TW200708900A - Exposure device - Google Patents

Exposure device

Info

Publication number
TW200708900A
TW200708900A TW094128040A TW94128040A TW200708900A TW 200708900 A TW200708900 A TW 200708900A TW 094128040 A TW094128040 A TW 094128040A TW 94128040 A TW94128040 A TW 94128040A TW 200708900 A TW200708900 A TW 200708900A
Authority
TW
Taiwan
Prior art keywords
holding plate
lower holding
exposure
chamber
board
Prior art date
Application number
TW094128040A
Other languages
English (en)
Inventor
Seiichiro Toyoda
Original Assignee
Tokai Shoji Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Shoji Co Ltd filed Critical Tokai Shoji Co Ltd
Publication of TW200708900A publication Critical patent/TW200708900A/zh

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW094128040A 2004-03-31 2005-08-17 Exposure device TW200708900A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004102849A JP4035116B2 (ja) 2004-03-31 2004-03-31 露光装置

Publications (1)

Publication Number Publication Date
TW200708900A true TW200708900A (en) 2007-03-01

Family

ID=35325221

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094128040A TW200708900A (en) 2004-03-31 2005-08-17 Exposure device

Country Status (2)

Country Link
JP (1) JP4035116B2 (zh)
TW (1) TW200708900A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007142265A (ja) * 2005-11-21 2007-06-07 Fuji Koken Kk 露光装置及び露光方法
JP5997409B1 (ja) * 2016-05-26 2016-09-28 株式会社 ベアック 両面露光装置及び両面露光装置におけるマスクとワークとの位置合わせ方法
CN113568284A (zh) * 2021-08-09 2021-10-29 深圳市鑫浩自动化技术有限公司 一种直接成像曝光装置及其内层对位方法

Also Published As

Publication number Publication date
JP4035116B2 (ja) 2008-01-16
JP2005292182A (ja) 2005-10-20

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