TW200805730A - Organic electroluminescent display panel and method for manufacturing the same - Google Patents

Organic electroluminescent display panel and method for manufacturing the same Download PDF

Info

Publication number
TW200805730A
TW200805730A TW95125143A TW95125143A TW200805730A TW 200805730 A TW200805730 A TW 200805730A TW 95125143 A TW95125143 A TW 95125143A TW 95125143 A TW95125143 A TW 95125143A TW 200805730 A TW200805730 A TW 200805730A
Authority
TW
Taiwan
Prior art keywords
layer
width
cathode
forming
organic electroluminescent
Prior art date
Application number
TW95125143A
Other languages
Chinese (zh)
Other versions
TWI316774B (en
Inventor
Ching-Feng Chung
Cheng-Wei Huang
Yi-Chung Lin
Ya-Wen Wu
Original Assignee
Chi Mei El Corp
Chi Mei Optoelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chi Mei El Corp, Chi Mei Optoelectronics Corp filed Critical Chi Mei El Corp
Priority to TW95125143A priority Critical patent/TWI316774B/en
Publication of TW200805730A publication Critical patent/TW200805730A/en
Application granted granted Critical
Publication of TWI316774B publication Critical patent/TWI316774B/en

Links

Landscapes

  • Electroluminescent Light Sources (AREA)

Abstract

A rampart is formed on a cathode. The cathode is formed on a substrate. The rampart comprises a overhanging portion and an insulator. The insulator is connected to the bottom of the overhanging portion. The insulator has a top surface and a bottom surface. The width of the overhanging portion is more than that of the top surface. And the width of the overhanging portion is less than that of the bottom surface.

Description

20_iZB™ 九、發明說明: 【發明所屬之技術領域】 本發明是有關於一種有機略、 造方法,且特別是有關於一種 發光顯示面板及其製造方法 本,日桩别县右關於一紅备光顯示面板及其製 /、有陰極分隔層之有機電激 【先前技術】20_iZBTM IX. Description of the Invention: [Technical Field] The present invention relates to an organic method and a method for manufacturing the same, and particularly relates to a light-emitting display panel and a method for manufacturing the same, and the same is true for Light display panel and its/or organic electromagnet with cathode separation layer [Prior Art]

由於具有輕薄的特性,有播、略、 electroluminescent diSplay =激發光顯示器(organic 產業的明曰之星。請參照第c為平面顯示器 於止欠固士 圖,其繪示傳統之有機電激 务光顯不面板之不思圖。有機畲、、紅 紙包教發光顯示面板1〇,主要 在基板Π上依序形成陽極12、古拖+ a々 w有機電激發光層13以及陰 極18。藉由分別對陽極12及降耦]δ 久k極18施加一電壓,使電流 通過有機電激發光層13而發夯。而炎^ 士 尤。而為了讓面板各部位產 生不同之影像,係藉由多個陰極分隔層16,在—陽極12 上區分不同之部位,藉由控制不同部位之陰極18之電壓, 產生不同之顯像效果。因此如何避免陰極與陽極產生短路 (short circuit)直接導通,以及避免不同部位之陰極導 通而失去顯示不同影像之能力,便成為製造過程中的重要 課題。 如第1圖所示,陰極分隔層16主要包括一懸突部 (overhanging p〇rti〇n)15 及一絕緣體(insulator)14。其 中絕緣體14制有機材料,例如聚硫亞銨(p〇lyimide)加 工形成°但是傳統之製程中,由於懸突部15的阻擋,使Due to its thin and light characteristics, there is a broadcast, slightly, electroluminescent diSplay = excitation light display (a clear star of the organic industry. Please refer to the c for the flat panel display in the stagnation map, which shows the traditional organic electro-excitation light The panel is not imaginary. The organic enamel and red paper teaches the illuminating display panel, and the anode 12, the ancient drag + a 々w organic electroluminescent layer 13 and the cathode 18 are sequentially formed on the substrate raft. A voltage is applied to the anode 12 and the decoupling] δ long-k pole 18, respectively, so that the current passes through the organic electro-optic excitation layer 13 and the yttrium is generated. In order to produce different images of various parts of the panel, The plurality of cathode separation layers 16 distinguish different portions on the anode 12, and control different voltages of the cathodes 18 at different portions to produce different imaging effects. Therefore, how to avoid short circuit between the cathode and the anode is directly conducted. And to avoid the cathode conduction of different parts and lose the ability to display different images, it becomes an important issue in the manufacturing process. As shown in Fig. 1, the cathode separation layer 16 mainly includes an overhang (ove) Ranging p〇rti〇n)15 and an insulator 14. The insulator 14 is made of an organic material, such as polypyridinium (p〇lyimide), but is formed by a conventional process, due to the obstruction of the overhang 15 Make

• rW2399PA 200805730 Π ^時’有㈣激發光層13往往無法完全覆蓋陽 可此栋邱:成—缺口 2〇,透過缺口 2〇,沈積陰極18時極 緣^14°#^陰極18與陽極12接觸而發生短路。另外,絕 搞W沾、、木用有機材料,在蒸鍵有機電激發光们3與陰 癸甚斗過私中,可能因為高溫使的有機材料中的溶劑揮 二體氣體溢出(—η㈣ 二產產權 【發明内容】 有鏗於此’本發明的目的就是在提供一種有 光顯示面板及JL赞纟生古、么 , , . 7 ^ 法以及採1陰齡隔層的製造方 不同之材料’可以有效降低面板發生 率,提南產品的可靠度。 械 =核明的目的,提出—種_分隔層,係形成 -%極上,%極形成於—基板上。陰極分隔層包括—縣突 部及一絕緣體。絕緣體連結懸突部之 心大 -底面。懸突部之寬度係大於頂面 面及 度小於底面之寬度。 ,度,域突部之寬 板imr㈣’提出—種有機電激發光顯示面 板’包括-基板、-&極、—陰極分隔層、—有機 光層及—陰極。陽極形成於基板上,陰極分隔層形成於陽 ==隔層包括一懸突部及'絕緣體,絕緣體連結 一之下方,具有—頂面及一底西。有機電激發光層係 7 20080^ϋ™ 接觸部分之絕緣體,陰極形成於 + 部之寬度大於頂面之寶产,θ Μ 々电激發光層上。懸突 見度且懸突部之當ώ 度 見度小於底面之寬 根據本發明的目的,提出一 ^ 之製造方法,包括:提供一其板有機電激發光顯示面板 上;接著,形成至少一^^反5亚形成多個陽極於基板 、巴緣層於陽極卜·处 阻層於絕緣層上’並經曝光、,:、、>後’形成一光 接著,,形成多個絕緣:=觸個圖案; 然後,烘烤圖案,形成多個縣 =位於&緣體上, 多個陰極分隔層(rainpart);接著,體與懸突部形成 層於陽極上,有機電激& v形成一有機電激發光 後,形成陰極於分之絕緣體;然 -底面,且懸突部之==上。絶緣體具有-頂面及 度小於底面之寬度。面之寬度,且懸突部之寬 板,包括的目3的’提出另—種有機電激發光顯示面 土、一陽極、多個陰極分隔層、一有機電激 ^ 險極形成於基板上,多個陰極分隔層形 成於險極上。发由金 體,絕緣體連陰極分隔層包括—懸突部及一絕緣 ^ ^ ' 、、"於懸突部之下方。有機電激發光層位於兩 相鄰之陰極分隐 ^ 7 同層之間,有機電激發光層具有一第一寬 度。陰極形成於 、开機電激發光層上並位於兩相鄰之陰極分 隔層之間,陰極复士 度。 具有-第二寬度,第二寬度係大於第一寬 根據本發明的目的,提出另一種有機電激發光顯示面 8 200805730• rW2399PA 200805730 Π ^ When there is (four) excitation layer 13 often can not completely cover the yang can be this Qiu: into the gap 2 〇, through the gap 2 〇, the deposition of the cathode 18 when the edge ^ 14 ° # ^ cathode 18 and anode 12 A short circuit occurs during contact. In addition, we must do W-belt, wood organic materials, in the steam-bonded organic electro-excitation light 3 and the yin smashed in the private, may be due to high temperature caused by the solvent in the organic material vapor gas overflow (-η (four) two Property rights [Summary of the Invention] The purpose of the present invention is to provide a light-emitting display panel and a material different from the manufacturer of the JL 纟 纟 纟 、 、 、 、 、 、 、 、 、 'It can effectively reduce the panel incidence rate, the reliability of the product. The purpose of the tool = verification, proposed - the separation layer, the formation -% pole, the % pole formed on the substrate. The cathode separation layer includes - county The insulator and the insulator are connected to the core-bottom of the overhanging portion. The width of the overhanging portion is greater than the width of the top surface and the width is smaller than the width of the bottom surface. The degree, the wide plate of the domain protrusion imr(4)' is proposed to be an organic electric excitation The light display panel 'includes a substrate, a -&pole, a cathode separator, an organic light layer, and a cathode. The anode is formed on the substrate, and the cathode spacer layer is formed on the anode == the spacer includes an overhang portion and an 'insulator , the insulator is connected under one , having a top surface and a bottom west. The organic electroluminescence layer 7 insulator is formed in the contact portion of the insulator, and the cathode is formed on the surface of the + portion, which is larger than the top surface, and the θ Μ 々 electrically excited layer. According to the object of the present invention, a method for manufacturing the visibility and the overhanging portion is less than the width of the bottom surface. According to the object of the present invention, a method for manufacturing the same includes: providing a plate organic electroluminescent display panel; and then forming at least one ^ ^Sub-5 sub-forms a plurality of anodes on the substrate, the ba-layer layer is on the anode layer, and the resist layer is on the insulating layer' and is exposed, and then a light is formed to form a plurality of insulations: Touching a pattern; then, baking the pattern to form a plurality of counties = located on the & edge, a plurality of cathode partitions; then, the body and the overhangs are layered on the anode, organic galvanic & v After forming an organic electro-excitation light, a cathode is formed on the insulator; the bottom surface, and the overhang portion == upper. The insulator has a top surface and a degree smaller than the width of the bottom surface. The width of the surface, and the overhang portion Wide board, including the head 3's proposed another type of organic electro-optic display The surface soil, an anode, a plurality of cathode separation layers, and an organic electro-active excitation electrode are formed on the substrate, and a plurality of cathode separation layers are formed on the dangerous pole. The gold body, the insulator and the cathode separation layer include an overhanging portion and An insulating ^ ^ ' , , " is below the overhanging portion. The organic electroluminescent layer is located between two adjacent cathode layers, and the organic electroluminescent layer has a first width. The cathode is formed on the cathode. And on the electro-optic excitation layer and between the two adjacent cathode separation layers, the cathode is reciprocal. The second width is greater than the first width, and the second width is greater than the first width. According to the object of the present invention, another organic electrical excitation is proposed. Light display surface 8 200805730

肺篇· IW2399PA 板之衣方法’包括*提供一基板,拍/ 板上;接著’形成至少一絕緣層於陽極^ 二個陽極於基 光阻層於絕緣層上,並經曝光、§ ,然後,形成一 案;接著,刪緣層’形成先多個 體上;然後,烘烤圖案,形成多個懸 «案位於絕緣 部形成多個陰極分隔層;接著,形成=1緣體與懸突 陽極上並位於兩相鄰之絕緣體之間 ^電激發光層於 -第-寬度;然後,形成-陰極於有機敫發光層具有 於兩相鄰之絕緣體之間,陰極具有—株蝥光層上並位 係大於第一寬度。 弟一見度,第二寬度 為讓本發明之上述目的、特徼、 懂,下文特舉-較佳實施例,並配=點能更明顯易 明如下: 所附,作詳細說 【實施方式】 請參照第2圖,其繪示本發明一* _ l…一 ^^ 較佳貫施例的有機電 ㈣光顯示面板之示意圖。有機電激發光顯示面板1()0, 包括-基板11G,陽極12G形成於基板m上。陰極分隔 極120上並接觸部分之絕緣 層160至少包括一層絕緣體,本實施例中係較佳地包括第 一絕緣體142a、第二絕緣體U4a以及懸突部n依_欠 形成於陽極12〇上。懸突部l5〇a之寬度W3大於第二絕緣 體144a之頂面寬度W2’且懸突部之寬度抑小於第一絕緣 ?:,之底面寬度,。而有機電Μ光層130形成‘陽 ’陰極180則形成於有機電 9Pulmonology · IW2399PA plate clothing method 'includes * provides a substrate, pat / board; then 'forms at least one insulating layer on the anode ^ two anodes on the base photoresist layer on the insulating layer, and is exposed, §, then Forming a case; then, deleting the edge layer 'forms a plurality of bodies first; then, baking the pattern to form a plurality of suspensions, the case is formed at the insulating portion to form a plurality of cathode separation layers; then, forming a=1 edge body and an overhang anode Between the two adjacent insulators, the electro-optic light layer is at a -first width; then, the cathode is formed between the two adjacent insulators, and the cathode has a light-emitting layer The bit system is larger than the first width. The second aspect is the above-mentioned purpose, features, and understanding of the present invention. The following specific descriptions - preferred embodiments, and the matching points can be more clearly seen as follows: Attached, detailed description [Embodiment] Please refer to FIG. 2, which is a schematic diagram of an organic electric (four) light display panel according to a preferred embodiment of the present invention. The organic electroluminescent display panel 1()0 includes a substrate 11G, and an anode 12G is formed on the substrate m. The insulating layer 160 on the cathode separator 120 and the contact portion includes at least one insulator. In this embodiment, the first insulator 142a, the second insulator U4a, and the overhang portion n are formed on the anode 12A. The width W3 of the overhanging portion l5〇a is greater than the top surface width W2' of the second insulator 144a and the width of the overhanging portion is less than the width of the bottom surface of the first insulating layer. The organic electro-optical layer 130 forms a 'positive' cathode 180 which is formed on the organic electricity.

:W2399PA 200805730 激發光層130上。有機電激 丨 分隔麵之絕緣體之間具=層i=兩:鄰之獅 相鄰之陰極分隔請之絕==1 « - - ^ ^ n9 ^ ^ 巴緣體之間具有一第二寬度D2, 且弟一見度D2係大於第—寬度如。 請參照第3A圖〜3G圖,复洽千士八D 之有機雷哼癸# 4 ,、、、,日不本發明一較佳實施例 圖。首先,提供一基板110,廿e 月'…弟 上。往夂日”笛训闰垃亚形成一除極120於基板110 極:二? ,形成一第-絕緣層142於陽 才第2 士,再形成一第二絕緣層144於第— H4 :車;;地採用議合物邮㈣ =咖咖1 v鱗一sitlQn,GV職 可僅以單一材料形成。 I曰 絕緣二/第%圖。然後,形成—絕緣之光阻層於第二 ㈤ 亚_光、顯影之步驟形成多個光阻圖案 實施射較佳地係採用_正型光崎料。請參照 …。 Γ 緣層142及第二絕緣層i44, 第-絕緣體142a及第二絕緣體144a。由於氮石夕 大於二氧切’因此形成上窄下寬的 在此刻步驟中’可採用濕侧(赠etching) :法:亦可㈣乾_(dryetGhing)料。在本實施例 二,較祕去除表面的有機污染 ^ 刻後的絕緣體之側面:W2399PA 200805730 Excitation layer 130. The insulator between the organic electro-active separation surfaces has a layer i=two: the adjacent lions are adjacent to the cathode separation please == 1 « - - ^ ^ n9 ^ ^ The bar-edge has a second width D2 And the younger one sees that the D2 is greater than the first-width. Referring to Figures 3A to 3G, the organic thunder of #千八八D is re-inquiring, and a preferred embodiment of the invention is not shown. First, a substrate 110 is provided, 廿e月'... To the next day, the flute training form a depolarization 120 on the substrate 110 pole: two?, forming a first-insulating layer 142 in the second phase of the Yangcai, and then forming a second insulating layer 144 in the first - H4: car ;; the use of the composition of the compound (four) = coffee 1 v scale one sitlQn, GV jobs can be formed only in a single material. I 曰 insulation two / the first figure. Then, the formation of - insulating photoresist layer in the second (five) The step of forming light and developing a plurality of photoresist patterns is preferably performed by using a positive-type photo-baked material. Please refer to the edge layer 142 and the second insulating layer i44, the first insulator 142a and the second insulator 144a. Since the nitrous oxide is larger than the dioxotomy, the formation of the upper narrow and the lower width can be used in the present step. The wet side can be used: the method can also be used as the drytGhing material. In the second embodiment, it is more secret. Remove organic contamination from the surface ^ side of the insulative insulator

TW2399PA 200805730 162 ’係較佳地與第-絕緣懸也之底面形成小於或等於 30°之夾角。第-絕緣體l42a之底面與絕緣體之侧面162 賴適#之角度,可以錢續之蒸鍍製程時,讓蒸鏡物更 谷易攸上絕緣體之侧面⑽,降低產生缺口而露出陽極12〇 之機率。 睛茶照第3E圖,然後,块烤光阻圖案15〇,使其燒 退形成多個懸突部胁。第〜絕緣體心、第二絕緣體 ⑽與㈣部施形成多域齡隔層&卿的)16〇。 經烘賴懸突部15〇a之寬度W3大於第二絕緣體u4a之 =面見度W2 ’且懸突部之宽度小於第—絕緣體之底面 見度W1。且烘烤可使光阻中内含的有機物質揮發,避免日 後溢出對產品造成不良影響。 明參如第3F圖’接著,形成-有機電激發光層130 於陽極120上,#機電激發光層13〇於兩相鄰之陰極分隔 層160之絕緣體之間具有第—寬度。請參照帛%圖, 最後:形,多個陰極180於有機電激發光層13〇上,陰極 180係以蒸鑛方式形成於有機電激發光層13〇上,陰極18〇 於兩相鄰之陰極分隔層16〇之絕緣體之間具有第二寬度 D2 ’第二寬度D2大於第一寬度D1,使陰極18〇能夠完全 覆蓋有機電激發光層130。由於懸突部160之寬度W3小於 絕緣體之底面寬度W1,因此在沈積有機電激發光層130 時,有機電激發光層130之沈積物不會因為懸突部160的 遮擋而使絕緣體及有機電激發光層130間形成缺口而露出 陽極120,使得蒸鍍陰極時使因陰極沈積物接觸陽極120 11 ΓΨ2399ΡΑ 200805730 形成短路。而絕緣體之侧面162,與第_絕緣體⑽之底 面形成小於或等於30。夕永&愚-r + 之文角更可確保有機電激發光層 ⑽可依附連接至絕緣體上’使有機電激發光層13〇及絕 ,體,不會產生缺Π。因此有機電激^層⑽可以完全 覆蓋陽極12 0,並可接網a丨立κ八 I」接觸到部分之絕緣體,可以消除陽極 120^^ 突部& ΐδ〇 :面162’陰極刚在形成過程中不會跨越懸 像功能失效的風險。陰極接觸,可有效降低顯 及其實、7所揭露之有機電激發絲示面板 減少陰極與陽極因伽&尤增兀王復褒於〶極, 無機材料,如__㈣生贿的解。而絕緣體採用 outffasinfr Α—虱化矽、氮化矽等,更可以防止發生 :;:::! 然其並非ί然本發明已以—較佳實_揭露如上, 本發明之精神/林發明何熟習此技藝者,在不脫離 本發明之㈣乾#可作各種之更動與潤飾,因此 準。 ’、邊fe圍當視後附之申請專利範圍所界定者為 12TW2399PA 200805730 162 ' preferably forms an angle of less than or equal to 30° with the bottom surface of the first insulating suspension. The bottom surface of the first insulator 1442a and the side surface 162 of the insulator are at the angle of Lai Shi, and the evaporation mirror can be used to make the surface of the insulator (10) easier to reduce the gap and expose the anode 12〇. . The eye tea is photographed in Fig. 3E, and then the block photoresist pattern 15 is baked to cause it to collapse to form a plurality of overhanging portions. The first insulator core, the second insulator (10) and the (four) portion are formed into a multi-domain aged layer & The width W3 of the overhanging projection 15a is larger than the visibility W2' of the second insulator u4a and the width of the overhang is smaller than the bottom surface visibility W1 of the first insulator. And baking can volatilize the organic substances contained in the photoresist to avoid adverse effects on the product in the future. The ginseng is as shown in Fig. 3F. Next, an organic electroluminescent layer 130 is formed on the anode 120, and the electromechanical excitation layer 13 has a first width between the insulators of the two adjacent cathode separators 160. Please refer to the 帛% diagram, finally: shape, a plurality of cathodes 180 on the organic electroluminescent layer 13 ,, the cathode 180 is formed on the organic electroluminescent layer 13 蒸 by distillation, and the cathode 18 is adjacent to the two The insulators of the cathode separator layer 16 have a second width D2 between the second width D2 and the first width D1, so that the cathode 18A can completely cover the organic electroluminescent layer 130. Since the width W3 of the overhang portion 160 is smaller than the width W1 of the bottom surface of the insulator, when the organic electroluminescent layer 130 is deposited, the deposit of the organic electroluminescent layer 130 does not cause the insulator and the organic electricity due to the occlusion of the overhang portion 160. A gap is formed between the excitation light layers 130 to expose the anode 120, so that the cathode is vapor-deposited to form a short circuit due to contact of the cathode deposit with the anode 120 11 ΓΨ 2399 ΡΑ 200805730. The side surface 162 of the insulator forms less than or equal to 30 with the bottom surface of the first insulator (10). Xiyong & yu-r + angle can ensure that the organic electro-optic layer (10) can be attached to the insulator to make the organic electro-optic layer 13 and the body, without defects. Therefore, the organic electro-active layer (10) can completely cover the anode 120, and can be connected to the insulator of the network, and can eliminate the anode 120^^ protrusions & ΐδ〇: the surface 162' cathode is just The risk of failure of the suspension function will not be exceeded during the formation process. Cathodic contact can effectively reduce the appearance of the organic electro-excitation wire panel exposed by the 7th, and reduce the cathode and anode gamma & 兀 兀 褒 褒 褒 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The insulator adopts outffasinfr Α 虱 虱 虱 矽 矽 矽 矽 矽 矽 , , ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; Those skilled in the art can make various changes and retouchings without departing from the invention (4). ', the side defined by the scope of the application for patents is 12

200805730rw2399PA * 【圖式簡單說明】 第1圖纟會示傳統之有機電激發光顯示面板之示意圖; 第2圖繪示本發明一較佳實施例的有機電激發光顯 示面板之示意圖;以及 第3A圖〜3G圖繪示本發明一較佳實施例之有機電激 發光顯示面板之製造流程示意圖。 【主要元件符號說明】 # 10、100 :有機電激發光顯示面板 11、 110 :基板 12、 120 ··陽極 13、 130 :有機電激發光層 14:絕緣體 15、 150a :懸突部 16、 160 :陰極分隔層 18、180 :陰極 _ 142 ··第一無機絕緣層 142a :第一絕緣體 144:第二無機絕緣層 144a :第二絕緣體 150:光阻圖案 162 :侧面 13200805730rw2399PA * [Simplified Schematic] FIG. 1 is a schematic diagram showing a conventional organic electroluminescent display panel; FIG. 2 is a schematic view showing an organic electroluminescent display panel according to a preferred embodiment of the present invention; and 3A FIG. 3G is a schematic view showing a manufacturing process of an organic electroluminescent display panel according to a preferred embodiment of the present invention. [Explanation of main component symbols] #10,100: Organic electroluminescence display panel 11, 110: Substrate 12, 120 · Anode 13, 130: Organic electroluminescence layer 14: Insulator 15, 150a: Overhangs 16, 160 : Cathode Separation Layer 18, 180: Cathode _ 142 · First Insulation Layer 142a: First Insulator 144: Second Insulation Layer 144a: Second Insulator 150: Resistor Pattern 162: Side 13

Claims (1)

FW2399PA 200805730 # 十、申請專利範圍: 1, 一種陰極分隔層(rampart),係形成於一陽極 上,該陽極形成於一基板上,該陰極分隔層包括: 一懸突部; 一絕緣體,連結該懸突部之下方,具有一頂面及一底 面; 其中,該懸突部之寬度係大於該頂面之寬度,且該懸 突部之寬度小於該底面之寬度。 • 2.如申請專利範圍第1項所述之陰極分隔層,其中 該絕緣體更包含一侧面,該側面係分別連接該頂面及該底 面,且與該底面形成一失角,該夾角係小於或等於3 0 °。 3. 如申請專利範圍第1項所述之陰極分隔層,該絕 緣體係由一種無機絕緣材料所形成。 4. 如申請專利範圍第3項所述之陰極分隔層,其中 該絕緣體之材料為二氧化發(S i 〇2)。 5. 如申請專利範圍第1項所述之陰極分隔層,其中 ® 該絕緣體至少具有一第一層及一第二層,分別由二種不同 之無機絕緣材料所形成,該第二層係位於該第一層上,且 該第二層之被蝕刻的速率大於該第一層。 6. 如申請專利範圍第5項所述之陰極分隔層,其中 該第一層及該第二層之材料分別為二氧化矽(Si〇2)及氮 矽化合物(SiNx)。 7. 如申請專利範圍第1項所述之陰極分隔層,其中 該懸突部係使用先阻材料所形成。 14 20080523〇™ 8. 如申請專利範圍第7項所述之陰極分隔層,其中 該懸突部係使用一正型光阻材料。 9. 一種有機電激發光顯示面板 (organic electroluminescent display panel, OELD),包括: 一基板; 一陽極,形成於該基板上; 一陰極分隔層,形成於該陽極上,包括: 一懸突部;及 一絕緣體,連結於該懸突部之下方,具有一頂 面及一底面; 一有機電激發光層,該有機電激發光層係接觸部分之 該絕緣體;以及 一陰極,形成於該有機電激發光層上; 其中,該懸突部之寬度大於該頂面之寬度,且該懸突 部之寬度小於該底面之寬度。 10. 如申請專利範圍第9項所述之顯示面板,其中該 絕緣體更包含一侧面,該侧面係分別連接該頂面及該底 面,且與該底面形成一夾角,該夾角係小於或等於30°。 1L如申請專利範圍第9項所述之顯示面板,該絕緣 體係由一種無機絕緣材料所形成。 12如申請專利範圍第11項所述之顯示面板,其中談 絕緣體之材料為二氧化矽(Si〇2)。 13.如申請專利範圍第9項所述之顯示面板,其中該 絕緣體至少具有一第一層及一第二層,分別由二種不同之 15 FW2399PA 200805730 無機絕緣材料所形成,該第二層係位於該第一層上,該第 二層之被姓刻速率大於該第一層。 14如申請專利範圍第13項所述之顯示面板,其中該 第一層及該第二層之材料分別為二氧化矽(Si〇2)及氮矽化 合物(SiNx)。 15. 如申請專利範圍第9項所述之顯示面板,其中該 懸突部係使用光阻材料所形成。 16. 如申請專利範圍第15項所述之顯示面板,其中 該懸突部係使用一正型光阻材料。 17. —種有機電激發光顯示面板之製造方法,包括: 提供一基板,並形成複數個陽極於該基板上; 形成至少一絕緣層於該些陽極上; 形成一光阻層於該絕緣層上,並經曝光、顯影之步驟 形成複數個圖案; 蝕刻該絕緣層,形成複數個絕緣體,該些圖案位於該 些絕緣體上; 烘烤該些圖案,形成複數個懸突部,該些絕緣體與該 些懸突部形成複數個陰極分隔層(rampart); 形成一有機電激發光層於該些陽極上,該有機電激發 光層並接觸部分之該些絕緣體;以及 形成複數個陰極於該有機電激發光層上; 其中,該絕緣體具有一頂面及一底面,該懸突部之寬 度大於該頂面之寬度,且該懸突部之寬度小於該底面之寬 度。 16 200805730rW2399PA ' 18 ·如申請專利範圍第17項所述之方法,其中形成 一絕緣層之步驟中,更包括: 形成一第一層於該陽極上; 形成一第二層於該第一層上; 其中’該第二層之被|虫刻速率大於該第一層。 19如申請專利範圍第17項所述之方法,其中形成一 光阻層之步驟中,’係使用一正型光阻材料。 20·如申請專利範圍第17項所述之方法,其中蝕刻 鲁 該絕緣層之步驟中’係使用濕餘刻(wet etching)方法。 21·如申請專利範圍第π項所述之方法,其中姓刻 該絕緣層之步驟中,係使用乾餘刻(dry etching)方法。 22·如申請專利範圍第π項所述之方法,其中蝕、刻 該絕緣層以形成該絕緣體之步驟中,每一該些絕緣體之一 侧面與每一該些絕緣體之該底面形成一夾角,該夾角係小 於或等於30°。 23·如申請專利範圍第π項所述之方法,其中於形 ® 成至少一絕緣層之步驟中,係以一化學氣相沈積法 (Chemical vapor deposition,CVD)所形成。 24·如申請專利範圍第π項所述之方法,其中於形 成複數個陰極於該有機電激光層上之步驟中,該些陰極係 以蒸鍍方式形成於該有機電激發光層上。 25. —種有機電激發光顯示面板,包括: 一基板; 一陽極,形成於該基板上; 17 2〇〇8〇5730rW2399PA f 複數個陰極分隔層,形成於該陽極上,其中每一該陰 極分隔層包括: 一懸突部;及 一絕緣體,連結於該懸突部之下方; 一有機電激發光層,位於兩相鄰之該陰極分隔層之 間,該有機電激發光層具有一第一寬度;以及 一陰極,形成於該有機電激發光層上並位於兩相鄰之 該陰極分隔層之間,該陰極具有一第二寬度; ⑩ 其中,該第二寬度係大於該第一寬度。 26. —種有機電激發光顯示面板之製造方法,包括: 提供一基板,並形成複數個陽極於該基板上; 形成至少一絕緣層於該些陽極上; 形成一光阻層於該絕緣層上,並經曝光、顯影之步驟 形成複數個圖案; 蚀刻該絕緣層,形成複數個絕緣體,該些圖案位於該 些絕緣體上; ® 烘烤該些圖案,形成複數個懸突部,該些絕緣體與該 些懸突部形成複數個陰極分隔層(rampart); 形成一有機電激發光層於該些陽極上並位於兩相鄰 之該絕緣體之間,該有機電激發光層具有一第一寬度;以 及 形成一陰極於該有機電激發光層上並位於兩相鄰之 該絕緣體之間,該陰極具有一第二寬度; 其中,該第二寬度係大於該第一寬度。 18FW2399PA 200805730 #十, the patent scope: 1, a cathode spacer (rampart) is formed on an anode, the anode is formed on a substrate, the cathode separation layer comprises: an overhang; an insulator, the connection The underside of the overhang has a top surface and a bottom surface; wherein the width of the overhang portion is greater than the width of the top surface, and the width of the overhang portion is smaller than the width of the bottom surface. 2. The cathode separator of claim 1, wherein the insulator further comprises a side surface that connects the top surface and the bottom surface, respectively, and forms a lost angle with the bottom surface, the angle is less than Or equal to 3 0 °. 3. The cathode separator according to claim 1, wherein the insulation system is formed of an inorganic insulating material. 4. The cathode separator according to claim 3, wherein the material of the insulator is SiO 2 (S i 〇 2). 5. The cathode separator of claim 1, wherein the insulator has at least a first layer and a second layer, respectively formed of two different inorganic insulating materials, the second layer being located On the first layer, the second layer is etched at a higher rate than the first layer. 6. The cathode separator of claim 5, wherein the materials of the first layer and the second layer are respectively cerium oxide (Si〇2) and a nitrogen cerium compound (SiNx). 7. The cathode separator of claim 1, wherein the overhang is formed using a precursor material. The cathode separator layer of claim 7, wherein the overhanging portion uses a positive photoresist material. An organic electroluminescent display panel (OELD), comprising: a substrate; an anode formed on the substrate; a cathode separation layer formed on the anode, comprising: an overhang; And an insulator connected to the underside of the overhanging portion, having a top surface and a bottom surface; an organic electroluminescent layer, the organic electroluminescent layer is in contact with the insulator; and a cathode formed on the organic The excitation layer has a width greater than a width of the top surface, and a width of the overhang portion is smaller than a width of the bottom surface. 10. The display panel of claim 9, wherein the insulator further comprises a side surface respectively connecting the top surface and the bottom surface and forming an angle with the bottom surface, the angle being less than or equal to 30 °. 1L. The display panel of claim 9, wherein the insulating system is formed of an inorganic insulating material. 12. The display panel of claim 11, wherein the material of the insulator is cerium oxide (Si 〇 2). 13. The display panel of claim 9, wherein the insulator has at least a first layer and a second layer, respectively formed of two different 15 FW2399PA 200805730 inorganic insulating materials, the second layer Located on the first layer, the second layer is named at a higher rate than the first layer. The display panel of claim 13, wherein the material of the first layer and the second layer are respectively cerium oxide (Si〇2) and a nitrogen cerium compound (SiNx). 15. The display panel of claim 9, wherein the overhang is formed using a photoresist material. 16. The display panel of claim 15, wherein the overhanging portion uses a positive photoresist material. 17. A method of fabricating an organic electroluminescent display panel, comprising: providing a substrate and forming a plurality of anodes on the substrate; forming at least one insulating layer on the anodes; forming a photoresist layer on the insulating layer Forming a plurality of patterns by exposing and developing; etching the insulating layer to form a plurality of insulators, wherein the patterns are located on the insulators; baking the patterns to form a plurality of overhangs, the insulators and The overhangs form a plurality of cathode spacers; forming an organic electroluminescent layer on the anodes, the organic electroluminescent layer contacting a portion of the insulators; and forming a plurality of cathodes there The electromechanical excitation layer has a top surface and a bottom surface, the width of the overhang portion is greater than the width of the top surface, and the width of the overhang portion is smaller than the width of the bottom surface. The method of claim 17, wherein the step of forming an insulating layer further comprises: forming a first layer on the anode; forming a second layer on the first layer Where 'the second layer is | the insect engraving rate is greater than the first layer. The method of claim 17, wherein in the step of forming a photoresist layer, a positive photoresist material is used. 20. The method of claim 17, wherein the step of etching the insulating layer is performed using a wet etching method. 21. The method of claim π, wherein the step of engraving the insulating layer uses a dry etching method. The method of claim π, wherein in the step of etching and insulating the insulating layer to form the insulator, one side of each of the insulators forms an angle with the bottom surface of each of the insulators, The angle is less than or equal to 30°. The method of claim π, wherein the step of forming at least one insulating layer is formed by a chemical vapor deposition (CVD). The method of claim π, wherein in forming the plurality of cathodes on the organic electro-laser layer, the cathodes are formed on the organic electroluminescent layer by evaporation. 25. An organic electroluminescent display panel comprising: a substrate; an anode formed on the substrate; 17 2〇〇8〇5730rW2399PA f a plurality of cathode separation layers formed on the anode, wherein each of the cathodes The spacer layer comprises: an overhanging portion; and an insulator connected below the overhanging portion; an organic electroluminescent layer disposed between the adjacent cathode separating layers, the organic electroluminescent layer having a first a width; and a cathode formed on the organic electroluminescent layer and between the adjacent cathode separators, the cathode having a second width; wherein the second width is greater than the first width . 26. A method of fabricating an organic electroluminescent display panel, comprising: providing a substrate and forming a plurality of anodes on the substrate; forming at least one insulating layer on the anodes; forming a photoresist layer on the insulating layer And forming, by the step of exposing and developing, forming a plurality of patterns; etching the insulating layer to form a plurality of insulators, wherein the patterns are located on the insulators; and baking the patterns to form a plurality of overhangs, the insulators Forming a plurality of cathode spacers with the overhangs; forming an organic electroluminescent layer on the anodes and between the two adjacent insulators, the organic electroluminescent layer having a first width And forming a cathode on the organic electroluminescent layer and between the two adjacent insulators, the cathode having a second width; wherein the second width is greater than the first width. 18
TW95125143A 2006-07-10 2006-07-10 Organic electroluminescent display panel and method for manufacturing the same TWI316774B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95125143A TWI316774B (en) 2006-07-10 2006-07-10 Organic electroluminescent display panel and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95125143A TWI316774B (en) 2006-07-10 2006-07-10 Organic electroluminescent display panel and method for manufacturing the same

