200846085 九、發明說明： 【發明所屬之技術領域】 本發明係關於可適當且確實地管理以自吐出喷嘴所吐 —出的塗佈液所形成之塗佈面，更可適當地管理塗膜厚度， •以高作業效率而可確保塗佈面之品質管理的板狀材料 (substrate)之塗佈方法。 【先前技術】 _ 對要求高品質的電漿顯示面板等之板狀材料的塗佈關 聯技術，其管理形成於該板狀材料之塗佈面極為重要。已 揭不之關聯技術，例如專利文獻丨〜專利文獻3已為人所 知。專利文獻1之「塗佈裝置及塗佈方法以及彩色濾光片 之製造裝置及其製造方法」係，即使是玻璃基板呈大型 化，亦使基板和塗佈頭之間隙（clearance)在寬度方向呈 均勻，而可均勻地高速塗佈者，且其在寬度方向設置可調 整塗佈液吐出裝置的塗佈液吐出前端面與被塗佈構件之 眷間的間隔調整手段，並使塗佈液吐出裝置之塗佈液吐出前 端面與被塗佈構件間之間隔在寬度方向呈一定之方式，使 塗佈液吐出裝置的塗佈液吐出前端面位置在寬度方向變 化而塗佈者。 專利文獻2之「基板處理裝置」係，為了檢查所製成之 抗蝕劑膜（resist film)，以間隙感測器（gap sens〇r)掃 瞄抗蝕劑塗佈區域，並測定其與在基板上所形成的抗蝕劑 膜之間隙而傳達至控制系統，控制系統則藉比較測定抗蝕 蜊塗佈鈾之間隙的數值（其和基板表面之距離）以及測定 312XP/發明說明書(補件)/97-02/96139446 6 200846085 抗蝕劑塗佈後之間隙的數值（其和抗蝕劑膜表面之距 離）’而异出基板上之抗餘劑膜的厚度。 專利文獻3之「縫模（slitdie)及^有塗膜之基材” -造方法及製造裝置」係提供一種容易得到次微^ (sub-micron order)級之餘隙（Up clearance)精確度的 縫模，又在組合模後，則不必特別調整，亦可以狀以下 非常高精確度之塗佈厚度而均勻地形成塗膜，且在餘隙之 馨長邊方向可調整間隙寬度之分佈。 (專利文獻1)日本專利特開平丨卜如⑽“號公報 (專利文獻2)日本專利特開2004—14607號公報 (專利文獻3)日本專利特開2004-283820號公報 【發明内容】 (發明所欲解決之問題） 、專利文獻1係藉間隔調整手段，而使塗佈液吐出裝置之 塗佈液吐出前端面位置在寬度方向變化，其雖然可使塗佈 籲液吐^裝置之塗佈液吐出前端面與被塗佈構件之間的間 隔在寬度方向成為一定，但在裝置側如只將塗液吐出前端 面與被塗饰構件之間的間隔使其成為一定，則難以說其可 適當且確實地管理塗佈面。 專利文獻2係具有間隙感測器，其雖然可檢測出阻劑 Resist)塗佈前所測定之間隙的數值（和基板表面之距 離）以及，抗蝕劑塗佈後所測定之間隙的數值（和阻劑膜 表面之距#)，但此等間隙的數值係使用於阻劑膜檢查 者’亦即，#僅不過是檢查製品的好壞者，而難以說其可適當 312XP/發明說明書(補件)/97-02/96139446 7 200846085 地管理塗佈時所形成的塗佈面。 專利文獻3,雖然可調整餘隙之寬度方向分佈， 在裝置侧調整㈣，其也難以說其可適#且確實地管理= 佈面❶ 主 ‘本發明係㈣上述問題而所完成，其目的為提供 ==實二管理自吐出喷嘴所吐出之塗佈液其所形成 之塗佈面，且也可適當地管理塗膜厚度，並以高作業效 而可確保塗佈面之品質管理的板狀材料之塗佈方法。'、 (解決問題之手段） 本發明之板狀材料之塗佈方法，係藉使設置板狀材料之 工作台與藉由噴嘴位置調整手段所支持吐出噴嘴座 (臟zle holder)之噴嘴相對地前後移動，而在板狀材料 上:k佈自此吐出噴嘴所吐出之塗佈液，如此的板狀材料之 塗佈方法，其特徵為，預先設置可測定形成於板狀材料的 塗佈面與上述吐出噴嘴之間的距離之測距手段，首先，在 •上述工作σ上设置試驗用之板狀材料，使該工作台與上述 贺嘴座相對地朝向前方移動並在該試驗用板狀材料上= 施試驗塗佈，其次，在使上述工作台與上述噴嘴座相對= ，向後方移動之過程中，藉上述測距手段而實施測定，其 -，，為了得到所希望之塗佈面，因應於上述測距手段之測 定結果，藉由上述噴嘴位置調整手段而實施上述吐出噴嘴 之位置調整’其後’在板狀材料上實施塗佈處理。 ^述喷鳴位置調整手段，係在前述噴嘴座獲得反作用 力，而在前述吐出噴嘴輸入上推力或下推力之施力手段， 3 ^^^^^#(^)/97.02/96139446 8 200846085 且以该細#力手4又之細*力值來貫施上述吐出噴嘴之位置調 整。 (發明效果） 本發明的板狀材料之塗佈方法可適當且確實地管理自 吐出喷嘴所吐出之塗佈液其所形成之塗佈面，且更可適當 地官理塗膜厚度，並以高作業效率而可確保塗佈面之品質 管理。 、 【實施方式】 以下參照附圖詳細地說明本發明較佳的板狀材料之塗 佈方法的一實施形態。本實施形態的板狀材料之塗佈方法 基本上如圖1所示，使設置板狀材料is、1P之工作△ 2 , 與藉由喷嘴位置調整手段3a〜3c支持吐出喷嘴4之°嘴嘴 座5相對地前後移動，如此而在板狀體1S、上塗佈自 吐出喷嘴4所吐出之塗佈液L，如此的板狀材料之塗佈方 法，其事先設置可測定形成於板狀材料13的塗佈面 吐出噴嘴4之間的距離之測距手段仏〜化，首先，” =2上設置試驗用之板狀材料ls，使工作台2盥噴： 座=地朝向前方移動並在此試驗用板狀材料^上告 知口式1¾塗佈，立々 力你 Ά 後方移動：二 與喷嘴座5相對地朝向 之過程中，藉測距手段6a〜6c而實施測定，发 广’為：得到所希望之塗佈面LS，因應於測距手段6、 定結果，藉由噴嘴位置調整手段 ：〜 出賀嘴4之位罟士两敫 ^ ^ 丄a ^ Λ ^ "i 實施塗饰處理广用之板咖 312XP/發明說明書(補件购彻6職 又圖1 (a)係自前面觀看塗佈步驟之 200846085 圖、’圖1 (b)係自侧方觀看塗佈步驟之圖。 1·先Μ本貫施形態的板狀材料之塗佈方法所使用的 裝置。如圖1至圖4所;^+ 枓π心从 置主要由：被設置板狀材 41S、H^工作台2;及，在工作台2上之板狀材料… 上方走移動之噴嘴座5 ;及，被設在喷嘴座 嘴位置調整手段3a〜3c •菸，益丄+ ^ 〇 、 3C，及猎由贺嘴位置調整手段3& 〜3c而被支持於噴嘴座5，可 1Q 1D二盘^ J吐出塗佈液L至板狀材料 ?、，而實施塗佈處理之吐出喷嘴4;如此所構成。圖3 I a j係自丽面觀看綠聆罢 L , + 規有°亥衣置之圖，圖3 (b)係自側面觀看 部份之剖面圖’圖3⑴係自後方觀看該裳 置"^圖。 二作台2上面係以高平面度之平坦面所形成。在此工作 面皮载置試驗用之板狀材料1S或製品用之板狀 ^ , b具有左右一對腳部5a與架設在此等腳 邛5β間之橫架部5b，而其全體被 橫行在板狀材MS、1P二體，ΐ為門狀。橫架部5b ς 在噴嘴座5上再接合左右 ° a及杈架部5b，而被設置縱壁部5c。在噴嘴座 5之各腳部5a與工作a 9 μ ; * 、 作口2上面之間，設置為了使喷嘴座5 ΐ7Γ 可在前後方向往復移動之左右一對線型馬 二：，喷嘴座5自等待位置χ起動而前進至板狀材 ’ 方，到達至折回位置Υ時而暫時停止，1後， ^ ^置Υ起動，返回等待位置χ而停止，如此而實施 二设 >相對於喷嘴座5而使工作台2移動如此亦 …又’雖然未圖示，但在各腳部5a各別組裝滾珠螺桿 312XP/發明說明書(補件)/97·〇2/96ΐ39446 ι〇 200846085 形式等的千斤頂而個別地調 此之橫架狀態，如此亦可 專的…調節橫架部 吐出噴嘴4,係在噴嘴座5的橫架部5b_^ 向被設置。在吐出噴嘴4之 ' 、查电夕1山, 〈卜鈿緣化其長度方向設有一 ^之吐出口 4a。吐出嘴嘴4和在橫架部 方向而隔者適當間隔所配置之複數台嘴嘴整= 3a〜3c之各桿8相接合。在 手奴 此等喷嘴位置調整手段3a〜3==，壁部5C，位於 3之間设有朝向吐出噴嘴4 検向犬出之支軸9。吐出噴嘴4和在成為支點 M目嵌合。在圖示例中，係以同等間隔設有3台噴嘴3 调整手段3a〜3c。吐出噴嘴4係藉由此等第丨〜第 位置調整手段3a〜3c而被支持於喷嘴座5上。又軸 被位於3台噴嘴位置調整手段3a〜3c之間的中央而在 個位置設置。又噴嘴位置調整手段如在橫架部⑶之中央 設置1台亦可。在本例情況下，支軸9在噴嘴位置調整手 段的兩側，而自該噴嘴位置調整手段以等距離相 2個位置。 罝在 各喷嘴位置調整手段3a〜3c，係由··被固定在橫架部 5b上之殼套（casing)1〇 ;及，相對於殼套⑺被設成在i 下方向可滑動自如，且在上下方向貫通横架部5b而接人 於吐出喷嘴4的桿8;及，被設在殼套ι〇内，可使桿^ 滑動移動而未圖示的驅動部；如此而構成。驅動部之驅動 方式，可採用空壓式、油壓式、電動式等眾所周知之方式 喷嘴位置調整手段3a〜3c，係藉由殼套1〇在橫架部 312XP/發明說明書(補件)/97-〇2/96139446 11 200846085 f丰ρ乍用力❿在吐出噴嘴4輸入上推力或下推力之施 升r二：:ί嵌合在支軸9之吐出喷嘴4，係藉桿8的上 位“敕。<下降移動之下推而彎曲變形’並因而被作 f之a /、b體而5 ’如圖4所示’以圖示之等間隔所配 位置觜位置調整手段3a〜3c之中，使中央的第1 = 下降’而使左右的第2及第3噴嘴位置 :: 。上升時’吐出喷嘴4則在橫架部5b的長 度方向呈弓形朝下彎曲變形而成為凸形，如此則吐出口 4a的位置被調整，如此在吐出喷嘴4的長度方向則使塗 佈液L之吐出量被調整。 當在此-狀態下於板狀材料ls、lp上實施塗佈，如吐 出口 4a和板狀材料ls、lp表面的距離接近時，則吐出喷 嘴4内之塗佈液[的壓力即難以被解放，而由於自吐出口 4a難以吐出塗佈液L’因此，塗膜厚度則會變薄。又，吐 出口 4a和板狀材料ls、lp表面之距離分開時，則吐出喷 嘴4内之塗佈液L的壓力即容易被解放，由於自吐出口 4a可容易吐出塗佈液L，因此，塗膜厚度即變厚。因此， 因為吐出喷嘴4的端部比中央部更容易吐出塗佈液L，因 而，該端部之塗膜厚度即變厚。此一吐出〇 4a與板狀材 料IS、1P表面的距離之變化量以及塗膜厚度的變化量之 關係，只要預先將實際測定之資料輸入控制器丨2，即可 被利用於調整操作。 在工作台2上面於喷嘴座5的等待位置X，在吐出喷嘴 4的長度方向隔著適當間隔，於和吐出噴嘴4之間，具體 312XP/發明說明書(補件y97_02/96i39440 12 200846085 而言在被設置吐出口 4a之下端緣之間被設置可檢測出間 隙尺寸之間隙感測器11 a〜11 c。在圖示例中，係在配合 弟1〜弟3嘴嘴位置调整手段3a〜3c的安裝位置之3個 位置設置第1〜第3間隙感測器lla〜Uc。間隙感測器 11a〜11c，可例如使用磁規（Magnescale)(註冊商標）。 各間隙感測盗11 a〜11 c被連接在後述之控制器12，而可 使檢測出之間隙篁輸出至控制器12。控制器12可因應自 第1〜第3間隙感測器1 la〜1 lc所輸入的間隙量而適當 地控制千斤頂（jack)之升降，又，因應必要也可使第 第3喷嘴位置調整手段3a〜3c動作。 測距手段6a〜6c，係在喷嘴座5的縱壁部“被設在位 於吐出噴嘴4的相反侧。在縱壁部5c之長度方向隔著適 當間隔被設置測距手段6a〜6c。在圖示例中，係在配合 第1〜第3喷嘴位置調整手段3a〜3c的安裝位置之 部位設置第1〜第3測距手段6a〜6c。此等測距手段6a 鲁〜6c可採用例如可測定射出之雷射光至反射回來為止的 時間而測定距離之雷射感測器。此等測距手段6a〜6c被 連接控制器12，而測定值被輸出至此一控制哭 測距手段6a〜6c，係在吐㈣嘴4於試驗^板狀材料 1S上施加塗佈後當該吐出喷嘴4後退時，測定其正下方 之塗佈面LS與吐出噴嘴4間之距離，並以該距離當作測 定值而輸出。第1〜第3測距手段6a〜6c係各別對應於 第1〜第3噴嘴位置調整手段3a〜3c，而在各喷嘴位置調 整手段3a〜3c之安裝位置各別測定上述距離。以測距手 312XP/發明說明書(補件)/97-02/96139446 13 200846085 & 6a〜6c之測定操作，被考慮吐出噴嘴4之後退速度而 對測距手段6a〜6c或控制器12所測定之資料予以修正， 而其在後退中連續實施亦可，或在適當位置使吐出噴嘴4 停止而在其停止時實施亦可。前者係連續檢測測定對象距 離之方法，後者係在複數個部位抽樣檢測測定對象距離之 方法，而採用任一方法均可。又，基本上，以第丨測距手 段6a所得到的測定值被使用在藉第丨噴嘴位置調整手段 3a之吐出贺嘴4的位置調整，而以第2及第3測距手段 6b、6c所得到的測定值各別被使用在藉第2及第3位置 調整手段3b、3c之吐出喷嘴4的位置調整…如有必 要時，也可以控制器12對此等第i〜第3測距手段6&〜 6c之測定值實施插值（interp〇lati〇n)處理，而藉由第1 :第3噴嘴位置調整手段3a〜3c使對吐出喷嘴4所加之 變形成為最適化值亦可。總之，自各測距手段6&〜6c所 =的測定值均被輸人至控制器12。而在控制器i2被連接 第1〜第3贺嘴位置調整手段3a〜3c，且控制器^ 2即運 算處理自第1〜第3測距手段6&〜6。所輸人之測定值， 亚使對應於各測距手段6a〜之第！〜第3喷嘴位置調 整手段3a〜3c之喷嘴位置調整量當作控制量而輸出至各 贺嘴位置調整手段3a〜3c。此—噴嘴位置調整量之" 量，係當作以驅動部使直桿8上推或下推之施力值^輸 第3噴嘴位置調整手段3a〜3c，係隨著自控制 1^2所輸人之㈣位置調整量，而該等驅動部在桿^ 力使其滑動移動，由此，因應於各測距手段6卜6。所測 312XP/發明說明書(補件)/97-02/96139446 14 200846085 疋之測定結果，具體而言，對於測定值因應於以控制器 12之運异處理結果而實施吐出喷嘴*之位置調整。 其次說明本實施形態的板狀材料之塗佈方法。事先在塗 .佈操作開始前，將測距手段6a〜6e安裝於噴嘴座5之縱 5c首先，在工作台2上面以吸引手段等使第】試 驗用板狀材料1S吸附固定並設置於工作台面上對工作 台2使噴嘴座5前進，藉吐出喷嘴4實施第"式驗塗佈。 φ其次相對於工作台2使噴嘴座5後退，在該過程中藉第 1〜第3測距手段6a〜6c而實施測定。例如圖2之「資料 1」所示，在第1試驗用板狀材料1S的左右端部間如有發 生ΔίΒ之偏差時，利用以第1〜第3間隙感測器lla〜llc 所檢測出之間隙量，以控制器12使千斤頂動作而調整左 右-對腳部5a之高度’再調節橫架部讥的橫架狀態以實 施水平（level)修正。由此，其可使請大致設定為愛。 因應必要，也可使第1〜第3喷嘴位置調整手段3a〜3c ❿動作而實施微調整。其次，在工作台2上面設置第2試驗 用板狀材料1S，而相對於工作台2使喷嘴座5前進，藉 吐出矣背4實施第2試驗塗佈。其次，相對於工作台2使 贺嘴座5後退，在該過程中藉第j〜第3測距手段“〜仏 而實施測定。例如圖2之「資料2」所示，在第2試驗用 板狀材料1S之塗佈® LS的中央部被測定出比左右高Atc 之狀態時，則利用以第i〜第3測距手段“〜以所計測 出之測定值，以控制器12使第i〜第3喷嘴位置調整手 段3a〜3c動作而使吐出噴嘴4彎曲變形以實施修正。亦 312XP/發明說明書(補件)/97-02/96139446 Η 200846085 即，在塗膜厚度薄的部份使吐 度厚的部份使吐出嗔、f上升@在塗膜居 大降而變形。藉此，則可使 疋為|。如此如使W大致設^為零時，在1後 =加塗佈之製品料板狀材料ιρ則可形成平坦之塗佈 數次之m所不’為了水平修正或彎曲修正也可反覆 要文认之咸無塗佈。又，名太垂A f Afc丄 在本貝^形恶中，雖然說明可得 =塗佈面LS之情形，但如僅作弯曲修正，或將其:與 二：正：合’則也可在吐出噴嘴4的長度方向適當地形 成傾斜之塗佈面任意職的塗佈面… 在上述之程序中’雖然分為2次實施第工試驗塗伟 及弟2 4驗塗佈’但如藉控制器12之運算，也可僅 次試驗塗佈即完成者。 ，上所說明之本實施形態的板狀材料之塗佈方法，係事 先》又置可測疋形成在板狀材料ls的塗佈面ls與吐出 4之間的距離之測距手段6a〜6c，首先，在工作台2上< 置試驗用之板狀材料1S，對工作台2使喷嘴座5相對： 朝向珂方移動而在該試驗用板狀材料1S上實施試驗塗 佈’其次’在對工作台2使噴嘴座5相對地朝向後方移： 之過程中，藉測距手段6a〜6c而實施測定其次為了 得到所希望之塗佈面LS，因應於測距手段仏〜“之測定 結果，藉噴嘴位置調整手段3a〜3c而實施吐出噴嘴4之 位置調整，其後，在製品的板狀材料lp上實施塗佈處理， Q此對试驗用板狀材料1 s之試驗塗佈的狀況可用測定漆 佈面LS和吐出噴嘴4間的距離之測距手段6a〜6c來二 312XP/發明說明書(補件)/97-02/96139446 16 200846085 疋，且因應於該結果，可藉喷嘴位置調整手段知〜託而 實施吐出噴嘴4之位置調整以得到所希望之塗佈面… 如此而可適當且確實地#理自吐出噴嘴4所吐出之淹佈 液L所形成之塗佈^LS，且只要板狀材料⑴ιρ係高平 面度者即亦可適當地管理塗膜厚度’而可以高作業效率確 保塗佈面LS之品質管理，且可提高製品之收率。[Technical Field] The present invention relates to a coated surface formed by coating a coating liquid spouted from a discharge nozzle, and can appropriately manage the thickness of the coating film. • A coating method for a sheet material that can ensure the quality management of the coated surface with high work efficiency. [Prior Art] _ It is extremely important to apply a coating-related technique for a plate-shaped material such as a plasma display panel of a high quality, which is formed on the coated surface of the plate-shaped material. Related art which has been disclosed, for example, Patent Document 丨~ Patent Document 3 is known. In the "application apparatus and application method of the color filter, and the manufacturing method of the color filter of the patent document 1", even if the glass substrate is enlarged, the clearance of the substrate and the coating head is in the width direction. It is uniform and can be uniformly applied at a high speed, and an interval adjusting means for adjusting the distance between the coating liquid discharge front end surface and the coating member in the coating liquid discharge device is provided in the width direction, and the coating liquid is applied. The distance between the coating liquid discharge front end surface and the member to be coated in the discharge device is constant in the width direction, and the application liquid discharge surface of the coating liquid discharge device is changed in the width direction to be applied. In the "substrate processing apparatus" of Patent Document 2, in order to inspect a resist film formed, a resist coating region is scanned with a gap sensor, and the measurement is performed. The gap between the resist films formed on the substrate is transmitted to the control system, and the control system compares the value of the gap between the uranium coated with uranium (the distance from the substrate surface) and the measurement 312XP/invention manual (complement) ()) /97-02/96139446 6 200846085 The value of the gap after the resist coating (the distance from the surface of the resist film) is different from the thickness of the anti-surplus film on the substrate. Patent Document 3, "Slitdie and Coating Substrate" - Manufacturing Method and Manufacturing Apparatus, provides an easy to obtain sub-micron order level clearance (Up clearance) accuracy. After the mold is assembled, it is not necessary to adjust it in a special manner, and the coating film can be uniformly formed with a coating thickness of a very high precision, and the distribution of the gap width can be adjusted in the direction of the long side of the clearance. (Patent Document 1) Japanese Patent Laid-Open Publication No. (10) No. Japanese Patent Publication No. 2004-284820 (Patent Document 3) Japanese Patent Laid-Open Publication No. 2004-283820 (Invention) In the patent document 1, the position of the coating liquid discharge surface of the coating liquid discharge device is changed in the width direction by the interval adjusting means, and the application of the coating liquid discharge device can be applied. The interval between the front end surface of the liquid discharge and the member to be coated is constant in the width direction. However, it is difficult to say that the distance between the front end surface of the coating liquid and the member to be coated is constant on the apparatus side. The coated surface is appropriately and surely managed. Patent Document 2 has a gap sensor which can detect the value of the gap (the distance from the substrate surface) measured before the application of the resist Resist) and the resist coating The value of the gap measured after the cloth (and the distance from the surface of the resist film #), but the values of these gaps are used for the resist film inspector's, that is, # is merely a good or bad person to inspect the product, and it is difficult Say it can be appropriate 312XP /Inventive Manual (Supplement) /97-02/96139446 7 200846085 The coated surface formed during coating is managed. Patent Document 3, although the width direction distribution of the clearance can be adjusted, it is difficult to adjust (4) on the device side. It is said that it can be managed and the management is completed. The purpose of the present invention is to provide the coating surface formed by the coating liquid discharged from the discharge nozzle. Moreover, it is also possible to appropriately manage the coating film thickness and to coat the plate-shaped material which can ensure the quality management of the coated surface with high work efficiency. ', (Means for Solving the Problem) Coating of the plate-like material of the present invention The cloth method is such that the table on which the plate material is placed is moved back and forth relative to the nozzle of the discharge nozzle holder supported by the nozzle position adjusting means, and on the plate material: the k cloth is ejected from the nozzle The coating liquid to be discharged, the coating method of the plate material, characterized in that a distance measuring means capable of measuring a distance between the coating surface formed on the plate material and the discharge nozzle is provided in advance, first, • Set the above work σ The plate-shaped material is inspected so that the table moves forward relative to the above-mentioned mouthpiece and is applied to the test sheet material = test coating, and secondly, the table is opposed to the nozzle holder = In the process of moving backward, the measurement is performed by the above-described distance measuring means, and in order to obtain a desired coated surface, the discharge is performed by the nozzle position adjusting means in response to the measurement result of the distance measuring means The position adjustment of the nozzle is 'subsequent' to perform coating treatment on the sheet material. The method of adjusting the position of the squealing sound is to apply a reaction force to the nozzle holder, and to apply a pushing force or a lower thrust force to the discharge nozzle. , 3 ^^^^^#(^)/97.02/96139446 8 200846085 and the position adjustment of the above-mentioned discharge nozzle is performed by the fineness of the force #4. (Effect of the Invention) The coating method of the plate-shaped material of the present invention can appropriately and reliably manage the coated surface formed by the coating liquid discharged from the discharge nozzle, and can appropriately manage the thickness of the coating film, and High work efficiency ensures quality management of the coated surface. [Embodiment] Hereinafter, an embodiment of a preferred method of coating a sheet material of the present invention will be described in detail with reference to the accompanying drawings. The coating method of the plate-shaped material of the present embodiment is basically as shown in Fig. 1, and the operation Δ 2 for providing the plate-like materials is, 1P, and the nozzle for supporting the discharge nozzle 4 by the nozzle position adjusting means 3a to 3c. The seat 5 is moved back and forth in the opposite direction, and the coating liquid L discharged from the discharge nozzle 4 is applied to the plate-like body 1S. The coating method of the plate-shaped material is previously set and can be measured and formed on the plate-shaped material. The distance measuring means for the distance between the coated surface of the coating surface 4 of 13 is 仏 化, first, "= 2 is set on the plate material ls for the test, so that the table 2 is sprayed: the seat = ground moves toward the front and In this test, the plate material is coated with the mouth type 13⁄4, and the vertical force is moved by the rear side. In the process of facing the nozzle holder 5, the measurement is performed by the distance measuring means 6a to 6c. : Obtain the desired coating surface LS, in response to the distance measuring means 6, the result of the adjustment, by the nozzle position adjustment means: ~ The position of the mouth of the mouth 4 is gentleman two ^ ^ 丄a ^ Λ ^ "i The illustrator (invention) Viewing the coating step 200846085 Figure, 'Fig. 1 (b) is a view of the coating step from the side. 1. The device used in the coating method of the plate material in the present embodiment. Figure 4; ^ + 枓 π heart from the main: from the plate material 41S, H ^ table 2; and the plate-shaped material on the table 2 ... move the nozzle seat 5; The nozzle holder position adjustment means 3a to 3c • smoke, 丄 丄 + ^ 〇, 3C, and hunting by the mouth position adjustment means 3 & ~ 3c and supported by the nozzle holder 5, can be 1Q 1D two discs ^ J spit out The coating liquid L is applied to the discharge nozzle 4 which is subjected to the coating treatment, and is formed as described above. Fig. 3 I aj is viewed from the face of the green face L, and the rule of the sea is set. 3 (b) is a cross-sectional view of the part viewed from the side. Figure 3 (1) shows the skirt from the rear. The top of the second table 2 is formed by a flat surface with a high flatness. The plate material 1S for testing or the plate shape for the product, b has a pair of left and right leg portions 5a and a cross frame portion 5b spanned between the ankles 5β, and the whole is traversed in the plate The material MS and the 1P body are in the shape of a door. The cross frame portion 5b 再 is further joined to the nozzle holder 5 by the left and right sides a and the truss portion 5b, and the vertical wall portion 5c is provided. The leg portions 5a of the nozzle holder 5 are provided. Between the work a 9 μ; * and the top of the port 2, a pair of left and right line type horses 2 are provided so that the nozzle holder 5 ΐ7Γ can reciprocate in the front-rear direction: the nozzle holder 5 is started from the waiting position and advances to the plate shape. When the material arrives at the folded-back position, it is temporarily stopped. After 1 , ^ ^ is set to start, and the waiting position is stopped and stopped. Thus, the second setting is performed. The table 2 is moved relative to the nozzle holder 5. ...also, although not shown, the legs of the ball screw 312XP/invention manual (supplement)/97·〇2/96ΐ39446 ι〇200846085 are assembled in each leg portion 5a, and the horizontal frame state is individually adjusted. Therefore, it is also possible to adjust the horizontal portion discharge nozzle 4 so as to be provided in the lateral frame portion 5b_^ of the nozzle holder 5. In the spouting nozzle 4', check the electric eve 1 mountain, < Bu Yi edged the length direction of the ^ spout 4a. The spout nozzles 4 are joined to the respective rods 8 of the plurality of nozzles 3a to 3c which are arranged at appropriate intervals in the direction of the cross frame portion. In the nozzle position adjusting means 3a to 3 ==, the wall portion 5C is provided with a support shaft 9 which is directed toward the discharge nozzle 4 toward the dog. The discharge nozzle 4 is fitted to the fulcrum M mesh. In the illustrated example, three nozzles 3 adjusting means 3a to 3c are provided at equal intervals. The discharge nozzle 4 is supported by the nozzle holder 5 by the first to third position adjusting means 3a to 3c. Further, the shaft is placed at the center between the three nozzle position adjusting means 3a to 3c at one position. Further, the nozzle position adjusting means may be provided in the center of the horizontal frame portion (3). In the case of this example, the fulcrum 9 adjusts both sides of the hand at the nozzle position, and the adjustment means from the nozzle position are equidistant to two positions. Each of the nozzle position adjusting means 3a to 3c is a casing that is fixed to the horizontal frame portion 5b, and is slidably movable in the downward direction with respect to the casing (7). Further, the rod 8 that is inserted into the discharge nozzle 4 in the vertical direction through the horizontal frame portion 5b is provided, and the drive portion (not shown) is provided in the casing ι to be slidably moved. For the driving method of the driving portion, the nozzle position adjusting means 3a to 3c, such as a pneumatic type, a hydraulic type, an electric type, and the like, may be employed, and the casing 1 is placed on the horizontal frame portion 312XP/invention specification (supplement)/ 〇 / / / / 2008敕 & 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降 下降In the middle, the first and third nozzle positions are lowered, and the second and third nozzle positions on the left and right are:: When the lifter is raised, the discharge nozzle 4 is curved downward in the longitudinal direction of the horizontal frame portion 5b and becomes convex. In this way, the position of the discharge port 4a is adjusted, and the discharge amount of the coating liquid L is adjusted in the longitudinal direction of the discharge nozzle 4. In this state, coating is performed on the plate-shaped materials ls and lp, such as spitting. When the distance between the outlet 4a and the surfaces of the plate-shaped materials ls and lp is close, the pressure of the coating liquid in the nozzle 4 is discharged. It is difficult to be liberated, and since it is difficult to discharge the coating liquid L' from the discharge port 4a, the thickness of the coating film is reduced. Further, when the distance between the discharge port 4a and the surfaces of the plate-like materials ls and lp is separated, the nozzle 4 is discharged. The pressure of the coating liquid L is easily released, and since the coating liquid L can be easily discharged from the discharge port 4a, the thickness of the coating film becomes thick. Therefore, the end portion of the discharge nozzle 4 is more likely to be discharged than the central portion. The liquid L is so thick that the thickness of the coating film at the end portion becomes thick. The relationship between the amount of change in the distance between the discharge 〇 4a and the surface of the plate-like materials IS and 1P and the amount of change in the thickness of the coating film is determined in advance. The data input controller 丨2 can be used for the adjustment operation. The waiting position X of the nozzle holder 5 on the table 2 is between the discharge nozzle 4 and the discharge nozzle 4 at an appropriate interval in the longitudinal direction of the discharge nozzle 4. Specifically, in the 312XP/Invention Manual (Supplement y97_02/96i39440 12 200846085, the gap sensors 11a to 11c are provided between the lower edges of the discharge ports 4a, and the gap size can be detected. In the example of the figure, Is in cooperation with brother 1~ brother 3 mouth The first to third gap sensors 11a to Uc are provided at three positions of the mounting positions of the position adjusting means 3a to 3c. For the gap sensors 11a to 11c, for example, a magnetic gauge (registered trademark) can be used. The sensing thieves 11 a to 11 c are connected to the controller 12 described later, and the detected gap 篁 can be output to the controller 12. The controller 12 can respond to the first to third gap sensors 1 la 〜1 The jacks are appropriately controlled to control the lift of the jack, and the third nozzle position adjusting means 3a to 3c can be operated as necessary. The distance measuring means 6a to 6c are provided on the opposite side of the discharge nozzle 4 in the vertical wall portion of the nozzle holder 5. The distance measuring means 6a to 6c are provided at appropriate intervals in the longitudinal direction of the vertical wall portion 5c. In the example of the drawing, the first to third distance measuring means 6a to 6c are provided at the positions where the attachment positions of the first to third nozzle position adjusting means 3a to 3c are fitted. These distance measuring means 6a 鲁 ~ 6c can be used, for example. The laser sensor capable of measuring the distance from the emitted laser light to the reflected back time, the distance measuring means 6a to 6c are connected to the controller 12, and the measured value is output to the control crying distance measuring means 6a~ 6c, when the spit (four) nozzle 4 is applied on the test plate material 1S, and when the discharge nozzle 4 is retracted, the distance between the coated surface LS directly below the discharge nozzle 4 and the discharge nozzle 4 is measured, and the distance is taken as the distance The first to third distance measuring means 6a to 6c are respectively associated with the first to third nozzle position adjusting means 3a to 3c, and the mounting positions of the respective nozzle position adjusting means 3a to 3c are different. Determine the above distance. Take the distance measuring hand 312XP / invention manual (supplement) /97-02/96139446 13 200 In the measurement operation of 846085 & 6a to 6c, the data measured by the distance measuring means 6a to 6c or the controller 12 is corrected in consideration of the retracting speed of the discharge nozzle 4, and it may be continuously implemented in the backward movement, or may be appropriate The position may be such that the discharge nozzle 4 is stopped and the stop is performed. The former is a method of continuously detecting the distance of the measurement target, and the latter is a method of sampling and detecting the distance of the measurement target in a plurality of parts, and any method may be used. The measured value obtained by the second distance measuring means 6a is used in the position adjustment of the discharge mouthpiece 4 by the second nozzle position adjusting means 3a, and is obtained by the second and third distance measuring means 6b, 6c. The measured values are each used for the position adjustment of the discharge nozzles 4 by the second and third position adjusting means 3b, 3c. If necessary, the controller 12 may also use the i-th to third measuring means 6 & The measurement values of ～6c are subjected to interpolation (interp〇lati〇n) processing, and the deformation of the discharge nozzle 4 may be optimized by the first: third nozzle position adjusting means 3a to 3c. Distance means 6 & ~ 6c The measured values of = are input to the controller 12. The first to third mouthpiece position adjusting means 3a to 3c are connected to the controller i2, and the controller 2 is calculated from the first to the third distances. The means 6 &~6. The measured value of the input person, and the nozzle position adjustment amount corresponding to each of the distance measuring means 6a to the third nozzle position adjusting means 3a to 3c is output as a control amount to each of the heavier The nozzle position adjusting means 3a to 3c. The amount of the nozzle position adjustment amount is used as the third nozzle position adjusting means 3a to 3c for pushing up or down pushing the straight rod 8 by the driving portion. According to the (four) position adjustment amount of the person input from the control 1^2, the driving portions are slidably moved by the lever force, thereby responding to each of the distance measuring means 6b. Measured 312XP/Invention Manual (Supplement)/97-02/96139446 14 200846085 The measurement result of the enthalpy, specifically, the position adjustment of the discharge nozzle* is performed in response to the measurement result of the control by the controller 12. Next, a method of applying the plate material of the present embodiment will be described. Before the start of the coating operation, the distance measuring means 6a to 6e are attached to the vertical direction 5c of the nozzle holder 5, and the first test sheet material 1S is suctioned and fixed on the table 2 by suction means or the like. The table 2 is advanced to the table 2 on the table surface, and the first coating is applied by the discharge nozzle 4. φ secondly, the nozzle holder 5 is retracted with respect to the table 2, and measurement is performed by the first to third distance measuring means 6a to 6c in the process. For example, as shown in the "data 1" of Fig. 2, when the difference between the left and right ends of the first test sheet material 1S occurs, the first to third gap sensors 11a to 11c are detected. The amount of the gap is adjusted by the controller 12 to operate the jack to adjust the height of the left and right portions - the height of the leg portion 5a is re-adjusted to the horizontal frame state to perform level correction. Thus, it can be set to be roughly set to love. If necessary, the first to third nozzle position adjusting means 3a to 3c may be operated to perform fine adjustment. Next, the second test sheet material 1S is placed on the top of the table 2, and the nozzle holder 5 is advanced with respect to the table 2, and the second test coating is performed by the spout. Next, the mouthpiece 5 is retracted with respect to the table 2, and in the process, the measurement is performed by the jth to the third distance measuring means "~", for example, as shown in "Data 2" of Fig. 2, for the second test. When the center portion of the coating material LS of the plate-shaped material 1S is measured to be higher than the left and right Atc, the controller 12 is used to determine the measured value by the i-th to third-distance measuring means. The i to third nozzle position adjusting means 3a to 3c operate to bend and deform the discharge nozzle 4 to perform correction. 312XP/Invention Manual (Repair)/97-02/96139446 Η 200846085 That is, the thin portion of the coating film is thin. The part with a high degree of excretion is made to spit out, f rises @, and the coating film is greatly deformed and deformed. By this, the flaw can be made into |. Thus, if W is set to be substantially zero, after 1 = add-coating The product material of the cloth material ιρ can be formed into a flat coating for several times. 'For the horizontal correction or the bending correction, it can be repeated and the salt is not coated. Also, the name is too Af Afc丄In this case, although it is described that it is possible to obtain the coated surface LS, if it is only bent, or if it is: and two: positive: In the longitudinal direction of the discharge nozzle 4, the coated surface of the inclined coated surface is appropriately formed. In the above-mentioned procedure, 'the second test is performed twice, and the second test is applied. The calculation of the controller 12 may be performed only after the test coating is completed. The coating method of the plate material of the present embodiment described above is performed in advance, and the coating of the sheet material ls is measured. The distance measuring means 6a to 6c for the distance between the cloth surface ls and the discharge 4, first, the plate material 1S for the test is placed on the table 2, and the nozzle holder 5 is opposed to the table 2: On the test sheet material 1S, the test coating is performed next, and in the process of moving the nozzle holder 5 relatively backward to the table 2, the measurement is performed by the distance measuring means 6a to 6c. In the desired coating surface LS, the position adjustment of the discharge nozzle 4 is performed by the nozzle position adjusting means 3a to 3c in response to the measurement result of the distance measuring means “ "", and then the coating is performed on the sheet material lp of the product. Treatment, Q This test coating for the test plate material 1 s The condition can be measured by the distance measuring means 6a to 6c for measuring the distance between the varnish surface LS and the discharge nozzle 4, 312XP/invention specification (supplement)/97-02/96139446 16 200846085 疋, and according to the result, the nozzle can be used The position adjustment means knows that the position of the discharge nozzle 4 is adjusted to obtain a desired coated surface. Thus, it is possible to appropriately and surely apply the coating formed by the flooding liquid L discharged from the discharge nozzle 4. As long as the plate material (1) ιρ is high flatness, the coating film thickness can be appropriately controlled, and the quality management of the coated surface LS can be ensured with high work efficiency, and the yield of the product can be improved.
如可適當地實施塗佈面管理，則在板狀材料ιρ上塗佈 塗佈液L後，也可自由地調整塗佈面u，而可提高其製 品之品質。又，即使不能充份確保吐出噴嘴4等零件之機 械的精確度或組裝精確度，但由於藉由本實施形態之方法 可保證塗佈面LS之射度，因此，其可減少裝置之拆解 修理等所須的賴，而可實施塗㈣作，並可減少維護及 確Γϋ業能率之提高。x，對塗佈液[之交換或塗佈液L 的品質之不句之情形’根據本實施形態之方法其可簡便地 作吐出貝鳴4之位置調整而實施塗佈處理，而可提高作業 之效率。 匕又，由於以測距手段6a〜6c來測定塗佈面Ls與吐出噴 f 4之間的距離’因此’其可將此測定結果使用於藉控制 12對噴嘴位置調整手段3a〜3c的噴嘴位置調整量之設 定並可使塗佈面LS之修正或管理自動化。又，由於利 用前進塗佈處理㈣嘴座5之後退過㈣以測距手段6a 〜6c實施測定，因此，其可使處理時間短縮化。又，由 於利用左右一對腳部5a高度調整的千斤頂和水平修正的 組合來作塗佈之控制，因此，其可使吐出喷嘴4彎曲變形 312XP/發明說明書(補件)/97_〇2/96139446 17 200846085 之寫、曲修正抑制成最小限度’而可合理且適當地實施塗佈 面管理。 ' 又，當使喷嘴位置調整手段3&〜心在喷嘴座5取得反 -作用力，而使其成為在吐出噴嘴4當作輸入上推力或下推 •力之施力手段，而由於使施力手段之施力值來實施吐出噴 嘴4之位置調整，因此，其比起使微米級之吐出噴嘴4的 位置以變位量來調整之情形，其可簡單且容易地實施位置 •之調整。 雖然本實施形態中以玻璃基板等的板狀材料為例來說 明，但本發明也可適用於在薄膜等的表面上塗佈糊狀物· 阻劑液·彩色濾光片等的塗佈液之塗佈處理。 【圖式簡單說明】 圖1係說明適合本發明的板狀材料之塗佈方法的一實 施形態之概略說明圖。圖1 ( a)係塗佈過程之侧視圖。 圖1 ( b )係塗佈過程之前視圖。 _ 圖2係說明在圖1所示之方法中塗佈處理程序之概略說 明圖。 圖3係在圖1所示之方法中所使用的塗佈裝置之概略說 明圖。圖3 ( a)係塗佈裝置之前視圖。圖3 ( b )係塗佈 裝置之侧剖面圖。圖3 ( c )係塗佈裝置之後視圖。 圖4說明在圖1所示之方法所使用的塗佈裝置中吐出喷 嘴之位置調整狀態之說明圖。 【主要元件符號說明】 2 工作台 312XP/發明說明書(補件)/97-02/96139446 18 200846085 3 8 第1喷嘴位置 3b 第2喷嘴位置 3c 第3喷嘴位置 4 吐出喷嘴 4a 吐出口 5 喷嘴座 5a 腳部 5b 橫架部 5c 縱壁部 6a 第1測距手段 6b 第2測距手段 6c 第3測距手段 7 線型馬達 8 桿 9 支軸 10 殼套 1 la 〜1 lc 間隙感測器 12 控制器 IP、IS 板狀材料 L 塗佈液 LS 塗佈面 X 等待位置 Y 返回位置 312XP/發明說明書(補件)/97-02/90139440 19When the coating surface management can be appropriately performed, the coating liquid L can be applied to the sheet material ιρ, and the coating surface u can be freely adjusted to improve the quality of the product. Further, even if the mechanical accuracy or assembly accuracy of the components such as the discharge nozzle 4 cannot be sufficiently ensured, since the radiance of the coated surface LS can be ensured by the method of the present embodiment, the disassembly and repair of the device can be reduced. If you need it, you can implement the coating (4), and you can reduce the maintenance and ensure the improvement of the industry. x, the case where the coating liquid is exchanged or the quality of the coating liquid L is not described. According to the method of the present embodiment, it is possible to easily perform the coating treatment by discharging the position of the buzzing 4, thereby improving the work. Efficiency. Further, since the distance between the coated surface Ls and the discharge jet f4 is measured by the distance measuring means 6a to 6c, the measurement result can be used for the nozzle of the nozzle pair position adjusting means 3a to 3c by the control 12 The setting of the position adjustment amount can automate the correction or management of the coated surface LS. Further, since the measurement is carried out by the forward coating process (4), the nozzle holder 5 is retracted (4) by the distance measuring means 6a to 6c, the processing time can be shortened. Further, since the combination of the height adjustment of the pair of left and right leg portions 5a and the horizontal correction are used for the coating control, the discharge nozzle 4 can be bent and deformed 312XP/invention specification (supplement)/97_〇2/ 96139446 17 200846085 The writing and song correction are suppressed to a minimum', and the coated surface management can be performed reasonably and appropriately. Further, when the nozzle position adjusting means 3 &~ heart is subjected to the counter-force at the nozzle holder 5, it is used as a means for applying the thrust or the push-down force to the discharge nozzle 4, and Since the position adjustment of the discharge nozzle 4 is performed by the force application value, the position adjustment can be easily and easily performed by adjusting the position of the discharge nozzle 4 of the micrometer level by the amount of displacement. In the present embodiment, a plate-shaped material such as a glass substrate is used as an example. However, the present invention is also applicable to a coating liquid such as a paste, a resist liquid, a color filter, or the like applied to the surface of a film or the like. Coating treatment. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic explanatory view showing an embodiment of a coating method of a sheet material suitable for the present invention. Figure 1 (a) is a side view of the coating process. Figure 1 (b) is a front view of the coating process. Fig. 2 is a schematic explanatory view showing a coating process in the method shown in Fig. 1. Fig. 3 is a schematic illustration of a coating apparatus used in the method shown in Fig. 1. Figure 3 (a) is a front view of the coating apparatus. Figure 3 (b) is a side cross-sectional view of the coating apparatus. Figure 3 (c) is a rear view of the coating apparatus. Fig. 4 is an explanatory view showing a state in which the position of the discharge nozzle is adjusted in the coating device used in the method shown in Fig. 1. [Description of main component symbols] 2 Table 312XP / Invention manual (supplement) / 97-02/96139446 18 200846085 3 8 1st nozzle position 3b 2nd nozzle position 3c 3rd nozzle position 4 Discharge nozzle 4a Discharge port 5 Nozzle holder 5a Foot portion 5b Cross frame portion 5c Vertical wall portion 6a First distance measuring means 6b Second distance measuring means 6c Third distance measuring means 7 Linear motor 8 Rod 9 Support shaft 10 Shell 1 la ~ 1 lc Clearance sensor 12 Controller IP, IS Plate material L Coating liquid LS Coating surface X Waiting position Y Return position 312XP / Invention manual (supplement) /97-02/90139440 19