200821587 九、發明說明： 【發明所屬之技術領域】 本發明是關於一種測量襄置以及測量方法。本發明特 別是關於-種對電子元件所消耗的電流進行測量的^量裝 置以及測量方法。 & 【先前技術】 在習知技術中，測試裝置具有對被測試元件的靜止時 的消耗電流進行測量的機能（例如參照非專利文獻工〜 〇 3。）。賴裝置利用可輸出大電流的放大器，作為被賴 元件的電源用放大器。但是，當利用可輸出大電令 器時，無法精度良好地對靜止消耗電流進行測量。因此， 習知的測試裝置是藉由另外預先準備一種雖然電流供給能 力低’但可南精度地測里電流的放大器，並在靜止電流的 測量時切換到靜止電流測試用的放大器，從而實現靜止電 流測量的高精度化。 〔非專利文獻1〕橋本好弘、伊澤蕙治〔Advantest使 y LSI測量器的Iddg測試提高20倍的高速〕，1997年7月7 日號《日經電子》的P85，日經BP社，1997年7月 〔非專利文獻 2〕Nobuhiro Sato，Yoshihiro Hashimoto，“A High Precision Iddg Measurement System with Improve Dynamic Load Regulation” ，USA ， ITC2003,2003 年，P 410 Paper 15?2 〔非專利文獻 3〕Rachit Rajsman，“Iddg Testing For CMOS VLST”，USA，Artech Ho use INC.，1995，P141 6 200821587200821587 IX. Description of the Invention: [Technical Field] The present invention relates to a measuring device and a measuring method. The present invention is particularly directed to a measuring device and a measuring method for measuring the current consumed by an electronic component. <Prior Art> In the prior art, the test apparatus has a function of measuring the current consumption at the time of stationary of the element under test (for example, refer to Non-Patent Document No. 1-3). The device uses an amplifier that can output a large current as a power supply amplifier for the component to be used. However, when a large electric discharge device can be used, the static consumption current cannot be accurately measured. Therefore, the conventional test apparatus achieves stillness by additionally preparing an amplifier which can measure the current in a low precision even though the current supply capability is low, and switches to the amplifier for the stationary current test during the measurement of the stationary current. High precision of current measurement. [Non-Patent Document 1] Hashimoto Hiroshi, Izawa Yuji (Advantest improves the Iddg test of the y LSI measuring device by 20 times), P85 of the Nikkei Electronics, July 7, 1997, Nikkei BP, 1997 July [Non-Patent Document 2] Nobuhiro Sato, Yoshihiro Hashimoto, "A High Precision Iddg Measurement System with Improve Dynamic Load Regulation", USA, ITC 2003, 2003, P 410 Paper 15? 2 [Non-Patent Document 3] Rachit Rajsman , "Iddg Testing For CMOS VLST", USA, Artech Ho use INC., 1995, P141 6 200821587
Chapter5 動作::靜==:源剩放大器在被測試元件的 可产過被換’測試褒置具有大電流用開關’ 叮抓過被測心件的動 關的動作速度遲緩— IL但疋大包版用開 換到靜止狀態^況，試元件從動作狀態切 間m , 下，到能夠貫現穩定的電流供給之時 間車乂長結果使測量的開始變得遲緩。 【發明内容】 測量=以能夠解決上述課題的 t項所記述之特徵的組合而達成。而且，從屬：:： 發明的更加有利的具體例子。 *屬項規疋了本 壯署為^解決上述課題’本發明的第1形態提供—種、、則曰 置，包括：電源輸^山3耗的電流進行測量的測量裝 出部，其輪出電源電；./、『電子兀件連接；電源電壓輪 流方向彼此相反，而在+ 〃、具有為了使整 並列連接的2個二Si:出端和電源顧輪出部之間 电子兀件所消耗的電流在 况下，使 間流過;靜止時驅動部，其部之 對電源輪出端供給電子元件 β㈤情況下， 端的電屋與電源電璧维二3耗的U使電源輪出 部，其對靜止時驅 靜止時驅動部對輸出電流值進仃測量。 4化的回應速度，可較電源 7 200821587 電壓輸出部高。 靜止時驅動部包括：電壓隨—（讀age f。 電路，其被輸人從電源電壓輸出部所輸出㈣ . 及開閉開關，其被設置在電壓隨麵器電路的 ；乂 =端之間’在電子元件靜止時閉合，在電子元件κ 電源電壓輸出部包括：放大雷 壓使輸入電壓進行負反饋放大 八赭依據回饋電 疋杧皿進订放大的電源電壓；回 甩/-以規 給到放大電路；且回饋電路可在電二杜::將回饋電壓供 電路的輸出電壓作為回饋電壓供時，將放大 子元件動作時，將電源輸出端的‘上=二路’並在電 到放大電略。 土作為回饋電壓以供給 可還具有動作時電流測量部，复 輸出部的輪出電流值進行測量。、在動作日惰電源電壓Chapter5 Action::Static==: The source-remaining amplifier can be produced in the tested component. The tester has a high-current switch. 叮The speed of the movement of the measured core is slow. IL is too large. When the plate is switched to the stationary state, the test element is cut from the operating state to m, and the time until the stable current supply can be achieved results in a slow start of the measurement. SUMMARY OF THE INVENTION Measurement = A combination of features described in item t that can solve the above problem is achieved. Moreover, subordinates::: A more advantageous specific example of the invention. * The stipulations of the stipulations that the above-mentioned problem is provided in the first aspect of the present invention, and the measurement and loading unit for measuring the current consumed by the power supply is included in the wheel. Power supply; / / "electronic components connected; power supply voltages are opposite to each other, and in + 〃, with two two Si: in order to make the whole parallel connection: the electronic terminal between the outlet and the power supply When the current is consumed, the current flows; when the motor is stationary, the power supply is supplied to the power supply terminal β (5), and the power supply of the terminal and the power supply are used to make the power supply rotate. In the part, the drive unit measures the output current value when the stationary drive is stationary. The response speed of the 4 is higher than that of the power supply 7 200821587. The driving part at rest includes: voltage with - (reading the f f circuit, which is input from the power supply voltage output unit (4). and opening and closing switch, which is set in the voltage follower circuit; 乂 = end' When the electronic component is stationary, it is closed, and the electronic component κ power voltage output part includes: amplifying the lightning pressure to make the input voltage perform negative feedback amplification, and the power supply voltage is amplified according to the feedback feeding device; The amplifying circuit; and the feedback circuit can be used in the electric second:: when the feedback voltage is supplied to the output voltage of the circuit as the feedback voltage, when the amplifying sub-component is actuated, the power supply output terminal is 'up=two way' and is electrically amplified. The soil is used as a feedback voltage to supply the current measurement unit at the time of operation, and the output current value of the complex output unit is measured.
U 可還具有測試信號輸入部，I 元件；判定部，其根據與測試測試信號輪人至電子 出信號，而對該電子元件進行^相對應的電子元件的輸 本發明的第2形態提供一種二息 元件所 >肖耗的電流進行測量的測II方法為-種對電子 源裝置，_子元件供給電源電=法，其包括：利用電 裝置具有電源輸出端，其血電子Γ勺階段，其中，該電源 部，其輸出電源電壓；二極體開Z連接，·電源電壓輸出 方向彼此彳目反，而在電源輸 卩其包括為了使整流 17電源電壓輪出部之間並 8 200821587 聯連接的2個一 電壓與電源止時驅動部’其將電源輸出端的 況下，使同的電壓；在使電子元件動作的情 源輸出端和電源電流通過二極體開關部，在電 子元件靜止的情二間流過的階段；以及在使電 電子元件所消=1、、’仗#止時驅動部對電源輪出端供給 進行測量的階段。、电机’且對靜止時驅動部的輪出電流值 的全&此 ===要’並未鱗本發_必要特徵 明。 寺试群的子集(sub-c—〇n)也可又形成發 速地進:::赉明’可對動作電流測量和靜止電流測量高 【實施方式】 =下，通過發明的實施形態對本發 態並未對關於申請專利範圍的發明進行;;U may further include a test signal input unit, an I element, and a determination unit that provides an electronic component corresponding to the electronic component based on the test test signal, and provides a second aspect of the invention. The method of measuring the current of the dimming element is: a pair of electron source device, the _ sub element is supplied with a power supply method, and the method includes: using the electric device to have a power output end, and the blood electron scooping stage , wherein the power supply unit, its output power supply voltage; the diode open Z connection, the power supply voltage output direction is opposite to each other, and the power supply is included in order to make the rectification 17 supply voltage between the turns and 8 200821587 Two voltages connected to the power supply and the power supply stop-time driving section 'the same voltage as the power supply output terminal; the source output terminal and the power supply current that operate the electronic component through the diode switch section, in the electronic component The stage in which the stationary second flow passes; and the stage in which the drive unit measures the supply of the power supply wheel when the electric and electronic components are eliminated. And the motor's and the total value of the wheel current value of the drive unit at rest is not <not required to be scaled. The subset of the temple test group (sub-c-〇n) can also be formed into a speed-up:::赉明' can measure the action current and the static current is high [embodiment] = down, through the embodiment of the invention This invention is not directed to the invention relating to the scope of the patent application;
U 是發明的解決方法所必_。 也未必 圖1所示為測試裝置10的構成及電 裝置對半導體元件等電子元件10 二:且》貝“式 試裝置W為本發明的測量裝置的—個例子==電= 測量和靜止電流測量高速地進行切換。 乍電k 測試裝置10包括圖案產生部U、電 號輸入部13、判定部Η。圖案產生部U產生測試圖， 用於表示對電子元# 100所供給的測試信號波形的^案 200821587 等。電源部12對電子元件100供給電源電壓。測試信號輸 入部13藉由依據測試圖案進行波形成形而生成上^試 信號，並將所生成的測試信號對電子元件1〇〇進行輸1。 判定部14根據電子元件100依據所供給的測： 的輸出信號，對該電子元件⑽的好壞等進二^而輸出 圖2所不為電源部12的構成及電子元件1 〇〇。電源部 12對電子元件100供給電源電壓，且對靜止時的電子元件 100的消耗電流高速地進行測量。另外，所謂電子元件100 (% 靜止時，是指利用例如時鐘脈衝供給的停止等而使多個内 部電路的動作停止，從而使該電子元件100的消耗電流變 得非常小之狀態的時刻。例如，在靜止時也可包含休眠時、 省Mi模式時寺。所明该電子元件1 〇〇的動作時，是指不是 猙止時，而是例如被供給時脈，且該電子元件1〇〇處於通 常動作之狀態的時刻。 電源部12包括電源輸出端21、電源電壓輸出部22、 一極體開關部23、靜止時驅動部24、靜止時電流測量部 25、動作時電流測量部26。 電源輸出端21與電子元件1〇〇連接，並將該電源部 12所輸出的電壓供給到電子元件1〇〇的電源端。電源電壓 輸出部22輸出藉由例如負反饋控制而穩定在規定值的電 源電壓Vdd。二極體開關部23具有為了使整流方向彼此相 反而在電源電壓輸出部22和電源輸出端21的輪出端之 間並聯連接的正向二極體31及逆向二極體32。二極體開 關部23作為雙向的二極體開關而發揮機能，其在電源電壓 10 200821587 輸出部22和電源輪出端2 _sh_值電壓（例如q 日生^於等於門限 打開狀態，而在產生 ：知況下’形成 形成斷開狀態， 艮1土的甩位差的情況下， 靜止時驅動部24在電子元件1〇(M 源輸出端21的電壓食帝 砰止日寸，為了使電 對電源輸出端21俾二二二电塾維持相同的電壓，而 U分離，所以對電Ht100的動作時，與電源輸出端 中所流過的電流不產^旦^ 21的電壓和在電源輸出端21 試圖案所示的時序^蹲。靜止時驅動部Μ依據例如測 而且，靜止日士^動作時及靜止時的切換。 比較的情況Τ，'電®輪出部22進行 構成。藉此，靜止時的電路 1=地進行靜止時的消耗；SC的回應速 _ — 列子，静止時驅動部24也可包括第彳干 隨耦器電路41，其被輪人帝^ + ^ 吧」匕括乐1電壓 其設置在第!電壓二器 21之間。第1_器電路41是利出端 耦器電路。該隨耦器電路為一種藉由將輸；^的隨 :運算放大器的反轉輸入端，心不管負荷4:回： t:r。第1電壓咖電路41由於對非反轉 入该電源電壓Wd，所料f電子元件⑽的負= 200821587 何，都可從輸出端產生一種與電源電壓Vdd相同的電厣。 第1開閉開關42受到控制，以便在電子元件！⑻靜止日^關 閉，而在電子元件1⑻動作時打開。如利用這種構成的靜 止時驅動部24，則藉由對第1開閉開關42進行開關控制， 可進行動作時和靜止時的切換。 這裏，第1開閉開關42使靜止時的消耗電流流過， 而不使動作時的電流流過。亦即，由於第1開閉開關42 不使大電流流過，所以可成為一種能夠高速響應的開關。 '' 因此，如利用這種構成的靜止時驅動部24，則可從動作時 向靜止時高速地進行切換，能夠在短時間内開始靜止時^ 電源電流的測量。 靜止時電流測量部25在電子元件1〇〇靜止時，對從 靜止時驅動部24所輸出的輸出電流值進行測量。靜止時電 流測量部25作為-個例子，是藉由對構成第i電壓隨搞】 電路41之運算放大器的輸出端上所設置的帛i電流檢測用 低電阻43白勺終端間電壓進行檢測，而啦該輸出電流值。 υ 靜止時電流測量部2 5藉由對該輪出電流值進行測量，可測 量電子元件100的靜止時的消耗電流。 動作時電流測量部26在電子元件100靜止時，對從 電源電壓輸出部22所輸出的輪出電流值進行測量。動作時 電流測量部26作為-個例子，是藉由對電源電壓輸出部 22的輸出端上所設置的第2電流檢測用低電阻44的終端 間電壓進打檢測，而測量該輸出電流值。動作時電流測量 部26藉由對該輸出電流值進行測量，可測量電子元件ι〇〇 12 200821587 的動作時的消耗電流。1 以上那種構成的電源部12在電子元件100動作時， 將從電源電壓輸出部22所輸出的電流，通過二極體開關部 23以供給到電源輸出端21。亦即，在電子元件100動作時， 從靜止時驅動部24對電源輸出端21不施加電壓，而使二 極體開關部23成為接通狀態，所以電子元件100所消耗的 電流通過二極體開關部23而在電源電壓輸出部22和電源 輸出端21之間流動。 f 另一方面，電源部12在電子元件100靜止時，將從 靜止時驅動部24所輸出的電流供給到電源輸出端21。亦 即，在電子元件1〇〇靜止時，利用靜止時驅動部24對電源 輸出端21施加電源電壓Vdd，使二極體開關部23的輸出 入間成為同電位，而使二極體開關部23成為斷開狀態，所 以電子元件100所消耗的電流不流入二極體開關部23。 這樣’電源部12利用在電源電壓輸出部22和電源輸 出端21之間所設置的二極體開關部23，而在靜止時停止 I 從電源電壓輸出部22供給電流。藉此，如利用電源部12， 可不設置使大電流流過的開閉開關而進行切換，所以可達 到高速。因此，可在短時間内對靜止時的電源電流開始測 量。 圖3所示為電源電壓輸出部22的一個例子的電路構 成。 電源電壓輸出部22作為一個例子，可包括數位/類比 轉換器51、放大電路52、回饋電路53。 13 200821587 Λ 數位/類比轉換器51被輸入例如預先設定的數位值， 並產生由數位值所表示的類比電壓（以下稱作輸入電 ' 壓。)。 放大電路52依據通過回饋電路53而回饋的電壓（以 下稱作回饋電壓。），且藉由對從數位/類比轉換器51所 輸出的輸入電壓進行負反饋放大，而輸出一種將該輸入電 壓以規定增盈予以放大的電源電壓Vdd。例如，放大電路 52可由具有運算放大器61、輸入電阻62、回饋電阻63的 ( 反轉放大電路構成。如利用該反轉放大電路，可利用回饋 電阻63對輸入電阻62的比，而決定上述的規定增益。 回饋電路53對放大電路52供給該回饋電壓。回饋電 路53作為一個例子，是對反轉放大電路中的回饋電阻63 供給該回饋電壓。回饋電路53在電子元件100動作時及靜 止時，切換該回饋電壓。具體地說，由於回饋電路53在動 作時使供給到電子元件100的電壓穩定，所以將電源輸出 端21的電壓作為回饋電壓而供給到放大電路52。由於回 ^ , 饋電路53在靜止時使因靜止時驅動部24所形成的電壓下 ^ 降非常小，所以將放大電路52的輸出電壓即電源電壓U is the solution to the invention. Also, FIG. 1 does not necessarily show the configuration of the test apparatus 10 and the electronic components such as the semiconductor device and the electronic component 10: and the "test device" is an example of the measuring device of the present invention ==electricity = measurement and quiescent current The measurement is performed at a high speed. The detection device 10 includes a pattern generation unit U, an electric number input unit 13, and a determination unit Η. The pattern generation unit U generates a test pattern for indicating a test signal waveform supplied to the electronic unit #100. The power supply unit 12 supplies a power supply voltage to the electronic component 100. The test signal input unit 13 generates a test signal by waveform shaping according to the test pattern, and generates the generated test signal to the electronic component 1 The determination unit 14 outputs the configuration of the power supply unit 12 and the electronic component 1 in accordance with the output signal of the electronic component 100 in accordance with the supplied output signal of the electronic component (10). The power supply unit 12 supplies a power supply voltage to the electronic component 100, and measures the current consumption of the electronic component 100 at rest. The electronic component 100 (% at rest) means utilization. For example, when the operation of the plurality of internal circuits is stopped, the operation of the plurality of internal circuits is stopped, for example, the state in which the current consumption of the electronic component 100 is extremely small. For example, when the battery is stationary, the sleep mode or the Mi mode may be included. In the case of the operation of the electronic component 1 〇〇, it means that the clock is supplied, for example, when the clock is supplied, and the electronic component 1 is in the normal operation state. The power supply unit 12 includes the power output. The terminal 21, the power supply voltage output unit 22, the one-pole switch unit 23, the stationary-time drive unit 24, the stationary-time current measuring unit 25, and the operating-time current measuring unit 26. The power output terminal 21 is connected to the electronic component 1〇〇, and The voltage output from the power supply unit 12 is supplied to the power supply terminal of the electronic component 1. The power supply voltage output unit 22 outputs a power supply voltage Vdd that is stabilized at a predetermined value by, for example, negative feedback control. The diode switch unit 23 has a The forward diodes 31 and the reverse diodes 32 are connected in parallel between the power supply voltage output unit 22 and the wheel output end of the power supply output terminal 21 with the rectification directions being opposite to each other. The diode switch unit 23 functions as It functions as a diode switch, which is formed at the power supply voltage 10 200821587 output portion 22 and the power supply wheel output terminal 2 _sh_ value