TW200842845A - Optical information recording medium and manufacturing method of the same - Google Patents

Abstract

To provide an optical information recording medium that is capable of high-speed recording, even when the film thickness of a recording layer of an information layer is thin in particular, and is excellent in mass-productivity. In an optical disk that performs recording/reproducing of information through changing the optical characteristic of a recording layer by laser beam irradiation, an oxide protective layer Lox - MOx, which is configured with a mixture of an oxide LOx and an oxide MOx, is laminated by being adjacent to the upper and lower sides of the recording layer as a first interface layer and a second interface layer. The oxide LOx is an oxide of one element or more selected from the lanthanoids such as Ce, Nd, Eu, Gd, and Dy. The oxide MOx is an oxide of one element or more selected from Si, Al, and Ta.

Description

200842845 IX. Invention description: [Reciprocal reference of related application] It is incorporated by reference to this document on April 18, 2007, which reveals the optical body assisted by the 11-beam __Optical recording information [Prior technology] The Ray if beam can be rewritten to the vehicle μ. We use the transmitted optical characteristics to record and reproduce the LM J type of dry rewritable digital audio and video disc (DV).里尤 I, rewritable) and a number of 岑 出 κ, left ” dlgltal video disc digital viH ^ number ^ ~ 曰 first disk machine access memory OVD-RAM, ancient 』 / plus 0 disc random access memory ). We have already increased the number of 'Guang 'HD DVD-RAM ^ ^ (patent literature, non-patent literature i, etc.). The recording material of the / / / or - gInSbTe group is used as the structure of the above-mentioned optical disk having the junction characteristics of the interface layer which is disposed adjacent to the upper side and the lower side of the recording layer. Crystallization of a recording layer of a mountain and a reduction of repeated recording and re-production, i.e., Ge-Cr_N, etc. are used as materials for the interface layer. The demand for the information and the storage capacity of the company has been changed. The second high-speed record 'must use a higher speed than the previous scale ί / into the HD Qing - in the case of the situation, I expect to be 13.2 metric A f 'this is known as the rotation speed of 6. 6 meters / sec (1 times speed ) twice as much. Learning information record ^^ Storage capacity of Dagan' For example, it is known that there is a two-layered light ..., a personal body, which contains the information layer LG of the first recording layer and contains the second 200842845

The φ μ 〜 成 is successively laminated on the single substrate. However, since the laser mi's layer reaches the information layer U, it is necessary to set the recording layer film thickness of the information layer LG to about half of the existing optical media to improve the information layer L0. Patent Document 1 · Japanese Laid-Open Patent Publication No. 2004-213862; Μ 7P#1 : Japanese J〇Urnal 〇f APP!ied Physics Vol. 43, :·, PP· Side - 4862 "Signa1,-Noise Ratio in a PRML Detection is written by S. 0HKUB0 et al. However, the above technique has the following disadvantages. ί=If the optical information recording medium having the information layer has the following film layers, the first dielectric layer, the lower interface layer, and the memory layer are sequentially stacked.

It 3 / second dielectric layer, and reflective layer. The GeN layer was used for each ΐ to be recorded on an optical f-recording medium having such a structure by spinning at twice the linear speed (13.2 m/s) of the cooking speed. Therefore, it is now necessary to record the decline of money from repeated recording and re-reading than in normal iii. For example, the method of example, in order to achieve a larger storage capacity; ΐ1ΤΓ?ΐΓ 0 ^ The media has a first negative layer, and this poor layer Pull out the face. ®曰. Bell 1^ You are hunted by a dielectric layer, a lower interface (tna ftoive) layer, and a transparent layer. The second information layer is disposed in the first layer via the wire separation layer. The above-mentioned GeN layer is usually married to the upper side and the lower side, and the interface layer is further ZnS-Si〇2. The first dielectric layer and the second dielectric layer are widely used as a metal transflective reflective layer. Furthermore, 'fish--================================================================================================== The speed will slow down. Therefore, when the high-speed recording is doubled or faster, the crystallization speed* of the recording layer becomes two, which causes the problem that accurate information cannot be recorded. When the transfer layer of the recording layer & = , it becomes difficult to have a = crystal nucleus on the recording layer because the film thickness of the recording layer becomes thin, the crystallization speed of the recording layer becomes slower. Further, in order to form the above GeN layer, nitrogen gas is introduced into the film to form a gas. When a GeN layer is formed on the recording layer as the upper side interface layer, the nitrogen gas introduced into the second layer may nitride the surface of the recording layer. This ^ on the surface of the recording layer becomes unpaid, causing the recording/reproduction characteristics of the optical information recording to be changed. Further, the present invention has therefore been designed to overcome such problems. SUMMARY OF THE INVENTION One of the present inventions is to provide an optical information recording medium which can be produced in a large amount, particularly at a higher speed even in a recording layer having a film thickness. An optical information recording medium according to an exemplary embodiment of the present invention comprises a recording layer and an optical information recording ship of a layer, the recording layer irradiating the light beam to change its optical noise, and the protective layer is laminated on the record Wherein the protective layer contains a mixture of an oxide and an oxide MOx, the oxygen is an oxide of a plurality of elements selected from the group of elements, and the oxide M (^ does not select one or more of Si, A1, and Ta) Oxide, according to another embodiment of the present invention, the optical #signal_body manufacturing method, in order to manufacture a recording material and a layer of light recording optical recording technology. After the formation of the contact layer, the green gas-free inert gas environment towel makes the remaining material carry out the lining and shape protection. The light material has an oxide L0: a mixture with the oxide Μα, and the oxide is said to be selected from the class. An oxide of the above species, and the oxide lanthanum is an oxide of one or more elements selected from the group consisting of n and Ta. 200842845 [Embodiment] The embodiment of the present invention will be referred to The drawings are described in detail. The hairline f-exemplary implementation 1G is a first dielectric layer which can be further laminated on the transparent substrate 11; the first interface layer 13, the recording layer 14, the second interface layer 15, and the second medium mine layer. These interface layers are on this disc (optical information recording)

A typical recording material of GeSbTe or AgInSbTe can be used for the recording layer 14. The film thickness of the upper impurity layer 14 can be set to about 13 nm to 15 coffee. Example 1 is a material of the reflective layer 17, and it is preferable to use both of thermal conductivity and high transmittance having Ag as a main component. In order to improve the weather resistance, the chemical element of the material Ϊ /, η, or Μ of the two components may be added to have the Ag as the main material. ZnS_Si 〇 2 is used for the first dielectric layer 12. For the composition, from the viewpoint of 0 5^0 and 9, t is preferably used in the composition formula (ZnS) view 0', and the surface μ and the like are used as the first interface layer 13 and the second boundary layer 15. Then, in the present exemplary embodiment, blood oxidation by oxide L〇x is used.

L0 L〇-Ma GeN Λ M, EU, Gd, Dy, etc., a kind of paper-like oxide of alizarin. The oxide M0x is selected from the group consisting of Si, M, and τ & Because of f, we can increase the crystallization speed of the recording layer 14, which will be less fading! In the case of recording/reproduction signals, the bismuth-like element is easily combined with oxygen, so once combined, it is formed. Shishi is always stable. In addition, the oxide says that there is a very small extinction coefficient for a southern density recorded laser beam with a wavelength range of 3 x (10), and for this kind of mine = 200842845 TJ ^?, aD Si'Al' ^ Ta = rbi - two = connection = = easy = in, layer y above; =: quantitative layer: light east and tend to have the exemplary advantage of the present invention, by using oxide L0x and oxide to protect 4 layers, oxide L〇X is selected from One or more elements of the thorium-like element = substance, (4) one selected from the group consisting of Sl, A1, and Ta = handle ^ / an audio recording medium that operates even at a high linear velocity and has a thin film recording layer. Optical information showing less decay on the 'money/reproduction signal. Basically, the same reference numerals as in Fig. 1 are used for the same elements. The optical disc 40 according to the present embodiment includes the first dielectric layer 12, the first interfacial layer 13, the recording layer 14, the second interfacial layer 15, and the second dielectric layer 16 on the transparent substrate 11. The metal transflective layer 37 and the third dielectric layer 18. This laminate is referred to as the first contact 41. Further, an optical separation layer 31 is formed on the first information layer 41, and the second commemoration layer 42 is disposed thereon. Similar to the first information layer 41, the second information layer 42 includes a metal reverse layer 22, a third dielectric layer 23, a third interface layer 24, a recording layer 25, and a fourth layer on the transparent substrate 21. Interface layer 26, and fine dielectric layer 27. These interface layers serve as a protective layer in this optical disc (optical recording medium). The first information layer 41 and the second information layer 42 having the respective structural elements are respectively disposed on the separated transparent substrates 11, 21, and finally laminated via the optical separation layer 31 made of the ultraviolet curable resin, thereby forming Two information layers of the disc 40. In the case of the optical disc 40, the laser beam for recording/reproduction information is incident on the side of the first information layer 41. In the present application, the optical disc % nickname 200842845 having such a structure is an A-type optical information recording medium. Figure 3 is a cross-sectional view showing the under-two light f according to the second exemplary embodiment of the present invention. Hereinafter, the optical disc will be used for the same component by referring to the same reference numeral as the reference numeral on this recording. In the embodiment of the human π, the optical disc can be constructed as a compact disc 60. The lower layer of the aperture R0 is stacked on the transparent substrate: a metal reflective layer Uf2 interface layer 24, a recording layer 25, a fourth interface layer 26; a layer 27, as the second information layer 42; A filament separation layer 31 made of two-dimensionally formed is formed. Here, there is a soil _, == day _ on the wire _ 31. /, iV ? Lin Ma, metal semi-transparent reflective layer 37, second dielectric layer 16, the first: interface sound g ΐΐ, which is bonded by using ultraviolet curing resin to make i = medium = layer through Laser swivel (4), used for recording/remanufacturing information, ^CD with this structure _ is a type 3 optical information recording medium | monthly case, to record Γ Ι Gife field or AgInSbTe typical recording material available The material of the semi-transparent reflective layer 37 shown in Fig. 3, in order to achieve high conductivity when adding force: to the metal semi-through C3u7, /e, In, or Nd chemical elements can be adapted to reflect the mouth i ZnS—Sl〇2 is used as the first dielectric layer 12. For the components, it is preferable to satisfy 200842845 "〇.5$χ$〇.9" in the composition formula (Zns) x(si02)lx. Sound, =, etc. are used as the first interface layer 13 and the second interface li5. In the present embodiment, the oxide La and the oxide M0, the 曰-interfacial layer 13, and the second interfacial layer 15 are used. The oxide L〇x is at least one selected from the group consisting of "CeU Gd, Dy, etc. (referred to as Group A), and is selected from the group consisting of Si, A1, and Ta (referred to as at least = of _). , we can increase the crystallization speed of the recording layer 14, this action and with the thin recording layer 14, in the case of ^2 (there is less recession. ~ series / Dan H tiger on the cousin storage layer LMGx 'ideally The content of the element selected from the lan can be in the range of 35 mQl% to 85 mqi%. In addition, the ''J emulsifier lysing layer L 〇 x-MOc can be borrowed from the sputum material without containing $. Forming, the oxidized contact material contains the oxide L0x and Q m〇1% formed by 秘 兀 兀 以 以 以 以 以 以 以 = MG MG MG MG MG MG MG MG MG MG MG MG MG ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; (The value obtained by the actual knot obtained; mol%" is the same as in the case of the prior art, and in the second exemplary embodiment, the deviation from the upper disc adjacent to the recording layer The vine layer L0x_M0x may be stacked only on the recording layer and inserted into another layer '2' = Example 1, and the first dielectric layer 12 and the first interface are sequentially stacked on the transparent substrate 11 to be first. Demonstration An example of a specific form of the example 丨. η 口 甘 甘 _ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ The optical disc 10, wherein the composition of the first interface layer 13 and the second interface layer 15 can be varied. Further, 50 nm of ZnS-Si〇2 is formed as the first dielectric layer 12, and the 14 nm GeSbTe is Formed as the recording layer 14, 25 nm of ZnS-Si〇2 is formed as the second dielectric layer 16, and AgPdCu is formed as the metal reflective layer 17° 曰Gd2〇3(80 mol%)-Si〇2 (20) Mol%) is used as the first interface layer 13 and the second interface layer 15 to fabricate the medium, and the well-known GeN layer is also used to manufacture the media. & A media is equivalent to a high resolution rewritable digital audio and video disc (HD DVD-RW) , twice the linear velocity of the definition digital video disc rewritable) (CLV = 13·2 m/s), and the local response signal-to-noise ratio (PRSNR, partial resp) is measured after repeated recording/reproduction actions. 〇nse signal cut noise ratio characteristic (performance index). "PRSNR(partial respo Nse Signal t0 n〇ise rati〇)” is a performance index of optical f-signal quality. Specifically, it can simultaneously represent the signal-to-noise ratio (S/N, signal tG nGise rati) of the reproduced signal. ), and the index of the actual remanufactured ^ and the theoretical reverse pulse (PR, pulse reverse) waveform. It is used to evaluate light

, the bit error ratio. For example, more specifically, it is described in Patent Document Patent Document 1 and the like. F

Show the results of the comparison. It can be observed from Fig. 4A that the case where the _ genus film is used as the ^ layer is smaller than the case where the GeN layer is used in the degree of deterioration of the body R which is operated by ΐίί 1 . In the case of system (4), the PRSNR is 15. 4, and the ship strength meets the standard. As shown in FIG. 4B, since the medium using the Gd2〇3-Si〇2 film as the interface layer has a high direct current (DC, direct coffee) rate, a difference in its characteristics is generated, and the crystal is given to the recording layer. Faster. Hereinafter, the material and composition of L〇x and 敝 and the miscellaneous speed rotation of the scale/second will be described. - 12 200842845 PR·measurement value (10) after the recording/reproduction (four). In general, when p is read as 15 or more regular records, then the ribs will be made. Bao Si New _ After the ring test of real C, humidity 85%, 500 hours, yes,

The data of the /reproduction action shows these results in the same-position quantity _ pRS of the media. From the figure 5 ’ we can observe that the 10,000-time PRSNROW dish will become lower due to the decrease in the content of the material. The crystallization rate will also decrease as the L〇x content decreases. Hey, the tree test 'measured PRSNR is not properly L〇x material in the range of 35 m〇l% — 85 secrets. Good value. However, when the content is outside this range, this value will decrease. When the amount is less than 35 mol%, we believe that since the crystallization rate will decrease as the amount of the field (7) decreases as described above, the PRSNR will also become lower. Meanwhile, when La^^ exceeds 85 mol%, the content of M〇x# material is relatively small. Therefore, the affinity of the recording layer can be made easy to separate. 9 Low Example 2 The following description is an example 2 of a more specific form of the second exemplary embodiment. 2, the transparent substrate 11 is placed on a disc 40. In the transparent layer-dielectric layer i2, the first-interfacial layer 13, the recording layer 14, the second interface acoustic layer, the second dielectric layer 16, the metal semi-transmissive reflective layer 37, and the third dielectric layer ΐ8θ . The stack is the second information layer 41. The optical separation layer 31 is formed on the first information layer 41. Also, the second information layer 42 is disposed thereon. Similar to the first information layer 41: two: §fL layer 42 package s sequentially reflects the metal reflection sound π on the transparent substrate 21, the second electrical layer 23, the first, the surface layer 24, the recording layer 25, the first Four interface layers ^, and two dielectric layers 27. The first information layer 41g and the second information layer 42 are laminated on the transparent substrates 11 and 21, respectively. Finally, the first information layer 41 and the second information display milk are laminated on each other with the optical component 31 made of the ultraviolet curable resin interposed therebetween, thereby forming the optical disk 4 having the two information layers 41 and 42. The laser beam used for information recording/reproduction will be shot from the side of the first layer. Because ^ 13 200842845 This is an A-type optical information recording medium. In the example i, it is explained that only the first information layer 41 is manufactured and the result is evaluated. For the second information layer 42 'for the example (4) a certain system is the layer 4 in reverse order. Therefore, these materials can be selected completely according to the materials used in the makeup example 1. 7 Κ for the shell layer, 41, 50 nm, 17 nm, and 110 nm of the two: upper 'is divided into the first dielectric layer 12, the second dielectric layer 16, and the second two H18. Further, 7 nm of GeSbTe was formed as the recording layer 14, and 10 nm of AgPdCu was formed as the metal transflective layer 耵. The media of f__, 赖r/n τΛ and the second interface layer 15 are fabricated, and this layer is set by selecting _2 from L0x L: k, , and ίM〇X. Also, use the well-known two-boundary prsn_, which is given as a performance index. The results of the evaluation are not compared with each of Figure 6A.吾 · ^PRSNR ^ 〇ΓΕ^!〇2Ι; ίί ::: The case of the layer. In the case of using the GeN layer; the second R after the recording/reproduction action is 7 and the low is ίίΐί===================================== These values are known to have a half value as shown in Fig. 7B, because when :irr ^? :ζ ; 畐 uses Gd2〇3-Ειΐ2〇3-Si〇2 layer, the phase is compared with Yu. Therefore, we can assume the second degree of crystallization; = brother (: 2 = can not be 'this is an executable record / re-production action = below, will explain the material of L〇x and 及 and into the tongue, and preserve stability _ Department. Loss _ re-fine system = 14 200842845

Figure 8 shows these results. From Fig. 7 and Fig. 8, it can be observed that when the layer (1) is disposed on the upper and lower sides of the recording layer as the interface layer, one of the factors 1) - (3) is because of LOx The material contains = two (four) execution - the measured value of the PRSNR after the 10,000 recording/reproduction operation (10) is low, because the crystallization rate becomes slower when the L〇x content becomes smaller. Its &&, (1) · by selecting Gd2〇3 and Eu2〇3 as L0x, and selecting Si〇2 f Μ〇_ set Gd2〇3—Eu2〇3—Si〇2 layer; layer (2) : By Ce 〇 2 with " as L〇x, and selecting the crystal as M0x, Ce〇2-Nd2〇3-Ta2〇5 wide, and layer (3). by selecting Gd2〇 3 and Dy2〇3 as LOx, and GenDy2〇3-a12〇3 layer set to select Ah〇3 as M〇x. . Further, the PRSNR measured after the environmental test showed that the L〇x material content had a good value in the range of 35 to 85 m〇l%. However, when the content is outside this range, this value is lowered. When the content is less than 35 mol%, it is considered that since the crystallization rate will decrease as the LOx content decreases, the PRSNR will also become lower. Meanwhile, when the L〇x material contains more than 85 mol%, the content of the material is relatively small. Therefore, the affinity for the recording layer is lowered, and the 俾 can be made easy to separate. ▲ From the experimental results shown in Fig. 7 and Fig. 8, we can observe that the number of teas determining the characteristics of the medium is the material mixing ratio of L〇x and Μ〇χ. It has been experimentally proved that when the ratio of the material selected from l〇x is in the range of 35 mol% to 85 mol%, good properties can be obtained even if a plurality of materials mixed with L〇x are present. At the same time, it has been proved that in the combination of L0x materials, when the ratio of Euz〇3 and 2〇3 in the combination of Gd2〇3—仙2〇3 and Gd2〇3—Dy2〇3 is increased, the recording sensitivity is obtained. Can tend to be improved. 15 200842845 Example 3 By way of example, Example 3, which is a more specific form of the first exemplary embodiment, is illustrated. Referring to FIG. 1 'by sequentially stacking the first dielectric layer 12, the first interface layer 13, the recording layer 14, the second interface layer 15, the second dielectric layer 16, and the metal reflective layer 17 on the transparent substrate 11. The optical disc 1 is manufactured, and the materials of the first interfacial layer 13 and the second interfacial layer 15 can be variously changed. Further, ZnS-Si〇2 of 5 〇 nm is formed as GeSbTe of the first 'dielectric layer U'Wnm, ZnS-Si〇2 formed as a recording layer Ηβδηπι is formed as the second dielectric layer 16, and 481) (1::11 is formed as a metal reflective layer - 17 〇. Five hundred pieces of Gd2〇3 (80 mol%)-Si〇2 (20 mol%) layer are used as the first interface layer f and the second interface layer 15 The media, and five hundred media using the well-known GeN layer as these interface layers. Each media is rotated at twice the speed of the linear speed of the rib DVD-RW (CLV = 13.2 m/s) and measured. As the performance index of the PRSNR, to compare the fluctuation width of the PRSNR. Figure 9 shows the pRSNR measurement without using each of these interface layers = 彳 ^ Figure 9 'I can observe the use of the GeN layer The pRSNR measurement value is relatively large. The reason for this phenomenon is considered as follows. That is, when the GeN layer is formed, reactive deposition is performed in a mixed gas atmosphere of Ar gas and nitrogen gas. Therefore, we ===Ar Gas and gas are introduced into the demineralization chamber when the second interface layer π is formed and formed by nitriding The surface of the layer 14 is recorded, so the change of the pRS becomes variable. Therefore, the G(H)3-Si〇2 layer which does not require nitrogen or oxygen and can be formed only of Ar gas, etc., does not need to worry about the recording layer. The surface will be nitrided. Also, there will be no fluctuations on the pRS·. • We can note that in addition to the above example 1 - example 3, this has been proven - so that she is selected from the above group A In the case where the film obtained from the material of the β group is the first interface layer 13 and the second interface layer 15, the laser wavelength of 380 nm to 430 Å can be obtained, and the above-mentioned dryness can be obtained. Example 1 - Measurement Results of Recording/Remanufacturing Characteristics of Example 3. The present exemplary embodiment of the present invention is an optical (10) recording recording comprising: recording 16 200842845 layer whose optical characteristics are changed by laser beam irradiation to change the recording layer On the line, the silk contains the recorded material, and L〇x is selected from the group of 镧-like elements.

Si, A1, and I have an emulsion of the genus of the genus, and the muscle is an oxide selected from the group consisting of bi A1 and Ta. The target, --like elements have similar characteristics to each other. The bismuth-like element is extremely easy. The two rn jin = denier combined to form an oxide 1 ^ will become very stable ^. Further, the oxygen can exhibit a very high optical coefficient for the wavelength of the t-ray used for the singularity recording, and produces a very small amount of absorption. At the same time, the oxide layer provided by, for example, Si, yttrium, and y = yttrium has an excellent characteristic of the oxide La mixed with the oxide yt, which is 4 = hunting for a certain phase Multiply the effect, so we can get a small amount of absorption: = beam and tend to have (four) crystals produced on the recording layer _ interface] only. ^1 [The optical information recording medium according to the exemplary embodiment of the present invention can achieve the column effect. Even in the case of a high linear velocity action and having a thin recording layer, there is less degradation in the recording/reproduction signal. Further, the content of the oxide L0x in the protective layer can be set to fall within the range of 35 mol% to 85. The quasi-element elements can be Ce, Μ, Eu, Gd, and Dy. Preferably, the protective layer is laminated adjacent to the upper side or the lower side of the recording layer. Preferably, the protective layer is laminated by being adjacent to the upper side and the lower side of the recording layer. In these cases, the above effects will become more significant. Furthermore, the wavelength of the laser beam can be set to fall within the range of 380 nm to 430 nm. In this range, for this laser beam, the extinction coefficient of the oxide [仏 will become very small. •, J can use two layers of the first recording layer and the second recording layer to set the record ^ 'the laser beam penetrating the first recording layer can be incident on the second recording layer; and we can by y, Hao A protective layer is laminated on the upper side or the lower side of the recording layer. In this case, in order to improve the light transmittance, it is necessary to form a thin first recording layer, and the above effect can be made more remarkable. In the case of the optical information recording medium according to the present exemplary embodiment of the present invention, the protective layer is formed by forming a protective layer on the recording layer by using a material % in an oxygen-containing gas atmosphere. In this case, the nitrogen reaction should be carried out. Further, the dry material can be free from oxygen Μα on the surface of the recording layer, and can have a composition satisfying 35g8P5^ and in the case where the above effects become more remarkable. In such a kind of packet medium, a laser beam is irradiated to change the recording layer, and the layer is laminated on the recording layer (4) by the protective layer, and the oxide is protected by La_Ma. === Cascade with =_a. The oxide L〇x is an element of at least one or more elements selected from the upper and lower sides of, for example, Ce M, and /, and is formed by an optical ίίίί according to the present exemplary embodiment of the present invention. Oxidation contained in optical information recording media

The target contains P mol% of the oxide L〇 and Q mol/❹ M〇x′ and has a satisfying of 35$ρ满 and ]:Q in accordance with an exemplary embodiment of the present invention. The optical information recording medium is used to perform the 'Wei stomach recording/M0' with the g nm-nm wavelength range_casting laser. The exemplary embodiment of the present invention uses the oxide L0x and the oxide oxide to protect the 35L. 〇X~M〇x is used as the interface layer instead of the upper layer i is selected from the group: the hH layer is adjacent to the upper and lower sides of the recording layer. The oxide 1^ is an oxide of at least an elemental germanium of a lanthanum element such as Ce, lanthanum, Eu, Gd, and Dy, and the oxide M0x is selected from the group consisting of Si, M, and at least one of 200842845, . Therefore, we can increase the crystallization speed of the recording layer. It is still possible to provide an optical information recording medium that exhibits less degradation in the case where the record has a thin record of 1_. Month, ^ 芩 test its exemplary embodiment for specific display and description, but ^ ^ 々, some examples. It will be apparent to those skilled in the art that various changes in form and detail may be made in the context of the scope of the invention as defined by the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing a disc as a first exemplary embodiment of an optical information recording medium according to the present invention; FIG. 2 is a view showing a second exemplary embodiment of an optical information recording medium according to the present invention. FIG. 3 is a cross-sectional view showing a compact disc (type B) as a second exemplary embodiment of the optical information recording medium according to the present invention; FIG. 4A is a repeated overwrite of each medium in the example 1. (〇/w, 〇verwri1:e) Comparison chart of T^; Figure 4B is a comparison chart of linear speed dependence of DC cancellation ratio of each medium in Example 1; Figure 5 shows various interfaces in use example 1. Figure 6A is a comparison chart of repeated repetition of each media in Example 2; Figure 6B is a comparison chart of linear velocity dependence of DC cancellation rate for each medium in Example 2; A first evaluation result chart showing media using various interface layers in Example 2; Figure 8 is a second evaluation result chart showing media using various interface layers in Example 2; and Figure 9 shows FIG. 19 is a diagram showing the relationship between the gas environment and the PRSNR when forming the interface layer. 200842845 Table 0 [Description of main component symbols] 10 optical disk 透明 Transparent substrate 12 First dielectric layer 13 First interface layer 14 Recording layer 15 Second interface layer 16 Second dielectric layer 17 metal reflective layer 18 third dielectric layer 21 transparent substrate 22 metal reflective layer 23 third dielectric layer 24 third interface layer 25 recording layer 26 fourth interface layer 27 fourth dielectric layer 31 optical separation Layer 37 metal transflective layer 40 optical disc 41 first information layer 42 second information layer 51 transparent sheet 60 optical disc 61 first information layer 20

Claims (1)

200842845 X. Patent Application Range··1· An optical information recording medium comprising: ·, whose optical characteristics are changed by laser beam irradiation; and a margin layer laminated on the recording layer, which is selected from the group consisting of Sl The elemental oxygen of the oxide MOx x J 3 is in the range of 35 mol% - 85 mol%. 3. If the first paragraph of the patent application scope is the Ce, Shen, Eu, Gd, and Dy scallops, the optical information recording medium of the _镧 element range 1 or 2, the middle layer The optical information recording medium of the first or second item of the Utily range is stacked by at least the upper side or the lower part of the recording layer, and the middle and the next layer are connected to the upper side of the recording layer. And the optical information recording medium of the first item of the layer 4, the middle of the money, wherein the wavelength of the laser beam is in the range of 380 nm - 430 rim. (4) The optical information recording medium of the ninth item of the invention, wherein: the layer and the second recording layer are two layers; the layered haibao jingjing is at least adjacent to an upper side of the recording layer 200842845 & A method of manufacturing an optical information recording medium for manufacturing an optical information recording medium having a recording layer and a protective layer, the method comprising:: after forming the recording layer, by inerting without oxygen The protective layer is formed by sputtering using a target material in a gas environment, the target material comprising a mixture of an oxide L〇x and an oxide lanthanum, the oxide LOx being an oxidation of one or more elements selected from the group consisting of lanthanum-like elements. And the oxide lanthanum is an oxide of one or more elements selected from the group consisting of Si, A1, and Ta. - 9) If the optical information recording medium of claim 8 is applied, how is it included? 1!1% of the oxide 1^ and 卩111〇1% of the oxide]^^ and a target satisfying the composition of 35SPS85 and Ρ+Q^99 are used as the target. XI. Schema: 22