TW200836200A - Control method and memory cell utilizing the same - Google Patents
Control method and memory cell utilizing the same Download PDFInfo
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200836200 九、發明說明: 【發明所屬之技術領域】 本發明係有關於一種控制方法及記憶胞,特別是有關 於一種用以改善過度抹除(erasing)之控制方法及記憶胞。 【先前技#f】 非揮發性記憶體是一種記憶資料不隨著電源關閉而流 失的半導體記憶體,大致上可以分類成唯讀記憶體(read only memory,ROM)、可抹除及程式化唯讀記憶體(erasable programmable read only memory,EPROM)以及電子式可抹 除及程式化唯讀記憶體(electrically erasable programmable read only memory,EEPROM) 〇 EPROM與EEPROM都是以電子方式將信號寫入, EPROM是以照射紫外光將資料抹除,EEPROM是以電子 的方式將資料抹除,而快閃(flash)EEPROM是以電子方式 一次抹除所有的或一區域中的EEPROM之資料。為了解說 上的方便,統稱為EPROM。 傳統EPROM的程式化和抹除處理方式說明如下。在 程式化上主要疋利用通道熱電子效應(channel hot electron effect)來達成,也就是利用耦合到浮動閘極 的正電壓和其下方通道間存在的電壓差,建立一足夠強度 的電場,讓其間電子獲得足夠穿透氧化層的動能(亦即熱電 子),使其被捕獲於浮動閘極中。 具體來說,由於浮動閘極内是否存在電子的條件可以200836200 IX. Description of the Invention: [Technical Field] The present invention relates to a control method and a memory cell, and more particularly to a control method and memory cell for improving excessive erasing. [Previous technology #f] Non-volatile memory is a kind of semiconductor memory whose memory data is not lost with power off. It can be roughly classified into read only memory (ROM), erasable and stylized. Erasable programmable read only memory (EPROM) and electronic erasable programmable read only memory (EEPROM) 〇 both EPROM and EEPROM electronically write signals. The EPROM erases the data by illuminating the ultraviolet light. The EEPROM erases the data electronically, and the flash EEPROM electronically erases all or one of the EEPROMs in a region. For the sake of convenience, it is collectively referred to as EPROM. The stylization and erasing methods of the conventional EPROM are described below. In stylization, the channel hot electron effect is mainly achieved by using a channel hot electron effect, that is, using a voltage difference between the positive voltage coupled to the floating gate and the channel below it to establish an electric field of sufficient strength. The electrons acquire sufficient kinetic energy (ie, hot electrons) to penetrate the oxide layer, causing it to be trapped in the floating gate. Specifically, due to the presence of electrons in the floating gate,
Client’s Docket No.:95-025 TT^ Docket No:0492-A41052-TW/Final /Joanne 200836200 衫響到其下方通道的導通與否,因此透過有無將電子注入 到浮動閘極的方式,便可以將各記憶體單元程式化為儲 存”1〃或儲存〃 0〃的不同狀態。 在EPROM中’將帶電载子(carrier)送入浮動閘極中並 使帶電載子陷於浮動閘極中的充電過程稱為程式化 (programming)處理,將帶電載子移出浮動閘極的過程則稱 為抹除(erasing)處理。 抹除處理主要是透過Flowler-Nordheim穿隧效應(F—N tunneling effect)來達成,也就是在控制閘極上施加一很大 的負電壓,藉由介電質層的耦合作用,讓浮動閘極内的電 子得以穿隧過介電層,經由下方通道或是源極區加以釋 放。然而,EPROM在抹除後常會有所謂過度抹除(〇ver_erase) 的問題發生。 【發明内容】 本發明提供一種控制方法,適用於一記憶胞,記憶胞 具有一基底、一源極、一汲極、一浮動閘極以及一控制閘 極。在進入一特定模式下,提供一負極性電壓予基底,提 供一接地電壓予源極,提供一正極性電壓予汲極,以及使 控制閘極之電性為浮動狀態。 本發明另提供一種記憶胞包括,一基底、一源極、一 汲極、一浮動閘極以及一控制閘極。源極與汲極形成在基 底中。浮動閘極形成在基底之上。控制閘極形成在浮動閑 極之上。在進入一特定模式時,基底接收一負極性電壓, 源極接收一接地電壓,汲極接收一正極性電壓,控制閑極Client's Docket No.: 95-025 TT^ Docket No:0492-A41052-TW/Final /Joanne 200836200 The shirt is ringing to the conduction of the channel below it, so you can use the method of injecting electrons into the floating gate. Each memory unit is programmed to store different states of "1" or "storage" 0. In the EPROM, the charging process of feeding a charged carrier into the floating gate and trapping the charged carrier in the floating gate Called the programming process, the process of moving a charged carrier out of a floating gate is called an erasing process. The erasing process is mainly achieved by the Flowler-Nordheim tunneling effect (F-N tunneling effect). That is, a large negative voltage is applied to the control gate, and the electrons in the floating gate are tunneled through the dielectric layer through the coupling of the dielectric layer, and are released through the lower channel or the source region. However, the EPROM often has a problem of so-called over-wiping (〇ver_erase) after erasing. SUMMARY OF THE INVENTION The present invention provides a control method suitable for a memory cell having a substrate and a source. a drain gate, a floating gate, and a control gate. When entering a specific mode, providing a negative voltage to the substrate, providing a ground voltage to the source, providing a positive voltage to the drain, and controlling The electrical property of the gate is a floating state. The invention further provides a memory cell comprising a substrate, a source, a drain, a floating gate and a control gate. The source and the drain are formed in the substrate. The gate is formed on the substrate. The control gate is formed on the floating idler. When entering a specific mode, the substrate receives a negative voltage, the source receives a ground voltage, and the drain receives a positive voltage. pole
Client’s Docket No. :95-025 TT^ Docket No:0492-A41052-TW/Final /Joanne 200836200 之電性為浮動狀態。 為讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂,下文特舉出較佳實施例,並配合所附圖式,作詳 細說明如下: 【實施方式】 第1圖為記憶胞之示意圖。記憶胞100包括,基底 (base)ll〇、源極120、汲極13〇、浮動閘極14〇、控制閘極 150、;|電層160及170。在本實施例中,基底ι1〇為p型, 而源極120與汲極13〇均為N+擴散區。在其它實施例中, 基底110可為N型,而源極120與汲極13〇均為P+擴散區。 源極120與汲極130形成在基底11〇之中,其中汲極 130為位元線(bit line)。浮動閘極14〇形成在基底11〇之 上。介電層160介於基底11〇與浮動閘極14〇之間。控制 閘極150形成在浮動閘極14〇之上。介電層17〇介於浮動 閘極140與控制閘極150之間。 … 在進入一特定模式時,記憶胞1〇()之基底11〇接收負 極性電壓-V,源極120接收接地電壓GND,汲極13〇接收 正極性電壓+V,控制閘極15〇不接收任何電壓,故其電性 為浮動狀態。 由於圯憶胞在經過抹除處理後,易發生過度抹除的現 象,而造成記憶胞的臨界電壓過低。當記憶胞的臨界電壓 過低時,在經過程式化處理後,則無法將記憶胞的臨界電 壓提升至應有的電壓值。Client’s Docket No. : 95-025 TT^ Docket No:0492-A41052-TW/Final /Joanne 200836200 The electrical properties are floating. The above and other objects, features and advantages of the present invention will become more <RTIgt; Schematic diagram of the cell. The memory cell 100 includes a substrate 110, a source 120, a drain 13A, a floating gate 14A, a control gate 150, and an electrical layer 160 and 170. In the present embodiment, the substrate ι1 〇 is p-type, and the source 120 and the drain 13 〇 are both N+ diffusion regions. In other embodiments, the substrate 110 can be N-type, and the source 120 and the drain 13 are both P+ diffusion regions. The source 120 and the drain 130 are formed in the substrate 11 , wherein the drain 130 is a bit line. A floating gate 14 is formed on the substrate 11A. The dielectric layer 160 is interposed between the substrate 11 〇 and the floating gate 14 。. Control gate 150 is formed over floating gate 14A. The dielectric layer 17 is interposed between the floating gate 140 and the control gate 150. ... When entering a specific mode, the substrate 11〇 of the memory cell receives the negative voltage -V, the source 120 receives the ground voltage GND, the drain 13 receives the positive voltage +V, and the control gate 15 does not. Receive any voltage, so its electrical properties are floating. Since the memory cells are easily erased after being erased, the threshold voltage of the memory cells is too low. When the threshold voltage of the memory cell is too low, after the stylization process, the critical voltage of the memory cell cannot be raised to the desired voltage value.
舉例而言’假設’在記憶胞的臨界電壓等於〇V±〇.5VFor example, the 'hypothesis' is that the threshold voltage of the memory cell is equal to 〇V±〇.5V.
Client’s Docket No.:95-025 TT’s Docket N〇:0492-A41052-TW/Final /Joanne 200836200 時,表示儲存資料”0”,在記憶胞的臨界電壓等於2V±0.5V 時,表示儲存資料”1”。 當記憶胞所儲存的資料欲由”1”改變成”0”時,則需對 記憶胞進行抹除處理。若發生過度抹除現象時,則記憶胞 的臨界電壓可能會小於-0.5V。若將記憶胞所儲存的資料 由”0”改變成”1”時,則在對記憶胞進行程式化處理後,其 臨界電壓將小於1.5 V。因而易將該記憶胞所儲存的貧料誤 判為資料”〇”。 在本實施例中,當記憶胞的臨界電壓小於一預設值 時,便進入特定模式,以特定的方式提供電壓予記憶胞, 以提升記憶胞的臨界電壓,以避免在程式化後,無法將記 憶胞的臨界電壓提升至標準值。在其它實施例中,可在記 憶胞經過抹除處理後,便進入特定模式。 當基底110接收負極性電壓-V,源極120接收接地電 壓GND,汲極130接收正極性電壓+V,控制閘極150不接 收任何電壓時,由於控制閘極150的電性為浮動狀態,故 易受汲極130的影響,而具有少量的正極性電壓,因此可 稍微提升記憶胞100的臨界電壓,以避免過度抹除現象所 造成的程式化錯誤。 在記憶體的製造過程中,可設置參考記憶胞,其臨界 電壓為一預設值,用以與其它記憶胞比較。當記憶胞100 的臨界電壓小於參考記憶胞的臨界電壓時,則表示記憶胞 100的臨界電壓過低,故需進入特定模式,以調整記憶胞 100的臨界電壓。當記憶胞100的臨界電壓經調整後而達Client's Docket No.: 95-025 TT's Docket N〇:0492-A41052-TW/Final /Joanne 200836200, indicating that the data "0" is stored. When the threshold voltage of the memory cell is equal to 2V±0.5V, it means that the data is stored. ". When the data stored in the memory cell is to be changed from "1" to "0", the memory cell needs to be erased. If excessive erasure occurs, the threshold voltage of the memory cell may be less than -0.5V. If the data stored in the memory cell is changed from "0" to "1", the threshold voltage will be less than 1.5 V after the memory cell is programmed. Therefore, it is easy to misjudge the poor material stored in the memory cell as the data "〇". In this embodiment, when the threshold voltage of the memory cell is less than a predetermined value, the specific mode is entered, and the voltage is supplied to the memory cell in a specific manner to increase the threshold voltage of the memory cell to avoid being unable to be programmed. Raise the threshold voltage of the memory cell to the standard value. In other embodiments, the particular mode can be entered after the memory cell has been erased. When the substrate 110 receives the negative polarity voltage -V, the source 120 receives the ground voltage GND, the drain 130 receives the positive polarity voltage +V, and the control gate 150 does not receive any voltage, since the electrical conductivity of the control gate 150 is floating, Therefore, it is susceptible to the bungee pole 130 and has a small amount of positive polarity voltage, so the threshold voltage of the memory cell 100 can be slightly increased to avoid stylized errors caused by excessive erasing. In the manufacturing process of the memory, the reference memory cell can be set, and the threshold voltage is a preset value for comparison with other memory cells. When the threshold voltage of the memory cell 100 is less than the threshold voltage of the reference memory cell, it means that the threshold voltage of the memory cell 100 is too low, so it is necessary to enter a specific mode to adjust the threshold voltage of the memory cell 100. When the threshold voltage of the memory cell 100 is adjusted
