TW200742620A - Compound method of cleaning surface contaminants of a substrate - Google Patents

Compound method of cleaning surface contaminants of a substrate

Info

Publication number
TW200742620A
TW200742620A TW095117041A TW95117041A TW200742620A TW 200742620 A TW200742620 A TW 200742620A TW 095117041 A TW095117041 A TW 095117041A TW 95117041 A TW95117041 A TW 95117041A TW 200742620 A TW200742620 A TW 200742620A
Authority
TW
Taiwan
Prior art keywords
substrate
compound method
providing
plasma
cleaning
Prior art date
Application number
TW095117041A
Other languages
Chinese (zh)
Other versions
TWI294313B (en
Inventor
Tzu-Chen Kuo
Sheng-Chung Yang
Original Assignee
Metal Ind Res & Dev Ct
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metal Ind Res & Dev Ct filed Critical Metal Ind Res & Dev Ct
Priority to TW095117041A priority Critical patent/TW200742620A/en
Publication of TW200742620A publication Critical patent/TW200742620A/en
Application granted granted Critical
Publication of TWI294313B publication Critical patent/TWI294313B/zh

Links

Abstract

This invention relates to a compound method of cleaning surface contaminants of a substrate, including the steps of: providing a substrate; providing a plasma supply unit, providing a CO2 flakes supply unit; spray cleaning a substrate by means of the plasma; and spray cleaning the substrate by means of the plasma and CO2 flakes. By implementing this invention, there is no need to consume a large amount of resources and energies, water resources in particular, nor will this invention causes environmental problems, but can effectively eliminates various organic contaminants and particles, so as to enhance the cleaning effect of the substrate surface.
TW095117041A 2006-05-12 2006-05-12 Compound method of cleaning surface contaminants of a substrate TW200742620A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095117041A TW200742620A (en) 2006-05-12 2006-05-12 Compound method of cleaning surface contaminants of a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095117041A TW200742620A (en) 2006-05-12 2006-05-12 Compound method of cleaning surface contaminants of a substrate

Publications (2)

Publication Number Publication Date
TW200742620A true TW200742620A (en) 2007-11-16
TWI294313B TWI294313B (en) 2008-03-11

Family

ID=45068112

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095117041A TW200742620A (en) 2006-05-12 2006-05-12 Compound method of cleaning surface contaminants of a substrate

Country Status (1)

Country Link
TW (1) TW200742620A (en)

Also Published As

Publication number Publication date
TWI294313B (en) 2008-03-11

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