200800739 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於減壓容器（包含真空容器。在以下的說 明中均爲該意思）的密封技術’譬如是在減壓的狀態下， 對以液晶顯示裝置（LCD )或電漿顯示器等作爲代表的平 板面板顯示器（F P D )用玻璃基板等實施乾式飩刻或成膜 (film formation )、搬送、位置調整等處理時，所使用之 減壓容器的密封技術。 【先前技術】 傳統上，從確保對大氣壓的耐久性與氣密性的觀點來 看，真空容器是藉由：利用機械加工從原料塊切削成容器 的方法、或利用熔接或硬銲來接合板材的方法所製造。但 是，在利用機械執行切削加工的場合中，由於是從材料切 削出相當於容積的量，而具有加工耗時，且大量浪費材料 的問題。此外，在利用熔接或硬銲的方法中，由於必須去 除因加熱所導致的應變（strain )，並執行最終加工（ finish machining )，而具有製作1¾本増加的問題。 近年來，隨著被處理基板的大型化，處理艙室本身的 尺寸也形成大型化。譬如，在FPD的製造過程中，是將長 邊的長度超過2m的矩形大型玻璃基板收容於處理艙室内 ，並在真空狀態下執行蝕刻或灰化（ashing )、成膜等的 處理。接著，用來在真空狀態下對上述大型玻璃基板執行 處理的真空容器，在使鋁等所構成之金屬製容器的内部形 -4- (2) (2)200800739 成真空的狀態下，必須確保承受大氣壓的充分剛性。 傳統上利用機械加工或熔接等所構成之一體型構造的 真空容器，爲了提高剛性而必須使容器的壁充分地變厚， 故衍生出隨著重量的增加，需要大型機械的加工，而導致 製造成本增加的問題。此外，一旦真空容器形成大於特定 尺寸的大型化，其搬運受到法令上的限制被課以金額，隨 著移送而具有經費大增的問題。 而利用機械加工或熔接以外的加工方法來製作真空容 器的技術，譬如揭示有一種真空容器（譬如：專利文獻1 )，該真空容器採用：複數張板材，該複數張板材是利用 結構螺栓而堅固地接合成箱狀；和密封構件，該密封構件 是從其內側沿著各板材的接合線而連續性設置：及按壓構 件，該按壓構件是爲了使前述密封構件朝前述接合線壓附 並密封成氣密，而由鎖緊螺栓所安裝。 此外’還揭示有一種構成容器的技術（譬如：專利文 獻2 ) ’該技術是在以下各構件所鄰接的接合面之間設置 密封構件而形成一體化： 4張以上的側面構件，該4張以上的側面構件的端面 互相接合而構成外周方向經封閉的中空框體；及 頂面構件與底面構件，該頂面構件與底面構件是配置 成上述中空框體的頂面與底面。 〔專利文獻1〕日本特開平9 - 2 0 9 1 5 0號公報（第4圖 等） 〔專利文獻2〕日本特開2〇〇4-286165號公報（第1 (3) (3)200800739 圖等） 【發明內容】 〔發明所欲解決之課題〕 由於前述專利文獻1與專利文獻2的真空容器’是由 板材與密封構件所構成’故可在欲設置的現場組裝，因此 搬運上的限制較少。此外’相較於傳統上利用機械加工或 熔接等所製作的真空容器，還具有能以低成本實現的優點 〇 但是，在專利文獻1所揭示「組合板材後接合的構造 」的真空容器中具有：很難確保容器内部之角落的密封性 的問題。舉例來說，在專利文獻1中，在位於角落部（ corner)之3張板材的接合部分，採用著分支狀的密封構 件，該分支狀的密封構件是沿著該板材的接合線而在3個 方向上互相彎折成直角。但是，上述的分支狀密封構件， 由於製造上需要立體模具，因此將無法避免成本的増加。 此外，在專利文獻1的密封機構中，必須以一定的按 壓力將彈性體按壓於板材的接合線。但是，在由3張板材 所形成之真空艙室的角落部，上述分支狀的密封構件很難 被充分地押壓，在最差的場合中恐有無法維持真空之虞。 另外，在專利文獻2所記載的密封構件中，由於使在 各構件相鄰的接合面之間配設密封構件，當更換密封構件 則必須分解容器，而具有：作爲消耗品之密封構件的維修 保養不易的問題。 -6- (4) (4)200800739 因此’本發明的目的是提供一種：在接合複數張板材 所構成的真空容器中，可充分確保角落部之氣密性的密封 機構。 〔解決課題之手段〕 爲解決上述的課題，本發明的第1觀點是提供一種： 藉由接合複數個構件所構成的減壓容器， 前述構件之間的接合部，是形成在：從前述減壓容器 之角落部分離的位置，且前述接合部是從前述減壓容器的 内側由密封構件所密封。 本發明的第2觀點是提供一種：藉由接合複數個構件 所構成的減壓容器， 在接合於前述側板之間的所有接合部，是以包夾該接 合部的方式使其兩側的内壁面形成大致相同的面，且前述 接合部是從前述減壓容器的内側由密封構件所密封。 本發明的第3觀點是提供一種：藉由接合包含端部經 彎折的板材及平板的複數個構件所構成的減壓容器， 該減壓容器具有角落部，該角落部是由：前述端部經 彎折的板材、及與其接合的前述平板所形成’ 由彼此隣接的3個構件所形成的接合部’是形成在從 前述角落部分離的位置， 接合於前述構件之間的接合部’是從前述減壓容器的 内側由密封構件所密封。 在上述第1〜3觀點中，前述構件亦可具備：至少有底 (5) (5)200800739 板、及接合於該底板的複數張側板，在該場合中’複數張 前述側板的全部或一部分，最好形成有經彎折的端部。 本發明的第4觀點是提供一種：藉由接合複數個構件 所構成的減壓容器， 該減壓容器具備： 底板；和 複數張側板，該複數張側板是接合於前述底板；及 密封構件，該密封構件是從內側密封相鄰的前述側板 之間、和前述側板與前述底板之間的各接合部， 在前述底板一體地設有壁體，該壁體構成前述減壓容 器之側壁的下部， 在包夾前述接合部的狀態下，使前述側板的内壁面與 前述底板之壁體的内壁面形成大致相同的面。 在上述第4觀點中，亦可更進一步具備接合於前述側 板的上板，並在該上板一體地設有：構成前述減壓容器的 側壁之上部的壁體。 此外，複數張前述側板的全部或一部分，其端部亦可 具有經彎折的形狀，而所鄰接的前述側板之間的接合部是 形成在：從前述減壓容器之角落部與角落部所構成的角部 (angle)分離的位置。 此外，接合前述側板之間、及前述底板與前述側板的 全體接合部’最好是形成於則述減壓容器的側部。 此外，在上述第1〜4觀點中，最好在前述接合部形 成有用來安裝前述密封構件的溝。 -8 - (6) (6)200800739 此外，本發明的第5觀點是提供一種：具備上述第1 〜4觀點之其中任一種減壓容器的減壓處理裝置。 此外，本發明的第6觀點是提供一種：減壓容器的製 造方法，該減壓容器的製造方法包含： 組裝步驟，該組裝步驟採用複數個構件，前述構件之 間的接合部是形成於從減壓容器之角落部分離的位置，且 各構件接合成：在包夾前述接合部的狀態下，使其兩側的 内壁面形成大致相同的面，而組裝成框體；及 密封步驟，該密封步驟在是在前述框體的内側，密封 前述接合部。 在上述第7觀點中，前述構件至少採用：底板、及接 合於該底板的複數張側板，並在前述底板一體地設有：構 成前述減壓容器的側壁之下部的壁體， 複數張前述側板的全部或一部分，其端部最好形成有 經彎折的形狀。 本發明的第8觀點是提供一種：減壓容器的製造方法 ，該減壓容器的製造方法包含： 組裝步驟，該組裝步驟採用含有端部經彎折的構件及 平板的複數個構件，由前述端部經彎折的構件與前述平板 形成角落部，且各構件接合成：由彼此鄰接的3個構件所 形成的接合部位在從前述角落部分離的位置，進而組裝框 體；及 密封步驟，該密封步驟是在前述框體的内側，密封前 述接合部。 -9- (7) (7)200800739 〔發明的效果〕 本發明的最佳態樣’是在至少接合包含：底板、及接 合於該底板之複數張側板的複數個構件所構成的減壓容器 中，使前述構件之間的接合部形成於：從前述減壓容器之 角落部分離的位置。如此一來’可避免在不易確保密封構 件之密封性的減壓容器的角落部執行密封。 此外，本發明之其它的合適態樣，是在由至少接合包 含：底板、及接合於該底板之複數張側板的複數個構件所 構成的減壓容器中，在包夾著接合前述側板之間及前述底 板與前述側板的全體接合部的狀態下，使其兩側的内壁面 形成大致相同的面。如此一來，可避免接合部形成於減壓 容器的角落部，並提高密封構件的密封性。 在本發明其它的適用態樣中，是由端部經彎折的板材 、及接合於該板材的平板共2張板材來形成減壓容器的角 落部，故相較於由3張板材的接合來形成角落部之傳統構 造的減壓容器，可顯著地提高該角落部的密封性。 此外，由彼此相鄰的3個構件所形成的接合部，由於 是形成在從前述角落部分離的位置，故可藉由配備T字型 密封構件的方式確實地加以密封。 藉此’根據本發明，可顯著地提升接合複數張板材之 組裝構造的減壓容器的氣密性。 此外’根據本發明，可製造出具有絕佳氣密性之組裝 構造的減壓容器，因此也能對應於在利用機械加工或熔接 -10- (8) (8)200800739 等接合方法中遇到瓶頸之減壓容器的大型化。 【實施方式】 以下’參考附圖對本發明的最佳實施形態進行說明。 在本文中’是列舉可採用本發明之密封機構的真空處理系 統來進行説明。第1圖爲槪略地顯示具備本發明其中一種 實施形態之真空艙室的真空處理系統1的立體圖，第2圖 爲槪略地顯示其内部的水平剖面圖。該真空處理系統1， 譬如是用來對FPD用玻璃基板（以下，簡稱爲「基板」） S執行電漿處理的複合艙室型真空處理系統。在本文中， 所謂的FPD是指：液晶顯示器（LCD )、發光二極體（ LED)顯不器、電激發光（Electro Luminescence ; EL)顯 75 器，真空營光顯不管（Vacuum Fluorescent Display; VFD)，電漿顯示器面板（PDP )等。 在真空處理系統1中，搬送室20與加載互鎖艙室（ load-lock chamber ) 30是連設於中央部。不僅如此，在搬 送室20的周圍配設有：用來對基板S執行蝕刻等電漿處 理的3個處理艙室10a、10b、10c。上述的搬送室20;加 載互鎖艙室30; 3個處理艙室l〇a、10b、10c均構成真空 艙室。在連通於搬送室20與加載互鎖艙室30之間；搬送 室20與各處理艙室10a、10b、10c之間；以及加載互鎖 艙室3 0與外側的大氣環境之間的開口部，分別夾介插入 著將上述各空間密封成氣密，並構成可開閉的匣閥22。 在加載互鎖艙室3 0的外側，設有2個卡匣指示器（ -11 - (9) (9)200800739200800739 (1) EMBODIMENT OF THE INVENTION [Technical Field of the Invention] The present invention relates to a sealing technique of a reduced-pressure vessel (including a vacuum vessel, which is the meaning in the following description), for example, under a reduced pressure state, When dry etching, film formation, conveyance, position adjustment, etc. are performed on a glass substrate or the like for a flat panel display (FPD) represented by a liquid crystal display device (LCD) or a plasma display, etc. Sealing technology for pressure vessels. [Prior Art] Conventionally, from the viewpoint of ensuring durability and airtightness against atmospheric pressure, a vacuum container is a method of cutting a material into a container from a raw material block by mechanical processing, or joining a plate by welding or brazing. Manufactured by the method. However, in the case where the machining is performed by a machine, since the amount corresponding to the volume is cut from the material, it takes a long time to process, and a large amount of material is wasted. Further, in the method of using welding or brazing, since it is necessary to remove the strain caused by heating and perform finish machining, there is a problem in that the fabrication is performed. In recent years, as the size of the substrate to be processed has increased, the size of the processing chamber itself has also increased in size. For example, in the manufacturing process of the FPD, a rectangular large glass substrate having a long side length of more than 2 m is housed in a processing chamber, and etching, ashing, film formation, or the like is performed in a vacuum state. Next, the vacuum container for performing the treatment on the large-sized glass substrate in a vacuum state must be ensured in a state in which the internal shape of the metal container made of aluminum or the like is -4- (2) (2) 200800739. Full rigidity to withstand atmospheric pressure. Conventionally, a vacuum container having a body structure constituted by machining or welding or the like has to sufficiently thicken the wall of the container in order to increase the rigidity, so that it is required to process a large machine as the weight increases, resulting in manufacturing. The problem of increased costs. In addition, once the vacuum container is formed to be larger than a certain size, the handling thereof is subject to the restrictions of the law, and the amount of money is increased. A technique for manufacturing a vacuum container by a processing method other than machining or welding, for example, discloses a vacuum container (for example, Patent Document 1), which uses a plurality of sheets which are sturdy by structural bolts. And a sealing member that is continuously disposed from an inner side thereof along a bonding line of each of the plate members: and a pressing member for pressing and sealing the sealing member toward the bonding wire It is airtight and is installed by a locking bolt. Further, a technique for constituting a container (for example, Patent Document 2) has been disclosed. The technique is to form a sealing member between the joint faces adjacent to each of the following members: four or more side members, the four sheets The end faces of the side members are joined to each other to form a hollow frame that is closed in the outer circumferential direction, and a top member and a bottom member that are disposed on the top surface and the bottom surface of the hollow frame. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. H2-2-286165 (Patent Document 2) (Japanese Patent Laid-Open Publication No. Hei 2-4-286165) (1st (3) (3) 200800739 [Summary of the Invention] [Problems to be Solved by the Invention] Since the vacuum containers ' described in Patent Document 1 and Patent Document 2 are composed of a plate member and a sealing member, they can be assembled at the site to be installed. Less restrictions. In addition, there is an advantage that it can be realized at a low cost compared to a vacuum container which is conventionally manufactured by machining or welding, but has a vacuum container which is disclosed in Patent Document 1 "Structural after joining sheets". : It is difficult to ensure the problem of the sealing of the corners inside the container. For example, in Patent Document 1, a branch-shaped sealing member is used at a joint portion of three sheets located at a corner, and the branch-shaped sealing member is along a bonding line of the sheet material at 3 The directions are bent at right angles to each other. However, in the above-described branch-shaped sealing member, since a three-dimensional mold is required for manufacturing, cost increase cannot be avoided. Further, in the sealing mechanism of Patent Document 1, it is necessary to press the elastic body against the bonding wire of the sheet material with a constant pressing force. However, in the corner portion of the vacuum chamber formed of three sheets, the branch-shaped sealing member is hardly pressed sufficiently, and in the worst case, there is a fear that the vacuum cannot be maintained. Further, in the sealing member described in Patent Document 2, since the sealing member is disposed between the adjacent joining surfaces of the members, the container must be disassembled when the sealing member is replaced, and the sealing member as a consumable is repaired. Maintenance is not easy. -6- (4) (4) 200800739 Therefore, an object of the present invention is to provide a sealing mechanism capable of sufficiently ensuring the airtightness of a corner portion in a vacuum container formed by joining a plurality of sheets. [Means for Solving the Problems] In order to solve the above problems, a first aspect of the present invention provides a pressure reducing container comprising a plurality of members, wherein a joint portion between the members is formed by subtracting from the foregoing The corner portion of the pressure vessel is separated from the position, and the joint portion is sealed from the inside of the pressure reducing container by a sealing member. According to a second aspect of the present invention, there is provided a pressure-reducing container comprising a plurality of members joined to each other at a joint portion between the side plates, wherein the joint portion is sandwiched The wall surfaces form substantially the same surface, and the joint portion is sealed from the inside of the pressure reducing container by a sealing member. According to a third aspect of the present invention, there is provided a pressure reducing container comprising a plurality of members including a bent plate and an end plate, the pressure reducing container having a corner portion, the corner portion being: the end portion The bent plate and the flat plate joined thereto are formed 'the joint portion formed by the three members adjacent to each other' is formed at a position separated from the corner portion, and joined to the joint portion between the members' It is sealed from the inside of the said pressure-reduction container by the sealing member. In the above-described first to third aspects, the member may include at least a bottom (5) (5) 200800739 plate, and a plurality of side plates joined to the bottom plate. In this case, all or a part of the side plates are plural. Preferably, the bent end is formed. According to a fourth aspect of the present invention, there is provided a pressure reduction container comprising: a bottom plate; and a plurality of side plates, wherein the plurality of side plates are joined to the bottom plate; and a sealing member, The sealing member is a joint portion between the adjacent side plates and the side plate and the bottom plate, and a wall body integrally formed on the bottom plate, the wall body forming a lower portion of the side wall of the decompression container In a state in which the joint portion is sandwiched, the inner wall surface of the side plate and the inner wall surface of the wall body of the bottom plate are formed to have substantially the same surface. Further, in the fourth aspect, the upper plate joined to the side plate may be further provided, and the upper plate may be integrally provided with a wall body that constitutes an upper portion of the side wall of the pressure reducing container. Further, all or a part of the plurality of side plates may have a bent shape at an end portion thereof, and a joint portion between the adjacent side plates is formed from a corner portion and a corner portion of the decompression container. The position at which the formed angles are separated. Further, it is preferable that the entire joint portion between the side plates and the bottom plate and the side plates is formed at a side portion of the decompression container. Further, in the above first to fourth aspects, it is preferable that a groove for attaching the sealing member is formed in the joint portion. -8 - (6) (6) 200800739 Further, a fifth aspect of the present invention provides a pressure reducing treatment apparatus comprising the pressure reducing container according to any one of the above first to fourth aspects. Further, a sixth aspect of the present invention provides a method of manufacturing a reduced pressure container, the method of manufacturing the reduced pressure container comprising: an assembly step of using a plurality of members, wherein a joint portion between the members is formed from a position where the corner portions of the decompression container are separated, and the members are joined such that the inner wall surfaces on both sides form substantially the same surface in a state in which the joint portion is sandwiched, and assembled into a frame; and a sealing step, The sealing step seals the joint portion on the inner side of the frame. According to a seventh aspect of the invention, at least a bottom plate and a plurality of side plates joined to the bottom plate are used, and the bottom plate is integrally provided with a wall body constituting a lower portion of the side wall of the pressure reducing container, and the plurality of side plates are provided. All or part of the ends are preferably formed with a bent shape. According to an eighth aspect of the present invention, there is provided a method of producing a reduced pressure container, comprising: an assembly step of using a plurality of members including a bent portion of a tip portion and a flat plate, The bent portion of the end portion forms a corner portion with the flat plate, and the members are joined such that the joint portion formed by the three members adjacent to each other is separated from the corner portion, thereby assembling the frame body; and the sealing step, This sealing step seals the joint portion inside the frame. -9- (7) (7) 200800739 [Effects of the Invention] The best mode of the present invention is a pressure-reducing container comprising at least a plurality of members including a bottom plate and a plurality of side plates joined to the bottom plate. The joint portion between the members is formed at a position separated from a corner portion of the pressure reducing container. In this way, it is possible to prevent the sealing from being performed at the corner portion of the decompression container which is difficult to ensure the sealing property of the sealing member. Further, another suitable aspect of the present invention is that in a decompression container comprising at least a plurality of members including a bottom plate and a plurality of side plates joined to the bottom plate, sandwiching and joining the side plates In a state in which the entire bottom plate and the side plate are joined to each other, the inner wall surfaces on both sides are formed to have substantially the same surface. In this way, it is possible to prevent the joint portion from being formed at the corner portion of the pressure reducing container and to improve the sealing property of the sealing member. In another aspect of the present invention, the bent portion of the sheet material and the flat plate joined to the sheet material form a corner portion of the decompression container, so that the joint is made of three sheets. The pressure-reducing container of the conventional structure in which the corner portion is formed can remarkably improve the sealing property of the corner portion. Further, since the joint portion formed by the three members adjacent to each other is formed at a position separated from the corner portion, it can be reliably sealed by providing a T-shaped seal member. According to the present invention, the airtightness of the pressure reducing container in which the assembly structure of the plurality of sheets is joined can be remarkably improved. Furthermore, according to the present invention, a pressure-reducing container having an assembly structure excellent in airtightness can be manufactured, and thus can also be encountered in a joining method using machining or welding - (8) (8) 200800739 The size of the bottleneck decompression container is increased. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Herein is a description of a vacuum processing system which can employ the sealing mechanism of the present invention. Fig. 1 is a perspective view schematically showing a vacuum processing system 1 including a vacuum chamber according to an embodiment of the present invention, and Fig. 2 is a horizontal sectional view showing the inside thereof in abbreviated manner. The vacuum processing system 1 is, for example, a composite chamber type vacuum processing system for performing plasma treatment on a glass substrate for FPD (hereinafter simply referred to as "substrate") S. In this context, the so-called FPD refers to: liquid crystal display (LCD), light-emitting diode (LED) display, electro-excitation (EL) display, vacuum exposure (Vacuum Fluorescent Display; VFD), plasma display panel (PDP), etc. In the vacuum processing system 1, the transfer chamber 20 and the load-lock chamber 30 are connected to the center portion. Further, three processing chambers 10a, 10b, and 10c for performing plasma treatment such as etching on the substrate S are disposed around the transfer chamber 20. The transfer chamber 20 described above; the interlocking compartment 30; the three processing chambers 10a, 10b, 10c each constitute a vacuum chamber. Between the transfer chamber 20 and the load lock compartment 30; between the transfer chamber 20 and each of the processing chambers 10a, 10b, 10c; and the opening between the load lock chamber 30 and the outside atmospheric environment, respectively The above-described respective spaces are sealed to be airtight, and an openable and closable valve 22 is formed. On the outside of the load lock compartment 30, there are 2 cassette indicators ( -11 - (9) (9) 200800739
Cassette Indexer) 41，並分別於在其上方載置著用來收容 基板S的卡匣40。在上述卡匣40的其中一個，譬如可收 容未處理基板，並在另一個他方收容已處理完畢的基板。 上述的卡匣40，可藉由升降機構42而形成升降。 在上述的2個卡匣40之間，於支持台44上設有搬送 機構43，該搬送機構43具備：設成上下2層的撿取器45 、46;以及被支承成能與其同步進出退避、旋轉的基座47 〇 前述處理艙室l〇a、10b、10c，其内部空間可保持成 特定的減壓環境，譬如真空狀態，並可在其內部執行電漿 處理，譬如蝕刻處理或灰化（ashing )處理。在本實施形 態中，由於具有3的處理艙室，因此譬如可將其中2個處 理艙室作爲蝕刻處理室，而剩餘的那1個處理艙室作爲灰 化處理室，或者可將3個處理艙室一起作爲執行相同處理 的蝕刻處理室或灰化處理室。再者，處理艙室的數量不侷 限爲3個，亦可爲4個以上。 搬送室20，可保持成與作爲真空處理室之處理艙室 10a〜10c相同的特定減壓環境，其中如第2圖所示，配置 著具有上下2層之滑動撿取器513、523 (圖面中僅顯示上 層）的搬送裝置50。接著，可藉由該搬送裝置50，而在 加載互鎖艙室30及3個處理艙室l〇a、10b、10c之間搬 送基板S。 加載互鎖艙室3 0，可保持成與各處理艙室1 〇及搬送 室20相同的特定減壓環境。此外，加載互鎖艙室3〇，是 -12- (10) (10)200800739 用來在大氣環境下的卡匣40與減壓環境下的處理艙室l〇a 、1 Ob、1 0c之間執行基板S收授的構件，由於重複進出於 大氣環境與減壓環境的關係，故構成極小的内容積。在加 載互鎖艙室30中基板収容部31設成上下2層（第2圖中 僅顯示上層），在各基板収容部3 1，設有用來支承基板S 的複數個緩衝器3 2，在上述緩衝器3 2之間，形成有滑動 撿取器 513、523 的離隙槽（clearance groove) 32a。此外 ，在加載互鎖艙室3 0内設有：抵接於矩形之基板S相互 面對的角部附近後執行定位的定位器3 3。 真空處理系統1的各構成部分，是連接於控制部60 並構成由控制部6 0所控制（在第1圖中省略圖示）。控 制部60大致如第3圖所示。控制部60具備：具有CPU 的程序控制器6 1，並於該程序控制器6 1連接有使用者介 面62，該使用者介面62是由：爲了步驟管理者對真空處 理系統1執行管理，而用來執行指令輸入操作的鍵盤；及 可影像化真空處理系統i之運作狀況，並加以顯示的顯示 器等所構成。 此外，控制部60具有記憶部63，該記憶部63儲存著 參數組合（recipe )，該參數組合記錄著利用程式控制器 61的控制來達成真空處理系統1所執行之各種處理的控制 程式（軟體）或處理條件資料等，該記憶部63是連接於 程序控制器6 1。 接著，可視需要，藉由來自於使用者介面62的指示 等而從記憶部6 3叫出任意的參數組合，並利用程序控制 -13- (11) (11)200800739 器6 1來實施，並在程序控制器6 1的控制下，執行於真空 處理系統1所期望的處理。 前述控制程式或處理條件資料等的參數組合，可在儲 存於電腦可讀取的記憶媒體，譬如CD - ROM、硬碟、軟 碟、快閃記憶體等的狀態下使用，或者可從其它的裝置， 譬如透過專用線路傳送而在連線（on line)的狀態下使用 〇 接著，針對構成上述方式的真空處理系統1的動作進 行說明。 首先，驅動搬送機構43的2個撿取器45、46形成進 退，從收納著未處理基板的其中一個卡匣40搬出2張基 板S，並將其一次一張地搬入加載互鎖艙室3 0之上下2 層的基板収容部3 1。 當撿取器45、46後退之後，關閉加載互鎖艙室30之 大氣側的匣閥2 2。在此之後，排出加載互鎖艙室3 0内的 氣體，並使内部減壓至特定的真空度。在真空化的動作結 束後，藉由以定位器3 3按壓基板S的方式執行基板S的 定位。Cassette Indexer 41, and a cassette 40 for accommodating the substrate S is placed thereon. In one of the above-mentioned cassettes 40, for example, an unprocessed substrate can be accommodated, and the processed substrate can be accommodated in the other side. The above-described cassette 40 can be raised and lowered by the elevating mechanism 42. Between the two cassettes 40 described above, a transfer mechanism 43 is provided on the support table 44, and the transfer mechanism 43 includes pickers 45 and 46 which are provided in two upper and lower layers, and are supported so as to be able to reciprocate in and out The rotating base 47 〇 the aforementioned processing chambers l〇a, 10b, 10c, the internal space of which can be maintained in a specific decompression environment, such as a vacuum state, and can perform plasma treatment, such as etching treatment or ashing, in the interior thereof. (ashing) processing. In the present embodiment, since there is a processing chamber of 3, for example, two of the processing chambers can be used as an etching processing chamber, and the remaining one processing chamber can be used as an ashing processing chamber, or three processing chambers can be used together. An etching process chamber or an ashing process chamber that performs the same process. Furthermore, the number of processing cabins is not limited to three, and may be four or more. The transfer chamber 20 can be held in the same specific decompression environment as the process chambers 10a to 10c as the vacuum processing chamber. As shown in Fig. 2, the slide extractors 513 and 523 having the upper and lower layers are disposed. Only the transport device 50 of the upper layer is shown. Next, the substrate S can be transferred between the load lock compartment 30 and the three process chambers 10a, 10b, 10c by the transport device 50. The interlocking compartments 30 are loaded to maintain the same specific decompression environment as the processing chambers 1 and 20 of the processing chambers. In addition, the load lock compartment 3〇 is -12-(10) (10)200800739 for execution between the cassette 40 in the atmospheric environment and the processing chambers l〇a, 1 Ob, 10c in a decompressed environment. The member that is received by the substrate S has a very small internal volume because it repeatedly enters the relationship between the atmospheric environment and the decompression environment. In the load lock compartment 30, the substrate accommodating portion 31 is provided in two upper and lower layers (only the upper layer is shown in Fig. 2), and a plurality of buffers 3 2 for supporting the substrate S are provided in the respective substrate accommodating portions 31, Between the buffers 3 2, a clearance groove 32a of the sliding grippers 513, 523 is formed. Further, in the load lock compartment 30, a positioner 33 that performs positioning after abutting the corners of the rectangular substrate S facing each other is provided. Each component of the vacuum processing system 1 is connected to the control unit 60 and configured by the control unit 60 (not shown in the first drawing). The control unit 60 is roughly as shown in Fig. 3. The control unit 60 includes