TW200636282A - Beam tracking system for scanning-probe type atomic force microscope - Google Patents

Beam tracking system for scanning-probe type atomic force microscope

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Publication number
TW200636282A
TW200636282A TW094111270A TW94111270A TW200636282A TW 200636282 A TW200636282 A TW 200636282A TW 094111270 A TW094111270 A TW 094111270A TW 94111270 A TW94111270 A TW 94111270A TW 200636282 A TW200636282 A TW 200636282A
Authority
TW
Taiwan
Prior art keywords
probe
scanning
atomic force
force microscope
type atomic
Prior art date
Application number
TW094111270A
Other languages
Chinese (zh)
Other versions
TWI285273B (en
Inventor
Ing-Shouh Hwang
Shao-Kang Hung
Li-Chen Fu
Ming-Yen Lin
Original Assignee
Academia Sinica
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Academia Sinica filed Critical Academia Sinica
Priority to TW94111270A priority Critical patent/TWI285273B/en
Publication of TW200636282A publication Critical patent/TW200636282A/en
Application granted granted Critical
Publication of TWI285273B publication Critical patent/TWI285273B/en

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

In a scanning-probe type atomic force microscope, the probe scans while the sample keeps stationary. False deflection of the probe due to the horizontal and vertical movement of the probe needs to be compensated. The invented beam tracking system for scanning-probe type atomic force microscope enables the focused laser spot to track an invariant point on the probe's cantilever, which is moving 3-dimensionally during scanning. While the sample is far away from the probe and induces no deflection, the laser beam reflected from the moving cantilever hits an invariant point of the photo signal detector. According to the optical path mechanism of this invention, the vertical and horizontal tracking errors are limited to < 0.3nm over 4μm scanning distance and to < 12nm over 100μm scanning distance.
TW94111270A 2005-04-08 2005-04-08 Beam tracking system for scanning-probe type atomic force microscope TWI285273B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94111270A TWI285273B (en) 2005-04-08 2005-04-08 Beam tracking system for scanning-probe type atomic force microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94111270A TWI285273B (en) 2005-04-08 2005-04-08 Beam tracking system for scanning-probe type atomic force microscope

Publications (2)

Publication Number Publication Date
TW200636282A true TW200636282A (en) 2006-10-16
TWI285273B TWI285273B (en) 2007-08-11

Family

ID=39456674

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94111270A TWI285273B (en) 2005-04-08 2005-04-08 Beam tracking system for scanning-probe type atomic force microscope

Country Status (1)

Country Link
TW (1) TWI285273B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7759642B2 (en) * 2008-04-30 2010-07-20 Applied Materials Israel, Ltd. Pattern invariant focusing of a charged particle beam

Also Published As

Publication number Publication date
TWI285273B (en) 2007-08-11

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees