JPH05256641A - Cantilever displacement detector - Google Patents
Cantilever displacement detectorInfo
- Publication number
- JPH05256641A JPH05256641A JP4052615A JP5261592A JPH05256641A JP H05256641 A JPH05256641 A JP H05256641A JP 4052615 A JP4052615 A JP 4052615A JP 5261592 A JP5261592 A JP 5261592A JP H05256641 A JPH05256641 A JP H05256641A
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- light
- optical
- mirror
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/863—Atomic force probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/868—Scanning probe structure with optical means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/868—Scanning probe structure with optical means
- Y10S977/87—Optical lever arm for reflecting light
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/873—Tip holder
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/953—Detector using nanostructure
- Y10S977/954—Of radiant energy
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、原子間力顕微鏡におい
てカンチレバーの変位を検出するカンチレバー変位検出
装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cantilever displacement detecting device for detecting the displacement of a cantilever in an atomic force microscope.
【０００２】[0002]
【従来の技術】原子間力顕微鏡のカンチレバーの変位検
出系には、カンチレバーの自由端部で探針の反対側の面
に設けてあるミラーにレーザービームを照射し、カンチ
レバーの変位により生じる反射光の強度変化を干渉計を
用いて検出する干渉法や、カンチレバーの変位により生
じるミラーに対するレーザービームの入射角の変化を光
テコの原理によりビーム受光器面でのビームの変位拡大
として検出する光テコ法がある。2. Description of the Related Art A cantilever displacement detection system for an atomic force microscope uses a laser beam to irradiate a laser beam on a mirror provided on the surface of the cantilever opposite to the probe at the free end of the cantilever, and the reflected light generated by the displacement of the cantilever is detected. Interferometer that detects changes in the intensity of the beam using an interferometer, and optical levers that detect changes in the angle of incidence of the laser beam on the mirror caused by displacement of the cantilever as the displacement expansion of the beam on the beam receiver surface by the principle of optical lever. There is a law.
【０００３】光テコ法のカンチレバー変位検出装置の従
来例を図４に示す。筐体１１０に支持されているカンチ
レバー１１２は、自由端部に探針１１４を有し、その反
対側にミラー１１６を有している。試料台１２０に載置
された試料１１８は、探針１１４の近傍に対向して配置
され、ＸＹ方向すなわち試料表面に沿って移動される。
筐体１１０の内部には、ミラー１１６に向けてレーザー
ビームを射出するレーザーダイオード１２２と、ミラー
１１６からレーザービームを受ける二分割受光器１２４
とが設けられている。二分割受光器１２４は、二つの受
光領域１２４ａと１２４ｂを有し、カンチレバー１１２
が測定時の基準状態（図では水平な状態）にあるときの
ミラー１１６からのレーザービームの中心が二つの受光
領域１２４ａと１２４ｂの境界に照射されるように配置
される。二つの受光領域１２４ａと１２４ｂは受光した
光の強度に応じた電圧信号を出力し、その出力差を調べ
ることにより、ミラー１１６の傾きすなわちカンチレバ
ー１１２の変位を測定できる。FIG. 4 shows a conventional example of a cantilever displacement detecting device of the optical lever method. The cantilever 112 supported by the housing 110 has a probe 114 at its free end and a mirror 116 on the opposite side. The sample 118 placed on the sample table 120 is arranged to face the vicinity of the probe 114 and is moved in the XY directions, that is, along the sample surface.
Inside the housing 110, a laser diode 122 that emits a laser beam toward the mirror 116 and a two-divided photodetector 124 that receives the laser beam from the mirror 116.
And are provided. The two-divided light receiver 124 has two light receiving regions 124 a and 124 b,
Is arranged so that the center of the laser beam from the mirror 116 when it is in the reference state (horizontal state in the drawing) at the time of measurement is irradiated to the boundary between the two light receiving regions 124a and 124b. The two light receiving regions 124a and 124b output a voltage signal according to the intensity of the received light, and by checking the output difference, the tilt of the mirror 116, that is, the displacement of the cantilever 112 can be measured.
【０００４】光テコ法の検出感度Ｓは、二分割受光器１
２４の受光面でのビームの変位をＤ、カンチレバー１１
２の長さ（通常１００〜２００μｍ）をｌ、反射ビーム
の光路（ミラー１１６から二分割受光器１２４までの距
離）をＬ、探針１１４の変位量をΔとすると、 Ｓ＝Ｄ／Δ＝２Ｌ／ｌ となる。Ｌ＝１００ｍｍ、ｌ＝２００μｍとすると、 Ｓ＝２００／（２００×１０-3）＝１０3 となる。このように光テコ法によれば、構成が簡単でし
かも感度の高い変位検出系が得られる。The detection sensitivity S of the optical lever method is as follows:
The displacement of the beam on the light receiving surface of 24 is D, and the cantilever 11
2 length (usually 100-200 μm) 1, reflected beam
Optical path (distance from the mirror 116 to the two-divided photodetector 124)
S) is L and the displacement of the probe 114 is Δ, S = D / Δ = 2L / l. If L = 100 mm and l = 200 μm, then S = 200 / (200 × 10-3) = 103 Becomes In this way, the optical lever method is easy to configure.
A highly sensitive displacement detection system can be obtained.
【０００５】[0005]
【発明が解決しようとする課題】走査型トンネル顕微鏡
（ＳＴＭ）や原子間力顕微鏡（ＡＦＭ）は、光学顕微鏡
のサブミクロン分解能をはるかに越えた１０ｎｍ〜０．
１ｎｍの分解能を持ち、生体の細胞構造ＤＮＡや分子・
原子の配置を実像として提供できる。A scanning tunneling microscope (STM) and an atomic force microscope (AFM) have a resolution of 10 nm to 0.
It has a resolution of 1 nm, and it is a cell structure DNA and molecule of living body.
The arrangement of atoms can be provided as a real image.
【０００６】ＳＴＭやＡＦＭが利用できるようになった
初期の頃、原子配列の整った結晶体を試料に用いていた
ため、試料のどの部分であれ単に探針を近づければ良か
った。しかし、整った原子配列に上部のパターンを有す
るクラスターやＤＮＡや生体細胞膜に対してはこのよう
なわけにはいかない。しかしながら多くの場合は、光学
顕微鏡で構造は分解できないが、ほぼその存在が推定で
きることが多い。従って、ＳＴＭやＡＦＭでの測定位置
を大雑把に特定するために、ＳＴＭやＡＦＭに光学顕微
鏡を組込むことは非常に有意義である。In the early days when STM and AFM became available, a crystal body with a well-arranged atomic arrangement was used for the sample, so it was sufficient to simply bring the probe closer to any part of the sample. However, this is not the case for clusters, DNA, and biological cell membranes that have a patterned atomic arrangement with an upper pattern. However, in many cases, although the structure cannot be resolved by an optical microscope, its existence can often be estimated. Therefore, it is very meaningful to incorporate an optical microscope into the STM or AFM in order to roughly specify the measurement position in the STM or AFM.
【０００７】ＳＴＭにおいて、探針のみを光学系光路と
共存させることは既に国際公開Ｎｏ. Ｗ０８９／０１６
０３号公報に開示されている。同様にＡＦＭにおいても
特開平２−２８１１０３号公報に開示されている。この
装置では、カンチレバーの変位検出には、光学系に一体
に組合わされた臨界角合焦状態検出法を用いている。し
かし、この臨界角法は光テコ法に比べて感度が劣る。In STM, coexistence of only the probe with the optical path of the optical system has already been disclosed in International Publication No. W089 / 016.
No. 03 publication. Similarly, the AFM is also disclosed in JP-A-2-281103. In this device, the detection of the displacement of the cantilever uses the critical angle focused state detection method integrally combined with the optical system. However, this critical angle method is inferior in sensitivity to the optical lever method.
【０００８】このように、ＡＦＭのカンチレバーの変位
検出系に光テコ法を適用することが好ましい。しかし、
光テコ法では図４に示したようにレーザーダイオードと
二分割受光器をカンチレバーの上方に配置し、しかもカ
ンチレバーに入射するレーザービームの角度はあまり大
きくできない。このため、カンチレバー変位検出に光テ
コ法を適用しているＡＦＭに対して、観察光学系を組み
込む場合、その光路を確保することが難しい。言い換え
れば、観察光学系を組み込んだＡＦＭに対して光テコ法
によるカンチレバー変位検出系を設ける場合、変位検出
系の光路が観察光学系の対物レンズなどにより制約を受
けるため、最適な条件で組み込むことができないなどと
いう不都合が生じる。本発明は、光学顕微鏡を組み込ん
だ原子間力顕微鏡に適用する、光テコ法を利用した高感
度かつ小型なカンチレバー変位検出系を提供することを
目的とする。As described above, it is preferable to apply the optical lever method to the displacement detection system of the cantilever of the AFM. But,
In the optical lever method, the laser diode and the two-divided photodetector are arranged above the cantilever as shown in FIG. 4, and the angle of the laser beam incident on the cantilever cannot be made very large. For this reason, when an observation optical system is incorporated in an AFM in which the optical lever method is applied to the cantilever displacement detection, it is difficult to secure the optical path. In other words, when the cantilever displacement detection system by the optical lever method is provided for the AFM incorporating the observation optical system, the optical path of the displacement detection system is restricted by the objective lens of the observation optical system, so it should be incorporated under optimum conditions. There is an inconvenience that it is not possible. It is an object of the present invention to provide a highly sensitive and compact cantilever displacement detection system using an optical lever method, which is applied to an atomic force microscope incorporating an optical microscope.
【０００９】[0009]
【課題を解決するための手段】本発明のカンチレバー変
位検出装置は、光ビームを射出する光源と、受ける光の
強度に応じた信号を出力する二つの受光領域を備えてい
る二分割受光器とを有し、この光源と二分割受光器は、
光ビームが観察光学系の対物レンズを介してカンチレバ
ーの自由端部に設けたミラーに斜めに入射し、その反射
ビームが対物レンズを介して二分割受光器に入射するよ
うに配置されている。A cantilever displacement detecting device of the present invention includes a light source for emitting a light beam, and a two-divided light receiving device having two light receiving regions for outputting a signal according to the intensity of the received light. The light source and the two-divided receiver have
The light beam is obliquely incident on the mirror provided at the free end of the cantilever via the objective lens of the observation optical system, and the reflected beam is incident on the two-divided photodetector via the objective lens.
【００１０】[0010]
【作用】光源から射出された光ビームは観察光学系の対
物レンズに入射し偏向され、カンチレバーの自由端部に
設けてあるミラーに斜めに入射する。ミラーで反射され
た光ビームは対物レンズに入射し偏向され、二分割受光
器に入射する。このとき光ビームと二分割受光器の位置
関係は、カンチレバーが基準となる状態にあるときに、
光ビームの中心が二つの受光領域の境界に来るように予
め設定しておく。カンチレバーが上下方向に変位する
と、光ビームの中心が二つの受光領域の境界からずれ、
二つの受光領域からの出力が等しくなくなる。二つの受
光領域からの出力の差を検出することにより、カンチレ
バーの変位を検出する。The light beam emitted from the light source enters the objective lens of the observation optical system, is deflected, and obliquely enters the mirror provided at the free end of the cantilever. The light beam reflected by the mirror enters the objective lens, is deflected, and enters the two-divided photodetector. At this time, the positional relationship between the light beam and the two-divided light receiver is as follows when the cantilever is in the reference state.
It is set in advance so that the center of the light beam comes to the boundary between the two light receiving regions. When the cantilever is vertically displaced, the center of the light beam shifts from the boundary between the two light receiving regions,
The outputs from the two light receiving areas are not equal. The displacement of the cantilever is detected by detecting the difference between the outputs from the two light receiving regions.
【００１１】[0011]
【実施例】次に本発明の実施例について説明する。EXAMPLES Next, examples of the present invention will be described.
【００１２】図１は本発明の基本的な構成を模式的に示
す。無限焦点（アフォーカル）光学系の観察光学系に対
して本発明を適用したものを図１（Ａ）に示す。この光
学系では、平行光束である観察光が対物レンズ１２に入
射し、焦点Ｆに集光される。この焦点Ｆは測定時には試
料表面に合わせられる。焦点Ｆからの光は対物レンズ１
２に入射し平行光束となり、このままでは結像しない。
結像観察光学像は、図の上方において結像レンズを設
け、この平行光束を結像させることにより得られる。FIG. 1 schematically shows the basic structure of the present invention. FIG. 1A shows an application of the present invention to an observation optical system of an afocal optical system. In this optical system, the observation light, which is a parallel light beam, enters the objective lens 12 and is focused on the focal point F. This focus F is adjusted to the sample surface during measurement. The light from the focus F is the objective lens 1
It is incident on 2 and becomes a parallel light flux, and no image is formed as it is.
The imaging observation optical image is obtained by providing an imaging lens in the upper part of the figure and imaging the parallel light flux.
【００１３】レーザーダイオード１４は、そこから射出
される検出光ビームが光軸に対して角α（２〜３°）を
もって対物レンズ１２の左側に入射するように配置され
る。対物レンズ１２に入射した検出光ビームはそこで屈
折された後、カンチレバー１６の自由端部の上面に設け
たミラーに入射し反射される。カンチレバー１６のミラ
ーで反射された検出光ビームは対物レンズ１２の右側に
入射して偏向され、二分割検出器２０に入射する。二分
割受光器２０は二つの受光領域２０ａと２０ｂを有し、
各受光領域２０ａと２０ｂは入射した光の強度に比例し
た信号を出力する。カンチレバー１６が実線で示す位置
にあるとき、検出光ビームは二分割検出器２０の一方の
受光領域２０ａに多く入射し、逆にカンチレバー１６が
破線で示す位置にあるとき、検出光ビームは二分割検出
器２０の他方の検出領域２０ｂに多く入射する。このよ
うに、カンチレバー１６の位置によって二つの受光領域
２０ａと２０ｂに入射する検出光ビームの割合が変化す
るので、二つの受光領域２０ａと２０ｂから出力される
信号の差を調べることによりカンチレバー１６の位置
（変位）を検出することができる。The laser diode 14 is arranged so that the detection light beam emitted therefrom enters the left side of the objective lens 12 at an angle α (2 to 3 °) with respect to the optical axis. The detection light beam that has entered the objective lens 12 is refracted there, and then enters and is reflected by a mirror provided on the upper surface of the free end of the cantilever 16. The detection light beam reflected by the mirror of the cantilever 16 is incident on the right side of the objective lens 12, is deflected, and is incident on the two-divided detector 20. The two-divided light receiver 20 has two light receiving regions 20a and 20b,
Each of the light receiving regions 20a and 20b outputs a signal proportional to the intensity of incident light. When the cantilever 16 is in the position indicated by the solid line, the detection light beam is incident on one of the light receiving regions 20a of the two-divided detector 20 in large quantities, and when the cantilever 16 is in the position indicated by the broken line, the detection light beam is divided into two. A large amount of light is incident on the other detection region 20b of the detector 20. In this way, the ratio of the detection light beams incident on the two light receiving regions 20a and 20b changes depending on the position of the cantilever 16, and therefore the difference between the signals output from the two light receiving regions 20a and 20b is checked to determine the The position (displacement) can be detected.
【００１４】観察光学系はアフォーカル光学系である場
合、焦点Ｆからの観察光である平行光束はどの部分も試
料表面の光学情報を含んでいるので、レーザーダイオー
ド１４や二分割受光器２０で一部が遮られても、試料の
光学的観察像は若干暗くなることを除けば何ら問題はな
い。When the observation optical system is an afocal optical system, the parallel light flux as the observation light from the focal point F contains optical information of the sample surface at every portion, so that the laser diode 14 and the two-divided photodetector 20 are used. Even if a part is blocked, there is no problem except that the optically observed image of the sample becomes slightly dark.
【００１５】図１（Ｂ）は有限遠焦点光学系の観察光学
系に本発明を適用した例を示す。この例では、カンチレ
バー１６は試料面に対して傾けて配置されている。有限
遠焦点光学系であるため、焦点Ｆ（試料表面）からの観
察光はそのまま点Ｏに結像されるため、観察光の光束を
遮らないようにレーザーダイオード１４と二分割受光器
２０はその外側に配置されている。FIG. 1B shows an example in which the present invention is applied to an observation optical system of a finite far focus optical system. In this example, the cantilever 16 is tilted with respect to the sample surface. Since it is a finite focus optical system, the observation light from the focus F (sample surface) is imaged at the point O as it is, so that the laser diode 14 and the two-divided photodetector 20 do not block the light flux of the observation light. It is located outside.
【００１６】図１（Ｃ）はアフォーカル光学系の観察光
学系に本発明を適用した例を示す。レーザーダイオード
１４は、射出される検出光ビームが光軸に平行に対物レ
ンズ１２に入射するように配置されている。また、対物
レンズ１２から二分割受光器２０に至る光路の途中に、
非平行に配置した二枚のミラー２２と２４が設けてあ
る。カンチレバー１６で反射された後、対物レンズ１２
で偏向された検出光ビームは、二枚のミラー２２と２４
で二回づつ反射された後、二分割受光器２０に入射す
る。この構成によれば、二枚のミラー２２と２４で反射
される際にカンチレバー１６の変位によるビームのずれ
が増幅されるため、二分割受光器を直接配置した場合に
比べて検出感度が高くなる。FIG. 1C shows an example in which the present invention is applied to an observation optical system of an afocal optical system. The laser diode 14 is arranged so that the emitted detection light beam enters the objective lens 12 in parallel with the optical axis. Further, in the middle of the optical path from the objective lens 12 to the two-divided photodetector 20,
Two mirrors 22 and 24 arranged non-parallel are provided. After being reflected by the cantilever 16, the objective lens 12
The detection light beam deflected by is reflected by the two mirrors 22 and 24.
After being reflected twice by, the light enters the two-divided photodetector 20. According to this configuration, since the beam shift due to the displacement of the cantilever 16 is amplified when reflected by the two mirrors 22 and 24, the detection sensitivity becomes higher than that in the case where the two-divided optical receiver is directly arranged. ..
【００１７】続いて本発明のカンチレバー変位検出装置
のより具体的な実施例を図２に示す。図２（Ａ）に示す
ように、対物レンズ１２は鏡筒２６に支持されている。
対物レンズ１２の上方にはハーフミラー２８が観察光学
系の光軸に対して４５°の角度で設けられている。観察
光学系はアフォーカル光学系で、観察光の平行光束はハ
ーフミラー２８を透過して対物レンズ１２に入射し、試
料ステージ３２に載置されている試料３０の表面に集光
される。試料表面で反射された観察光は対物レンズ１２
に入射して平行光束になり、ハーフミラー２８を通過し
たのち結像される。Next, a more specific embodiment of the cantilever displacement detecting device of the present invention is shown in FIG. As shown in FIG. 2A, the objective lens 12 is supported by the lens barrel 26.
A half mirror 28 is provided above the objective lens 12 at an angle of 45 ° with respect to the optical axis of the observation optical system. The observation optical system is an afocal optical system, and the parallel light flux of the observation light is transmitted through the half mirror 28, enters the objective lens 12, and is condensed on the surface of the sample 30 mounted on the sample stage 32. The observation light reflected on the sample surface is the objective lens 12
To form a parallel light beam, which passes through the half mirror 28 to form an image.
【００１８】鏡筒２６は光学筐体３４に一体に取り付け
られていて、この光学筐体３４の内部に光テコ法の変位
検出光学系の各光学要素が配置されている。光学筐体３
４の下部には、検出光ビームであるレーザービームが上
方に射出されるようにレーザーダイオード１４が設けら
れている。レーザーダイオードから射出されたレーザー
ビームはその上方に配置されているプリズム３６に入射
して左方に偏向される。プリズム３６を出たレーザービ
ームはハーフミラー２８で反射され、対物レンズ１２の
左側の部分に入射して偏向され、光学筐体３４に取り付
けられたカンチレバー１６の自由端部の上面（探針１７
の反対側）に設けてあるミラー１８に入射する。ミラー
１８は試料３０の表面に対して１０°程度傾いているた
め、ミラー１８で反射されたレーザービームは対物レン
ズ１２の中央よりに入射する。対物レンズ１２に入射し
たレーザービームはそこで偏向された後、ハーフミラー
２８で反射され、光学筐体３４の右方下部に設けた回転
自在鏡３８に入射する。回転自在鏡３８は、球面状の側
面が光学筐体３４に摺動可能に設けられていて、レバー
４０を操作することにより反射面の方向を自由に変えら
れる。回転自在鏡３８で反射されたレーザービームは、
光学筐体３４の上を摺動可能に設けられた支持体４２に
取り付けられた二分割受光器２０に入射する。二分割受
光器２０は二つの受光領域２０ａと２０ｂを有し、上述
したように二つの受光領域からの出力の差を調べること
のよりカンチレバー１６の変位が検出できる。The lens barrel 26 is integrally attached to the optical housing 34, and the optical elements of the displacement detection optical system of the optical lever method are arranged inside the optical housing 34. Optical housing 3
A laser diode 14 is provided at the bottom of 4 so that a laser beam as a detection light beam is emitted upward. The laser beam emitted from the laser diode enters a prism 36 arranged above it and is deflected to the left. The laser beam emitted from the prism 36 is reflected by the half mirror 28, is incident on the left side portion of the objective lens 12 and is deflected, and the upper surface of the free end portion of the cantilever 16 attached to the optical housing 34 (the probe 17).
The light enters the mirror 18 provided on the opposite side). Since the mirror 18 is tilted about 10 ° with respect to the surface of the sample 30, the laser beam reflected by the mirror 18 enters from the center of the objective lens 12. The laser beam incident on the objective lens 12 is deflected there, reflected by the half mirror 28, and then incident on a rotatable mirror 38 provided on the lower right side of the optical housing 34. The rotatable mirror 38 has a spherical side surface slidably provided on the optical housing 34, and the direction of the reflecting surface can be freely changed by operating the lever 40. The laser beam reflected by the rotatable mirror 38 is
The light is incident on the two-divided photodetector 20 attached to a support body 42 slidably provided on the optical housing 34. The two-divided optical receiver 20 has two light receiving regions 20a and 20b, and the displacement of the cantilever 16 can be detected by examining the difference between the outputs from the two light receiving regions as described above.
【００１９】ところで、ＡＦＭ測定に前に、カンチレバ
ー１６が基準位置にあるときにレーザービームを垂直に
上方に反射するように回転自在鏡３８の反射面の向きが
調整され、さらに反射されたレーザービームが二分割受
光器２０の二つの受光領域の境界に入射するように二分
割受光器２０の位置が予め調整される。次にこの調整に
ついて説明する。回転自在鏡３８の調整は、図２（Ｂ）
に示すように、４５°傾いたミラー４６を内部に備える
ミラー箱４４を光学筐体３４の上に摺動可能に配置す
る。回転自在鏡３８からのレーザービームはミラー４６
で反射され、ミラー箱４４の左側に設けた摺ガラス４８
に投影される。これを見ながらレバー４０を操作して、
レーザービームの投影像が中央に来るように調整する。
レーザービームが中央に来れば、回転自在鏡３８で反射
されたレーザービームは垂直に上方に向かう。次に、ミ
ラー箱４４を取り除いた後、図２（Ａ）に示すように、
二分割受光器２０を備えている支持体４２を光学筐体３
４の上に配置し、二分割受光器２０の二つの受光領域２
０ａと２０ｂの出力が等しくなるように支持体４２の位
置を調整する。二つの受光領域２０ａと２０ｂの出力が
等しくなったとき、レーザービームの中心が二つの受光
領域２０ａと２０ｂの境界に位置し、調整は終了する。Before the AFM measurement, the direction of the reflecting surface of the rotatable mirror 38 is adjusted so that the laser beam is reflected vertically upward when the cantilever 16 is at the reference position, and the reflected laser beam is also reflected. The position of the two-divided photodetector 20 is adjusted in advance so that is incident on the boundary between the two light-receiving regions of the two-divided photodetector 20. Next, this adjustment will be described. Adjustment of the rotatable mirror 38 is shown in FIG.
As shown in FIG. 3, a mirror box 44 having a mirror 46 inclined at 45 ° inside is slidably arranged on the optical housing 34. The laser beam from the rotatable mirror 38 is reflected by the mirror 46.
And a glass slide 48 provided on the left side of the mirror box 44.
Projected on. While watching this, operate lever 40,
Adjust so that the projected image of the laser beam is centered.
When the laser beam reaches the center, the laser beam reflected by the rotatable mirror 38 goes vertically upward. Next, after removing the mirror box 44, as shown in FIG.
The support 42 including the two-divided photodetector 20 is attached to the optical housing 3
The two light receiving regions 2 of the two-divided light receiver 20 are arranged on
The position of the support 42 is adjusted so that the outputs of 0a and 20b are equal. When the outputs of the two light receiving regions 20a and 20b become equal, the center of the laser beam is located at the boundary between the two light receiving regions 20a and 20b, and the adjustment is completed.
【００２０】別の実施例を図３に示す。本実施例の装置
では、レーザーダイオード１４から垂直に射出されたレ
ーザービームを水平に偏向する反射面５２とカンチレバ
ー１６からの戻りレーザービームを二分割受光器２０に
導く反射面５４を備えているミラー体５６が光学筐体３
４の内部に設けられている。ところで、対物レンズ１２
を異なる倍率のものに交換した際、ハーフミラー２８を
介して試料３０を観察光学系で観察できるように同焦点
を得るため、対物レンズの配置位置は倍率に応じて変え
られる。例えば、高倍率のものに交換した際は、対物レ
ンズは図中の破線で示す位置に配置される。また、対物
レンズ１２の倍率を変えると、これに応じてカンチレバ
ー１６に対するレーザービームの入射角度が変化する。
レーザービームの入射角度を最適な値に保つことができ
るように、レーザーダイオード１４を取り付けた取付台
５０は水平方向に移動可能に光学筐体３４に設けられて
いる。つまり、レーザービームがカンチレバー１６に最
適な角度で入射するように、対物レンズ１２の倍率に応
じてレーザーダイオード１４の位置が調整される。Another embodiment is shown in FIG. In the apparatus of this embodiment, a mirror having a reflecting surface 52 for horizontally deflecting the laser beam emitted vertically from the laser diode 14 and a reflecting surface 54 for guiding the return laser beam from the cantilever 16 to the two-divided photodetector 20. Body 56 is optical housing 3
It is provided inside 4. By the way, the objective lens 12
When the lens is replaced with one having a different magnification, the arrangement position of the objective lens can be changed according to the magnification in order to obtain the same focal point so that the sample 30 can be observed by the observation optical system through the half mirror 28. For example, when the objective lens is replaced with a high-magnification one, the objective lens is arranged at the position shown by the broken line in the figure. When the magnification of the objective lens 12 is changed, the incident angle of the laser beam on the cantilever 16 changes accordingly.
In order to keep the incident angle of the laser beam at an optimum value, the mounting base 50 on which the laser diode 14 is mounted is provided in the optical housing 34 so as to be movable in the horizontal direction. That is, the position of the laser diode 14 is adjusted according to the magnification of the objective lens 12 so that the laser beam is incident on the cantilever 16 at an optimum angle.
【００２１】[0021]
【発明の効果】本発明のカンチレバー変位検出装置は観
察光学系の対物レンズを光学要素に含んでいるため、観
察光学系を有する原子間力顕微鏡に対しても容易に取り
付けることができる。従って、光テコ法による簡単な構
成かつ高感度なカンチレバー変位検出系を備えた光学顕
微鏡一体型原子間力顕微鏡が提供されるようになる。Since the cantilever displacement detection device of the present invention includes the objective lens of the observation optical system as an optical element, it can be easily attached to an atomic force microscope having an observation optical system. Therefore, an atomic force microscope integrated with an optical microscope can be provided which has a simple structure by the optical lever method and a highly sensitive cantilever displacement detection system.
【図１】本発明のカンチレバー変位検出装置の基本的構
成を模式的に示す。FIG. 1 schematically shows a basic configuration of a cantilever displacement detection device of the present invention.
【図２】本発明のカンチレバー変位検出装置の具体的な
実施例を示す。FIG. 2 shows a concrete example of the cantilever displacement detection device of the present invention.
【図３】本発明のカンチレバー変位検出装置の別の実施
例を示す。FIG. 3 shows another embodiment of the cantilever displacement detection device of the present invention.
【図４】光テコ法によるカンチレバー変位検出装置の基
本的な構成を示す。FIG. 4 shows a basic configuration of a cantilever displacement detection device by an optical lever method.
１２…対物レンズ、１４…レーザーダイオード、１６…
カンチレバー、２０…二分割受光器。12 ... Objective lens, 14 ... Laser diode, 16 ...
Cantilever, 20 ... Divided light receiver.
Claims (1)
のカンチレバー変位検出装置であって、光ビームを射出
する光源と、受ける光の強度に応じた信号を出力する二
つの受光領域を備えている二分割受光器とを有し、この
光源と二分割受光器は、光ビームが観察光学系の対物レ
ンズを介してカンチレバーの自由端部に設けたミラーに
斜めに入射し、その反射ビームが対物レンズを介して二
分割受光器に入射するように配置されているカンチレバ
ー変位検出装置。1. A cantilever displacement detector for an atomic force microscope equipped with an observation optical system, comprising a light source for emitting a light beam and two light receiving regions for outputting a signal according to the intensity of the received light. The light source and the two-divided light receiver have a light beam that is obliquely incident on a mirror provided at the free end of the cantilever through the objective lens of the observation optical system, and its reflected beam. Is a cantilever displacement detection device arranged so that the light enters the two-divided photodetector through the objective lens.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4052615A JPH05256641A (en) | 1992-03-11 | 1992-03-11 | Cantilever displacement detector |
| US08/026,989 US5294804A (en) | 1992-03-11 | 1993-03-05 | Cantilever displacement detection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4052615A JPH05256641A (en) | 1992-03-11 | 1992-03-11 | Cantilever displacement detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05256641A true JPH05256641A (en) | 1993-10-05 |
Family
ID=12919708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4052615A Pending JPH05256641A (en) | 1992-03-11 | 1992-03-11 | Cantilever displacement detector |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US5294804A (en) |
| JP (1) | JPH05256641A (en) |
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-
1992
- 1992-03-11 JP JP4052615A patent/JPH05256641A/en active Pending
-
1993
- 1993-03-05 US US08/026,989 patent/US5294804A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US5294804A (en) | 1994-03-15 |
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