TW200836285A - Tray transferring device - Google Patents

Tray transferring device Download PDF

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Publication number
TW200836285A
TW200836285A TW097105055A TW97105055A TW200836285A TW 200836285 A TW200836285 A TW 200836285A TW 097105055 A TW097105055 A TW 097105055A TW 97105055 A TW97105055 A TW 97105055A TW 200836285 A TW200836285 A TW 200836285A
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TW
Taiwan
Prior art keywords
tray
unit
lifting
guiding
rotating
Prior art date
Application number
TW097105055A
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Chinese (zh)
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TWI423372B (en
Inventor
Hong-Jun You
Won-Jin Jang
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Jt Corp
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Publication of TW200836285A publication Critical patent/TW200836285A/en
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Publication of TWI423372B publication Critical patent/TWI423372B/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742Mechanical parts of transfer devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Abstract

Disclosed is a tray transferring device capable of transferring a tray having a plurality of semiconductor devices thereon for test or sorting processes. The tray transferring device comprises a tray transferring device comprising: a tray holding unit including: a body unit for mounting a tray body unit, the tray being loaded with a plurality of semiconductor devices thereon; a lifting unit installed at one end of the body unit so as to be vertically moved in a direction perpendicular to the body unit, for supporting one end of the tray when vertically lifted; a rotation unit installed at the other end of the body unit, for pushing the other end of the tray to the lifting unit by being rotated when one end of the tray is supported by the lifting unit, thereby holding the tray; and a driving unit for driving the lifting unit to be up-down moved and the rotation unit to be rotated; and a transfer unit for transferring a tray mounted at the tray holding unit by transferring the body unit.

Description

200836285 九、發明說明: 【發明所屬之技術領域】 本發明係關於一種托盤傳送举罢t 測試機或-分賴上之拖贿’特败㈣1安裝在-導體裝置的托盤。 4’用以傳送裝戟有複數個半 【先前技術】 在一製造半導體裝置之過裎中,—碑 置必需經财同之測試,例如1^ —讀&的半導體裝 試抵抗外熱的可靠性。根據嘴結果,i 私㈣,用以測 及壞件。 D ’+導體裝置被分類為好件 B 一半導體裝置被-半導體裝置測試機與/或 選機測試及分選。 ^^體衣置刀 盤 f置幾或半導_置分選賊過將複數個半導體 =衣載:各托盤中且順次傳送這些耗盤而作業。在此,各托 透過一托盤傳送裝置被順次傳送。 二導體物職俺梅嫩雜咖(每 何分勒轉财置之㈣綠定。根據半導 版衣機或轉體裝置分職之各元件決定丽。 當半導體裝置職機辭導體裝置分選機的托盤傳送裝置不 正確作業時’可減少賴或分_作業速度。 【發明内容】 6 200836285 因此’#於以上的問題,本發明之目的之_在於提供 盤傳送裝置,其能透過平穩保持拖盤而傳送該拖盤。、也 本發明之另-目的在於提供—種拖盤傳送裝置,當抱盤透過 垂直移動娜送時其辭穩支觀減之側面。 因此’為達上述目的,本發明所揭露之—種拖盤傳送果置勺 =體:拖:單元’係包含有:一主體單元,固二 -體早兀,減上裳載有複數個半導體裳置;一提 2在主體早兀之—端,以便在—垂直於主體單元之方向上垂直 夕動’用以當被垂直提升時支雜盤之—端;—旋轉單元 裝在主體單元之另_妓,田丨、,| 、 而用以虽杈盤之一端被提升單元支撐 透=轉將謎術域他’嶋軸;以及 _贿料元敍·爛旋轉單元旋 轉;以及-傳料元’以球過傳社 疋 保持單元上的拖盤。 代〜在如盤 贿元咐:―提升件,㈣—有嫌 二=用:支〜一端;—第一支架,係安J主 直= —支架具有一導向槽,用以導向提升件之-垂 轉地齒輪,係與有齒部份相給,旋轉齒輪可旋 合。* *上’亚且透過驅動單元與一第一旋轉軸相結 旋轉單元包含有:— 第二支架,係安裝在主體單元之另一 200836285 第二旋轉軸’係安裝在第二支架且被驅 -方疋轉件,係與第二旋轉軸相結合,用,,以及 推送拖盤之另一端。 思者乐一釦轉軸之旋轉 提升單元包含有:一提升件,係 銷,支禮表面用以切拖盤之一端;f μ及一導向 單元之一端,m 支木,係安裝在主體 之& *一支架具有一導向槽’用 運動,·以及一驅動# ^ 千⑴鈿升件之一垂直 及‘轉#’係可旋轉地安裝在第— 弟一旋轉軸透過驅動單元而旋轉,驅動臂且有-上 件透過支撐提升件之導向鎖上下移動提升 什―向銷配设於該提升件之另一端。 拖盤保持單元可包含有—對導向執道 且在該對執道之側面導引拖盤之—運動。支私政咖 本發明之拖盤傳送I置可包含有_拖盤保持單元,用以保持 其上裝載有複數個半導體I ”、 ^… 的拖盤且沿著-導向執道傳送該 如盔,一拖盤提升單元,係 ν向執運之一或兩端,用以上 下私動拖盤,·以及一掛鈎單元 升單元被《鶴時,透過雜=有= 以當拖盤提 ,撑狀態’以及一綠性驅動單元,係與掛钩件相結= 線性移動掛釣件。 /線性驅解元透過祕麵壓作業,並且可包含有一外罩, 二/、有氣缸谷牙貝且用以復盖掛釣件之一部份,以致挂卜釣件能伸 200836285 出;以及-活塞件,係插人科罩内部之氣缸容積中,而且與掛 鈎件相結合,並且被一氣壓或液壓移動。 一外罩更可纽設有-雜件,用简與雜件減合之掛釣 早疋之箱施加廢力,因此在沒有氣壓或液壓時能推出掛釣件。 彈性件可安裝為使得與安裝有活塞件的氣缸容積成線性配 【實施方式】 以下’將結合_部份對本發_較佳實施方式作詳細說明。 下文,將茶閱圖式部份詳細描述本發明之拖盤傳送裝置。 =之拖盤傳送_以傳送—拖細,拖盤 ^數靖繼,⑽跡—彻㈣峨或一= 二心賴,該铸料置戦機或辭導體裝置 一傳送拖盤101的結構。 /、’ 請參閱「第1圖丨,—括曰+丄 含有一裝載單元,。,俘=本發:之拖盤傳送裝置之設備包 之半導體裝置;一檢測單-二 1上’用以裝載-待測試 、70 20,用以透過傳送裝載於拖盤101上 一=導體裝置而檢測這些铸體健,其中半導體裝置透過 、、运工具(圖未不)被裝載單元10裝載;以及-分類單元30, 2根據由“早12〇作4_試絲將轉體裝置分類 或壞件。 裝载單元10、分類單元3〇等,可配設有-拖盤傳送裳置,用 200836285 以傳送拖盤101。 請參閱「第2圖」及「第7圖」,本發明之拖盤傳送裝置包含 有-拖盤簡單元200,係安裝在主體丨上且絲固設於其中的一 拖盤101 ;以及-傳送單元,用以傳送該拖盤保持單元·。 拖盤保持單元200包含有-主體單元21〇,一提升單元咖, 係安裝在主體單元別之一端,—旋轉單元现,係安裝在主體單 疋210之另-端,以及-驅動單元·,用以驅動提升單元22〇 及旋轉單元230。 拖盤保持單it 200可包含有一對導向執道11〇,用以支撐拖盤 1〇1之兩端且在執道之側面導引拖盤1〇1之運動。 主體單元210可移動地安裝在形成該設備的主體i上,並且 其上裝載有半導體裝置的拖盤而安裝在主體單元21〇上。較佳 地,主體單元210安裝為便於被1作傳送單雜驅動單元 (圖未示)線性移動。 該線性驅動單元用以傳送拖盤保持單元2〇〇,以便透過移動主 體單元21〇傳送固設於拖盤保持單元2〇〇的拖# 1〇1,線性驅動單 π可具有不同之配置,例如-帶及帶輪、—齒條及齒輪之組合。 為了方便省略其詳細描述。 請參閱「第3圖」及「第4Α圖」,提升單元22〇安裝在主體 早元210之-端’以便在垂直於該主體單元之一方向上垂直移動, 用以當被垂直提升時支撐拖盤l〇i之一端。 200836285 提升單元220絲為致使一提升件221能在主體軍元加之 頂側垂直移動。因此,提升單元22q能實現為任何能垂直移動提 升件221之配置。 請芩閱|第4A圖」,提升單元 J巴㊁百一提升件221, 提升件221科一有齒部份221a及一支標表面咖,支撐表面 咖用以支撐拖盤1()1之一端;一第一支架222,係安裝2體 單元21〇之-端,第—支架222具有一導向槽2公,用以導向提 升件221之垂直運動;以及一旋轉齒輪如,係與有齒部份221a 她合’旋轉齒輪223可旋轉地安裝在第-支架222上,並且與 第一旋轉軸224相結合,第一旋轉軸故透過驅動單元之驅 動而旋轉。第-旋轉軸224與第一旋轉臂22s相連接,並且隨著 弟一旋轉臂225之旋轉而旋轉。 幸比子226插入於一形成在驅動執道加中的導向槽⑽ 中且輥子226與第-旋轉臂225之端部相結合。 弟-支架222可與主體單元21G整體形成,或可與主體單元 210相分離而形成。 旋轉單元230安裳在主體單元21〇之另一端,因此當提升單 兀20支擇拖盤1〇1之—端時,透過被旋轉朝向提升單元挪推 =盤1G1之另—端且簡脑m。只要滿足透過觀轉能推送 也益01之另一端的條件下,旋轉單亓 請參閱「第3圖」及「第4Β 之配置。 口」及#4Β圖」’旋轉單元可包含有一第二支架 11 200836285 232,齡裝在主體單元21〇之另一端;一第二旋轉轴234,係安 裝在第二支架232上且透過驅動單元而旋轉;以及—旋轉件 231,係與第二旋轉軸234相結合,用以隨著第二旋轉轴说 轉推送拖盤101之另一端。 第二旋轉軸234與-第二旋轉臂235相連接,並且隨著第二 旋轉臂235之旋轉而旋轉。一報子说插入於形成在驅動執道加 内之導向槽241a中,並且報子236與第二旋轉臂23$之端部相結 合。 第-支架222可與主體單元21〇整體形成,或可與主體單元 210相分離而形成。 驅動單元2仙配設為垂直移動提升單元咖且旋轉旋轉單元 230 ’亚且可具有不同之配置。請參閱「第3圖」,驅動單元· 包含有-驅動軌道24卜係利用-個或多個鉸接件242與主體! 相連接,並且驅動執道241具有一導向槽241a,用以插入提升單 元220之輕子226以及旋轉單元23〇德子236;以及一線性驅動 單元243,用以推拉驅動執道241,以致驅動執道%〗能限制於鉸 接件242,因此能被旋轉。 驅動單兀240沿著導向執道11〇安裝,並且可配設為一個或 多個數目。驅動單元240可獨立與提升單元22〇及旋轉單元23〇 相結合。作為線性驅動單元243,可使用氣壓或液壓缸、線性馬達 等。 12 200836285 提升單S 220具有任何配置,用以垂直移動支伽設之拖盤 1〇1 一端的提升件221。提升單元220可包含有具有如「第仏圖」 所不之一齒條及齒輪的不同配置。 2 5A圖」及「第5B圖」係為「第4八圖」中之提升單元 之另一實施例之局部斷開透視圖。以下,將參閱「第5A圖」及「第 5B圖」說明與「第4A圖」巾之提升單元之區別。 「―提升早凡220具有一配置,用以垂直移動提升件奶。請參閱 「第5A圖」及「第5B圖」,提升單元22〇可包含有一提升件瓜, 提升件221具有一支標表面通,用以支撐拖盤ι〇ι之一端,以 及-導向銷221c ; -第一支架222,係安裝在主體單元21〇之一 端’弟-支架222具有-導向槽222a•卜用以導向提升件221之 一垂直運動;以及一驅動臂2234,係可旋轉地安裝在第一支架222 上’並且與透過驅動單元,旋轉的第一旋轉軸故相結合,驅 動# 223-1具有一上下運動支撐單元,用以透過支撐提升件 之導向銷221c上下移動提升件221,導向銷,咖配設於提升件 221之另一端。具有與「第4A圖」同樣結構的提升單元⑽之元 件以同樣之標號標注,並且將省略其解釋。 用以支撐提升件221之導向銷221c的上下運動支撐單元 223a-l可配設為僅向上支撐導向銷221c,也可配設為一形成在驅 動臂223-1之狹槽223a,或可配設為一如「第5B圖」所示之局部 斷開之狹槽。這裡,導向銷221c也可具有不同之配置,用以被驅 13 200836285 動臂223_1之上下運動支撐單元223a-1支撐。 一旦第一旋轉軸224隨著驅動單元240之第一旋轉臂225之 旋轉而旋轉時,與第一旋轉軸224相結合之驅動臂223_丨旋轉。並 且,被驅動臂223-1支撐之提升件221之導向銷221c向上移動或 向下移動,因此,垂直移動提升件221。 - 以下將芩閱圖式部份詳細說明拖盤保持單元之作業。 / 第6A圖」及「第6B圖」係為拖盤保持單元之作業示意圖。 請芩閱「第6A圖」,一旦拖盤1〇1固設於主體單元2丨〇,一 控制器(圖未示)操作驅動單元240。 上移動。 更具體而言’ p逢著驅動單元·之線性驅動單元243推送驅 動軌迢241,限制於鉸接件242 _動執道⑷在一執道運動中向 廷裡’隨著驅動執道冰向上移動,插入於驅動執道冰之 導向槽241a中的輥子226及236向上移動。 ’與親子226及236相結合之 陡轉,因此旋轉第一及第二旋 一秦t子226及236向上移動,與輕 第-及第二旋轉臂225及235分職轉, 轉軸224及234。200836285 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a pallet transfer tester or a detached bribe. 4' used to transfer the package with multiples and a half [Prior Art] In the process of manufacturing a semiconductor device, the monument must be tested by the same money, such as 1^-read & semiconductor test to resist external heat reliability. According to the mouth result, i private (four), used to measure the bad. The D'+conductor device is classified as a good device B. A semiconductor device is tested and sorted by a semiconductor device tester and/or a machine. ^^ Body clothing knife set disk f set a few or semi-conducting _ set the thief to pass a number of semiconductors = clothing: each tray and sequentially transfer these consumables to work. Here, each of the trays is sequentially conveyed through a tray conveying device. The two-conductor 俺 俺 嫩 杂 杂 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( When the tray conveying device of the machine is not working properly, the speed of the machine can be reduced. [Summary of the invention] 6 200836285 Therefore, the problem of the above object is to provide a disk transfer device capable of maintaining a smooth transmission. The tray is transported by the tray. Another object of the invention is to provide a tray transport device which sings and reduces the side when the tray is transported through the vertical movement. Therefore, for the above purpose, The invention discloses a type of tray for conveying fruit spoons: body: drag: unit 'includes: a main unit, solid two-body early 兀, minus a plurality of semiconductor skirts; The main body is early-end, so that it is perpendicular to the direction of the main unit, and is used to move the end of the disc when it is vertically lifted; the rotating unit is installed in the main unit, 丨, 田丨, ,|, and used to be one of the platters The liter unit supports the = 转 转 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜 谜Pan bribe yuan: "lifting pieces, (four) - there are two suspects = use: support ~ one end; - first bracket, the main J is straight = - the bracket has a guiding groove for guiding the lifting member - the ground gear The rotating gear can be screwed together with the toothed portion. * * The upper and the driving unit are coupled to a first rotating shaft. The rotating unit comprises: - a second bracket, which is mounted on the main unit A 200836285 second rotating shaft is mounted on the second bracket and driven by the rotating member, combined with the second rotating shaft, and used, and pushes the other end of the tray. The lifting unit comprises: a lifting member, a fastening pin, a surface of the support for cutting one end of the tray; f μ and one end of the guiding unit, m branch, mounted on the main body & * a bracket having a guiding slot 'With exercise, · and one drive # ^ thousand (1) one of the parts of the vertical and 'turn #' can be The rotating shaft is mounted on the first rotating shaft of the first rotating shaft through the driving unit, and the driving arm and the upper member are moved up and down through the guiding lock of the supporting lifting member. The opposite pin is disposed at the other end of the lifting member. The unit may include a pair of guides that guide the tray on the side of the pair of lanes. The tray transporting the present invention may include a tray holding unit for holding The tray is loaded with a plurality of semiconductors I", ^... and is transported along the guide path, such as a helmet, a tray lifting unit, one or both ends of the carriage, for up and down private trays , · and a hook unit liter unit is "Heh, through the miscellaneous = have = to drag the tray, support state" and a green drive unit, tied with the hook member = linear movement hanging fishing pieces. / linear drive element through the secret surface pressure operation, and may include a cover, two /, there is a cylinder valley shell and used to cover a part of the fishing tackle, so that the hanging fishing pieces can extend 200836285; and - piston The piece is inserted into the cylinder volume inside the human cover, and is combined with the hook member and moved by a pneumatic or hydraulic pressure. A cover can be added to the miscellaneous pieces, and the fishing with the simple and miscellaneous pieces is used to apply the waste force, so that the fishing pieces can be launched without air pressure or hydraulic pressure. The elastic member can be mounted so as to be linearly matched with the cylinder volume in which the piston member is mounted. [Embodiment] The following is a detailed description of the present invention. Hereinafter, the tray transfer device of the present invention will be described in detail in the tea reading section. =Tray transfer _ to transfer - drag, drag tray ^ number Jing Ji, (10) trace - complete (four) 峨 or one = two hearts, the casting material or the conductor device a transfer tray 101 structure. /, 'Please refer to "1st figure, - bracket 曰 + 丄 contains a loading unit, ., capture = this hair: the semiconductor device of the equipment package of the tray transfer device; a test sheet - two 1 on the ' Loading-to-test, 70 20, for detecting the casting body by transmitting a conductor device mounted on the tray 101, wherein the semiconductor device is transported, and the tool (not shown) is loaded by the loading unit 10; The sorting unit 30, 2 sorts or rejects the swivel device according to the "early 12" test strip. The loading unit 10, the sorting unit 3, and the like can be equipped with a tray to transport the trays, and the trays 101 are transmitted using 200836285. Please refer to "Fig. 2" and "Fig. 7". The tray transporting device of the present invention comprises a tray unit 200, which is mounted on the main body and has a wire fixed in the tray 101; a transfer unit for transferring the tray holding unit. The tray holding unit 200 includes a main body unit 21, and a lifting unit is installed at one end of the main unit, and the rotating unit is installed at the other end of the main unit 210, and the driving unit. It is used to drive the lifting unit 22 and the rotating unit 230. The tray holding unit 200 can include a pair of guides 11 〇 for supporting the ends of the tray 1 〇 1 and guiding the movement of the tray 1 在 1 on the side of the road. The main body unit 210 is movably mounted on the main body i on which the apparatus is formed, and is mounted on the main body unit 21 with the tray on which the semiconductor device is mounted. Preferably, the main unit 210 is mounted to facilitate linear movement by a single transmission unit (not shown). The linear driving unit is configured to transmit the tray holding unit 2〇〇 to transmit the drag #1〇1 fixed to the tray holding unit 2〇〇 through the moving body unit 21, and the linear driving unit π may have different configurations. For example - belt and pulley, - rack and gear combination. A detailed description thereof is omitted for convenience. Please refer to "Fig. 3" and "Fig. 4". The lifting unit 22 is mounted at the end of the main body 210 to vertically move in a direction perpendicular to one of the main units for supporting the towing when being vertically lifted. One end of the disk l〇i. 200836285 The lifting unit 220 wire is such that a lifting member 221 can move vertically on the top side of the main body. Therefore, the lifting unit 22q can be realized as any configuration capable of vertically moving the lifting member 221. Please refer to the "Photo 4A", the lifting unit J Bar 211 lifting member 221, the lifting member 221 has a toothed portion 221a and a standard surface coffee, and the supporting surface coffee is used to support the tray 1 (1) One end; a first bracket 222 is mounted on the end of the two-body unit 21, the first bracket 222 has a guiding slot 2 for guiding the vertical movement of the lifting member 221; and a rotating gear such as a toothed and toothed The portion 221a of the 'rotary gear 223' is rotatably mounted on the first bracket 222, and combined with the first rotating shaft 224, the first rotating shaft is rotated by the driving of the driving unit. The first-rotation shaft 224 is coupled to the first rotating arm 22s and rotates as the rotation of the rotating arm 225. Fortunately, the sub-port 226 is inserted into a guide groove (10) formed in the drive pass and the roller 226 is coupled to the end of the first-rotation arm 225. The bracket 222 may be integrally formed with the main body unit 21G or may be formed separately from the main body unit 210. The rotating unit 230 is mounted on the other end of the main body unit 21, so when the lifting unit 20 selects the end of the tray 1〇1, the rotating unit is rotated toward the lifting unit to push the other end of the disc 1G1 and the simple brain m. As long as the other end of the feed can be pushed through the transfer, please refer to "Figure 3" and "Configuration of Section 4" and "#4" for the rotary unit. The rotary unit can include a second bracket. 11 200836285 232, installed at the other end of the main body unit 21; a second rotating shaft 234 is mounted on the second bracket 232 and rotated by the driving unit; and - the rotating member 231 is coupled to the second rotating shaft 234 The combination is used to push the other end of the tray 101 along with the second axis of rotation. The second rotary shaft 234 is coupled to the second rotary arm 235 and rotates as the second rotary arm 235 rotates. A newspaper is inserted into the guide groove 241a formed in the driving lane, and the newspaper 236 is combined with the end of the second rotating arm 23$. The first bracket 222 may be integrally formed with the main body unit 21 or may be formed separately from the main body unit 210. The drive unit 2 is configured to be a vertical movement lifting unit and to rotate the rotation unit 230' and may have a different configuration. Please refer to "Fig. 3", the drive unit·includes the drive track 24 with one or more hinges 242 and the main body! Connected, and the drive lane 241 has a guiding groove 241a for inserting the lepton 226 of the lifting unit 220 and the rotating unit 23 〇德子 236; and a linear driving unit 243 for pushing and pulling the driving lane 241 so as to drive The trajectory % can be limited to the hinge 242 and thus can be rotated. The drive unit 240 is mounted along the guide path 11〇 and can be configured to be set to one or more numbers. The driving unit 240 can be independently combined with the lifting unit 22A and the rotating unit 23A. As the linear drive unit 243, a pneumatic or hydraulic cylinder, a linear motor or the like can be used. 12 200836285 The lift single S 220 has any configuration for vertically moving the lifting member 221 at one end of the tray 1〇1. The lifting unit 220 may include different configurations having a rack and a gear as in the "figure map". 2 5A and 5B are partial broken perspective views of another embodiment of the lifting unit in "4th 8th". In the following, the differences between the descriptions of "5A" and "5B" and the lifting unit of "4A" will be referred to. "-------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- The surface is open to support one end of the tray ι〇ι, and the guide pin 221c; the first bracket 222 is mounted on one end of the main body unit 21, and the bracket 222 has a guide groove 222a. One of the lifting members 221 is vertically moved; and a driving arm 2234 is rotatably mounted on the first bracket 222' and combined with the first rotating shaft through which the driving unit is rotated, the driving #223-1 has a top and bottom The movement supporting unit is configured to move the lifting member 221 up and down through the guiding pin 221c supporting the lifting member, and the guiding pin is disposed at the other end of the lifting member 221. The elements of the lifting unit (10) having the same structure as the "Fig. 4A" are denoted by the same reference numerals, and the explanation thereof will be omitted. The up-and-down motion supporting unit 223a-1 for supporting the guide pin 221c of the lifting member 221 may be configured to support only the guiding pin 221c upwardly, or may be provided as a slot 223a formed in the driving arm 223-1, or may be equipped Set to a partially broken slot as shown in Figure 5B. Here, the guide pin 221c may also have a different configuration for being supported by the upper motion support unit 223a-1 of the 200836285 boom 223_1. Once the first rotating shaft 224 rotates with the rotation of the first rotating arm 225 of the driving unit 240, the driving arm 223_丨 coupled with the first rotating shaft 224 rotates. Further, the guide pin 221c of the lifter 221 supported by the drive arm 223-1 moves upward or downward, thereby moving the lifter 221 vertically. - The following section explains the operation of the tray holding unit in detail. / Figure 6A and Figure 6B are schematic diagrams of the operation of the tray holding unit. Please refer to "Picture 6A". Once the tray 1〇1 is fixed to the main unit 2, a controller (not shown) operates the drive unit 240. Move on. More specifically, the linear drive unit 243 of the drive unit pushes the drive rail 241, and is limited to the hinge 242. The movement path (4) moves upwards in the course of a road movement with the drive. The rollers 226 and 236 inserted in the guide groove 241a for driving the ice are moved upward. 'The steep rotation combined with the parental 226 and 236, so the first and second rotations of the Qin t 226 and 236 are moved upwards, and the light first and second rotating arms 225 and 235 are rotated, the shafts 224 and 234 .

々疋锝時,與第一旋轉軸224相結合之旋轉 明翏閱「第6A圖」,與旋轉齒輪223相齒 因此支撐拖盤101之一端。這裡, .中旋轉時,提升件221向下移動。 14 200836285 當第二旋轉軸234旋轉時,與第二旋轉軸234相結合之旋轉 件231、,起旋轉,因此如「第6B圖」所示推送拖盤101之另一端。 這裡,當第一旋轉軸在相反之過程中旋轉時,旋轉單元⑽被旋 轉,因此在一不與拖盤101相干涉之方向上定位。 处過使用驅動單元240,拖盤保持單元200透過提升單元22〇 及旋轉單元230保持拖盤κπ。當拖盤1〇1被拖盤保持單元2〇〇 7G王保锊日守,控制器驅動該傳送單元,以致拖盤保持單元2㈨能 根據技制彳g號以一定間隔或速度沿導向執道110移動。 …在4知技術中,拖盤之兩端被一對旋轉件保持。因此, 畜才也盤101被不穩定固設時,拖盤1〇1可透過旋轉件而偏離位置, 並且可產生故障。 然而,在本發明中,拖盤保持單元200之配設便於透過上下 私動而支撐拖盤1Q1之—端。因此,即使拖盤繼被不穩定固設, 拖盤保持單元200也能保持拖盤1〇1而不出現故障。 本發明之拖盤傳送裝置可更包含有一拖盤提升單元300,用以 裝載或卸載已裝載的拖盤101,用以沿著導向執道110移動安裝在 守向執迢110之兩端中至少一端的拖盤1〇1。 6月茶閱「第7圖」,拖盤提升單元300包含有複數個導向件 32〇,其安裝為與拖盤101之形狀相對應,用以導向拖盤101之垂 直運動;至少一掛鈎單元310,用以支撐拖盤101,以便將拖盤101 配5又於導向軌道110之上;一拖盤支撐單元330,用以支撐拖盤 15 200836285 101之一底表面,因此將拖盤101固設於拖盤保持單元2⑻,或者 從拖盤保持單元200向上移動拖盤101 ;以及一驅動單元34〇,用 以上下移動拖盤支撐單元330。 拖盤支撐單元330配設為支撐拖盤1〇1上下移動,而不與拖 盤保持單元200發生干擾。請參閱「第7圖」,拖盤支撐單元幻〇 、 可實現為復數個支撐杆331,用以支撐拖盤之底表面。拖盤支撐單 • 元33()可根據線性驅動單元340之位置實現為具有不同之形狀, 例如7/ 1/形等。 線性驅動單元340配設為透過支撐拖盤支撐單元33〇上下移 動才也i 101 ’並且可貫現為一線性馬達、一氣壓红、一液壓紅等。 線性驅動單元340可具有復數個裝置,各裝置分別具有預設之移 動距離。 V向件320可安裝在對應於拖盤1〇1之一頂點之位置,並且 考慮拖盤101之運動,可在對應於導向執道110之-部份中切開。 請蒼閱「第8A圖」,掛鈎單元31〇可包含有一掛鈎件祀, 用以當上下移動拖盤101日夺,透過線性移動而支樓拖盤ι〇ι之側 面或釋放拖盤的支撑狀態;以及—線性驅動單元,係與掛釣件祀 相結合,用以線性移動掛鈎件311。 >掛鈎件311配設有-掛鈎部份,該掛釣部份插入於一形成在 拖盤101之底表面或侧面的支撐槽中。 線性驅動早70安裝在主體i上,並且配設為雜移動掛釣件 16 200836285 311性驅動單元可實現為由液壓域壓操作之不同裝置。 。月’閱帛8A圖」及「第8B圖」,線性驅動單元可包含有 -外罩342’係具有—氣缸容積341且用以覆蓋掛鈎件川之一部 伤^致掛鈎件311能伸出;以及一活塞件,係插入於外罩⑷ 之氣红容積341 + ’而且與掛鈎件3ιι相結合,並且被氣壓或液 壓移動。 