TW200739282A - Method of washing photoresist and photoresist cleanser - Google Patents

Method of washing photoresist and photoresist cleanser

Info

Publication number
TW200739282A
TW200739282A TW096117632A TW96117632A TW200739282A TW 200739282 A TW200739282 A TW 200739282A TW 096117632 A TW096117632 A TW 096117632A TW 96117632 A TW96117632 A TW 96117632A TW 200739282 A TW200739282 A TW 200739282A
Authority
TW
Taiwan
Prior art keywords
photoresist
cleanser
washing
keto
great
Prior art date
Application number
TW096117632A
Other languages
Chinese (zh)
Inventor
Qiu-Jin Li
Pei-Chi Wu
Guo-Jun Su
Original Assignee
Lee Chang Yung Chemical Industry Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lee Chang Yung Chemical Industry Corp filed Critical Lee Chang Yung Chemical Industry Corp
Priority to TW096117632A priority Critical patent/TW200739282A/en
Publication of TW200739282A publication Critical patent/TW200739282A/en

Links

Abstract

This invention relates to a method of washing photoresist which uses keto-alcohol compound cleansers to contact the photoresist adhered on a substrate and to remove the photoresist therefrom. In addition, this invention also provides a photoresist cleanser containing keto-alcohol compounds and a medium capable of washing photoresist. The keto-alcohol compounds are relatively cheap and may provide a great washing effect with small amount; thus, users may choose the ingredients of the cleanser of the present invention on the basis of their needs, and the costs may therefore be reduced. Therefore, this method and cleanser of this invention may provide a great washing effect with relatively low costs, enabling its mass use in the industry.
TW096117632A 2007-05-17 2007-05-17 Method of washing photoresist and photoresist cleanser TW200739282A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096117632A TW200739282A (en) 2007-05-17 2007-05-17 Method of washing photoresist and photoresist cleanser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096117632A TW200739282A (en) 2007-05-17 2007-05-17 Method of washing photoresist and photoresist cleanser

Publications (1)

Publication Number Publication Date
TW200739282A true TW200739282A (en) 2007-10-16

Family

ID=57913834

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096117632A TW200739282A (en) 2007-05-17 2007-05-17 Method of washing photoresist and photoresist cleanser

Country Status (1)

Country Link
TW (1) TW200739282A (en)

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