TWI370093B - Reticle pod with isolation system - Google Patents
Reticle pod with isolation systemInfo
- Publication number
- TWI370093B TWI370093B TW095106555A TW95106555A TWI370093B TW I370093 B TWI370093 B TW I370093B TW 095106555 A TW095106555 A TW 095106555A TW 95106555 A TW95106555 A TW 95106555A TW I370093 B TWI370093 B TW I370093B
- Authority
- TW
- Taiwan
- Prior art keywords
- isolation system
- reticle pod
- reticle
- pod
- isolation
- Prior art date
Links
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US65761605P | 2005-02-27 | 2005-02-27 | |
US65735505P | 2005-02-27 | 2005-02-27 | |
US77483406P | 2006-02-18 | 2006-02-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200702254A TW200702254A (en) | 2007-01-16 |
TWI370093B true TWI370093B (en) | 2012-08-11 |
Family
ID=55856094
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095106555A TWI370093B (en) | 2005-02-27 | 2006-02-27 | Reticle pod with isolation system |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI370093B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9958772B1 (en) | 2017-01-26 | 2018-05-01 | Gudeng Precision Industrial Co., Ltd. | Reticle pod |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI384322B (en) * | 2008-08-07 | 2013-02-01 | Gudeng Prec Industral Co Ltd | Carrier of reticle pod and the buffer position device therein |
CN108375872B (en) * | 2017-01-25 | 2022-04-15 | 家登精密工业股份有限公司 | Extreme ultraviolet light mask container |
TWI687760B (en) * | 2019-04-16 | 2020-03-11 | 家登精密工業股份有限公司 | Mask box with spoiler structure |
-
2006
- 2006-02-27 TW TW095106555A patent/TWI370093B/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9958772B1 (en) | 2017-01-26 | 2018-05-01 | Gudeng Precision Industrial Co., Ltd. | Reticle pod |
US10281815B2 (en) | 2017-01-26 | 2019-05-07 | Gudeng Precision Industrial Co., Ltd. | Reticle pod |
Also Published As
Publication number | Publication date |
---|---|
TW200702254A (en) | 2007-01-16 |
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