TW200722544A - Method for depositing a vapour deposition material - Google Patents
Method for depositing a vapour deposition materialInfo
- Publication number
- TW200722544A TW200722544A TW095143860A TW95143860A TW200722544A TW 200722544 A TW200722544 A TW 200722544A TW 095143860 A TW095143860 A TW 095143860A TW 95143860 A TW95143860 A TW 95143860A TW 200722544 A TW200722544 A TW 200722544A
- Authority
- TW
- Taiwan
- Prior art keywords
- vapour deposition
- depositing
- batch
- deposition material
- shell
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05026703A EP1798306B1 (de) | 2005-12-07 | 2005-12-07 | Verfahren zum Abscheiden eines Aufdampfmaterials |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200722544A true TW200722544A (en) | 2007-06-16 |
Family
ID=35781199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095143860A TW200722544A (en) | 2005-12-07 | 2006-11-27 | Method for depositing a vapour deposition material |
Country Status (7)
Country | Link |
---|---|
US (1) | US8227029B2 (zh) |
EP (2) | EP1798306B1 (zh) |
JP (1) | JP2009518539A (zh) |
KR (1) | KR20080075015A (zh) |
DE (1) | DE502005004425D1 (zh) |
TW (1) | TW200722544A (zh) |
WO (1) | WO2007065685A1 (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1780816B1 (en) | 2005-11-01 | 2020-07-01 | Novaled GmbH | A method for producing an electronic device with a layer structure and an electronic device |
EP1798306B1 (de) * | 2005-12-07 | 2008-06-11 | Novaled AG | Verfahren zum Abscheiden eines Aufdampfmaterials |
TWI353677B (en) | 2006-03-21 | 2011-12-01 | Novaled Ag | Method for preparing doped organic semiconductor m |
US8490495B2 (en) * | 2010-05-05 | 2013-07-23 | Consensic, Inc. | Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same |
KR102002316B1 (ko) * | 2013-09-09 | 2019-07-22 | 주식회사 원익아이피에스 | 박막증착장치의 증발원 및 그를 가지는 박막증착장치 |
EP2887416B1 (en) | 2013-12-23 | 2018-02-21 | Novaled GmbH | N-doped semiconducting material comprising phosphine oxide matrix and metal dopant |
EP2963697B1 (en) | 2014-06-30 | 2020-09-23 | Novaled GmbH | Electrically doped organic semiconducting material and organic light emitting device comprising it |
EP3109916B1 (en) | 2015-06-23 | 2021-08-25 | Novaled GmbH | Organic light emitting device comprising polar matrix, metal dopant and silver cathode |
EP3109919B1 (en) | 2015-06-23 | 2021-06-23 | Novaled GmbH | N-doped semiconducting material comprising polar matrix and metal dopant |
EP3109915B1 (en) | 2015-06-23 | 2021-07-21 | Novaled GmbH | Organic light emitting device comprising polar matrix and metal dopant |
US20180182960A1 (en) | 2015-06-23 | 2018-06-28 | Novaled Gmbh | Organic Light Emitting Device Comprising Polar Matrix and Metal Dopant |
US10603891B2 (en) * | 2016-04-29 | 2020-03-31 | Hexcel Corporation | Additively manufactured high temperature objects |
CN108456855B (zh) * | 2017-02-17 | 2024-09-03 | 京东方科技集团股份有限公司 | 坩埚、蒸镀准备装置、蒸镀设备及蒸镀方法 |
Family Cites Families (37)
Publication number | Priority date | Publication date | Assignee | Title |
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US3644770A (en) | 1968-01-18 | 1972-02-22 | Varian Associates | Photoemitter having a p-type semiconductive substrate overlaid with cesium and n-type cesium oxide layers |
US3673011A (en) | 1970-11-02 | 1972-06-27 | Westinghouse Electric Corp | Process for producing a cesium coated gallium arsenide photocathode |
GB1419099A (en) * | 1972-08-11 | 1975-12-24 | Thorn Electrical Ind Ltd | Manufacturing electric devices having sealed envelopes |
JPS5931865A (ja) * | 1982-08-13 | 1984-02-21 | Ulvac Corp | カプセル型蒸発源 |
US5315129A (en) | 1990-08-20 | 1994-05-24 | University Of Southern California | Organic optoelectronic devices and methods |
US5093698A (en) | 1991-02-12 | 1992-03-03 | Kabushiki Kaisha Toshiba | Organic electroluminescent device |
US5811833A (en) | 1996-12-23 | 1998-09-22 | University Of So. Ca | Electron transporting and light emitting layers based on organic free radicals |
US6312836B1 (en) | 1998-04-10 | 2001-11-06 | The Trustees Of Princeton University | Color-tunable organic light emitting devices |
US6287712B1 (en) | 1998-04-10 | 2001-09-11 | The Trustees Of Princeton University | Color-tunable organic light emitting devices |
JP3370011B2 (ja) | 1998-05-19 | 2003-01-27 | 三洋電機株式会社 | 有機エレクトロルミネッセンス素子 |
US6451415B1 (en) | 1998-08-19 | 2002-09-17 | The Trustees Of Princeton University | Organic photosensitive optoelectronic device with an exciton blocking layer |
GB9826405D0 (en) | 1998-12-02 | 1999-01-27 | South Bank Univ Entpr Ltd | Method for forming films or layers |
TW465119B (en) | 1999-07-23 | 2001-11-21 | Semiconductor Energy Lab | EL display device and a method of manufacturing the same |
US7525165B2 (en) | 2000-04-17 | 2009-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and manufacturing method thereof |
TW593622B (en) | 2000-05-19 | 2004-06-21 | Eastman Kodak Co | Method of using predoped materials for making an organic light-emitting device |
DE60143776D1 (de) | 2000-12-25 | 2011-02-10 | Samsung Mobile Display Co Ltd | Organische elektrolumineszente Vorrichtung |
DE10116876B4 (de) | 2001-04-04 | 2004-09-23 | Infineon Technologies Ag | Verfahren zur Dotierung elektrisch leitfähiger organischer Verbindungen, organischer Feldeffekttransistor sowie Verfahren zu dessen Herstellung |
ITMI20010995A1 (it) | 2001-05-15 | 2002-11-15 | Getters Spa | Dispensatori di cesio e processo per il loro uso |
TWI262034B (en) | 2002-02-05 | 2006-09-11 | Semiconductor Energy Lab | Manufacturing system, manufacturing method, method of operating a manufacturing apparatus, and light emitting device |
DE10207859A1 (de) | 2002-02-20 | 2003-09-04 | Univ Dresden Tech | Dotiertes organisches Halbleitermaterial sowie Verfahren zu dessen Herstellung |
US6806491B2 (en) | 2002-04-03 | 2004-10-19 | Tsinghua University | Organic light-emitting devices |
US8932730B2 (en) | 2002-04-08 | 2015-01-13 | The University of Northern California | Doped organic carrier transport materials |
US6719936B2 (en) | 2002-08-23 | 2004-04-13 | Eastman Kodak Company | Method of making a solid compacted pellet of organic material for vacuum deposition of OLED displays |
ITMI20021904A1 (it) | 2002-09-06 | 2004-03-07 | Getters Spa | Elemento accessorio per dispensatori di metalli alcalini |
DE10262143B4 (de) | 2002-12-20 | 2011-01-20 | Ksg Leiterplatten Gmbh | Lichtemittierende Anordnung |
US20060134317A1 (en) | 2003-02-03 | 2006-06-22 | Yang Yang | Method for making multifunctional organic thin films |
US7238383B2 (en) | 2003-03-07 | 2007-07-03 | Eastman Kodak Company | Making and using compacted pellets for OLED displays |
JPWO2004082338A1 (ja) | 2003-03-13 | 2006-06-15 | 富士写真フイルム株式会社 | 有機エレクトロルミネッセンス素子及び有機エレクトロルミネッセンスディスプレイ |
US6837939B1 (en) * | 2003-07-22 | 2005-01-04 | Eastman Kodak Company | Thermal physical vapor deposition source using pellets of organic material for making OLED displays |
DE10338406A1 (de) | 2003-08-18 | 2005-03-24 | Novaled Gmbh | Dotierte organische Halbleitermaterialien sowie Verfahren zu deren Herstellung |
US7655961B2 (en) | 2003-10-02 | 2010-02-02 | Maxdem Incorporated | Organic diodes and materials |
US6818329B1 (en) | 2003-10-03 | 2004-11-16 | Eastman Kodak Company | Organic electroluminescent devices having a metal sub-layer within a hole-transporting region |
DE10347856B8 (de) | 2003-10-10 | 2006-10-19 | Colorado State University Research Foundation, Fort Collins | Halbleiterdotierung |
EP1643568A1 (de) | 2004-10-04 | 2006-04-05 | Novaled GmbH | Verfahren zum Herstellen einer Schicht aus einem dotierten Halbleitermaterial und Vorrichtung |
EP1648042B1 (en) | 2004-10-07 | 2007-05-02 | Novaled AG | A method for doping a semiconductor material with cesium |
EP1780816B1 (en) | 2005-11-01 | 2020-07-01 | Novaled GmbH | A method for producing an electronic device with a layer structure and an electronic device |
EP1798306B1 (de) * | 2005-12-07 | 2008-06-11 | Novaled AG | Verfahren zum Abscheiden eines Aufdampfmaterials |
-
2005
- 2005-12-07 EP EP05026703A patent/EP1798306B1/de not_active Expired - Fee Related
- 2005-12-07 DE DE502005004425T patent/DE502005004425D1/de active Active
- 2005-12-07 EP EP08006787.9A patent/EP1939320B1/de not_active Not-in-force
-
2006
- 2006-11-27 TW TW095143860A patent/TW200722544A/zh unknown
- 2006-12-07 KR KR1020087015985A patent/KR20080075015A/ko not_active Application Discontinuation
- 2006-12-07 JP JP2008543734A patent/JP2009518539A/ja not_active Abandoned
- 2006-12-07 WO PCT/EP2006/011775 patent/WO2007065685A1/de active Application Filing
-
2008
- 2008-06-06 US US12/134,469 patent/US8227029B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20080075015A (ko) | 2008-08-13 |
US8227029B2 (en) | 2012-07-24 |
EP1939320A2 (de) | 2008-07-02 |
US20090011582A1 (en) | 2009-01-08 |
EP1939320B1 (de) | 2013-08-21 |
EP1798306B1 (de) | 2008-06-11 |
DE502005004425D1 (de) | 2008-07-24 |
EP1939320A3 (de) | 2008-09-17 |
EP1798306A1 (de) | 2007-06-20 |
WO2007065685A1 (de) | 2007-06-14 |
JP2009518539A (ja) | 2009-05-07 |
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