TW200636282A - Beam tracking system for scanning-probe type atomic force microscope - Google Patents
Beam tracking system for scanning-probe type atomic force microscopeInfo
- Publication number
- TW200636282A TW200636282A TW094111270A TW94111270A TW200636282A TW 200636282 A TW200636282 A TW 200636282A TW 094111270 A TW094111270 A TW 094111270A TW 94111270 A TW94111270 A TW 94111270A TW 200636282 A TW200636282 A TW 200636282A
- Authority
- TW
- Taiwan
- Prior art keywords
- probe
- scanning
- atomic force
- force microscope
- type atomic
- Prior art date
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
In a scanning-probe type atomic force microscope, the probe scans while the sample keeps stationary. False deflection of the probe due to the horizontal and vertical movement of the probe needs to be compensated. The invented beam tracking system for scanning-probe type atomic force microscope enables the focused laser spot to track an invariant point on the probe's cantilever, which is moving 3-dimensionally during scanning. While the sample is far away from the probe and induces no deflection, the laser beam reflected from the moving cantilever hits an invariant point of the photo signal detector. According to the optical path mechanism of this invention, the vertical and horizontal tracking errors are limited to < 0.3nm over 4μm scanning distance and to < 12nm over 100μm scanning distance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94111270A TWI285273B (en) | 2005-04-08 | 2005-04-08 | Beam tracking system for scanning-probe type atomic force microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94111270A TWI285273B (en) | 2005-04-08 | 2005-04-08 | Beam tracking system for scanning-probe type atomic force microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200636282A true TW200636282A (en) | 2006-10-16 |
TWI285273B TWI285273B (en) | 2007-08-11 |
Family
ID=39456674
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94111270A TWI285273B (en) | 2005-04-08 | 2005-04-08 | Beam tracking system for scanning-probe type atomic force microscope |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI285273B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7759642B2 (en) * | 2008-04-30 | 2010-07-20 | Applied Materials Israel, Ltd. | Pattern invariant focusing of a charged particle beam |
-
2005
- 2005-04-08 TW TW94111270A patent/TWI285273B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI285273B (en) | 2007-08-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |