TW200731459A - Substrates including a capping layer on electrically conductive regions - Google Patents
Substrates including a capping layer on electrically conductive regionsInfo
- Publication number
- TW200731459A TW200731459A TW095112178A TW95112178A TW200731459A TW 200731459 A TW200731459 A TW 200731459A TW 095112178 A TW095112178 A TW 095112178A TW 95112178 A TW95112178 A TW 95112178A TW 200731459 A TW200731459 A TW 200731459A
- Authority
- TW
- Taiwan
- Prior art keywords
- capping layer
- electrically conductive
- conductive regions
- dielectric region
- substrates including
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76834—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers formation of thin insulating films on the sidewalls or on top of conductors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76826—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by contacting the layer with gases, liquids or plasmas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
- H01L21/76849—Barrier, adhesion or liner layers formed in openings in a dielectric the layer being positioned on top of the main fill metal
Abstract
A masking layer is formed on a dielectric region of an electronic device so that, during subsequent formation of a capping layer on electrically conductive regions of the electronic device that are separated by the dielectric region, the masking layer inhibits formation of capping layer material on or in the dielectric region. The capping layer can be formed selectively on the electrically conductive regions or non-selectively. Capping layer material formed over the dielectric region can subsequently be removed, thus ensuring that capping layer material is formed only on the electrically conductive regions. The capping layer can be formed using appropriate processes.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/132,841 US7749881B2 (en) | 2005-05-18 | 2005-05-18 | Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region |
US11/132,817 US7390739B2 (en) | 2005-05-18 | 2005-05-18 | Formation of a masking layer on a dielectric region to facilitate formation of a capping layer on electrically conductive regions separated by the dielectric region |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200731459A true TW200731459A (en) | 2007-08-16 |
TWI329349B TWI329349B (en) | 2010-08-21 |
Family
ID=37431723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95112178A TWI329349B (en) | 2005-05-18 | 2006-04-06 | Substrates including a capping layer on electrically conductive regions |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1905072A4 (en) |
TW (1) | TWI329349B (en) |
WO (1) | WO2006124131A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9018516B2 (en) | 2012-12-19 | 2015-04-28 | Sunpower Corporation | Solar cell with silicon oxynitride dielectric layer |
US10176984B2 (en) * | 2017-02-14 | 2019-01-08 | Lam Research Corporation | Selective deposition of silicon oxide |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6323131B1 (en) * | 1998-06-13 | 2001-11-27 | Agere Systems Guardian Corp. | Passivated copper surfaces |
US6641899B1 (en) * | 2002-11-05 | 2003-11-04 | International Business Machines Corporation | Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same |
US6911400B2 (en) * | 2002-11-05 | 2005-06-28 | International Business Machines Corporation | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same |
US7205228B2 (en) * | 2003-06-03 | 2007-04-17 | Applied Materials, Inc. | Selective metal encapsulation schemes |
US7081674B2 (en) * | 2003-06-13 | 2006-07-25 | Rensselaer Polytechnic Institute | Polyelectrolyte nanolayers as diffusion barriers in semiconductor devices |
US6860944B2 (en) * | 2003-06-16 | 2005-03-01 | Blue29 Llc | Microelectronic fabrication system components and method for processing a wafer using such components |
US7063164B2 (en) * | 2004-04-01 | 2006-06-20 | Schlumberger Technology Corporation | System and method to seal by bringing the wall of a wellbore into sealing contact with a tubing |
-
2006
- 2006-04-03 WO PCT/US2006/012098 patent/WO2006124131A2/en active Application Filing
- 2006-04-03 EP EP06740290A patent/EP1905072A4/en not_active Withdrawn
- 2006-04-06 TW TW95112178A patent/TWI329349B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI329349B (en) | 2010-08-21 |
WO2006124131A3 (en) | 2009-04-16 |
WO2006124131A2 (en) | 2006-11-23 |
EP1905072A4 (en) | 2010-11-03 |
EP1905072A2 (en) | 2008-04-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |