TW200729451A - An alignment structure - Google Patents

An alignment structure

Info

Publication number
TW200729451A
TW200729451A TW095103051A TW95103051A TW200729451A TW 200729451 A TW200729451 A TW 200729451A TW 095103051 A TW095103051 A TW 095103051A TW 95103051 A TW95103051 A TW 95103051A TW 200729451 A TW200729451 A TW 200729451A
Authority
TW
Taiwan
Prior art keywords
alignment mark
layer
disposed
alignment structure
alignment
Prior art date
Application number
TW095103051A
Other languages
Chinese (zh)
Other versions
TWI288465B (en
Inventor
Jung-Chih Kuo
Original Assignee
Nanya Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanya Technology Corp filed Critical Nanya Technology Corp
Priority to TW95103051A priority Critical patent/TWI288465B/en
Publication of TW200729451A publication Critical patent/TW200729451A/en
Application granted granted Critical
Publication of TWI288465B publication Critical patent/TWI288465B/en

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

An alignment structure is disclosed. A first layer is disposed on a substrate, and a first alignment mark is disposed on or in the first layer, wherein the first alignment mark is composed of two symmetrical and discontinuous portions. A second layer is disposed on the first layer, and covers the first alignment mark. A second alignment mark is disposed on or in the second layer, wherein the second alignment mark is composed of two symmetrical and discontinuous portions. The first alignment mark does not overlaps the second alignment mark.
TW95103051A 2006-01-26 2006-01-26 An alignment structure TWI288465B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95103051A TWI288465B (en) 2006-01-26 2006-01-26 An alignment structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95103051A TWI288465B (en) 2006-01-26 2006-01-26 An alignment structure

Publications (2)

Publication Number Publication Date
TW200729451A true TW200729451A (en) 2007-08-01
TWI288465B TWI288465B (en) 2007-10-11

Family

ID=39203027

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95103051A TWI288465B (en) 2006-01-26 2006-01-26 An alignment structure

Country Status (1)

Country Link
TW (1) TWI288465B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014134888A1 (en) * 2013-03-08 2014-09-12 京东方科技集团股份有限公司 Substrate alignment mark and manufacturing method therefor, and substrate
CN104934413A (en) * 2014-03-18 2015-09-23 中芯国际集成电路制造(上海)有限公司 Overlapping alignment mark and substrate with the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014134888A1 (en) * 2013-03-08 2014-09-12 京东方科技集团股份有限公司 Substrate alignment mark and manufacturing method therefor, and substrate
CN104934413A (en) * 2014-03-18 2015-09-23 中芯国际集成电路制造(上海)有限公司 Overlapping alignment mark and substrate with the same
CN104934413B (en) * 2014-03-18 2018-03-23 中芯国际集成电路制造(上海)有限公司 Overlapping alignment marks and the substrate with overlapping alignment mark

Also Published As

Publication number Publication date
TWI288465B (en) 2007-10-11

Similar Documents

Publication Publication Date Title
TW200714974A (en) Substrate for liquid crystal display
TW200642526A (en) Light-emitting device
TW200639889A (en) Laminated ceramic electronic component
TW200741978A (en) Stressor integration and method thereof
TW200620657A (en) Recessed semiconductor device
DE60238557D1 (en) MEDICAL DEVICES WITH MULTILINGAL CONSTRUCTION
TW200715708A (en) Electronic substrate, manufacturing method for electronic substrate, and electronic device
TW200720805A (en) Electrode structure of electrochromic device
TW200802456A (en) Electroluminescent lamp membrane switch
TW200739706A (en) Method of polishing a semiconductor-on-insulator structure
TW200708587A (en) Anisotropic conductive film and method for producing the same
TW200745800A (en) Timepiece dial and timepiece
MY151538A (en) Light-emitting device with improved electrode structures
TW200616105A (en) Integrated low-k hard mask
TW200642101A (en) Photodetector
TW200632725A (en) Key and keyboard
TW200726882A (en) Barrier panel
ATE489234T1 (en) MEDIA SHEET
TW200638499A (en) Carrying structure of electronic component
TW200624916A (en) Twin image screen
WO2008019365A3 (en) Layered image assembly
TW200730055A (en) The FPC having next door to pads can prevent a short circuit
TW200739193A (en) Liquid crystal panel
TW200624962A (en) Liquid crystal display
TWI267322B (en) Display device