Publications (2)

Publication Number Publication Date
TW200805730A true TW200805730A (en) 2008-01-16
TWI316774B TWI316774B (en) 2009-11-01

Family

ID=44766156

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95125143A TWI316774B (en) 2006-07-10 2006-07-10 Organic electroluminescent display panel and method for manufacturing the same

Country Status (1)

Country Link
TW (1) TWI316774B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110767828A (en) * 2018-11-22 2020-02-07 云谷(固安)科技有限公司 Display panel, display screen and display terminal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110767828A (en) * 2018-11-22 2020-02-07 云谷(固安)科技有限公司 Display panel, display screen and display terminal
CN110767828B (en) * 2018-11-22 2023-01-24 云谷(固安)科技有限公司 Display panel, display screen and display terminal

Also Published As

Publication number Publication date
TWI316774B (en) 2009-11-01

Similar Documents

Publication Publication Date Title
CN105118929B (en) Electrode structure and organic light-emitting units and its manufacture method
CN109360900B (en) Display panel and manufacturing method thereof
CN104576705B (en) A kind of array base palte and preparation method, display device
CN104867962B (en) A kind of OLED array and preparation method thereof, OLED display
CN108780805A (en) Organic LED display panel and its manufacturing method, display device
EP3333891B1 (en) Array substrate having conductive planarization layer and preparation method therefor
TWI291309B (en) Organic electroluminescent display panel and method for manufacturing same
TW200921853A (en) Method for producing an integrated circuit and arrangement comprising a substrate
TW200929377A (en) Method of manufacturing an electronic device
CN105448936B (en) A kind of array substrate and preparation method thereof, display device
CN109860349A (en) A kind of LED chip and its manufacturing method
TW200805730A (en) Organic electroluminescent display panel and method for manufacturing the same
TW200409561A (en) El display device and method of manufacturing the same
CN103941448B (en) A kind of thin-film transistor array base-plate and preparation method thereof, liquid crystal display
CN208738252U (en) Dot structure and array substrate
TWI357149B (en) Resistance random access memory and fabricating me
CN103928455B (en) TFT array substrate and manufacturing method thereof
KR101832988B1 (en) Mother plate and producing method of the same, and producing method of the same
CN104103645B (en) A kind of substrate and preparation method thereof, display device
CN107085335A (en) A kind of array base palte and preparation method thereof
CN104766819B (en) Picture element substrate and its manufacture method
CN101004992B (en) Method for preparing display screen cathode grid electrode
CN105185787B (en) Make method, array substrate and the liquid crystal display panel of array substrate
JPH05335424A (en) Electric connection method of upper electrode and lower electrode via insulating layer and its structure
CN106206606A (en) A kind of array base palte and preparation method thereof, display floater, display device

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees