TW200706292A - Method for fine tuning circuit and controlling impedance with laser process - Google Patents

Abstract

A method for actively controlling he fine-tuning and impedance matching using a laser process is provided, including the use of a laser process equipment, a monitor device, and a feedback controller. The laser process equipment is for performing laser soldering or laser etching. The monitor device is for monitoring the target metrics of the target circuits. The feedback controller is for receiving the feedback from the monitor device and issuing control signals to the laser process equipment. The method includes the following steps: (a) loading the target high frequency circuit to the laser process equipment for laser process; (b) monitoring the impedance of the circuit or the transmission/reflection signals and outputting a measured value; (c) determining whether the measured value equal to target value, computing an error signal as the difference between measured value and target value; if not, sending control signals to laser process equipment according to the error signal and proceeding to step (d), otherwise, proceeding to step (e); (d) performing the laser process on the target circuit according to the control signal, returning to step (c); and (e) unloading the target high frequency circuit from the laser process equipment.