TW200801213A - High pressure encircled cooling target chamber - Google Patents

High pressure encircled cooling target chamber

Info

Publication number
TW200801213A
TW200801213A TW95123599A TW95123599A TW200801213A TW 200801213 A TW200801213 A TW 200801213A TW 95123599 A TW95123599 A TW 95123599A TW 95123599 A TW95123599 A TW 95123599A TW 200801213 A TW200801213 A TW 200801213A
Authority
TW
Taiwan
Prior art keywords
chamber
loading unit
encircled
high pressure
target chamber
Prior art date
Application number
TW95123599A
Other languages
English (en)
Chinese (zh)
Other versions
TWI316559B (enExample
Inventor
Wu-Zhi Lin
Mao-Hsiung Chang
Bing-Yan Huang
Jenn-Tzong Chen
Ting-Shien Duh
Dao-Qi Chen
Original Assignee
Atomic Energy Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Council filed Critical Atomic Energy Council
Priority to TW95123599A priority Critical patent/TW200801213A/zh
Publication of TW200801213A publication Critical patent/TW200801213A/zh
Application granted granted Critical
Publication of TWI316559B publication Critical patent/TWI316559B/zh

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
TW95123599A 2006-06-29 2006-06-29 High pressure encircled cooling target chamber TW200801213A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95123599A TW200801213A (en) 2006-06-29 2006-06-29 High pressure encircled cooling target chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95123599A TW200801213A (en) 2006-06-29 2006-06-29 High pressure encircled cooling target chamber

Publications (2)

Publication Number Publication Date
TW200801213A true TW200801213A (en) 2008-01-01
TWI316559B TWI316559B (enExample) 2009-11-01

Family

ID=44764979

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95123599A TW200801213A (en) 2006-06-29 2006-06-29 High pressure encircled cooling target chamber

Country Status (1)

Country Link
TW (1) TW200801213A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106399953B (zh) * 2016-06-21 2018-12-18 杭州联芳科技有限公司 一种溅射靶材自循环冷却装置

Also Published As

Publication number Publication date
TWI316559B (enExample) 2009-11-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees