CN103221723B - Sealed chamber - Google Patents

Abstract

The object of the invention is in assembly type sealed chamber, improving sealing by being filled up in the gap betiding the turning of seal groove branch that the mating face of sheet material is formed.In the present invention, undertaken in the sealed chamber (C) of assembling by engaging sheet material, when the mating face of adjacent sheet material in the seal groove (6) formed installed sealed member (5), the branch periphery (turning (53a)) of sealed member (5) produces compressive strain to seal groove turning (64a) direction, thus makes the turning of sealed member branch (53) (53a) reliably can be expressed to the turning (64a) of seal groove branch (64) and be close to the turning (64a) of seal groove branch (64).

Description

Sealed chamber

Technical field

The present invention relates to a kind of assembly type sealed chamber that can utilize in semiconductor-fabricating device, flat panel display manufacturing apparatus, solar cell board manufacturing apparatus etc.

Background technique

In the past, such as, when film forming process or etch processes being carried out to the handled object of semiconductor wafer or liquid crystal display substrate etc., use (being generically and collectively referred to as below " sealed chamber ") such as the chambers of vacuum chamber or sealing gas.This sealed chamber generally uses the module that aluminum alloy or stainless steel etc. are larger, and the inside being reamed its module by chip processing is manufactured.Therefore, the maximization realizing sealed chamber is difficult to.In addition, during owing to manufacturing, larger process equipment is needed, and the reason that the internal material reamed is wasted etc., there is the problem that manufacture cost uprises.

Further, also exist and the chamber body of frame type is divided into multiple component parts, welding is carried out to multiple component parts of this segmentation and the sealed chamber of the structure manufactured.But, particularly in the welding of aluminum alloy, its welding is costly and the difficulty of welding is larger, and the problem producing distortion after fusing and break deposited by aluminum alloy, both stainless steels, and need to implement secondary operations because of weld portion cannot be made to be formed as plane, therefore become the main cause raised the cost.Further, because cannot dismantle each component parts after a procedure, therefore exist and be difficult to the problem of carrying out maintenance work, and when welding structure, what the fatigue also existed because of weld portion caused breaks.In addition, because the handled object of substrate etc. is also maximized these years, if therefore each component parts can not be dismantled, then be also inconvenient to carry, and be difficult to the maximization requirement tackling chamber itself.

Therefore, as the chamber solving problem as above, also disclose the vacuum container recorded in patent documentation 1.This vacuum vessel forms hollow frame body by the end face of joint four side plates, and at the upper and lower opening face of this hollow frame body difference jointing top panel and bottom panel, thus be configured to box describe device.Further, the mating face of each sheet material is provided with seal groove, seals, thus make it guarantee the sealing of container by being embedded in sealing groove by integrated sealed member.

But, in the vacuum vessel with this connected structure, be difficult to realize sealing actually by sealed member, larger seepage can be caused, the inside of container sometimes cannot be made to keep vacuum.Judge after deeply tracing it to its cause, for the combination between general square seal groove and sealed member linear uniformly, at the turning (top) of box describe device, small gap occurs between sealed member and seal groove.More particularly, in the branch (T-shaped part) of the sealed member extended along three directions, particularly in turning sealing surface and sideline, sealed member is inadequate for the crowded thrust of seal groove, produce small gap at the turning of this branch, from this, seepage occurs.

Prior art document

Patent documentation

Patent documentation 1: Japanese Unexamined Patent Publication 2004-286165 publication

Summary of the invention

Technical problem

The present invention proposes to solve problem as above, its object is to stably to provide than existing to be processed by chip or sealed chamber that welding structure is formed simple and can with low cost manufacture, and make reliably to be adjacent between sealed member and seal groove and prevent the generation of seepage, the sealed chamber that tightness is high.

Technological scheme

In order to achieve the above object, assembly type sealed chamber of the present invention, by engaging multiple sheet materials, seal space is set in inside, it is characterized in that, comprise the seal groove on the mating face being formed in adjacent sheet material and there is the sealed member of the branch along different direction branches, when sealed member is installed in seal groove, the branch periphery of sealed member produces compressive strain to seal groove corner direction, thus makes the turning of sealed member branch be extruded to the turning of seal groove branch and be close to the turning of seal groove branch.

Further, in sealed chamber of the present invention, the fill factor of sealed member branch is preferably set to about 100%.Here, the sectional area of seal groove is set to S1, when the sectional area of sealed member is set to S2, " fill factor " refers to the ratio (S2/S1) of the sectional area of the sealed member of the sectional area relative to seal groove.Such as, as concrete mode of execution, the sectional area of sealed member branch can be adopted to be formed as being greater than the structure of the sectional area of linear portion.If the sealed member of this structure is installed in the seal groove of uniform sectional area, then sealed member branch can only towards the direction contrary with bearing of trend, namely away from the Direction distortion of branch, can guarantee the extruding force of the corner direction to seal groove branch.Further, in contrast, the sectional area of the branch of seal groove also can be adopted to be formed as being less than the structure of the sectional area of linear portion.If install the sealed member uniformly with sectional area in the seal groove of this structure, then can guarantee the extruding force of the corner direction to seal groove branch equally.Further, also can replace these structures, make the length setting of sealed member be the length being less than seal groove.

And, in order to prevent the sealed member at the turning contacting seal groove branch impaired, the sealing surface between the turning of sealed member branch and the turning of seal groove branch can be changed to the shape of the chamfer machining of having carried out R shape (arc surface) or C face shape (45 ° of plane of inclination) etc.

Invention effect

According to the present invention, the assembly type sealed chamber that inside is provided with seal space is formed by engaging multiple sheet materials, thus compared with the sealed chamber processing with the chip by stainless welding structure or aluminum alloy and manufacture, material cost and processing charges can be suppressed significantly, can manufacture with low-down cost.And, when sealed member has been installed in seal groove, make the turning of the turning crush seal groove branch of sealed member branch by making the branch periphery of sealed member produce compressive strain and be close to, thus the sealing improved for the turning of seal groove branch, prevent the generation of seepage, the sealed chamber that can stably provide tightness high.

Accompanying drawing explanation

Fig. 1 is the overall diagram of the structure representing sealed chamber of the present invention.

Fig. 2 is the component diagram of the structure representing side plate.

Fig. 3 is the component diagram of the lateral plate structure represented with relief opening.

Fig. 4 is the component diagram of the structure representing top board and base plate.

Fig. 5 is the component diagram of the structure representing sealed member.

Fig. 6 is the explanatory drawing of the assembling method representing sealed chamber.

Fig. 7 is the enlarged view of the shape representing seal groove branch.

Fig. 8 is the enlarged view of the shape representing general sealed member branch.

Fig. 9 is the explanatory drawing of effect when representing the sealed member having installed Fig. 8 in the seal groove of Fig. 7.

Figure 10 is the enlarged view of the shape of the sealed member branch represented in the present invention.

Figure 11 is the explanatory drawing of effect when representing the sealed member having installed Figure 10 in the seal groove of Fig. 7.

Figure 12 is the enlarged view of the example representing sealed member branch.

Figure 13 is the enlarged view of other examples representing sealed member branch.

Figure 14 is the enlarged view of other examples representing sealed member branch.

Figure 15 is the enlarged view of other examples representing sealed member branch.

Figure 16 is the enlarged view of other examples representing sealed member branch.

Figure 17 is the enlarged view of the example representing seal groove branch.

Figure 18 is the enlarged view of other examples representing seal groove branch.

Figure 19 is the enlarged view of other examples representing seal groove branch.

Figure 20 is the enlarged view of an example of the sealing surface represented between sealed member branch and seal groove branch.

Figure 21 is the enlarged view of other examples of the sealing surface represented between sealed member branch and seal groove branch.

Symbol description

C is sealed chamber, 1 is side plate, 11 for tapped hole (side plate for relief opening) 12 be tapped hole (for top board), 13 is tapped hole (for base plate), 14 is pin, 15 is pin-and-hole, 2 for being with the side plate of relief opening, 21 is exhaust port, 22 is relief opening, 23 is tapped hole (for exhaust port), 24 is tapped hole (for top board), 25 is tapped hole (for base plate), 26 is inserting hole, 27 is stepped part, 28 is pin-and-hole, 3 is top board, 31 is inserting hole, 4 is base plate, 41 is inserting hole, 5 is sealed member, 51 is top, 52 is linear portion, 53 is branch, 53a is turning, 6 is seal groove, 61 is groove, 62 is annular recess, 63 is curved part, 64 is branch, 64a is turning, 65 is linear portion, 66 is ridge, 7 is bolt, 8 is formwork.

Embodiment

Below, with reference to accompanying drawing, embodiments of the present invention are described.

As shown in Figure 1, sealed chamber C of the present invention be use multiple sheet material 1,2,3,4, sealed member 5, bolt 7 carry out the assembled container assembled, such as in semiconductor-fabricating device, become vacuum state by making inside and can use as the vacuum chamber of the film forming process and etch processes etc. of carrying out semiconductor wafer.

In the present embodiment, sealing cavity C is fixing mutually in the face of two side plates 1,1 and two arranged form the formwork 8 of plane quadrilateral with the side plate 2,2 of relief opening by bolt 7, by arranging top board 3 in the upper open face of this formwork 8 respectively, and after lower openings face arranges base plate 4, utilize bolt 7 to fix, be configured to the hollow container that inside has the cuboid-type of seal space thus.And, mating face between formwork 8 and top board 3, mating face between formwork 8 and base plate 4 and adjacent side plate 1 and with relief opening side plate 2 between mating face be respectively equipped with seal groove 6, keep tightness by installing sealed member 5 in sealing groove 6.In addition, be respectively equipped with exhaust port 21 with on the side plate 2 of relief opening, this exhaust port 21 installed the vacuum pump (omitting diagram) being used for vacuumizing the seal space in chamber.

As shown in Figure 2, side plate 1 is that rectangular aluminium alloy plate is formed by plane, its upper side, downside and side, two, left and right are formed with respectively the groove 61,61 of straight line shape ..., the annular recess 62 that these grooves 61 are linked to be a circle and are formed around whole side.Further, the side, two, left and right of side plate 1 is provided with by multiple bolt 7,7 ... connect the tapped hole 11,11 of the side plate 2 of adjacent band relief opening ... with the pin-and-hole 15 for inserting the pin 14 that the side plate 2 of band relief opening positions.Therewith in the same manner, the upper side of side plate 1 is provided with the tapped hole 12,12 for connecting top board 3 ..., downside is provided with the tapped hole 13,13 for connecting bottom board 4 ...

As shown in Figure 3, the side plate 2 of band relief opening is that foursquare aluminium alloy plate is formed by plane, and central part is through and be formed with relief opening 22, and the surrounding of this relief opening 22 is provided with the tapped hole 23,23 for fixing exhaust port 21 ...Further, the upper side of the side plate 2 of band relief opening is formed with the groove 61 at two ends with curved part 63, and is provided with the tapped hole 24,24 for connecting top board 3 ...Therewith in the same manner, downside is provided with the groove 61 with curved part 63 and the tapped hole 25,25 for connecting bottom board 4 ...Further, in side, two, left and right, the position corresponding with the tapped hole 11 of side plate 1 is provided with the inserting hole 26 for inserting bolt.At this, the left and right sides of the inner side surface of the side plate 2 of band relief opening is formed with stepped part 27,27, by connecting bolt 7 forms formwork 8 after engaging two, the left and right end face of side plate 1 in this stepped part 27.

As shown in Figure 4, top board 3 is same is that foursquare aluminium alloy plate is formed by plane, is provided with the inserting hole 31,31 for inserting the bolt being connected to formwork 8 along its periphery ...Further, base plate 4 is provided with equally the inserting hole 41,41 for inserting bolt ...At this, although in the present embodiment as side plate 1, the band side plate 2 of relief opening, top board 3 and base plate 4 material and employ aluminium alloy plate, the sheet metal such as corrosion resistant plate or Carbon Steel Plate also can be used to replace aluminium alloy plate.

As shown in Figure 5, sealed member 5 is consisted of the reinforced seal parts be made up of elastomer, the contoured cuboid-type for having eight tops, place 51 on the whole.In the present embodiment, the rubber material of the pole shape of fluororesin sulfidization molding is made to form 12 linear portion 52,52 ... near respective top 51, form that T-shaped branch 53 as shown in enlarged view, and by Bond or sulfidization molding one-body molded in conjunction with these.At this, material and the forming method of sealed member 5 are not limited thereto, as long as can be configured to make the anastomosis part of sheet material be sealed, then its material or forming method can adopt any one.

Then, the method manufacturing sealed chamber C of the present invention by assembling the side plate 1, the band side plate 2 of relief opening, top board 3, base plate 4 and the sealed member 5 that form as described above is described with reference to Fig. 6.

When assembling, first for integrated sealed member 5, side plate 1 is installed.Now, for the annular recess 62 that the whole side at side plate 1 is arranged, the linear portion 52,52 of embedding sealing parts 5 successively ...After sealed member 5 installs side plate 1, in the pin-and-hole 15 of side plate 1, insert pin 14.

Then, the side plate 2 of mounting strap relief opening on the sealed member 5 having installed side plate 1.Now, for the groove 61 arranged in the upper and lower side of the side plate 2 of band relief opening, the remaining linear portion 52,52 of embedding sealing parts 5 ...So, if on sealed member 5 side plate 2 of embedded relief opening, then two, the left and right end face of side plate 1 is connected to stepped part 27, and pin 14 is inserted in the pin-and-hole 28 of the side plate 2 of band relief opening.Then, under the state of locating making the side plate 2 of side plate 1 and band relief opening abut, the bolt 7 inserted is screwed in tapped hole 11, thus the side plate 2 of fixed lateral plate 1 and band relief opening from inserting hole 26.

If fixed the side plate 2,2 of two side plates 1,1 and two band relief opening by said method, the formwork 8 of the cartridge type that four periderm sheet materials surround can be formed.Then, at the upper surface configuration top board 3 of this formwork 8, the bolt 7 be inserted in the inserting hole 31 of top board 3 is screwed in tapped hole 12,24 respectively.Now, the upper surface due to formwork 8 is embedded with the sealed member 5 connected for ring-type as the plan view of Fig. 6, and the mating face therefore between formwork 8 and top board 3 is sealed by the sealed member 5 of this ring-type and guarantees tightness.And, about base plate 4 similarly, inserting bolt 7 in inserting hole 41, and it is screwed on respectively the lower surface in tapped hole 13,25, base plate 4 being fixed on formwork 8, make formwork 8 be sealed by the sealed member 5 of ring-type with the mating face of base plate 4 thus.On formwork 8, fix top board 3 and base plate 4 by this method, the assembling of sealed chamber C can be completed.

So, according to sealed chamber C of the present invention, only assembling can be completed with bolt 7 is fixing owing to embed sheet material 1,2,3,4 on integrated sealed member 5 after, therefore with welding structure or to compared with the manufacture method in the past of raw-material chip etc., sealed chamber C can be manufactured at short notice by simple operation (that is, low cost).Further, owing to forming by sheet material, as long as therefore with the shaping each sheet material of large scale, the size of sealed chamber C entirety easily can be expanded as the side plate 1 of component parts, the band side plate 2 of relief opening, top board 3 and these all parts of base plate 4.In addition, by connecting multiple side plate 1, the side plate 2 being with relief opening, top board 3 and base plate 4 side by side, the size of sealed chamber C entirety can also be expanded thus further.

But the present invention, in order to improve the sealing on the mating face of the sheet material 1,2,3,4 undertaken by sealed member 5, is characterized in that improving the relation between sealed member 5 and seal groove 6, and structure detailed to it is below described.

Fig. 7 is square seal groove 6A about general cross section, the figure represented carrying out amplifying near the seal groove branch 64 of different direction branch, Fig. 8 is circular sealed member 5A, the figure represented carrying out near sealed member branch 53 amplifying equally about general cross section.Here, state of having installed the sealed member 5A of Fig. 8 in the seal groove 6A of Fig. 7 shown in Figure 9.In fig .9, to embedded in cross section in the seal groove 6A that cross section is square be circular sealed member 5A, as shown in the figure, the repulsion of the sealed member 5A that the crowded thrust face A bottom seal groove and face B obtaining cause relative to sheet material is enough large.