a program controller 161 having a CPU, and a user interface 62 is connected to the program controller 61. The user interface 62 is configured to perform management on the vacuum processing system 1 for the step manager. A keyboard for performing an instruction input operation; and a display capable of visualizing the operation state of the vacuum processing system i and displaying the display. Further, the control unit 60 has a storage unit 63 that stores a parameter combination which records a control program for realizing various processes executed by the vacuum processing system 1 by the control of the program controller 61 (software) Or the processing condition data or the like, the memory unit 63 is connected to the program controller 61. Then, if necessary, an arbitrary parameter combination is called from the memory unit 63 by an instruction from the user interface 62, and is implemented by the program control-13-(11)(11)2008007396. The processing desired by the vacuum processing system 1 is executed under the control of the program controller 61. The parameter combination of the aforementioned control program or processing condition data may be used in a state of a computer-readable memory medium such as a CD-ROM, a hard disk, a floppy disk, a flash memory, or the like, or may be used from other The device is used in a state of being connected to the line, for example, by being transmitted through a dedicated line. Next, the operation of the vacuum processing system 1 constituting the above-described mode will be described. First, the two pickers 45 and 46 that drive the transport mechanism 43 are moved forward and backward, and two substrates S are carried out from one of the cassettes 40 in which the unprocessed substrate is stored, and are carried into the load lock compartment one at a time. The substrate accommodating portion 31 of the second layer is placed on top of each other. After the skimmers 45, 46 are retracted, the helium valve 22 of the atmospheric side of the interlocking compartment 30 is closed. After that, the gas in the load lock chamber 30 is exhausted, and the inside is decompressed to a specific degree of vacuum. After the vacuuming operation is completed, the positioning of the substrate S is performed by pressing the substrate S with the positioner 33.
在上述的定位之後，開啓搬送室20與加載互鎖艙室 30之間的匣閥22，並藉由搬送室20内的搬送裝置50來 接收收容於加載互鎖艙室3 0之基板収容部3 1的基板S。 接著，利用搬送裝置50的滑動撿取器513或523，將基板 S搬入處理艙室10a、10b、l〇c的其中任一個。接著，經 於處理艙室l〇a、10b、10c實施飩刻等特定處理的基板S -14- (12) (12)200800739 ，則利用搬送裝置50從處理艙室10a、10b、10c搬出。 接著，基板S是利用與上述相反的路線通過加載互鎖艙室 30，再利用搬送機構43而收容於卡匣40。此時，基板S 可回到原來的卡匣40，或亦可收容於其它的卡匣40 ° 其次，針對本發明的密封構件及採用該密封構件的密 封機構進行說明。構成搬送室20 ;加載互鎖艙室3 G及處 理艙室1 0 a、1 0 b、1 0 c的真空容器，是採用密封構件加以 密封，而分別使其内部保持真空狀態。在本文中，是列舉 搬送室20內的密封機構進行說明。 第4圖是顯示搬送室2 0之外觀構造的立體圖’第5 圖則爲第4圖的分解立體圖。而搬送裝置50等的内部機 構則省略其圖示。搬送室20，其主要的構造爲具備框體 70與頂板71的真空容器。框體70是藉由接合6張板材所 構成。換言之，框體70是由以下構件所構成：上板72 ; 和底板73，該底板73面向該上板72，且配置成平行；及 4 張側板 74a 、 74b 、 74c 、 74d ，該 4 張側板 74a 、 74b 、 74c、74d，是接合於上述上板72與底板73。構成框體70 的各板材，是藉由譬如螺絲或螺栓等固定手段（圖面中未 顯示）所接合，形成一體後，於其內部形成用來搬送基板 S的搬送空間。 上板72如圖面所示，在中央具有開口 75。接著，在 採用譬如起重機使頂板7 1上升的狀態下，透過該開口 75 執行配置於搬送室20内部之搬送裝置5 0的維修保養。此 外，在上板72的開口 75周圍，於柵溝內配備著圖面中未 -15- (13) (13)200800739 顯示的0型環之類的密封構件7 6。接著’在利用螺絲或 螺栓等固定手段1 〇 1將頂板7 1暫時固定於框體7 0的狀態 下，藉由對搬送室20内部實施減壓的方式，可確保作爲 真空容器的充分氣密性。此外，雖然圖面中未顯示，但在 底板73也形成有用來設置搬送機構50 (請參考第2圖） 的開口。 在上板72設有：構成框體70之側壁的局部（上部） 的壁部72a，而形成下面開放的淺箱狀。上述形狀的上板 72，可藉由譬如切削加工來形成。 此外，在底板73設有：構成框體70之側壁的局部（ 下部）的壁部73a，而形成上面開放的浅箱狀。上述形狀 的底板73，可藉由譬如切削加工來形成。 在4張側板74a、74b、74c、74d，分別設有用來搬入 /搬出基板S的搬送用開口。形成於框體70短邊側之側板 74a的搬送用開口 77a、77b，是形成可在加載互鎖艙室30 (請參考第1圖及第2圖）與加載互鎖艙室3 0的緩衝器 3 2之間可搬出/搬入基板S的位置。此外，形成位於框體 7〇之其它3邊側板74b〜74d的搬送用開口 78，是在作爲 真空處理室的處理艙室10a〜10c之間搬出/搬入基板S時 使用。在各搬送用開口 77a、77b、78，分別裝有匣閥22 (請參考第1圖），並在透過各匣閥22所鄰接配置的各 處理艙室1 〇 a、1 0 b、1 0 c及加載互鎖艙室3 0之間執行基 板S的收授。 此外，4張側板7 4 a、7 4 b、7 4 c、7 4 d之中，側板7 4 a -16- (14) (14)200800739 與側板7 4 c的兩端部E是形成=可分別彎折成直角而構成 框體70之側壁的一部分。 藉由上述上板72與底板73的形狀，可在組裝成框體 7 0的狀態下，使全體的接合部形成在：遠離框體7 〇之8 個角落部400 (請參考第6圖）的位置。如此一來，則無 須對不易確保密封性之框體70的角落部400施以密封。 此外，在本實施形態中，由於4張側板74a〜74d之中， 側板74a與側板74c的兩端部E呈彎折的形狀，故在組裝 成框體70的狀態下，相鄰的側板之間的接合部，是形成 在框體70的内側，遠離彼此鄰接的角落部400與角落部 400所形成之角部500 (請參考第6圖）的位置。如此一 來，無須對確保密封性之困難度僅次於角落部400之框體 70的角部500實施密封。 如上所述，在本實施形態的框體70中，藉由對作爲 構成構件之各構件的形狀進行硏究，而極力減少不易密封 之框體70的角落部和角部500的密封，而提高作爲減壓 容器之搬送室2 0的氣密性。此外，藉由上述的構造，可 使全部的接合部形成於框體7 0的側壁部分（側面），使 得框體7 〇的組裝變的容易，並可輕易地執行更換密封構 件80 (請參考第8圖）之類的維修保養。 搬送室20的頂板71與構成框體70的張板材，譬如 可由鉬、不鏽鋼、鋼鐵材料等金屬材料所構成。 搬送室20的組裝，可按以下的步驟執行。首先，利 用螺絲或螺栓等固定手段來接合上板72、底板73、側板 -17- (15) (15)200800739 74a〜74d而形成框體70。此時，接合各板材的順序並無 限制。接著，由本發明之一種實施形態的密封機構從框體 70的內側密封各板材的接合部，而確保可承受真空狀態的 氣密性。針對該密封機構，將於稍後詳細說明。 其次，將搬送機構5 0等内部構件或匣閥22設置於框 體70之後，將頂板71配置於框體70的上部，並使Ο型 環之類的密封構件7 6抵接於頂板7 1的下面。接下來，利 用螺絲或螺栓等固定手段101將頂板71暫時固定於框體 70。在該狀態下利用圖面中未顯示的排氣裝置對搬送室20 的内部執行減壓排氣，促使密封構件76壓接於頂板7 1的 下面，而可在確保氣密性的狀態下使内部維持真空狀態。 再者，當接合構成頂板71及框體70的各板材（上板 72、底板73、側板74a〜74d )時，可採用任意的固定手 段，並不侷限於螺絲或螺栓。 第6圖是顯示搬送室2 0内部之接合部的密封機構的 重點立體圖。此外，第7圖（a)爲第6圖中A部分的放 大圖，第7圖（b)爲第6圖中B部分的放大圖。第8圖 是顯示用於該實施形態之密封構件的整體構造的立體圖。 在本實施形態的密封機構中使用：密封構件80，該密封構 件80的形狀對應於框體70内側的接合部；及輔助具（後 述的按壓具90、角部按壓具91)，該輔助具是用來固定 該密封構件8 0。 在本實施形態中’在上述的底板7 3設有：構成框體 70之側壁的局部的壁部73a，而形成上面開放的淺箱狀。 -18- (16) (16)200800739 如起一來，如第6圖所示，是在包夾著底板73的壁部73 a 與側板74c之間的接合部Jac的狀態下’該兩側的内壁面 (底板73的壁部73a與側板74c的内壁面）形成大致相 同的面（同一平面）。同樣地，在包夾著底板73的壁部 73 a與側板74d之間的接合部Jad的狀態下，該兩側的内 壁面（底板73的壁部73a與側板74d的内壁面）也形成 大致相同的面。而第6圖中未顯示之側板74a、74b與底 板73的壁部73a之間的接合部也是一樣。此外’如以上 所述，4張側板74a、74b、74c、74d之中，側板74a與側 板74c的兩端部E，分別是彎折成直角。因此，在譬如第 6圖中側板74c與側板74d接合的狀態下，是包夾著兩者 的接合部Jed，而使該兩側的内壁面形成大致相同的面。 如同上述的傳統技術，在框體的角落部設置由板材所 構成之接合部的構造中，必須使用分歧成3個方向之形狀 的密封構件，倘若在其交點的部分譬如彎折成直角的話’ 將無法密封角落部400的接合部。而且，分歧成3個方向 且呈彎折狀態的密封構件，是很難以充分的壓力按壓於角 落部400的接合線，而使框體70之角落部400的密封性 能下降並產生洩漏，恐有損及真空容器之可靠性的疑慮。 本實施形態是構成：在框體70之内側的各接合部， 其兩側的内壁面是形成大致相同的面，且接合部並未形成 於框體70之角落部。如此一來，可平面地執行構成框體 70的各板材之接合部的密封，而獲得絕佳的密封性。此外 ，在本實施形態中，密封構件80是採用如第8圖所示之 -19- (17) (17)200800739 形狀的密封構件80。更具體地說，密封構件80是形成： 形成迴圈狀的上下迴圏部80a、80b是藉由4條直線部80c 、8 0d、80e、8 0f所連接的形態。4條直線部80c、80d、 8 0e、8 Of是分別對上下迴圈部80a、80b形成T字型而接 成直角。接著，密封構件8〇中，上側的迴圈部80a是密 封上板72與各側板74a〜74d之間的接合部，下側的迴圈 部8 0b則密封底板73與各側板74a〜74d之間的接合部。 此外，密封構件80中，4條直線部 80c、80d、80e、80f 是構成··可分別密封各側板74a〜74d間的接合部。藉由 採用上述的密封構件80，可確實地密封上板72、底板73 與側板74a〜74d之間的接合部。 密封構件80，譬如是由直徑爲2〜10mm左右的繩狀 彈性體所構成。密封構件80的材質，與一般的Ο型環相 同，可使用譬如以VITON (商品名，由杜邦公司所製造） 的氟系橡膠、丁基系橡膠、矽氧樹脂等的彈性體。 密封構件80，是沿著形成於各板材之接合部的接合線 所配置，並藉由補助具而固定。舉例來說，在由底板73 與側板74c、7 4d所形成的接合部Jac、Jad;和由側板74c 與側板74d所形成的接合部Jed，是藉由按壓具90將密封 構件80按壓於接合線並加以固定，可確保氣密性。此外 ，在側板74c的角部500，則是藉由以角部按壓具91將密 封構件8 0按壓於接合部J a c的接合線而固疋’可確保热 密性。雖然在第6圖中未顯示，但側板74c與74d之間的 接合部Jed也配備有按壓具90。此外，第6圖中的圖號 -20- (18) (18)200800739 202，是利用螺絲或螺栓等固定手段102固定按壓具90、 91時的螺絲孔，按壓具90的圖號90a、角部按壓具91的 圖號9 1 a，是上述場合中可供固定手段1 〇2插入的孔部。 第9圖及第1 〇圖，是顯示接合部之密封構造的其中 一例的剖面圖。在此，是列舉顯示底板73的壁部73 a與 側板74d之間的接合部Jad。 按壓具90，是採用與構成框體70之各板材相同的材 質，並構成長板狀。接著，藉由按壓具90，將密封構件 80朝向位於框體70之接合部Jad内側的接合線按壓，並 藉由螺絲或螺栓等固定手段1 02加以固定。此時，由於在 包夾接合部Jad的狀態下，其兩側的壁面（側板74d與底 板73之壁部73a的壁面）是形成大致相同的面，故構成 :可藉由按壓具90，平均且輕易地確實按壓密封構件80 的構造。在本實施形態中，並不侷限於接合部Jad，而是 在構成框體70的全體接合部，將該接合部包夾於其中， 使其兩側的壁面形成大致相同的面，因此可充分地確保密 封構件8 0的密封性能。 此外，在接合部Jad形成有密封溝79，如第10圖所 示，構成可藉由將密封構件80 (第9圖中下側的迴圏部 8〇b )放入該密封溝79内的方式形成密封。密封溝79具 有定位密封構件80的功能，可發揮確實地將密封構件80 壓接於接合部Jad的作用。藉此，可充分地確保密封構件 8 0的密封性。再者，密封溝7 9可藉由切除構成各接合部 之板材的邊緣而形成階梯部的方式來設置。在該場合中， -21 - (19) (19)200800739 雖然形成如第9圖及第10圖中，於構成接合部的2張板 材之其中一張的側板74d形成階梯部，但亦可在底板73 之壁部73 a的邊緣型呈階梯部，或亦可分別於2張板材的 邊緣形成階梯部。 接下來，參考第1 1圖〜第13圖，說明其它實施形態 的減壓容器。以上所述，在第4圖〜第6圖所記載的實施 形態中，構成框體70的上板72與底板73，是採用具有壁 部7 2a、73a的板材，由互相鄰接的3張板材所構成的接 合部，是形成在從框體70之角落部40 0分離的側壁部分 。但是，譬如第1 1圖所示，可藉由接合平板狀的上板3 0 1 、平板狀的底板302及側板303 a〜3 03 d的方式來形成框 體300。而第11圖中是省略頂板的圖示。 構成搬送室20的框體3 00具有：平板狀的上板301 ; 和平板狀的底板302，該平板狀的底板3 02面向該上板 3〇1，且配置成平行；及4張側板3 03 a、3 0 3 b、3 0 3 c、 303d，該4張側板303a、303b、303c、303d，是接合於上 述上板3 0 1與底板3 0 2。構成框體3 0 0的各板材，是藉由 譬如螺絲或螺栓等固定手段（圖面中未顯示）所接合，形 成一體後，於其內部形成用來搬送基板S的搬送空間。 上板3 0 1 a具有開口 3 04。接著，在採用譬如起重機使 圖面中未顯示的頂板7 1上升的狀態下，透過該開口 3 04 執行配置於搬送室20内部之搬送裝置50的維修保養。此 外’在上板3 0 1的開口 3 0 4周圍，於圖面中未顯示的細溝 內配備著〇型環之類的密封構件3 0 5。接著，在利用圖面 -22- (20) (20)After the above positioning, the helium valve 22 between the transfer chamber 20 and the load lock chamber 30 is opened, and the substrate accommodating portion 3 accommodated in the load lock chamber 30 is received by the transport device 50 in the transfer chamber 20. Substrate S. Next, the substrate S is carried into the processing chambers 10a, 10b, and 10c by the slide picker 513 or 523 of the transfer device 50. Then, the substrate S-14-(12)(12)200800739 subjected to the specific processing such as engraving by the processing chambers 10a, 10b, and 10c is carried out from the processing chambers 10a, 10b, and 10c by the transporting device 50. Next, the substrate S is loaded into the interlocking chamber 30 by the route opposite to the above, and is then accommodated in the cassette 40 by the transport mechanism 43. At this time, the substrate S may be returned to the original cassette 40 or may be accommodated in another cassette 40 °. Next, the sealing member of the present invention and a sealing mechanism using the sealing member will be described. The transfer chamber 20 is constructed, and the vacuum containers for loading the interlocking chamber 3G and the treatment chambers 10a, 10b, and 10c are sealed by a sealing member, and the inside thereof is kept in a vacuum state. In the present description, a description will be given of a sealing mechanism in the transfer chamber 20. Fig. 4 is a perspective view showing the appearance of the transfer chamber 20'. Fig. 5 is an exploded perspective view of Fig. 4. The internal mechanism of the transport device 50 and the like is omitted. The transfer chamber 20 is mainly configured as a vacuum container including a frame body 70 and a top plate 71. The frame 70 is constructed by joining six sheets. In other words, the frame 70 is composed of the following members: an upper plate 72; and a bottom plate 73 facing the upper plate 72 and arranged in parallel; and 4 side plates 74a, 74b, 74c, 74d, the 4 side plates 74a, 74b, 74c, and 74d are joined to the upper plate 72 and the bottom plate 73. Each of the plate members constituting the frame body 70 is joined by a fixing means such as a screw or a bolt (not shown), and is integrally formed, and a transfer space for transporting the substrate S is formed therein. The upper plate 72 has an opening 75 at the center as shown in the figure. Then, in a state where the top plate 71 is raised by a crane, for example, the maintenance of the conveying device 50 disposed inside the transfer chamber 20 is performed through the opening 75. Further, around the opening 75 of the upper plate 72, a sealing member 76 such as a 0-ring shown by -15-(13) (13) 200800739 in the drawing is provided in the groove. Then, in a state in which the top plate 7 1 is temporarily fixed to the frame 70 by a fixing means 1 〇 1 such as a screw or a bolt, the inside of the transfer chamber 20 is decompressed, thereby ensuring sufficient airtightness as a vacuum container. Sex. Further, although not shown in the drawing, an opening for providing the conveying mechanism 50 (refer to Fig. 2) is formed in the bottom plate 73. The upper plate 72 is provided with a partial (upper) wall portion 72a constituting a side wall of the casing 70, and is formed in a shallow box shape having an open lower surface. The upper plate 72 of the above shape can be formed by, for example, cutting. Further, the bottom plate 73 is provided with a partial (lower) wall portion 73a constituting a side wall of the frame body 70, and is formed in a shallow box shape in which the upper surface is open. The bottom plate 73 of the above shape can be formed by, for example, cutting. The four side plates 74a, 74b, 74c, and 74d are provided with transport openings for carrying in/out the substrate S, respectively. The transport openings 77a and 77b formed in the side plate 74a on the short side of the casing 70 are formed in the buffer 3 which can be loaded in the interlocking compartment 30 (please refer to FIGS. 1 and 2) and the load lock compartment 30. The position of the substrate S can be carried out/moved between the two. Further, the transport opening 78 formed in the other three side plates 74b to 74d of the casing 7 is used when the substrate S is carried out/loaded between the process chambers 10a to 10c as the vacuum processing chamber. Each of the transfer openings 77a, 77b, and 78 is provided with a weir valve 22 (refer to Fig. 1), and each of the process chambers 1 〇a, 1 0 b, 1 0 c disposed adjacent to each of the shut-off valves 22 The reception of the substrate S is performed between the load lock compartments 30. Further, among the four side plates 7 4 a, 7 4 b, 7 4 c, and 7 4 d, the side plates 7 4 a - 16- (14) (14) 200800739 and the both end portions E of the side plates 7 4 c are formed = A part of the side wall of the frame 70 can be formed by bending at right angles. By the shape of the upper plate 72 and the bottom plate 73, the entire joint portion can be formed in the eight corner portions 400 away from the frame body 7 in a state in which the frame body 70 is assembled (refer to Fig. 6) s position. In this way, it is not necessary to seal the corner portion 400 of the casing 70 which is difficult to ensure the sealing property. Further, in the present embodiment, since the end plates 74a and the end plates E of the side plates 74c are bent in the four side plates 74a to 74d, the adjacent side plates are assembled in the state in which the frame 70 is assembled. The joint portion between the two is formed on the inner side of the casing 70, away from the corner portion 400 adjacent to each other and the corner portion 500 formed by the corner portion 400 (refer to Fig. 6). In this way, it is not necessary to perform sealing on the corner portion 500 of the frame 70 of the corner portion 400, which is difficult to ensure the sealing property. As described above, in the casing 70 of the present embodiment, the shape of each member as the constituent member is inspected, and the sealing of the corner portion and the corner portion 500 of the casing 70 which is difficult to seal is reduced as much as possible. The airtightness of the transfer chamber 20 as a decompression container. Further, with the above configuration, all the joint portions can be formed on the side wall portion (side surface) of the frame body 70, so that the assembly of the frame body 7 is easy, and the replacement of the seal member 80 can be easily performed (please refer to Maintenance such as Figure 8). The top plate 71 of the transfer chamber 20 and the sheet material constituting the frame 70 may be made of a metal material such as molybdenum, stainless steel or steel. The assembly of the transfer chamber 20 can be performed in the following steps. First, the upper plate 72, the bottom plate 73, and the side plates -17-(15) (15) 200800739 74a to 74d are joined by fixing means such as screws or bolts to form the frame 70. At this time, the order in which the sheets are joined is not limited. Next, the sealing mechanism according to an embodiment of the present invention seals the joint portion of each of the plate members from the inside of the casing 70 to ensure the airtightness in a vacuum state. The sealing mechanism will be described in detail later. Next, after the internal member or the weir valve 22 such as the conveying mechanism 50 is placed in the casing 70, the top plate 71 is placed on the upper portion of the casing 70, and the sealing member 76 such as the Ο-shaped ring is brought into contact with the top plate 7 1 Below. Next, the top plate 71 is temporarily fixed to the frame body 70 by a fixing means 101 such as a screw or a bolt. In this state, the inside of the transfer chamber 20 is evacuated by the exhaust device not shown in the drawing, and the sealing member 76 is caused to be pressed against the lower surface of the top plate 71, and the airtightness can be ensured. The interior maintains a vacuum state. Further, when joining the respective sheets (the upper plate 72, the bottom plate 73, and the side plates 74a to 74d) constituting the top plate 71 and the frame 70, any fixing means can be employed, and it is not limited to screws or bolts. Fig. 6 is a perspective view showing the sealing mechanism of the joint portion inside the transfer chamber 20. Further, Fig. 7(a) is an enlarged view of a portion A in Fig. 6, and Fig. 7(b) is an enlarged view of a portion B in Fig. 6. Fig. 8 is a perspective view showing the entire structure of the sealing member used in the embodiment. In the sealing mechanism of the present embodiment, the sealing member 80 is used, the shape of the sealing member 80 corresponds to the joint portion inside the frame 70, and the auxiliary tool (the pressing device 90 and the corner pressing device 91 to be described later). It is used to fix the sealing member 80. In the present embodiment, the bottom plate 73 is provided with a partial wall portion 73a constituting the side wall of the casing 70, and a shallow box shape in which the upper surface is opened is formed. -18- (16) (16) 200800739 As shown in Fig. 6, in the state in which the joint portion Jac between the wall portion 73a of the bottom plate 73 and the side plate 74c is sandwiched, the both sides The inner wall surface (the wall portion 73a of the bottom plate 73 and the inner wall surface of the side plate 74c) form substantially the same surface (same plane). Similarly, in a state in which the joint portion Jad between the wall portion 73a of the bottom plate 73 and the side plate 74d is sandwiched, the inner wall surfaces of the both sides (the wall portion 73a of the bottom plate 73 and the inner wall surface of the side plate 74d) are also formed substantially. The same face. The same applies to the joint between the side plates 74a, 74b not shown in Fig. 6 and the wall portion 73a of the bottom plate 73. Further, as described above, among the four side plates 74a, 74b, 74c, 74d, the end plates 74a and the both end portions E of the side plates 74c are bent at right angles. Therefore, in the state in which the side plate 74c and the side plate 74d are joined in Fig. 6, the joint portion Jed is sandwiched between the two sides, and the inner wall surfaces on the both sides are formed into substantially the same surface. As in the conventional technique described above, in the configuration in which the joint portion composed of the plate material is provided at the corner portion of the frame body, it is necessary to use a seal member which is divided into three directions, if the portion at the intersection thereof is bent at a right angle, for example. The joint portion of the corner portion 400 will not be sealed. Further, the sealing member which is divided into three directions and which is in a bent state is difficult to press the bonding wire of the corner portion 400 with sufficient pressure, and the sealing performance of the corner portion 400 of the casing 70 is lowered and leakage occurs. Concerns about the reliability of vacuum containers. In the present embodiment, each of the joint portions on the inner side of the casing 70 has substantially the same inner wall surface, and the joint portion is not formed at the corner portion of the casing 70. In this way, the sealing of the joint portions of the respective sheets constituting the frame 70 can be performed in a planar manner, and excellent sealing properties can be obtained. Further, in the present embodiment, the sealing member 80 is a sealing member 80 having a shape of -19-(17) (17) 200800739 as shown in Fig. 8. More specifically, the sealing member 80 is formed in such a manner that the upper and lower return portions 80a and 80b forming the loop shape are connected by the four straight portions 80c, 80d, 80e, and 80f. The four linear portions 80c, 80d, 80e, and 8 Of form a T-shape for the upper and lower loop portions 80a and 80b, respectively, and are formed at right angles. Next, in the sealing member 8A, the upper loop portion 80a is a joint portion between the seal upper plate 72 and each of the side plates 74a to 74d, and the lower loop portion 80b seals the bottom plate 73 and the side plates 74a to 74d. The joint between the two. Further, in the sealing member 80, the four straight portions 80c, 80d, 80e, and 80f are configured to seal the joint portions between the side plates 74a to 74d, respectively. By using the above-described sealing member 80, the joint portion between the upper plate 72, the bottom plate 73, and the side plates 74a to 74d can be surely sealed. The sealing member 80 is made of, for example, a rope-like elastic body having a diameter of about 2 to 10 mm. The material of the sealing member 80 is the same as that of a general Ο-type ring, and an elastomer such as a fluorine rubber such as VITON (trade name, manufactured by DuPont), a butyl rubber or a silicone resin can be used. The sealing member 80 is disposed along a bonding line formed at the joint portion of each of the sheets, and is fixed by a subsidy. For example, in the joint portion Jac, Jad formed by the bottom plate 73 and the side plates 74c, 74d, and the joint portion Jed formed by the side plate 74c and the side plate 74d, the sealing member 80 is pressed by the pressing member 90. The wire is fixed and secured to ensure air tightness. Further, in the corner portion 500 of the side plate 74c, the sealing member 80 is pressed against the bonding wire of the joint portion J ac by the corner pressing member 91 to secure the heat. Although not shown in Fig. 6, the joint portion Jd between the side plates 74c and 74d is also provided with the pressing member 90. Further, the drawing No. -20-(18) (18) 200800739 202 in Fig. 6 is a screw hole when the pressing members 90 and 91 are fixed by a fixing means 102 such as a screw or a bolt, and the figure 90a and the angle of the pressing tool 90 are shown. The figure 9 1 a of the portion pressing member 91 is a hole portion into which the fixing means 1 〇 2 can be inserted in the above case. Fig. 9 and Fig. 1 are cross-sectional views showing an example of a sealing structure of the joint portion. Here, the joint portion Jad between the wall portion 73a of the bottom plate 73 and the side plate 74d is shown. The pressing tool 90 is made of the same material as each of the plates constituting the frame 70, and is formed into a long plate shape. Then, the pressing member 80 is pressed against the bonding wire located inside the joint portion Jad of the casing 70 by the pressing device 90, and fixed by the fixing means 102 such as a screw or a bolt. At this time, in the state of the nip joint portion Jad, the wall surfaces on both sides (the side wall 74d and the wall surface of the wall portion 73a of the bottom plate 73) are formed to have substantially the same surface, so that the urging means 90 can be used to average And the configuration of the sealing member 80 is easily pressed easily. In the present embodiment, the joint portion is not limited to the joint portion Jad, and the joint portion is sandwiched between the joint portions, and the wall surfaces on both sides are formed to have substantially the same surface. The sealing performance of the sealing member 80 is ensured. Further, a seal groove 79 is formed in the joint portion Jad, and as shown in Fig. 10, the seal member 80 (the lower return portion 8〇b in the ninth diagram) can be placed in the seal groove 79. The way to form a seal. The seal groove 79 has a function of positioning the seal member 80, and functions to reliably press the seal member 80 against the joint portion Jad. Thereby, the sealing property of the sealing member 80 can be sufficiently ensured. Further, the seal groove 7 9 can be provided by cutting the edge of the plate material constituting each joint portion to form a step portion. In this case, -21 - (19) (19) 200800739, as shown in Figs. 9 and 10, the side plate 74d of one of the two sheets constituting the joint portion forms a step portion, but The edge portion of the wall portion 73a of the bottom plate 73 is stepped, or a step portion may be formed at the edges of the two sheets. Next, a pressure reducing container according to another embodiment will be described with reference to Figs. 1 to 13 . As described above, in the embodiment