TW200710270A - Two-piece dome with separate RF coils for inductively coupled plasma reactors - Google Patents
Two-piece dome with separate RF coils for inductively coupled plasma reactorsInfo
- Publication number
- TW200710270A TW200710270A TW095128919A TW95128919A TW200710270A TW 200710270 A TW200710270 A TW 200710270A TW 095128919 A TW095128919 A TW 095128919A TW 95128919 A TW95128919 A TW 95128919A TW 200710270 A TW200710270 A TW 200710270A
- Authority
- TW
- Taiwan
- Prior art keywords
- dome
- gas
- process chamber
- coils
- separate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/202,043 US7651587B2 (en) | 2005-08-11 | 2005-08-11 | Two-piece dome with separate RF coils for inductively coupled plasma reactors |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200710270A true TW200710270A (en) | 2007-03-16 |
Family
ID=37605836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095128919A TW200710270A (en) | 2005-08-11 | 2006-08-07 | Two-piece dome with separate RF coils for inductively coupled plasma reactors |
Country Status (3)
Country | Link |
---|---|
US (1) | US7651587B2 (zh) |
TW (1) | TW200710270A (zh) |
WO (1) | WO2007021521A2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111613508A (zh) * | 2019-02-25 | 2020-09-01 | 北京北方华创微电子装备有限公司 | 进气装置及反应腔室 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7109114B2 (en) * | 2004-05-07 | 2006-09-19 | Applied Materials, Inc. | HDP-CVD seasoning process for high power HDP-CVD gapfil to improve particle performance |
CN102197714A (zh) * | 2008-10-21 | 2011-09-21 | 应用材料股份有限公司 | 清洁腔室及工艺所用的等离子体源 |
TW201123291A (en) * | 2009-09-25 | 2011-07-01 | Applied Materials Inc | Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor |
US8920599B2 (en) * | 2010-10-19 | 2014-12-30 | Applied Materials, Inc. | High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformity |
US20120152900A1 (en) * | 2010-12-20 | 2012-06-21 | Applied Materials, Inc. | Methods and apparatus for gas delivery into plasma processing chambers |
US9336996B2 (en) | 2011-02-24 | 2016-05-10 | Lam Research Corporation | Plasma processing systems including side coils and methods related to the plasma processing systems |
US9941100B2 (en) * | 2011-12-16 | 2018-04-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Adjustable nozzle for plasma deposition and a method of controlling the adjustable nozzle |
KR101383291B1 (ko) * | 2012-06-20 | 2014-04-10 | 주식회사 유진테크 | 기판 처리 장치 |
WO2014092856A1 (en) * | 2012-12-14 | 2014-06-19 | The Penn State Research Foundation | Ultra-high speed anisotropic reactive ion etching |
CN104798446B (zh) * | 2013-03-12 | 2017-09-08 | 应用材料公司 | 具有方位角与径向分布控制的多区域气体注入组件 |
KR20160021958A (ko) | 2014-08-18 | 2016-02-29 | 삼성전자주식회사 | 플라즈마 처리 장치 및 기판 처리 방법 |
CN113130285B (zh) * | 2019-12-31 | 2022-04-15 | 江苏鲁汶仪器有限公司 | 一种陶瓷进气接射频清洗装置 |
US20220307129A1 (en) * | 2021-03-23 | 2022-09-29 | Applied Materials, Inc. | Cleaning assemblies for substrate processing chambers |
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DE3378393D1 (en) | 1982-05-11 | 1988-12-08 | Nec Corp | Multilayer electrostrictive element which withstands repeated application of pulses |
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ATE115772T1 (de) | 1989-04-07 | 1994-12-15 | Mitsui Petrochemical Ind | Geschichtete keramikanordnung und verfahren zu deren herstellung. |
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US5556501A (en) * | 1989-10-03 | 1996-09-17 | Applied Materials, Inc. | Silicon scavenger in an inductively coupled RF plasma reactor |
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US6165311A (en) * | 1991-06-27 | 2000-12-26 | Applied Materials, Inc. | Inductively coupled RF plasma reactor having an overhead solenoidal antenna |
US6095083A (en) * | 1991-06-27 | 2000-08-01 | Applied Materiels, Inc. | Vacuum processing chamber having multi-mode access |
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TW303480B (en) * | 1996-01-24 | 1997-04-21 | Applied Materials Inc | Magnetically confined plasma reactor for processing a semiconductor wafer |
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US6308654B1 (en) * | 1996-10-18 | 2001-10-30 | Applied Materials, Inc. | Inductively coupled parallel-plate plasma reactor with a conical dome |
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US20060075967A1 (en) * | 2004-10-12 | 2006-04-13 | Applied Materials, Inc. | Magnetic-field concentration in inductively coupled plasma reactors |
US20060177600A1 (en) * | 2005-02-08 | 2006-08-10 | Applied Materials, Inc. | Inductive plasma system with sidewall magnet |
-
2005
- 2005-08-11 US US11/202,043 patent/US7651587B2/en not_active Expired - Fee Related
-
2006
- 2006-07-28 WO PCT/US2006/029763 patent/WO2007021521A2/en active Application Filing
- 2006-08-07 TW TW095128919A patent/TW200710270A/zh unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111613508A (zh) * | 2019-02-25 | 2020-09-01 | 北京北方华创微电子装备有限公司 | 进气装置及反应腔室 |
Also Published As
Publication number | Publication date |
---|---|
US20070037397A1 (en) | 2007-02-15 |
US7651587B2 (en) | 2010-01-26 |
WO2007021521A3 (en) | 2007-05-03 |
WO2007021521A2 (en) | 2007-02-22 |
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