TW200744809A - Robotic device - Google Patents

Robotic device

Info

Publication number
TW200744809A
TW200744809A TW096104290A TW96104290A TW200744809A TW 200744809 A TW200744809 A TW 200744809A TW 096104290 A TW096104290 A TW 096104290A TW 96104290 A TW96104290 A TW 96104290A TW 200744809 A TW200744809 A TW 200744809A
Authority
TW
Taiwan
Prior art keywords
arm
section
reciprocates
coordinate position
robotic device
Prior art date
Application number
TW096104290A
Other languages
Chinese (zh)
Other versions
TWI404611B (en
Inventor
Takayuki Yazawa
Yutaka Yoshizawa
Hirokazu Watanabe
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of TW200744809A publication Critical patent/TW200744809A/en
Application granted granted Critical
Publication of TWI404611B publication Critical patent/TWI404611B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Robotics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Manipulator (AREA)
  • Numerical Control (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A robot device having an arm section and a control device. The arm section is constructed at least from a first arm and a second arm. The first arm has a work holding section for holding a workpiece and reciprocates. The second arm is connected to the first arm and reciprocates in the same direction as the first arm. The control section controls operation of the first arm in preference to the second arm to move the arm section from a start point coordinate position (P0) to a predetermined coordinate position (P).
TW096104290A 2006-02-06 2007-02-06 Robot device TWI404611B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006028293A JP4996102B2 (en) 2006-02-06 2006-02-06 Robot equipment

Publications (2)

Publication Number Publication Date
TW200744809A true TW200744809A (en) 2007-12-16
TWI404611B TWI404611B (en) 2013-08-11

Family

ID=38345103

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104290A TWI404611B (en) 2006-02-06 2007-02-06 Robot device

Country Status (5)

Country Link
JP (1) JP4996102B2 (en)
KR (1) KR101323884B1 (en)
CN (1) CN101309782B (en)
TW (1) TWI404611B (en)
WO (1) WO2007091503A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5272647B2 (en) * 2008-10-24 2013-08-28 株式会社デンソーウェーブ robot
DE102008062153A1 (en) 2008-12-17 2010-12-30 Grenzebach Maschinenbau Gmbh Method and device for rapid transport of glass plates
KR101211911B1 (en) * 2010-11-02 2012-12-13 주식회사 로보스타 Robot for reversing panels of display apparatus
CN102380868B (en) * 2011-11-09 2014-04-16 广东工业大学 Two-dimensional-translation one-dimensional-rotation three-degree-of-freedom mechanical arm
CN103600590B (en) * 2013-11-06 2016-03-16 青岛中科英泰商用系统股份有限公司 With the seal-affixing machine of inkpad supplement device and rotating mechanism
CN103617520B (en) * 2013-11-11 2016-07-06 青岛中科英泰商用系统股份有限公司 There is the seal-affixing machine of double; two guide rail mechanism, file conveying and video call function
JP5785284B2 (en) * 2014-02-17 2015-09-24 ファナック株式会社 Robot system that prevents accidents of transported objects falling
KR102189275B1 (en) * 2019-07-08 2020-12-09 세메스 주식회사 Transfer robot and transfer apparatus including the same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01252382A (en) * 1988-03-31 1989-10-09 Yokogawa Electric Corp Device for controlling robot
JP2599618B2 (en) * 1988-08-01 1997-04-09 株式会社フジタ In-tower working robot system
JP3099988B2 (en) * 1992-02-17 2000-10-16 横河電機株式会社 Robot controller
JPH0661487U (en) * 1993-01-29 1994-08-30 株式会社工研 Carrier robot
JPH08295492A (en) * 1995-04-27 1996-11-12 Tokiyoshi Kuroda Multistage expansion arm device
JPH09128026A (en) * 1995-11-06 1997-05-16 Matsushita Electric Ind Co Ltd Robot operating program conversion system and executing device therefor
JPH09323276A (en) * 1996-06-03 1997-12-16 Toyota Autom Loom Works Ltd Conveyor system and robot arm
JPH1110578A (en) * 1997-06-18 1999-01-19 Kokuho:Kk Suspension device
JP2003229466A (en) * 2002-02-04 2003-08-15 Seiko Instruments Inc Vacuum processor
JP2004165579A (en) * 2002-09-18 2004-06-10 Seiko Instruments Inc Vacuum processor
CN100342519C (en) * 2003-07-16 2007-10-10 东京毅力科创株式会社 Transport device and drive mechanism
JP5011507B2 (en) * 2007-03-14 2012-08-29 日本電産サンキョー株式会社 Robot teaching system and robot teaching method

Also Published As

Publication number Publication date
WO2007091503A1 (en) 2007-08-16
JP2007203434A (en) 2007-08-16
CN101309782B (en) 2012-01-25
CN101309782A (en) 2008-11-19
JP4996102B2 (en) 2012-08-08
KR20080089145A (en) 2008-10-06
KR101323884B1 (en) 2013-10-30
TWI404611B (en) 2013-08-11

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