described in the fourth to sixth embodiments, the upper plate 72 and the bottom plate 73 constituting the frame 70 are made of a plate having the wall portions 724a and 73a, and are adjacent to each other by three sheets. The joint portion is formed as a side wall portion that is separated from the corner portion 40 0 of the casing 70. However, as shown in Fig. 1, the frame 300 can be formed by joining the flat upper plate 3 0 1 , the flat bottom plate 302, and the side plates 303 a to 03 d. In Fig. 11, the illustration of the top plate is omitted. The frame body 00 constituting the transfer chamber 20 has a flat upper plate 301 and a flat plate bottom plate 302 facing the upper plate 3〇1 and arranged in parallel; and four side plates 3 03 a, 3 0 3 b, 3 0 3 c, 303d, the four side plates 303a, 303b, 303c, and 303d are joined to the upper plate 301 and the bottom plate 306. Each of the plates constituting the frame 300 is joined by a fixing means such as a screw or a bolt (not shown), and is integrally formed, and a transfer space for transporting the substrate S is formed inside the plate. The upper plate 3 0 1 a has an opening 3 04. Then, in a state where the top plate 7 1 not shown in the drawing is raised by, for example, a crane, the maintenance of the conveying device 50 disposed inside the transfer chamber 20 is performed through the opening 3 04. Further, around the opening 306 of the upper plate 301, a sealing member 305 such as a 〇-shaped ring is provided in a narrow groove not shown in the drawing. Then, using the drawing -22- (20) (20)
200800739 中未顯示的螺絲或螺栓等固定手段將圖面中未顯矛 暫時固定於框體3 00的狀態下，藉由對搬送室20 施減壓的方式，可確保作爲真空容器的充分氣密性 ’雖然圖面中未顯示，但在底板3〇2也形成有用萍 送機構5 0 (請參考第2圖）的開口。 在4張側板303a、303b、303c、303d，分別露 搬入/搬出基板S的搬送用開口。形成於框體300 之側板3 0 3 a的搬送用開口 3 0 6 a、3 0 6 b，是形成瓦 互鎖艙室3 0 (請參考第1圖及第2圖）的緩衝器 可搬出/搬入基板S的位置。此外，分別位於框體 其它3邊側板303b〜303d的搬送用開口 307，是右 空處理室的處理艙室10a〜10c之間搬出/搬入基板 用。在各搬送用開口 306a、306b、307，分別裝有 (請參考第1圖），並在透過各匣閥22所鄰接蔽 處理艙室l〇a、10b、10c及加載互鎖艙室30之間 板S的收授。 此外，4張側板303a、303b、303c、303d之中 3〇3a與側板3 03c的兩端部E是形成：可分別彎折 而構成框體3 00之側壁的一部分。 由於在本實施形態中，4張側板3 03 a〜3 03 d之 板3 03 a、3 03 c之兩側的端部E是呈彎折的形狀’ 由接合：形成平板狀的上板3 0 1與底板3 02 ;及端 彎折的側板3 0 3 a、3 0 3 c的方式，而在框體3 0 0形 角落部4 0 0。接著，在組裝成框體3 0 0的狀態下’ :的頂板 内部實 。此外 :設置搬 :有用來 短邊側 ~在加載 32之間 3 00之 ί作爲真 S時使 匣閥22 !置的各 丨執行基 ί，側板 ί成直角 :中，側 故可藉 部Ε經 成8個 隣接之 -23- (21) (21)200800739 側板間的接合部，是在框體3 00的内側，形成於：從彼此 相鄰的角落部400與角落部400所構成的角部500處分離 的位置。舉例來說，如第12圖所示，由於是藉由平板狀 的底板3 02、與端部經彎折的側板3 0 3 c的2張板材形成框 體3 00的角落部400，因此相較於藉由接合3張板材來構 成角落部400之傳統構造的減壓容器，可顯著地提高該角 落部400的密封性。 此外，由於側板3 03 c與側板3 03 d之接合部3 08a的 兩側内壁面是形成大致相同的面，故可藉由本文圖面中未 顯示的按壓具90 (請參考第6圖）而確實地密封。而由於 底板3 02、側板3 03 c、3 03d之間的接合部3 08b是形成於 框體3 00的角部500，故2個內壁面在該部分譬如形成直 角。因此，在接合部3 0 8 b譬如第1 3圖所示，是採用剖面 呈L字型的角部按壓具93來固定密封構件80。角部按壓 具93於其外周面形成有：用來抵接密封構件80的抵接部 93b，並可藉由該抵接部93b來按壓固定密封構件80。在 第13圖中，圖號93a是利用螺絲或螺栓等固定具1〇2固 定角部按壓具93時的孔部。 根據以上的構造，在本實施形態中，由彼此隣接的3 張板材，譬如底板3 0 2、側板3 0 3 c及側板3 0 3 d所形成的 接合部3 09 (也就是指接合部3 08a與接合部3 08b的交叉 部位），是形成在從前述角落部4 0 0分離的位置。位於該 接合部3 09的T字型接合線，可藉由配備具有T字型連接 部的密封構件8 0而確實地密封。因此，可形成具有絕佳 -24- (22) 200800739 氣密性的減壓容器。 而第11圖及第12圖所示之實施形態的框體300，除 了上板301及底板302呈平面狀的這點之外，基本上可採 用與第4圖〜第6圖所示之實施形態的框體70相同的構造 ，密封構件80也能採用與第8圖相同的構造。 • 如此一來，在本實施形態的框體3 0 0中，藉由對作爲 構成構件之各構件的形狀進行硏究，而極力減.少不易密封 φ 之框體3〇〇的角落部400和角部500的密封，而提高作爲 減壓容器之搬送室20的氣密性。 在本發明中，藉由採用上述實施形態所示的密封構造 ’即使在接合複數張板材的組裝構造中，也能輕易地製造 出具有絕佳氣密性的真空容器。因此，就在設置現場進行 接合的組裝式真空容器而言，不僅可較傳統一體型真空容 器更降低材料成本、加工成本等的製造成本，還能降低運 送成本。 • 再者，本發明並不侷限於上述的實施形態，能有各式 各樣的變形設計。舉例來說，被處理體並不侷限於FPD用 的玻璃基板，亦可爲半導體晶圓。 此外，在上述的實施形態中，雖然是列舉俯視觀察呈 6面體的範例來作爲形成減壓容器的框體70，但即使在接 合板材，譬如製作成8面體或10面體等形狀之減壓容器 的場合中，也能採用本發明的密封機構。第1 4圖，是顯 示接合底板311及5張側板3 12a〜3 1 2e作爲搬送艙室， 而構成可利用之俯視觀察呈5角形（7面體）的減壓容器 -25- (23) (23)200800739 3 1 0的例子。在第1 4圖中，是省略上板以及頂板的圖示。 此外，減壓容器並不侷限於第4圖所示「具有框體70 與頂板71」者。舉例來說，在由下部容器、與配置成面向 該下部容器的上部容器構成單一艙室，並藉由促使該上部 容器升降、滑動/旋轉進而開閉艙室之構造的減壓容器中 ，或即使在藉由板材的接合來製作前述上部容器及下部容 器的場合中，也同樣可適用本發明的密封機構。 此外，第4圖〜第6圖所示的實施形態，是構成框體 70的板材之中，分別於上板72與底板73設置壁部72a、 73a，並在側板74a，74c的端部設置彎折部E，而避免接 合部形成於框體70的8個角落部400。但是，譬如也能採 用如第15圖所示的構造：傾斜地切斷側板74c、74d的端 部而形成傾斜面，並在各側板74c、74d的端部設置山形 的凸部D。在該場合中，是藉由使2張板材74c、74d的 傾斜面彼此接合的方式，使2個凸部D組合形成接合部 Jed，進而使框體内側的角部平坦化。換言之，在框體内 側的角部，能以包夾接合部J c d的方式使該兩側的内壁面 形成相同的面。即使在該實施形態中，在此也能採用圖面 中未顯示的按壓具90來確實地按壓固定密封構件8〇。 此外’在上述的實施形態中，雖然是列舉搬送艙室2 〇 的範例進行說明，但只要是減壓容器，可沒有特殊限制地 適用本發明的技術思想。譬如作爲真空預備室的加載互鎖 艙室30、或作爲真空處理室的處理艙室i〇a〜l〇c也能採 用相同的密封機構。 -26- (24) 200800739 此外，在上述的實施形態中，雖然是列舉在保持水平 的狀態下對基板S執行搬送或處理的艙室來進行說明，但 本發明的技術思想也能適用於：在豎立成垂直的狀態下對 基板S執行搬送或處理，也就是所謂的縱型構造的艙室。 ' 〔產業上的利用性〕 本發明是適用於製造：對譬如FPD用玻璃基板等基板 φ 執行搬送或蝕刻等各種處理的減壓容器。 【圖式簡單說明】 第1圖：爲槪略地顯示可採用本發明密封機構的真空 處理系統的立體圖。 第2圖：爲第1圖之真空處理系統的水平剖面圖。 第3圖··爲顯示控制部之慨略構造的塊狀圖。 第4圖：爲顯示搬送室之外觀構造的立體圖。 φ 第5圖：爲框體的分解立體。 第6圖：爲顯示框體內之接合構造的重點立體圖。 第7圖：爲顯示框體內之接合構造的重點立體圖，其 中（a)爲第6圖中A部的放大圖，（b)爲第6圖中B部 的放大圖。 第8圖：爲顯示密封構件之全體圖像的立體圖。 第9圖：是用來說明接合部構造的重點剖面圖。 第1 0圖：是用來說明位於接合部之密封構造的重點 剖面圖，顯示已固定密封構件的狀態。 -27- 200800739 (25) 第1 1圖：爲其它實施形態之框體的分解立體圖。 第1 2圖：是顯示第1 1圖之框體的接合構造的重點立 體圖。 第13圖：是用來說明密封構件之固定方法的重點立 體圖。 ' 第1 4圖：爲另外一種實施形態之框體的外觀立體圖 〇 φ 第1 5圖：爲顯示位於其它實施形態之框體角部的接 合構造的重點剖面圖。 【主要元件之符號說明】 1 :真空處理系統 10a、 10b、 10c ：處理艙室 2 0 :搬送室 3 0 :加載互鎖艙室 φ 5 0 :搬送裝置 60 :控制部 80 :密封構件 8 0a v 8 0b ：迴圏部 80c、80d、80e、80f ：直線部 90 :按壓具 91 :角部按壓具。 - 28 -A fixing means such as a screw or a bolt, which is not shown in 200800739, temporarily fixes the unexposed spear in the drawing to the frame body 300, and the airtightness of the transfer chamber 20 ensures sufficient airtightness as a vacuum container. Although not shown in the drawing, the opening of the bottom plate 3〇2 also forms a useful conveying mechanism 50 (refer to Fig. 2). In the four side plates 303a, 303b, 303c, and 303d, the transfer openings of the substrate S are respectively carried in and out. The transport opening 3 0 6 a, 3 0 6 b formed in the side plate 3 0 3 a of the casing 300 is a buffer that can form the tile interlocking compartment 30 (refer to Figs. 1 and 2). Move into the position of the substrate S. Further, the transfer openings 307 respectively located in the other three side plates 303b to 303d of the frame are used for carrying out/loading the substrates between the process chambers 10a to 10c of the right empty process chamber. Each of the transfer openings 306a, 306b, and 307 is installed (refer to FIG. 1), and is disposed between the adjacent processing chambers 10a, 10b, 10c and the load lock chamber 30 through the respective valves 22. The acceptance of S. Further, between the three side plates 303a, 303b, 303c, and 303d, the end portions E of the third side 3a and the side plate 303c are formed so as to be bendable to form a part of the side wall of the frame body 300. In the present embodiment, the end portions E on both sides of the plates 3 03 a, 3 03 c of the four side plates 3 03 a to 3 03 d are in a bent shape 'by joining: forming the flat upper plate 3 0 1 and the bottom plate 3 02; and the side bent side plates 3 0 3 a, 3 0 3 c, and the frame body 3 0 0 corner portion 4 0 0. Next, in the state in which the frame body 300 is assembled, the inside of the top plate is real: In addition: set the move: there is a short side to the side of the load between 32 and 30 when loading 32 as the true S, the 丨 valve 22! 的 丨 丨 丨 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The joint between the side plates of the adjacent -23-(21) (21) 200800739 is formed on the inner side of the frame 300, and is formed at an angle formed by the corner portions 400 and the corner portions 400 adjacent to each other. The location where the part 500 is separated. For example, as shown in Fig. 12, since the corner portion 400 of the frame body 300 is formed by the flat bottom plate 302 and the two sheets of the side plate 3 0 3 c bent at the end portion, the phase is formed. The sealing property of the corner portion 400 can be remarkably improved as compared with the conventionally constructed decompression container in which the corner portion 400 is formed by joining three sheets. In addition, since the inner wall surfaces on both sides of the joint portion 308a of the side plate 303c and the side plate 303d are substantially the same surface, the pressing device 90 not shown in the drawing may be used (refer to FIG. 6). And it is sealed. Since the joint portion 308b between the bottom plate 032 and the side plates 303c, 303d is formed at the corner portion 500 of the frame 300, the two inner wall faces are formed at right angles to the portion. Therefore, as shown in Fig. 3, the joint portion 3 0 8 b is a corner portion presser 93 having an L-shaped cross section to fix the sealing member 80. The corner pressing member 93 is formed on the outer peripheral surface thereof with an abutting portion 93b for abutting against the sealing member 80, and the sealing member 80 can be pressed and fixed by the abutting portion 93b. In Fig. 13, reference numeral 93a is a hole portion when the fixed corner portion pressing member 93 is fixed by a fixing member 1〇2 such as a screw or a bolt. According to the above configuration, in the present embodiment, the joint portions 3 09 formed by the three sheets adjacent to each other, such as the bottom plate 3 0 2, the side plates 3 0 3 c, and the side plates 3 0 3 d (that is, the joint portion 3) The intersection of 08a and the joint portion 108b is formed at a position separated from the corner portion 400. The T-shaped bonding wire located at the joint portion 309 can be reliably sealed by being provided with the sealing member 80 having the T-shaped connecting portion. Therefore, a reduced pressure vessel having an excellent -24- (22) 200800739 airtightness can be formed. The frame 300 of the embodiment shown in Figs. 11 and 12 can basically be implemented as shown in Figs. 4 to 6 except that the upper plate 301 and the bottom plate 302 are planar. The frame 70 of the form has the same structure, and the sealing member 80 can have the same structure as that of Fig. 8. In the case of the frame body 300 of the present embodiment, the shape of each member as a constituent member is inspected, and the corner portion 400 of the frame body 3 that is difficult to seal φ is reduced as much as possible. The sealing of the corner portion 500 improves the airtightness of the transfer chamber 20 as a pressure reducing container. In the present invention, by using the sealing structure shown in the above embodiment, a vacuum container having excellent airtightness can be easily manufactured even in an assembly structure in which a plurality of sheets are joined. Therefore, in the case of the assembled vacuum vessel in which the joining is performed in the field, the manufacturing cost of the material cost, the processing cost, and the like can be reduced, and the transportation cost can be reduced. Further, the present invention is not limited to the above-described embodiments, and various modifications can be made. For example, the object to be processed is not limited to the glass substrate for FPD, and may be a semiconductor wafer. In addition, in the above-described embodiment, the case of forming a hexahedron in a plan view is used as the frame body 70 for forming the pressure reducing container. However, even if the plate material is joined, it is formed into an octahedron or a octahedron. In the case of a reduced pressure container, the sealing mechanism of the present invention can also be employed. Fig. 14 is a view showing a joint bottom plate 311 and five side plates 3 12a to 3 1 2e as a transfer chamber, and a decompression container 25-(23) having a pentagon shape (a pentahedron) in a plan view. 23) Example of 200800739 3 1 0. In Fig. 14, the illustration of the upper plate and the top plate is omitted. Further, the decompression container is not limited to the one having the frame 70 and the top plate 71 as shown in Fig. 4. For example, in a decompression container in which a lower chamber is constituted by a lower container and an upper container disposed to face the lower container, and the upper container is moved up, down, and rotated to open and close the compartment, or even if it is borrowed In the case where the upper container and the lower container are formed by joining of sheets, the sealing mechanism of the present invention can also be applied. Further, in the embodiment shown in Figs. 4 to 6 , in the plate material constituting the frame 70, the wall portions 72a and 73a are provided on the upper plate 72 and the bottom plate 73, respectively, and are provided at the ends of the side plates 74a and 74c. The bent portion E is bent to prevent the joint portion from being formed in the eight corner portions 400 of the frame body 70. However, for example, the structure shown in Fig. 15 can be employed: the end portions of the side plates 74c and 74d are obliquely cut to form an inclined surface, and the mountain-shaped convex portion D is provided at the end portions of the side plates 74c and 74d. In this case, the two convex portions D are combined to form the joint portion Jed so that the inclined surfaces of the two sheets 74c and 74d are joined to each other, and the corner portion inside the frame is flattened. In other words, at the corner portion on the inner side of the casing, the inner wall surfaces of the both sides can be formed into the same surface so as to sandwich the joint portion J c d . Even in this embodiment, the pressing member 90 not shown in the drawing can be used to reliably press and fix the sealing member 8A. In the above-described embodiment, the example of the transport compartment 2 is described. However, the technical idea of the present invention can be applied without any particular limitation as long as it is a reduced pressure container. For example, the same sealing mechanism can be used as the load lock chamber 30 as the vacuum preparation chamber or the treatment chambers i〇a to l〇c as the vacuum processing chamber. -26- (24) 200800739 In addition, in the above-described embodiment, a description is given of a cabin in which the substrate S is transported or processed while being horizontally held. However, the technical idea of the present invention can also be applied to: The substrate S is transported or processed in a vertical state, that is, a so-called vertical structure. [Industrial Applicability] The present invention is a pressure-reducing container which is suitable for the production of various processes such as transportation or etching of a substrate φ such as a glass substrate for FPD. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a vacuum processing system in which a sealing mechanism of the present invention can be used. Figure 2 is a horizontal sectional view of the vacuum processing system of Figure 1. Fig. 3 is a block diagram showing the schematic structure of the control unit. Fig. 4 is a perspective view showing the appearance of the transfer chamber. φ Figure 5: The exploded three-dimensional frame. Fig. 6 is a perspective view showing the key structure of the joint structure in the casing. Fig. 7 is a perspective view showing a key structure of the joint structure in the casing, wherein (a) is an enlarged view of a portion A in Fig. 6, and (b) is an enlarged view of a portion B in Fig. 6. Fig. 8 is a perspective view showing the entire image of the sealing member. Fig. 9 is a key sectional view for explaining the structure of the joint portion. Fig. 10 is a cross-sectional view for explaining the sealing structure at the joint portion, showing the state in which the sealing member is fixed. -27- 200800739 (25) Fig. 1 is an exploded perspective view of a casing of another embodiment. Fig. 1 is a perspective view showing the joint structure of the frame of Fig. 11. Fig. 13 is a perspective view showing the fixing method of the sealing member. Fig. 14 is an external perspective view of a casing of another embodiment. φ φ Fig. 15 is a key sectional view showing a joint structure of a frame body at another embodiment. [Description of Symbols of Main Components] 1 : Vacuum Processing System 10a, 10b, 10c: Processing Cabin 20: Transfer Chamber 30: Loading Interlock Compartment φ 5 0: Transport Device 60: Control Unit 80: Sealing Member 8 0a v 8 0b: the return portion 80c, 80d, 80e, 80f: the straight portion 90: the pressing member 91: the corner pressing device. - 28 -