化片在面方向上的拉伸強度且 械予上述平坦化片捲繞於輥的外周面上的適當配合性、以 及不易¥曲的適當動性’上述基材層的拉伸彈性率⑵ 較佳為大於等於刚MPa,特佳為大於等於細紙。 ,拉伸彈性率(抓)不足上述範圍時,會使得平坦 ,片在面方向的拉伸強度不足,故在將上述平坦化片以固 定的張力捲繞固定於輥的外周面等情況下,可能導致脫模 層無法配合面方向的延伸而剝離,或者產生龜裂。再、 拉伸彈性率(23。〇的上限並無特別限定,但為了維持用 16 200846196 以捲繞於輥的外周面上的適 性率⑽)較佳為小於等於隨彈 。基材相㈣·率是藉由 表示的:在溫度坑_量_卜/柄心的值來 圓:顧「加硫橡膠以及熱可塑^日本 H對1SQ 37:1994 _•^彳 %仏為使用聚對苯二甲酸 仍曰 薄』等的所===芳香族聚醯亞胺樹脂 ▽,介叮/士 7才,寻胰 hngmeenng plastic mm ) 〇 為基材層。用链、錄、不錄鋼、铁、銅等金屬11或薄板作 $基材層2厚度較佳為5G μπι〜5()() _,特佳為75 _ 不层心二右厚f不足上述範圍’則無法對平坦化片賦予 班化=時、適虽朝性’若厚度超出上述範圍,則無法對平 ^ 予捲繞於輕的外周面上的適當配合性’因此,上 ^植η Ϊ ^况均可能導致在使上述平坦化片以固定的張力 β +疋於幸昆的外周面上時的操作性降低。基材層的厚度 (micrometer) , Mitut〇y〇 Corporation rc〇〇iantwMi— ^ 對於基材層鄰近脫模層側的表面而言,由日本工業規 17 200846196 格JIS BO601 : 2001「製品的幾何特性規格(Gps ) 一 面性狀:輪_線料一㈣、㈣叹表面 、 (與^4287·· 1997 一致)所規定的_度曲線的算術平 均減度Ra必須小於等於50 nm。若算術平均粗链度如 超出50 nm,則藉由塗佈法而形成於表面上 接面的算術平均粗糙度1^會超出 公 旲g、一 範圍,因此將產生LCD等的等於^的 再者,考慮到使脫模層的表面的算 為以上說明的適當範圍内,從而基 ^^度Ra 面的算術平均粗糙度Ra較佳近脫模層側的表 於等於〗()nm。又,考慮t5nm,特佳為小 術平均_度以,從而基村脫^轉的表面的算 平均粗糙度以越小越好,該算 隹曰= 表面的算術 至可包含Onm。 $粗^度Ra的下限甚 然而,考慮到基材層的生產 上難以將基材層上預形成脫模層的如上所述,實際 曲線的算術平均粗糙度1^為/衣面修飾加工成粗糙度 考慮上魅紐縣叫㈣平滑面’當 於等於3 nm,特佳為大於等於$ 钬度Ra較佳為大 成脫模層的面的算術平均粗糙声ηΐ^。為了將基材層的形 例如,當上述基材層為金屬在上述範圍内, 方法,將該基材層的表面修、、¥,可利用研磨等 層為所謂工程塑料薄膜等時平滑面。又,當基材 j造薄膜的各步驟中的條株_對知出成形或延伸等 進仃調整,或者藉由研磨而將 18 200846196, 所製造的薄膜表面修飾加工成平滑面。基材層的形成脫模 層的面的算術平均粗糙度Ra藉由以下方法而測量,即,' 使用如上所述的C0L0R 3I) Laser Seanning3D Laser Scanning Microscope (VK_97 (9) manufactured by ^^3D ^yenee C'mion] performs Noncontact 3D measurement, and based on the result of the measurement, is represented by a value calculated based on the above JIS standard. The thickness of the release layer is preferably 3 Å or less, and particularly preferably 15 μm or less. When the thickness is outside the above range, the entire flat sheet becomes soft, so that the transparent resin layer cannot be formed during the planarization treatment. Since the uniform pressure is applied, the transparent resin layer cannot be uniformly planarized. Further, 15 200846196 may cause unevenness in the smoothness of the surface of the release layer due to the release layer during the flattening treatment. , the thickness of the transparent resin layer is reduced, and the thickness of the transparent resin layer is not transferred to the surface of the release layer according to the transparent ink which may be guided by H. The thickness of the release layer is higher than that of the layer of the moon.大于μιη is greater than or equal to #μιη.#因^2 Temple Array, especially good for energy, to frustrate 薙 薙 / 曰 、;;, the right thickness is less than the above range, then the monthly 1 method can be relied on by setting the release transparent ink reversal The effect is a release layer between the portion and the non-peeled portion of the level difference generated from the heart ^ r using the following C0L0R Qin Laser Scanning level puncturing t). Contact two-dimensional measurement (the substrate layer is the film release layer supporting the upper and lower sides of the release layer and the elastic layer, the tensile strength of the high (four) flattening sheet in the plane direction and the above-mentioned flattening sheet is wound around the roller The appropriate blending property on the outer peripheral surface and the appropriate movability for the hard-to-be-slip. The tensile modulus (2) of the base material layer is preferably equal to or greater than MPa, particularly preferably equal to or less than the fine paper. When the scratch is less than the above range, the sheet is flat and the tensile strength of the sheet in the surface direction is insufficient. Therefore, when the flat sheet is wound and fixed to the outer peripheral surface of the roll with a constant tension, the release layer may not be formed. In the direction of the surface, the surface is peeled off or cracked. Further, the tensile modulus (23. The upper limit of the crucible is not particularly limited, but the suitability (10) of the outer peripheral surface of the roll is maintained for 16 200846196). Preferably, the substrate phase (four)·rate is expressed by the value of the temperature pit_quantity_b/handle: "Vulcanized rubber and thermoplastic ^Japan H to 1SQ 37: 1994 _•^彳%仏 is still using polyethylene terephthalate ===Aromatic Polyimine Resin ▽, 叮/士7才, 涵胰 hngmeenng plastic mm ) 〇 is a substrate layer. Chain, recorded, unrecorded steel, iron, copper and other metals 11 or thin plate for $ substrate layer 2 thickness is preferably 5G μπι 5 () () _, particularly good for 75 _ no layer two right thickness f is less than the above range 'can not give the flattening sheet If the thickness is outside the above range, it is impossible to properly fit the flat outer surface on the light outer surface. Therefore, the above-mentioned flattening sheet may be caused by the above-mentioned flattening sheet. The operability of the fixed tension β + 疋 on the outer peripheral surface of Xing Kun is reduced. The thickness of the substrate layer (micrometer), Mitut〇y〇 Corporation rc〇〇iantwMi— ^ for the surface of the substrate layer adjacent to the release layer side In terms of the Japanese Industrial Regulations 17 200846196 JIS BO601: 2001 "Geometry Specifications (Gps) of the product side traits: wheel _ wire material one (four), (four) sigh surface, (consistent with ^ 4287 · 1997) _ The arithmetic mean reduction Ra of the degree curve must be less than or equal to 50 nm. If the arithmetic mean thick chain degree exceeds 50 nm, then The arithmetic mean roughness 1^ formed on the surface of the surface by the coating method will exceed the range of the gong g and a range, so that an LCD or the like equal to ^ will be produced, considering that the surface of the release layer is counted as Within the appropriate range described above, the arithmetic mean roughness Ra of the Ra surface of the basis is preferably close to the surface of the release layer equal to 〖() nm. Again, considering t5nm, it is preferably a small average _ degree Therefore, the calculated average roughness of the surface of the base village is as small as possible, and the arithmetic of the surface = the surface can include Onm. The lower limit of the thickness R is very small. Considering that it is difficult to pre-form the release layer on the substrate layer in the production of the substrate layer, the arithmetic mean roughness of the actual curve is / Roughness is considered in the case of the charm of the county called (four) smooth surface 'when equal to 3 nm, particularly preferably greater than or equal to $ Ra Ra Ra is preferably the arithmetic mean rough sound η ΐ ^ of the face of the large release layer. In order to form the base material layer, for example, when the base material layer has a metal in the above range, the surface of the base material layer may be repaired, and the layer may be a smooth surface such as a so-called engineering plastic film. Further, the strips in the respective steps of forming the film by the substrate j are adjusted to be known for forming or stretching, or the surface of the film to be produced is processed into a smooth surface by grinding 18 200846196. The arithmetic mean roughness Ra of the surface of the base material layer forming the release layer was measured by the following method, that is, 'using the COL0R 3I as described above) Laser Seanning

Microscope[Keyence Corporation 製造的 VK-9700]進行非 接觸三維測量(Noncontact3Dmeasurement),並根據該測 量所=的結果,由依據上述JIS規格而計算出的值來表示。 彈性層作為緩衝層,是在進行平坦化處理時,能對透 2樹脂層施加均勻的㈣,並且在將平坦化片捲繞固定於 輥的外周面上時,若兩者間夾有異物等時,則該彈性層合 上述異物形狀生的形變,以抑制上述異物的开^ ^平坦化片的抵接面上顯現為突起,從而防 產生與上述突起相對應的凹部等缺陷:該 ^性,的彈性率(23。〇不足。5购、或者厚度 坦化产==整個平坦化片會變得過於柔軟,使得在平 率(坑)超出20 MPa -化另一方面’若彈性 平坦化片捲繞固定於輥的外周面j士小於=醜’則在將 :坦化的透明樹脂層上產生與上述突 19 200846196 個平坦化片賦予以h兩種情況的均衡性,即,在對整 充分地吸收上述里物在上述的夾有異物等時, 化片的抵接面上’以抑制該異物的形狀在平坦 形成平坦化的透明樹考慮無缺陷且均勻地 佳為。讀a〜15M==^=性率⑽)較 ^ ^ 予没孕乂仏為mm〜〇 35 mm 〇 為,Γί mu述特性的各種材料而形成,特佳 的彈二==3的橡膠或軟質樹脂而形成。彈性層 οαπ/ιγ^ + 根據述日本工業規格JIS K625;l. 37 . 絲可紐鄉㈣細_」(對· 37 . 1994的修正)進行測量。又,彈性声 — 以上所說明的測微計[例如 日*亦疋稭由 防水型數罐^_ntrrro=^= 的值來表示的。 」寻_1所撕里 本發明的平坦化片可僅由上述脫模層、基材層以及彈 性層該三層而形成,亦可在上述各層H例如接著層 等。又’亦可使脫模層、基材層以及彈性層的各層开)成為 分別由滿足上述各特性的兩層以上的層所構成的積層結 構。僅由上述三層而構成的平坦化片例如是由以下方式而 製造的··在基材層的一個面上塗佈作為脫模層形成材料的 塗佈液,其後,如上所述使其乾燥或反應而形成脫模層, 並且在上述基材層的相反面上塗佈彈性層的形成材料, 20 200846196c 即,以溶劑來溶解橡膠或軟質樹脂而製成的液狀或糊狀的 糊劑,亚使其乾趣,再根據需要而使其產生硬化,以 形成彈性層。 Θ圖2疋表示使用上述本發明的平坦化片來製造 本發明的彩色濾光器的製造方法的步驟之一例的剖面圖。 蒼照圖1,在本例的製造方法中,首先,將與紅色⑻、 ί t、^、②⑻各像素相對應的、由著色成上述各 色的透明油墨所形成的印刷條狀圖案2〜4,以像素 ff則地排列在玻璃基板等基板1上,形成透明樹月旨層5。 其二人’麥照圖2 ’將本發明的平坦化片6捲繞於輕7的外 = 使該輥的上述平坦化片6的抵接面抵接於印刷 後的透壯m層5的表面,在此狀態下,如圖2 頭及白色箭頭所示,使上魏7在上述透明樹 '上 見透明酬5的表面的平坦化,從而製造出彩 9 4^1的步驟中’作為用以在基板1上印刷條狀圖案 二、隱去,可採用例如凹版套版印刷法、平版套版印 "、”罔版印刷法等先前眾所周知的各種印刷法中的任一 種’特佳為採用凹版套版印刷法。在凹版套版印刷法中, 可使用配備凹版及報的凹版套版印刷機,其中,凹 形狀相對應的凹部’上_的外周面上捲 接著,於上述凹版的凹部内填充已被著色成上述各色 明油墨,之後在使橡皮包覆層的表面與凹版的表面相 21Microscope [VK-9700 manufactured by Keyence Corporation] performs non-contact three-dimensional measurement (Noncontact 3Dmeasurement), and based on the result of the measurement, is represented by a value calculated based on the above JIS standard. When the elastic layer is used as a buffer layer, it is possible to apply a uniform (four) to the transparent resin layer when performing the planarization treatment, and when the flattening sheet is wound and fixed on the outer peripheral surface of the roller, if foreign matter is sandwiched between the two. In this case, the elastic layer is deformed by the shape of the foreign matter, and the abutting surface of the flattening sheet of the foreign matter is suppressed from being formed as a protrusion, thereby preventing defects such as a concave portion corresponding to the protrusion from being generated: The elastic modulus (23. 〇 insufficient. 5 purchase, or thickness canalization = = the entire flattened sheet will become too soft, so that the flatness (pit) exceeds 20 MPa - on the other hand 'if elastic flattening When the sheet is wound and fixed to the outer peripheral surface of the roller, the thickness of the outer surface of the roller is less than or less than ugly, the balance of the flattened transparent resin layer is given to the above-mentioned projection 19 200846196 flat sheets, which is equal to When the foreign matter is sufficiently absorbed in the above-mentioned foreign matter, the contact surface of the chemical sheet is considered to be defect-free and uniform in order to suppress the shape of the foreign matter in a flat shape. 15M==^=sex rate (10)) is better than ^ ^ mm~〇 of 35 mm square, Γί mu said characteristics of various materials are formed, and particularly preferably elastic rubber or soft resin is formed of two == 3. The elastic layer οαπ/ιγ^ + is measured according to the Japanese Industrial Standard JIS K625; l. 37. Silken New Town (4) Fine _" (correction of 37. 1994). Also, the elastic sound - the micrometer described above [for example, the date* is also represented by the value of the waterproof type canister ^_ntrrro=^=. The flattening sheet of the present invention may be formed of only the above-mentioned three layers of the release layer, the base material layer and the elastic layer, or may be formed in the above-mentioned respective layers H such as an adhesive layer. Further, the release layer, the base layer, and the respective layers of the elastic layer may be formed as a laminated structure composed of two or more layers satisfying the above respective characteristics. The flattening sheet composed of only the above three layers is produced, for example, by coating a coating liquid as a release layer forming material on one surface of the base material layer, and then, as described above, Forming a release layer by drying or reacting, and coating a material for forming an elastic layer on the opposite surface of the base material layer, 20 200846196c, a liquid or paste-like paste prepared by dissolving a rubber or a soft resin in a solvent. The agent, which makes it dry, then hardens it as needed to form an elastic layer. Fig. 2A is a cross-sectional view showing an example of a procedure for producing a color filter of the present invention by using the flattening sheet of the present invention described above. In the manufacturing method of this example, first, the printed strip patterns 2 to 4 formed by the transparent inks colored in the respective colors corresponding to the respective pixels of red (8), ί t, ^, 2 (8) are used. The pixel ff is arranged on the substrate 1 such as a glass substrate to form a transparent tree layer 5. The two persons 'maiden picture 2' wind the flattening sheet 6 of the present invention around the light 7 = the abutting surface of the flattening sheet 6 of the roller is brought into contact with the printed m layer 5 after printing In this state, as shown in the head and white arrows in Fig. 2, the upper Wei 7 is flattened on the surface of the transparent tree on the transparent tree, thereby producing a color 9 4^1 step. In order to print the strip pattern 2 on the substrate 1, it is possible to use any of various previously known printing methods such as gravure printing, lithographic printing, and stencil printing. A gravure printing method is employed. In the gravure printing method, a gravure printing machine equipped with a gravure and a newspaper may be used, in which the outer peripheral surface of the concave portion corresponding to the concave shape is wound up, and the concave plate is The inner filling of the recess has been colored into the above-mentioned respective color inks, and then the surface of the rubber coating layer is made 21 to the surface of the intaglio plate.

200846196 接觸的狀態下,使上魏在上相版 部内的義油墨於橡皮包縣的表面3=使得凹 ,上述橡皮包覆層的表面與基板 上逑輥在上述基板上滾動,由此將上述侔狀圖上 轉印至基板的表面,從而可將與 、圖木 圖案印刷至上述基板的表面上。㈣相對應的條狀 上述凹版套版印刷法具有如下優點:㈣將條 ==子的再現性印刷於基板表面,該條狀圖案例如是= 光韻法(photolithography)等方法而形成於凹版表^上 ,,其與高精度的圖案相對應,且由透明油墨所構^。為 I使用凹版套版印職及本發_平坦化片麵印刷後的 =樹脂層進行平坦域理,除了在凹版套版印刷機上^ 衣捲繞有上述橡皮包覆層的輕之外,亦可钱捲繞有平坦 化片的輥’從岐替實施前者_印刷步驟以及後者翻 平坦化的步驟。又,亦可僅使用一根報’在印刷步驟结束 後的輥上捲繞本發明的平坦化片以取代橡皮包覆層,來實 施平坦化步驟。 、 實施例1 準備一 PET 薄膜[TORAY INDUSTRIES INC.製造的 ^60]作為基材層,該PET薄膜上兩個面的粗糙度曲線的 ^術平均粗链度Ra為11 ·5 nm,拉伸彈性率(23 °C )為210 MPa’厚度為1〇〇 μπι。其次,自上述pET薄膜上切下一長 300 mmx寬400 mm的矩形形狀,在其中一個面的矩形的 兩备、長邊侧的邊緣上’分別黏附修補用膠帶(men<jing 22 200846196f 上的狀在H"4個面朝上而將PET薄膜固定於平板 =狀悲下,利用上述修補用膠帶作為厚度基準,使用直 仫2mm_不鏽鋼製造的、且外周 =,藉由棒塗法’在上述一個面上塗佈作 ^料的發氧樹㈣㈣液[Shin_Etsu Chemieai C(^ =主冊商標_他T,單獨硬化物的表面張力⑵。g 力:之後在潔淨烘箱(deanGVen)内於1Q(rC時 ,細_翻旨進行硬化 =而开(錢拉層。上述脫模層的表面的表面張力(2 ίΓ為"ΖΓ粗趟度曲線的算術平均祕度知為8.7·, 膜載ϊίϊΓ層的形成側相反的一面朝上而將上述ρετ薄 :固=度為 50°_(_,== 基準,使職的狀訂’ _上述不鏽鋼棒作為厚度 t 么'12mm的不鏽鋼製造的、且外周面和掘本 棒’藉由棒塗法’在上述形成脫膜;相反 的彈性率(23D m 55〇_9,單獨硬化物 時加孰5八於)為 +之後在潔淨烘箱内於顿: ::;刀!里’以使胺基甲酸酯樹脂硬 :)造=列1的平坦化片。上述彈性二 、3。)為5.3 MPa ’厚度為〇 65麵。 實施例2 23 200846196 將 Shin-Etsu Chemical Co.,Ltd.製造的註冊商秩 SEPA-COAT與該公司製造的KS-830[單獨硬化物的表面^ 力(23°C )為38mN/m]以重量比40 : 60的比例加以調配, • 並使用經上述調配而成的混合物作為脫模層形成村料的石夕 • 氧樹脂系塗佈液,除此之外,以與實施例1相同的方式势 造出實施例2的平坦化片。上述脫模層的表面的表面張力 (23°C)為28 mN/m,粗糙度曲線的算術平均粗糙度Ra 為8.7 nm ’厚度為1 。 鲁 比較例1 將 Shin-Etsu Chemical Co.,Ltd·製造的註冊商標 SEPA-COAT與該公司製造的KS_830以重量比20 : 80的 比例加以調配,並使用經上述調配而成的混合物作為脫模 層形成材料的矽氧樹脂系塗佈液,除此之外,以與實施例 1相同的方式製造出比較例丨的平坦化片。上述脫模層的 表面的表面張力(23。〇為32 mN/m,粗糙度曲線的算術 平均粗糙度Ra為8·7ηπι,厚度為 1 μπι ° • 比較例2 單獨使用 Shin-Etsu Chemical Co.,Ltd·製造的 KS-830 -作士脫模層形成材料的石夕氧樹脂系塗佈液,除此之外,以 與^施例1相同的方式製造出比較例2的平坦化片。上述 脫拉,的表面的表面張力(23。〇為38mN/m,粗糙度曲 線的算術平均粗糙度Ra為I0.5nm,厚度為i ,。 實施例3 將Shm-Etsu Chemical Co.,Ltd·製造的註冊商標 24 200846196, “ t 屋 ι/χΧ SEPA-COAT與該公司製造的KS_837[單獨硬化物的表面張 力(23Ό )為16 mN/m]以重量比80 : 2〇的比例加以調配, 並使用經上述調配而成的混合物作為脫模層形成材料的石夕 氧樹脂系塗佈液,除此之外,以與實施例丨相同的方式製 造出實施例3的平坦化片。上述脫模層的表面的表面= (23°C)為16 mN/m ’粗糙度曲線的算術平均粗链度勋 為18 nm,厚度為1 μπι。 又200846196 In the state of contact, the upper ink in the upper phase plate is made to have the surface of the rubber bag county 3 = concave, the surface of the rubber coating layer and the roll on the substrate roll on the substrate, thereby The pattern is transferred onto the surface of the substrate so that the pattern of the pattern and the pattern can be printed onto the surface of the substrate. (4) Corresponding strips The gravure printing method described above has the following advantages: (4) printing the reproducibility of the strip == sub-substrate on the surface of the substrate, the strip pattern being formed on the intaglio table by, for example, photolithography ^Up, which corresponds to a high-precision pattern and is constructed by a transparent ink. For the use of the intaglio plate printing and the flattening of the resin layer after the flattening of the flat surface printing, except for the lightness of the rubber coating layer wound on the gravure printing machine, It is also possible to carry out the step of winding the flattening sheet's roll from the former to the printing step and the latter to flattening. Further, the flattening step may be carried out by winding the flattening sheet of the present invention on the roll after the end of the printing step in place of the rubber coating layer. Example 1 A PET film [^60 manufactured by TORAY INDUSTRIES INC.] was prepared as a substrate layer, and the roughness curve of the roughness curves of the two faces on the PET film was 11 · 5 nm, and the stretching was performed. The modulus of elasticity (23 ° C) is 210 MPa' and the thickness is 1 〇〇 μπι. Next, a rectangular shape having a length of 300 mmx and a width of 400 mm is cut from the above pET film, and the repair tape is adhered to the edges of the two sides of the rectangular side of the one side and the long side of the side (men<jing 22 200846196f The shape of the H"4 face up and the PET film is fixed on the flat plate=sorrow, using the above-mentioned repair tape as the thickness reference, using a straight 仫2mm_stainless steel, and the outer circumference=, by the bar coating method Oxygen tree (4) (4) solution coated on the above surface [Shin_Etsu Chemieai C (^ = main volume trademark _ he T, surface tension of individual hardened material (2). g force: after 1Q in a clean oven (deanGVen) (when rC is used, it is hardened = it is opened (the money layer is layered. The surface tension of the surface of the above-mentioned release layer (2 Γ is the "the arithmetic mean of the curve of the 趟 趟 curve is 8.7·, film loading The opposite side of the formation side of the ϊίϊΓ layer is upward and the above ρετ is thin: the solid=degree is 50°_(_,== the reference, the position of the job is set _ the above-mentioned stainless steel rod is made as a thickness t? And the outer peripheral surface and the excavator rod 'by strip coating method" form the release film in the above; The inverse elastic modulus (23D m 55〇_9, when the hardened material is added alone is 5-8) is + after the clean oven: :: knife! in order to make the urethane resin hard:) The flattening sheet of the column 1 was produced. The above-mentioned elastics 2, 3) were 5.3 MPa 'the thickness was 〇 65 faces. Example 2 23 200846196 The registrar rank SEPA-COAT manufactured by Shin-Etsu Chemical Co., Ltd. The company's KS-830 [surface hardness (23 ° C) of a single hardened product is 38 mN/m] is formulated at a weight ratio of 40:60, and a mixture of the above blend is used as a release layer. In the same manner as in Example 1, the flattening sheet of Example 2 was formed in the same manner as in Example 1. The surface tension of the surface of the above-mentioned release layer (23°) was formed. C) is 28 mN/m, and the arithmetic mean roughness Ra of the roughness curve is 8.7 nm'. The thickness is 1. Lu Comparative Example 1 The registered trademark SEPA-COAT manufactured by Shin-Etsu Chemical Co., Ltd. is manufactured with the company. KS_830 is formulated in a ratio of weight ratio of 20:80, and a mixture obtained by the above is used as a release layer forming material. A flattening sheet of Comparative Example was produced in the same manner as in Example 1 except that the coating liquid of the epoxy resin coating liquid was used. The surface tension of the surface of the release layer (23. 〇 was 32 mN/m. The arithmetic mean roughness Ra of the roughness curve was 8·7 ηπι, and the thickness was 1 μπι ° • Comparative Example 2 KS-830 manufactured by Shin-Etsu Chemical Co., Ltd. was used alone - stone of the mold release layer forming material A flattening sheet of Comparative Example 2 was produced in the same manner as in Example 1 except that the coating liquid of the epoxy resin was used. The surface tension of the surface of the above-mentioned pulling (23. 〇 is 38 mN/m, the arithmetic mean roughness Ra of the roughness curve is I0.5 nm, and the thickness is i.) Example 3 Shm-Etsu Chemical Co., Ltd. Manufactured registered trademark 24 200846196, " t 屋 / χΧ SEPA-COAT and the company's KS_837 [surface tension of the individual cured product (23 Ό) is 16 mN / m] in a weight ratio of 80: 2 加以, The flattening sheet of Example 3 was produced in the same manner as in Example 使用 except that the mixture prepared by the above-described blending was used as the coating liquid for the release layer forming material. The surface of the surface of the mold layer = (23 ° C) is 16 mN / m 'The arithmetic mean of the roughness curve is 18 nm and the thickness is 1 μπι.

比較例3 基材層使用其兩個面的粗趟度曲線的算術平均粗縫度 Ra 為 66.8nm、拉伸彈性率(23χ:)為 23〇μρ&、 100 的 PET 薄膜[Teijin DuP_ Films ㈣奶 ^她^迕 的註冊商標Melinex S],除此之外,以與實施例丄相同的 方式製造纽㈣3的平坦化片。形成於上述m薄膜上 的脫模層的表面的粗糙度曲線的算術平均祕度及、列 nm ° _ 實施例4 基材層使用其兩個面的粗輪度曲線的算術平均粗糖度 Ra為48 rnn、拉伸彈性率(23t )為23〇 Mpa、厚度 _ 的 PET 薄膜[Toray Industries,Inc 製造的 si〇],除此之 外’以與實施例1相同的方式製造出實施例4的平坦化 =於上述PET_上的脫模層的表_粗糙度曲線的算 術平均粗糙度Ra為8.7 nm。 比較例4 基材層使用其兩個面的粗链度曲線的算術平均粗糙度 25 200846196Comparative Example 3 The substrate layer was subjected to a PET film having an arithmetic mean rough degree Ra of 66.8 nm and a tensile modulus (23χ:) of 23 〇μρ & 100, using a rough curve of the two faces thereof [Teijin DuP_Fims (4) A flat sheet of New Zealand (4) 3 was produced in the same manner as in Example 除 except for the registered trademark Melinex S]. The arithmetic mean fineness of the roughness curve of the surface of the release layer formed on the above m film, and the column nm ° _ Example 4 The arithmetic mean roughness R of the rough radiance curve of the base layer using the two faces is 48 rnn, a PET film having a tensile modulus (23t) of 23 〇Mpa and a thickness _ [si〇 manufactured by Toray Industries, Inc.], except that the same as in Example 1 was produced. Flattening = The arithmetic mean roughness Ra of the table-roughness curve of the release layer on the above PET_ was 8.7 nm. Comparative Example 4 The arithmetic mean roughness of the thick chain curve of the two faces of the substrate layer was used 25 200846196

Ra為52 nm、拉伸彈性率(23艺)為23〇 Mpa、厚度為ι〇〇Ra is 52 nm, tensile modulus (23 art) is 23 〇 Mpa, thickness is ι〇〇

Mm 的 PET 薄膜[Toray IndustriesJnc.製造的 §15],除此之 •外’以與實施例1相同的方式製造出比較例4的平坦化片。 开/成於上述PET薄膜上的脫模層的表面的粗縫度曲線的算 • 術平均粗糙度Ra為8.7 nm。 實施例5 將 Hitachi Chemical Co.,Ltd·製造的 KU_7〇〇2[單獨硬 化物的彈性率(23C)為0·07 %!>幻與該公司製造的 =υ·7〇08[單獨硬化物的彈性率(2;rc)為〇95Mpa〕以重 里比50 · 50的比例加以調配,並使用經上述調配而成的混 合物作為彈性層形成材料的洗鑄用胺基曱酸醋樹脂,除此 之外,以與實施例1相同的方式製造出實施例5的平坦化 片。上述彈性層的彈性率(23。〇為0.55 MPa。 比較例5 將 Hitachi Chemical Co.,Ltd·製造的 KU-7002 與該公司 製造的KU-7008以重量比40 : 60的比例加以調配,並使 _· ^經上述調配而成的混合液作為彈性層形成材料的澆鑄用 月女基甲酸酯樹脂,除此之外,以與實施例丨·相同的方式製 造出比較例5的平坦化片。上述彈性層的彈性率(23〇c) 為 〇·45 MPa 〇 比較例6 單獨使用 Hitachi Chemical Co.,Ltd·製造的 KU-7002 作 為彈性層形成材料的澆鑄用胺基曱酸酯樹脂,除此之外, 以與實施例1相同的方式製造出比較例6的平坦化片。上 26 200846196 述彈性層的彈性率(23。〇為0.07 MPa。 實施例0 將 Hitachi Chemical Co”Ltd.製造的 KU-5550-9 與該公 司製造的U-_A/B[單獨硬化物的彈性率⑵。㈡為32 Μρ&] .以重量比55 : 45的比例加以調配,並使用經上述調配而成 的混合物作為彈性層形成材料的澆鑄用胺基甲酸酯樹脂, 除此之外,以與實施例1相同的方式製造出實施例6的平 坦化片。上述彈性層的彈性率(23°C )為18 MPa。 * 比較例7 將 Hitachi Chemical Co.,Ltd.製造的 KU-5550-9 與該公 司製造的U-801A/B以重量比45 : 55的比例加以調配,並 使用經上述調配而成的混合物作為彈性層形成材料的澆鑄 用胺基甲酸酯樹脂,除此之外,以與實施例丨相同的方式 製造出比較例7的平坦化片。上述彈性層的彈性率 為 22 MPa。 比較例8 馨 使用砍氧樹脂[Shin-Etsu Chemical Co·,Ltd·製造的 SCR-1011A/B,單獨硬化物的彈性率(23°C)為140〇MPa] 來形成彈性層,除此之外,以與實施例丨相同的方式製造 出比較例8的平坦化片。上述彈性層的彈性率(23。〇)為 1400 MPa 〇 實施例7、實施例8、比較例9〜比較例11 將彈性層的厚度設為〇·11 mm(實施例7)、4.8 mm(實 施例 8)、0.08mm (比較例 9)、5.2mm (比較例 1〇)、6.5 27 200846196 mm (比較例11),除此之外,以與實施例1相同的方式製 造出實施例7、實施例8、比較例9〜比較例n的平坦化 比較例12 除了未形成彈性層之外,以與實施例丨相同的方式製 造出比較例12的平坦化片。 評價測試A PET film of Mm [§15 manufactured by Toray Industries Jnc.], except for this, was produced in the same manner as in Example 1 to produce a flattening sheet of Comparative Example 4. The rough roughness curve of the surface of the release layer formed on the above PET film was calculated to have an average roughness Ra of 8.7 nm. Example 5 KU_7〇〇2 manufactured by Hitachi Chemical Co., Ltd. [elasticity (23C) of the cured product alone was 0.07% by weight!] and the company manufactured by 公司·7〇08 [separate hardening alone] The elastic modulus of the material (2; rc) is 〇95Mpa], and the ratio of the weight ratio of 50 to 50 is used, and the mixture prepared by the above is used as the elastic layer forming material for the metal phthalic acid resin for washing and casting. Further, the flattening sheet of Example 5 was produced in the same manner as in Example 1. The elastic modulus of the above elastic layer (23. 〇 is 0.55 MPa. Comparative Example 5 KU-7002 manufactured by Hitachi Chemical Co., Ltd. and KU-7008 manufactured by the company were blended at a weight ratio of 40:60, and The flattening of Comparative Example 5 was produced in the same manner as in Example 除 except that the mixed liquid prepared by the above-described composition was used as the urethane resin for casting of the elastic layer forming material. The elastic modulus (23 〇 c) of the above elastic layer was 〇·45 MPa 〇Comparative Example 6 KU-7002 manufactured by Hitachi Chemical Co., Ltd. alone was used as an amine phthalate resin for casting of an elastic layer forming material. Except for this, a flattening sheet of Comparative Example 6 was produced in the same manner as in Example 1. The elastic modulus of the elastic layer of the above-mentioned 26 200846196 (23. 〇 was 0.07 MPa. Example 0 will Hitachi Chemical Co" Ltd Manufactured KU-5550-9 and U-_A/B manufactured by the company [elasticity of individual hardened materials (2). (2) is 32 Μρ&]. It is blended in a ratio of 55:45 by weight, and the above blending is used. The mixture is used as a material for casting an elastic layer A flattening sheet of Example 6 was produced in the same manner as in Example 1 except that the urethane resin was used. The elastic layer (23 ° C) of the elastic layer was 18 MPa. * Comparative Example 7 Hitachi KU-5550-9 manufactured by Chemical Co., Ltd. is blended with U-801A/B manufactured by the company at a weight ratio of 45:55, and a mixture prepared as described above is used as a material for forming an elastic layer forming material. A flattening sheet of Comparative Example 7 was produced in the same manner as in Example 。 except that a urethane resin was used. The elastic layer had an elastic modulus of 22 MPa. Comparative Example 8 Using a chopping resin [ SCR-1011A/B manufactured by Shin-Etsu Chemical Co., Ltd., the elastic modulus (23 ° C) of the cured product alone was 140 MPa] to form an elastic layer, and otherwise, the same as in Example 丨In the manner of producing the flattening sheet of Comparative Example 8, the elastic layer had an elastic modulus (23 〇) of 1400 MPa. Example 7, Example 8, and Comparative Example 9 to Comparative Example 11 The thickness of the elastic layer was set to 〇· 11 mm (Example 7), 4.8 mm (Example 8), 0.08 mm (Comparative Example 9), 5.2 mm (Comparative Example 1) In the same manner as in Example 1, the flattening comparative example 12 of Example 7, Example 8, and Comparative Example 9 to Comparative Example n was produced in the same manner as in Example 1 except that 6.5 27 200846196 mm (Comparative Example 11) was used. A flattening sheet of Comparative Example 12 was produced in the same manner as in Example 之外 except that an elastic layer was formed. Evaluation test

在一長300 mmx寬400 mm的玻璃基板的表面上,使 用平型凹版套版印刷機[NAKAN CORPORA丁];QN製造], 利用凹版套版印刷法,並藉由凹版套版印刷用CF油墨, 以100 μπι的間距如圖1所示依次排列印刷線寬1〇〇辦的 RGB三色的條狀圖案,以形成透明印刷層。凹版使用的是 玻璃製凹版,其與條狀圖案的形狀相對應的凹部的開口寬 度為110 μιη、深度為7 μιη,橡皮包覆層使用的是SRIOn the surface of a glass substrate of 300 mm x 400 mm wide, using a flat gravure printing machine [NAKAN CORPORA Ding]; manufactured by QN], using gravure printing, and using CF ink for gravure printing A strip pattern of RGB three colors of a line width of 1 line is sequentially arranged as shown in FIG. 1 at a pitch of 100 μm to form a transparent printed layer. The intaglio plate is made of a glass intaglio, and the recess corresponding to the shape of the strip pattern has an opening width of 110 μm and a depth of 7 μm, and the rubber coating layer uses SRI.

Research&Development Ltd·製造的總厚度為 〇.9 mm 的精 费印刷用聚石夕氧包覆層(silicone blanket)。 又,作為凹版套版印刷用CF油墨,使用的是經如下 方式製成的油墨:將己二酸與鄰苯二曱酸進行等量調配, 使其於180。〇時發生聚合反應而合成聚酯樹脂,向該聚酉旨 樹脂中添加三聚氰胺[Sumitomo Chemical Co.,Ltd·製造的 註冊商標Sumimal],將其於200°C時加熱,並在此情況下 以表1所示的比例向其中調配以下物質,即,將重量平均 分子量Mw在2000〜20000的範圍内經任意調整後的黏合 劑樹脂、下述任一顏料、分散劑[AJINOMOTO COJNC· 28 200846196f 製造的註冊商標AJISPER PB821]、以及作為溶劑的丁基卡 必醇醋酸酯,並使用三根輥加以混合。 土 (顏料) 紅色· C.I.顏料紅245 (二酮基η比u各幷吼^各顏料) 綠色:CJ·顏料綠36 (鹵化銅酞菁顏料) 監色:C.I·顏料藍15 : 6 (銅酞菁顏料) 表1 調配比例(重量份)A total thickness of 〇.9 mm manufactured by Research&Development Ltd. is a silicone blanket for fine printing. Further, as the CF ink for gravure printing, an ink prepared by mixing adipic acid with phthalic acid in an amount of 180 was used. In the case of a polymerization reaction, a polyester resin is synthesized, and melamine [registered trademark Sumimal manufactured by Sumitomo Chemical Co., Ltd.] is added to the resin, and it is heated at 200 ° C, and in this case, The ratio shown in Table 1 was prepared by disposing a binder resin having any weight average molecular weight Mw in the range of 2,000 to 20,000, any of the following pigments and dispersants [AJINOMOTO COJNC· 28 200846196f Registered trademark AJISPER PB821], and butyl carbitol acetate as a solvent, and mixed using three rolls. Soil (pigment) Red · CI Pigment Red 245 (diketone η ratio u each 幷吼 ^ each pigment) Green: CJ·Pigment Green 36 (bromide copper phthalocyanine pigment) Color: CI·Pigment Blue 15 : 6 (Copper Phthalocyanine pigments) Table 1 Formulation ratio (parts by weight)

黏合劑樹脂顏料分散劑溶劑 紅邑 55 其次,自印刷機的輥上取下橡皮包覆層,取而代之, 將實施例、比較例中所製造的平坦化片捲繞固定於其上。 接著,在使上述平坦化片的抵接面與上述透明樹脂層的表 ,相接觸的狀態下,使上魏在上述透明樹脂層上^動,、 藉此使上述表面平坦化,其後,於23(rc時加熱3〇分鐘, 以使透明樹脂層硬化,從而製造出彩色濾光器。 觀祭平坦化後的平坦化片的抵接面,以確認是否產生 油墨的反轉印。又’利用顯微鏡來觀察硬化後的透明樹脂 層的表面,將表面的凹凸與平坦化前相比無變化的情況言^ 價為平坦化不良。又,對於經平坦化的平坦化片,利用階 差、表面粗糙度以及微細形狀測量裝置[KLA_Tene二 Corporation製造的Alpha-Step 500]來測量上述表面的粗糙 度曲線的算術平均粗糙度Ra,將上述算術平均麵度^ 29 200846196 超出20 nm的情況評價為透明樹脂層上存在厚度不均,將 上述算術平均粗糙度Ra小於等於20 nm的情況評價為無 不均、平滑性良好。此外,利用顯微鏡來觀察上述透明樹 脂層的表面,以確認上述透明樹脂層上是否產生有凹部等 缺陷,其結果顯示於表2〜表7中。 表2Adhesive Resin Pigment Dispersant Solvent Red 邑 55 Next, the rubber coating layer was removed from the roll of the printing machine, and the flattening sheet produced in the examples and the comparative examples was wound and fixed thereon. Next, in a state where the contact surface of the flattening sheet is brought into contact with the surface of the transparent resin layer, the upper Wei is moved on the transparent resin layer, thereby flattening the surface, and thereafter, The film was heated at 23 rc for 3 minutes to harden the transparent resin layer to produce a color filter. The abutting surface of the flattened sheet after flattening was observed to confirm whether or not the reverse transfer of the ink occurred. 'The surface of the transparent resin layer after hardening was observed by a microscope, and the unevenness of the surface was not changed compared with before the flattening, and the flatness was bad. Moreover, for the flattened flattening sheet, the step was used. The surface roughness and the fine shape measuring device [Alpha-Step 500 manufactured by KLA_Tene Corporation) were used to measure the arithmetic mean roughness Ra of the roughness curve of the above surface, and the above arithmetic mean surface degree was evaluated by the above-mentioned arithmetic mean degree ^ 29 200846196 exceeding 20 nm. When the thickness of the transparent resin layer was uneven, the arithmetic mean roughness Ra was 20 nm or less, and it was evaluated as unevenness and smoothness. Surface of the transparent resin layer, to confirm whether there is a defect like a concave portion on the transparent resin layer, which results are shown in Table 2 ~ Table 7. TABLE 2

實施例1 實施例2 比較例1 比較例2 表面粗糙度Ra (nm) 8J 8J ~8J"""" 10^5~ 脫膜層 表面張力(mN/m) 16 28 32 38 厚度(μιη) 1 1 1 1 基材 表面粗糙度Ra (ran) 11.5 11.5 11.5 11.5 厚度(μπι) 100 100 100 100 彈性層 彈性率(Mpa) 5.3 5.3 5.3 5.3 厚度(mm) 0.65 0.65 0.65 0.65 反轉印 無 無 有 有 評價 Ra (nm) 3.5 3.5 - - 十/月性 評價 良好 良好 - - 缺陷 無 無 無 -Example 1 Example 2 Comparative Example 1 Comparative Example 2 Surface roughness Ra (nm) 8J 8J ~ 8J"""" 10^5~ Surface tension of the release layer (mN/m) 16 28 32 38 Thickness ( Μιη) 1 1 1 1 Surface roughness Ra (ran) of the substrate 11.5 11.5 11.5 11.5 Thickness (μπι) 100 100 100 100 Elastic layer elastic modulus (Mpa) 5.3 5.3 5.3 5.3 Thickness (mm) 0.65 0.65 0.65 0.65 Reverse transfer without Nothing to evaluate Ra (nm) 3.5 3.5 - - Ten/monthly evaluation is good and good - - Defects are none - No -

30 200846196 表330 200846196 Table 3

實施例3 實施例3 比較例4 比較例4 表面粗糙度Ra (nm) 18 39 8.7 8.7 脫膜層 表面張力(mN/m) 16 16 16 16 厚度(μπι) 1 1 1 1 基材 表面粗糖度Ra (nm) 11,5 66.8 48 52 厚度(μπι) 100 100 100 100 彈性層 彈性率(Mpa) 5,3 5.3 5.3 5.3 厚度(mm) 0.65 0.65 0.65 0.65 反轉印 無 無 益 ”ν\ 無 評價 ,、晋忖 Ra (nm) 3.5 36 18 23 丨/月ΐ玍 評價 良好 欠佳 良好 欠佳 缺陷 無 無 無 無 表4Example 3 Example 3 Comparative Example 4 Comparative Example 4 Surface roughness Ra (nm) 18 39 8.7 8.7 Release layer surface tension (mN/m) 16 16 16 16 Thickness (μπι) 1 1 1 1 Substrate surface roughness Ra (nm) 11,5 66.8 48 52 Thickness (μπι) 100 100 100 100 Elastic layer elastic modulus (Mpa) 5,3 5.3 5.3 5.3 Thickness (mm) 0.65 0.65 0.65 0.65 Anti-transfer without benefit "ν" No evaluation, , Jin Hao Ra (nm) 3.5 36 18 23 丨 / month ΐ玍 evaluation good poor good bad defects no no no no table 4

實施例5 比較例5 比較例6 表面粗糙度Ra ( nm ) 8.7 8.7 8.7 脫膜層 表面張力(mN/m) 16 16 16 厚度(μπι) 1 1 1 基材 表面粗糙度Ra (nm) 11.5 11.5 11.5 厚度(μπι) 100 100 100 彈性層 彈性率(Mpa) 0.55 0.45 0.07 厚度(mm) 0.65 0.65 0.65 反轉印 無 無 無 評價 Ra (腿) 3.5 3.5 - 評價 良好 ※l 嶔2 缺陷 無 無 無 ※丄:一部分無法平坦化。※2 :無法平坦化。 31 200846196 表5 實施例6 比較例7 比較例8 表面粗糙度Ra (nm) 8.7 8.7 8.7 脫膜層 表面張力(mN/m) 16 16 16 厚度(μπι) 1 1 1 基材 表面粗糙度Ra ( nm ) 11.5 11.5 11.5 厚度(μιη) 100 100 100 彈性層 彈性率(Mpa) 18 22 1400 厚度(mm) 0.65 0.65 0.65 _反轉印_ 無 無 無 評價 ^ ^ ,, Ra (nm) 3.5 3.5 3.5 、丁/、、坪,卜士 、 / 干/贫τ玍 良好 良好 良好 評價 缺陷 無 有 有Example 5 Comparative Example 5 Comparative Example 6 Surface roughness Ra (nm) 8.7 8.7 8.7 Surface tension of the release layer (mN/m) 16 16 16 Thickness (μπι) 1 1 1 Surface roughness of the substrate Ra (nm) 11.5 11.5 11.5 Thickness (μπι) 100 100 100 Elastic layer elastic modulus (Mpa) 0.55 0.45 0.07 Thickness (mm) 0.65 0.65 0.65 Anti-transfer without or without evaluation Ra (leg) 3.5 3.5 - Good evaluation ※l 嵚2 Defective None None ※丄: Some cannot be flattened. *2 : Cannot be flattened. 31 200846196 Table 5 Example 6 Comparative Example 7 Comparative Example 8 Surface roughness Ra (nm) 8.7 8.7 8.7 Release layer surface tension (mN/m) 16 16 16 Thickness (μπι) 1 1 1 Substrate surface roughness Ra ( Nm ) 11.5 11.5 11.5 Thickness (μιη) 100 100 100 Elastic layer elastic modulus (Mpa) 18 22 1400 Thickness (mm) 0.65 0.65 0.65 _Reverse transfer _ No no evaluation ^ ^ ,, Ra (nm) 3.5 3.5 3.5 , Ding /, ping, shi, / dry / poor τ 玍 good good good evaluation defect no

表6 比較例12 比較例9 實施例7 脫膜層 表面粗糙度Ra (nm) 8.7 8.7 8.7 表面張力(mN/m) 16 16 16 厚度(μπι) 1 1 1 基材 表面粗糙度Ra (nm) 11.5 11.5 11.5 厚度(μπι) 100 100 100 彈性層 彈性率(Mpa) - 5.3 53 厚度(mm) - 0.08 0.11 評價 反轉印 無 無 無 平滑性 Ra (nm) 3.5 3.5 3.5 評價 良好 良好 良好 缺陷 有 有 無 32 20084619& 表7 = —實涵8 比較例10 比較例Π 脫膜層 表面粗縫度Ra (nm) 8.7 —8·7 8.7 表面張力(mN/m) 16 16 16 厚度(μιη) 1 1 1 基材- 表面粗撻度Ra ( nm ) 11·5 11.5 11.5 厚度(μιη) 100 100 100 彈性層- 彈性率(Mpa) 5.3 5.3 5.3 厚度(mm) 4.8 5.2 6.5 反轉印 無 無 無 評價 平滑 Ra (nm) 3.5 3.5 - f f /g 評價 良好 嶔3 缺陷 —-- 無 無 無 ※斗·無法平坦化。 由以上各表可知,當使用脫模層的表面的表面張力 (23 C )超出30 mN/m的比較例卜比較例2的平坦化片 吋’會產生油墨的反轉印。又,由於使用表面的算術平均 粗糙度Ra超出50 nm的層作為基材層,因此當使用脫 層的表面的算術平均粗糙度Ra超出2〇咖的比較例3二 平坦化片時’透脂層的表面的算術平均粗链度以合 超出20 nm,由此可知上述透明樹脂層的厚度產生 均 又,即使脫則的表面的算術平均粗糙、於 nm,但在使用以表面的算術平均粗縫度以超出%咖 層作為基材層的味例4的平坦化片時,翻翁 = 面的算術平均粗糙度以仍會超出2〇nm,由二= 明樹脂層的厚度產生不均。 上述透 而且可獲知’虽使用彈性層的彈性率(a MPa的_5、_6的平_、以及^的厚 33 200846196 度超出5 mm的比較例10、比較例Π的平坦化片時,無法 使透明樹脂層平坦化。此外還獲知,當使用彈性層的彈性 率(23。〇)超出20 MPa的比較例7與比較例8的平坦化 片、未形成彈性層的比較例12的平坦化片、以及彈性層的 厚度不足0·1 mn的比較例9的平坦化片時,無法防止在透 明樹腊層上產生凹部等缺陷。與此相對,已確認當使用實 施例1〜實施例8的平坦化片時,均可使整個透明樹脂^ 均勻地平坦化,並且可防止形成上述透明樹脂層的透明油 墨反轉印,從而可防止在透明樹脂層上產生凹部 【圖式簡單說明】 、曰 圖1是表示使用本發明的平坦化片來製造本發明 色濾光器的製造方法的步驟之—例的剖面示意圖。y 圖2是表示圖i的後續步驟之一例的剖面示意圖。 【主要元件符號說明】 “ 1 :基板 2〜4 :條狀圖案 5:透明樹脂層 6:平坦化片 7 :輥 34Table 6 Comparative Example 12 Comparative Example 9 Example 7 Surface roughness Ra (nm) of the release layer 8.7 8.7 8.7 Surface tension (mN/m) 16 16 16 Thickness (μπι) 1 1 1 Surface roughness Ra (nm) of the substrate 11.5 11.5 11.5 Thickness (μπι) 100 100 100 Elastic layer elastic modulus (Mpa) - 5.3 53 Thickness (mm) - 0.08 0.11 Evaluation of reverse transfer without or without smoothness Ra (nm) 3.5 3.5 3.5 Good evaluation Good good or not 32 20084619& Table 7 = - Real culvert 8 Comparative Example 10 Comparative Example 粗 Surface roughness of the release layer Ra (nm) 8.7 — 8·7 8.7 Surface tension (mN/m) 16 16 16 Thickness (μιη) 1 1 1 Substrate - Surface roughness Ra (nm) 11·5 11.5 11.5 Thickness (μιη) 100 100 100 Elastic layer - Elasticity (Mpa) 5.3 5.3 5.3 Thickness (mm) 4.8 5.2 6.5 Reverse transfer without or without evaluation Smooth Ra (nm) 3.5 3.5 - ff /g Good evaluation 嵚3 Defects --- Nothing Nothing ※ Do not flatten. As is apparent from the above tables, when the surface tension (23 C ) of the surface of the release layer exceeds 30 mN/m, the flattening sheet 比较' of Comparative Example 2 produces reverse transfer of the ink. Further, since a layer having an arithmetic mean roughness Ra of the surface exceeding 50 nm is used as the substrate layer, when the arithmetic average roughness Ra of the surface using the delamination exceeds the comparative example 3 of the flattening sheet of 2 ', the grease is permeable. The arithmetic mean thick chain degree of the surface of the layer is more than 20 nm in total, and it is understood that the thickness of the above transparent resin layer is uniformly generated, even if the arithmetic mean roughness of the surface after peeling is at nm, the arithmetic mean thickness of the surface is used. When the degree of sew is a flattening sheet of the scenting example 4 of the substrate layer exceeding the % coffee layer, the arithmetic mean roughness of the slab = surface still exceeds 2 〇 nm, and unevenness is caused by the thickness of the bis resin layer. In the above, it is known that the elastic modulus of the elastic layer (the _5 of MPa, the flat_ of _6, and the thickness of 33 of the 46,466,196 degree of the thickness of the film of the comparative example 10 and the flattening piece of the comparative example) cannot be used. The transparent resin layer was planarized. It was also found that the flattening sheet of Comparative Example 7 and Comparative Example 8 in which the elastic modulus (23. Å) of the elastic layer exceeded 20 MPa, and the flattening of Comparative Example 12 in which the elastic layer was not formed was used. In the case of the flattening sheet of Comparative Example 9 in which the thickness of the sheet and the elastic layer is less than 0·1 mn, it is not possible to prevent defects such as concave portions from being formed on the transparent wax layer. In contrast, it has been confirmed that the first to eighth embodiments are used. When the flattening sheet is formed, the entire transparent resin can be uniformly planarized, and the transparent ink which forms the transparent resin layer can be prevented from being reversely transferred, thereby preventing the concave portion from being formed on the transparent resin layer. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing an example of a method of manufacturing a color filter of the present invention using the flattening sheet of the present invention. y Fig. 2 is a schematic cross-sectional view showing an example of a subsequent step of Fig. i. Component symbol No. Description] "1: Substrate 2 to 4: Strip pattern 5: Transparent resin layer 6: Flattening sheet 7: Roller 34

Claims (1)

200846196 十、申請專利範圍: 1·種平坦化片,用於與構成彩色濾光器的其中至少 一部分已被著色的透明樹脂層的表面相抵接,來使上述透 明樹脂層的表面平坦化,該平坦化片自抵接於上述透明樹 ‘ 脂層表面的抵接面朝向背面依次包括一構成上述抵接面的 脫模層、一基材層以及一彈性層; 该脫模層之抵接面的表面張力在攝氏23度下小於等 於30 mN/m,且該脫模層之抵接面的粗糙度曲線之算術平 • 均粗糙度Ra小於等於20 nm ; 該基材層鄰近該脫模層之表面的粗糙度曲線之算術平 均粗链度Ra小於等於50 nm ;以及 該彈性層的彈性率在攝氏23^下為〇.5 MPa〜2〇 MPa,且其厚度為〇.〗mm〜5 mm。 2·如申請專利範圍第1‘項所述之平坦化片,其中在將 ^述平坦化片的抵接面作為外側而捲繞於輥的外周面的狀 態下,使抵接面抵接於透明樹脂層的表面,以使輥在上述 馨朗樹脂層上滾動,從而用以實現上述透明麵層的表面 的平坦化。 -“ 3.如中請專利範圍第丨項所述之平坦化片,其中該脫 才果層的厚度小於等於3 0 μπι。 屯如申明專利範圍第1項所述之平坦化片,其中該基 材層的拉伸彈性率(23°c)大轉於励Mpa,且其厚度 為 50 μιη〜500 μπι。 ' 5·一種彩色濾光器的製造方法,其特徵在於包括如下 35 200846196 步驟: 在一基 脂層;以及 板的表面形成至少一部分已被著色的一透明 樹 外側利補第1項所述的平坦化片之抵接面作為 透明料二、輥的賴面上,並使得上魏接面抵接於該 树舳層之表面的狀態下,使上述輥在該透明樹脂層上 、動’攸而使該透明樹脂層的表面平坦化。 _ 36200846196 X. Patent Application Range: 1. A flattening sheet for abutting a surface of a transparent resin layer on which at least a part of a color filter is colored to planarize a surface of the transparent resin layer, The flattening sheet includes a release layer, a base material layer and an elastic layer constituting the abutting surface from the abutting surface of the transparent tree surface of the transparent tree toward the back surface; the abutting surface of the releasing layer The surface tension is less than or equal to 30 mN/m at 23 degrees Celsius, and the roughness flatness Ra of the roughness curve of the abutting surface of the release layer is less than or equal to 20 nm; the substrate layer is adjacent to the release layer The arithmetic mean average chain length Ra of the roughness curve of the surface is less than or equal to 50 nm; and the elastic modulus of the elastic layer is 〇.5 MPa~2〇MPa at 23 ° C, and the thickness thereof is 〇. Mm. 2. The flattening sheet according to the first aspect of the invention, wherein the abutting surface of the flattening sheet is wound around the outer peripheral surface of the roller as the outer surface of the roller, and the abutting surface is brought into contact with The surface of the transparent resin layer is such that the roller rolls on the above-mentioned sinuous resin layer to achieve planarization of the surface of the above transparent surface layer. The flattening sheet of the invention, wherein the thickness of the stripping layer is less than or equal to 30 μπι, such as the flattening sheet of claim 1, wherein The tensile modulus (23 ° C) of the substrate layer is greatly changed to the excitation Mpa, and the thickness thereof is 50 μm to 500 μπι. ' 5. A method for producing a color filter, which is characterized by the following 35 200846196. Forming at least a portion of the transparent tree outside the base layer on the surface of the substrate; and forming abutting surface of the flattening sheet according to Item 1 as the transparent material, the surface of the roller, and The surface of the transparent resin layer is flattened by the above-mentioned roller on the transparent resin layer in a state in which the bonding surface abuts against the surface of the tree layer. _ 36
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CN101556346A (en) 2009-10-14
KR20080099127A (en) 2008-11-12
JP2008281618A (en) 2008-11-20
CN101556346B (en) 2011-05-04
TWI396631B (en) 2013-05-21
JP4909166B2 (en) 2012-04-04

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