TW200827086A - Cooling device of linear module - Google Patents
Cooling device of linear module Download PDFInfo
- Publication number
- TW200827086A TW200827086A TW95149522A TW95149522A TW200827086A TW 200827086 A TW200827086 A TW 200827086A TW 95149522 A TW95149522 A TW 95149522A TW 95149522 A TW95149522 A TW 95149522A TW 200827086 A TW200827086 A TW 200827086A
- Authority
- TW
- Taiwan
- Prior art keywords
- cooling
- cooling device
- linear module
- moving member
- module according
- Prior art date
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 102
- 238000005057 refrigeration Methods 0.000 claims description 19
- 238000003780 insertion Methods 0.000 claims description 13
- 230000037431 insertion Effects 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims description 9
- 238000005096 rolling process Methods 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 15
- 238000013461 design Methods 0.000 abstract description 4
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 239000002826 coolant Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000005574 cross-species transmission Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Transmission Devices (AREA)
- Bearings For Parts Moving Linearly (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95149522A TW200827086A (en) | 2006-12-28 | 2006-12-28 | Cooling device of linear module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95149522A TW200827086A (en) | 2006-12-28 | 2006-12-28 | Cooling device of linear module |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200827086A true TW200827086A (en) | 2008-07-01 |
| TWI298282B TWI298282B (enrdf_load_stackoverflow) | 2008-07-01 |
Family
ID=44817107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95149522A TW200827086A (en) | 2006-12-28 | 2006-12-28 | Cooling device of linear module |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200827086A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI767058B (zh) * | 2017-09-21 | 2022-06-11 | 日商迪思科股份有限公司 | 加工裝置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI394905B (zh) | 2009-08-28 | 2013-05-01 | Ind Tech Res Inst | 進給驅動機構及其連接組件 |
| TWI479094B (zh) * | 2011-12-05 | 2015-04-01 | Hiwin Tech Corp | 具有冷卻裝置的滾珠螺桿 |
| JP6008934B2 (ja) | 2014-12-25 | 2016-10-19 | Thk株式会社 | 運動案内装置用冷却ノズル、冷却ノズル付き運動案内装置及び運動案内装置用冷却システム |
-
2006
- 2006-12-28 TW TW95149522A patent/TW200827086A/zh unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI767058B (zh) * | 2017-09-21 | 2022-06-11 | 日商迪思科股份有限公司 | 加工裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI298282B (enrdf_load_stackoverflow) | 2008-07-01 |
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