But, in sealing parts 5A, owing to acting on D direction and the E direction of figure along the composite force of the extension near the sealed member branch 53 of three direction branches, the repulsion of the sealed member 5A in the C direction needed for therefore sealing gap at the turning 64a of seal groove branch 64 is inadequate.Therefore, when turning (sideline) 64a of seal groove branch 64 does not form almost complete straight line, there is the tendency being difficult to the gap sealing corner 64a by sealed member 5A.Further, even if seal, its sealability (such as, the minimizing etc. by the time of gas) is also bad, there is practicability problem when being used as vacuum chamber.

Therefore, in the sealed chamber C of present embodiment, when sealed member 5 being installed in seal groove 6, the fill factor (ratio for the sectional area of the sealed member branch 64 of the sectional area of seal groove branch 53) of branch 53 is set as the high value of about 100%, is pressed into the turning 64a of seal groove branch 64 to make the turning 53a of sealed member branch 53 with predetermined pressure.Figure 10 is as one example, about sealed member 5B of the present invention, to having carried out the figure shown in amplification near branch 53.

As shown in Figure 10, in the sealed member 5B of present embodiment, be circular relative to the sectional shape of linear portion 52, the sectional shape of branch 53 is formed as the square compound shape being combined with semicircle and turning being carried out to rounding process.Therefore, compared to the sectional area of linear portion 52, the sectional area of branch 53 is shaped to larger.

Figure 11 is the figure of the state that the sealed member 5B having installed Figure 10 in the seal groove 6A of Fig. 7 is shown.In fig. 11, if embedding cross section in the seal groove 6A that cross section is square is compound sealed member 5B, then because the fill factor of sealed member branch 53 is set as about 100%, therefore sealed member 5B can not offset towards D direction and E direction, and can only towards the direction contrary with the bearing of trend of sealed member 5B, namely away from the Direction distortion of seal groove branch 64.Therefore, at the turning 64a of seal groove branch 64, the C direction needed for the sealing in gap, the extruding force of sealed member 5B can not be cancelled and can be guaranteed.Therefore, sealed member 5B according to the present embodiment, can obtain enough extruding forces at the turning 64a of seal groove branch 64, and the close property improved between sealed member 5B and seal groove 6A and fill gap, thus reliably can prevent seepage.

Further, the structure of sealed member 5 is not limited to the shape shown in Figure 10.Figure 12 ~ Figure 16 is the turning 64a at seal groove branch 64, and making the sectional area of sealed member branch 53 be greater than cross section in order to ensure the repulsion of the sealed member 5 in the C direction towards Figure 11 is that circular sealed member 5A(is with reference to Fig. 8) the figure of example of sectional area.

Such as, the sectional shape of the linear portion 52 of the sealed member 5C shown in Figure 12 is circular, in contrast, the sectional shape of branch 53 is shaped to the circle of a circle larger than the sectional shape of linear portion 52.Further, the sectional shape of the linear portion 52 of the sealed member 5D shown in Figure 13 is circular, in contrast, the sectional area that the sectional shape of branch 53 is formed as upper half part expands as the half elliptic larger than semicircle.And, in sealed member 5E shown in Figure 14, the sectional shape of branch 53 is shaped to ellipse circle being expanded to sectional area towards above-below direction, in sealed member 5F shown in Figure 15, the sectional shape of branch 53 is shaped to ellipse circle being expanded to left and right direction to sectional area.In addition, the sealed member 5G shown in Figure 16 is shaped to the sectional shape of branch 53 than a circular large circle, and four angles has been carried out to the general square shape of rounding process.

So, the sectional area that any one sealed member 5 in Figure 12 ~ Figure 16 is all set to branch 53 is greater than the sectional area of linear portion 52 relatively.Therefore, when being that square seal groove 6A(is with reference to Fig. 7 in cross section) in when these sealed members 5C ~ 5G has been installed, as shown in figure 11, sealed member 5 is compressed by sheet material, and sealed member 5 causes making a concerted effort and increasing towards reciprocal repulsion towards D direction for stretching, extension.Its result, the extruding force towards the C direction of Figure 11 becomes large, therefore, it is possible to improve the close property for the turning 64a of seal groove branch 64, fills gap and reliably prevents seepage.

And, although above-mentioned mode of execution is that square seal groove branch 64 installs the example expanding the sealed member branch 53 of sectional area to general cross section, but contrary with it, also can install general cross section at the seal groove branch 64 reducing sectional area be circular sealed member branch 53.

Such as, the sectional area of branch 64 by arranging the ridge 66 outstanding to the internal face of branch 64 in the groove that cross section is square, thus is set as less than the sectional area of linear portion 65 by the seal groove 6B shown in Figure 17.Further, the sectional area of branch 64 by making the groove depth d of the corner vicinities of branch 64 more shallow in the groove that cross section is square, thus is similarly set smaller than the sectional area of linear portion 65 by the seal groove 6C shown in Figure 18.In addition, the sectional area of branch 64 by making the groove width w of the corner vicinities of branch 64 narrower in the groove that cross section is square, thus is similarly set smaller than the sectional area of linear portion 65 by the seal groove 6D shown in Figure 19.

So, the sectional area that any one seal groove 6 in Figure 17 ~ Figure 19 is all set to branch 64 is less than the sectional area of linear portion 65 relatively.Therefore, when reducing seal groove 6B(Figure 17 of sectional area), 6C(Figure 18), 6D(Figure 19) in have installed cross section be circular sealed member 5A(Fig. 8) time, identical with situation illustrated in fig. 11, sealed member 5A is compressed by sheet material and makes making a concerted effort and increasing towards reciprocal repulsion towards D direction.Therefore, also can improve the close property of the turning 64a for seal groove branch 64 according to these examples, fill gap and reliably prevent seepage.

In above-described mode of execution, the fill factor of sealed member branch 53 is set as about 100%.Fill factor is set as the reason of about 100% is, even if fill factor is less than 100%, such as about 90%, when sealed member 5 is elastomer, be close to the part of sealing surface, sealed member 5 demonstrates the character close to liquid in extruding force.Further, fill factor also can more than 100%.The sealed member 5 of fill factor more than 100% when being embedded into seal groove 6 respectively towards away from the Direction distortion of branch 53, and being contained in groove inside completely due to sealed member, the sealed member 5 being therefore connected to the turning 64a of seal groove branch 64 also can not be impaired.

Further, making sealed member 5 impaired to be unlikely, also the sealing surface between the turning 53a of sealed member the branch 53 and turning 64a of seal groove branch 64 can be changed to and having carried out the shape of chamfer machining.Such as, the structure of structure sealing surface being formed as R shape (arc surface) as shown in figure 20 or the C face that is formed as by sealing surface shape (45 ° of plane of inclination) as shown in figure 21 can be adopted.At this, although do not illustrate, can be shorter than the length of seal groove 6 by the length setting of sealed member 5.In this case, because when embedded in sealed member 5 in seal groove 6, sealed member 5 causes making a concerted effort and increasing towards reciprocal repulsion, therefore, it is possible to obtain the effect identical with above-mentioned mode of execution towards D direction for stretching, extension.

Utilizability in industry

Sealed chamber of the present invention is not limited to semiconductor-fabricating device, can also be used in the purposes widely such as flat panel display manufacturing apparatus, solar cell board manufacturing apparatus, organic EL panel manufacturing installation.

Claims (2)

1. a sealed chamber, it is for arranging the assembly type sealed chamber of seal space in inside by engaging multiple sheet materials, comprise the seal groove on the mating face being formed in adjacent sheet material and there is the sealed member of the branch along different direction branches, it is characterized in that

In sealed member, the sectional area of branch is formed as the sectional area being greater than linear portion,

When installing sealed member in seal groove, the branch periphery of sealed member produces compressive strain to seal groove corner direction, thus makes the turning of sealed member branch be extruded to the turning of seal groove branch and be close to the turning of seal groove branch.

2. a sealed chamber, it is for arranging the assembly type sealed chamber of seal space in inside by engaging multiple sheet materials, comprise the seal groove on the mating face being formed in adjacent sheet material and there is the sealed member of the branch along different direction branches, it is characterized in that

In seal groove, the sectional area of branch is formed as the sectional area being less than linear portion,

When installing sealed member in seal groove, the branch periphery of sealed member produces compressive strain to seal groove corner direction, thus makes the turning of sealed member branch be extruded to the turning of seal groove branch and be close to the turning of seal groove branch.