Client’s Docket No.:95-025 TT?s Docket No:0492-A41052-TW/Final /Joanne 200836200 料料提供任何偏壓予記憶胞100。 ^2®為記憶胞經過調整後的臨界電壓值。曲線22為 利用柄1賴露的偏壓方式的記憶胞_界電壓。曲線 24 :、、利用白知技衡(例如Dahc)的記憶胞的臨界電壓。由 於曲線22及24係為25〇個記憶胞的臨界電壓平均值,故 具有相當高的準確度。 如圖所不,"己憶胞的初始臨界電壓值約| 1.9V。當記 L月l接收本I明所述之偏壓時,其臨界電壓將快速地提 升在日守間T1時,其臨界電壓值可提升至約2.3V,比初 始值多0.4V。 反觀曲線24,在時間T1時,利用習知技術的記憶胞 的B品界電壓約為1.95V,僅約略提升〇 〇5V。在時間T2時, 由曲線24可知,矛j用習知技術的記憶胞的臨界電壓約為 2.05V ’也只比初始值多o.uv。 因此,本發明所揭露的偏壓方式可快速且大幅地提升 記憶胞的臨界電壓值,大大地降低程式化後所產生的誤讀 取現象。 雖然本發明已以較佳實施例揭露如上,然其並非用以 限定本發明,任何所屬技術領域中具有通常知識者,在不 脫離本發明之精神和範圍内,當可作些許之更動與潤飾, 因此本發明之保護範圍當視後附之申請專利範圍所界定者 為準。 1 【圖式簡單說明】 第1圖為本發明之記憶胞之示意圖。Client's Docket No.: 95-025 TT?s Docket No: 0492-A41052-TW/Final /Joanne 200836200 The material provides any bias to the memory cell 100. ^2® is the adjusted threshold voltage of the memory cell. Curve 22 is the memory cell boundary voltage using the bias mode of the handle 1. Curve 24: The threshold voltage of the memory cell using the white balance (for example, Dahc). Since curves 22 and 24 are the average of the threshold voltages of 25 memory cells, they have a relatively high accuracy. As shown in the figure, the initial threshold voltage of the memory cell is about 1.9V. When L1 receives the bias voltage as described in this section, its threshold voltage will rapidly increase at daytime T1, and its threshold voltage can be increased to about 2.3V, which is 0.4V more than the initial value. In contrast, curve 24, at time T1, the B-line voltage of the memory cell using the prior art is about 1.95V, which only slightly increases 〇5V. At time T2, as can be seen from curve 24, the threshold voltage of the memory cell of the prior art is about 2.05 V' and is only o.uv more than the initial value. Therefore, the bias mode disclosed in the present invention can quickly and greatly increase the threshold voltage of the memory cell, and greatly reduce the misreading phenomenon caused by the stylization. Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. 1 [Simplified description of the drawings] Fig. 1 is a schematic diagram of a memory cell of the present invention.
Client’s Docket Ν〇.:95-025 TT?s Docket No:0492-A41052-TW/Final /Joanne 200836200 第2圖為記憶胞經過調整後的臨界電壓值。 【主要元件符號說明】 100 :記憶胞; 110 :基底; 120 :源極; 130 :汲極; 140 ·•浮動閘極; 150 :控制閘極; 160、170 :介電層; 22、24 :曲線 〇Client’s Docket Ν〇.:95-025 TT?s Docket No:0492-A41052-TW/Final /Joanne 200836200 Figure 2 shows the adjusted threshold voltage of the memory cell. [Main component symbol description] 100: memory cell; 110: substrate; 120: source; 130: drain; 140 • floating gate; 150: control gate; 160, 170: dielectric layer; Curve〇
Client’s Docket N〇.:95-025 TT’s Docket No:0492-A41052-TW/Final /JoanneClient’s Docket N〇.:95-025 TT’s Docket No:0492-A41052-TW/Final /Joanne
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