TW200702254A - Reticle pod with isolation system - Google Patents

Reticle pod with isolation system

Info

Publication number
TW200702254A
TW200702254A TW095106555A TW95106555A TW200702254A TW 200702254 A TW200702254 A TW 200702254A TW 095106555 A TW095106555 A TW 095106555A TW 95106555 A TW95106555 A TW 95106555A TW 200702254 A TW200702254 A TW 200702254A
Authority
TW
Taiwan
Prior art keywords
container
reticle
isolation system
reticle pod
primary
Prior art date
Application number
TW095106555A
Other languages
Chinese (zh)
Other versions
TWI370093B (en
Inventor
Barry Gregerson
David Halbmaier
Stephen Sumner
Brian Wiseman
Anthony Mathius Tieben
Justin Strike
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200702254A publication Critical patent/TW200702254A/en
Application granted granted Critical
Publication of TWI370093B publication Critical patent/TWI370093B/en

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.
TW095106555A 2005-02-27 2006-02-27 Reticle pod with isolation system TWI370093B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US65761605P 2005-02-27 2005-02-27
US65735505P 2005-02-27 2005-02-27
US77483406P 2006-02-18 2006-02-18

Publications (2)

Publication Number Publication Date
TW200702254A true TW200702254A (en) 2007-01-16
TWI370093B TWI370093B (en) 2012-08-11

Family

ID=55856094

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095106555A TWI370093B (en) 2005-02-27 2006-02-27 Reticle pod with isolation system

Country Status (1)

Country Link
TW (1) TWI370093B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI384322B (en) * 2008-08-07 2013-02-01 Gudeng Prec Industral Co Ltd Carrier of reticle pod and the buffer position device therein
TWI666510B (en) * 2017-01-25 2019-07-21 家登精密工業股份有限公司 Euv reticle pod
TWI687760B (en) * 2019-04-16 2020-03-11 家登精密工業股份有限公司 Mask box with spoiler structure

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634383B (en) 2017-01-26 2018-09-01 家登精密工業股份有限公司 Reticle pod

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI384322B (en) * 2008-08-07 2013-02-01 Gudeng Prec Industral Co Ltd Carrier of reticle pod and the buffer position device therein
TWI666510B (en) * 2017-01-25 2019-07-21 家登精密工業股份有限公司 Euv reticle pod
TWI687760B (en) * 2019-04-16 2020-03-11 家登精密工業股份有限公司 Mask box with spoiler structure

Also Published As

Publication number Publication date
TWI370093B (en) 2012-08-11

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