voltage (for example, q is generated to be equal to the threshold open state, and is generated under the condition of generation: In the disconnected state, in the case of the 甩1 soil 甩 , , , 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 驱动 静止 静止 静止 静止The second and second electric poles maintain the same voltage, and the U is separated. Therefore, when the electric Ht100 is operated, the current flowing in the output end of the power supply does not produce the voltage of 21 and the test pattern shown at the output end of the power supply 21 The timing is determined by the driving unit at the time of rest, for example, the switching between the stationary day and the stationary state. In the case of comparison, the 'Electrical® wheel portion 22 is configured. Thereby, the circuit 1 at rest is at a standstill consumption; the response speed of the SC is _-column, and the drive unit 24 at rest can also include the third dry follower circuit 41, which is wheeled by the emperor ^ + ^ The voltage of the music 1 is set between the second voltage regulators 21. The first_device circuit 41 is a terminal-coupler circuit. The follower circuit is an inverting input terminal of the operational amplifier by means of the input, regardless of the load 4: back: t: r. The first voltage circuit 41 can generate the same power as the power supply voltage Vdd from the output terminal due to the non-inversion of the power supply voltage Wd and the negative of the electronic component (10). The first open/close switch 42 is controlled to be in the electronic component! (8) The stationary day is turned off, and is turned on when the electronic component 1 (8) operates. According to the static-time driving unit 24 having such a configuration, by switching the first open/close switch 42, the switching between the operation and the stationary state can be performed. Here, the first open/close switch 42 allows a current consumption at the time of stationary to flow without causing a current during operation. In other words, since the first open/close switch 42 does not allow a large current to flow, it can be a switch capable of high-speed response. Therefore, by using the stationary-time drive unit 24 having such a configuration, it is possible to switch from a high speed to a standstill during operation, and it is possible to start measurement of the power supply current at rest when a short time is started. The stationary current measuring unit 25 measures the output current value output from the stationary driving unit 24 when the electronic component 1 is stationary. The stationary current measuring unit 25 detects, as an example, the inter-terminal voltage of the 帛i current detecting low resistance 43 provided at the output terminal of the operational amplifier constituting the ith voltage circuit 41. And the output current value.电流 When the stationary current measuring unit 25 measures the wheel current value, the current consumption of the electronic component 100 at rest can be measured. The operation-time current measuring unit 26 measures the value of the wheel-out current output from the power source voltage output unit 22 when the electronic component 100 is stationary. In the operation, the current measuring unit 26 measures the output current value by detecting the voltage between the terminals of the second current detecting low resistance 44 provided at the output end of the power supply voltage output unit 22 as an example. The current measuring unit 26 during operation measures the current consumption during the operation of the electronic component ι〇〇 12 200821587 by measuring the output current value. When the electronic component 100 is operated, the power supply unit 12 having the above configuration is supplied from the power supply voltage output unit 22 to the power supply output terminal 21 via the diode switch unit 23. In other words, when the electronic component 100 is operated, the driving unit 24 does not apply a voltage to the power supply output terminal 21 from the stationary state, and the diode switch unit 23 is turned on. Therefore, the current consumed by the electronic component 100 passes through the diode. The switch unit 23 flows between the power source voltage output unit 22 and the power source output terminal 21. f On the other hand, when the electronic component 100 is stationary, the power supply unit 12 supplies the current output from the stationary driving unit 24 to the power supply output terminal 21. In other words, when the electronic component 1 is stationary, the power supply voltage Vdd is applied to the power supply output terminal 21 by the stationary driving unit 24, and the input and output of the diode switch unit 23 become the same potential, and the diode switch unit 23 is provided. Since it is in the off state, the current consumed by the electronic component 100 does not flow into the diode switch unit 23. Thus, the power supply unit 12 uses the diode switch unit 23 provided between the power supply voltage output unit 22 and the power supply output terminal 21 to stop the supply of current from the power supply voltage output unit 22 when it is stationary. As a result, the power supply unit 12 can be switched without providing an open/close switch that allows a large current to flow, so that high speed can be achieved. Therefore, the measurement of the power supply current at rest can be started in a short time. Fig. 3 shows the circuit configuration of an example of the power supply voltage output unit 22. The power supply voltage output unit 22 may include, as an example, a digital/analog converter 51, an amplifying circuit 52, and a feedback circuit 53. 13 200821587 Λ The digital/analog converter 51 is input with, for example, a preset digital value, and generates an analog voltage represented by a digital value (hereinafter referred to as an input electric voltage). The amplifying circuit 52 is based on a voltage fed back through the feedback circuit 53 (hereinafter referred to as a feedback voltage.), and by performing negative feedback amplification on the input voltage output from the digital/analog converter 51, outputting a kind of the input voltage The power supply voltage Vdd that is amplified by the increase is specified. For example, the amplifying circuit 52 may be constituted by an inverting amplifying circuit having an operational amplifier 61, an input resistor 62, and a feedback resistor 63. If the ratio of the feedback resistor 63 to the input resistor 62 is utilized by the inverting amplifying circuit, the above-described The feedback circuit 53 supplies the feedback voltage to the amplifier circuit 52. As an example, the feedback circuit 53 supplies the feedback voltage to the feedback resistor 63 in the inverting amplifier circuit. The feedback circuit 53 operates while the electronic component 100 is operating and at rest. Specifically, since the voltage supplied to the electronic component 100 is stabilized during the operation of the feedback circuit 53, the voltage of the power supply output terminal 21 is supplied as a feedback voltage to the amplifier circuit 52. When the circuit 53 is at rest, the voltage formed by the driving unit 24 at rest is extremely reduced, so that the output voltage of the amplifying circuit 52 is the power supply voltage.
Vdd，作為回饋電壓以供給到放大電路52。 回饋電路53作為一個例子，具有第2電壓隨耦器電 路64、第2開閉開關65、回餚電壓用電阻66。 第2電壓隨耦器電路64為一種由運算放大器所構成 的電壓隨耦器電路。在第2電壓隨耦器電路64的非反轉輸 入端，通過回饋電壓用電阻66而輸入電源輸出端21的電 14 200821587 壓，且通過第2開閉開關65而輪入 =阻，用一種對電源電壓Vdd^^Vdd is supplied as a feedback voltage to the amplifying circuit 52. The feedback circuit 53 has, as an example, a second voltage follower circuit 64, a second open/close switch 65, and a return voltage resistor 66. The second voltage follower circuit 64 is a voltage follower circuit formed by an operational amplifier. At the non-inverting input end of the second voltage follower circuit 64, the voltage 14 is input to the power supply output terminal 21 by the feedback voltage resistor 66, and the voltage is turned on by the second open/close switch 65, and a pair is used. Power supply voltage Vdd^^
^ i i ^ 5 ^2 w 6 5 ^ ^ ^ ^ I =料M，而在靜止時被打開。藉此，H 仃::動作，在動作時使電源輸出端 二 ;屋’而在靜止時使電源電！ Vdd為回饋電承：f 口饋 Γ 以:成為能夠高速響應的開關。因此，二：=、 可高速地進行切換，能夠在二= 4的電源電流開始測量。 i内對月f止 =;=;清楚二可在上述實二二二 了【㈡=態也可一峨術範 圖1所示為測試裝置10的構成及電子元件1〇〇。 圖2所不為電源部12的構成及電子元件1〇〇。 10 11 12 成。㈤⑹為電源電壓輸出部22的-個例子的電路構 【主要元件符號說明】 蜊試I置 圖案產生部 電源部 15 200821587 13 :測試信號輸入部 14 :判定部 21 :電源輸出端 22 :電源電壓輸出部 23 :二極體開關部 24 :靜止時驅動部 25 :靜止時電流測量部 26 :動作時電流測量部 31 :正向二極體 32 :反向二極體 41 :第1電壓隨耦器電路 42 :第1開閉開關 43 :第1電流檢測用低電阻 44 :第2電流檢測用低電阻 51 :數位/類比轉換器 52 :放大電路 53 :回饋電路 61 :運算放大器 62 :輸入電阻 63 :回饋電阻 64 :第2電壓隨耦器 65 :第2開閉開關 66 :回饋電壓用電阻 100 :電子元件 16^ i i ^ 5 ^2 w 6 5 ^ ^ ^ ^ I = M, and is turned on at rest. In this way, H 仃:: action, when the action is made, the power output terminal 2; the house' while the power is on at rest! Vdd is the feedback power: f port feed Γ To: Become a switch that can respond at high speed. Therefore, two: =, switching can be performed at high speed, and measurement can be started at a power supply current of two = 4. i is the same as the monthly f = ==; clear 2 can be in the above actual 2 22 [(2) = state can also be a syllabus Figure 1 shows the structure of the test device 10 and the electronic components 1 〇〇. 2 is not the configuration of the power supply unit 12 and the electronic component 1A. 10 11 12 成. (5) (6) Circuit configuration of an example of the power source voltage output unit 22 [Description of main component symbols] 蜊 Test I pattern generation unit power supply unit 15 200821587 13 : Test signal input unit 14: Determination unit 21: Power supply output terminal 22: Power supply voltage Output unit 23: Diode switch unit 24: At the time of rest, drive unit 25: Current measurement unit at rest: Current measurement unit 31: Forward diode 32: Reverse diode 41: First voltage with coupling The circuit 42 is: a first open/close switch 43: a first current detecting low resistor 44: a second current detecting low resistor 51: a digital/analog converter 52: an amplifying circuit 53: a feedback circuit 61: an operational amplifier 62: an input resistor 63 : feedback resistor 64: second voltage follower 65: second open/close switch 66: feedback voltage resistor 100: electronic component 16