TW200736536A - Ultraviolet light irradiation equipment - Google Patents

Ultraviolet light irradiation equipment

Info

Publication number
TW200736536A
TW200736536A TW096104859A TW96104859A TW200736536A TW 200736536 A TW200736536 A TW 200736536A TW 096104859 A TW096104859 A TW 096104859A TW 96104859 A TW96104859 A TW 96104859A TW 200736536 A TW200736536 A TW 200736536A
Authority
TW
Taiwan
Prior art keywords
rod lens
incident plane
ultraviolet rays
reflection mirror
plane
Prior art date
Application number
TW096104859A
Other languages
English (en)
Inventor
Hideo Inoue
Kouichi Tamai
Original Assignee
Harison Toshiba Lighting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harison Toshiba Lighting Corp filed Critical Harison Toshiba Lighting Corp
Publication of TW200736536A publication Critical patent/TW200736536A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Led Device Packages (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
TW096104859A 2006-03-03 2007-02-09 Ultraviolet light irradiation equipment TW200736536A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006057799A JP2007229682A (ja) 2006-03-03 2006-03-03 紫外線照射装置

Publications (1)

Publication Number Publication Date
TW200736536A true TW200736536A (en) 2007-10-01

Family

ID=38550804

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104859A TW200736536A (en) 2006-03-03 2007-02-09 Ultraviolet light irradiation equipment

Country Status (4)

Country Link
JP (1) JP2007229682A (zh)
KR (1) KR20070090790A (zh)
CN (1) CN101030043A (zh)
TW (1) TW200736536A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109469838A (zh) * 2017-09-07 2019-03-15 株式会社艾泰克系统 光照射装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101278425B1 (ko) * 2008-12-27 2013-06-24 에너제틱 테크놀로지 아이엔씨. 광원 장치
US10541159B2 (en) * 2016-05-26 2020-01-21 Applied Materials, Inc. Processing chamber with irradiance curing lens
CN110879199A (zh) * 2019-11-25 2020-03-13 中国科学院微电子研究所 一种极紫外光辐照致材料氢脆性能的测试系统

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109469838A (zh) * 2017-09-07 2019-03-15 株式会社艾泰克系统 光照射装置
CN109469838B (zh) * 2017-09-07 2023-11-14 株式会社艾泰克系统 光照射装置

Also Published As

Publication number Publication date
KR20070090790A (ko) 2007-09-06
CN101030043A (zh) 2007-09-05
JP2007229682A (ja) 2007-09-13

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