外罩342形成為複數個部件342a及现,以便於組裝。一空 氣入口 346向外貝牙而形成在外罩342内部的氣缸容積341之一 而"用以引入空氣而推送活塞件343。並且,-空氣出σ 347形成 在乱缸谷和341之另-端,用以當活塞件343被推送時排出空氣。 一空氣供應管345與空氣入口 346相連接,用以在控制器之 控制下將空氣引入至氣紅容積341中。 “外罩342被-覆蓋件3奶覆蓋,一密封件配設於外罩⑷與 後皿件349之間’用以當活塞件343向外伸出時密封氣缸容積如 之内部。 〜活塞件343配設為透過一氣壓沿氣缸容積341移動,並且活 塞件343配設有-突出部份地,用以將氣缸容積341分為兩部 份容積。至少-密封件安裳在突出部份遍上,用以將這兩部份 氣缸容積彼此分離,並且沿著氣仏容積341義活塞件343。 外罩342可更配設有—彈性件348,用以對與其相結合之掛鈎 件311之-部份施加壓力,因此在沒錢壓或液壓時推出該部份。 17 200836285 請參閱「第8A圖」,彈性件348可安裝為使得與安裝有活塞 件343的氣缸容積341成線性配設。 將參閱圖式部份詳細說明拖盤提升單元之作業。 拖盤提升單元300向下移動裝載於拖盤保持單元2〇〇上的拖 盤101,因此將它固設在拖盤保持單元2〇〇,或者從拖盤保持單元 200向上移動拖盤1〇1。向上移動拖盤1〇1之過程與向下移動拖盤 ιοί之過程相反。以下,將描述向下移動拖盤1〇1之過程。 請參閱「第9A圖」,線性驅動單元34〇被控制器操作。然後, 拖盤支撐單元33〇移動至配設於導向執道m上的裝載拖盤诎 之一底表面,因此支撐拖盤1〇1之底表面。 只要拖盤支樓單元33G支樓拖盤1G1之底表面,控.操作 掛鈎單元31〇的線性驅動單元。然後,控制器移動插入於拖盤仙 之支標槽101a中的掛鈎件311,因此,釋放拖盤ΐ()ι的鈎住狀態。 更具體而言,空氣通過與空氣供應管345相連接之*氣入^ 346引入錢性驅鱗元34〇之氣缸容積341巾。 ’、 隨著空氣引入至氣紅容積341之一側,配設於氣虹容積⑷ 之另一側的空氣通過空氣出口撕被排出。因此,活塞件% 後移動,並且移動與活塞件343相結合之掛釣件m 絲 盤101之鈎住狀態。 此样欲把 一旦釋放拖盤1〇1的約壯业妒 支俨單it 「 雜驅鱗元向下移動拖盤 早凡月> 閱第9B圖」,由於拖盤101必需—個接一 18 200836285 個地向下移動,因此拖盤支禮單元33〇必需首先移動—拖盤如 之高度。 。月,閱第9C圖」’一旦拖盤101被首先移動,控制器驅動 線性驅動單元’因此將掛鈎件311移動至上述襄载的拖盤谢之 支撐槽101a,因而支稽上述裝載的拖盤1〇1。這裡掛釣件3ιι向 •後移動,因此透過排出引入至氣红容積341之一侧的空氣釣住拖 / 盤101 ’因此利用彈性件348的彈性力向後移動活塞件343。 ( 請參閱「第9D圖」’ 一旦上述拖盤1〇1被掛鈎件311支撐, 拖盤支稽單元330向下移動拖盤1G1用以將其固設在拖盤保持單 元 200 〇 一旦拖盤101固設在拖盤保持單元200上,拖盤保持單元2〇〇 保持拖盤101且沿著導向執道110移動該拖盤。 拖盤提升單元之掛鈎單元31〇之掛鈎件311配設為線性移 動,因此較之透過旋轉而支稽—拖盤㈣知技術之旋轉件,能更 ( 平穩地支撐拖盤101。 本發明之拖盤傳送單元具有以下優點。 - 錢,拖餘持單植設為當滅之—端上τ轉時支撐該 ' 拖盤之一端。因此,即使拖盤不穩定地固設在拖盤保持單元上, 拖盤保持單元能穩定保持拖盤而不發生故障。 其次,用以上下移動拖盤的拖盤提升單元之掛鈎單元的掛鈎 件配設為祕雜,因此較之胃知技狀旋轉魏更平穩地支撐 19 200836285 拖盤 本領域之技術人貝應當意_在不脫離本㈣之精神和範圍 的情況下,本發明所作之更動與潤飾均屬本發明之專鄉護範圍 之内。因此,本發明包含不脫離專利保護範圍之界限或等=二 之範圍内的更動與潤飾。 ;1 ^ 圖式簡單說明】 第1圖係為安裝有本發明之一拖盤傳送裝 面圖; 置之設備實例之平 第2圖係為本發明之拖盤傳送裝置之平面 圖; 視圖; 第3圖係、為第2圖中之拖盤傳送裝置之_拖餘持單元之透 視圖; 第4A圖係為第3圖中之拖盤保持單元之一提升單 元之局部透 視圖; 第犯圖係為第3圖中之減保持單元之—旋轉單元之局部透 、弟从圖及第5B圖係為第3圖中之拖盤保持單元之提升單元 的另一實施例之局部斷開透視圖; 第6八圖及第6B圖係為拖盤保持單元之作業示意圖; 第7圖係為本發明之一拖盤傳送裝置之透視圖; -第8A圖及ΐ8Β圖係為第7圖中之一拖盤提升單元之掛釣單 元之剖視圖;以及 20 200836285 第9A圖至第9D圖係為第7圖中之拖盤提升單元之作業示意 圖。 【主要元件符號說明】 1 主體 10 裝載單元 20 檢測單元 30 分類單元 101 拖盤 101a 支撐槽 110 導向執道 200 拖盤保持單元 210 主體單元 220 提升單元 221 提升件 221a 有齒部份 222a-1 導向槽 221b 支撐表面 221c 導向銷 222 第一支架 222a 導向槽 223 旋轉齒輪 21 200836285 223a 狹槽 223-1 驅動臂 223 a-1 上下運動支撐單元 224 第一旋轉轴 225 第一旋轉臂 226 、 236 幸昆子 230 旋轉單元 231 旋轉件 232 第二支架 234 第二旋轉轴 235 第二旋轉臂 240 驅動單元 241 驅動軌道 241a 導向槽 242 鉸接件 243 線性驅動單元 300 拖盤提升單元 310 掛鈎單元 311 掛鈎件 320 導向件 330 拖盤支撐單元 22 200836285 331 340 341 342 342a、342b 343 343a 345 346 347 348 349 支撐杆 驅動單元 氣缸容積 外罩 部件 活塞件 突出部份 空氣供應管 空氣入口 空氣出口 彈性件 覆蓋件 23In the case of 々疋锝, the rotation combined with the first rotating shaft 224 is shown in Fig. 6A, and the rotating gear 223 is toothed to support one end of the tray 101. Here, when the middle is rotated, the lifting member 221 moves downward. 14 200836285 When the second rotating shaft 234 rotates, the rotating member 231 coupled with the second rotating shaft 234 rotates, so that the other end of the tray 101 is pushed as shown in "Fig. 6B". Here, when the first rotating shaft is rotated in the opposite process, the rotating unit (10) is rotated, and thus positioned in a direction not interfering with the tray 101. By using the driving unit 240, the tray holding unit 200 holds the tray κπ through the lifting unit 22 and the rotating unit 230. When the tray 1〇1 is held by the tray holding unit 2〇〇7G, the controller drives the conveying unit, so that the tray holding unit 2 (9) can move along the guiding lane 110 at a certain interval or speed according to the technical system. . ... In the 4th technique, both ends of the tray are held by a pair of rotating members. Therefore, when the animal is also unstablely fixed, the tray 1〇1 can be displaced from the position by the rotating member, and a malfunction can be generated. However, in the present invention, the tray holding unit 200 is provided to facilitate the support of the end of the tray 1Q1 through the upper and lower movements. Therefore, even if the tray is not stably fixed, the tray holding unit 200 can hold the tray 1〇1 without malfunction. The tray transporting device of the present invention may further include a tray lifting unit 300 for loading or unloading the loaded tray 101 for moving along the guiding lane 110 to be installed at least at both ends of the steering stem 110. The tray at one end is 1〇1. In the June tea reading "Fig. 7", the tray lifting unit 300 includes a plurality of guiding members 32, which are installed to correspond to the shape of the tray 101 for guiding the vertical movement of the tray 101; at least one hook unit 310, for supporting the tray 101, so that the tray 101 is placed on the guide rail 110; a tray support unit 330 for supporting one of the bottom surfaces of the tray 15 200836285 101, thus fixing the tray 101 It is provided on the tray holding unit 2 (8), or moves the tray 101 upward from the tray holding unit 200; and a driving unit 34A for moving the tray supporting unit 330 up and down. The tray support unit 330 is configured to move the support tray 1〇1 up and down without interfering with the tray holding unit 200. Please refer to "Fig. 7". The tray support unit can be realized as a plurality of support rods 331 for supporting the bottom surface of the tray. The tray support unit • element 33 () can be realized to have a different shape according to the position of the linear drive unit 340, such as 7/1/shape. The linear drive unit 340 is configured to be