TW200638039A - Cellular micro-particle detection chip and manufacturing method thereof - Google Patents

Cellular micro-particle detection chip and manufacturing method thereof

Info

Publication number
TW200638039A
TW200638039A TW094112559A TW94112559A TW200638039A TW 200638039 A TW200638039 A TW 200638039A TW 094112559 A TW094112559 A TW 094112559A TW 94112559 A TW94112559 A TW 94112559A TW 200638039 A TW200638039 A TW 200638039A
Authority
TW
Taiwan
Prior art keywords
micro
manufacturing
detection chip
particle detection
sample fluid
Prior art date
Application number
TW094112559A
Other languages
Chinese (zh)
Other versions
TWI257480B (en
Inventor
Gwo-Bin Lee
zhen-min Zhang
Original Assignee
Univ Nat Cheng Kung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Cheng Kung filed Critical Univ Nat Cheng Kung
Priority to TW94112559A priority Critical patent/TWI257480B/en
Application granted granted Critical
Publication of TWI257480B publication Critical patent/TWI257480B/en
Publication of TW200638039A publication Critical patent/TW200638039A/en

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  • Measuring Volume Flow (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Optical Measuring Cells (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

This invention provides a cellular micro-particle detection chip and a manufacturing method thereof, suitable for classifying and counting cells in a sample fluid. The cellular micro-particle detection chip comprises a transparent plate base, a hollow micro-channel unit formed in the base and a sensing unit installed in the micro-channel unit. The height of the micro-channel unit and the sheath flow generated are used to focus cells in the sample fluid to sequentially align and flow and a photo sensing method is used to detect the number of the cells to achieve 3D focus sample fluid cell flow without the use of electric field or magnetic field. The manufacturing method comprises using lithography and etching to fabricate a mold and casting with polymer material. The manufacturing processes is a mature technique in semiconductor industry. Therefore, the manufacturing technique can increase production yield, achieve mass production, save research and development time and reduce cost.
TW94112559A 2005-04-20 2005-04-20 Cellular micro-particle detection chip and manufacturing method thereof TWI257480B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94112559A TWI257480B (en) 2005-04-20 2005-04-20 Cellular micro-particle detection chip and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94112559A TWI257480B (en) 2005-04-20 2005-04-20 Cellular micro-particle detection chip and manufacturing method thereof

Publications (2)

Publication Number Publication Date
TWI257480B TWI257480B (en) 2006-07-01
TW200638039A true TW200638039A (en) 2006-11-01

Family

ID=37764173

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94112559A TWI257480B (en) 2005-04-20 2005-04-20 Cellular micro-particle detection chip and manufacturing method thereof

Country Status (1)

Country Link
TW (1) TWI257480B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8959985B2 (en) 2012-05-07 2015-02-24 National Applied Research Laboratories Microparticle detecting apparatus
TWI498987B (en) * 2013-03-14 2015-09-01 King Yuan Electronics Co Ltd A detecting device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI391688B (en) * 2009-04-06 2013-04-01 Himax Tech Ltd Particle detection method and apparatus thereof
CN108298497A (en) * 2018-01-30 2018-07-20 中国电子科技集团公司第三十八研究所 A kind of microfluid packaging method of silicon based photon biologic sensor chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8959985B2 (en) 2012-05-07 2015-02-24 National Applied Research Laboratories Microparticle detecting apparatus
TWI498987B (en) * 2013-03-14 2015-09-01 King Yuan Electronics Co Ltd A detecting device

Also Published As

Publication number Publication date
TWI257480B (en) 2006-07-01

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