JP2008175651A - Near-field light probe, optical device, probe microscope, and probe microscope type read/write head device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To acquire highly-reliable measurement result with high resolution without polluting a sample. <P>SOLUTION: A probe 14 is formed to have a conical recessed shape, and on the inner surface of the probe 14, a metal film coat 30 is formed up to the tip of the probe 14 by metal deposition so that surface plasmon resonance occurs. In the probe 14, when information detection laser light 19 is focused onto the tip, plasmon resonance occurs on the surface of the metal film coat 30, and near-field light 31 is generated from the tip, and the sample 31 is irradiated with the near-field light 31. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a near-field light probe, an optical device, a probe microscope, and a probe microscope type recording / reproducing head device, and more particularly, to a near-field light probe that detects sample information of a sample using a cantilever. The present invention relates to an optical device, a probe microscope, and a probe microscope type recording / reproducing head device.

  Conventionally, a probe used in a near-field light microscope needs to form a minute opening at the tip of the probe. This is because it is necessary to form near-field light with a minute aperture smaller than the wavelength. A conventional probe has a structure in which a skeleton of a probe is formed in a weight shape with a material that transmits light, a metal film is formed on the outside of the probe, and a minute opening is formed at the tip. .

  For example, a probe having a tip and a side coated with a metal or a semimetal, and the coat has an opening formed by solid-phase diffusion at the tip, and a near-field optical microscope using a near-field probe, A near-field optical recording apparatus is known (Patent Document 1).

Further, when operating the near-field light microscope, the probe sample gap needs to be controlled to be constant, and in this case, the principle of an atomic force microscope which is a conventional technique is used. For example, there are control methods such as contact mode control, tapping mode control and shear force mode control.
JP 2001-056279 A

  However, in the near-field optical microscope described in Patent Document 1, when the probe sample gap is controlled by a conventional control method and the tip of the probe comes into contact with the sample surface, the formed microscopic aperture is destroyed or greatly increased. Therefore, there is a problem that the resolution is lowered and the reliability of the measurement result is impaired.

  In addition, when the probe comes into contact with the sample, there is a risk that a part of the metal film forming the minute opening may contaminate the sample, which is not suitable for in-line measurement in a semiconductor process.

  The present invention has been made to solve the above-described problems, and a near-field optical probe, optical apparatus, and probe that can obtain a highly reliable measurement result with high resolution without contaminating a sample. It is an object of the present invention to provide a microscope and a probe microscope type recording / reproducing head device.

  In order to achieve the above object, the near-field optical probe according to the first aspect of the present invention is such that the concavity narrowed toward the tip is formed of a light transmitting material that transmits light, and the inner surface of the concavity is coated with a metal film. And a cantilever having an end provided with the probe.

  According to the near-field light probe according to the first invention, when the cantilever probe is irradiated with laser light, plasmon resonance occurs on the surface of the metal film, and near-field light is generated from the tip of the probe. Then, the sample is measured by irradiating the sample with near-field light.

  Therefore, by coating the inner surface of the concave part of the cantilever probe with a metal film, it is possible to measure the sample with high resolution by generating near-field light, and there is no micro opening formed at the tip of the probe Since the metal film is not coated outside the probe, a highly reliable measurement result can be obtained without contaminating the sample.

  An optical device according to the second invention is configured using the near-field light probe. According to the optical device of the second invention, by coating the inner surface of the concave portion of the probe of the cantilever with a metal film, it is possible to generate a near-field light and measure the sample with high resolution. Since no minute opening is formed at the tip and the metal film is not coated outside the probe, a highly reliable measurement result can be obtained without contaminating the sample.

  According to a third aspect of the present invention, a probe microscope having a constriction narrowed toward the tip is formed of a light transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end, and A cantilever arranged so that an atomic force acts between the probe and the surface of the sample, and a laser light source for generating near-field light by irradiating the tip of the probe of the cantilever with information detection laser light An information detection optical system for detecting sample information of the sample by return light from the sample by irradiation of the near-field light to the sample, and illumination having a wavelength band other than at least the wavelength of the information detection laser beam An illumination light source for irradiating the cantilever with light is provided, and the irradiation state of the information detection laser light is observed by an optical image of the return light from the cantilever of the illumination light from the illumination light source An observation illumination optical system that is configured to include an objective lens which is provided in common to said information detection optical system and the observation illumination optical system.

  A probe microscope type recording / reproducing head device according to a fourth aspect of the invention is a probe microscope type recording / reproducing head device that records and reproduces information on a recording medium, and a constricted concavity that transmits toward the tip transmits light. A probe formed of a light transmissive material and coated with a metal film on the inner surface of the recess, and an atomic force acts between the probe and the surface of the recording medium. A cantilever disposed on the tip of the cantilever and a laser light source for generating near-field light by irradiating the tip of the probe tip of the cantilever to generate near-field light, and from the recording medium by irradiating the recording medium with the near-field light An information detection optical system for detecting the recorded information of the recording medium by the return light of the laser beam and illumination light having a wavelength band other than at least the wavelength of the information detection laser light. An observation illumination optical system for observing an irradiation state of the information detection laser light by an optical image of return light from the cantilever of illumination light from the illumination light source, and the information detection optical system, And an objective lens provided in common for the observation illumination optical system.

  According to the probe microscope according to the third invention and the probe microscope type recording / reproducing head device according to the fourth invention, the information detection laser beam is transmitted from the laser light source through the objective lens to the tip of the probe of the cantilever by the information detection optical system. , Plasmon resonance occurs on the surface of the metal film on the inner surface of the concave portion of the probe, and near-field light is generated from the tip of the probe. Then, the near-field light is irradiated onto the sample or the recording medium, the return light from the sample or the recording medium is detected through the objective lens, and the sample information of the sample or the recording information of the recording medium is detected.

  Further, the observation illumination optical system irradiates the cantilever with illumination light from the illumination light source through the objective lens, and the return light of the illumination light from the cantilever is detected through the objective lens, and the information detection laser is detected by the optical image of the return light. The light irradiation state is observed.

  Therefore, by coating the inner surface of the concave portion of the cantilever probe with a metal film, it is possible to generate a near-field light, measure the sample or the recording medium with high resolution, and detect the sample information or the recorded information. No microscopic aperture is formed at the tip of the probe, and no metal film is coated on the outside of the probe, so that highly reliable measurement results can be obtained without contaminating the sample or recording medium. Can do. Further, by using a common objective lens for the observation illumination optical system and the information detection optical system, the configuration can be simplified and the occupied space can be reduced.

  In the probe microscope according to the fifth aspect of the invention, a concave portion narrowed toward the tip is formed of a light transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end portion. And a cantilever arranged so that an atomic force acts between the probe and the surface of the sample, and a tip of the probe of the cantilever is irradiated with information detection laser light to generate near-field light. An information detection optical system that includes a laser light source and detects sample information of the sample by return light from the sample by irradiation of the sample with the near-field light; and at least a wavelength band other than the wavelength of the information detection laser light An illumination light source that irradiates the cantilever with the illumination light having, and an irradiation state of the information detection laser light by an optical image of the return light of the illumination light from the illumination light source from the cantilever An observation illumination optical system for observation and a laser light source for irradiating the cantilever with a displacement detection laser beam having a wavelength different from that of the information detection laser beam, and the displacement of the cantilever from the return light of the displacement detection laser beam from the cantilever A cantilever displacement detection optical system, and the information detection optical system, the observation illumination optical system, and an objective lens provided in common with the cantilever displacement detection optical system.

  A probe microscope type recording / reproducing head apparatus according to a sixth aspect of the invention is a probe microscope type recording / reproducing head apparatus that records and reproduces information on a recording medium, and a concavity narrowed toward the tip transmits light. A probe formed of a light transmissive material and coated with a metal film on the inner surface of the recess, and an atomic force acts between the probe and the surface of the recording medium. A cantilever disposed on the tip of the cantilever and a laser light source for generating near-field light by irradiating the tip of the probe tip of the cantilever to generate near-field light, and from the recording medium by irradiating the recording medium with the near-field light An information detection optical system for detecting the recorded information of the recording medium by the return light of the laser beam and illumination light having a wavelength band other than at least the wavelength of the information detection laser light. An observation illumination optical system for observing an irradiation state of the information detection laser light by an optical image of return light from the cantilever of illumination light from the illumination light source, and the information detection laser light. Comprises a laser light source for irradiating the cantilever with a displacement detection laser beam having a different wavelength, the displacement detection optical system for detecting the displacement of the cantilever from the return light of the displacement detection laser beam from the cantilever, and the information detection The optical system, the observation illumination optical system, and an objective lens provided in common with the displacement detection optical system of the cantilever are configured.

  According to the probe microscope according to the fifth invention and the probe microscope type recording / reproducing head device according to the sixth invention, the information detection laser beam is transmitted from the laser light source through the objective lens to the tip of the probe of the cantilever by the information detection optical system. , Plasmon resonance occurs on the surface of the metal film on the inner surface of the concave portion of the probe, and near-field light is generated from the tip of the probe. Then, the near-field light is irradiated onto the sample or the recording medium, the return light from the sample or the recording medium is detected through the objective lens, and the sample information of the sample or the recording information of the recording medium is detected.

  Also, the displacement detection optical system of the cantilever irradiates the cantilever with the displacement detection laser light from the laser light source through the objective lens, and the return light from the cantilever is detected through the objective lens to detect the displacement of the cantilever.

  Further, the observation illumination optical system irradiates the cantilever with illumination light from the illumination light source through the objective lens, and the return light of the illumination light from the cantilever is detected through the objective lens, and the information detection laser is detected by the optical image of the return light. The light irradiation state is observed.

  Therefore, by coating the inner surface of the concave portion of the cantilever probe with a metal film, it is possible to generate a near-field light, measure the sample or the recording medium with high resolution, and detect the sample information or the recorded information. No microscopic aperture is formed at the tip of the probe, and no metal film is coated on the outside of the probe, so that highly reliable measurement results can be obtained without contaminating the sample or recording medium. Can do. Further, by using a common objective lens for the observation illumination optical system, the information detection optical system, and the displacement detection optical system of the cantilever, the configuration can be simplified and the occupied space can be reduced.

  In the probe microscope according to the seventh aspect of the invention, a concave portion narrowed toward the tip is formed of a light transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end portion. In addition, a cantilever installed so that an atomic force acts between the probe and the surface of the sample, and an information detection laser beam is irradiated to the tip of the cantilever probe to generate near-field light. An information detection optical system for detecting sample information of the sample by return light from the sample by irradiation of the sample with the near-field light, and at least a wavelength band other than the wavelength of the information detection laser light An illumination light source for irradiating the cantilever with illumination light having a light source, and an illumination state of the information detection laser light by an optical image of return light from the cantilever of illumination light from the illumination light source An observation illumination optical system, an objective lens provided in common to the information detection optical system and the observation illumination optical system, an external lens system different from the objective lens, and the information detection laser light A cantilever displacement detection optical system comprising a laser light source that irradiates the cantilever with displacement detection laser beams of different wavelengths through the external lens system, and detects displacement of the cantilever from return light of the displacement detection laser light from the cantilever It is comprised including.

  A probe microscope type recording / reproducing head apparatus according to an eighth aspect of the invention is a probe microscope type recording / reproducing head apparatus that records and reproduces information on a recording medium, and a constricted concavity that transmits toward the tip transmits light. A probe formed of a light transmissive material and coated with a metal film on the inner surface of the recess, and an atomic force acts between the probe and the surface of the recording medium. And a laser light source for generating near-field light by irradiating the tip of the cantilever probe with information detection laser light, and the recording medium by irradiating the recording medium with the near-field light An information detection optical system for detecting recording information of the recording medium by return light from the light source, and illumination light having a wavelength band other than at least the wavelength of the information detection laser light. An observation illumination optical system for observing an irradiation state of the information detection laser light by an optical image of return light from the cantilever of illumination light from the illumination light source, and the information detection optical system And an objective lens provided in common to the observation illumination optical system, an external lens system different from the objective lens, and a displacement detection laser light having a wavelength different from the information detection laser light through the external lens system. A laser light source for irradiating the cantilever, and a cantilever displacement detection optical system for detecting displacement of the cantilever from return light of the displacement detection laser light from the cantilever.

  According to the probe microscope according to the seventh invention and the probe microscope type recording / reproducing head device according to the eighth invention, the information detection laser beam is transmitted from the laser light source through the objective lens to the tip of the probe of the cantilever by the information detection optical system. , Plasmon resonance occurs on the surface of the metal film on the inner surface of the concave portion of the probe, and near-field light is generated from the tip of the probe. Then, the near-field light is irradiated onto the sample or the recording medium, the return light from the sample or the recording medium is detected through the objective lens, and the sample information of the sample or the recording information of the recording medium is detected.

  Further, the cantilever displacement detection optical system irradiates the cantilever with the displacement detection laser light from the laser light source through the external lens system, and the return light from the cantilever detects the displacement of the cantilever.

  Further, the observation illumination optical system irradiates the cantilever with illumination light from the illumination light source through the objective lens, and the return light of the illumination light from the cantilever is detected through the objective lens, and the information detection laser is detected by the optical image of the return light. The light irradiation state is observed.

  Therefore, by coating the inner surface of the concave portion of the cantilever probe with a metal film, it is possible to generate a near-field light, measure the sample or the recording medium with high resolution, and detect the sample information or the recorded information. No microscopic aperture is formed at the tip of the probe, and no metal film is coated on the outside of the probe, so that highly reliable measurement results can be obtained without contaminating the sample or recording medium. Can do. Further, by using a common objective lens for the observation illumination optical system and the information detection optical system, the configuration can be simplified and the occupied space can be reduced.

  The probe microscope according to the third invention, the fifth invention, and the seventh invention, and the probe microscope type recording / reproducing head device according to the fourth invention, the sixth invention, and the eighth invention are information detection. A wavelength selection element having wavelength selectivity for directing the laser beam toward the objective lens may be further included. Thus, the information detection laser is irradiated to the tip of the cantilever probe through the wavelength selection element, and the return light from the sample or the recording medium is detected through the wavelength selection element.

  The wavelength selection element described above eliminates the light component of the wavelength of the information detection laser light from the illumination light from the illumination light source, and directs the illumination light from which the light component has been eliminated to the objective lens together with the information detection laser light. Can have.

  The probe microscope according to the fifth invention and the probe microscope type recording / reproducing head device according to the sixth invention comprise a first wavelength selection element having wavelength selectivity for directing a displacement detection laser beam toward the objective lens, and information detection A second wavelength selection element having wavelength selectivity for directing the laser light toward the objective lens may be further included. Accordingly, the displacement detection laser is irradiated to the cantilever through the first wavelength selection element, and the return light from the cantilever is detected through the first wavelength selection element. The information detection laser is irradiated to the tip of the probe of the cantilever through the second wavelength selection element, and return light from the sample or the recording medium is detected through the second wavelength selection element.

  Further, the first wavelength selection element excludes the light component having the wavelength of the displacement detection laser light from the illumination light from the illumination light source, and directs the illumination light from which the light component has been removed to the objective lens together with the displacement detection laser light. The second wavelength selection element has a wavelength selection property that eliminates the light component of the wavelength of the information detection laser light from the illumination light from the illumination light source, and the illumination light from which the light component has been excluded is the information detection laser light. In addition, it can have wavelength selectivity directed toward the objective lens.

  The wavelength selection element can be a dichroic mirror.

  Moreover, said wavelength selection element can be made into the cut filter which cuts a predetermined wavelength.

  The information detection optical system may further include a confocal optical system arranged in the optical path of the return light from the near-field light sample. Thereby, unnecessary light in the return light can be eliminated.

  The information detection optical system may further include a circularly polarized light detection optical system disposed in the optical path of the return light from the sample of near-field light. Thereby, unnecessary light in the return light can be eliminated.

  The information detection optical system may further include a linearly polarized light detection optical system arranged in the optical path of the information detection laser light.

  Moreover, the above-mentioned probe can be formed in a conical shape or a polygonal pyramid shape.

  In the above probe, the outer surface of the concave portion can be coated with a metal film except for the tip portion of the probe.

  Further, the thickness of the metal film on the inner surface of the probe can be set to 30 nm to 60 nm.

  In the cantilever probe, the inner surface of the recess is coated with a metal film so that plasmon resonance occurs. Thus, near-field light can be generated by coating the inner surface of the concave portion of the probe of the cantilever with the metal film so that plasmon resonance occurs.

  In addition, the information detection optical system further includes a spectroscope, and the spectroscope can be used to detect sample information of the sample by return light from the sample.

  As described above, according to the near-field light probe, the optical device, and the probe microscope of the present invention, the inner surface of the concave portion of the cantilever probe is coated with a metal film to generate near-field light. The sample can be measured with high resolution, and there is no minute opening at the tip of the probe, and no metal film is coated on the outside of the probe, so the sample is not contaminated and reliable. The effect that a high measurement result can be obtained is obtained.

  Further, according to the probe microscope type recording / reproducing head device of the present invention, the inner surface of the concave portion of the cantilever probe is coated with a metal film, thereby generating near-field light and measuring the recording medium with high resolution. Recording information can be detected, and there is no minute opening at the tip of the probe, and no metal film is coated on the outside of the probe, so the recording medium is not contaminated and reliable. The effect that a high measurement result can be obtained is obtained.

  Embodiments of the present invention will be described below with reference to the drawings. In the present embodiment, a case will be described in which the present invention is applied to a probe microscope that obtains sample information of a sample, for example, a surface shape.

  As shown in FIG. 1, the probe microscope 10 according to the first embodiment of the present invention is provided with a probe 14 at the tip, on which an atomic force acts between the surface of a sample 12 to be observed. The cantilever 16, the information detection optical system 18 that irradiates the information detection laser light 19 to obtain the sample information of the sample 12, the observation illumination optical system 20 that observes the irradiation state of the information detection laser light 19, and the displacement of the cantilever. Common to the cantilever displacement detection optical system 22 to be detected, the first wavelength selection element 24, the second wavelength selection element 26, the information detection optical system 18, the observation illumination optical system 20, and the cantilever displacement detection optical system 22. And an objective lens 28.

  The cantilever 16 has, for example, a one-end support configuration, and has a probe 14 at its free end (a tip opposite to the support side of the cantilever 16). Further, the cantilever 16 is disposed so that the tip of the probe 14 is in close proximity or lightly contacting the surface of the sample 12.

  The cantilever 16 is configured to bend and displace with the support end side as a fulcrum by the action of an atomic force between the tip of the probe 14 and the surface on which the sample 12 is observed. The cantilever 16 has a length of, for example, 100 μm. , Having a thickness of 400 nm to 800 nm, and having a predetermined spring constant. The cantilever 16 and the probe 14 are made of a light transmissive material, for example, SiN.

  As shown in FIG. 2, the probe 14 is formed in a concave shape narrowed toward the tip of the sample 12, for example, a conical concave shape, and gold is deposited on the inner surface of the probe 14 by metal deposition so that surface plasmon resonance occurs. A metal film coat 30 such as silver or aluminum is formed up to the tip of the probe 14. The thickness of the metal film coat 30 is preferably 30 nm to 60 nm.

  A metal film coat 30 is also deposited on the surface of the probe 14 facing the objective lens 28.

  In this probe 14, when the far-field light of the information detection laser beam 19 emitted from the information detection optical system 18 is focused on the tip of the probe 14, as shown in FIG. 3, plasmon resonance occurs on the surface of the metal film coat 30. Is propagated through the surface of the metal film coat 30 to the tip side, near-field light (near field light) 31 is generated from the tip, and the near-field light 31 is irradiated to the sample 12. The spot diameter by the near-field light 31 is not limited by the diffraction limit, and does not depend on the numerical aperture of the objective lens 28 and the wavelength of the information detection laser light 19, so that it can be a very small irradiation spot diameter.

  The information detection optical system 18 includes an information detection laser light source 32 that generates an information detection laser beam 19 having a green wavelength of, for example, 500 nm for irradiating the tip of the probe 14 of the cantilever 16, and an optical lens 36 such as a condenser lens. And a half mirror 38 and an information detection device 34 for detecting sample information by return light from the sample 12 due to irradiation of the near-field light 31 to the sample 12.

  The information detection device 34 is, for example, a photodiode, a photomultiplier tube (photomultiplier), a spectroscope depending on the mode of return light from the sample 12 introduced into the information detection device 34, the target detection signal mode, and the like. Composed of etc.

  In addition, the information detection optical system 18 is provided with unnecessary reflected light exclusion means 40 that eliminates unnecessary reflected light from, for example, the concave inner peripheral surface of the concave probe 14 to the information detection device 34, and a mirror 42 that forms an optical path. It has been.

  The unnecessary reflected light exclusion means 40 can be constituted by a confocal optical system 44, for example. The confocal optical system 44 includes a confocal lens 46 that forms a confocal point with the tip of the probe 14 and an aperture 48 disposed at the confocal position.

  The cantilever displacement detection optical system 22 detects a displacement of the cantilever 16 by a laser light source 52 that emits a displacement detection laser beam 50 having a red wavelength of 650 nm, for example, and a return light of the displacement detection laser beam 50 from the cantilever 16. A detection device 54 and an optical lens 56 such as a condenser lens are provided. The cantilever displacement detection device 54 can be configured by, for example, a two-divided photodiode, a four-divided photodiode, or a PSD.

  The observation illumination optical system 20 is an optical system for observing the irradiation state of the information detection laser light 19 on the cantilever 16 and the positional relationship between the probe 14 and the sample 12. For example, the observation illumination optical system 20 is a white light source that generates white illumination light 62. An illumination light source 60, a half mirror 66 for introducing illumination light 62 on the optical axis or paraxial axis of the objective lens 28, an observation device 64 for observing an optical image of the return light from the sample 12, and a return to the observation device 64 A mirror 68 for directing light and an optical lens 70 such as a condenser lens are provided.

  The observation device 64 includes, for example, an image sensor 72 such as a CCD camera, for example, and a monitor 74 that displays the captured optical image.

  As described above, the information detection laser beam 19 and the displacement detection laser beam 50 use, for example, laser beams having different wavelengths from green laser beam and red laser beam. On the other hand, as the illumination light source 60, It is a wavelength band over a wavelength other than the wavelength of the information detection laser light 19 and the wavelength of the displacement detection laser light 50, in this example, a wavelength band over a wavelength other than the wavelengths of green and red, and is suitable for illumination light. A white light source that emits illumination light 62 is used.

  Further, on the optical path through which both the illumination light 62 and the displacement detection laser light 50 are introduced into the objective lens 28, the first wavelength selection element 24 configured by, for example, a dichroic mirror is disposed. The first wavelength selection element 24 reflects and eliminates the light component of the wavelength of the displacement detection laser light 50 from the white illumination light 62, that is, the red light component of 650 nm in this example, and this displacement detection laser. The optical element has a wavelength selectivity that transmits light having a wavelength other than the wavelength of the light 50 and directs the illumination light 62 together with the displacement detection laser light 50 toward the objective lens 28.

  Further, a second wavelength selection element constituted by, for example, a dichroic mirror on the optical path for introducing the illumination light 62, the displacement detection laser light 50, and the information detection laser light 19 from the information detection laser light source 32 into the objective lens 28 together. 26 is arranged. The second wavelength selection element 26 reflects and excludes the wavelength light of the information detection laser light 19 from the white illumination light 62, that is, green light of 500 nm in this example, and excludes the wavelength of the information detection laser light 19 This is an optical element having a wavelength selectivity that transmits the light of the wavelength and directs the illumination light 62 to the objective lens 28 together with the information detection laser light 19.

  The probe microscope 10 is a scanning probe microscope that moves relative to the sample 12 whose surface is observed along the optical axis of the probe microscope 10, that is, along a plane perpendicular to the optical axis of the objective lens 28. The probe microscope 10 is provided with a moving stage 86 which is a mounting table for mounting the sample 12 on the upper surface, and the moving stage 86 has a z-axis direction along the optical axis direction of the probe microscope 10 described above. In a plane substantially orthogonal to this, it is configured to be movable in the x-axis and y-axis directions orthogonal to each other. The movement stage 86 is controlled to move by the control device 88.

  Next, the operation of the probe microscope 10 according to the first embodiment will be described.

  First, the illumination light 62 is applied to the cantilever 16 and the sample 12, and the displacement detection laser light 50 is applied to the cantilever 16, and the irradiation state and the like of the irradiation light 62 are reflected on the observation device 64 of the observation illumination optical system 20. Observe by. Based on the observation result, the reference position of the sample 12 is adjusted by adjusting the moving stage 86 in the x, y, and z directions, and the setting position of the cantilever 16 is adjusted as necessary.

  Then, the moving stage 86 is moved in the x and y directions, and the spot of the near-field light 31 from the tip of the probe 14 by the information detection laser light 19 from the information detection optical system 18 is scanned on the surface of the sample 12. .

  In this way, the information detection laser beam 19 by the information detection optical system 18 is reflected by the second wavelength selection element 26 through the optical lens 36 and the half mirror 38, and is applied to the tip of the probe 14 of the cantilever 16 by the objective lens 28. Focused to be focused. At this time, normal light (light propagating in the air) is not transmitted to the inner diameter d that is half or less than the wavelength λ of the information detection laser light 19 and is reflected. Only near-field light propagates from this portion to the distal end side of the probe 14. Plasmon resonance occurs on the surface of the metal film coat 30 on the inner surface of the probe 14, propagates through the surface of the metal film coat 30 to the tip side of the probe 14, and near-field light oozes out from the tip. At this time, since the tip of the probe 14 is sufficiently close to the surface of the sample 12, the near-field light 31 of this minute spot is irradiated onto the surface of the sample 12. As described above, the near-field light can provide a resolution of 10 nm or less, and the near-field light probe diameter can be realized.

  Then, the near-field light 31 irradiated on the sample 12 is modulated by, for example, optical characteristics of the surface of the sample 12, that is, reflectance and transmittance. The modulated laser light is introduced as return light into the objective lens 28, introduced into the information detection device 34 by the second wavelength selection element 26, the half mirror 38, and the mirror 42, and the sample information is obtained by the information detection device 34. Detected.

  At this time, in the probe 14, unnecessary reflected light from the region of λ >> d also follows the above-described path toward the information detection device 34, which is not in the confocal relationship by the confocal lens 46. The unnecessary reflected light is cut off by the aperture 48 at the confocal position. That is, noise is improved.

  On the other hand, at this time, the displacement detection laser light 50 from the laser light source 52 of the cantilever displacement detection optical system 22 is reflected by the first wavelength selection element 24, passes through the second wavelength selection element 26, and is cantilevered by the objective lens 28. Reflected by 16 metal film coats 30. Then, the return light due to this reflection is introduced into the cantilever displacement detection device 54. This return light changes in the angle of incidence on the cantilever displacement detection device 54 (that is, the change in spot shape) or the position in accordance with the bending of the cantilever 16, that is, the displacement. A change in the amount of incident light at each part of the photoelectric conversion occurs. Therefore, by detecting the output from these, it is possible to detect the bending of the cantilever 16 and thus the atomic force. That is, the interval between the probe 14 and the surface of the sample 12 can be detected.

  A signal for detecting this interval is input to the control device 88 of the moving stage 86, and the moving stage 86 is adjusted in the z-axis direction, so that the probe 14 and the surface of the sample 12 are always held constant with a minute gap. That is, the near-field light 31 is always applied to the surface of the sample 12 under a certain condition.

  As described above, according to the probe microscope according to the first embodiment, strong near-field light is generated by depositing a metal film coat on the inner surface of the concave portion of the probe of the cantilever so that plasmon resonance occurs. Thus, the sample information of the sample can be detected with high resolution.

  In addition, there is no minute opening formed at the tip of the probe, and no metal film is coated on the outside of the probe. Therefore, it is possible to obtain a reliable measurement result without contaminating the sample.

  Further, by using a common objective lens for the observation illumination optical system, the information detection optical system, and the cantilever displacement detection optical system, the configuration can be simplified and the occupied space can be reduced. In addition, the distance between the objective lens and the cantilever can be made sufficiently small.

  Since the dichroic mirror is provided on the optical path of the laser light emitted from the cantilever displacement detection optical system and the information detection optical system, the cantilever detection device can emit light having a wavelength of 650 nm or 500 nm with a reflectance close to 100%. It can be taken into each of the information detection devices. On the other hand, the observation illumination optical system can efficiently capture light with wavelengths other than 650 nm and 500 nm, so that the minimum observation function can be ensured and the sensitivity and accuracy of each detection system can be maintained.

  Since the outer tip of the probe is a stable light transmitting material, contamination of the sample can be prevented.

  In addition, unnecessary return light from the probe can be excluded by unnecessary reflected light exclusion means such as a confocal lens, and only near-field light can be detected. This can be eliminated and the S / N ratio can be improved, and high resolution and high accuracy can be improved.

  In addition, since the information detection from the sample is performed with a minute spot of near-field light, the resolution can be improved and the minute information on the sample can be detected.

  Also, white light suitable for illumination observation is used as illumination light, and laser light suitable for displacement detection is used as illumination light for cantilever displacement detection. Although introduced into the objective lens, the first wavelength selection element and the second wavelength selection element separate laser light for detecting sample information and laser light for detecting displacement of the cantilever. Therefore, information detection by each return light can be accurately performed.

  In the present embodiment, the case where the probe has a conical shape has been described as an example. However, as shown in FIG. 4, a probe having a polygonal pyramid shape may be provided at the tip of the cantilever. In this case, the probe having a polygonal pyramid shape is concave, and a metal film coat may be deposited on the inner surface.

  Moreover, although the case where the wavelength selection element is configured by a dichroic mirror has been described as an example, a cut filter that cuts a predetermined wavelength may be used as the wavelength selection element.

  Further, although the description has been made by taking the near-field light microscope using the near-field light probe as an example, the present invention may be applied to a near-field Raman light microscope using the near-field light probe.

  Next, a second embodiment of the present invention will be described. In addition, about the same part as 1st Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  The second embodiment differs from the first embodiment in that unnecessary reflected light is removed by using a circular polarization optical system instead of the confocal optical system.

  As shown in FIG. 5, the probe microscope 210 according to the second embodiment includes an information detection optical system 18 that irradiates an information detection laser beam 19 to obtain sample information of the sample 12, an observation illumination optical system 20, and A cantilever displacement detection optical system 22, a first wavelength selection element 24, a second wavelength selection element 26, and an objective lens 28.

  Further, in the probe microscope 210, the far-field light of the information detection laser light 19 irradiated from the information detection optical system 18 is focused on the tip of the probe 14 of the cantilever 16, and the near-field light 31 generated from this tip is applied to the sample 12. By irradiating, the sample information of the sample 12 is detected.

  The probe microscope 210 is provided with a polarization plane rotation detecting unit 240 for eliminating return light such as unnecessary reflected light. The polarization plane rotation detecting unit 240 includes a λ / 4 plate 246, a GT (Glan). -Thompson) analyzer 248, which eliminates unnecessary reflected light.

  The information detection optical system 218 is provided with a λ / 4 plate 236 and, if necessary, a λ / 2 plate 238 between the information detection laser light source 32 and the half mirror 38. For the information detection device 34, for example, a photomultiplier tube may be used.

  In the information detection optical system 218, the linearly polarized light emitted from the information detection laser light source 32 or the linearly polarized light by the λ / 2 plate 238 passes through the λ / 4 plate 236 to be converted into circularly polarized light. The

  The circularly polarized far-field light is focused on the tip of the probe 14 of the cantilever 16, the near-field light 31 is obtained from the tip, and the sample 12 is irradiated with the near-field light 31.

  In this case, when the information detection laser light 19 emitted from the information detection laser light source 32 is changed to circularly polarized light and is incident on the probe 14 of the cantilever 16, the near-field light 31 is reflected from the sample 12, and the objective lens 28, the second The light is introduced into the λ / 4 plate 246 through the wavelength selection element 26, the half mirror 38, and the mirror 42 to be linearly polarized light, and is introduced into the GT analyzer 248 using a GT polarizing plate whose polarization angle is adjusted. The

  At this time, for example, the return light of unnecessary far-field light that is reflected by the inner peripheral surface of the probe 14 or the like is also introduced into the λ / 4 plate 246 through the same optical path. The near-field light 31 of the return light and the return light of the unnecessary far-field light reflected by the inner surface of the probe 14 have different optical distances to the λ / 4 plate 246.

  This is converted into linearly polarized light by the λ / 4 plate 246, this is cut only by unnecessary reflected light by the GT analyzer 248, and the near-field light 31 is taken out, for example, by the photomultiplier tube in the information detecting device 34. Can be detected.

  In this way, unnecessary return light from, for example, the inner surface of the probe 14 is eliminated by the λ / 4 plate 246 and the GT analyzer 248, and only the near-field light is introduced into the information detection device 34 to be converted into an electrical signal. The converted output is detected as sample information.

  Next, a third embodiment of the present invention will be described. Since the configuration of the probe microscope according to the third embodiment is the same as that of the second embodiment, the same reference numerals are given and the description thereof is omitted.

  The third embodiment is different from the second embodiment in that a magnetic domain is detected from the surface of a sample as a magnetic material.

  When the magnetic domain is detected from the surface of the magnetic body, it is necessary to detect the Kerr effect. In the probe microscope according to the third embodiment, at least the surface of the target sample 12 is formed of a magnetic body. For example, a magnetization pattern, that is, a magnetic domain is formed by magneto-optical recording, and the plane of polarization is rotated by the Kerr effect according to the direction of this magnetization. The laser light thus modulated as the rotation of the polarization plane is introduced as return light into the objective lens 28, the second wavelength selection element 26, the half mirror 38, the mirror 42, and the λ / 4 plate 246, and is linearly polarized. And is introduced into the GT analyzer 248 whose polarization angle is adjusted.

  At this time, for example, the return light of unnecessary far-field light that is reflected by the inner peripheral surface of the probe 14 or the like is also introduced into the λ / 4 plate 246 through the same optical path. The near-field light 31 of the return light and the return light of the unnecessary far-field light reflected by the inner surface of the probe 14 have different optical path lengths to the λ / 4 plate 246. Both return lights that have been polarized are introduced into the GT analyzer 248 with the angles of the polarization planes being different.

  Therefore, by adjusting the polarization angle of the GT analyzer 248, only the return light of the near-field light 31 from the surface of the sample 12 can be extracted and detected by the information detection device 34.

  In this way, unnecessary return light from, for example, the inner surface of the probe 14 can be eliminated by the λ / 4 plate 246 and the GT analyzer 248, and only the light that has been subjected to magnetic domain detection is passed to the information detection device 34. The output that has been introduced and converted into an electrical signal can be taken out. That is, the magnetic information of the sample 12 from which noise due to unnecessary return light is effectively eliminated can be detected.

  In order to cut the diffracted light, a confocal optical system may be provided in the front stage of the information detection device as in the first embodiment.

  Next, a probe microscope according to the fourth embodiment of the present invention will be described. In the probe microscope according to the fourth embodiment, transmitted light, not reflected light, is measured, and an illumination optical system is provided on the opposite side of the sample (opposite side of the objective lens), which is used in each detection system. Irradiate through a cut filter that cuts the laser wavelength. When illumination is performed so that the sample passes through the objective lens, near-field light is measured, and a transmitted light image of the sample and the cantilever is observed.

  Next, a fifth embodiment of the present invention will be described. In addition, about the same part as 1st Embodiment and 2nd Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  As shown in FIG. 6, in the probe microscope 510 according to the fifth embodiment, a λ / 2 plate 238 is provided in the information detection optical system 518, and linearly polarized laser light is used as the information detection laser light 19.

  Further, an unnecessary reflected light eliminating means 40 and a polarization plane rotation detecting means 540 for eliminating unnecessary far-field reflected light for performing information detection are provided in the preceding stage of the information detecting device 34. Uses the confocal optical system 44 as in the first embodiment, and the polarization plane rotation detection means 540 omits the λ / 4 plate provided in the second embodiment, and G- Only the T analyzer 248 is arranged.

  In addition, the probe microscope 510 is provided with a cantilever displacement detection optical system 522 that is arranged so as to irradiate the displacement detection laser light to be irradiated from a position different from the optical axis of the probe microscope 510, and is irradiated from the laser light source 552. The displacement detection laser light is applied to the cantilever 16 through the objective lens 556 as an external lens system different from the objective lens 28, and the reflected light reflected by the metal film coat 30 of the cantilever 16 is introduced into the cantilever displacement detection device 554. The

  Next, a probe microscope according to a sixth embodiment of the present invention will be described. As shown in FIG. 7, in the probe microscope according to the sixth embodiment, a metal film coat 630 is deposited on the outside of the probe 14 except for the tip portion of the probe 14.

  Since other configurations are the same as the configuration of the probe microscope according to the first embodiment, description thereof is omitted.

  Next, a seventh embodiment of the present invention will be described. In the present embodiment, a case where the present invention is applied to a probe microscope type optical recording / reproducing head apparatus using a probe microscope as an optical pickup for reading a recording signal from an optical recording medium will be described as an example.

  As shown in FIG. 8, a probe microscope type optical recording / reproducing head device 710 according to the seventh embodiment includes an optical recording / reproducing head device main body 712 and a disk-type, such as a CD (Compact Disc), which is supported by rotation. An optical recording medium 714. The optical recording / reproducing head device main body 712 includes the probe microscope using the near-field light described in the first embodiment. For example, recording by the concave and convex pits on the optical recording medium 714, phase change recording, and magneto-optical recording are performed. Is read.

  Thus, according to the probe microscope type optical recording / reproducing head device according to the seventh embodiment, the inner surface of the concave portion of the probe of the cantilever is coated with the metal film so as to cause plasmon resonance, so that the near-field light is obtained. Recording information can be detected by measuring the optical recording medium with high resolution.

  In addition, since the microscopic aperture is not formed at the tip of the probe and the metal film is not coated on the outside of the probe, it is possible to obtain a reliable measurement result without contaminating the optical recording medium. it can.

  Further, by using a common objective lens for the observation illumination optical system, the information detection optical system, and the cantilever displacement detection optical system, the configuration can be simplified and the occupied space can be reduced.

  In the above embodiment, the case where the probe microscope described in the first embodiment is used as the probe microscope mounted on the optical recording / reproducing head apparatus main body has been described as an example. In addition, any of the probe microscopes according to the second to sixth embodiments described above may be used.

It is the schematic which shows the structure of the probe microscope which concerns on the 1st Embodiment of this invention. It is a perspective view showing a cantilever, a probe, and a metal film coat concerning a 1st embodiment of the present invention. It is an image figure which shows a mode that plasmon resonance occurs in the inner surface of a probe, and a near field light generate | occur | produces from the front-end | tip of a probe. It is a perspective view which shows the other shape of a probe. It is the schematic which shows the structure of the probe microscope which concerns on the 2nd Embodiment of this invention. It is the schematic which shows the structure of the probe microscope which concerns on the 5th Embodiment of this invention. It is the schematic which shows the cantilever, probe, and metal film coat which concern on the 6th Embodiment of this invention. It is the schematic which shows the structure of the probe microscope type optical recording / reproducing head apparatus based on the 7th Embodiment of this invention.

Explanation of symbols

10, 210, 510 Probe microscope 12 Sample 14 Probe 16 Cantilever 18, 218, 518 Information detection optical system 19 Information detection laser light 20 Observation illumination optical system 22, 522 Cantilever displacement detection optical system 24 First wavelength selection element 26 Second Wavelength selection element 28 Objective lens 30, 630 Metal film coat 31 Near-field light 32 Information detection laser light source 34 Information detection device 40 Unnecessary reflected light exclusion means 44 Confocal optical system 50 Displacement detection laser light 52, 552 Laser light sources 54, 554 Cantilever displacement detection device 60 Illumination light source 62 Illumination light 64 Observation device 86 Moving stage 236 λ / 4 plate 238 λ / 2 plate 240 Polarization plane rotation detection means 246 λ / 4 plate 248 GT analyzer 540 Polarization plane rotation detection means 710 Probe Microscope type optical recording / reproducing head device 712 Optical recording / reproducing Head device main body 714 an optical recording medium

Claims (27)

  A near-field optical probe including a cantilever in which a concave portion narrowed toward the tip is formed of a light-transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end.   The near-field optical probe according to claim 1, wherein the inner surface of the recess is coated with a metal film so that plasmon resonance occurs.   An optical device using the near-field light probe according to claim 1. A concave portion narrowed toward the tip is formed of a light transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end, and the probe and the surface of the sample A cantilever arranged so that an interatomic force acts between them,
A laser light source for generating near-field light by irradiating the tip of the probe of the cantilever with information detection laser light, and sample information of the sample by return light from the sample by irradiation of the sample with the near-field light An information detection optical system for detecting
An illumination light source for irradiating the cantilever with illumination light having a wavelength band other than at least the wavelength of the information detection laser light, and the information detection laser according to an optical image of the return light of the illumination light from the illumination light source from the cantilever An observation illumination optical system for observing the light irradiation state;
An objective lens provided in common for the information detection optical system and the observation illumination optical system;
Including probe microscope. A concave portion narrowed toward the tip is formed of a light transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end, and the probe and the surface of the sample A cantilever arranged so that an interatomic force acts between them,
A laser light source for generating near-field light by irradiating the tip of the probe of the cantilever with information detection laser light, and sample information of the sample by return light from the sample by irradiation of the sample with the near-field light An information detection optical system for detecting
An illumination light source for irradiating the cantilever with illumination light having a wavelength band other than at least the wavelength of the information detection laser light, and the information detection laser according to an optical image of the return light of the illumination light from the illumination light source from the cantilever An observation illumination optical system for observing the light irradiation state;
A cantilever displacement detection optical system comprising a laser light source for irradiating the cantilever with a displacement detection laser beam having a wavelength different from that of the information detection laser beam, and detecting a displacement of the cantilever from a return light of the displacement detection laser beam from the cantilever. The system,
An objective lens provided in common for the information detection optical system, the observation illumination optical system, and the displacement detection optical system of the cantilever;
Including probe microscope. A concave portion narrowed toward the tip is formed of a light transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end, and the probe and the surface of the sample A cantilever installed so that an atomic force acts between them,
A laser light source that irradiates the tip of the probe of the cantilever with information detection laser light to generate near-field light, and a sample of the sample by return light from the sample due to irradiation of the sample with the near-field light. An information detection optical system for detecting information;
An illumination light source for irradiating the cantilever with illumination light having a wavelength band other than at least the wavelength of the information detection laser light, and the information detection laser according to an optical image of the return light of the illumination light from the illumination light source from the cantilever An observation illumination optical system for observing the light irradiation state;
An objective lens provided in common for the information detection optical system and the observation illumination optical system;
An external lens system different from the objective lens; and a laser light source for irradiating the cantilever with a displacement detection laser light having a wavelength different from that of the information detection laser light through the external lens system, the cantilever of the displacement detection laser light A cantilever displacement detection optical system for detecting the displacement of the cantilever from the return light from
Including probe microscope.   The probe microscope according to claim 4, further comprising a wavelength selection element having wavelength selectivity for directing the information detection laser beam toward the objective lens.   The wavelength selection element excludes the light component having the wavelength of the information detection laser light from the illumination light from the illumination light source, and directs the illumination light from which the light component has been removed together with the information detection laser light toward the objective lens. The probe microscope according to claim 7, which has wavelength selectivity. A first wavelength selection element having a wavelength selectivity for directing the displacement detection laser light toward the objective lens;
The probe microscope according to claim 5, further comprising a second wavelength selection element having wavelength selectivity for directing the information detection laser beam toward the objective lens. The first wavelength selection element excludes the light component of the wavelength of the displacement detection laser light from the illumination light from the illumination light source, and the illumination light from which the light component is excluded together with the displacement detection laser light is the objective lens With wavelength selectivity
The second wavelength selection element excludes the light component of the wavelength of the information detection laser light from the illumination light from the illumination light source, and the illumination light from which the light component has been excluded together with the information detection laser light is the objective lens The probe microscope according to claim 9, which has a wavelength selectivity directed toward the surface.   The probe microscope according to claim 4, wherein the wavelength selection element is a dichroic mirror.   The probe microscope according to claim 4, wherein the wavelength selection element is a cut filter that cuts a predetermined wavelength.   The probe microscope according to any one of claims 4 to 6, wherein the information detection optical system further includes a confocal optical system disposed in an optical path of return light from the sample of the near-field light.   The probe microscope according to any one of claims 4 to 6, wherein the information detection optical system further includes a circularly polarized light detection optical system disposed in an optical path of return light from the sample of the near-field light.   The probe microscope according to any one of claims 4 to 6, wherein the information detection optical system further includes a linearly polarized light detection optical system disposed in an optical path of the information detection laser beam.   The probe microscope according to any one of claims 4 to 15, wherein the probe has a conical shape or a polygonal pyramid shape.   The probe microscope according to any one of claims 4 to 16, wherein the probe has an outer surface coated with a metal film except for a tip portion of the probe.   The probe microscope according to any one of claims 4 to 17, wherein a thickness of the metal film is 30 nm to 60 nm.   The probe microscope according to any one of claims 4 to 18, wherein the probe of the cantilever is coated with a metal film on the inner surface of the recess so that plasmon resonance occurs.   The probe according to any one of claims 4 to 19, wherein the information detection optical system further includes a spectroscope, and the sample information of the sample is detected by return light from the sample using the spectroscope. microscope. A probe microscope type recording / reproducing head device that performs at least one of recording and reproducing information on a recording medium,
A concave portion narrowed toward the tip is formed of a light transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end, and the probe and the surface of the recording medium A cantilever arranged so that an atomic force acts between
A laser light source for generating near-field light by irradiating the tip of the probe of the cantilever with information detection laser light, and the recording medium by return light from the recording medium due to irradiation of the recording medium with the near-field light An information detection optical system for detecting recorded information of
An illumination light source for irradiating the cantilever with illumination light having a wavelength band other than at least the wavelength of the information detection laser light, and the information detection laser according to an optical image of the return light of the illumination light from the illumination light source from the cantilever An observation illumination optical system for observing the light irradiation state;
An objective lens provided in common for the information detection optical system and the observation illumination optical system;
A probe microscope type recording / reproducing head apparatus including: A probe microscope type recording / reproducing head device that performs at least one of recording and reproducing information on a recording medium,
A concave portion narrowed toward the tip is formed of a light transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end, and the probe and the surface of the recording medium A cantilever arranged so that an atomic force acts between
A laser light source for generating near-field light by irradiating the tip of the probe of the cantilever with information detection laser light, and the recording medium by return light from the recording medium due to irradiation of the recording medium with the near-field light An information detection optical system for detecting recorded information of
An illumination light source for irradiating the cantilever with illumination light having a wavelength band other than at least the wavelength of the information detection laser light, and the information detection laser according to an optical image of the return light of the illumination light from the illumination light source from the cantilever An observation illumination optical system for observing the light irradiation state;
A cantilever displacement detection optical system comprising a laser light source for irradiating the cantilever with a displacement detection laser beam having a wavelength different from that of the information detection laser beam, and detecting a displacement of the cantilever from a return light of the displacement detection laser beam from the cantilever. The system,
An objective lens provided in common for the information detection optical system, the observation illumination optical system, and the displacement detection optical system of the cantilever;
A probe microscope type recording / reproducing head apparatus including: A probe microscope type recording / reproducing head device that performs at least one of recording and reproducing information on a recording medium,
A concave portion narrowed toward the tip is formed of a light transmitting material that transmits light, and a probe whose inner surface is coated with a metal film is provided at the end, and the probe and the surface of the recording medium A cantilever installed so that an atomic force acts between
A laser light source that irradiates the tip of the probe tip of the cantilever with information detection laser light to generate near-field light, and the recording by the return light from the recording medium due to the irradiation of the near-field light to the recording medium. An information detection optical system for detecting recording information of the medium;
An illumination light source for irradiating the cantilever with illumination light having a wavelength band other than at least the wavelength of the information detection laser light, and the information detection laser according to an optical image of the return light of the illumination light from the illumination light source from the cantilever An observation illumination optical system for observing the light irradiation state;
An objective lens provided in common for the information detection optical system and the observation illumination optical system;
An external lens system different from the objective lens; and a laser light source for irradiating the cantilever with a displacement detection laser light having a wavelength different from that of the information detection laser light through the external lens system, the cantilever of the displacement detection laser light A cantilever displacement detection optical system for detecting the displacement of the cantilever from the return light from
A probe microscope type recording / reproducing head apparatus including:   The probe microscope type recording / reproducing head device according to any one of claims 21 to 23, further comprising a wavelength selection element having wavelength selectivity for directing the information detection laser beam toward the objective lens.   The wavelength selection element excludes the light component having the wavelength of the information detection laser light from the illumination light from the illumination light source, and directs the illumination light from which the light component has been removed together with the information detection laser light toward the objective lens. The probe microscope type recording / reproducing head device according to claim 24, which has wavelength selectivity. A first wavelength selection element having a wavelength selectivity for directing the displacement detection laser light toward the objective lens;
23. The probe microscope type recording / reproducing head device according to claim 22, further comprising a second wavelength selection element having wavelength selectivity for directing the information detection laser beam toward the objective lens. The first wavelength selection element excludes the light component of the wavelength of the displacement detection laser light from the illumination light from the illumination light source, and the illumination light from which the light component is excluded together with the displacement detection laser light is the objective lens With wavelength selectivity
The second wavelength selection element excludes the light component of the wavelength of the information detection laser light from the illumination light from the illumination light source, and the illumination light from which the light component has been excluded together with the information detection laser light is the objective lens 27. The probe microscope type recording / reproducing head device according to claim 26, which has a wavelength selectivity directed to the head.

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