TW200830951A - Positioning structure of vacuum chamber - Google Patents
Positioning structure of vacuum chamber Download PDFInfo
- Publication number
- TW200830951A TW200830951A TW96100392A TW96100392A TW200830951A TW 200830951 A TW200830951 A TW 200830951A TW 96100392 A TW96100392 A TW 96100392A TW 96100392 A TW96100392 A TW 96100392A TW 200830951 A TW200830951 A TW 200830951A
- Authority
- TW
- Taiwan
- Prior art keywords
- lower plate
- wheel body
- positioning
- positioning structure
- vacuum chamber
- Prior art date
Links
- 230000000694 effects Effects 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 230000000750 progressive effect Effects 0.000 description 2
- 241000238876 Acari Species 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Handcart (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96100392A TW200830951A (en) | 2007-01-05 | 2007-01-05 | Positioning structure of vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96100392A TW200830951A (en) | 2007-01-05 | 2007-01-05 | Positioning structure of vacuum chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200830951A true TW200830951A (en) | 2008-07-16 |
| TWI341147B TWI341147B (cg-RX-API-DMAC7.html) | 2011-04-21 |
Family
ID=44818410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96100392A TW200830951A (en) | 2007-01-05 | 2007-01-05 | Positioning structure of vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200830951A (cg-RX-API-DMAC7.html) |
-
2007
- 2007-01-05 TW TW96100392A patent/TW200830951A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWI341147B (cg-RX-API-DMAC7.html) | 2011-04-21 |
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