TW200831719A - Apparatus and method for non-contact liquid sealing - Google Patents

Abstract

This invention provides an apparatus (22) for non-contact liquid sealing. The apparatus (22) comprises an immersion tank (10) filled with a treating liquid, and a pair of liquid jetting parts (24). The immersion tank (10) has in its side wall (18) a slit (20) through which a sheet-like or belt-like workpiece (12) is passed in such a state that the widthwise direction of the workpiece (12) is substantially vertical. The pair of jetting parts (24) are provided respectively on both sides of the slit (20) and spout a jet of the treating liquid from both sides of the workpiece (12) toward the workpiece (12) being passed through the slit (20).

Description

[Technical Field] The present invention relates to a liquid sealing apparatus and method for a wet processing apparatus which applies electric forging or the like to an object such as a substrate of a printed substrate. Processor. _ ‘[Prior Art] The printed circuit board used in the w c card is electroplated to electrically connect the components mounted. The method of applying electroplating to the printed substrate is generally a one-piece method in which the substrate of the P-brush substrate is immersed in the electro-mineral liquid in a cut state, or the continuous flexible printed circuit board itself is continuously dipped. A continuous method in the collapse of electricity money. In this manner, in the wet processing in which the object to be processed (also referred to as a workpiece) is subjected to an electron microscope or the like, depending on the state of the workpiece, a monolithic or continuous method is employed in the case of using the monolithic method. The keeper is placed above the immersion tank of the processing liquid by the transport mechanism and then settles into the immersion tank. The immersed 2 treatment liquid: the workpiece after the treatment is completed, and the strip-shaped workpiece is transported after being lifted out of the immersion tank. ^ Early piece workpiece, but can not be used for continuous relative to this. In the case of continuous method, the slit shape is set on the opposite side wall, and, s The workpiece is passed through the slit to carry in and out of the bay. This method is not only suitable for strip workpieces. However, in this method, the ":" can also use the slit to flow out a large amount, and it is impossible to increase the liquid level of the treatment liquid in the immersion two tanks from the narrow and sputum treatment liquid. If the reduction is 125312.doc 200831719 The small slit width can reduce the outflow of the treatment liquid, but only reducing the width of the slit will cause the workpiece to contact the inner surface of the slit. Therefore, the slit needs to have a width of about 〇. Thus, the dip cannot be improved. The liquid level in the groove is so difficult to handle the wide workpiece, so the width of the workpiece that can be processed is only about 200 mm. In addition, in order to maintain the liquid level of the treatment liquid in the impregnation tank, a similar effluent return pump needs to have a larger Capacity, etc., the energy required for fluid equipment is also large.

Further, in this method, the position of the workpiece passing through the slit is liable to become unstable. When the guard member is biased from the center position of the slit gap toward the inner surface of the slit in the side, the workpiece moves in the direction of retreating from the center due to the inertial force of the treatment liquid flowing out of the slit. As a result, the workpiece is finally stabilized in a state of contacting the inner surface of the slit on one of the sides. If it is in such a state, the surface of the slit will be scratched by the contact with the inner surface of the slit, which may cause deterioration of quality, etc. m. The workpiece does not easily contact the inner surface of the slit, and the width of the slit gap must be enlarged. It is difficult to reduce the outflow amount of the treatment liquid. By 曰, the thickness of the slit is added, or the fluid in the inner surface of the slit is made to have a large frictional friction: the flow rate of the treatment liquid from the slit can be reduced by a certain degree of twist. However, it is difficult to completely prevent the workpiece from coming into contact with the inner surface of the slit. Further, the method for suppressing or reducing the outflow of the treatment liquid from the slit is known to be similar to a resin, a shape, a sea shape, or a scraper in the form of a sheet-shaped sea core member such as a slit portion or a rubber system. The method of the liquid-removing mechanism (for example, refer to the patent document j 10,000 to the mechanism of the friction...: There is still a problem of damage to the workpiece surface caused by the friction between the workpiece and the liquid-repellent crucible. It is known that there is the following method: On the side wall of the 125312.doc 200831719 ># μ eight slits, two clamps corresponding to the slits and a +-rotating roller (sealing roller) are provided to advance the workpiece In 2 secrets, ten pg

The Be S is carried in and out of the treatment tank (for example, refer to Patent Documents 2 to 4). The method is also applicable to a belt-shaped guard. #When the workpiece travels between the rollers and the roller, the workpiece η can be increased by the rotation of the sealing roller, so that the flow of the treatment liquid from the groove can be effectively suppressed or reduced. Due to &, the liquid level of the treatment liquid in the impregnation tank can be increased, and one workpiece can be processed from month 6. In this method, workpieces with a width of up to 600 mm can be processed. In addition, the method has the advantage of having less fluid equipment such as pumps. Moreover, in this method, since the workpiece and the sealing roller do not slip, the occurrence of the workpiece scratch caused by the sealing roller can be suppressed, and since the workpiece is positioned by the roller, the workpiece can be stably traveled to the workpiece. The surface of the sealing drum that is in contact will gradually deteriorate over time', so maintenance management of the drum must be performed. Patent Document 1: Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION As described above, a single piece or a belt-shaped workpiece such as a printed wiring board and a substrate used therefor. 'When the impregnation tank filled with the treatment liquid is carried in and out through the slit provided in the side wall, in order to suppress or reduce the outflow of the treatment liquid from the immersion tank, the sealing process is performed in a manner of 125312.doc 200831719. ^ Can the right suppress or reduce the treatment in the form of contact with the workpiece + the liquid and the main M? The 'flow out' can reliably prevent the occurrence of workpiece defects. Then, it can be sufficiently 2 to suppress or reduce the liquid level of the treatment liquid flowing out of the immersion tank of the workpiece from the immersion tank, and therefore it is also possible to treat the processing liquid with a wide f piece. It is an object of the present invention to provide a non-contact liquid sealing device and method which is not suitable for the non-contact liquid filling of the moon and the workpiece, and which suppresses or reduces the narrowness of the side wall of the filling tank. In the case of the front piece or the strip-shaped workpiece, the processing liquid in the state of the width σ and the straight state is carried in and out of the dipping tank. The technical means of solving the problem, the inventor of the Shenyue case, etc., studied intensively to achieve the above-mentioned purpose, and found that the monolithic or banded work # 宫, 仵乂 仵乂 方向 大致 大致 大致 通过 液体 液体 液体 液体 液体 液体 液体In the opening portion, in the range corresponding to the opening portion of the dipping groove, the flow of the fluid is ejected from both sides of the workpiece by the opening, thereby making the position of the workpiece stable and in a non-contact manner. The carrying of the workpiece into and out of the dipping tank '1' can sufficiently suppress or reduce the flow of the liquid from the dipping tank, thereby completing the present invention. Furthermore, for example, when the processing is performed on both sides of the workpiece and only one side of the workpiece is treated, it is not always necessary to eject a jet of fluid from both sides of the workpiece. It is feasible to configure the following liquid sealing mechanism: The liquid sealing mechanism discharges a fluid jet from the processing surface side of the workpiece toward the workpiece passing through the opening, and liquid-sealed on the non-treated surface side of the workpiece to contact the non-processed surface of the workpiece 125312.doc 200831719.

The above object is achieved by a non-contact liquid sealing device, which is characterized in that it is provided with (4) an opening through which a single piece or a strip-shaped direction is substantially staggered and filled with a liquid cavity. a non-contact liquid sealing device, comprising: an outlet, disposed on a side of the opening, facing the workpiece passing through the I/彳, and ejecting a fluid from the one side and a liquid sealing portion 'It is disposed on the other side of the opening to seal the outflow of the liquid from the other side of the opening. Further, in the non-contact liquid sealing device, the liquid sealing portion may be a jet that is disposed on the other side of the opening and that ejects a fluid from the other side toward the workpiece passing through the opening. Spraying section. Further, in the non-contact liquid sealing device, the gap between the jet ejecting portion disposed on one of the openings and the jet ejecting portion disposed on the other side of the opening σ portion may be The narrower the width, the narrower the width. Further, in the non-contact liquid sealing device, the liquid sealing portion may be a cylindrical member disposed on the other side of the opening and in contact with the other side surface of the workpiece. Further, in the non-contact liquid sealing device, the jet ejecting unit may have a jet fluid line to which the fluid is supplied, and a jet nozzle provided on the workpiece side of the jet fluid line to eject the jet stream. . e, in the non-contact liquid sealing device, the vertical direction of the upper direction relative to the direction of movement of the upper core member may also be made - the impregnation == 1253I2.doc 200831719 and in the non-contact liquid sealing device The nozzle is oriented in a direction perpendicular to the moving direction of the workpiece. Further, in the non-contact liquid sealing device, the jet ejecting portion may have a plurality of the nozzles arranged in the vertical direction. In the above non-contact liquid sealing device, the plurality of nozzles of the plurality of nozzles may each have a circular shape. , ,

In the above non-contact liquid sealing device, the plurality of nozzles of the nozzles may be such that the lower the diameter of the nozzles of the nozzles, the more the apertures are in the non-contact liquid sealing device. The pitch of the orifices of the plurality of nozzles in the up and down direction may be denser toward the bottom. Further, in the non-contact liquid sealing device, the opening may have a narrower width as it goes downward. Moreover, the above object is achieved by a non-contact liquid sealing method, which is characterized in that a single piece or a strip-shaped workpiece is provided in the width direction in the side wall or in the side wall. a non-contact liquid squeezing method in which a large chaotic straight passage passes through and is filled with a liquid impregnation groove, when the workpiece passes through the above-mentioned impregnation filled with the liquid; μ, +, Japanese, and/or In the above-described opening portion, a jet of fluid is ejected from both sides of the guard member through the guard member ρ passing through the opening ρ, and the opening portion is sealed in a non-contact manner by the jet flow. Moreover, the above object is achieved by a non-contact liquid sealing method of a northern type, which is characterized in that it is provided with a single piece or a strip-shaped workpiece on the side wall in a width direction, substantially, ° a non-contact liquid seal filled with a liquid-impregnated groove, and a liquid seal portion disposed on the side of the opening portion, the liquid seal portion and the workpiece One of the side surfaces is in contact with the liquid to seal the one of the openings from the one of the openings; when the workpiece passes through the opening of the dipping tank filled with the liquid, the opening is directed toward the opening. The above workpiece is from the opening. The other side discharges a jet of the fluid, and the jet is used to seal the outflow of the liquid from the other side of the opening in a non-contact manner. Advantageous Effects of Invention According to the present invention, a single piece or a strip-shaped workpiece is substantially straight in the width direction, and when the opening portion of the liquid immersion groove is shaken, the fluid is ejected from both sides of the workpiece toward the workpiece passing through the opening portion. The jet stream 'causes the non-contact opening/type of the workpiece to sufficiently suppress or reduce the outflow of the liquid from the dipping tank. Therefore, according to the present invention, it is possible to prevent the peripheral members and the parts from coming into contact with the workpiece, thereby sin preventing the occurrence of workpiece defects such as damage, deformation, and discoloration. Further, according to the present description, the liquid level filled with the impregnated, main and liquid can be increased, and the wide workpiece can be processed by using the liquid filled with the heart chamber. Further, according to the present invention, the jet of the ejected fluid does not require the use of movable parts, so that maintenance management can be easily performed. Also, according to the present invention, West? Stop, produce u & *, main liquid seal part, the liquid seal part is filled with the liquid immersion, / the opening of the shell groove J: one of the sides of the dry, one side of the workpiece The liquid flows out from one side of the opening portion of the opening portion, and the workpiece is reliably prevented from the other side of the workpiece from the opening portion J toward the opening by the workpiece in the state of being substantially straight in the width direction. The flow of the body, so the surface of the force can produce the surface of the Λ Λ 展 展 展 展 展 展 展 、 、 、 、 、 、 、 、 、 、 、 、 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 312 Flow out. [Embodiment] [First Embodiment] A non-contact liquid sealing device and method according to a first embodiment of the present invention will be described with reference to Figs. 1 to 5 . 1 to 3 are schematic views showing the structure of a wet processing apparatus including the non-contact liquid sealing apparatus of the present embodiment, and Figs. 4 and 5 are schematic views showing the structure of the non-contact liquid sealing apparatus of the present embodiment.

First, a wet processing apparatus including the non-contact liquid sealing apparatus of the present embodiment will be described with reference to Figs. 1 to 3 . Fig. 1 is a plan view showing a structure of a wet processing apparatus including the non-contact liquid sealing apparatus of the embodiment, Fig. 2 is a cross-sectional view taken along line A-A' of Fig. 1, and Fig. 3 is a view of arrow direction of Fig. 1. . The dipping tank ίο is filled with a treatment liquid to specifically treat the single piece of the workpiece 12. The treatment liquid is supplied to the immersion tank 1 through the pump 16 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ On the opposite side wall 18 of the impregnation tank 1 〇 又 又 贝 贝 υ υ υ υ υ υ υ υ υ υ 的 的 的 的 的 的 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件 工件Slit 2〇. The workpiece 12 is lifted into the dipping tank 10 in a substantially vertical direction in the width direction from one of the sides. Moving the workpiece for a long time > The workpiece 12 in the 1st slot is kept in a substantially vertical direction in the width direction, and I is carried out from the slit 20 of the other side wall 18 out of the dipping groove 10. The non-contact liquid seal dream spray nozzle 24 of the present embodiment is provided on the opposite side wall 18 of the immersion tank 1 〇 ^ ^ ^ of the slit 20 of the present embodiment, and the pair of spray nozzles f contact liquid The sealing device 22 has a ", ▼ out #24 toward the workpiece 12 from the workpiece 12 125312.doc -13- 200831719 on both sides of the spray jet of the treatment liquid uniformly. The pair of jet ejecting portions 24 are disposed on the outer surfaces of the end portions of the side walls 18 on both sides of the slit 20 so as to face each other with the workpiece 12 passing through the slits 20 interposed therebetween. The processing liquid discharged from the pair of jet ejecting units 24 is supplied from the processing liquid storage tank 14 via the pump 16, the flow rate adjusting valve %, and the FIC (Flow Indicator and Controller) 28 . Come.

A receiving tray 3 for collecting the processing liquid flowing out of the slit 20 and the processing liquid discharged from the non-contact liquid sealing device 22 is provided below the side wall 18 of the loading and unloading side of the dipping tank 10. The treatment liquid accumulated in the receiving tray 3 is recovered into the treatment liquid storage tank 14. Thereby, a wet processing apparatus including the non-contact liquid sealing device 22 is constructed. The workpiece 12 is, for example, a printed wiring board, a substrate for a printed wiring board, or the like. The thickness of the workpiece 12 is, for example, in the range of 3 to 200 μm, specifically, the main/claw 疋38 μm, and the second is 25 μm, and the special purpose is 5〇μΠ1,1〇0 4"&quot ;"etc. Further, the shape of the workpiece 12 is not limited to a single piece, and may be a strip shape such as a continuous strip which is unrolled from the drum. The bellows 10 is, for example, a plating tank filled with a plating solution as a treatment liquid. Further, it is not limited to an electric ore tank, and may be a pretreatment tank, a post-treatment tank, a washing tank, or the like. The treatment by the dipping tank attachment, in addition to the electroplating treatment, the village light occupation, degreasing phase, _ (four), cleaning households, etc., and the treatment liquid can be selected according to the treatment. The width of the slit 20 placed on the side of the moving side of the workpiece 12 and the side wall u of the carrying-out side in the position/and/before groove 1G is, for example, substantially constant in the vertical direction of the mouth. The workpiece 12 is subjected to a treatment liquid treatment period, and the treatment liquid is appropriately supplied from the treatment liquid storage 1253I2.doc -14-200831719 tank 14 through the pump I6 to the impregnation tank 1〇 so as to be in the impregnation tank The liquid level of the reaction liquid is kept substantially constant. The main feature of the non-contact liquid sealing device 22 of the present embodiment is that it has a pair of jet ejecting portions 24 that uniformly eject a jet of the processing liquid from the both sides of the workpiece 12 toward the workpiece 12. Here, the non-contact liquid sealing device 22 of the present embodiment will be described in detail with reference to Figs. Fig. 4 is a cross-sectional view taken along line C-C' of Fig. 2 and Fig. 3, Fig. 5(a) is a plan view of the jet ejecting portion 24, and Fig. 5(b) is a side view of the workpiece side of the jet ejecting portion 24. Further, in Fig. 4, (4) the structure of the non-contact liquid sealing device 22 placed on the side wall 18 of the workpiece 12 on the carrying-out side of the dipping tank 1G, and the side wall 18 provided on the loading side of the workpiece 12 of the dipping tank 1 The upper non-tantalum seal device 22 also has the same construction. As shown in Fig. 4, on the outer surface of the end portion of the side wall 18 on both sides of the slit 20, a pair of jet ejecting portions 24 opposed to each other through the workpiece 12 passing through the slit 20 are disposed. The pair of jet discharge portions 24 are respectively composed of a spray fluid line 32 and a jet nozzle plate 34. The spray fluid line 32 is a flow passage for the treatment liquid sprayed as a jet flow, and the spray nozzle plate 34 is provided. The treatment liquid in the spray fluid line 32 is ejected as a plurality of spray nozzles 36 of the jet flow. The spray fluid line 32 is, for example, a square tube. The same treatment liquid as the treatment liquid filled with the immersion tank 1 () is supplied from the treatment liquid storage tank 14 to the spray fluid line 32 via a pipe. The treatment liquid can be supplied to the spray fluid line 32 by one portion (see Fig. 5 (b)) or by a plurality of portions. When the treatment liquid is supplied from a plurality of parts, the spray fluid line 32 may be divided into a plurality of compartments such as upper and lower sections, upper and lower sections, and the like, and the treatment liquid is supplied to each of the divided compartments. 125312.doc 15- 200831719 The flow rate of the treatment liquid supplied to the spray fluid line 32 is detected by ^1 (: 28). The FIC 28 controls the flow adjustment valve 26 according to the flow detection result so as to be opposed to the workpiece 12. The flow rate of the treatment liquid discharged from the pair of jet discharge portions 24 is uniform. The jet nozzle plate 34 is provided on the workpiece 12 side of the spray fluid line 32. The spray nozzle 'plate 34 has a top and bottom along the spray fluid line 32. The direction protrudes from the side protrusion 38. The surface of the protrusion 38 opposite to the workpiece 12 is a flat surface substantially parallel to the moving direction of the workpiece 12. The protrusion 38 is on the side of the dip tank 1 side ' is a surface substantially parallel to the side wall 18 of the immersion groove 1 。. The side surface of the protrusion "on the side opposite to the immersion groove ί is an inclined surface. The faces on both sides of the protruding portion 38 of the jet nozzle plate 34 are The plurality of nozzles 36 are arranged in the vertical direction of the slits of the jet nozzle plate 34 in the range corresponding to the slit 2〇 of the dipping groove 1〇. And connected to the spray fluid line 32. As shown in Figure 5 (b), a plurality of spray nozzles 36 spray The holes are arranged in a row on the plane of the projections 38 opposite to the workpiece 12, for example, in a substantially fixed distance in the up-and-down direction. Further, the plurality of nozzles 36 are, for example, circular in the same diameter. The diameter of the orifice of the nozzle 36 is, for example, G.5 to 3 mm. • The left and right 'specifically, for example, about 2 mm. As shown in Fig. 4, each of the nozzles 63 is oriented in a direction of movement relative to the workpiece 丨2. The direction perpendicular to the direction of the wetting groove 1 is inclined. The nozzles 36 facing the oblique direction are directed toward the workpiece 12, and the processing liquid supplied from the nozzle (4) is used as a jet flow to the vertical direction of the moving direction with respect to the workpiece 12. The direction perpendicular to the direction of the dipping groove 10 is substantially horizontally ejected. ° 125312.doc -16 - 200831719 Between the jet nozzle plates 34 disposed opposite to the workpiece 12 and opposite to the jet ejecting portion The jet slit 40 is sandwiched by the protrusion 38 opposite to the surface of the workpiece 12. The width of the jet slit 4 is narrower than the width of the slit 20 of the dipping groove 1 and is in the up and down direction. It is roughly fixed, for example, about 33 mm. The thickness of the jet slit 40 is also That is, the length of the protrusion facing the workpiece 12 in the moving direction of the workpiece 12 is, for example, about 3 mm. Further, between the jet nozzle plates 34 of the pair of jet ejecting portions 24, the dip in the jet slit 40 On the side of the sluice 10, a throat portion 42 having a width wider than that of the jet slit 4 is formed. Further, on the opposite side of the jet slit 40 from the immersion groove 1 ,, the width is wider than the jet slit 40. Throat portion 44. The throat portion 42 on the side of the dipping tank 10 has a substantially fixed width which is narrower than the width of the slit 20 of the dipping groove 10. The throat 4 4 ' opposite to the dipping groove 1〇 The visibility is gradually enlarged from the side of the f-flow slit 4, and the width at the beginning becomes almost the same as the throat 42 on the side of the dipping groove 10. Regarding the length in the moving direction of the workpiece 12, the throat portion 44 on the side opposite to the dipping groove 1 is longer than the throat portion 42 on the side of the dipping groove 1 . Thereby, between the pair of jet nozzle plates 34 through which the workpiece 12 passes, the throat portion 42 and the jet slit 40 are formed along the slit 20 of the dipping groove 10 and corresponding to the slit 20. And throat 44. In the jet slit 40, a plurality of nozzles 36 on both sides of the workpiece 12 eject the jet of the treatment liquid from both sides of the workpiece 12 toward the workpiece 12. Next, a liquid sealing method using the non-contact liquid sealing device 22 of the present embodiment will be described with reference to Figs. 1 to 5 . In the immersion tank 10 filled with the treatment liquid, the workpiece 12 is carried in a straight shape from the slit 20 of the side wall 18 of the loading side in the form of a substantially irregular width of 125312.doc -17-200831719, and the width direction is substantially vertical. The slit 2 of the side wall of the side of the unloading side is moved out. The moving speed of the workpiece 12 is, for example, in the range of 〇1 m to 3 〇 m/min, which is a relatively slow speed, usually 〇1 to 2 m/min. During the loading and unloading of the workpiece 12, the processing liquid is supplied to the jet fluid line 32, and the jets of the processing liquid are ejected by the plurality of nozzles 36 of the jet nozzle plate 34. The flow rate of the treatment liquid supplied to the spray fluid line 32 is controlled by the FIC 28 so that the flow rate of the treatment liquid which is discharged from the nozzle nozzles of the pair of nozzle nozzle plates 34 by the workpiece 12 is uniform. Thereby, the jet nozzles 36 opposed to the pair of jet nozzle plates 34 are separated from each other by the workpiece 12, and the jets of the processing liquid are uniformly discharged from the sides of the workpiece 12 toward the workpiece 12. The velocity component of the jet flow in the substantially vertical direction with respect to the workpiece 12 acts on the surface of the workpiece 12 as the inertial force of the jet flow, and pushes the workpiece 12 back to the center of the gap between the pair of jet nozzle plates 34. For the force generated by the jet to push back the workpiece 12, the narrower the gap between the nozzle 36 and the workpiece 12, the greater the force. Therefore, the workpiece 12 will be stabilized at the center position of the jet slit 4〇, thereby maintaining a non-contact state with the jet nozzle plate 34. Thereby, the workpiece 12 is not sprayed with the jet of the processing liquid uniformly sprayed from both sides of the workpiece 12 from the nozzles 36 of the pair of jet nozzle plates 34, and the workpiece 12 is not in contact with the inner surface of the slit 20 of the impregnation tank 10 and the jet flow. The nozzle plate 34 is in contact with it, and is stably carried into and out of the dipping tank 1 〇. Therefore, according to the non-contact liquid sealing device 22 of the present embodiment, it is possible to prevent contact between the inner surface of the slit 20 of the impregnation groove 10 and the peripheral member such as the jet nozzle plate 34 and the workpiece 12, thereby reliably preventing damage, deformation, and discoloration. Wait for the workpiece 125312.doc -18- 200831719 12 defects. When the workpiece 12 is carried into and out of the immersion tank 1 in a non-contact manner, the treatment liquid in the immersion tank 10 flows into the throat portion 42 on the 浸 side of the immersion tank 1 through the slit 20 of the immersion tank 1 . However, within the jet slit 40, there is fluid friction on the surface of the jet nozzle plate 34. Therefore, the pressure in the jet slit 40 becomes higher by the jet flow jetted from the nozzle 36. The higher pressure in the jet slit 4 相互作用 interacts with the inertial force of the jet having a velocity component toward the 〇 side of the immersion tank 1 to sufficiently suppress or reduce the treatment liquid from the immersion tank 1 The throat portion 42 flows out of the throat material on the side opposite to the impregnation tank 10. Thereby, the non-contact liquid sealing device 22 according to the present embodiment can be in a non-contact form by flowing the nozzle of the liquid in the jet slit 40 uniformly toward both sides of the self-defense member 12 of the guard 12 in a non-contact manner. The jet slit 4 is sealed, thereby sufficiently suppressing or reducing the outflow of the treatment liquid from the dipping tank 1〇. Therefore, the liquid level of the treatment liquid filled with the impregnation (4) can be increased, and the treatment liquid can be processed for the wide workpiece. According to the present embodiment, it is also possible to carry out the non-contact liquid sealing device 22 of the present embodiment in the dipping groove =, for example, the width of the width of the crucible (4), and the jet ejecting without the liquid jet. The use and disposal of the unit 24 makes it easy to perform maintenance management. Further, according to the non-contact liquid seal of the present embodiment, the non-contact liquid seal according to the present embodiment can suppress or reduce the vain, the main i, the 'sufficient amount', and the flow of the ... 1 〇 can save energy, such as In the above-described wet processing apparatus, a single-piece or strip-shaped workpiece such as a printed circuit board or a flexible printed sheet of 1253l2.doc -19-200831719 turtle shell is pulled in a horizontal direction so as to be vertically staggered. In the processing method of the groove, the moving speed of the workpiece is slow. As described above, the moving speed of the workpiece is, for example, in the range of 〇·1 m to 30 m/min, and is usually 〇ι 2 2 minutes. In the case where the moving speed of the workpiece is slow, for example, unlike the case where the workpiece is moved at a speed of -minute, the fluid lubrication due to the moving speed of the workpiece cannot be excessively high. Therefore, in the present invention, by jetting the jet of the processing liquid to the workpiece, the position of the workpiece is stabilized by the action of the fluid, thereby realizing the loading and unloading of the workpiece in a non-contact manner. In the present invention, a non-contact liquid sealing device is disposed on the side wall of the slit having the slit to discharge the jet flow, thereby realizing the position of the workpiece in which the workpiece position is stabilized, and the workpiece is moved in and out, and the processing is suppressed or reduced. The liquid flows out of the immersion tank. On the other hand, there is known a structure for preventing the scattering of the effluent or preventing the treatment liquid adhering to the workpiece from being carried to the next immersion tank, and from the position of the slit away from the immersion groove. The fluid is ejected from the effluent from the slit and the workpiece. However, with such a structure, the position of the workpiece cannot be stabilized, or the flow of the treatment liquid from the immersion tank can be suppressed, and thus it is completely different from the structure of the present invention. Furthermore, it is preferable for the shape and size of the non-contact liquid sealing device 22 to be analyzed by the finite element method by analyzing the inertial force and the viscous force of the fluid around the jet slit 4 according to fluid engineering. The hydraulic distribution analysis, streamline simulation, etc. are appropriately set. A specific example of the shape and size of the non-contact liquid sealing device 22 is such that the interval between the pair of jet nozzle plates 34, the thickness of the jet slit 4, the throat 42 and the material 125312 are opposed to each other by the workpiece 12 interposed therebetween. .doc -20- 200831719 The length and shape, the shape of the nozzle 36, the aperture, the number, and the like. The reason for this is that the following conditions affect each other, that is, the mechanical properties such as the material of the workpiece 12, the size of the workpiece 12, the density of the treatment liquid in the immersion tank 1 及, and the physical properties of the viscosity, etc., are immersed in the groove 1 The liquid level of the treatment liquid, the physical properties such as the density and viscosity of the spray fluid sprayed from the nozzle 36, the flow velocity of the spray fluid sprayed from the nozzle 36, and the hydraulic pressure. The best solution of the jet flow condition is obtained by means of analysis by fluid engineering, etc., and the jet flow condition is used to stabilize the position of the workpiece 12 in the entire region near the jet slit 4〇.

The center of the gap of the slit 40 is minimized by the amount of liquid flowing out of the dipping groove 1 through the jet slit 4, whereby the shape and size of the non-contact liquid sealing device 22 can be practically set. As described above, according to the present embodiment, when the single-piece or strip-shaped workpiece 12 is carried into the ejecting tank 1〇 in a state of being substantially vertical in the width direction, the slit 20 of the π" is filled in the slit In the slit 4, a plurality of nozzles 36 on both sides of the workpiece are uniformly sprayed from the sides of the workpiece 12 toward the workpiece 12, so that the nozzle can be sufficiently suppressed or reduced in a form not in contact with the workpiece 12. [Liquid 2] The non-contact liquid sealing device according to the second embodiment of the present invention will be described with reference to Fig. 6. Fig. 6 (4) is a jet flow discharging portion of the non-contact liquid sealing device of the present embodiment. Fig. 6(b) is a side view of the jet ejecting portion on the workpiece side. The same components as those of the non-contact liquid sealing device according to the first embodiment are denoted by the same reference numerals, and are omitted or simplified. The basic structure of the non-contact liquid sealing device is the same as that of the non-contact liquid sealing device of the embodiment of the invention. The main feature of the non-contact liquid sealing device of the present embodiment is that it is arranged in the vertical direction. Set on Among the plurality of nozzles 36 on the projecting portion 38 of the nozzle plate 34, the more the nozzle holes of the nozzles 36 disposed downward, the longer the shape is in the vertical direction in the vertical direction. The hydraulic pressure of the treatment liquid in the tank 10 is higher toward the lower side from the liquid surface. Therefore, the hydraulic pressure of the treatment liquid to be discharged from the immersion tank 10 is higher toward the lower side of the immersion tank 10. It is preferable that the action of suppressing the outflow of the treatment liquid from the immersion tank 1 is enhanced as it goes below the immersion tank 10. Therefore, as shown in Fig. 6(b), in the present embodiment, the arrangement is arranged in the vertical direction. In the plurality of nozzles on the protruding portion 38 of the jet nozzle plate 34, the more the nozzle hole of the nozzle 36 disposed downward, the longer the shape is in the vertical direction in the vertical direction. The shape of the orifice of the nozzle 36 is changed in the vertical direction. Therefore, the more the nozzle 36 is disposed downward, the more the flow rate of the treatment liquid that is discharged as the jet flow is increased. Therefore, according to the present embodiment, The more it is under / and / below the bay 10, the more it can suppress the outflow of the treatment liquid from the immersion tank. I can sufficiently suppress or reduce the outflow of the treatment liquid from the immersion tank 10. The more the nozzle 36 disposed downward, the more the flow rate of the treatment liquid that is ejected as the jet flow is increased, and It is limited to the above-mentioned structure. For example, it is also possible to arrange the flow nozzle 36 to the lower side, and the flow nozzle 36 has a larger aperture. Further, it may be arranged in a plurality of nozzles 36 arranged in the upper and lower ancient A u , ^ as above. The more the spacing of the nozzle holes is, the more the number of rows of the nozzles arranged in the vertical direction is changed according to the height. The number of rows of the orifices of the nozzles 36 is 125312.doc -22 - 200831719. Further, the spray fluid line 32 can be divided into a plurality of compartments in the up and down direction, and the treatment liquid sprayed from the nozzles 36 is supplied to each of the plurality of compartments, and the lower the zone The flow rate of the supplied treatment liquid is increased. [Third Embodiment] A non-contact liquid sealing apparatus according to a third embodiment of the present invention will be described with reference to Fig. 7 . Fig. 7 (a) is a plan view of the jet ejecting portion in the non-contact liquid sealing device of the embodiment, and Fig. 7 (b) is a side view of the jet ejecting portion on the workpiece side. The same components as those of the non-contact liquid sealing devices of the first and second embodiments are denoted by the same reference numerals and will not be described or simply described. The basic configuration of the non-contact liquid sealing device of the present embodiment is the same as that of the non-contact liquid sealing device of the first embodiment. The main feature of the non-contact liquid two apparatus of the present embodiment is that a slit-shaped nozzle 46 is provided on the jet nozzle plate 34, instead of a plurality of nozzles having a circular orifice. As shown in Fig. 7 (a) and Fig. 7 (b), the jet nozzle plate 34 is provided with a nozzle 46 having a slit shape in the vertical direction. The width of the slit-like nozzle 46 is, for example, wider as it is below. Further, the width of the slit-shaped nozzle 46 may be substantially fixed in the up and down direction. The width of the slit-like nozzle 46 is, for example, about _ mm. The slit-like nozzle 46 is connected to the spray fluid line 32. • The slit-shaped nozzle 46' opposed to the jet nozzle plate 34, which is opposed to the king member 12, is uniformly sprayed with the jet of the treatment liquid from both sides of the workpiece 12 toward the workpiece (four) in the same manner as the plurality of nozzles 36. Thus, a slit-like nozzle 46 may be provided instead of a plurality of nozzles 36 having a circular orifice. [Fourth Embodiment] A non-contact liquid sealing device according to a fourth embodiment of the present invention will be described with reference to Fig. 8'. Fig. 8 is a cross-sectional view showing the structure of the non-contact liquid sealing device of the embodiment. The same components as those of the non-contact liquid sealing devices of the first to third embodiments are denoted by the same reference numerals and will not be described or simply described. The basic configuration of the non-contact liquid sealing device of the present embodiment is the same as that of the non-contact liquid sealing device of the first embodiment. The main feature of the non-contact liquid sealing device of the present embodiment is that a plurality of nozzles 48 are provided on the jet nozzle plate 34. Instead of the plurality of nozzles 36, the plurality of nozzles 48 are oriented toward the direction in which the workpiece 12 moves. In the vertical direction, the plurality of nozzles 36 are oriented in a direction oblique to the direction perpendicular to the moving direction of the workpiece 12 toward the side of the dipping groove 1 as shown in FIG. 8. In the non-contact liquid sealing device 22, the jet is disposed in the jet flow. The jet nozzle plate 34 on the workpiece 12 side of the body line 32 has a flat portion 5 that faces the workpiece 12 in a direction substantially parallel to the direction in which the workpiece 12 moves. The faces on both sides of the flat portion 50 of the jet nozzle plate 34 are inclined faces. A plurality of nozzles 48 are arranged in the range corresponding to the slits 2〇 of the immersion tank 1 ,, and are arranged in the vertical direction on the raking groove 1 平坦 side of the flat portion 5〇, and are connected to the spray fluid line 32. . The orifices of the plurality of nozzles 48 are arranged in a row on the plane of the flat portion 50 facing the workpiece 12, for example, at a substantially constant distance in the up-and-down direction. The orifices of the plurality of nozzles 48 are, for example, circular in the same diameter. Each of the nozzles 48 is oriented in a substantially vertical direction in the direction in which the workpiece 12 moves. Each of the nozzles 48 is directed toward the workpiece 12, and the processing liquid 125312.doc - 24 - 200831719 supplied from the jet fluid line 32 is sprayed as a jet flow, and is ejected substantially horizontally in a substantially vertical direction in the moving direction of the workpiece 12. Between the jet nozzle plates 34, which are disposed opposite to the workpiece 12 and opposed to the jet ejecting portion 24, a jet slit 40 which is opposed to the surface of the flat portion 50 facing the workpiece 12 is formed. Further, between the jet nozzle plates 34 of the pair of jet discharge portions 24, a throat portion 42 whose width is enlarged toward the side of the impregnation groove 1 is formed on the side of the impregnation groove 1 of the jet slit 40. Further, on the side opposite to the impregnation groove 1〇 of the jet slit 40, the throat portion 44 whose visibility is enlarged toward the side opposite to the dipping groove 1 is formed. Regarding the length in the moving direction of the workpiece 12, the throat portion 42 on the side of the immersion groove 1 is longer than the throat portion 44 on the side opposite to the immersion groove 1''. Thereby, between the pair of jet nozzle plates 34 through which the workpiece 12 passes, the throat 42 and the jet flow are formed in the range along the slit 20 of the dipping tank 10 and corresponding to the slit 2〇. The slit 40 and the throat 44. In the jet slit 40, a plurality of nozzles 48 on both sides of the workpiece 12 uniformly eject the jet of the treatment liquid from both sides of the workpiece 朝向2 toward the workpiece. Thus, a plurality of nozzles 48 may be provided on the jet nozzle plate 34 in a substantially vertical direction toward the moving direction of the workpiece 12, instead of being inclined toward the side of the dipping groove 1 in a direction perpendicular to the moving direction of the workpiece 12. A plurality of nozzles 36 in the direction. Further, in the nozzle 48, the shape, the pitch, and the number of rows of the nozzle holes may be changed as in the case of the second embodiment, or the jet fluid conduit 32 may be divided into a plurality of compartments for a plurality of compartments. Each of the supply nozzles determines the discharge of the treatment liquid. 125312.doc -25 - 200831719 [Fifth Embodiment] A non-contact liquid sealing device of the present invention is described with reference to Fig. 9 for each t/month. Fig. 9 is a cross-sectional view showing the structure of the /I# contact liquid sealing device of the embodiment. Furthermore, the same components as those of the non-contact liquid sealing devices of the first to fourth real ribbons, and the music of the first and fourth parties are used, and the same code is used, and Q★μ is omitted and briefly described.

The basic configuration of the non-contact liquid sealing device of the present embodiment is the same as that of the non-contact liquid sealing device of the first embodiment. The main feature of the non-contact liquid sealing device according to the present embodiment is that, in addition to the plurality of nozzles 36 that are inclined toward the direction of the dipping groove 10 in the direction perpendicular to the moving direction of the workpiece (10), the fourth embodiment is In the non-contact liquid sealing device, a plurality of nozzles 48 are provided on the jet nozzle plate 34 in a substantially vertical direction toward the moving direction of the workpiece 12, as shown in Fig. 9, in the non-contact liquid sealing device 22, and are disposed in the spray. The jet nozzle plate 34 on the workpiece 12 side of the fluid line 32 has a flat portion 5 that faces the workpiece 12 in a direction substantially parallel to the direction in which the workpiece 12 moves. The surface of the jet nozzle plate 34 on the side of the dipping groove 10 of the flat portion 5 is farther than the position of the flat portion 50 facing the workpiece 12 from the workpiece 12, and is substantially parallel to the moving direction of the workpiece 12. The surface of the jet nozzle plate 34 on the side opposite to the dipping groove 1 of the flat portion 50 is an inclined surface. The jet nozzle plate 34 has a plurality of nozzles 36 and a plurality of nozzles 48. The plurality of nozzles 36 are disposed on the side of the dipping groove 1 of the flat portion 50, and the plurality of nozzles 48 are disposed in the flat portion 50. It is at a position farther from the immersion tank 10 than the nozzle 36. A plurality of nozzles 36 are arranged in the range of 125312.doc -26-200831719 corresponding to the slit 20 of the immersion tank 1 in the vertical direction on the side of the immersion tank 10 of the flat portion 50 of the jet nozzle plate 34. And connected to the spray fluid line 32. The orifices of the plurality of nozzles 36 are arranged in a row on the corners of the flat portion 50 facing the workpiece 12, for example, in the upper and lower directions. The orifices of the plurality of nozzles 36 are, for example, circular in the same diameter. Each of the nozzles 63 is oriented in a direction inclined toward the direction of the dipping groove 10 with respect to the vertical direction of the moving direction of the workpiece 丨2. Each of the nozzles 36 is directed toward the workpiece 12, and the processing liquid supplied from the jet fluid line 32 is sprayed as a jet flow, and is ejected substantially horizontally in a direction oblique to the side of the dipping groove 1 in the direction perpendicular to the moving direction of the workpiece 12. On the other hand, the plurality of nozzles 48 are arranged in the vertical direction in the range corresponding to the slits 20 of the immersion tank 10, and the nozzles 36 are arranged farther from the immersion tank 10 in the vertical direction. The position is connected to the spray fluid line 32. The orifices of the plurality of nozzles 48 are arranged in a row on the plane of the flat portion 50 facing the workpiece 12, for example, in a substantially fixed distance in the up-and-down direction. The orifices of the plurality of nozzles 48 are, for example, circular in the same diameter. Each of the nozzles 48 is oriented in a substantially vertical direction in the direction in which the workpiece 12 moves. Each of the nozzles 48 is directed toward the workpiece 12, and the spray fluid line, such as the supplied treatment liquid, is ejected substantially horizontally in a substantially vertical direction in the direction in which the workpiece 12 moves. Between the jet-discharging portions (four) of the jet-flow nozzle plates 34, which are arranged in the opposing direction, a jet slit 40 which is opposed to the surface of the workpiece 12 by the flat (four) is formed. Further, between the jet nozzle plates μ of the jet flow ejecting portion 24, a throat portion 42 having a substantially constant width is formed on the side of the impregnation groove 1 of the flow slits 125312.doc • 27 - 200831719. Further, on the side opposite to the dipping groove 1 喷 of the jet slit 40, a throat portion 44 whose width is enlarged toward the side opposite to the dipping groove 10 is formed. Thereby, between the pair of jet nozzle plates 34 through which the workpiece 12 passes, a throat 42 and a jet slit are formed in a range along the slit 20 of the dipping groove 1 and corresponding to the slit 20. 40, and the throat 44 is in the jet slit 40, and a plurality of nozzles 36 in the oblique direction from both sides of the workpiece 12 are uniformly sprayed toward the workpiece 12 from the sides of the workpiece 12 and A plurality of nozzles 48, which are oriented in a substantially vertical direction from both sides of the workpiece 12, uniformly discharge a jet of the treatment liquid from both sides of the workpiece 12 toward the workpiece 12. In this manner, a plurality of nozzles 48 may be provided on the jet nozzle plate 34 while a plurality of nozzles 36 are provided, and the plurality of nozzles 36 are oriented toward the vertical direction with respect to the moving direction of the workpiece 12. The groove 10 is inclined in the direction 'and the plurality of nozzles 48 are oriented substantially perpendicular to the direction in which the workpiece 12 moves. Further, with respect to the nozzles 36, 48, the shape, the pitch, the number of rows of the orifices may be changed as in the case of the second embodiment, or the jet fluid pipe 32 may be divided into a plurality of compartments and a plurality of zones. Each of the chambers supplies the treatment liquid sprayed from the nozzles 36, 48. [71] The second embodiment of the present invention will be described with reference to Figs. 1 and 11 to illustrate a non-contact liquid discharge apparatus and method according to a sixth embodiment of the present invention. Fig. 1 is a plan view showing the non-contact liquid sealing device 1 of the present embodiment, and Fig. 11 is a schematic view showing another example of the sealing roller in the non-contact liquid sealing package 12532.1.doc -28-200831719 of the present embodiment. . Further, the same components as those of the non-contact liquid sealing device of the illusion to the fifth embodiment are denoted by the same reference numerals and are omitted or simplified. In the non-contact liquid sealing device according to the first to fifth embodiments, the outer surface of the side wall 18 on both sides of the slit is opposed to the workpiece 12 passing through the slit 2 (). It is equipped with a pair of jet ejecting sections. By the jet of the treatment liquid uniformly ejected from the jet flow portion 24 toward the workpiece 12 from both sides of the workpiece 12, the both sides of the workpiece 12 are not in contact with the inner surface of the slit 2 () of the impregnation groove 1 and the jet flow. The nozzle plate 34 is in contact with each other, and is stably carried in and out of the dipping tank 1〇. For example, in the case of the f-column, the J1 piece i 2 is a processing surface to which a treatment such as electro-mine treatment is required, and the other surface is a non-treated surface which is not required to be treated or not processed, and the slit is It is not necessary to arrange a pair of jet ejecting portions 24 on both sides of the crucible. In other words, it is possible to use the non-contact liquid sealing device of the first to fifth embodiments in which the workpiece 12 of the slit 2 is prevented from being in contact with the peripheral member and the member on both sides of the guard 12, It is possible to reliably prevent defects such as damage, discoloration, and the like on either side of the two processing surfaces in the case where the processing surface of the workpiece 12 is subjected to a treatment such as an electric recording process.

On the non-processing side of the workpiece 12 of the slit 20, a liquid sealing mechanism in which the non-processing surface of the workpiece 12 is placed on the surface side of the jet ejecting portion 24 is disposed. In the non-contact liquid sealing device of the first to fifth embodiments, the two-surface non-contact type in which both surfaces of the workpiece 12 are in a non-contact state and liquid-sealed is performed, and the non-contact liquid sealing device of the present embodiment is A single-sided non-contact type in which one side of the workpiece 12 is in a non-contact state and liquid-sealed is performed. Specifically, in the non-contact liquid sealing device of the present embodiment, in the case where one surface of the workpiece 12 is 125312.doc -29-200831719 processing surface 12a and the other surface is the non-processing surface 12b, the slit 20 is On the processing surface 12a side of the workpiece 12, the jet ejecting portion 24 is disposed so as not to be in contact with the processing surface 12a, and on the non-processing surface 12b side of the workpiece 12 of the slit 2, the non-contact workpiece 12 is disposed. The sealing drum 82 of the processing surface serves as a liquid sealing mechanism. Fig. 10 shows the structure of the non-contact liquid sealing device 78 of the present embodiment which is provided on the side wall 18 of the workpiece 12 on the loading side of the dipping tank 10. Further, the non-contact liquid sealing device 78 provided on the side wall 丨 8 of the workpiece 12 on the unloading side of the immersion tank 10 has the same structure. As shown in the figure, on the processing surface 12a side of the workpiece 12 of the slit 20, a jet discharge portion 24 of the same type as the first non-contact liquid sealing device of the first %-shaped smear is disposed. The jet ejecting portion 24 is composed of a jet fluid line 32 and a jet nozzle plate 34. The jet fluid line 32 serves as a flow path for the processing liquid from which the jet is ejected, and the jet nozzle plate 34 is provided with the workpiece 12 facing the workpiece 12. The treatment liquid in the spray fluid line is sprayed as a plurality of spray nozzles 36 of the jet flow. Further, the jet discharge portion 24 may be the same as that of the non-contact liquid sealing device of the second to fifth embodiments. Further, in the figure, the side wall of the jet ejecting portion 24 on the side of the dipping groove 10 also serves as the side wall of the dipping groove 10. For example, as in the case shown in Fig. 4, the jet ejecting portion 24 may be separately provided. The side wall and the side wall of the dipping groove 1〇. On the other hand, the outer surface of the side wall 18 on the side of the non-treated surface 12b of the workpiece 12 of the slit 20 is provided with a seal groove 8 which is open to the side of the workpiece. A cylindrical or cylindrical sealing drum 82 that is freely rotatable with the central axis as a rotating station is housed in the sealing groove (10). To seal the drum 82, for example, a tree of rigid metal tubular rigid bodies such as a *', Xenon ethylene or Teflon (registered trademark) 125,123.doc -30-200831719. The outer circumferential surface of the sealing drum 82 may be a smooth surface, or a plurality of grooves may be provided along the axial direction of the sealing drum 82 over the entire outer circumference. Further, the seal roller 82 may have a segment structure in which a large diameter portion having a large diameter is formed in the vicinity of the upper end and the lower end. A hammer (not shown) is provided at the bottom of the inside of the sealing drum 82 to stabilize the posture of the sealing drum 82. A central portion of the lower end and the upper end of the seal roller 82 is provided with a recess. The concave portion at the lower end is fitted to the convex portion provided at the bottom of the seal groove 80. Further, the concave portion at the upper end is fitted to the convex portion provided at the upper portion of the seal groove 80. A suitable gap is provided as a margin between the recesses and the projections. Thereby, the seal cylinder 82 can be prevented from falling over in the seal groove 8, and the rotation center shaft can be moved in the horizontal direction. Further, the recessed portion and the convex portion may not be provided, and the sealing roller 82 may be housed in the sealing groove 8 by providing an appropriate gap as a margin, thereby preventing the sealing roller 82 from falling over and rotating the sealing roller 82 freely. . As described above, the main feature of the non-contact liquid sealing device 78 of the present embodiment is that the jet ejecting portion 24 disposed on the processing surface i2a side of the workpiece 12 of the slit 20 and the workpiece 12 disposed in the slit 20 are provided. The sealing roller 82 on the non-processing surface 12b side. During the loading and unloading of the workpiece 12 into the immersion tank 1 , the processing liquid is supplied to the nozzle tube in the jet venting portion 24 disposed on the processing surface 12 a side of the workpiece 12 of the slit 2 同样 in the same manner as in the first embodiment. In the path 32, a jet of the treatment liquid is ejected from a plurality of nozzles 36 of the jet nozzle plate 34. Thereby, in the jet flow ejecting portion 24, the jet flow of the processing liquid is ejected toward the processing surface 12a of the workpiece 12 by the nozzles 63 of the jet nozzle plate 34. In this manner, on the processing surface i2a side of the workpiece 12 of the slit 20, the jet flow is ejected from the outlet portion 24 of the jet flow 125312.doc - 31 - 200831719, whereby the outflow of the treatment liquid from the slit 2 is suppressed or reduced. On the other hand, the processing liquid in the immersion tank 1 is filled with the sealing groove 8 through the slit 20, and the sealing groove 80 accommodates the sealing roller 82 disposed on the non-treated surface 12b side of the workpiece 12 of the slit 20. The seal roller 82 is automatically pressed against the non-treated surface 12b of the workpiece 12 by the hydraulic pressure of the treatment liquid, and is pressed against the side wall of the seal groove 80 facing the side wall 18 of the immersion tank 1 。. Thereby, the seal roller 82 is adhered to the non-treated surface i2b of the workpiece 12, and is adhered to the side wall of the seal groove 80. The seal roller 82, which is adhered to the non-treatment surface 12 of the workpiece 12, rotates in accordance with the movement of the workpiece 12. In this manner, on the non-treated surface 12b side of the workpiece 12 of the slit 20, the flow of the treatment liquid from the slit 20 is reduced or suppressed by the seal roller 82 adhering to the non-treated surface 12b of the workpiece 12. Here, the force of pressing the workpiece 12 by the processing liquid discharged from the jet ejecting unit 24 is equalized with the force of pressing the sealing roller 82 against the workpiece 12, and the processing liquid discharged from the jet ejecting unit 24 is controlled. The flow rate is such that the processing surface 12a of the workpiece 12 does not come into contact with the peripheral nozzle member or the like of the jet nozzle plate. Further, it is preferable for the respective nozzles 36 of the jet discharge portion 24 to appropriately set the orientation thereof. The processing liquid is ejected to the sealing drum 82 and the workpiece 12 and the contact #. For example, in the same manner as in the first embodiment, each of the nozzles 6 faces the vertical direction of the moving direction of the workpiece toward the dip tank 1 side. In the case of the inclined direction, the direction of each of the nozzles 36 is set to be inclined toward the side of the dipping tank 10, so that the processing liquid is directed from the respective nozzles 63 toward the sealing drum 125312.doc •32·200831719 82 and the workpiece The contact portion of 12 is ejected, and the position of the workpiece 12 moving between the jet ejecting portion 24 and the sealing roller 82 is further stabilized by the discharge of the processing liquid toward the contact portion of the sealing drum η and the workpiece 12. Thus, in the present embodiment, Form In the contact liquid sealing device 78, the jet flow is ejected from the jet ejecting portion on the processing surface 12a side of the workpiece 12 of the slit 20, thereby maintaining the peripheral portion such as the processing surface 12a of the workpiece 12 and the jet nozzle plate 34. #, the non-contact state of the part, and suppress or reduce the treatment liquid from the slit 20, "L out. On the other hand, in the non-processing surface m of the workpiece 12 of the slit 20, the debt is made by the ' The sealing roller 82 that is in contact with the non-processing surface 12b of 12 reduces or suppresses the outflow of the processing liquid from the slit 20. On the non-treated surface 12b side of the workpiece 12, the liquid is sealed by the sealing roller 82 that is in contact with the non-processing surface 12b of the workpiece 12. Since it is sealed, it is possible to suppress or reduce the outflow of the treatment liquid from the slit 20 of the dipping tank 1 in comparison with the non-contact liquid sealing device of the second to fifth embodiments in which the pair of jet ejecting portions 24 are used. On the other hand, since the liquid ejecting portion 24 is liquid-sealed on the processing surface 12a side of the workpiece 12, it is possible to reliably prevent defects such as damage and discoloration on the processing surface of the workpiece n. Thus, according to the present embodiment, Processing one of the faces as the processing surface l2a, the other side In the case of the workpiece 12 of the non-treatment surface 12b, it is possible to reliably prevent defects such as damage and discoloration of the processing surface 12a of the workpiece 12, and it is possible to improve or suppress the flow of the slit 2〇 of the treatment liquid immersing tank 1 As described above, the sealing roller 82 adhered to the non-processing surface 12b of the workpiece 12 has been rotated in accordance with the movement of the workpiece 12. The sealing roller 82 can also be rotated by a motor such as a wheel motor of 125312.doc -33-200831719. The sealing roller (four) functions not only as a liquid sealing mechanism but also as a conveying mechanism for conveying the workpiece 12. Fig. 11 shows a configuration in which the Xiang gear motor 84 rotates the sealing roller. As shown in the figure, the seal roller 82 is rotatably supported by the bearings 86a, 86b provided on the upper and lower sides thereof. The rotation of the output shaft of the gear motor 84 is transmitted to the seal roller 82 via the coupling 88. This is caused by the gear motor 84, so that the seal roller a is rotated to convey the workpiece 12.

In this manner, the gear (four) cylinder 82 can be rotated by the gear motor 84. The seal roller (four) functions not only as a liquid sealing mechanism but also as a conveying mechanism. Further, in the above, the case where one surface of the workpiece 12 is the processing surface i2a and the other surface is the non-processing surface 12b has been described. The non-contact liquid sealing of the present embodiment can also be used for the workpiece having the two surfaces as the processing surface. Device. [Seventh embodiment] A continuous wet processing apparatus according to a seventh embodiment of the present invention will be described with reference to Fig. 12'. Fig. 12 is a plan view showing the structure of the continuous wet processing apparatus of the embodiment. The same components as those of the non-contact liquid sealing devices of the first to sixth embodiments are denoted by the same reference numerals, and the description thereof will be omitted or simplified. In the above-described first to sixth embodiments, the case where the non-contact liquid sealing devices 22 and 78 are used for the wet processing apparatus including the one dipping tank 1〇 has been described, and the non-contact liquid sealing device of the present invention is used. The scope of application is not limited to this. The non-contact liquid sealing device of the present invention can be used, for example, as a continuous wet processing device as disclosed in Patent Application No. 4 of the present application, which can also be used as a plurality of 125312.doc -34 - 200831719 / The liquid sealing device in the continuous wet processing device which applies the wet treatment to the groove and the guard. In the continuous wet processing apparatus of the present invention, the non-contact liquid sealing apparatus of the first embodiment is used as the liquid sealing apparatus. As shown by β 囷 2, the continuous wet processing apparatus is composed of a plating processing unit 52, a workpiece development unit 54, and a guard winding unit 56, and the electric ore processing unit 52 performs plating processing, and the workpiece development unit 54 is continuously The strip-shaped workpiece I2 to which the electric ore is applied is sent to the plating treatment portion 52, and the workpiece winding portion $6 is used for continuously recovering the workpiece 2 which has been plated in the electric ore processing unit 52. The workpiece unwinding unit 54 is provided with a uncoiler 58 that winds up the strip-shaped workpiece 12 in a roll shape, which is fed in the longitudinal direction in a substantially vertical direction, and is introduced into the plating processing unit 52. . Between the uncoiler 58 and the plating processing unit 52, an accumulating device 60 for holding the tension of the workpiece 12 sent from the uncoiler 58 is fixed. The accumulating device 60 adjusts the position of the workpiece 12 from the side of the workpiece, and further includes rollers 6A, 60b, 60c, and 60d for folding the workpiece 12. The plating treatment unit 52 has a plurality of plating tanks 62a, 62b, 62c, and 62d filled with a plating solution. In each of the plating tanks 62a, 62b, 62c' 62d, for example, the non-contact liquid sealing device 22 of the first embodiment is provided on the opposite side wall, and the workpiece 12 is substantially vertical in the width direction, and one of the side walls is passed through The non-contact liquid sealing device 22 is carried into the plating tanks 62a, 62b, 62c, and 62d. The workpiece 12 carried into the plating tanks 62a, 62b, 62c, 62d is moved out of the plating tanks 62a, 62b, 62c, 62d via the non-contact liquid sealing device 22 of the other side wall while maintaining the state unchanged 125312.doc -35 - 200831719 outer. The workpiece turning side of the plating tank 62b and the workpiece loading side of the plating tank 62c are provided with a us turning portion 64'. The U-turn portion 64 is a workpiece 12 for carrying out the non-contact liquid sealing device 22 of the plating tank 62b. The direction of the transition is transferred to the plating tank 62c via the non-contact liquid sealing device 22. The U-turn portion 64 is provided with rollers 64a and 64b for switching the direction of the workpiece 12, and the workpiece carrying side and the workpiece are moved to the respective plating tanks 62a, 62b, 62c, and 62d.

In the vicinity of the non-contact liquid sealing device 22 on the exit side, a power supply roller portion 66 for supplying power to the workpiece 2 is provided. The power supply roller unit 66 is disposed so as to sandwich the workpiece 12, and includes power supply rollers 66a, 66b, and 66c that are in contact with the workpiece 12 and supply power thereto between the workpiece loading side of the plating tank 62a and the workpiece development portion 54. A pretreatment tank 68 is provided for removing dirt on the workpiece 12 sent from the workpiece development portion 54. For the pretreatment tank 68 filled with the treatment liquid, a non-contact liquid sealing device 22 of the i-th embodiment may be provided in the same manner as the plating tanks 62a, 62b, 62c, and 62d. In the vicinity of the non-contact liquid sealing device 22 on the workpiece carrying-out side of the plating tank 62d, cleaning of the sprayed mm member 12 is provided. Near the cleaning chamber 7〇, there is a drying chamber 72 that has been hot-air dried in the cleaning chamber (4). In the chamber 72, in the vicinity of the drying chamber 72, a workpiece winding portion 56 for winding and recovering the workpiece 12 which has been dried and dried is disposed. In the workpiece winding portion 56, the plating treatment portion 52 is plated with a rewinding machine 74, and the rewinding machine 74 is supplied with electricity and delivered in the width direction A to lead I. 125312.doc -36·200831719 The workpiece 12 is wound up and recovered. Between the rewinding machine 74 and the drying chamber 72 of the plating processing unit 52, there is no driving device 76 for driving the workpiece 12 to the rewinding machine 74 at a specific speed. The driving device 76 is provided to cause the workpiece 12 to be folded back or changed. The rollers 12a, 76b, and 76c in the direction in which the workpiece 12 moves. Thereby, the workpiece 12 fed from the workpiece development portion 54 in the longitudinal direction in the form of a substantially vertical direction is sequentially passed through the pretreatment tank 68' of the plating treatment portion 52, the electric ore tanks 62a, 62b, 62c, 62d, and the cleaning chamber. After 7 〇 and the drying chamber 72, it is recovered by the workpiece winding portion 56. As in the present embodiment, the non-contact liquid sealing device 22 of the first embodiment can be provided, for example, in the plating tanks 62a, 62b, 62c, and 62d and the pretreatment tank 68 in the continuous wet processing apparatus. In the above, the non-contact liquid sealing device 22 of the second embodiment is provided as the liquid sealing device in the continuous wet processing device, and the non-contact liquid sealing device 22 of the second to sixth embodiments may be provided. One of 78 is substituted for the non-contact liquid sealing device 22 of the first embodiment. [Eighth Embodiment] A continuous wet processing apparatus according to an eighth embodiment of the present invention will be described with reference to Fig. 13 . Fig. 13 is a plan view showing the structure of the continuous wet processing apparatus of the embodiment. The same components as those of the non-contact liquid sealing device of the sixth to sixth embodiments and the continuous wet processing device of the seventh embodiment are denoted by the same reference numerals and will not be described or simply described. In the continuous wet processing apparatus of the present embodiment, the workpiece 12 having one surface as the processing surface 12a and the other surface being the non-processing surface 12b is treated as a processing pair. The basic configuration of the continuous wet processing apparatus of the present embodiment is almost the same as that of the continuous wet processing apparatus of the seventh embodiment of the present invention, and is different from the continuous wet processing apparatus of the seventh embodiment. The non-contact liquid sealing device 78 of the sixth embodiment is used as the liquid sealing device, and each member is disposed so as to avoid contact with the processing surface 12a of the workpiece 12 as much as possible. As shown in Fig. 13, the workpiece 12 is wound onto the uncoiler 58 in a roll shape with the processing surface 2a being inside.

In the accumulating device 60, the rollers 60a, 60d for adjusting the position of the workpiece 12 from the side of the workpiece 12, and the rollers 6〇b, 6 for reversing the workpiece 12 (only the roller 60b is in contact) The processing surface 12a of the workpiece 12, the other rollers 6A, 60c, 60d contact the non-processing surface ub of the workpiece 12. In each of the power supply roller portions 66, a power supply roller disposed on the processing surface ua side of the workpiece 12 66a' and the two power supply rollers 66b, 66c' disposed on the non-processing surface (3) side of the workpiece 12 sandwich the workpiece 12. In each of the power supply roller portions 66, one power supply roller 66a contacts the processing surface of the workpiece 12, as opposed thereto. The two power supply rollers 66b and 66c are in contact with the non-processing surface 12b of the workpiece 12; and the non-contact liquid sealing devices of the sixth embodiment are respectively disposed on the opposite side walls of the electric ore grooves 62a, 62b, 62C, and 62d. 78. The workpiece is carried into the plating tanks 62a, 62b, 62c, 62d via the non-contact liquid sealing device 78 of the side wall in the form of a substantially vertical direction in the = direction. It is carried into the plating tank: a, 62b' 62e, 62d. The workpiece 12' remains in the same state via the non-contact liquid sealing device 78 of the other side wall. Out of the plating baths "a, 62c, 62d. As in the case shown in Figure ι, in each non-contact liquid sealing device 78, in the work 125312.doc -38-200831719 on the workpiece 12 of the non-piece 12 processing surface The sealing drum a is disposed on the side of the processing jet surface of the i2a side, and the sealing drum a is disposed on the side of the processing surface 12b. Further, the pretreatment tank 68 may be provided in the same manner as the plating tanks 62 & 6 and 62 c and 62 d. The liquid sealing device π is contacted. In the U-turn portion 64, the rollers 64a to 64b for switching the direction of the crucible 12 are in contact with the non-processing surface 12b of the workpiece 12. In the driving device 76, the roller for reciprocating the workpiece 12鸠

Among the rollers 76e for changing the moving direction of the workpiece 12, only the roller, the processing surface m contacting the workpiece 12, and the other rollers 7 complement, π. The non-treated surface 12b of the workpiece 12 is contacted. In the rewinding machine 74, the workpiece 12 is wound back inside the processing surface 12a. In the continuous wet processing apparatus of the present embodiment, one of the surfaces is the processing surface 12a and the other surface is the non-processing surface 12b. The workpiece 12 is a liquid sealing device using the non-contact liquid sealing device 78 of the sixth embodiment, and further, each member is disposed so as to avoid contact with the processing surface i2a of the workpiece 12 as much as possible. That is, in the accumulating device 60, the number of rollers contacting the non-treated surface 12b of the workpiece 12 is larger than the number of rollers contacting the processing surface 12a of the workpiece 12. Further, in each of the power supply roller portions 66, the number of power supply rollers contacting the non-processing surface 12b of the workpiece 12 is larger than the number of power supply rollers 66a contacting the processing surface 12a of the workpiece 12. In the u-turn portion 64, the roller does not contact the processing surface 12a of the workpiece 12. In the driving device 76, the number of rollers contacting the non-processing surface 12b of the workpiece 12 is also larger than the number of rollers contacting the processing surface 12a of the workpiece 12. 1253l2.doc -39- 200831719 Therefore, according to the present embodiment, in the case where the workpiece 12 in which one surface is the processing surface 12a and the other surface is the non-processing surface 12b is treated, it is sinly prevented from being processed by the workpiece 12. The surface i2a has defects such as damage and discoloration caused by contact with the components in the continuous wet processing apparatus, and can further suppress or reduce the outflow of the treatment liquid from the slit 2 of the immersion tank 1〇. [Modifications] The present invention is not limited to the above embodiments, and various modifications are possible. + For example, in the above embodiment, the jet flow of the same treatment liquid as the treatment liquid filled with the impregnation tank 1 is discharged from the nozzles %, 46, 48, but by the nozzles 36, 46 The fluid discharged as a jet stream is not limited to the same treatment liquid as the treatment liquid filled in the impregnation tank 10. It is also possible to eject a liquid such as a treatment liquid or water which is different from the impregnation tank by the jets 36 46 and 48. Further, the fluid ejected from the nozzles 36, 46, 48 is not limited to a liquid, and a gas such as air may be ejected from the nozzles 36, 46, 48. In addition, it is also possible to express a gas such as t gas that does not deteriorate the electricity applied to the workpiece and the workpiece. Further, the gas-liquid mixed fluid obtained by mixing the gas and the liquid may be ejected from the nozzles 36, 46, and 48. When the gas is ejected from the nozzles 36, 46, 48, the amount of liquid outflow can be reduced as compared with the case of ejecting the liquid. Further, in the above embodiment, the width of the jet slit 4 is substantially fixed in the upper and lower directions, and the width of the jet slit 4 is not substantially fixed. For example, it is also possible to make the width of the jet slit 4 越 narrower toward the lower side. The narrower the width of the jet slit 4〇 is, the lower the hydraulic pressure of the treatment liquid is, whereby the flow of the treatment liquid from the immersion tank 125312.doc -40·200831719 ίο can be further suppressed or reduced. Further, in the above embodiment, the case where the spray fluid line 32 is a square tubular shape has been described, but the spray fluid line 32 is not limited to the square tubular shape. For example, the jet body path 32 can also be a circular tube. In this case, as shown in Fig. 14, a plurality of nozzles 36 may be directly disposed on the circular tubular spray fluid line 32. Further, in the above-described embodiment, the nozzle % in the direction inclined toward the side of the dipping groove 1 in the direction perpendicular to the moving direction of the workpiece 12, and the nozzle in the substantially vertical direction in the moving direction of the workpiece 12 have been described. Any one or both of the materials are provided on the jet nozzle plate 34, but the orientation of the nozzle is not limited thereto. For example, the jet nozzle plate 34 may be provided with a nozzle which is inclined in a direction perpendicular to the moving direction of the workpiece 12 toward the side opposite to the dipping groove. Further, these nozzles may be appropriately combined and disposed on the jet nozzle plate 34. Further, in the above embodiment, the width of the slit 2〇 of the dipping groove 1 is substantially fixed in the vertical direction, and even the width of the slit 2〇 is described.

It is not roughly fixed. For example, the width of the slit 2〇 may be made narrower as it goes downward. The narrower the width of the slit 2 is, the lower the hydraulic pressure of the treatment liquid is, and the flow of the treatment liquid from the immersion tank 1 充分 can be sufficiently suppressed or reduced. U Gongming is respectively inserted into the dipping tank 10, and a non-contact liquid sealing device 22, 78 is disposed on each of the above-mentioned embodiment loading side and the guard carrying side, and a plurality of non-contact liquid sealing devices may be successively disposed. 22, 78. The flow of the treatment liquid from the immersion tank 1 充分 is sufficiently suppressed or reduced by sequentially setting a plurality of non-contact liquid sealing devices 22 m in succession. Further, in the above embodiment, the case where the seal roller 82 is disposed on the non-treated surface 12b side of the workpiece 12 has been described, but the non-treatment for sealing the workpiece 12 of the treatment liquid from the slit 20 has been described. The liquid sealing mechanism that flows out on the surface 12b side is not limited thereto. In the liquid sealing mechanism, for example, a slit, a rubber, or the like may be provided along the slit 2, along with the slit 20 so as to contact the non-treated surface 12b of the workpiece 12. A component to replace the sealing drum 82. Further, a sealing drum that is fixed without rotating may be provided. INDUSTRIAL APPLICABILITY The non-contact liquid sealing device and method of the present invention are carried out by loading and unloading a single piece or a strip-shaped workpiece in a substantially vertical direction in the width direction through a side wall slit of a dipping tank filled with a processing liquid. When the tank is immersed, it is extremely useful for preventing defects in the workpiece and reducing the outflow of the treatment liquid from the immersion tank. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view (No. 1) showing a structure of a wet processing apparatus including a non-contact liquid sealing apparatus according to a first embodiment of the present invention. Fig. 2 is a schematic view (No. 2) showing a structure of a wet processing apparatus including a non-contact liquid sealing device according to a first embodiment of the present invention. Fig. 3 is a schematic view (No. 3) showing the structure of a wet processing apparatus including the non-contact liquid sealing apparatus according to the first embodiment of the present invention. Fig. 4 is a schematic view (No. 1) showing a non-contact liquid package according to an i-th embodiment of the present invention. 5(a) and 5(b) are schematic diagrams (No. 2) showing the structure of the non-contact liquid package according to the i-th embodiment of the present invention. Fig. 6 (a) and (b) are schematic views showing the structure of the non-contact liquid package 125312.doc-42-200831719 according to the second embodiment of the present invention. Fig. 7 (a) and (b) are schematic views showing the structure of the non-contact liquid sealing device according to the third embodiment of the present invention. Fig. 8 is a cross-sectional view showing the skin of the non-contact liquid sealing device according to the fourth embodiment of the present invention. Fig. 9 is a cross-sectional view showing the structure of a non-contact liquid seal agricultural plant according to a fifth embodiment of the present invention. σ

Fig. 10 is a cross-sectional view showing the manufacture of the non-contact liquid sealing device according to the sixth embodiment of the present invention. Fig. 11 is a schematic view showing another example of the sealing drum in the non-contact liquid sealing device according to the sixth embodiment of the present invention. Fig. 12 is a plan view showing the structure of a continuous wet type according to a seventh embodiment of the present invention. Fig. 13 is a plan view showing the continuous wet processing structure of the eighth embodiment of the present invention. ,

Figure 14 is a cross-sectional view showing the non-contact liquid package of the present invention. [Main component symbol description] of other examples of construction 10 Infusion tank 12 Workpiece 12a Processing surface 12b Non-processing surface 14 Processing liquid storage tank 16 Pump 125312.doc 43· 200831719 18 Side wall 20 Slit 22 Non-contact liquid sealing device 24 Jet spout 26 Flow regulating valve 28 FIC (Flow Index Controller) 30 Receiving tray 32 Spray fluid line 34 Jet nozzle plate 36 Spray nozzle 38 Projection 40 Spray slit 42 Throat 44 Throat 46 Jet Mouth 48 nozzle 50 flat portion 52 plating processing portion 54 workpiece developing portion 56 workpiece winding portion 58 uncoiler 60 accumulating devices 60a, 60b, 60b, 60c rollers 62a, 62b, 62c, 62d plating tank 125312.doc - 44 - 200831719 64 U-turn part 66 Power supply roller part 66a, 66b, 66c Power supply roller 68 Pretreatment tank 70 Cleaning chamber 72 Drying chamber 74 Rewinding machine 76 Drive unit 76a, 76b, 76c Roller 78 Non-contact liquid sealing device 80 Sealing groove 82 sealing roller 84 gear motor 86a, 86b bearing 125312.doc -45-

Claims (1)

200831719 X. Patent application scope · A non-contact liquid sealing device, characterized in that: a single piece or a strip-shaped workpiece is directly provided with a σ portion which is substantially offset by a width direction and filled with a liquid impregnation groove In contact with the liquid sealing device, the non-contact liquid county includes: • .甬::: the outlet portion is disposed on the side of the opening, the jet toward the body, and the jet from the side of the towel. The sealing portion is disposed on the other side of the opening to seal the outflow of the liquid from the other side of the opening. 2. The non-contact (four) sealing device of the request, wherein the liquid sealing portion is disposed on the other side of the opening, and sprays a jet of a fluid from the other side toward the workpiece passing through the opening Flow spout. 3. The non-contact liquid sealing device according to claim 2, wherein a gap between the jet ejecting portion disposed on a side of the opening portion and the jet ejecting portion disposed on the other side of the opening portion is The more downward, the narrower the Φ width. 4. The non-contact liquid sealing device according to claim 1, wherein the liquid sealing portion is disposed on the other side of the opening portion and in contact with the other side surface of the workpiece. 5. The non-contact liquid sealing device of any one of claims 1 to 4, wherein the jet ejecting portion comprises: a jet fluid line supplied with the fluid; and a jet nozzle disposed in the jet fluid line The workpiece side is sprayed with the jet stream. 125312.doc 200831719 6. The non-contact liquid seal of claim 5 is oriented perpendicular to the workpiece movement / in a direction inclined to the opposite side of the nozzle. The direction of the direction 'is toward the above-mentioned immersion tank 7 · The non-contact of the request item 5 is perpendicular to the moving direction of the workpiece: the direction in which the above nozzle nozzle is oriented toward 8. The non-contact of any of the items _ 5 to 7 The liquid ejecting device flow ejecting portion has a nozzle which is arranged in the upper, middle, and middle portions. The orifices are each circular. And the non-contact liquid sealing device of the plurality of nozzles 10.2, wherein the above-mentioned complex = hole system is below the nozzle hole of the nozzle nozzle. 11. In claims 8 to 10 a non-contact liquid sealing device of any of the above-mentioned details, wherein the arrangement of the nozzles of the plurality of nozzles in the lower direction is downward The non-contact liquid sealing device according to any one of the items 1 to 11, wherein the width of the opening portion is narrower as it goes downward. 13. A non-contact liquid sealing method, characterized in that: the side wall of the system is provided with a single piece or a strip-shaped workpiece which is substantially misaligned in the width direction and is filled with a liquid impregnation groove. In the contact liquid sealing method, when the workpiece passes through the opening 装 of the immersion tank filled with the liquid, a jet of fluid is ejected from both sides of the workpiece toward the workpiece passing through the opening, and the jet is used to Contact form 125312.doc 200831719 Seal the above opening. A non-contact liquid sealing method, characterized in that: the non-contact liquid which is provided with a single-plate dipping groove on the side wall is an opening portion which is slightly vertical in the width direction. And the liquid sealing method is carried out, wherein the liquid sealing portion is disposed on the side of the opening portion, and the liquid sealing portion is in contact with the side surface of the upper portion to seal the liquid from above. When the workpiece passes through the opening portion of the dipping groove filled with the liquid, the workpiece passes toward the workpiece passing through the opening, and the fluid flows out from the other side of the opening, and the jet is used. The outflow of the liquid from the other side of the opening is sealed in a non-contact manner. 125312.doc