TW200738530A - Automatic inter-fab transport system - Google Patents
Automatic inter-fab transport systemInfo
- Publication number
- TW200738530A TW200738530A TW095111774A TW95111774A TW200738530A TW 200738530 A TW200738530 A TW 200738530A TW 095111774 A TW095111774 A TW 095111774A TW 95111774 A TW95111774 A TW 95111774A TW 200738530 A TW200738530 A TW 200738530A
- Authority
- TW
- Taiwan
- Prior art keywords
- fab
- transport
- mcs
- command
- inter
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95111774A TWI276584B (en) | 2006-04-03 | 2006-04-03 | Automatic inter-fab transport system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95111774A TWI276584B (en) | 2006-04-03 | 2006-04-03 | Automatic inter-fab transport system |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI276584B TWI276584B (en) | 2007-03-21 |
TW200738530A true TW200738530A (en) | 2007-10-16 |
Family
ID=38646308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95111774A TWI276584B (en) | 2006-04-03 | 2006-04-03 | Automatic inter-fab transport system |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI276584B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI566316B (zh) * | 2014-12-22 | 2017-01-11 | 力晶科技股份有限公司 | 晶圓傳送盒搬運方法、橋接儲存器、以及控制裝置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110104366A (zh) * | 2019-04-23 | 2019-08-09 | 浙江精功科技股份有限公司 | 一种基于mes系统的机柜车间物料配送方法 |
-
2006
- 2006-04-03 TW TW95111774A patent/TWI276584B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI566316B (zh) * | 2014-12-22 | 2017-01-11 | 力晶科技股份有限公司 | 晶圓傳送盒搬運方法、橋接儲存器、以及控制裝置 |
Also Published As
Publication number | Publication date |
---|---|
TWI276584B (en) | 2007-03-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2007107983A3 (en) | Storage and purge system for semiconductor wafers | |
TWI447058B (zh) | 天車輸送系統及其運轉方法 | |
KR101930981B1 (ko) | 처리 장치군 컨트롤러, 생산 처리 시스템, 처리 장치군 제어 방법, 생산 효율화 시스템, 생산 효율화 장치 및 생산 효율화 방법 | |
TW200605150A (en) | Automatic n2 purge system for 300mm full automation fab | |
TW200629025A (en) | A method and system for intelligent automated reticle management | |
US10991607B2 (en) | Reticle transfer system and method | |
TW200606091A (en) | Ceiling traveling vehicle system | |
WO2009033126A3 (en) | Transport system with buffering | |
KR20140102678A (ko) | 생산 효율화 시스템, 생산 효율화 장치 및 생산 효율화 방법 | |
US20160276194A1 (en) | Stocker and method for dispatching wafer carrier in stocker | |
KR101954475B1 (ko) | 생산 처리 시스템, 생산 처리의 제어 장치, 생산 처리의 제어 방법 및 생산 처리의 제어 프로그램 | |
TW200516360A (en) | Control method and system for an automated material handling system | |
US9218994B2 (en) | Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same | |
TW200707620A (en) | Distributed control sheet transfer system | |
TW200738530A (en) | Automatic inter-fab transport system | |
JP2010080904A (ja) | 自動化ウェハ一時保管システムとその制御方法 | |
JP6079510B2 (ja) | 基板処理システム、基板処理方法及び記憶媒体 | |
TW200611303A (en) | Semiconductor manufacturing equipment and semiconductor manufacturing method | |
JP2018147952A (ja) | 基板処理システムおよび基板処理装置 | |
JP6293845B2 (ja) | 生産効率化システム、生産効率化装置および生産効率化方法 | |
CN103708204A (zh) | 基于amhs系统的输送车行驶控制方法 | |
JP5024422B2 (ja) | 搬送システム | |
KR20160052337A (ko) | 기판 처리 장치 | |
JP6294427B2 (ja) | 生産処理システムおよび生産効率化方法 | |
US20100074718A1 (en) | Automatic wafer storage system and a method for controlling the system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |