TW200738530A - Automatic inter-fab transport system - Google Patents

Automatic inter-fab transport system

Info

Publication number
TW200738530A
TW200738530A TW095111774A TW95111774A TW200738530A TW 200738530 A TW200738530 A TW 200738530A TW 095111774 A TW095111774 A TW 095111774A TW 95111774 A TW95111774 A TW 95111774A TW 200738530 A TW200738530 A TW 200738530A
Authority
TW
Taiwan
Prior art keywords
fab
transport
mcs
command
inter
Prior art date
Application number
TW095111774A
Other languages
English (en)
Other versions
TWI276584B (en
Inventor
Jen-Chun Chang
Shu-Ping Tai
Original Assignee
Powerchip Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powerchip Semiconductor Corp filed Critical Powerchip Semiconductor Corp
Priority to TW95111774A priority Critical patent/TWI276584B/zh
Application granted granted Critical
Publication of TWI276584B publication Critical patent/TWI276584B/zh
Publication of TW200738530A publication Critical patent/TW200738530A/zh

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
TW95111774A 2006-04-03 2006-04-03 Automatic inter-fab transport system TWI276584B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95111774A TWI276584B (en) 2006-04-03 2006-04-03 Automatic inter-fab transport system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95111774A TWI276584B (en) 2006-04-03 2006-04-03 Automatic inter-fab transport system

Publications (2)

Publication Number Publication Date
TWI276584B TWI276584B (en) 2007-03-21
TW200738530A true TW200738530A (en) 2007-10-16

Family

ID=38646308

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95111774A TWI276584B (en) 2006-04-03 2006-04-03 Automatic inter-fab transport system

Country Status (1)

Country Link
TW (1) TWI276584B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI566316B (zh) * 2014-12-22 2017-01-11 力晶科技股份有限公司 晶圓傳送盒搬運方法、橋接儲存器、以及控制裝置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110104366A (zh) * 2019-04-23 2019-08-09 浙江精功科技股份有限公司 一种基于mes系统的机柜车间物料配送方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI566316B (zh) * 2014-12-22 2017-01-11 力晶科技股份有限公司 晶圓傳送盒搬運方法、橋接儲存器、以及控制裝置

Also Published As

Publication number Publication date
TWI276584B (en) 2007-03-21

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Legal Events

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