TW200715345A - Excimer lamp - Google Patents

Excimer lamp

Info

Publication number
TW200715345A
TW200715345A TW095128852A TW95128852A TW200715345A TW 200715345 A TW200715345 A TW 200715345A TW 095128852 A TW095128852 A TW 095128852A TW 95128852 A TW95128852 A TW 95128852A TW 200715345 A TW200715345 A TW 200715345A
Authority
TW
Taiwan
Prior art keywords
inner tube
excimer lamp
absorbent
quartz glass
lifetime
Prior art date
Application number
TW095128852A
Other languages
Chinese (zh)
Inventor
Nobuhiro Arai
Satoshi Kataoka
Mitsunori Hagiwara
Toshiyuki Komatsu
Original Assignee
Orc Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Mfg Co Ltd filed Critical Orc Mfg Co Ltd
Publication of TW200715345A publication Critical patent/TW200715345A/en

Links

Landscapes

  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

To prolong the lifetime of excimer lamp by preventing UV damage cracking on the quartz glass discharge bulb of the excimer lamp. The solvent with UV absorbent is coated on the outer cylindrical surface of the quartz glass inner tube 1 of the excimer lamp. The UV absorbent coating layer is formed through drying the solvent. Then the UV absorbent is diffused into the quartz glass from the outer cylindrical surface of the inner tube by way of thermal processing at the temperature higher than 900 degree in centigrade and less than the softening temperature of the inner tube. The UV absorbent coating layer is removed by cleaning with hydrofluoric acid. The diffusing material is any one or more of Ti, Ce and Zr. The density of the diffused UV absorbent in the inner tube is higher as nearer the discharge region. Thus, preventing the UV light incident on the inner tube 1, the lifetime of the excimer lamp can be prolonged.
TW095128852A 2005-08-10 2006-08-07 Excimer lamp TW200715345A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005231768A JP4749797B2 (en) 2005-08-10 2005-08-10 Excimer lamp

Publications (1)

Publication Number Publication Date
TW200715345A true TW200715345A (en) 2007-04-16

Family

ID=37721983

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095128852A TW200715345A (en) 2005-08-10 2006-08-07 Excimer lamp

Country Status (3)

Country Link
JP (1) JP4749797B2 (en)
CN (1) CN1913097B (en)
TW (1) TW200715345A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI407483B (en) * 2008-02-21 2013-09-01 Ushio Electric Inc Excimer lamp
TWI416583B (en) * 2007-10-11 2013-11-21 Ushio Electric Inc Excimer lamp
TWI416585B (en) * 2007-12-29 2013-11-21 Ushio Electric Inc Excimer lamp
TWI421902B (en) * 2007-10-12 2014-01-01 Ushio Electric Inc Excimer lamp
TWI423297B (en) * 2007-10-10 2014-01-11 Ushio Electric Inc Excimer lamp
TWI427670B (en) * 2009-03-16 2014-02-21 Ushio Electric Inc Excimer lamp
TWI451473B (en) * 2008-03-14 2014-09-01 Orc Mfg Co Ltd Excimer lamp

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102373756A (en) * 2010-08-19 2012-03-14 亨特道格拉斯建筑产品(中国)有限公司 Method for absorbing ultraviolet and infrared rays
JP6070794B1 (en) * 2015-08-26 2017-02-01 ウシオ電機株式会社 Ozone generator
US10091865B1 (en) * 2017-11-13 2018-10-02 The Boeing Company Systems and methods for extending a lifespan of an excimer lamp

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3851202A (en) * 1972-11-27 1974-11-26 Union Carbide Corp Method and apparatus for increasing the useful life of a quartz envelope in a high power light source
US5557171A (en) * 1995-06-15 1996-09-17 Osram Sylvania Inc. High intensity discharge lamp with ultra violet absorbing envelope
JP2002157974A (en) * 2000-09-11 2002-05-31 Ushio Inc Short arc type cadmium lamp
JP3580233B2 (en) * 2000-09-19 2004-10-20 ウシオ電機株式会社 Dielectric barrier discharge lamp device
JP2002208376A (en) * 2000-11-13 2002-07-26 Toshiba Lighting & Technology Corp Metal halide lamp and illumination device
JP3551183B2 (en) * 2001-04-06 2004-08-04 セイコーエプソン株式会社 Method for manufacturing semiconductor device
JP2004172046A (en) * 2002-11-22 2004-06-17 Ushio Inc Flash discharge lamp
DE102004027120B4 (en) * 2003-06-06 2013-01-31 Schott Ag Use of a UV-absorbing neutral glass, in particular for fluorescent lamps

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI423297B (en) * 2007-10-10 2014-01-11 Ushio Electric Inc Excimer lamp
TWI416583B (en) * 2007-10-11 2013-11-21 Ushio Electric Inc Excimer lamp
TWI421902B (en) * 2007-10-12 2014-01-01 Ushio Electric Inc Excimer lamp
TWI416585B (en) * 2007-12-29 2013-11-21 Ushio Electric Inc Excimer lamp
TWI407483B (en) * 2008-02-21 2013-09-01 Ushio Electric Inc Excimer lamp
TWI451473B (en) * 2008-03-14 2014-09-01 Orc Mfg Co Ltd Excimer lamp
TWI427670B (en) * 2009-03-16 2014-02-21 Ushio Electric Inc Excimer lamp

Also Published As

Publication number Publication date
CN1913097B (en) 2010-05-12
CN1913097A (en) 2007-02-14
JP4749797B2 (en) 2011-08-17
JP2007048592A (en) 2007-02-22

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