moved up and down through the support tray support unit 33, and can be realized as a linear motor, a pneumatic red, a hydraulic red, or the like. The linear drive unit 340 can have a plurality of devices each having a predetermined moving distance. The V-directing member 320 may be installed at a position corresponding to one of the vertices of the tray 1〇1, and may be cut in a portion corresponding to the guide lane 110 in consideration of the movement of the tray 101. Please read "Figure 8A". The hook unit 31〇 can include a hook member 祀 for moving the tray up and down for 101 days, and moving the side of the tray to the side of the tray or releasing the support of the tray. State; and - a linear drive unit, in combination with the fishing tackle ,, for linearly moving the hook member 311. > The hook member 311 is provided with a - hook portion which is inserted into a support groove formed on the bottom surface or side surface of the tray 101. The linear drive 70 is mounted on the main body i and is equipped with a miscellaneous mobile fishing unit. 16200836285 The 311-type driving unit can be realized as a different device operated by hydraulic pressure. . The monthly drive unit may include a cover 342' having a cylinder volume 341 and covering one of the hook members to cause the hook member 311 to extend; A piston member is inserted into the gas red volume 341 + ' of the outer casing (4) and combined with the hook member 3 ι and is moved by air pressure or hydraulic pressure. The outer cover 342 is formed as a plurality of members 342a and is now ready for assembly. An air inlet 346 forms one of the cylinder volumes 341 inside the outer casing 342 to the outer teeth and is used to introduce air to push the piston member 343. Also, an air out σ 347 is formed at the other end of the chaotic cylinder valley and 341 for discharging the air when the piston member 343 is pushed. An air supply pipe 345 is coupled to the air inlet 346 for introducing air into the gas red volume 341 under the control of the controller. "The outer cover 342 is covered by the cover member 3, and a seal member is disposed between the outer cover (4) and the rear plate member 349' for sealing the cylinder volume as the piston member 343 protrudes outwardly. The piston member 343 is provided. It is set to move along the cylinder volume 341 through a gas pressure, and the piston member 343 is provided with a protruding portion for dividing the cylinder volume 341 into two partial volumes. At least - the sealing member is placed on the protruding portion. The two cylinders are separated from each other, and the piston member 343 is disposed along the air volume 341. The outer cover 342 can be further provided with an elastic member 348 for the part of the hook member 311 combined with the same. The pressure is applied so that the portion is pushed out when there is no money or hydraulic pressure. 17 200836285 Referring to Fig. 8A, the elastic member 348 can be mounted so as to be linearly arranged with the cylinder volume 341 on which the piston member 343 is mounted. The operation of the tray lifting unit will be described in detail in the figure. The tray lifting unit 300 moves the tray 101 loaded on the tray holding unit 2A downward, thereby fixing it to the tray holding unit 2〇〇, or moving the tray 1 up from the tray holding unit 200. 1. The process of moving the tray 1〇1 up is the opposite of moving the tray ιοί down. Hereinafter, the process of moving the tray 1〇1 downward will be described. Referring to "Fig. 9A", the linear drive unit 34 is operated by the controller. Then, the tray support unit 33 is moved to the bottom surface of one of the loading trays disposed on the guide path m, thereby supporting the bottom surface of the tray 1〇1. As long as the bottom surface of the tray 1G1 of the 33G branch of the tray unit is controlled, the linear drive unit of the hook unit 31 is operated. Then, the controller moves the hook member 311 inserted in the tab slot 101a of the tray, thereby releasing the hook state of the tray )(). More specifically, the air is introduced into the cylinder volume 341 of the money-driven scale unit 34 through the air inlet 346 connected to the air supply pipe 345. As air is introduced to one side of the gas red volume 341, air disposed on the other side of the gas volume (4) is discharged through the air outlet. Therefore, the piston member % is moved rearward, and the hooking state of the fishing rod m-disk 101 combined with the piston member 343 is moved. In this case, if you want to release the tray 1〇1, you will be able to support the single-item "Mixed-wheel scales down the dragging wheel and the early months" (see Figure 9B), because the tray 101 must be one after another. 18 200836285 The ground moves downwards, so the tray support unit 33 must be moved first—the height of the tray. . Month, see Figure 9C" 'Once the tray 101 is moved first, the controller drives the linear drive unit', so the hook member 311 is moved to the above-mentioned tray-supporting tray 101a, thus arranging the loaded tray 1〇1. Here, the fishing member 3 ι moves to the rear, so that the air introduced to the side of the air red volume 341 is caught by the air to catch the drag/disc 101' so that the piston member 343 is moved rearward by the elastic force of the elastic member 348. (Refer to "9D"" Once the above-mentioned tray 1〇1 is supported by the hook member 311, the tray bearing unit 330 moves the tray 1G1 downward to fix it to the tray holding unit 200. The tray 101 is fixed on the tray holding unit 200, and the tray holding unit 2 holds the tray 101 and moves the tray along the guide lane 110. The hook unit 311 of the hook unit 31 of the tray lifting unit is provided In order to move linearly, the rotating tray of the technology can be more smoothly supported than the rotating member of the rotating tray. The tray conveying unit of the present invention has the following advantages. The plant is set to be extinguished - one end of the 'tray is supported when the end is τ turn. Therefore, even if the tray is unstablely fixed on the tray holding unit, the tray holding unit can stably maintain the tray without malfunction. Secondly, the hook member of the hook unit of the tray lifting unit for moving the tray up and down is set to be a miscellaneous, so that it is more smoothly supported than the stomach-like rotation Wei Wei 2008 200836285 The technical person in the field should be Meaning _ without departing from the spirit and scope of this (4) The modifications and refinements of the present invention are within the scope of the present invention. Therefore, the present invention includes modifications and refinements that do not depart from the scope of the patent protection or the range of equals = 2; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view showing a tray transporting apparatus according to the present invention; FIG. 2 is a plan view of the tray transport apparatus of the present invention; a view; It is a perspective view of the tray holding device of the tray transfer device in Fig. 2; Fig. 4A is a partial perspective view of one of the tray holding units of the tray holding unit in Fig. 3; FIG. 6 is a partially broken perspective view of another embodiment of the lifting unit of the rotating unit, the partial view of the rotating unit, and the fifth drawing of the lifting unit of the tray holding unit in FIG. 3; Figure 6B is a schematic view of the operation of the tray holding unit; Figure 7 is a perspective view of one of the tray transporting devices of the present invention; - Figure 8A and Figure 8 are a tray lifting in Figure 7 Cutaway view of the unit's hanging unit; and 20 200836285 9A to 9D The drawing is a schematic diagram of the operation of the tray lifting unit in Fig. 7. [Main component symbol description] 1 Main body 10 Loading unit 20 Detection unit 30 Classification unit 101 Tray 101a Supporting groove 110 Guided way 200 Tray holding unit 210 Main body Unit 220 lifting unit 221 lifting member 221a toothed portion 222a-1 guiding groove 221b supporting surface 221c guiding pin 222 first bracket 222a guiding groove 223 rotating gear 21 200836285 223a slot 223-1 driving arm 223 a-1 up and down motion support Unit 224 first rotating shaft 225 first rotating arm 226, 236 lucky Kunzi 230 rotating unit 231 rotating member 232 second bracket 234 second rotating shaft 235 second rotating arm 240 driving unit 241 driving rail 241a guiding groove 242 hinge 243 Linear drive unit 300 Tray lift unit 310 Hook unit 311 Hook member 320 Guide member 330 Tray support unit 22 200836285 331 340 341 342 342a, 342b 343 343a 345 346 347 348 349 Support rod drive unit Cylinder volume cover member Piston member projection Air supply pipe air inlet air Elastic members 23 cover

Claims (1)

200836285 十、申請專利範圍: 1· 一種拖盤傳送裝置,係包含有: 私益保持單兀,係包含有:一主體單元,用以固設一拖 盤主體單元,該拖盤上輯有複數辨導體裝置;-提升單 几係安衣在違主體單元之一端,以便在一垂直於該主體單元 之方向上垂直私動,用以當被垂直提升時支撐該拖盤之一端; 方疋轉單7L ’係安裝在該主體單元之另_端,用以當該拖盤之 一端被該提升單元支撐時,透過旋轉職拖盤之另-端推送至 ,玄提升單元’因此保持拖盤;以及__單元,用以驅動該提 升單元作上下運動及驅動該旋轉單元旋轉;以及 一傳送單元,用以透過傳送該主體單元傳送一固設在該拖 盤保持單元上的拖盤。 2·如申请專利範圍第1項所述之拖盤傳送裴置,其中該提升單元 包含有: 一提升件,係具有一有齒部份及一支撐表面,該支撐表面 用以支撐一拖盤之一端; 一第一支架,係安裝在該主體單元之一端,該第一支架具 有一導向槽,用以導向該提升件之一垂直運動;以及 一旋轉齒輪,係與該有齒部份相耦合,該旋轉齒輪可旋轉 地女I在該第一支架上,並且透過该驅動單元與一第一旋_車由 相結合。 3·如申請專利範圍第1項所述之拖盤傳送骏置,其中該提升單元 24 200836285 包含有: 提升件,係具有-支撐表面及一導向鎖,該支撐表面用 以支撐該拖盤之一端; 第一支架,係安裝在該主體單元之一端,該第一支架具 有一導向槽,用以導引該提升件之一垂直運動;以及 一驅動臂,係可旋轉地安裝在該第一支架上且與該第一旋 轉轴相結合,該第一旋轉軸透過該驅動單元而旋轉,該驅動臂 具有-上下運動支撑單元,用以透過支擇該提升件之該導向銷 上下移動該提升件,該導向伽設於該提升件之另一端。 4.如申請補範圍第2項或第3項所述之拖盤傳送裝置而其 旋轉單元包含有·· X 一第二支架,係安裝在該主體單元之該另一端; -第二旋轉軸,係安裝在鄕二支架上且被^鳴 轉;以及 足 _一旋轉件,係與該第二旋轉_結合,用《隨著該第二旋 榦軸之旋轉推送該拖盤之該另一端。 5.如申請專利細第2項或第3項所述之拖 拖盤保持單元包含有—對導向執道,用以 在該對執道之側面導引該拖盤之—運動。200836285 X. Patent application scope: 1. A type of tray transfer device, comprising: a private benefit maintenance unit, comprising: a main unit for fixing a tray main unit, the plurality of trays having a plurality of discs a conductor device; a lifting unit is attached to one end of the main unit so as to be vertically movable in a direction perpendicular to the main unit for supporting one end of the tray when being vertically lifted; The 7L' is mounted on the other end of the main unit for pushing one end of the tray to the other end through the rotary tray, and the hoisting unit is thus held by the tray; a __ unit for driving the lifting unit to move up and down and driving the rotating unit to rotate; and a transmitting unit for transmitting a tray fixed on the tray holding unit by transmitting the main unit. 2. The tray transporting device of claim 1, wherein the lifting unit comprises: a lifting member having a toothed portion and a supporting surface for supporting a tray One of the first brackets is mounted at one end of the main body unit, the first bracket has a guiding slot for guiding one of the lifting members to move vertically; and a rotating gear is coupled to the toothed portion Coupling, the rotating gear is rotatably mounted on the first bracket and coupled to a first rotating vehicle through the driving unit. 3. The tray transfer device of claim 1, wherein the lifting unit 24 200836285 comprises: a lifting member having a support surface and a guide lock for supporting the tray One end; the first bracket is mounted at one end of the main body unit, the first bracket has a guiding slot for guiding one of the lifting members to move vertically; and a driving arm is rotatably mounted on the first And being coupled to the first rotating shaft, the first rotating shaft is rotated through the driving unit, the driving arm has an up-and-down motion supporting unit for moving the lifting up and down through the guiding pin for selecting the lifting member And the guiding gayer is disposed at the other end of the lifting member. 4. The application for the tray transfer device according to item 2 or item 3, wherein the rotary unit comprises a second bracket mounted on the other end of the main unit; - the second rotary shaft Mounted on the second bracket and rotated by ^; and the foot_one rotating member is combined with the second rotation_, and the other end of the tray is pushed with the rotation of the second rotary shaft . 5. The tow tray holding unit of claim 2 or 3 includes a pair of guiding lanes for guiding the movement of the tray on the side of the pair of lanes. 一拖盤提升單元, 係安裝在該導向執道 述之拖盤傳送裝置,其中該 ’用以支撐該拖盤之兩端且 置’更包含有: 道之一或兩端,用以 25 200836285 上下移動該拖盤;以及 -掛鈎單元,健有—掛鈎件,肋當該缝提升單元被 垂直移動時,透過線性移動而支標該拖盤之側面或釋放該拖盤 的支撐狀態,以及-線性驅動單元,係與該掛釣件相結合,用 以線性移動該掛鈎件。 7· —種拖盤傳送裝置,係包含有·· -拖餘持單元,用以保持—其上賴有複數個半導體震 置的拖盤且沿著一導向執道傳送該拖盤; -拖盤提升單元,係、安裝在該導向執道之—或兩端,用以 上下移動該拖盤;以及 -掛鈎單元,健有—翻件,_#雜赌升單元被 垂直移動時,透過線性移動而支撐該拖盤之側面或釋放該拖盤 的支擇狀態,以及-線性驅動單元,係與該掛鈎件相結合,用 以線性移動該掛鈎件。 &如申請專利範圍帛6項或第7項所述之拖盤傳送單元,其中該 線性驅動單元透過液壓或氣壓作業。 9·如申明專利|巳圍第6項或第7項所述之拖盤傳送單元,其中哕 線性驅動單元包含有: 一外罩,係具有一氣缸容積且用以覆蓋該掛鈎件之一部 份’以致該掛鈎件能伸出;以及 一活塞件,係插入於該外罩内部之該氣缸容積中,而且與 26 200836285 該掛鈎件相結合,並且被一氣壓或液壓移動。 元之一 10.如申請專利範圍第9項所述之拖盤傳送裝置,其中該外罩可更 安裝有-彈性件,用以對與該彈性件相結合之該掛鈎單 、配設 =施加心嶋蝴1_輸岐掛釣件。 .如申料利制第1G項所述之拖盤傳送裝置,Μ 可女裝為使得與安裝有該活塞件的該氣紅容積成線性I 27A tray lifting unit is mounted on the tray transfer device of the guide, wherein the 'supporting both ends of the tray' includes: one or both ends of the track for 25 200836285 Moving the tray up and down; and - a hooking unit, a hook-up member, which ribs the side of the tray or releases the support state of the tray by linear movement when the seam lifting unit is vertically moved, and - A linear drive unit is coupled to the fishing unit for linearly moving the hook member. 7-- a type of tray transfer device, comprising: a drag-and-hold unit for holding - a tray on which a plurality of semiconductors are placed and transmitting the tray along a guideway; a disc lifting unit, which is mounted on the guide rail - or both ends for moving the tray up and down; and - a hook unit, a health-flip member, and a _# gambling unit that is vertically moved through the linear A support state that moves to support the side of the tray or release the tray, and a linear drive unit is coupled to the hook member for linearly moving the hook member. <<>><>>><>>> The invention relates to a tray transfer unit according to Item 6 or Item 7, wherein the 哕 linear drive unit comprises: a cover having a cylinder volume and covering a part of the hook member 'Therefore the hook member can be extended; and a piston member is inserted into the cylinder volume inside the outer casing and combined with the hitch member of 26 200836285 and moved by a pneumatic or hydraulic pressure. 10. The tray transporting device of claim 9, wherein the outer cover is further provided with an elastic member for engaging the hook with the elastic member, and providing a heart嶋 1 1_ 岐 岐 岐 钓 钓 钓. The tray transporting device as described in claim 1G, which is linear to the linear volume of the gas red volume to which the piston member is mounted.
TW097105055A 2007-02-13 2008-02-13 Tray transferring device TWI423372B (en)

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Application Number Priority Date Filing Date Title
KR1020070015104A KR100884257B1 (en) 2007-02-13 2007-02-13 Device for Transfering Tray

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KR101360611B1 (en) * 2012-10-23 2014-02-11 한용현 Apparatus for exchanging wafer tray and the method thereof
KR101999623B1 (en) * 2013-05-10 2019-07-16 (주)테크윙 Tray stacker of handler for testing semiconductor
KR102043632B1 (en) * 2013-05-16 2019-11-13 (주)테크윙 Tray stacker of handler for testing semiconductor
KR101685936B1 (en) * 2015-09-03 2016-12-14 주식회사 로보스타 Apparatus for conveying tray

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JPH11148963A (en) * 1997-11-14 1999-06-02 Seiko Epson Corp Tray supply method and handler
JP4601154B2 (en) * 2000-11-29 2010-12-22 株式会社アドバンテスト Electronic component tray holding device and electronic component testing device
KR100467473B1 (en) * 2002-11-19 2005-01-24 세크론 주식회사 Apparatus by moving pitch of the tray transfer
KR100591710B1 (en) * 2004-04-20 2006-06-22 미래산업 주식회사 Tray Feeder
KR100656155B1 (en) * 2005-01-07 2006-12-13 (주)제이티 Device for Transfering Tray

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TWI423372B (en) 2014-01-11
WO2008100081A1 (en) 2008-08-21
CN101622702B (en) 2012-10-10
CN101622702A (en) 2010-01-06
KR20080075755A (en) 2008-08-19

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