TW200715345A - Excimer lamp - Google Patents
Excimer lampInfo
- Publication number
- TW200715345A TW200715345A TW095128852A TW95128852A TW200715345A TW 200715345 A TW200715345 A TW 200715345A TW 095128852 A TW095128852 A TW 095128852A TW 95128852 A TW95128852 A TW 95128852A TW 200715345 A TW200715345 A TW 200715345A
- Authority
- TW
- Taiwan
- Prior art keywords
- inner tube
- excimer lamp
- absorbent
- quartz glass
- lifetime
- Prior art date
Links
Landscapes
- Vessels And Coating Films For Discharge Lamps (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
To prolong the lifetime of excimer lamp by preventing UV damage cracking on the quartz glass discharge bulb of the excimer lamp. The solvent with UV absorbent is coated on the outer cylindrical surface of the quartz glass inner tube 1 of the excimer lamp. The UV absorbent coating layer is formed through drying the solvent. Then the UV absorbent is diffused into the quartz glass from the outer cylindrical surface of the inner tube by way of thermal processing at the temperature higher than 900 degree in centigrade and less than the softening temperature of the inner tube. The UV absorbent coating layer is removed by cleaning with hydrofluoric acid. The diffusing material is any one or more of Ti, Ce and Zr. The density of the diffused UV absorbent in the inner tube is higher as nearer the discharge region. Thus, preventing the UV light incident on the inner tube 1, the lifetime of the excimer lamp can be prolonged.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005231768A JP4749797B2 (en) | 2005-08-10 | 2005-08-10 | Excimer lamp |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200715345A true TW200715345A (en) | 2007-04-16 |
Family
ID=37721983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095128852A TW200715345A (en) | 2005-08-10 | 2006-08-07 | Excimer lamp |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4749797B2 (en) |
CN (1) | CN1913097B (en) |
TW (1) | TW200715345A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI407483B (en) * | 2008-02-21 | 2013-09-01 | Ushio Electric Inc | Excimer lamp |
TWI416583B (en) * | 2007-10-11 | 2013-11-21 | Ushio Electric Inc | Excimer lamp |
TWI416585B (en) * | 2007-12-29 | 2013-11-21 | Ushio Electric Inc | Excimer lamp |
TWI421902B (en) * | 2007-10-12 | 2014-01-01 | Ushio Electric Inc | Excimer lamp |
TWI423297B (en) * | 2007-10-10 | 2014-01-11 | Ushio Electric Inc | Excimer lamp |
TWI427670B (en) * | 2009-03-16 | 2014-02-21 | Ushio Electric Inc | Excimer lamp |
TWI451473B (en) * | 2008-03-14 | 2014-09-01 | Orc Mfg Co Ltd | Excimer lamp |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102373756A (en) * | 2010-08-19 | 2012-03-14 | 亨特道格拉斯建筑产品(中国)有限公司 | Method for absorbing ultraviolet and infrared rays |
JP6070794B1 (en) * | 2015-08-26 | 2017-02-01 | ウシオ電機株式会社 | Ozone generator |
US10091865B1 (en) * | 2017-11-13 | 2018-10-02 | The Boeing Company | Systems and methods for extending a lifespan of an excimer lamp |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3851202A (en) * | 1972-11-27 | 1974-11-26 | Union Carbide Corp | Method and apparatus for increasing the useful life of a quartz envelope in a high power light source |
US5557171A (en) * | 1995-06-15 | 1996-09-17 | Osram Sylvania Inc. | High intensity discharge lamp with ultra violet absorbing envelope |
JP2002157974A (en) * | 2000-09-11 | 2002-05-31 | Ushio Inc | Short arc type cadmium lamp |
JP3580233B2 (en) * | 2000-09-19 | 2004-10-20 | ウシオ電機株式会社 | Dielectric barrier discharge lamp device |
JP2002208376A (en) * | 2000-11-13 | 2002-07-26 | Toshiba Lighting & Technology Corp | Metal halide lamp and illumination device |
JP3551183B2 (en) * | 2001-04-06 | 2004-08-04 | セイコーエプソン株式会社 | Method for manufacturing semiconductor device |
JP2004172046A (en) * | 2002-11-22 | 2004-06-17 | Ushio Inc | Flash discharge lamp |
DE102004027120B4 (en) * | 2003-06-06 | 2013-01-31 | Schott Ag | Use of a UV-absorbing neutral glass, in particular for fluorescent lamps |
-
2005
- 2005-08-10 JP JP2005231768A patent/JP4749797B2/en active Active
-
2006
- 2006-08-07 TW TW095128852A patent/TW200715345A/en unknown
- 2006-08-09 CN CN200610115445XA patent/CN1913097B/en active Active
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI423297B (en) * | 2007-10-10 | 2014-01-11 | Ushio Electric Inc | Excimer lamp |
TWI416583B (en) * | 2007-10-11 | 2013-11-21 | Ushio Electric Inc | Excimer lamp |
TWI421902B (en) * | 2007-10-12 | 2014-01-01 | Ushio Electric Inc | Excimer lamp |
TWI416585B (en) * | 2007-12-29 | 2013-11-21 | Ushio Electric Inc | Excimer lamp |
TWI407483B (en) * | 2008-02-21 | 2013-09-01 | Ushio Electric Inc | Excimer lamp |
TWI451473B (en) * | 2008-03-14 | 2014-09-01 | Orc Mfg Co Ltd | Excimer lamp |
TWI427670B (en) * | 2009-03-16 | 2014-02-21 | Ushio Electric Inc | Excimer lamp |
Also Published As
Publication number | Publication date |
---|---|
CN1913097B (en) | 2010-05-12 |
CN1913097A (en) | 2007-02-14 |
JP4749797B2 (en) | 2011-08-17 |
JP2007048592A (en) | 2007-02-22 |
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