TW200717602A - Large-scaled pellicle storae container for photolithography - Google Patents

Large-scaled pellicle storae container for photolithography

Info

Publication number
TW200717602A
TW200717602A TW095115042A TW95115042A TW200717602A TW 200717602 A TW200717602 A TW 200717602A TW 095115042 A TW095115042 A TW 095115042A TW 95115042 A TW95115042 A TW 95115042A TW 200717602 A TW200717602 A TW 200717602A
Authority
TW
Taiwan
Prior art keywords
pellicle
storage container
scaled
resin
container
Prior art date
Application number
TW095115042A
Other languages
Chinese (zh)
Other versions
TWI316267B (en
Inventor
Yoshihiko Nagata
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of TW200717602A publication Critical patent/TW200717602A/en
Application granted granted Critical
Publication of TWI316267B publication Critical patent/TWI316267B/en

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04D—ROOF COVERINGS; SKY-LIGHTS; GUTTERS; ROOF-WORKING TOOLS
    • E04D3/00—Roof covering by making use of flat or curved slabs or stiff sheets
    • E04D3/36—Connecting; Fastening
    • E04D3/368—Connecting; Fastening by forcing together the marginal portions of adjacent slabs or sheets

Abstract

This invention provides a storage container for a large-scaled pellicle used in photolithography. This storage container can keep the holding frame and the pellicle film of the pellicle from deformation. It can be handled and transported easily, and be reinforced with a simple structure. The storage container is used to store a large-scaled pellicle that includes a pellicle film held by a holding frame constituted by at least four sides each having over 300 mm in length. The storage container is made of resin and is characterized in that it is bonded when or after being placed onto a container reinforcing body at least a part of whose outline is larger than that of the storage container. Also, this storage container consists of a cover to store the pellicle and a tray to hold and transport the cover. Preferably, the reinforcing body includes handles for transportation. Further, it is desirable for the reinforcing body to be made of metal, resin, composite materials of resin and metal, or composite materials of resin and inorganic materials. Carbon fibers can be used as the inorganic materials, for example.
TW095115042A 2005-06-20 2006-04-27 Large-scaled pellicle strae container for photolithography TWI316267B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005179619A JP4664746B2 (en) 2005-06-20 2005-06-20 Large pellicle container for lithography

Publications (2)

Publication Number Publication Date
TW200717602A true TW200717602A (en) 2007-05-01
TWI316267B TWI316267B (en) 2009-10-21

Family

ID=37646114

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095115042A TWI316267B (en) 2005-06-20 2006-04-27 Large-scaled pellicle strae container for photolithography

Country Status (3)

Country Link
JP (1) JP4664746B2 (en)
KR (1) KR101312489B1 (en)
TW (1) TWI316267B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5797430B2 (en) * 2011-03-18 2015-10-21 株式会社Ｓｃｒｅｅｎホールディングス Substrate container
JP6589652B2 (en) * 2016-01-19 2019-10-16 大日本印刷株式会社 Case and particle measurement method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980079100A (en) * 1997-04-30 1998-11-25 윤종용 Semiconductor reticle pedestal
JP4236535B2 (en) * 2003-07-31 2009-03-11 旭化成エレクトロニクス株式会社 Large pellicle storage container
JP4176138B2 (en) * 2005-01-27 2008-11-05 旭化成エレクトロニクス株式会社 Large pellicle storage container
JP4391435B2 (en) * 2005-03-22 2009-12-24 信越化学工業株式会社 Pellicle storage container

Also Published As

Publication number Publication date
JP4664746B2 (en) 2011-04-06
TWI316267B (en) 2009-10-21
JP2006350231A (en) 2006-12-28
KR20060133452A (en) 2006-12-26
KR101312489B1 (en) 2013-10-01

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