200819211 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種液體回收製程，特別是指一種將 待回收液在生產線上處理、回收後，並直接將檢測合格的 待回收液於線上再度利用的液體循環回收製程。 【先前技術】 一般產業界製作彩色濾光片、液晶板等元件時，其過 程需要利用旋轉塗佈的方式，在一塊基板上披覆一層例如 光阻劑、貴重溶劑等藥液’而為了使藥液可以均勾地旋轉 塗佈在基板上’業者會先於基板上塗抹大量的藥液，使其 旋轉後藥液能夠均勾披覆在整個基板上，然而要完整披覆 一片基板貫際上只需要少量的藥液即可，所以過多的藥液 將錢轉塗佈的過程中直接被排入廢液槽，所以使用大量 的藥液來塗佈基板將造成浪費，同時亦會衍生出生產成I 南的缺失。 此外為了避免浪費藥液，另—作法則是在旋轉塗佈 的過程中’將旋轉难出的藥液利用回收桶裝起來回收，但 是’如此將增加設置回收桶的成本， ： 空間並造成空間浪費。同時，礙於現行技術問題’回=子 樂液必需送回原供應廠商進行再生處理，才能拿回來再度 使用：雖然這種作法可以避免藥液的浪費，但是再生處ς 後的藥液需要另外花費購買’如此亦會增加生產成本。而 且需要注意的是，將藥液運送回原廉作再生處理不—定都 可以成功地回收’因為待回收藥液在運送至原廠的過程中 5 200819211 不便 、離生產線的無塵每境，如此反而容易使原本就品質不 穩定之待回㈣液在運送時遭受環境污染，或因儲存不當 而變質’造成藥液送至原廠時反而無法順利作再生處理， 士此來’不旦無法達到節省藥液之目的，反而造成許多 【發明内容】 因此，本發明之目的，即在提供一種於線上作業時就 直接回收、處理待时液，並將處局的待回收液送回一 機台循環使用的液體循環回收製程。 於是，本發明液體循環回收製程是利用一液體循環回 收裝置來連接該機台，並將該機台所排放出的待回收液作 回收再生處理，所述液體循環回收製程包含： (1) 收集自該機台排放出的待回收液； (2) 檢測所述待回收液，當待回收液檢測合格時就作 回收利用；當待回收液檢測不合格時，在待回收液中加入 一調和液’並重新檢測該待回收液；及 (3 )將檢測合格的待回收液送回該機台重覆使用。 藉由在生產線之線上（in-line )作業時，就將待回收液 於線上檢測’並與調和液混合再生處理以立即回收使用， 使本發明兼具有避免浪費藥液、降低生產成本等優點。 其中’在步驟（1 )中是利用一重量計來測量該待回收 液的重量，當待回收液收集至一定的重量後，再繼續進行 步驟（2 )。 所述步驟（2 )中，必需先將該待回收液與調和液授拌 200819211 句勺並靜置一段時間後再進行檢測’而且在檢測時，是 檢測待回收液的黏度與溫度，並根據待回收液之種類不同 ’將有不同的黏度合格標準。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 、下配5♦考圖式^ —個較佳實施例的詳細說明中，將可 /月邊的呈現。在本發明被詳細描述之前，要注意的是，在 以下的說明内容中’類似的元件是以相同的編號來表示。 多閱圖1、2，本發明液體循環回收製程是利用一液體 循％回收裝置來連接_機台2，並將該機台2排放出的待回 收液作回收再生處理，所述機台2上設置有一基板21， 基板21上塗佈有光阻劑或貴重溶劑等藥液，並藉由機台 運轉使藥液均勻披⑽基板21 i，？餘的藥液即成為待 收液並自機台2排出。 而 2 回 咏，從媸僱裱回收裝置包含：一回收桶11、一連接機台2 …亥回收桶11之-側的第_連接單i 12、—連接機台2與 回收桶11之另一側並使該機台2與該回收桶n _ 環迴路的第二連接單元…-設置在該回收桶η上的檀: :的回收桶11的調和單元15、安裝在該回收桶 U度計16與—溫度計17，及—連接在機台2 收桶U間的新液單元18。其中該第一 括 條第一導管121，以及—個嗖晉為楚匕括— -幫浦122,該第二連接置在弟，121管路上的第 以及-設置在第括一條第二導管131， 在弟…131管路上的第二幫浦132。該等調 7 200819211 牙早=15與新液以18亦是藉由導管與幫浦來輸送液體 ，此夕，在該回收桶u、調和單元15與新液單& Μ上， 都設有—用於測量液體重量的重量計m、151、181。 本發明液體循環回收製程之第—較佳實施例包含 步驟： )進仃步驟31收集待回收液：利用該第一幫浦122 將機台2運轉後產生的待回收液，經由該第一導管i2i輸 送至相收桶1卜而且將該機㈠在多次運轉後產生的待 回收液皆先暫時儲存於該回收桶u中。 7 (2)進行步驟32檢測待回收液：利用重量計111測量 /寺回收液的重里，s相收桶丨丨内的待回收液達到一定的 重量時即可進行檢測。所述一定的重量是視回收桶U之容 量設計與實際作業情形而可自由調整，例如回收桶u之最 大谷夏設計為3公斤時，可以在待回收液達到1公斤或2 公斤時即開始進行檢測，當然、，在實際實施時並不限於上 述重量。檢測時先使用_ 14_待回收液，使待回 收液均勻並靜置-段時間，再湘溫度計17與黏度計Μ 分別檢測待回收液的溫度及黏度。當該待回收液的檢測結 果合格，就將其暫時保存於該回收桶u中。#待回收液的 檢測結果不合格，則需要進一步處理該待回收液。 一般而s，黏度是該待回收液在回收使用時，影響其 品質最重要的因f，而待回收液的溫纟、流速與整個液體 的分佈’都會影響黏度，所以必需要均勻攪拌並等到待回 收液靜止時再測量其黏度。此外，待回收液在機台2中使 8 200819211 用後，部份成分會揮發而造成待回收液黏度過 所以當檢測不合格時，即進行步驟 可 先儲存於該調和單元15中的哺* + τ 、 的5周和液，、經由該幫浦152 Μ 流量，並輸送至回收桶U中盥待 " τ "侍回收液混合以 。在混合時亦必需利用授拌器、14 汸俨，、，+、 便待回收液與調和 ’于刀且均勻地混合，攪拌後靜置-段時間，再重葙 檢測動作。 丁』丹重復 ㈤要說明的是’本發明是依據待回收液種類來決定選 用何種調和液’當該待时液為正型光阻劑時，具體例如 :丙二醇甲醚醋酸醋（PGMEA)為主要溶劑所製成的正型 一阻劑’與其配合的調和液為環己酮（c6H10〇)和丙二醇 甲喊醋酸醋（PGMEA)的混合溶液；當該待回收液為負型 光阻劑時’所述調和液是以二甲苯為主所製成的溶液。 (3 )進行步驟33將檢測合格的回收液送回該機台2 : 使用第二幫浦132及第二導管131，將檢測合格的回收液輸 运回機台2，以供機台2運轉時再利用。 更具體而言，前述待回收液與調和液混合及檢測的動 作可以重複多次，如果待回收液在多次處理及檢測後仍然 無法達到合格標準，就無法回收使用並成為廢液，此時進 /亍v驟322，將所述廢液經由回收桶丨丨的一個排廢口（圖 未不）排出。接著再自該新液單元18補充新的藥液於回收 桶U中，以運輸回機台2使用，且在補充新的藥液之前， 要將該液體循環回收裝置内部的桶壁、管路等等清洗乾淨 ，避免殘留的廢液污染新的藥液。當然，亦可將新的藥液 200819211 蝴入機台2使用，直到機台2作業後又累積有一定重 =待回收液，就可以再繼續利用本發明之回收製程來進 订待回收液的回收檢測工作。 •由以上說明可知，本發明主要是藉由在生產線之線上 (in-lme)作業時’就將待回收液於線上經過檢測，以及盥 調和液混合的再生處理以立即回收使用，如此可以避免浪 費藥液’以及藥液收回後需要送回原廠作再生處理的各種 缺失’故本發明液體循環时製程確實能夠達到降低生產 成本之優點。 —4閱圖2 3，本發明液體循環回收製程之一第二較佳 :鞑例’亦是配合一液體循環回收裝置來使用，該液體循 %回收裝置與前述第_較佳實_所提供之結構大致相同 ，不同之處在於：該第-連接單元12是增加設置—第一暫 存桶123 ’該第二連接單元13是增加設置-第二暫存桶 133，而本貫施例之新液單元18是連接該第二暫存桶133。 本κ知例之回收製程亦包含：步驟3 i收集自該機台2 排放出的待回收液、步驟32檢騎述待时液，以及步驟 33將檢測合格的待回收液送回該機台2等步驟。其中，在 v驟31中，疋將機台2運轉所產生的待回收液，暫時儲存 ^ 4第暫存桶123中，直到累積一定的量時，再輸送至 回收桶11檢測及回收，且在檢測待回收液之同時，仍可繼 續自機台2排放新的待回收液至第一暫存桶123中存放。 而檢測合格的回收液則輸送並暫存於該第二暫存桶133，當 该機台2需要補充藥液時，再輸送回該機台2使用。 10 200819211 給要5兄明的是，去住 ,丨人坆碑淮士 田收液在多次處理後仍然無法这 1 口 成為廢液並由該回收桶u排 利用原先即暫存於第：暫存们33 應機台2使用，如果第ms ” ⑶收液束持續供 如果弟一暫存桶133中已沒有 收液，就直接自新液單A丨 — 子的相 Η文早7L 18 k供新的藥液至第二 Z後送往機台2’如此同樣可以隨時供應機台2作業= 亦即’本實施之回收製程是將尚未檢測、檢測中，及 檢測合格的待时液分_存，讀高檢測合格的回收液 之保存品質，故本實施樣具有在線上直接再生處理待 回收液、避免藥液浪費，以及降低生產成本等優點。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 範圍及發明說明内容所作之簡單的等效變化與修飾，皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一液體循環回收裝置的設備簡圖； 圖2是本發明液體循環回收製程之一第一較佳實施例 的流程圖；及 圖3是一液體循環回收裝置的設備簡圖，且該設備是 與本發明液體循環回收製程之一第二較佳實施例配合使用 200819211 【主要元件符號說明】 1卜…· …，回收桶 151 * .....*重量什 111… •…重量計 152 · ……幫浦 12 …·· •…第 一連接單元 16… ••…·黏度計 m… …·第 一導管 17… >孤度δ十 122… ，…第 一幫浦 18… ......新液單元 13 ….· •…第 二連接單元 18卜 ……重量計 131… …·第 二導管 2.…· ......機台 132… •…第 二幫浦 21… ……基板 133… •…第 二暫存桶 31、 32 、 33 、 3 14 * * * * * •…攪拌器 ……步驟 15 •…·…·調和單元 322 12200819211 IX. Description of the invention: [Technical field of the invention] The present invention relates to a liquid recovery process, and more particularly to a method for treating a liquid to be recovered after being treated and recovered on a production line, and directly passing the test to be inspected. Re-use of the liquid recycling process. [Prior Art] When manufacturing a color filter, a liquid crystal panel, etc. in the general industry, the process requires a coating of a coating such as a photoresist or a precious solvent on a substrate by means of spin coating. The liquid can be rotatably coated on the substrate. The manufacturer will apply a large amount of liquid on the substrate, so that the liquid can be evenly coated on the whole substrate. However, it is necessary to completely cover the substrate. Only a small amount of liquid medicine is needed, so too much liquid medicine is directly discharged into the waste liquid tank during the process of transferring the money, so using a large amount of liquid medicine to coat the substrate will waste, and will also be derived. Production is missing from South China. In addition, in order to avoid wasting the liquid medicine, another method is to "recycle the hard-working liquid medicine into the recycling drum during the spin coating process, but 'this will increase the cost of setting the recycling barrel: space and space waste. At the same time, due to the current technical problem, 'back = Zile liquid must be sent back to the original supplier for regenerative treatment, in order to get it back again: although this method can avoid the waste of the liquid, the liquid after the regeneration needs additional Spending to buy 'this will also increase production costs. Moreover, it should be noted that the liquid medicine can be transported back to the original low-cost regenerative treatment. It can be successfully recovered. Because the liquid to be recovered is transported to the original factory, it is inconvenient and inseparable from the production line. On the contrary, it is easy to make the original quality unstable. (4) The liquid is polluted by the environment during transportation, or it is deteriorated due to improper storage. When the liquid is sent to the original factory, it cannot be recycled smoothly. The purpose of saving the liquid medicine is to cause a lot of [invention]. Therefore, the object of the present invention is to directly recover and process the liquid to be treated while the line is being operated, and return the liquid to be recovered to the machine. The liquid recycling process used in the cycle. Therefore, the liquid circulation recovery process of the present invention uses a liquid circulation recovery device to connect the machine, and recycles the liquid to be recovered discharged from the machine. The liquid circulation recovery process comprises: (1) collecting from The liquid to be recovered discharged from the machine; (2) detecting the liquid to be recovered, and recycling when the liquid to be recovered is qualified; when the detection of the liquid to be recovered is unqualified, adding a liquid to the liquid to be recovered 'Re-testing the liquid to be recovered; and (3) returning the tested liquid to be recovered back to the machine for repeated use. By operating on the line of the production line, the liquid to be recovered is detected on the line and mixed with the blending liquid for regeneration and reuse, so that the present invention has the advantages of avoiding waste of liquid medicine, reducing production cost, etc. advantage. Wherein in step (1), the weight of the liquid to be recovered is measured by a weight meter, and when the liquid to be recovered is collected to a certain weight, the step (2) is continued. In the step (2), the liquid to be recovered and the blending liquid must be firstly mixed with 200819211 spoons and allowed to stand for a period of time before testing. And in the detection, the viscosity and temperature of the liquid to be recovered are detected, and according to Different types of liquids to be recycled 'will have different viscosity standards. [Embodiment] The foregoing and other technical contents, features, and effects of the present invention will be presented in the detailed description of the preferred embodiment of the present invention. Before the present invention is described in detail, it is noted that in the following description, the like elements are denoted by the same reference numerals. Referring to Figures 1 and 2, the liquid recycling process of the present invention utilizes a liquid-by-recovery device to connect the machine 2 and recycle the liquid to be recovered discharged from the machine 2, the machine 2 A substrate 21 is disposed on the substrate 21, and a chemical solution such as a photoresist or a valuable solvent is coated on the substrate 21, and the liquid medicine is evenly immersed (10) on the substrate 21 i by the operation of the machine. The remaining liquid is the liquid to be discharged and discharged from the machine 2. In addition, the recovery device includes: a recycling bin 11, a connecting machine 2 ... the first side of the recycling bin 11 - the connection sheet i 12, the connecting machine 2 and the recycling bin 11 One side and the second connection unit of the machine 2 and the recovery tank n_loop circuit...-the balance unit 15 of the recovery tank 11 disposed on the recovery tank n: installed in the recovery tank U degree The meter 16 and the thermometer 17, and the new liquid unit 18 connected between the barrels U of the machine table 2. Wherein the first first strip 121 of the first strip, and the first one is a sputum----------------------------------------------------------------------------------------- In the younger...131 the second pump 132 on the pipeline. The adjustment 7 200819211 tooth early = 15 and the new liquid to 18 is also through the catheter and the pump to transport the liquid, this evening, in the recycling bin u, the blending unit 15 and the new liquid single & - Weight gauges m, 151, 181 for measuring the weight of the liquid. The first preferred embodiment of the liquid circulation recovery process of the present invention comprises the steps of:) collecting the liquid to be recovered through the step 31: using the first pump 122 to recover the liquid to be recovered after the operation of the machine 2, via the first conduit The i2i is transported to the collection bin 1 and the liquid to be recovered generated by the machine (1) after multiple operations is temporarily stored in the recovery bin u. 7 (2) Perform step 32 to detect the liquid to be recovered: measure the weight of the recovery liquid by using the weight meter 111, and detect when the liquid to be recovered in the s phase collection tank reaches a certain weight. The certain weight can be freely adjusted according to the capacity design of the recycling bin U and the actual working conditions. For example, when the maximum grain summer design of the recycling bin is 3 kg, it can be started when the liquid to be recovered reaches 1 kg or 2 kg. The detection is performed, of course, and is not limited to the above weight in actual implementation. When testing, first use _ 14_ to be recovered, make the liquid to be recovered evenly and let stand for a while, then measure the temperature and viscosity of the liquid to be recovered separately by using the thermometer 17 and the viscosity meter. When the test result of the liquid to be recovered is passed, it is temporarily stored in the recovery tank u. # The test result of the liquid to be recovered is unsatisfactory, and the liquid to be recovered needs to be further processed. Generally, s, the viscosity is the most important factor affecting the quality of the liquid to be recovered when it is recycled, and the temperature of the liquid to be recovered, the flow rate and the distribution of the entire liquid will affect the viscosity, so it is necessary to evenly stir and wait until The viscosity is measured when the recovered liquid is at rest. In addition, after the liquid to be recovered is used in the machine 2 for 8200819211, some components will volatilize and cause the viscosity of the liquid to be recovered to pass. Therefore, when the detection fails, the steps may be first stored in the blending unit 15 + τ , 5 weeks and liquid, through the pump 152 流量 flow, and sent to the recovery bin U to be mixed with the τ " servant recovery liquid. It is also necessary to use the agitator, 14 汸俨, ,, +, and the recovered liquid and the mixture to be uniformly mixed with the knife after mixing, and then allowed to stand for a period of time, and then the detection operation is repeated. Ding dan repeat (five) to explain is 'the invention is based on the type of liquid to be recycled to decide which kind of blending liquid to use' when the waiting liquid is a positive type resist, specifically for example: propylene glycol methyl ether acetate vinegar (PGMEA) The positive-type resistor made of the main solvent is a mixed solution of cyclohexanone (c6H10〇) and propylene glycol-methyl acetate (PGMEA); when the liquid to be recovered is a negative photoresist When the solution is a solution prepared mainly from xylene. (3) Step 33 is performed to return the qualified recovery liquid to the machine table 2: using the second pump 132 and the second conduit 131, the qualified recovery liquid is transported back to the machine table 2 for operation of the machine table 2 Reuse. More specifically, the action of mixing and detecting the liquid to be recovered and the solution may be repeated a plurality of times. If the liquid to be recovered still fails to meet the qualification standard after repeated treatment and detection, it cannot be recycled and becomes waste liquid. In step 322, the waste liquid is discharged through a discharge port of the recovery tank (not shown). Then, the new liquid unit 18 is replenished from the new liquid unit 18 in the recovery tank U, and is transported back to the machine table 2, and the liquid wall of the liquid recycling device is recirculated before the new liquid medicine is replenished. Wait for the cleaning to avoid contaminating the new liquid with residual waste. Of course, the new liquid medicine 200819211 can also be used in the machine 2 until the machine 2 has accumulated a certain weight = the liquid to be recovered, and then the recycling process of the present invention can be used to reserve the liquid to be recovered. Recycling testing work. • As can be seen from the above description, the present invention is mainly used for immediate recycling by detecting the liquid to be recovered on the line during the operation of the in-line (in-lme) and regenerating the liquid mixture. The waste of the liquid medicine 'and the need to be returned to the original factory for recycling after the liquid is recovered is recovered. Therefore, the process of the liquid circulation of the present invention can certainly achieve the advantage of reducing the production cost. - 4 Figure 2 3, one of the liquid recycling processes of the present invention is a second preferred method: the example is also used in conjunction with a liquid recycling device, the liquid recycling device and the aforementioned The structure is substantially the same, except that the first connection unit 12 is an additional setting - the first temporary storage bucket 123 'the second connection unit 13 is an additional setting - the second temporary storage bucket 133, and the present embodiment The new liquid unit 18 is connected to the second temporary storage tank 133. The recycling process of the present invention also includes: step 3 i collects the liquid to be recovered discharged from the machine 2, step 32 checks the riding time, and step 33 returns the qualified liquid to be returned to the machine. 2 steps. In the v-th 31, the liquid to be recovered generated by the operation of the machine 2 is temporarily stored in the temporary storage tank 123 until a certain amount is accumulated, and then sent to the recovery barrel 11 for detection and recovery, and While detecting the liquid to be recovered, the new liquid to be recovered from the machine 2 can be continuously discharged to the first temporary storage tank 123 for storage. The qualified recovery liquid is transported and temporarily stored in the second temporary storage tank 133. When the machine 2 needs to be replenished, it is sent back to the machine 2 for use. 10 200819211 To the 5 brothers, it is to go to live, the 丨人坆碑 淮士田收液 still can not be used as a waste liquid after repeated treatment, and the original use of the recycling barrel is temporarily stored in the first: The temporary storage 33 should be used by the machine 2. If the ms ” (3) liquid collection bundle is continuously supplied, if the younger one has not received the liquid in the temporary storage tank 133, it will directly be taken from the new liquid single A丨- k for the new liquid to the second Z and then sent to the machine 2' so that the machine 2 can be supplied at any time = that is, 'the recycling process of this implementation is the waiting liquid that has not been tested, tested, and tested. The storage quality of the high-quality qualified recovery liquid is read, and the present embodiment has the advantages of directly reprocessing the liquid to be recovered on-line, avoiding waste of the liquid, and reducing the production cost, etc. The preferred embodiments of the present invention are not intended to limit the scope of the present invention, and the simple equivalent changes and modifications made in the scope of the invention and the description of the invention are still within the scope of the invention. Inside. [Simplified illustration] 1 is a schematic diagram of a liquid circulation recovery apparatus; FIG. 2 is a flow chart of a first preferred embodiment of the liquid circulation recovery process of the present invention; and FIG. 3 is a schematic diagram of a liquid circulation recovery apparatus, and the apparatus It is used in conjunction with the second preferred embodiment of the liquid recycling process of the present invention. 200819211 [Explanation of main component symbols] 1b...·..., recycling bin 151 * .....*weights 111... •...weight meter 152 · ... pump 12 ...·· •...first connection unit 16...••...·viscometer m...·first conduit 17... >degree of separation δ ten 122...,...first pump 18... .... new liquid unit 13 ..... • second connecting unit 18...weight meter 131...the second duct 2..........the machine 132......the second pump 21... ...substrate 133... •...Second temporary storage tanks 31, 32, 33, 3 14 * * * * * •...Agitator...Step 15 •...···Reconciliation unit 322 12