TW200834034A - A light field compensation method for segment projection grating measurement, and the equipment thereof - Google Patents

A light field compensation method for segment projection grating measurement, and the equipment thereof

Info

Publication number
TW200834034A
TW200834034A TW96105403A TW96105403A TW200834034A TW 200834034 A TW200834034 A TW 200834034A TW 96105403 A TW96105403 A TW 96105403A TW 96105403 A TW96105403 A TW 96105403A TW 200834034 A TW200834034 A TW 200834034A
Authority
TW
Taiwan
Prior art keywords
image
grating
light field
equipment
field compensation
Prior art date
Application number
TW96105403A
Other languages
English (en)
Chinese (zh)
Other versions
TWI315393B (enExample
Inventor
Chern-Sheng Lin
Mau-Shiun Yeh
Jyh-Fa Lee
Chia-Hau Lin
Yung-Fang Chou
Wei Cheng Chang
Original Assignee
Chung Shan Inst Of Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chung Shan Inst Of Science filed Critical Chung Shan Inst Of Science
Priority to TW96105403A priority Critical patent/TW200834034A/zh
Publication of TW200834034A publication Critical patent/TW200834034A/zh
Application granted granted Critical
Publication of TWI315393B publication Critical patent/TWI315393B/zh

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  • Length Measuring Devices By Optical Means (AREA)
TW96105403A 2007-02-14 2007-02-14 A light field compensation method for segment projection grating measurement, and the equipment thereof TW200834034A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96105403A TW200834034A (en) 2007-02-14 2007-02-14 A light field compensation method for segment projection grating measurement, and the equipment thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96105403A TW200834034A (en) 2007-02-14 2007-02-14 A light field compensation method for segment projection grating measurement, and the equipment thereof

Publications (2)

Publication Number Publication Date
TW200834034A true TW200834034A (en) 2008-08-16
TWI315393B TWI315393B (enExample) 2009-10-01

Family

ID=44819332

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96105403A TW200834034A (en) 2007-02-14 2007-02-14 A light field compensation method for segment projection grating measurement, and the equipment thereof

Country Status (1)

Country Link
TW (1) TW200834034A (enExample)

Also Published As

Publication number Publication date
TWI315393B (enExample) 2009-10-01

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